CN108318064B - For improving the integrated chip of optical fiber Echo Wall microcavity sensors stability - Google Patents
For improving the integrated chip of optical fiber Echo Wall microcavity sensors stability Download PDFInfo
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- CN108318064B CN108318064B CN201810063204.8A CN201810063204A CN108318064B CN 108318064 B CN108318064 B CN 108318064B CN 201810063204 A CN201810063204 A CN 201810063204A CN 108318064 B CN108318064 B CN 108318064B
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 41
- 239000000835 fiber Substances 0.000 claims abstract description 109
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 9
- 239000004005 microsphere Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 210000005239 tubule Anatomy 0.000 claims description 2
- 230000002035 prolonged effect Effects 0.000 claims 1
- 230000010354 integration Effects 0.000 abstract description 2
- 230000001953 sensory effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 16
- 238000013461 design Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000006880 cross-coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
- G01D5/35374—Particular layout of the fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
- G01D5/3538—Optical fibre sensor using a particular arrangement of the optical fibre itself using a particular type of fiber, e.g. fibre with several cores, PANDA fiber, fiber with an elliptic core or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
Abstract
The invention belongs to sensory field of optic fibre, the integrated chip for improving optical fiber Echo Wall microcavity sensors stability, including integrated chip ontology, microcavity slot, conical fiber slot, carrying platform and through hole are proposed；The integrated chip ontology is placed in the rectangle frame that carrying platform A, carrying platform B, carrying platform C and carrying platform D are constituted；The microcavity slot includes the microcapillary slot being successively placed in parallel on integrated chip ontology, microballoon slot, micro- bottle of slot；Two and the above conical fiber slot are placed in parallel on integrated chip ontology, are intersected vertically with microcapillary slot, microballoon slot and the micro- bottle of slot on integrated chip ontology.The configuration of the present invention is simple, applicability are wide and can improve the stability of the fibre optical sensor based on Whispering-gallery-mode microcavity, enhance sensor-based system over all Integration degree.
Description
Technical field
The invention belongs to sensory field of optic fibre, stablize more particularly to one kind for improving optical fiber Echo Wall microcavity sensors
The integrated chip of property.
Background technique
Fibre optical sensor based on Whispering-gallery-mode microcavity with high sensitivity, high q-factor, mode volume is small, is easily integrated
Advantage, in hot spot (the document 1.J.Su.Label-free biological for being increasingly becoming optical sensing area research in recent years
and chemical sensing using whispering gallery mode optical resonators:past,
present,and future[J].SENSORS,2017,17(3):540.).In order to manipulate Whispering-gallery-mode, people are had studied
Whispering-gallery-mode microcavity of various shape, including microballoon, microcapillary and micro- bottle etc..
Currently, the fibre optical sensor based on Whispering-gallery-mode microcavity mostly uses greatly conical fiber near field coupled outside mode will
Optical coupling into Whispering-gallery-mode microcavity, realize efficient Whispering-gallery-mode excitation and coupling (document 2.G.C.Righini,
Y.Dumeige,P.Féron,et al.Whispering gallery mode microresonators:Fundamentals
and applications[J].RIVISTA DEL NUOVOCIMENTO,2011,34(7):435-488.).Cone of light at this time
Fibre exists between conical fiber and Whispering-gallery-mode microcavity perpendicular to Whispering-gallery-mode microcavity and couples spacing.In detection process
The disturbance of extraneous vibration and air-flow can all make to couple spacing and verticality changes, to destroy based on Whispering-gallery-mode
The stability of the fibre optical sensor of microcavity seriously affects measurement, limits the development of the sensor.Therefore, the biography how is improved
The stability of sensor becomes a urgent problem needed to be solved in the field detected using the sensor.
Summary of the invention
It is an object of the invention to further investigate to the above problem, propose that a kind of structure is simple, applicability is wide and energy
The stability of the fibre optical sensor based on Whispering-gallery-mode microcavity is improved, and enhances the integrated core of sensor-based system over all Integration degree
Piece.
