CN108318968A - Slot type waveguiding structure and its manufacturing method, the MZI structures using the waveguiding structure - Google Patents
Slot type waveguiding structure and its manufacturing method, the MZI structures using the waveguiding structure Download PDFInfo
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B2006/12061—Silicon
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B2006/12159—Interferometer
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
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Abstract
The present invention provides MZI (the Mach Zehnder Interference of a kind of slot type waveguiding structure and its manufacturing method and use slot type waveguiding structure：Mach Zehnder interferometry) structure, slot type waveguiding structure is constituted by the way that high index waveguide is respectively set in the both sides of the slot shape low-index waveguide extended along optical propagation direction, wherein transmitted optical signal is set to be limited in low-index waveguide using the borders between low high index waveguide, to reduce scattering and absorption of the optical signal in waveguiding structure, reduce optical signal waveguiding structure transmission loss, it is possible thereby to the output signal loss and crosstalk of the filter of MZI structures caused by loss difference between reducing the waveguiding structure of phase shift arm is big.It is realized with cmos compatible micro-nano technology technique in addition, slot type waveguiding structure and MZI structures may be used, can be applied to the fields such as filter, wavelength-division multiplex.
Description
Technical field
The invention belongs to photonic device fields, and in particular to a kind of slot type waveguiding structure and its manufacturing method and use
Mach Zehnder interferometry (the Mach-Zehnder Interference of slot type waveguiding structure：MZI) structure, it is especially a kind of
The slot type waveguiding structure and its manufacturing method and the loss that output signal can be reduced that optical signal transmission is lost can be reduced
With the MZI structures of crosstalk.
Background technology
With the continuous development of micro-nano optoelectronic integrated technology, the size of integrated optoelectronic device is smaller and smaller, is used for optical signal
The size of the optical waveguide of transmission has tapered into sub-micrometer scale, higher and higher to the integrated level of photoelectric chip.In addition,
Integrated electro chip field, MZI structures are the basic units of integrated optical circuit, are widely used in electro-optical modulation, filtering etc..
In general, MZI structures include mainly this five parts of input waveguide, beam splitter, phase controlling waveguide, bundling device and output waveguide,
And this five parts all refer to waveguiding structure.In traditional bar shaped or ridge waveguide structure, be limited to the factors such as manufacturing process and
So that optical signal is scattered in conventional waveguide structure and absorbs that larger thus there are larger transmission loss.In addition, phase controlling wave
Two waveguiding structures in part are led because there are the optical path differences of optical signal, therefore the loss of the waveguide portion also results in MZI structures
The loss and crosstalk of output signal increase.Thus, how to realize the waveguiding structure of low transmission loss and the MZI of low-loss crosstalk
Structure is the major issue of this field.
Invention content
(1) technical problems to be solved
The present invention provides a kind of slot type waveguiding structure and its manufacturing method and use slot type waveguiding structure
MZI structures, at least partly to solve technical problem set forth above.
(2) technical solution
According to an aspect of the invention, there is provided a kind of slot type waveguiding structure, including：Low-index waveguide is in
Slot shape extends along optical propagation direction；High index waveguide is arranged in the both sides of low-index waveguide；In high refractive index wave
Low-index waveguide is folded between leading, when optical signal transmits in slot type waveguiding structure, optical signal is limited in low folding
Penetrate rate waveguide.
In order to ensure that light field is effectively limited in low-index waveguide in slot type waveguiding structure, slot type waveguiding structure
Cross section in the width of high index waveguide be 300-500nm, the height of high index waveguide is 200-300nm；When for
When vertical slot type waveguiding structure, the transverse width of low-index waveguide is 80-120nm；When for horizontal joint slotted waveguide structure
When, the longitudinal height of low-index waveguide is 50-100nm；When for orthogonal slot type waveguiding structure, the transverse direction of low-index waveguide
Width is 80-120nm, and the longitudinal height of low-index waveguide is 50-100nm.
