CN108267935A - Exposure device - Google Patents

Abstract

The invention discloses a kind of exposure device, including exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；Light source assembly, projecting subassembly and plummer may be contained in exposure chamber；Light source assembly is used to generate exposure light；Projecting subassembly has lens, link component, supporting member and driving mechanism；Supporting member has erecting bed, and erecting bed is made of support member and supporting member, and first, second receiving part is attached to the upper end of supporting member；Support member is the prism component extended in above-below direction, and the lower end of supporting member is formed with conical section prominent downwards；Support member is provided with cylindrical portion, and supporting member includes stake, a pair of of strip supporting member and a plate-like portion, the lower end of strip supporting member being formed in supporting member and is embedded in cylindrical portion.The present invention can be fixedly supported the lens in projecting subassembly.

Description

Exposure device

Technical field

The present invention relates to exposure technique field, more particularly to a kind of exposure device.

Background technology

Traditional exposure device generally comprises exposure light source and projection eyeglass, which is used to generate exposure light, And the exposure light is irradiated to the device of pending exposure-processed by the projection eyeglass.

There are following technical problems for traditional exposure device：Above-mentioned traditional exposure device is inadequate to the support of projecting subassembly It is firm.

Therefore, it is necessary to a kind of new technical solution is proposed, to solve above-mentioned technical problem.

Invention content

The purpose of the present invention is to provide a kind of exposure device, the lens that can be fixedly supported in projecting subassembly.

To solve the above problems, technical scheme is as follows：

A kind of exposure device, the exposure device include exposure chamber, light source assembly, projecting subassembly, plummer, fixed branch Support member, braced frame；The light source assembly, the projecting subassembly and the plummer may be contained in the exposure chamber；Institute Light source assembly is stated for generating exposure light, and for exporting the generated exposure light to the projecting subassembly；Institute State projecting subassembly with lens, link component, it is described for the supporting member that swingingly supports the lens and for swinging Lens are to change the driving mechanism of the angle of the lens；The supporting member has erecting bed, and the erecting bed is by support portion Part is formed with the supporting member of upper end for being set to the support member, and the first receiving part, the second receiving part are attached to The upper end of the supporting member；The support member is the prism component extended in above-below direction, under the supporting member End is formed with conical section prominent downwards；It is provided on the two sides in the front-back direction of the upper end of the support member The hollow cylindrical portion vertically extended, the supporting member include stake, a pair of of strip supporting member and a plate-like portion, shape The lower end of the strip supporting member described in Cheng Yu in supporting member is embedded in the cylindrical portion；The cylindrical portion forms insertion section Point, the insertion portion has a space being inserted into for the strip supporting member, the end portion of the strip supporting member form to The protruding portion that the support member protrudes.

Preferably, the protruding portion is supported by being embedded in the inside of the cylindrical portion by the support member.

Preferably, the plate-like portion is fixed on the upper part of the strip supporting member.

Preferably, the plate-like portion is tilted so that its rear end is located at the top of front end.

Preferably, the longitudinal section of the plate-like portion is substantially u-shaped.

Preferably, the plate-like portion is open downwards with the upper end for covering each strip supporting member.

Preferably, the central shaft being made of the insertion shaft portion in first receiving part, second receiving part The distance between lower surface of lens body of the lens is than the central shaft and the edge for being installed on the lens body The distance between the lower surface of track component in portion is small.

Preferably, the braced frame includes the first arm body, the second arm body and third arm body.

Preferably, link block is rotatably connected to the first arm body in the horizontal direction by the first rotary shaft, and And the second arm body is connected to the link block in the horizontal direction via the second rotary shaft.

Preferably, the cardinal extremity part of the first rotation axis support third arm body to rotate in the vertical direction, and institute Third arm body is stated to rotate in the vertical direction by first rotation axis.

Compared with the prior art, the present invention can be fixedly supported the lens in projecting subassembly.

Description of the drawings

Fig. 1 is the schematic diagram of the exposure device of the present invention.

Fig. 2 is the schematic diagram of the projecting subassembly in exposure device shown in FIG. 1.

Specific embodiment

With reference to the schematic diagram of figure 1 and Fig. 2, Fig. 1 for the exposure device of the present invention, Fig. 2 is in exposure device shown in FIG. 1 The schematic diagram of projecting subassembly.

The exposure device of the present invention is used to be exposed processing to display device or semiconductor devices.

The exposure device of the present invention includes exposure chamber 101, light source assembly 104, projecting subassembly 107, plummer 108, consolidates Determine support element 102, braced frame 103, the first transmitting mirror 105 and the second speculum 106.

The light source assembly, the projecting subassembly, the plummer, the securing supports, the braced frame are all provided with It is placed in the exposure chamber.

