TW202119020A - Optical detection method using composite light source and the detection device thereof - Google Patents

Abstract

Present invention discloses an optical detection method using composite light source and the detection device thereof, includes: providing a reference plane for placing a measuring object; and emitting several light of different wavelengths on the measuring object by a plurality sets of light emitting elements, the light emitted by each set of the light emitting elements is one of the three primary colors of red, green, and blue, and relative angel of the optical axis of the light emitted by each of the light-emitting elements are different from each other; capture the image information of different color channel from the image output by the capture device, using the image information of each color channel for different optical detection to detect the shape, size or defect of the object. The present invention also provides an optical inspection apparatus using a composite light source.

Description

Optical detection method and device using composite light source

The present invention relates to an optical detection method and device using a composite light source, in particular to an optical detection method and device using a composite light source suitable for printed circuit boards, integrated circuits, electronic component substrates and other types of objects.

Machine vision inspection is widely used in various process inspections in the manufacturing industry. A typical machine vision inspection is to capture images of the inspected object through a camera device, and then cooperate with the computer system to perform shape and contour comparison, size measurement, or defect detection through image processing and image recognition.

In the product manufacturing process, a variety of different inspections are often required. However, inspections with different existing inspection technologies usually require multiple sets of different camera devices or optical scanning devices to capture images in stages, and perform multiple captured images separately. Different optical inspections can obtain different inspection results, which not only consumes measurement time, but also increases the cost of equipment.

Due to the above reasons, the existing measurement technology has shortcomings. Therefore, how to solve the aforementioned problems through the improvement of the detection method and structure has become one of the important issues to be solved by this product.

The main purpose of the present invention is to provide a solution that can solve the shortcomings of current measurement technologies that require multiple scans to obtain different detection information.

In order to solve the above technical problems, an embodiment of the present invention provides an optical detection method using a composite light source, which includes: providing a reference plane for placing the measurement object; providing multiple sets of light-emitting elements to respectively generate light of different wavelengths to irradiate the On the measurement object, the light generated by the multiple groups of different light-emitting elements is one of red, blue, and green light, and is irradiated on the measurement object at different inclination angles; captured by a camera device The image of the measurement object; the image information corresponding to the light color channel output by each of the light-emitting elements is extracted from the image information output by the camera device; and the image information of each different color channel is used for optical detection.

In a preferred embodiment of the method of the present invention, the optical axes of the light rays generated by the multiple groups of different light-emitting elements collectively intersect at an intersection point of the reference plane.

In a preferred embodiment of the method of the present invention, the plurality of groups of the light-emitting elements include a plurality of first light-emitting elements, a plurality of second light-emitting elements, and a plurality of third light-emitting elements, wherein a plurality of the first light-emitting elements , A plurality of the second light-emitting elements and a plurality of the third light-emitting elements are respectively used to emit one of the three primary colors of red, green, and blue light, and a plurality of the first light-emitting elements, a plurality of the second light-emitting elements The light-emitting element and the colors of light emitted by the plurality of third light-emitting elements are different from each other.

A preferred embodiment of the method of the present invention is to capture image information corresponding to the color channels of light output by each of the light-emitting elements in the uncompressed image file output through the camera device.

The embodiment of the present invention also provides an optical detection device using a composite light source, which includes: a base, the top surface of the base forms a reference plane for placing a measurement object; a detection device is arranged on the base Above the reference plane of the seat, the detection device includes a main body, an imaging device, and a lighting device; wherein the lighting device has a plurality of groups of light-emitting elements, and the plurality of groups of the light-emitting elements are used to generate light of different wavelengths. On the measurement object, the light generated by the multiple groups of different light-emitting elements is one of red, blue, and green light, and is irradiated on the measurement object at different inclination angles; The camera device is used to capture the image of the measurement object, and from the image information output by the camera device, the image information corresponding to the light color channel output by each of the light-emitting elements is captured, and the image information of each different color channel is used Perform optical inspection.

In a preferred embodiment of the detection device of the present invention, the main body has a plurality of ring-shaped mounting frames, and the plurality of mounting frames are respectively arranged at different height positions of the main body to emit light of different colors. The group of light-emitting elements are respectively arranged on different mounting racks.