In certain specific implementation mode of the present invention, TE pattern light fields are limited in vertical slot type waveguiding structure or orthogonal
Vertical slot shape low-index waveguide in slot type waveguiding structure, TM pattern light fields are limited in horizontal joint slotted waveguide knot
Horizontal slot shape low-index waveguide in structure or orthogonal slot type waveguiding structure.
In certain specific implementation mode of the present invention, the material of low-index waveguide contains SiO2, SiN or SiON, height folding
The material for penetrating rate waveguide contains monocrystalline silicon, monocrystalline germanium, lnP or GaAs.
In certain specific implementation mode of the present invention, the size of high index waveguide is identical or different；And/or high refractive index
The material identical or difference of waveguide；And/or high index waveguide is bar shaped and/or ridge waveguide.
In certain specific implementation mode of the present invention, slot type waveguiding structure further includes substrate, and the material of substrate is high folding
Rate material or low-index material are penetrated, and the refractive index of substrate is less than high index waveguide.
According to another aspect of the present invention, a kind of manufacturing method of vertical slot type waveguiding structure is provided, including：It is serving as a contrast
Deposit high refractive index material on bottom and the process for forming high refractive index film；High refractive index film is performed etching via mask,
The process for forming high index waveguide in a manner of sandwiched slot by high refractive index film；Between being located in high index waveguide
Slot deposition low-index material and the process that forms slot shape low-index waveguide.
According to another aspect of the present invention, a kind of manufacturing method of horizontal joint slotted waveguide structure is provided, including：It is serving as a contrast
Deposit high refractive index material on bottom and the process for forming high refractive index film；It is sequentially depositing low-refraction material in high refractive index film
Material and high-index material, the process to form multi-layer film structure in such a way that low-index layer is in slot shape；Via covering
Mould performs etching multi-layer film structure, to form height high refractive index layer waveguide i.e. horizontal joint groove profile by multi-layer film structure
The process of waveguiding structure.
According to another aspect of the present invention, a kind of manufacturing method of orthogonal slot type waveguiding structure is provided, including：It is serving as a contrast
Deposit high refractive index material on bottom and the process for forming high refractive index film；It is sequentially depositing low-refraction material in high refractive index film
Material and high-index material, to form the plural layers knot of height high refractive index layer in such a way that low-index layer is in slot shape
The process of structure；Multi-layer film structure is performed etching via mask, to be formed in by multi-layer film structure, two height are high to be rolled over
The process for penetrating between rate layer waveguiding structure the composited waveguide structure for being folded with slot；It is heavy in the slot of composited waveguide structure institute sandwiched
Product low-index material, and the process for forming slot shape low-index waveguide.
According to another aspect of the present invention, a kind of MZI structures, including beam splitter, phase controlling waveguide and conjunction beam are provided
Device, wherein phase controlling waveguide is connect with each input port of each output port of beam splitter and bundling device respectively；Phase controlling
Waveguide uses slot type waveguiding structure of the invention.
In certain specific implementation mode of the present invention, identical structure or different is respectively adopted in beam splitter and bundling device
Structure.
In certain specific implementation mode of the present invention, the knot that two-way input two-way exports is respectively adopted in beam splitter and bundling device
Structure or beam splitter use the structure of input two-way output all the way and bundling device inputs the structure that two-way exports using two-way.
The present invention certain specific implementation mode in, two-way output structure be directional coupled structure, multimode interferometric structure,
X-type beam splitter or Y type beam splitters.
In certain specific implementation mode of the present invention, directional coupled structure also uses slot type waveguiding structure.
In certain specific implementation mode of the present invention, the equivalent optical path of phase controlling waveguide or unequal is symmetrical to be formed
MZI structures or asymmetric MZI structures.
(3) advantageous effect
It can be seen from the above technical proposal that slot type waveguiding structure of the present invention and its manufacturing method and use the seam
The MZI structures of slotted waveguide structure at least have the advantages that one of them or in which a part：
(1) slot type waveguiding structure makes optical signal using the borders between low-index waveguide and high index waveguide
It is limited in low-index waveguide, to reduce scattering and absorption of the optical signal in waveguiding structure, thus reduces light
Transmission loss of the signal in waveguiding structure.
