JPH04103145A - Component inspecting device - Google Patents

Component inspecting device

Info

Publication number
JPH04103145A
JPH04103145A JP22223690A JP22223690A JPH04103145A JP H04103145 A JPH04103145 A JP H04103145A JP 22223690 A JP22223690 A JP 22223690A JP 22223690 A JP22223690 A JP 22223690A JP H04103145 A JPH04103145 A JP H04103145A
Authority
JP
Japan
Prior art keywords
light
plate
inspection
component
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22223690A
Other languages
Japanese (ja)
Other versions
JP2946688B2 (en
Inventor
Masahiro Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP22223690A priority Critical patent/JP2946688B2/en
Publication of JPH04103145A publication Critical patent/JPH04103145A/en
Application granted granted Critical
Publication of JP2946688B2 publication Critical patent/JP2946688B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to realize a high-accuracy and high-efficiency inspection of a component to be inspected without needing an accurate positioning and without needing labor by a method wherein inspection light is projected through the incident surface on the outer periphery of a transparent plate and while being repeated a total reflection in the support plate, the light is made to travel and the component to be inspected is observed via the support plate.
CONSTITUTION: A component 1 which is an object to be inspected is placed on a support surface 15 of a transparent support plate 11 covered with a liquid film 24 and thereafter, a light source 12 and an imaging device 13 are actuated and an inspection of leads 2 is executed. Inspection light C emitted from the light source 12 is made to fall on the plate 11 and thereafter, while being totally reflected in the plate 11, the light C is made to proceed. When the light C strikes on parts, which come into contact to the surface 15 or the film 24, of the leads 2, the light C is irregularly reflected at the contact parts and the state of total reflection is disarranged. As a result, irregularly reflected light (d) is made to pass through the lower surface of the plate 11 and is made to travel in the direction of the device 13. The light (d) is observed by the device 13 and the complete images of the leads (2) are formed.
COPYRIGHT: (C)1992,JPO&Japio
JP22223690A 1990-08-22 1990-08-22 Parts inspection equipment Expired - Fee Related JP2946688B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22223690A JP2946688B2 (en) 1990-08-22 1990-08-22 Parts inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22223690A JP2946688B2 (en) 1990-08-22 1990-08-22 Parts inspection equipment

Publications (2)

Publication Number Publication Date
JPH04103145A true JPH04103145A (en) 1992-04-06
JP2946688B2 JP2946688B2 (en) 1999-09-06

Family

ID=16779246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22223690A Expired - Fee Related JP2946688B2 (en) 1990-08-22 1990-08-22 Parts inspection equipment

Country Status (1)

Country Link
JP (1) JP2946688B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100485029B1 (en) * 1997-12-26 2005-06-16 호야 가부시키가이샤 Glass substrate for an electron device, photomask blank and photomask using the same
JP2007286048A (en) * 2006-03-23 2007-11-01 Nissan Motor Co Ltd System and method of detecting work position
JP2009115653A (en) * 2007-11-07 2009-05-28 Sumitomo Wiring Syst Ltd Apparatus and method for inspecting mounted component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100485029B1 (en) * 1997-12-26 2005-06-16 호야 가부시키가이샤 Glass substrate for an electron device, photomask blank and photomask using the same
JP2007286048A (en) * 2006-03-23 2007-11-01 Nissan Motor Co Ltd System and method of detecting work position
JP2009115653A (en) * 2007-11-07 2009-05-28 Sumitomo Wiring Syst Ltd Apparatus and method for inspecting mounted component

Also Published As

Publication number Publication date
JP2946688B2 (en) 1999-09-06

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