In a preferred embodiment of the detection device of the present invention, the lighting device has a plurality of first light-emitting elements, a plurality of second light-emitting elements, and a plurality of third light-emitting elements. The second light-emitting element and the plurality of third light-emitting elements are respectively used to emit one of the three primary colors of red, green, and blue light, and a plurality of the first light-emitting elements, a plurality of the second light-emitting elements, and The colors of light emitted by the plurality of third light-emitting elements are different from each other.

The beneficial effect of the present invention is that multiple different detection operations can be completed in the same image capturing procedure, thereby improving detection efficiency and saving machine costs.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings about the present invention. However, the provided drawings are only for reference and description, and are not used to limit the present invention.

The following is a specific embodiment to illustrate the implementation of the "optical detection method and device using a composite light source" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual dimensions, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

As shown in FIG. 1 to FIG. 3, it is a specific embodiment of the detection device used in the measurement method of the present invention. In this embodiment, the detection device 2 is disposed on a measuring machine 1 having a base 3, and the top surface of the base 3 forms a reference plane 301 for placing measurement objects, and A mobile device 4 is arranged on the top surface of the base 3. The mobile device 4 includes a mobile frame 401, a first sliding rail 402 arranged on the top surface of the base 3, and a second sliding rail 402 arranged on the mobile frame 401 Rail 403.

The detection device 2 of the present invention is set on the mobile frame 401, and can drive the detection device 2 to move along the reference plane 301 of the base 3 through the first sliding rail 402 and the second sliding rail 403 of the mobile frame 401, so that The position of the detection device 2 can be moved to any position on the reference plane 301.

As shown in FIGS. 2 and 3, the detection device 2 of the present invention includes a main body 10, an imaging device 20, and an illumination device 30. Wherein, the main body 10 has a detachable housing 11 for protecting main components such as the camera device 20 and the lighting device 30, and the housing 11 can be easily disassembled to facilitate maintenance of internal components. The upper end of the main body 10 is provided with a lens holder 12 for fixing the camera device 20 and a plurality of mounting frames 13 for installing the lighting device 30. An opening 14 is provided at the bottom of the main body 10, and the opening 14 faces the reference plane. The lens 21 of the imaging device 20 can capture the image of the measurement object 40 through the opening 14, and the light of the illuminating device 30 can It is projected onto the measurement object through the opening 14.

2 and 3 at the same time, in this embodiment, the main body 10 can define a central axis C, the central axis C is perpendicular to the reference plane 301 of the base 3, and the camera device 20 and the The openings 14 are all located on the central axis C. The plurality of mounting brackets 13 are substantially annular, and the center of each mounting bracket 13 is aligned with the central axis C. The number of the mounting brackets 13 is three, and the three mounting brackets 13 are respectively arranged at different height positions of the main body portion 10.

The camera device 20 has a lens 21 and an image capture device 22 connected to the lens 21. The image capture device 22 captures an image of a measurement object through the lens 21 and transmits the image of the measurement object to a background processing system ( For example: computer host) for processing, and optical detection through image recognition technology to obtain measurement information.

In more detail, the image capturing device 22 of the camera device 20 of the present invention has an image sensor (not shown in the figure), and the image sensor is a sensor with three primary color pixels of red, green, and blue ( For example: CCD or CMOS image sensor), each light-sensitive pixel (Pixel) includes three color pixel units of red, green, and blue, respectively, for sensing red light, green light, and blue light. And the image capturing device 22 can output uncompressed image file format (RAW file). Since the uncompressed original image file format contains the red, green, and blue pixel information of each pixel, it can capture from the uncompressed image file. Get the image information of the red, green, and blue channels. Or the image capturing device 22 can output image information of the red, green, and blue channels respectively.

In particular, the number of camera devices 20 in this embodiment is one, and the optical axis of the lens 21 of the camera device 20 is aligned with the central axis C. However, in other embodiments of the present invention, the number of camera devices 20 may be more than one. In addition, the optical axis of the lens of each imaging device can also be aligned with the central axis C or not aligned with the central axis C.