The light source assembly is used to export the generated exposure light to the throwing for generating exposure light Shadow component.Specifically, light source assembly is used to export exposure light to projecting subassembly by the first speculum and the second speculum.

The plummer is used to carry the display device or semiconductor devices of pending exposure-processed.

The base end part connection securing supports of braced frame, and the terminal part connection light source assembly of braced frame.

Braced frame includes first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot Revolving member.Each moveable part of first movement frame, the second mobility framework and revolving member, which is formed, has locking structure First movable part of part is to the 7th movable part.

Braced frame include the first movable part to the 7th movable part and the first locking component to the 7th locking component, first Locking component is respectively used to lock the first movable part to the 7th movable part to the 7th locking component.

Securing supports are made of three support columns, and each support column is used for through adjuster adjustment length (height), and three A support column is spaced preset distance and is arranged in parallel, and three support columns are connected to each other by coupling bar, two support columns Coupling bar is connected with each other.

In braced frame, the cardinal extremity of first movement frame is attached partially to a support column of securing supports, and The cardinal extremity of second mobility framework is attached partially to the distal portion of first movement frame, the pedestal of revolving member and the second mobility framework Front end connection.

The braced frame includes the first arm body, the second arm body and third arm body.

Second mobility framework is provided with the third arm body for being configured to parallel rod component.Third arm body by first level bar and Second horizon bar connects, and first level bar, the second horizon bar and is arranged between the end of first level bar, the second horizon bar The first vertical rod, the second vertical rod be formed as parallelogram shape.

One support column of connecting block and securing supports is mutually fixed.

The braced frame further includes movable axis.Movable axis form for make that the first arm body pivots in the horizontal direction the One movable part, the first locking component are set in movable axis.

Coupling bar connects support column.

Second locking component, third locking component are arranged on corresponding first rotary shaft, in the second rotary shaft.

Connection part (distal portions of first movement frame) is connected to the distal end of the second arm body, has on connection part along vertical Nogata to pivot axis.It is provided with the 4th locking component on pivot axis, the second mobility framework is used for through pivot axis relative to the Second arm body of one mobility framework rotates in the horizontal direction.

First pivot and the second pivot are respectively equipped with the 6th locking component, the 7th locking component.6th movable part and the 7th Movable part is made of respectively the first pivot, the second pivot.

The cardinal extremity part of third arm body is by upper end coupling block via pivot axis and the connection part of the front end side of the second arm body Connection, to rotate freely in the horizontal direction.The pedestal of revolving member, which is fixed to, is arranged on vertical second mobility framework or lower end connection Connect the second vertical rod at the top and bottom of block.The pedestal of revolving member is mounted on the second shifting being made of parallel rod component The front end of dynamic frame, to be translated in vertical direction while posture is kept constant.

The cardinal extremity part of first rotation axis support third arm body to rotate in the vertical direction, and third arm body passes through the One rotation axis rotates in the vertical direction.The pedestal of revolving member is used for the displacement according to the distal portions of third arm body and position It moves.5th movable part for rotating in the vertical direction relative to third arm body, with the posture kept constant.It is being configured to parallel In the third arm body of link component, the base end part of first level bar and the second horizon bar is pivotally supported by the first rotation, with vertically Direction rotates, so as to be swung up in entire Vertical Square.5th movable part is provided with the 5th locking component.

Have mounted on the revolving member of the front end of the second mobility framework and turned centered on the first pivot relative to pedestal Dynamic the first rotating part and surround the second pivotally supported second rotating part relative to the first rotating part.First pivot Axis is set as being parallel to the axis in the mobile vertical-horizontal direction of third arm body, and the first rotating part is used for around horizontal first Pivot is rotated along perpendicular.

Second pivot is arranged on the first rotating part, and as the axis vertical with the first pivot, the second rotating part is used It is pivoted in around second.

Second rotating part is the component as the bracket for being equipped with light source assembly, and light source assembly is attached to the second rotation section Point.

Specifically, the head body of light source assembly is installed on the second rotating part.

First movement frame is used to turn to the from the cardinal extremity part of the first arm body connecting with connecting block by movable axis The cardinal extremity part of two mobility frameworks.

Head body is built-in with to be made for applying ultrasonic activation to the vibrating body of the housing body holding by head body Vibration machine firmly.Vibrating body is connected with head body.Vibrating body is for driving head body to vibrate, so that light source group The display device described in directive while head body is vibrated of light caused by part.

First movable part of braced frame is used to adjust position and/or the posture of light source assembly to the 7th movable part.I.e. One mobility framework is used for by mobile to determine the position in the horizontal direction of light source assembly, and the second mobility framework is used to lead to It crosses and moves to determine the position of light source assembly in vertical direction.In addition, the first rotating part and the second rotating part are used to adjust The position of whole light source assembly and/or posture.