Technical solution of the present invention is the integrated chip provided for improving optical fiber Echo Wall microcavity sensors stability,
It is characterised in that it includes integrated chip ontology, microcavity slot, conical fiber slot, carrying platform and through hole；
The carrying platform includes carrying platform A, carrying platform B, carrying platform C and carrying platform D；Carrying platform is thick
It spends identical；Carrying platform A and carrying platform B is identical cuboid, and carrying platform C and carrying platform D are identical cuboid；
Carrying platform C and the both ends carrying platform D are respectively equipped with through hole；The integrated chip ontology is placed in carrying platform A, carrying is put down
In the rectangle frame that platform B, carrying platform C and carrying platform D are surrounded；Wherein, carrying platform A and carrying platform B is corresponding sides, is used for
The tail optical fiber at the conical fiber both ends of conical fiber slot is extended in carrying；Carrying platform C and carrying platform D is corresponding sides, for holding
Carry the tail optical fiber for extending the Whispering-gallery-mode microcavity both ends of microcavity slot；
Corresponding item number is arranged according to the needs of optical path quantity in the conical fiber slot, for placing cone of light
It is fine；When setting two or more conical fiber slots, enables it be parallel to each other and be placed on integrated chip ontology, while and integrated chip
Microcapillary slot, microballoon slot and micro- bottle of slot on ontology intersect vertically, the conical fiber groove depth=microballoon with handle microballoon
Diameter+coupling distance+conical fiber bores area's radius+production conical fiber single mode optical fiber radius；Conical fiber groove width ratio
The single mode fiber diameters for placing the production conical fiber in it are 10~20 μm wide, guarantee conical fiber and Whispering-gallery-mode microcavity
Vertical relation.
The microcavity slot includes the microcapillary slot being successively placed in parallel on integrated chip ontology, microballoon slot, micro- bottle of slot；
The distance between microcapillary slot and microballoon slot, microballoon slot and micro- bottle of slot are 3000~5000 μm；The microcavity slot of same type according to
Needing to set gradually one or being greater than the microcavity slot of one, two and the above same type for measurement parameter quantity belongs to cascade slot,
Cause the Whispering-gallery-mode of cascade Whispering-gallery-mode microcavity that cross-coupling, grade occurs when Whispering-gallery-mode microcavity cascades in order to prevent
Joining the spacing between slot is 300~500 μm；Microcapillary groove depth=conical fiber groove depth-production conical fiber single mode
Fiber radius-conical fiber cone area radius-coupling distance；Microcapillary groove width is than placing the microcapillary diameter in it
10~20 μm wide, guarantee can keep vertical relation, built-in microcapillary with conical fiber after microcapillary is put into the slot；
Microballoon groove depth=conical fiber groove depth-production conical fiber single mode optical fiber radius-conical fiber cone area radius-
Microsphere radius of the coupling distance-with the handle microballoon+handle radius with handle microballoon；Microballoon groove width is than placing the band handle microballoon in it
Shank diameter it is 10~20 μm wide, guarantee will be put into handle microballoon in the slot after microballoon can with conical fiber keep vertical relation,
Built-in band handle microballoon；Micro- bottle of groove depth=conical fiber groove depth-production conical fiber single mode optical fiber radius-conical fiber
Cone area's radius-coupling distance-with micro- bottle of handle micro- bottle of radius+with micro- bottle of handle of handle radius；Micro- bottle of groove width is than placing it
Interior is 10~20 μm wide with micro- bottle of handle of shank diameter, can keep with conical fiber for micro- bottle after guarantee will be put into the slot with the micro- bottle of handle
Vertical relation, the built-in band micro- bottle of handle.
Further, local widening is arranged in the place of intersecting vertically of above-mentioned conical fiber slot and microballoon slot, and the shape widened is
Cylinder, intersection as center, diameter are 50~100 μm wider than in the microsphere diameter for widening place；Due to the microballoon with handle microballoon
Diameter is bigger than shank diameter, therefore ensure that and can will be put into microballoon slot with handle microballoon after local widening is arranged, and microballoon is in office
Portion widens place, will not contact with the inner wall of conical fiber slot and microballoon slot.