(2) slot type waveguiding structure is used in phase shift arm, reduces the loss difference between phase shift arm, thus reduces by damaging
Consume the output signal loss and crosstalk of the big caused MZI structures of difference.
Description of the drawings
Fig. 1 is the summary schematic diagram of the MZI structures of the embodiment of the present invention.
Fig. 2 is the summary vertical view of the MZI structures of the embodiment of the present invention and its schematic diagram of beam splitter and bundling device.
Fig. 3 is slot type waveguiding structure in the MZI structures of the embodiment of the present invention in cuing open in optical transmission direction
View.
【Main element of embodiment of the present invention symbol description in attached drawing】
The first input waveguides of 101-；The second input waveguides of 102-；103- beam splitters；
104- first phase controls waveguide；105- second phase controls waveguide；
106- bundling devices；The first output waveguides of 107-；
The second output waveguides of 108-；
201- directional coupled structures；202- multimode interferometric structures；
203-Y type beam splitters；204-X type beam splitters；
301, the orthogonal slot type waveguiding structures of 302-；
303, the vertical slot type waveguiding structures of 304-；
305,306- horizontal joints slotted waveguide structure.
Specific implementation mode
As previously mentioned, the present invention is one structure of design for the starting point of slot type waveguiding structure and MZI structure designs
Rationally and optical signal scattering can be made to absorb the mechanism reduced, to meet the transmission loss for requiring waveguiding structure in certain applications
The requirement that low, MZI structures output signal is lost and crosstalk is low.
The present invention improves conventional waveguide structure and conventional waveguide is made to combine in a specific way, that is, by low folding
High index waveguide is respectively set to constitute slot type waveguiding structure in the both sides for penetrating rate waveguide, sharp in the slot type waveguiding structure
Transmitted optical signal is set to be limited in low-index waveguide with the borders between low high index waveguide, to reduce
Scattering and absorption of the optical signal in waveguiding structure, reduce optical signal waveguiding structure transmission loss, it is possible thereby to drop
Loss difference between the waveguiding structure of low phase controlling waveguide (also referred to as phase shift waveguide or phase shift arm) it is larger it is caused based on
The output signal of the filter of MZI structures is lost and crosstalk.
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
In a specific embodiment of the present invention, a kind of slot type waveguiding structure and its manufacturing method are provided and is used
The MZI structures of slot type waveguiding structure.In the present embodiment, two phase shift arms of MZI structures are all made of slot type waveguiding structure,
Slot type waveguiding structure can also be also used in the other parts in addition to the phase shift arm.
Fig. 1 is the summary schematic diagram of the MZI structures of the embodiment of the present invention.Fig. 2 be MZI structures summary vertical view and
The schematic diagram of its beam splitter and bundling device.Fig. 3 be slot type waveguiding structure (slot waveguiding structures) in MZI structures perpendicular to
Sectional view in optical transmission direction.The drafting ratio that the drafting ratio of these figures is mutually different but different is in order to targeted
The illustrative purpose for being more advantageous to clear explanation.As shown in Figure 1, the MZI structures of the present embodiment include：For external incident light letter
Number import the first input waveguide 101 and the second input waveguide 102；Make the beam splitter 103 of inputted optical signal beam splitting；Make point
Two ways of optical signals after beam generates the first phase control waveguide 104 of phase delay and second phase controls waveguide 105；There will be
The two ways of optical signals of phase delay is interfered and the bundling device 106 of beam splitting；First will exported by the optical signal of 106 beam splitting of bundling device
Output waveguide 107 and the second output waveguide 108.Specifically, external incident optical signal (input signal) is via the first incoming wave
Lead 101 or second input waveguide 102 input, pass through with the first input waveguide 101 and the second input waveguide 102 be separately connected point
The either port of beam device 103 controls waveguide by entering first phase control waveguide 104 and second phase after 103 beam splitting of beam splitter
105, controlling waveguide 104 and second phase control waveguide 105 by first phase makes the two ways of optical signals generation phase of institute's beam splitting prolong
It lags from two inputs for controlling the bundling device 106 that waveguide 104 and second phase control waveguide 105 are separately connected with first phase
Port enters bundling device 106, makes to have the two ways of optical signals of phase delay to be interfered by bundling device 106, and respectively from bundling device
106 output port is exported via the port of the first output waveguide 107 and the second output waveguide 108.