After positioning and stance adjustment completes, the first movable part of operation to the locking component of the 7th movable part is to lock the One movable part to the 7th movable part does not move.It, can be steady by light source assembly by the way that all locking components is made to enter lock-out state Surely it keeps and is fixed on adjustment position to position location.

Since the second mobility framework is in the up-down direction using parallel rod component, the tip portion of the second mobility framework can Relative to cardinal extremity part translation, the rotation structure of the distal portions of the second mobility framework can be connected to certain posture support The pedestal of part.

The first movable part to the 7th movable part between front end and front end is arranged on to be used to make light source by mobile Component is located at any position in space, so as to which the posture of light source assembly be positioned.

Locking component can be arranged on the first movable part to the 7th movable part.

First arm body and the second arm body are all formed as rectangular frame shape.

Link block is rotatably connected to the first arm body in the horizontal direction by the first rotary shaft, and the second arm body passes through Link block is connected to by the second rotary shaft in the horizontal direction.

First locking component, the second locking component, third locking component are used to hold rotary shaft with scheduled angle solid It is fixed.

The both ends of first level bar, which are connected to, is arranged on the upper end coupling block of the second vertical rod and lower end coupling block, to pass through The first rotation axis and the second rotation axis that axis is arranged in the horizontal direction rotate in the vertical direction.

Projecting subassembly has lens 1071 and the supporting member 1072 for swingingly supporting lens.

Projecting subassembly is additionally provided with to swing lens to change the driving mechanism of the angle of lens and be configured to make The link component that the oscillating motion of mirror synchronizes.

Supporting member has the erecting bed being fixed on mounting portion.Erecting bed is by being fixed on the support member of mounting portion and setting The supporting member for being placed in the upper end of support member is formed.First receiving part, the second receiving part are attached to supporting member Upper end.

Support member is the prism component extended in above-below direction.It is formed in the lower end of supporting member and protrudes downwards Conical section.

Supporting member is made of the stake being fixed on mounting surface, is used as mounting portion by the way that conical section is inserted into mounting surface Point.The hollow cylindrical portion vertically extended is provided on the two sides in the front-back direction of the upper end of support member. Supporting member further includes a pair of of strip supporting member and a plate-like portion.The lower end for being formed in the strip supporting member in supporting member is embedding Together in cylindrical portion.I.e. cylindrical portion forms insertion portion, which has the space being inserted into for strip supporting member.

The end portion of a pair of of strip supporting member forms the protruding portion prominent to downside (support member).Protruding portion passes through embedding It is supported together in the inside of cylindrical portion by support member.A pair of of strip supporting member is in a state that each protruding portion is inserted into cylindrical portion Discretely extend upward in the longitudinal direction.Plate-like portion is fixed on the upper part of strip supporting member.Plate-like portion tilt with Its rear end is made to be located at the top of front end.The longitudinal section of plate-like portion is substantially u-shaped, and plate-like portion is open to cover each strip downwards The upper end of supporting member.

By the way that the protruding portion of a pair of of strip supporting member is inserted into cylindrical portion, so as to which supporting member is installed on support member. Therefore, by rising supporting member, strip supporting member is extracted from cylindrical portion, supporting member can be removed from support member.

In the upper end of erecting bed, i.e. the upper surface of the plate-like portion of supporting member is equipped with the first receiving part, the second reception Component.First receiving part, the second receiving part are connect with lens, and the first receiving part, the second receiving part form lens The central shaft of pendulum motion.First receiving part, the second receiving part are arranged at a predetermined interval in the axial direction of central shaft.First Receiving part, the second receiving part are arranged on the downside near the leading flank of lens body.The lower part setting of first receiving part Front end in the upper surface of plate-like portion, the top of the second receiving part are arranged on the rear end of the upper surface of plate-like portion.

First receiving part, the second receiving part are formed by the bar-like member for bending to L-shaped.First receiving part, Two receiving parts are made of attachment and insertion shaft portion.Attachment is elongated columned component, and attachment is from plate-like portion Upper surface just extend vertically upward.It is elongated columned component to be inserted into shaft portion, is inserted into shaft portion and attachment Front end continuously extends, and parallelly rearward extends with plate-like portion.It is formed about in the front end for being inserted into shaft portion oriented The cricoid contact site that radial outside protrudes.Contact site is formed by abutting to limit the first connecting portion part with the first connecting portion part The abutting part (retainer) moved downwards.Shaft portion is inserted into from the leading flank of lens body to trailing flank to extend.It is inserted into axle portion Divide with the axis being inclined relative to horizontal.It is inserted into the central shaft that shaft portion forms the pendulum motion of lens.