Further, local widening is arranged in the place of intersecting vertically of above-mentioned conical fiber slot and micro- bottle of slot, and the shape widened is
Cylinder, intersection as center, diameter are 50~100 μm wider than in micro- bottle of diameter for widening place；Due to micro- bottle with micro- bottle of handle
Diameter is bigger than shank diameter, therefore ensure that and can will be put into micro- bottle of slot with the micro- bottle of handle after local widening is arranged, and micro- bottle is in office
Portion widens place, will not contact with the inner wall of conical fiber slot and micro- bottle of slot.
Further, each parameter value range in above-mentioned setting conical fiber slot and microcavity groove depth is: band handle microballoon
Microsphere diameter be 200~300 μm, coupling distance is 0~150 μm, and the cone area radius of conical fiber is 0.5~2 μm, production cone
The single mode optical fiber radius of shape optical fiber is 125 μm, and can obtain conical fiber groove depth according to above-mentioned size is 325.5~577 μm；Band handle
The handle radius of microballoon is 62.5 μm；It is 162.5~414 μm that microballoon groove depth, which can be obtained, according to above-mentioned size；It can according to above-mentioned size
Obtaining microcapillary groove depth is 50~451.5 μm；It is 200~300 μm with micro- bottle of handle of micro- bottle of radius, with micro- bottle of handle of handle radius
It is 62.5 μm, can obtain micro- bottle of groove depth according to above-mentioned size is 162.5~414 μm.
Further, the material of above-mentioned integrated chip is organic glass.
It can be seen from the above technical proposal that the invention has the following advantages:
1) this integrated chip design for improving optical fiber Echo Wall microcavity sensors stability provided by the invention closes
Conical fiber and Whispering-gallery-mode microcavity can not only be fixed in corresponding slot by reason, the integrated chip, improved optical fiber and returned
The stability of sound wall microcavity sensors, and the slot in the integrated chip is also used as microchannel use, it can be in the collection
At realization liquid sensing in chip, and required liquid is few in micron dimension, therefore when progress liquid sensing for the size of slot,
Experimental cost can greatly be saved.
2) size design of conical fiber slot and microcavity slot is reasonable, can guarantee to work as conical fiber and Whispering-gallery-mode microcavity
When being fixed in corresponding slot, the Whispering-gallery-mode of Whispering-gallery-mode microcavity can effectively be excited by conical fiber.
3) this integrated chip for improving optical fiber Echo Wall microcavity sensors stability is compact-sized, and cost
Low, which be made by pmma material, has the transparency well, corrosion resistant feature can be in reality
It tests operation and observes the senser element situation being placed in the slot of the integrated chip at any time.
4) this integrated chip applicability for improving optical fiber Echo Wall microcavity sensors stability is wide, integrates core at this
On piece, can not only place different types of Whispering-gallery-mode microcavity, and same type of microcavity may be implemented cascade come into
Row measuring multiple parameters further enhance the multifunction of the integrated chip.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of integrated chip provided by the invention；
Fig. 2 is a kind of schematic diagram of the microcavity slot of integrated chip provided by the invention；
Fig. 3 is a kind of schematic diagram of the conical fiber slot of integrated chip provided by the invention；
Fig. 4 is a kind of schematic diagram of the local widening of integrated chip provided by the invention；
Fig. 5 is a kind of enlarged diagram of the local widening of integrated chip provided by the invention；
Fig. 6 is the schematic diagram of conical fiber provided by the invention；
Fig. 7 is the schematic diagram of microcapillary provided by the invention；
Fig. 8 is the schematic diagram provided by the invention with handle microballoon；
Fig. 9 is the schematic diagram provided by the invention with micro- bottle of handle.
In figure: 1 carrying platform A；2 carrying platform B；3 carrying platform C；4 carrying platform D；5 through hole A；6 through hole B；7
Through hole C；8 through hole D；9 microcapillary slot A；10 microcapillary slot B；11 microballoon slot A；12 microballoon slot B；13 micro- bottles of slot A；14
Micro- bottle of slot B；15 conical fiber slot A；16 conical fiber slot B；17 local widening A；18 local widening B；19 local widening C；20 innings
Widen D in portion；21 local widening E；22 local widening F；23 local widening G；24 local widening H；The cone area of 25 conical fibers；26 is micro-
Capillary；27 handles with handle microballoon；28 microballoons with handle microballoon；29 with micro- bottle of handle of handle A；30 with micro- bottle of handle of micro- bottle；31 bands
Micro- bottle of handle of handle B.