Specifically, can be that identical structure can also in the beam splitter 103 and bundling device 106 of the setting of phase shift arm both sides
It is different structure, it is, the structure of two-way input two-way output can be respectively adopted, for example (,) it is directional coupled structure 201, more
Mode interference structure 202, X-type beam splitter etc.；It can also the use of the beam splitter 103 structure such as Y types point that input two-way exports all the way
Beam device and bundling device 106 using above-mentioned two-way input two-way output structure.Wherein, the waveguide in directional coupled structure 201
Structure can also slot type waveguiding structure (slot type waveguiding structure will be aftermentioned) using the present invention, with advantageously reduce MZI knot
The overall transfer of structure is lost.
It should be noted that controlling waveguide 104 and second phase control wave as the first phase of phase shift arm in MZI structures
It leads 105 and uses slot type waveguiding structure (orthogonal slot type waveguiding structure 301,302 as shown in Figure 3；Vertical slot type waveguide junction
Structure 303,304；Horizontal joint slotted waveguide structure 305,306).The phase controlling waveguide of these slot type waveguiding structures can be light
Journey it is equal can also be that light path is unequal, that is, waveguide effective index is equal with the product of waveguide length or waveguide has
The product for imitating refractive index and waveguide length is unequal.As a result, when these phase controlling waveguide equivalent optical paths, just become symmetrical
MZI structures；It is just asymmetric MZI structures when these phase controlling waveguide light paths are unequal.
In addition, the manufacture of the slot type waveguiding structure of the present invention for convenience, is used according to substantial optical signal transmission
The low-index waveguide being folded between high index waveguide type, the manufacturing method at least two of slot type waveguiding structure
Kind, one is the method for vertical slot type waveguiding structure, another kind is for horizontal joint slotted waveguide structure or positive cross-stitch
The method of slotted waveguide structure may be used and be realized with cmos compatible micro-nano technology technique, specific as follows：
For vertical slot type waveguiding structure, as shown in the middle figure of Fig. 3, first, using plasma enhancing chemistry
Vapour deposition process (PECVD) on substrate deposit high refractive index material and form flat high refractive index film；Then, with photoetching
Glue is that mask performs etching high refractive index film using dry type or wet etching, to form bar shaped or ridge by film
High index waveguide (two be respectively shown in such as the middle figure of Fig. 3 are as the high index waveguide shown in grid), at the same in bar shaped or
Sandwiched slot between ridge high index waveguide；Then, in bar shaped or ridge high index waveguide and therebetween, the slot of sandwiched deposits
Low-index material and form coating and slot type low-index waveguide.Vertical slot type waveguiding structure is formed as a result,.
For horizontal joint slotted waveguide structure or orthogonal slot type waveguiding structure, figure below such as Fig. 3 and upper figure institute
Show, first, using PECVD on substrate deposit high refractive index material and form flat high refractive index film；Then, it is rolled in height
It penetrates on rate film and is sequentially depositing low-index material and high-index material, and form the more of height high refractive index layer on substrate
Layer film structure；Then, multi-layer film structure is performed etching using dry type or wet etching using photoresist as mask, to
The height high refractive index layer waveguiding structure as shown in figure below of Fig. 3 is formed by multi-layer film structure, i.e., sequentially forms item from substrate
Shape or ridge high index waveguide, slot shape low-index waveguide, bar shaped or ridge high index waveguide, or form such as Fig. 3
Upper figure shown in the composited waveguide structure of slot is folded between two height high refractive index layer waveguiding structures；Finally, in height
High refractive index layer waveguiding structure or the slot of composited waveguide structure and its sandwiched deposit low-index material and form coating
And slot type low-index waveguide.Horizontal joint slotted waveguide structure is formed as figure below of Fig. 3 as a result, or such as Fig. 3
Upper figure forms orthogonal slot type waveguiding structure (cross slot waveguide junctions in such a way that slot shape low-index waveguide is orthogonal like that
Structure).
