CN108279330A - The piezoelectric type microwave power detector of d33 based on cantilever beam - Google Patents
The piezoelectric type microwave power detector of d33 based on cantilever beam Download PDFInfo
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- CN108279330A CN108279330A CN201810387917.XA CN201810387917A CN108279330A CN 108279330 A CN108279330 A CN 108279330A CN 201810387917 A CN201810387917 A CN 201810387917A CN 108279330 A CN108279330 A CN 108279330A
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- piezoelectric
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
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Abstract
The present invention is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, sensor includes HR-Si substrate, coplanar waveguide transmission line and piezoelectric cantilever are provided on substrate, coplanar waveguide transmission line includes center signal line and ground wire, the both sides of the centrally disposed signal wire of ground wire, piezoelectric cantilever is fixed on by bridge pier between center signal line and the ground wire of side, one end load mass block of piezoelectric cantilever, on piezoelectric cantilever, dielectric layer is adhered in the top of non-load mass block, piezoelectric material layer is provided with above dielectric layer, on the top of piezoelectric material layer, interdigital electrode is set.Cantilever beam is pulled down by electrostatic force when device works, and according to piezoelectric effect, the interdigital electrode above piezoelectric cantilever will generate voltage by between, which corresponds with microwave power, therefore can be obtained the power of microwave signal by measuring voltage.The present invention is easily integrated and measured parameter directly exports in electrical signal form, and rear class detection circuit is simple.
Description
Technical field
The present invention relates to technical field of microelectronic mechanical systems, and in particular to a kind of d33 piezoelectricity based on cantilever beam declines
Wave power sensor.
Background technology
In microelectromechanical systems（MEMS）Microwave study in, microwave power be characterize microwave signal an important ginseng
Number.In the generation of microwave signal, transmission and receiving the research of links, the detection of microwave power is essential.Most
Common microwave power detector is the capacitance microwave power sensor based on cantilever beam structure, such as a kind of more cantilever beam structures
Microwave power detector（The patent No.：201310184504.9）, the online microwave power detector of MEMS beam types and its preparation
Method（The patent No.：201010223806.9）.Cantilever beam one end is fixed, can be altogether when microwave signal is from coplanar wave guide transmission
Surface wave is led and generates electrostatic force between cantilever beam, and cantilever beam other end drop-down, the capacitance between cantilever beam and test electrode is sent out
Changing, to carry out the measurement of microwave power.However, the output of capacitance microwave power sensor has non-linear, parasitism
Capacitance and distribution capacity are affected to sensitivity and measurement accuracy, and connection circuit is more complex etc..
Invention content
The present invention provides a kind of d33 piezoelectric type microwave power detectors based on cantilever beam, the microwave power detector
Using piezoelectric effect, generate to measure there is wider electric energy to export model with the one-to-one electric signal of microwave power
Enclose, be simple in structure, direct measurement the features such as, solve the above problems and greatly improve sensitivity.
In order to achieve the above object, the present invention is achieved by the following technical solutions：
The present invention is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, and sensor includes HR-Si substrate,
It includes center signal line and ground that coplanar waveguide transmission line and piezoelectric cantilever, coplanar waveguide transmission line are arranged on HR-Si substrate
Line, the both sides of the centrally disposed signal wire of ground wire, piezoelectric cantilever are fixed on center signal line and the ground wire of side by bridge pier
Between, one end load mass block of piezoelectric cantilever, on piezoelectric cantilever, the top of non-load mass block attachment dielectric layer,
It is provided with piezoelectric material layer above dielectric layer, interdigital electrode is set on the top of piezoelectric material layer, when microwave signal is altogether
When the waveguide transmission of face, piezoelectric cantilever is pulled down by electrostatic force, and piezoelectric material layer generates deformation therewith, according to piezoelectric effect, piezoelectricity
The distribution of charge changes in material layer, generation and the one-to-one voltage of microwave power, passes through and detects voltage progress microwave
The detection of power.
Further improvement of the present invention is：Piezoelectric cantilever is copper, piezoelectric cantilever made of aluminium or titanium.
Further improvement of the present invention is：Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
Further improvement of the present invention is：Mass block is nickel, cobalt, mass block made of aluminium or copper.
Further improvement of the present invention is：Dielectric layer is ZrO2、SiO2、Si3N4Or dielectric layer made of mica.