Specific embodiment
The present invention provides a kind of for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability, such as Fig. 1 institute
It is shown as the schematic diagram of integrated chip provided by the invention.The integrated chip of offer is using micro-processing technology to one piece of organic glass
It fabricates.By micro-processing technology, produced in integrated chip microcavity slot, conical fiber slot, carrying platform and
Through hole.Carrying platform includes carrying platform A, carrying platform B, carrying platform C and carrying platform D.Carrying platform A and carrying are flat
Platform B can carry the tail optical fiber for extending the conical fiber both ends of conical fiber slot, and can would extend out conical fiber with glue
The tail optical fiber at the conical fiber both ends of slot is further secured on carrying platform A and carrying platform B.The carrying platform C of carrying platform
The tail optical fiber for extending the Whispering-gallery-mode microcavity both ends of microcavity slot can be carried with carrying platform D, and can will be extended with glue
The tail optical fiber at the Whispering-gallery-mode microcavity both ends of microcavity slot is further secured on carrying platform C and carrying platform D out, makes the Echo Wall
Coupling spacing between mode microcavity and conical fiber keeps stablizing, and is not easily susceptible to extraneous interference, helps to improve optical fiber and returns
The stability of sound wall microcavity sensors spectrum.Through hole includes through hole A, through hole B, through hole C and through hole D, the shape in hole
Shape is cylinder, integrated chip can be fixed on the experimental bench with screw hole across through hole with screw and reduce the external world
Vibration disturbs sensor bring.
It is illustrated in figure 2 the signal of the microcavity slot of the integrated chip for improving optical fiber Echo Wall microcavity sensors stability
Figure, Fig. 3 show the schematic diagram of the conical fiber slot of the integrated chip for improving optical fiber Echo Wall microcavity sensors stability,
Microcavity slot includes microcapillary slot A, microcapillary slot B, microballoon slot A, microballoon slot B, micro- bottle of slot A and micro- bottle of slot B, conical fiber slot
Including conical fiber slot A and conical fiber slot B.Microcapillary slot A and microcapillary slot B is used to place the microtriche that diameter is 85 μm
Tubule slot；Microballoon slot A and microballoon slot B is 200~300 μm for placing band handle microballoon, microsphere diameter, and shank diameter is 125 μm；It is micro-
Bottle slot A and micro- bottle of slot B is 200~300 μm for placing the band micro- bottle of handle, micro- bottle of diameter, and shank diameter is 125 μm.Conical fiber slot A
It is used to place the conical fiber being made by the single mode optical fiber that diameter is 250 μm with conical fiber slot B, and conical fiber bores area
Diameter is 1~4 μm.The length of microcavity slot is 30000 μm, and the length of conical fiber slot is 80000 μm.In order to ensure by cone of light
Fine and Whispering-gallery-mode microcavity can be easily put into corresponding slot, and the Whispering-gallery-mode of Whispering-gallery-mode microcavity can be bored
Shape optical fiber ejects, therefore the width and depth of microcavity slot and conical fiber slot are the single mode optical fibers according to production conical fiber
Diameter, conical fiber are bored determined by the diameter of the diameter in area, coupling spacing, Whispering-gallery-mode microcavity, the width of conical fiber slot
Spending range is 260~270 μm, and depth bounds are 325.5~577 μm；Microcapillary groove width is thinner than placing the microtriche in it
The diameter of pipe is 10~20 μm wide, and depth bounds are 50~451.5 μm；The width range of microballoon slot and micro- bottle of slot be all be 135
~145 μm, and depth bounds are all 162.5~414 μm.