In particular, from qualitative, one according to Maxwell EM theories, and the spread speed in the medium of light is v
=c/ √ ε μ, c are the light velocity in vacuum, and ε is the dielectric constant of medium, and μ is the magnetic permeability of medium, it can thus be concluded that：The folding of medium
Penetrate rate n=√ ε μ, and the μ ≈ 1 in the medium as inorganic material thus have n=√ ε；Two according to Gauss laws have D=ε E
Formula, D is dielectric displacement, and E is electric field strength, in addition, on the boundary of high low-refraction, D is in high refractive index and low-refraction
Boundary is continuous, i.e. the D of high refractive index mediumhighThe D of ≈ low refractive index dielectricslow, as a result, because of the n of low refractive index dielectriclowIt is small
In the n of high refractive index mediumhigh, therefore the electric field strength E in low refractive index dielectriclowThe electric field that can be more than in high refractive index medium
Intensity Ehigh, in this way, when the slot width of slot shape low-index waveguide is less than the attenuation length of light, light field will be steadily
It is limited in low-index waveguide.In turn, slot width is smaller, and high index waveguide is wider, the limit of light field in low-index waveguide
System is stronger.In this theoretical foundation, in order to ensure that light field is effectively limited in low-index waveguide in slot type waveguiding structure,
The size of slot type waveguiding structure of the present invention has following requirement：High index waveguide width in slot type waveguiding structure cross section
For 300-500nm, high index waveguide height is 200-300nm, and low-index waveguide transverse width is 80-120nm, low refraction
The longitudinal height of rate waveguide is 50-100nm.It is, the bar shaped as shown in Fig. 3 with grid or ridge high index waveguide, wide
Degree is 300-500nm, is highly 200-300nm；With the slot shape low-index waveguide shown in blank, transverse width is Fig. 3
Middle figure shown by two width with the blank slot of institute's sandwiched between the high index waveguide shown in grid, longitudinal height
The height of the blank slot of institute's sandwiched between two high index waveguides as shown by figure below of Fig. 3.
In addition, the high index waveguide in slot type waveguiding structure, quantity is two or more, and size can be identical
, to form symmetrical slot type waveguiding structure；Its size can also be different, to form asymmetric slot type waveguide junction
Structure.
In addition, in order to keep the light field restriction effect of low-index waveguide further, TE pattern light fields are limited in vertically
Slot shape low-index waveguide, TM pattern light fields are limited in horizontal slot shape low-index waveguide.
Further more, it may be low-index material that the material of substrate, which can be high-index material, when using high refractive index
When material, the refractive index of the substrate material is less than the high index waveguide in slot type waveguiding structure, so that light field is to greatest extent
Ground is limited in waveguiding structure.
For example, the material of the high index waveguide of slot type waveguiding structure can select monocrystalline silicon, monocrystalline germanium or III-V
The material of material (such as lnP, GaAs etc.) etc., and the material of substrate can also select monocrystalline silicon, monocrystalline germanium or III-V material (such as
LnP, GaAs etc.) etc. material；The material of the low-index waveguide of slot type waveguiding structure can select SiO2, SiN, SiON
Deng, and the material of coating can also select SiO2, SiN, SiON etc..
Further more, the high index waveguide in slot type waveguiding structure, refractive index can distinguish it is identical can also respectively not
Together.