Further improvement of the present invention is：Piezoelectric material layer is piezoelectric material made of ZnO, PZT-5 series or AlN
Layer.
Further improvement of the present invention is：Interdigital electrode is platinum, gold, copper, interdigital electrode made of titanium or aluminium.
The beneficial effects of the invention are as follows：（1）The present invention uses cantilever beam structure, has the rigidity of structure low, simple in structure, opens
Road voltage is big, the advantages that being easy to realize by microfabrication；（2）The present invention realizes cantilever Liang Sicheng using piezoelectric effect --- electricity
The conversion of signal, practical measurement parameter are directly exported with electric signal, can directly be measured, and the complexity of conversion circuit is reduced；
（3）The piezoelectric type microwave power detector of the present invention is operated under d33 patterns, is generated Liang Sicheng variation using piezoelectric effect
Stress transmission, which is electric signal, higher output voltage, therefore has higher measurement accuracy；（4）The present invention is larger using density
Metal derby be placed on the end of cantilever beam, the displacement amplitude for increasing cantilever beam, while reducing resonant frequency.
The present invention is to be based on MEMS technology, and the principal advantages with MEMS are such as small, light-weight, low in energy consumption, convenient for collection
At etc., this series of advantages is that traditional microwave power detector is incomparable, therefore it has research well and application
Value.
Microwave power detector structure novel of the present invention is easily integrated and measured parameter is direct in electrical signal form
Output, rear class detection circuit simply wait various features.
Description of the drawings
Fig. 1 is the attached drawing of the present invention.
Fig. 2 is the side view of the present invention.
Fig. 3 is the vertical view of piezoelectric cantilever of the present invention.
Fig. 4 is the part lateral cross-sectional view of piezoelectric cantilever of the present invention.
Wherein：1- center signal lines；2- ground wires；3 mass blocks；4- piezoelectric cantilevers；5- dielectric layers；6- interdigital electrodes；7-
Piezoelectric material layer.
Specific implementation mode
In order to deepen the understanding of the present invention, the present invention is done below in conjunction with drawings and examples and is further retouched in detail
It states, the embodiment is only for explaining the present invention, does not constitute and limits to protection scope of the present invention.
As shown in Figs 1-4, the present invention is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, sensor
There is higher output voltage compared to traditional sensor, high sensitivity is simple in structure, the advantages that being easily integrated, the biography
Sensor includes HR-Si substrate, and coplanar waveguide transmission line and piezoelectric cantilever 4 are arranged on the HR-Si substrate, described coplanar
Waveguide transmission line includes center signal line 1 and ground wire 2, and the ground wire 2 is arranged in the both sides of the center signal line 1, the pressure
Electric cantilever beam 4 is fixed on by bridge pier between center signal line 1 and the ground wire 2 of side, one end of the piezoelectric cantilever 4
Load mass block 3, on the piezoelectric cantilever 4, do not load the mass block 3 top attachment dielectric layer 5, in the medium
The top of layer 5 is provided with piezoelectric material layer 7, interdigital electrode 6 is arranged on the top of the piezoelectric material layer 7, when microwave signal exists
When coplanar wave guide transmission, the piezoelectric cantilever 4 is pulled down by electrostatic force, and piezoelectric material layer 7 generates deformation therewith, is imitated according to piezoelectricity
Answer, on piezoelectric material layer 7 distribution of charge change, generate with the one-to-one voltage of microwave power, pass through detect voltage
Carry out the detection of microwave power.The piezoelectric cantilever 4 is copper, piezoelectric cantilever made of aluminium or titanium；The bridge pier is polycrystalline
Bridge pier made of silicon, aluminium, copper, tungsten or titanium；The mass block 3 is nickel, cobalt, mass block made of aluminium or copper, for reducing resonance
Frequency increases cantilever Liang Sicheng；The dielectric layer 5 is ZrO2、SiO2、Si3N4Or dielectric layer made of mica.For gold to be isolated
Belong to cantilever beam and piezoelectric material layer；The piezoelectric material layer 7 is piezoelectric material layer made of ZnO, PZT-5 series or AlN, piezoelectricity
Material layer is operated under d33 patterns, and for generating direct piezoelectric effect under external force, piezoelectric material is operated under d33 patterns,
Interdigital electrode is used to receive the charge of piezoelectric effect generation, and dielectric layer can stop the charge that piezoelectric layer generates as insulating layer
Leakage；The interdigital electrode 6 is platinum, gold, copper, interdigital electrode made of titanium or aluminium, for collecting direct piezoelectric effect generation
Charge.