As shown in Figures 2 and 3, after in order to guarantee for conical fiber and Whispering-gallery-mode microcavity to be put into corresponding slot, two
Person keeps vertical relation on spatial position, it is ensured that realizes efficient Whispering-gallery-mode excitation, therefore designs microcavity slot and cone
Shape optical fiber duct is mutually perpendicular to.In order to further enhance the function of integrated chip, by microcapillary slot A and microcapillary slot B, microballoon
Slot A and microballoon slot B, micro- bottle of slot A and micro- bottle of slot B are designed as cascade slot, in order to effectively avoid Whispering-gallery-mode microcavity from making when cascading
Cross-coupling occurs for the Whispering-gallery-mode at cascade Whispering-gallery-mode microcavity, and cascading the line space design between slot is 500 μm.
As shown in Figure 4 and Figure 5, in order to guarantee that the microballoon part with handle microballoon and the micro- bottle of part with micro- bottle of handle can be put into
In corresponding slot, therefore local widening is done at the place of intersecting vertically of conical fiber slot and microballoon slot and micro- bottle of slot, the shape widened
Shape is cylinder, and the diameter of cylinder is 50~100 μm wider than in the microballoon and micro- bottle of diameter for widening place, the depth etc. of cylinder
In the depth of conical fiber slot.
It is illustrated in figure 6 the schematic diagram for the conical fiber being placed in conical fiber slot, which is to be by diameter
250 μm of single mode optical fiber is made, and the cone area diameter of the conical fiber is 1~4 μm；It is illustrated in figure 7 that be placed in microtriche thin
The schematic diagram of microcapillary in tube seat, the diameter of the microcapillary are 50~100 μm；It is illustrated in figure 8 and is placed in microballoon slot
In the schematic diagram with handle microballoon, the shank diameter with handle microballoon be 125 μm, microsphere diameter be 200~300 μm；As shown in Figure 9
For be placed in micro- bottle of slot with micro- bottle of handle of schematic diagram, this is 125 μm with micro- bottle of handle of shank diameter, micro- bottle of diameter be 200~
300μm。
Product form of the invention is not limited to this case diagram and embodiment.For the common of the technical field of the invention
For technical staff, without departing from the inventive concept of the premise, a number of simple deductions or replacements can also be made, should all regard
For protection scope of the present invention.
Claims (6)
1. the integrated chip for improving optical fiber Echo Wall microcavity sensors stability, which is characterized in that including integrated chip sheet
Body, microcavity slot, conical fiber slot, carrying platform and through hole；
The carrying platform includes carrying platform A, carrying platform B, carrying platform C and carrying platform D；Carrying platform thickness phase
Together；Carrying platform A and carrying platform B is identical cuboid, and carrying platform C and carrying platform D are identical cuboid；Carrying
Platform C and the both ends carrying platform D are respectively equipped with through hole；The integrated chip ontology be placed in carrying platform A, carrying platform B,
In the rectangle frame that carrying platform C and carrying platform D are surrounded；Wherein, carrying platform A and carrying platform B is corresponding sides, for carrying
Extend the tail optical fiber at the conical fiber both ends of conical fiber slot；Carrying platform C and carrying platform D is corresponding sides, is prolonged for carrying
Stretch out the tail optical fiber at the Echo Wall microcavity both ends of microcavity slot；
Corresponding item number is arranged according to the needs of optical path quantity in the conical fiber slot, for placing conical fiber；When
Two or more conical fiber slots are set, enables it be parallel to each other and is placed on integrated chip ontology, at the same with integrated chip ontology
On microcapillary slot, microballoon slot and micro- bottle of slot intersect vertically, the conical fiber groove depth=microsphere diameter with handle microballoon+
Coupling distance+conical fiber bores area's radius+production conical fiber single mode optical fiber radius；Conical fiber groove width is than placing it
The single mode fiber diameters of interior production conical fiber are 10~20 μm wide, guarantee the vertical relation of conical fiber and Echo Wall microcavity；
The microcavity slot includes the microcapillary slot being successively placed in parallel on integrated chip ontology, microballoon slot, micro- bottle of slot；Microtriche
The distance between tubule slot and microballoon slot, microballoon slot and micro- bottle of slot are 3000~5000 μm；The microcavity slot of same type is according to measurement
Number of parameters needs to set gradually one or is greater than one, and the microcavity slot of two or more same types belongs to cascade slot, cascades slot
Between spacing be 300~500 μm；Microcapillary groove depth=conical fiber groove depth-production conical fiber single mode optical fiber
Radius-conical fiber cone area radius-coupling distance；Microcapillary groove width is wider by 10 than placing the microcapillary diameter in it
~20 μm, guarantee can keep vertical relation, built-in microcapillary with conical fiber after microcapillary is put into the slot；Microballoon
Groove depth=conical fiber groove depth-production conical fiber single mode optical fiber radius-conical fiber cone area radius-coupling
Distance-the microsphere radius with the handle microballoon+handle radius with handle microballoon；Microballoon groove width is than placing the handle with handle microballoon in it
Diameter is 10~20 μm wide, and microballoon can keep vertical relation with conical fiber after guarantee will be put into the slot with handle microballoon, built in
Band handle microballoon；Micro- bottle of groove depth=conical fiber groove depth-production conical fiber single mode optical fiber radius-conical fiber cone
Area's radius-coupling distance-with micro- bottle of handle micro- bottle of radius+with micro- bottle of handle of handle radius；Micro- bottle of groove width is than placing in it
10~20 μm wide with micro- bottle of shank diameter of handle, guarantee will be put into the slot latter micro- bottle with the micro- bottle of handle can be vertical with conical fiber holding
Relationship, the built-in band micro- bottle of handle.