As shown in FIGS. 3 and 4, the lighting device 30 in this embodiment has a plurality of first light-emitting elements 31a arranged on the uppermost mounting frame 13 to form a light-emitting array; a plurality of second light-emitting elements 31b are arranged On the mounting frame 13 in the middle layer, another light-emitting array is formed; a plurality of third light-emitting elements 31c are arranged on the mounting frame 13 at the bottom layer to form the light-emitting array at the bottom layer. The first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c are respectively light-emitting diode chips for emitting light of different wavelengths (for example, red light, green light, and blue light), which are used to project light on The measurement object 40 is used as a light source for measurement. In particular, the light emitted by the first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c of the present invention is one of the three primary colors of red, green, and blue light, and the first light-emitting element 31a and the second light-emitting element 31a emit light. The colors of the light emitted by the element 31b and the third light-emitting element 31c are different from each other.

The first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c are respectively disposed on the three mounting brackets 13 of the main body 10. Since the three mounting brackets 13 are respectively located at different height positions, the first light emitting element 31a, the second light emitting element 31b, and the third light emitting element 31c are respectively positioned at different height positions. Preferably, the plurality of first light-emitting elements 31a, second light-emitting elements 31b, and third light-emitting elements 31c are arranged on the mounting frame 13 at equal intervals, so that the plurality of first light-emitting elements 31a, second light-emitting elements 31b, and The three light-emitting elements 31c can be centered on the central axis C, and are circumferentially arranged on each mounting frame 13 at equal intervals and are symmetrical to the central axis C.

As shown in FIG. 4, the present invention arranges the first optical axis L1 of each first light-emitting element 31a to emit light, the second optical axis L2 of the second light-emitting element 31b, and the third optical axis L3 of the third light-emitting element 31c as The common and central axis C intersect at an intersection of the reference plane 301. In addition, since the height positions of the first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c are different, the first optical axis L1, the second optical axis L2, and the third optical axis L3 are relative to the reference plane 301. The inclination angles are also different from each other, so that the red, green, and blue light rays emitted by the first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c can irradiate the reference plane 301 and the measurement object 40 at different angles. on. The light sources of the three primary colors generated by the lighting device 30 of the present invention are irradiated on the reference plane 301 at different angles, so that the light sources of the three primary colors will not interfere with each other.

Then capture the image of the measurement object 40 through the camera device 20, and output an image file to the background processing system (such as a computer) through the image capture device 22, and respectively capture the image files output from the image capture device 22 The image information of the three primary color channels of red, green, and blue are used for image identification or comparison with the image information of the three primary color channels, and the image information of different channels can be used to measure the figure outline, size measurement, or surface condition and defect detection And other types of measurement or inspection operations. Since the present invention uses red, green, and blue rays at different angles as the illuminating light source, when the imaging device 20 captures the image of the measurement object 40, the red, green, and blue light-sensitive pixels in each pixel of the image sensor Only the red, green, and blue light are sensed respectively, so the image information of each color channel will not interfere with the images of the other color channels. In addition, the light sources of different colors in the illuminating device 30 of the present invention are irradiated on the measurement object 40 at different oblique angles, so that the image information of different color channels has different characteristics and is suitable for different types of inspection operations.

For example, as shown in FIG. 4, in this embodiment, the first optical axis L1 and the reference plane 301 have the largest included angle, so that the light output by the first light-emitting element 31a can form a relatively uniform illuminance on the surface of the measurement object 40 Therefore, the image corresponding to the color channel of the output light of the first light-emitting element 31a is suitable for detecting the surface treatment or defect of the measurement object (for example, surface roughness measurement, scratch measurement). The angle between the third optical axis L3 of the third light-emitting element 31c and the reference plane 301 is the smallest, so that the light generated by the third light-emitting element 31c is irradiated on the measurement object at a low angle, thereby enabling the pattern of the measurement object 40 The edge contour of the layer 41 forms a more obvious contrast, and the reflection formed by the light irradiated on the surface of the measurement object 40 will have a more obvious light and dark change, so it is suitable for the measurement of the figure outline size and the detection of the measurement object 40 through light reflection. Defects of surface warpage or depression. In addition, the inclination angle of the second optical axis L2 of the second light-emitting element 31b in this embodiment is between the inclination angles of the first optical axis L1 and the third optical axis L3, so it is suitable for comparison and detection of contours.