So far, attached drawing is had been combined the embodiment of the present invention is described in detail.It should be noted that in attached drawing or saying
In bright book text, the realization method for not being painted or describing is form known to a person of ordinary skill in the art in technical field, and
It is not described in detail.In addition, the above-mentioned definition to each component and method be not limited in mentioning in embodiment it is various specific
Structure, shape or mode, those of ordinary skill in the art simply can be changed or replaced to it, such as：
(1) coating covered for vertical slot type waveguiding structure can be carried out with air instead of covering material
Covering, i.e., do not deposit covering material and using air as coating；
(2) for orthogonal slot type waveguiding structure, slot low-index waveguide can be air on vertical direction, cover
Cap rock can also be replaced with air.
In conclusion the present invention provides a kind of available seam slotted waveguide realized with cmos compatible micro-nano technology technique
Structure and MZI structures, reduce optical signal waveguiding structure transmission loss, between the waveguiding structure for thus reducing phase shift arm
Be lost difference it is big caused by MZI structures output signal loss and crosstalk, it is multiple so as to be widely used in filter, wavelength-division
With equal fields.
It should also be noted that, the direction term mentioned in embodiment, such as "upper", "lower" etc., are only refer to the attached drawing
Direction is not used for limiting the scope of the invention.Through attached drawing, identical element by same or similar reference numeral Lai
It indicates.When that the understanding of the present invention may be caused to cause to obscure, conventional structure or construction will be omitted.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present invention
Content.
It unless there are known entitled phase otherwise anticipates, the numerical parameter in this specification and appended claims is approximation, energy
Enough required characteristic changings obtained by content through the invention.Specifically, all be used in specification and claim
The number of the middle content for indicating composition, reaction condition etc., it is thus understood that repaiied by the term of " about " in all situations
Decorations.Under normal circumstances, the meaning expressed refers to including by specific quantity ± 10% variation in some embodiments, at some
± 5% variation in embodiment, ± 1% variation in some embodiments, in some embodiments ± 0.5% variation.
The word of specification and ordinal number such as " first ", " second ", " third " etc. used in claim, with modification
Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element
Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used for enabling the element with certain name and another tool
There is the element of identical name that can make clear differentiation.
In addition, unless specifically described or the step of must sequentially occur, there is no restriction in the above institute for the sequence of above-mentioned steps
Row, and can change or rearrange according to required design.And above-described embodiment can be based on the considerations of design and reliability, that
This mix and match is used using or with other embodiment mix and match, i.e., the technical characteristic in different embodiments can be freely combined
Form more embodiments.Further, it is to be appreciated that the flow of embodiment hereof only show it is related with the understanding of the present invention
The step of, and it is understood that can before shown step, later and between execute many for completing other functions
Additional step.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical solution and advantageous effect
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the present invention
Within the scope of shield.
Claims (15)
1. a kind of slot type waveguiding structure, including：
Low-index waveguide is in slot shape, and extend along optical propagation direction；
High index waveguide is arranged in the both sides of the low-index waveguide；
Wherein, the low-index waveguide is folded between the high index waveguide, optical signal is in the seam slotted waveguide
It is limited in the low-index waveguide transmission in structure.
2. slot type waveguiding structure according to claim 1, which is characterized in that the cross section of the slot type waveguiding structure
In the width of the high index waveguide be 300-500nm, the height of the high index waveguide is 200-300nm, wherein：
The slot type waveguiding structure is in vertical slot type waveguiding structure, and the transverse width of the low-index waveguide is 80-
120nm；
The slot type waveguiding structure is in horizontal joint slotted waveguide structure, and the longitudinal height of the low-index waveguide is 50-
100nm；
The slot type waveguiding structure is in orthogonal slot type waveguiding structure, and the transverse width of the low-index waveguide is 80-
120nm, the longitudinal height of the low-index waveguide is 50-100nm.