2. according to claim 1 for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability, feature
It is, local widening is arranged in the place of intersecting vertically of conical fiber slot and microballoon slot, and it is circle with intersection point that the shape widened, which is cylinder,
The heart, diameter are 50~100 μm wider than in the microsphere diameter for widening place.
3. according to claim 1 for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability, feature
It is, local widening is arranged in the place of intersecting vertically of conical fiber slot and micro- bottle of slot, and it is circle with intersection point that the shape widened, which is cylinder,
The heart, diameter are 50~100 μm wider than in micro- bottle of diameter for widening place.
4. it is according to claim 1 or 2 or 3 for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability,
It is characterized in that, each parameter value range in setting conical fiber slot and microcavity groove depth is: the microsphere diameter with handle microballoon
It is 200~300 μm, coupling distance is 0~150 μm, and the cone area radius of conical fiber is 0.5~2 μm, makes the list of conical fiber
Mode fiber radius is 125 μm；Handle radius with handle microballoon is 62.5 μm；It is 200~300 μm with micro- bottle of handle of micro- bottle of radius, band
Micro- bottle of handle of handle radius is 62.5 μm.
5. it is according to claim 1 or 2 or 3 for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability,
It is characterized in that, the material of integrated chip is organic glass.
6. according to claim 4 for improving the integrated chip of optical fiber Echo Wall microcavity sensors stability, feature
It is, the material of integrated chip is organic glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810063204.8A CN108318064B (en) | 2018-01-19 | 2018-01-19 | For improving the integrated chip of optical fiber Echo Wall microcavity sensors stability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810063204.8A CN108318064B (en) | 2018-01-19 | 2018-01-19 | For improving the integrated chip of optical fiber Echo Wall microcavity sensors stability |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007256288A (en) * | 2006-03-24 | 2007-10-04 | Furukawa Electric North America Inc | Microsphere probe for optical surface microscopy and its usage |
| CN106896449A (en) * | 2017-05-04 | 2017-06-27 | 重庆大学 | The bandpass filter of coupling optical fiber and Echo Wall microcavity |
| CN107121157A (en) * | 2017-05-04 | 2017-09-01 | 重庆大学 | Couple the measurement filter of optical fiber and Echo Wall microcavity |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256288A (en) * | 2006-03-24 | 2007-10-04 | Furukawa Electric North America Inc | Microsphere probe for optical surface microscopy and its usage |
| CN106896449A (en) * | 2017-05-04 | 2017-06-27 | 重庆大学 | The bandpass filter of coupling optical fiber and Echo Wall microcavity |
| CN107121157A (en) * | 2017-05-04 | 2017-09-01 | 重庆大学 | Couple the measurement filter of optical fiber and Echo Wall microcavity |
Non-Patent Citations (1)
| Title |
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| 回音壁模式光学微腔: 基础与应用;邹长铃等;《中国科学: 物理学 力学 天文学》;20121231;第42卷(第11期);第1155-1175页 |
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