The present invention operation principle be：When microwave signal is transmitted on CPW, the piezoelectricity being located above center signal line is outstanding
Arm beam will produce electrostatic force, and to make piezoelectric cantilever generate displacement, the surface of piezoelectric cantilever will generate stress variation, according to
Piezoelectric effect, piezoelectric material generate charge flowing, and the interdigital electrode above piezoelectric cantilever will generate voltage by between, the voltage
It is corresponded with microwave power, therefore can be obtained the power of microwave signal by measuring voltage.
The piezoelectric material of institute's sensor of the present invention is polarized using d33 modes, i.e., interdigital electrode is for receiving piezoelectric effect production
Raw charge, and make the direction of charge polarization vertical with stress direction suffered by clamped beam.
In order to further increase the value of output voltage to further promote accuracy of detection, the present invention needs in work to be production
Raw sufficiently large mechanical stress and strain are converted to electric energy, therefore, the nickel mass block of constant weight are loaded by cantilever beam end.
Claims (7)
1. a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, it is characterised in that：The sensor includes high resistant
Coplanar waveguide transmission line and piezoelectric cantilever is arranged in silicon substrate on the HR-Si substrate（4）, the coplanar waveguide transmission line
Including center signal line（1）And ground wire（2）, the ground wire（2）It is arranged in the center signal line（1）Both sides, the piezoelectricity
Cantilever beam（4）It is fixed on center signal line by bridge pier（1）With the ground wire of side（2）Between, the piezoelectric cantilever（4）
One end load mass block（3）, in the piezoelectric cantilever（4）Above, the mass block is not loaded（3）Top adhere to dielectric layer
（5）, in the dielectric layer（5）Top be provided with piezoelectric material layer（7）, in the piezoelectric material layer（7）Top setting fork
Refer to electrode（6）, when microwave signal is in coplanar wave guide transmission, the piezoelectric cantilever（4）It is pulled down by electrostatic force, piezoelectric material layer
（7）Deformation is generated therewith, according to piezoelectric effect, piezoelectric material layer（7）The distribution of upper charge changes, generation and microwave power
One-to-one voltage carries out the detection of microwave power by detecting voltage.
2. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Piezoelectric cantilever（4）For piezoelectric cantilever made of copper, aluminium or titanium.
3. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
4. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Mass block（3）For mass block made of nickel, cobalt, aluminium or copper.
5. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Dielectric layer（5）For ZrO2、SiO2、Si3N4Or dielectric layer made of mica.
6. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Piezoelectric material layer（7）For piezoelectric material layer made of ZnO, PZT-5 series or AlN.
7. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Interdigital electrode（6）For interdigital electrode made of platinum, gold, copper, titanium or aluminium.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810387917.XA CN108279330B (en) | 2018-04-26 | 2018-04-26 | Cantilever beam-based d33 piezoelectric microwave power sensor |
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| CN201810387917.XA CN108279330B (en) | 2018-04-26 | 2018-04-26 | Cantilever beam-based d33 piezoelectric microwave power sensor |
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| CN108279330B CN108279330B (en) | 2023-09-19 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109883534A (en) * | 2019-01-25 | 2019-06-14 | 北京航天计量测试技术研究所 | A kind of vibrative sensor and method for sensing based on microwave interference |
| CN109932561A (en) * | 2019-03-27 | 2019-06-25 | 南京邮电大学 | Microwave power detector based on compound arched girder |
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| RU2451942C1 (en) * | 2011-01-11 | 2012-05-27 | Государственное образовательное учреждение высшего профессионального образования Новгородский государственный университет имени Ярослава Мудрого | Selective detector of microwave power |
| CN103177904A (en) * | 2013-03-01 | 2013-06-26 | 清华大学 | Radio frequency MEMS (micro-electromechanical system) switch and forming method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109883534A (en) * | 2019-01-25 | 2019-06-14 | 北京航天计量测试技术研究所 | A kind of vibrative sensor and method for sensing based on microwave interference |
| CN109932561A (en) * | 2019-03-27 | 2019-06-25 | 南京邮电大学 | Microwave power detector based on compound arched girder |
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| CN108279330B (en) | 2023-09-19 |
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