3. slot type waveguiding structure according to claim 2, which is characterized in that
TE pattern light fields are limited in vertical in the vertical slot type waveguiding structure or the orthogonal slot type waveguiding structure
Slot shape low-index waveguide, TM pattern light fields are limited in the horizontal joint slotted waveguide structure or the orthogonal slot type
Horizontal slot shape low-index waveguide in waveguiding structure.
4. slot type waveguiding structure according to claim 1, which is characterized in that
The material of the low-index waveguide contains SiO2, SiN or SiON, the material of the high index waveguide contain monocrystalline silicon,
Monocrystalline germanium, lnP or GaAs.
5. slot type waveguiding structure according to any one of claim 1 to 4, which is characterized in that
The size of the high index waveguide is identical or different；And/or
The material identical or difference of the high index waveguide；And/or
The high index waveguide is bar shaped and/or ridge waveguide.
6. slot type waveguiding structure according to any one of claim 1 to 4, which is characterized in that
The slot type waveguiding structure further includes substrate, and the material of the substrate is high-index material or low-index material,
And the refractive index of the substrate is less than the high index waveguide.
7. a kind of manufacturing method of vertical slot type waveguiding structure, including：
Deposit high refractive index material and the process that forms high refractive index film on substrate；
The high refractive index film is performed etching via mask, is formed in a manner of sandwiched slot by the high refractive index film
The process of high index waveguide；
The slot between being located in the high index waveguide deposits low-index material and forms the low refraction of slot shape
The process of rate waveguide.
8. a kind of manufacturing method of horizontal joint slotted waveguide structure, including：
Deposit high refractive index material and the process that forms high refractive index film on substrate；
It is sequentially depositing low-index material and high-index material in the high refractive index film, to be in seam with low-index layer
The process that the mode of channel-shaped forms multi-layer film structure；
The multi-layer film structure is performed etching via mask, to form height high refractive index by the multi-layer film structure
The process of layer waveguide, that is, horizontal joint slotted waveguide structure.
9. a kind of manufacturing method of orthogonal slot type waveguiding structure, including：
Deposit high refractive index material and the process that forms high refractive index film on substrate；
It is sequentially depositing low-index material and high-index material in the high refractive index film, to be in seam with low-index layer
The process that the mode of channel-shaped forms the multi-layer film structure of height high refractive index layer；
The multi-layer film structure is performed etching via mask, it is high to be formed in two height by the multi-layer film structure
The process that the composited waveguide structure of slot is folded between index layer waveguiding structure；
Low-index material is deposited in the slot of composited waveguide structure institute sandwiched, and forms slot shape low-index waveguide
Process.
10. a kind of MZI structures, including beam splitter, phase controlling waveguide and bundling device, wherein
The phase controlling waveguide is connect with each input port of each output port of the beam splitter and the bundling device respectively；
The phase controlling waveguide uses the slot type waveguiding structure described in any one of claim 1 to 6.
11. MZI structures according to claim 10, which is characterized in that
Identical structure or different structures is respectively adopted in the beam splitter and the bundling device.
12. MZI structures according to claim 11, which is characterized in that
The structure of two-way input two-way output is respectively adopted in the beam splitter and the bundling device or the beam splitter uses one
Road inputs the structure of two-way output and the bundling device inputs the structure that two-way exports using two-way.
13. MZI structures according to claim 12, which is characterized in that
The structure of two-way output is directional coupled structure, multimode interferometric structure, X-type beam splitter or Y type beam splitters.
14. MZI structures according to claim 13, which is characterized in that
The directional coupled structure uses the slot type waveguiding structure.
15. MZI structures according to claim 10, which is characterized in that
The equivalent optical path or unequal of the phase controlling waveguide, to form symmetrical MZI structures or asymmetric MZI structures.
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| US11372158B2 (en) | 2018-12-04 | 2022-06-28 | Imec Vzw | Waveguide for guiding an electro-magnetic wave comprising plural waveguide parts with different widths extend in parallel planes |
| US11408764B2 (en) | 2018-12-04 | 2022-08-09 | Imec Vzw | Environmental waveguide sensor with improved design configuration |
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