In more detail, in order to make the irradiation angles of the light emitted by the first light-emitting element 31a, the second light-emitting element 31b, and the third light-emitting element 31c suitable for different inspection tasks, in a preferred embodiment of the present invention, the first optical axis _{The angle θ 1} between L1 and the reference plane 301 is arranged to be in the range of 60 degrees to 85 degrees, and the angle θ ₂ between the second optical axis L2 and the reference plane 301 is arranged to be in the range of angles from 30 degrees to 60 degrees. _{The angle θ 3} between the third optical axis L3 and the reference plane 301 is arranged in an angle range of 5 degrees to 30 degrees.

In particular, in the above-mentioned embodiment, although the illumination device 30 of the detection device 2 has three sets of light-emitting elements of different colors to output the three primary colors of red, green, and blue light, and can capture the image information of the red, green, and blue channels to Different measurement or inspection tasks are performed. However, in other embodiments of the present invention, the number of light-emitting elements is not limited to three groups. For example, only two groups of light-emitting elements of different colors are provided in the lighting device 30, and the two groups of light-emitting elements respectively output red , Green and blue light.

As shown in FIG. 5, it is a schematic block diagram of the measurement method of the present invention. The visual measurement method using multiple monochromatic light sources provided by the present invention mainly includes the following steps. Wherein, in step S1, a measurement reference surface is provided for placing the measurement object. Next, in step S2, to provide multiple sets of light-emitting elements to respectively generate light of different wavelengths and project them on the measurement object. The different groups of light-emitting elements respectively emit light of any one of the three primary colors of red, green, and blue. The colors of the light output from the different groups of light-emitting elements are different from each other, and the light of each different color is projected at different oblique angles. On the measurement object, and in a preferred embodiment, the optical axes of the light sources of different colors jointly intersect at an intersection of the reference plane.

In step S3, the image of the measurement object is captured through the camera device.

In step S4, the image information corresponding to the light color channel output by each of the light-emitting elements is extracted from the image information output by the camera device.

In step S5, image recognition is performed using image information of different color channels for detection or measurement. And the image information of each different color channel is used for different types of measurement or detection.

The following examples illustrate the characteristics and effects of the measurement method and detection device of the present invention:

1. The technology of the present invention can capture image information of different color channels through the same camera device, while simultaneously performing height information and a variety of two-dimensional measurement information or inspection operations, so it can improve measurement efficiency and is suitable for use in a variety of measurements. The purpose of measuring information. For example, when the technology of the present invention is applied to the inspection of printed circuit board manufacturing process, it can measure the thickness of copper foil, detect the warpage of the circuit board and other inspection operations by measuring the height information, and perform printing pattern inspection, surface treatment or scratching at the same time. Trace detection and other inspection operations.

2. The technology of the present invention can measure the height information through a plane image, and therefore can achieve the purpose of height measurement through a simple device, thereby reducing the cost of the device.

3. The technology of the present invention uses the three primary color light sources as the measurement light source, so that the images of the three different color light source channels will not interfere with each other, and can achieve image recognition by using the image information of the different primary color light source channels for measurement, and simultaneously obtain The purpose of a variety of measurement tasks.

The above descriptions are only the preferred and feasible embodiments of the present invention, which do not limit the scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the protection scope of the present invention. .

1: Measuring machine 2: Detection device 3: Pedestal 301: Datum plane 4: mobile device 401: mobile rack 402: first slide 403: second slide 10: Body part 11: shell 12: lens holder 13: Mounting frame 14: Opening 20: Camera 21: lens 22: Image capture device 30: Lighting device 31a: The first light-emitting element 31b: second light-emitting element 31c: third light-emitting element 40: Measuring object 41: pattern layer C: central axis L1: first optical axis L2: second optical axis L3: third optical axis θ1, θ2, θ3: included angle

Fig. 1 is a three-dimensional schematic diagram of the detection device used in the present invention.

Fig. 2 is a partial exploded schematic diagram of the detection device used in the present invention.

Fig. 3 is a schematic cross-sectional view of the detection device used in the present invention.

Fig. 4 is a schematic diagram of the operation method of the detection method of the present invention.

Fig. 5 is a schematic block diagram of the detection method of the present invention.

2: Detection device

301: Datum plane

10: Body part

11: shell

12: lens holder

13: Mounting frame

14: Opening

20: Camera

21: lens

22: Image capture device

30: Lighting device

31a: The first light-emitting element

31b: second light-emitting element

31c: third light-emitting element

40: Measuring object

C: central axis

L1: first optical axis

L2: second optical axis

L3: third optical axis

Claims (10)

An optical detection method using a composite light source, which includes: Provide a reference plane for placing measurement objects; Multiple groups of light-emitting elements are provided to respectively generate light of different wavelengths to illuminate the measurement object, and the light generated by the multiple groups of different light-emitting elements are one of red, blue, and green light, and are respectively inclined at different angles The angle is irradiated on the measurement object; Capturing an image of the measurement object through a camera device; Extracting image information corresponding to the light color channel output by each of the light-emitting elements from the image information output by the camera device; and Use image information of different color channels for optical inspection. As described in the first item of the scope of patent application, the optical detection method using a composite light source, wherein the optical axes of the light rays generated by the multiple groups of different light-emitting elements collectively intersect at an intersection of the reference plane. The optical detection method using a composite light source as described in the first item of the scope of patent application, wherein the plurality of groups of the light-emitting elements include a plurality of first light-emitting elements, a plurality of second light-emitting elements, and a plurality of third light-emitting elements, Wherein a plurality of the first light-emitting elements, a plurality of the second light-emitting elements, and a plurality of the third light-emitting elements are respectively used to emit one of the three primary colors of red, green, and blue light, and a plurality of the first The light-emitting element, the plurality of second light-emitting elements, and the plurality of third light-emitting elements emit light in different colors from each other. The optical detection method using a composite light source as described in the first item of the scope of patent application is to capture image information corresponding to the color channels of light output by each of the light-emitting elements from the uncompressed image file output through the camera device. An optical detection device using a composite light source, which includes: A base, the top surface of the base forms a reference plane for placing a measurement object; A detection device arranged above the reference plane of the base, the detection device including a body portion, a camera device, and an illumination device; Wherein, the lighting device has a plurality of groups of light-emitting elements, and the plurality of groups of the light-emitting elements are respectively used to generate light of different wavelengths to irradiate the measurement object, and the light generated by the plurality of different groups of the light-emitting elements is red. , Blue, and green light, and irradiate the measurement object with different oblique angles; The camera device is used to capture the image of the measurement object, and from the image information output by the camera device, the image information corresponding to the color channel of the light output by each of the light-emitting elements is captured, and the image information of each of the different color channels is used. Image information is optically inspected. The optical detection device using a composite light source as described in item 5 of the scope of patent application, wherein the main body part has a plurality of ring-shaped mounting frames, and the plurality of mounting frames are respectively arranged at different height positions of the main body part, Each group of the light-emitting elements for emitting light of different colors are respectively arranged on different mounting racks. As described in item 6 of the scope of patent application, the optical detection device using a composite light source, wherein the optical axes of the light emitted by each group of the light-emitting elements for emitting light of different colors collectively intersect at a point of intersection of the reference plane on. The optical detection device using a composite light source as described in item 6 of the scope of patent application, The lighting device has a plurality of first light-emitting elements, a plurality of second light-emitting elements, and a plurality of third light-emitting elements, a plurality of the first light-emitting elements, a plurality of the second light-emitting elements, and a plurality of light-emitting elements. The third light-emitting elements are respectively used to emit one of the three primary colors of red, green, and blue light, and a plurality of the first light-emitting elements, a plurality of the second light-emitting elements, and a plurality of the third light-emitting elements emit light The light colors are different from each other. The optical detection device using a composite light source as described in item 8 of the scope of patent application, wherein the angle between the optical axis of the light emitted by the plurality of first light-emitting elements and the reference plane is within an angle range of 60 degrees to 85 degrees The angle between the optical axis of the light emitted by the plurality of second light-emitting elements and the reference plane is within an angular range of 30 degrees to 60 degrees; the optical axis of the light emitted by the plurality of third light-emitting elements and the reference plane The angle of the plane is in the range of 5 degrees to 30 degrees. The optical detection device using a composite light source as described in item 6 of the scope of patent application has one or more than one set of the camera device for capturing the image of the measurement object.

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