Lens include lens body, and track component is fixed in the edge part of lens body.In lens body, with center An orthogonal side of the axial direction of axis becomes the lower end leading flank near mounting portion, and another side is to become from peace The mode of the farthest upper end trailing flank in dress portion tilts.

Two track components are mounted on the edge part of lens body.Track component is spaced up scheduled in the axis of central shaft Interval configuration.A track component in two track components is arranged on the front end of lens body and the front-rear direction of lens body Middle part between.Another track component of two track components be arranged on lens body rear end and lens body it is front and rear Between the middle part in direction.Track component is the elongated prism portion extended in left-right direction in a manner of with orthogonality of center shaft Part.The upper surface of track component is engaged with the back side of lens body.Track component extends on the left and right ends of lens body.

The first connecting portion part, second connecting portion part are separately fixed at the middle section of the left and right directions of track component.First Connecting component, second connecting portion part are configured to the U-shaped of upward opening.The first connecting portion part, second connecting portion part have proximal end Part and distal portions.

The first connecting portion part, second connecting portion part are than the leading flank of lens body, trailing flank closer in lens body Centre, the first connecting portion part, second connecting portion part are orthogonal to the central shaft of lens body.The first connecting portion part, second connecting portion part Between interval relative narrower.The both ends of the length direction of the plate-like portion of supporting member are connect with the first connecting portion part, second Element crosswise along the axially extending of central shaft.

Projecting subassembly also has fixed part.Fixed part has along the longitudinal wall part of track component and from rear side side forward The cross wall portion of face extension.Front end is formed as flat bearing portion, upward from the front end of fixed part (front end in cross wall portion) Side bends towards lens.The bearing portion for being set to lens body side prolongs from the lower surface of track component towards lens body side It stretches.The internal diameter axis hole bigger than the outer diameter of the first receiving part, the insertion shaft portion of the second receiving part is formed on bearing portion. Axis hole is maintained at the inside of the bearing in the through hole for being set to bearing portion.I.e. described lens body side is provided with bearing portion, if The bearing being placed in the through hole of bearing portion swingably supports the insertion shaft portion of the first receiving part, the second receiving part.

Lens have the insertion shaft portion of the first receiving part, the second receiving part in downside.It is each to be inserted into shaft portion direction The trailing flank of lens body protrudes.

In a state that lens body is supported component support, the outer edge part of the axis hole in the front surface of bearing portion It is inserted into the contact site for being inserted into shaft portion, is moved down with limiting the first connecting portion part, second connecting portion part and lens, from And lens are positioned.Axis hole is formed in the lower surface than track component closer to the bearing portion of lens body side.Therefore, by It is inserted into the following table of the distance between the central shaft of shaft portion composition and the lower surface of lens body than the central shaft and track component The distance between face is small.

Driving mechanism includes driver, pulley, connecting line.Driver is arranged on the lower surface of the plate-like portion of supporting member. Driver is used to swing lens and lens are maintained at scheduled angle.Driver is, for example, rotary pneumatic driver.

Driver includes being fixed on driving main body on the lower surface of plate-like portion and from the center for the upper surface for driving main body The power transmission shaft that part upwardly extends.Discoid pulley is installed in the front end of power transmission shaft.Pulley is transmitted by power Axis drives and rotates.One end of every connecting line is fixed on the peripheral portion of pulley.The other end of every connecting line by from The pulley that the upper surface of plate-like portion on the front side of driver protrudes is connected to the first connecting portion part.The other end of a piece connecting line It is fixed on the left side (front side) of the central shaft at the back side of the first connecting portion part.The other end of another connecting line is fixed on than first The position of the central shaft at the back side of connecting component (rear side) on the right side.Between the fixed connecting line of the other end and central shaft away from From the radius for being set to be less than pulley.Therefore, the swing angle of lens is bigger than the rotation angle of the power transmission shaft of driver.

When driver starts, power transmission shaft rotation.The rotary force of power transmission shaft is transmitted via pulley and connecting line To the first connecting portion part, lens are swung centered on central shaft, so that lens are towards predetermined angular.

During support member is fixed on setting unit, the conical section of support member hits mounting surface, and support Component is vertically fixed to installation section.

The lower end (protruding portion) of the strip supporting member of supporting member is inserted into the cylindrical portion of support member.Protruding portion fills It fits in cylindrical portion, and supporting member is supported in the top of support member.

When insertion shaft portion slides in axis hole, the first receiving part, the rear end part of the second receiving part and insertion The contact site contact of shaft portion.First receiving part, moving further downward for the second receiving part are restricted, and determine the One receiving part, the second receiving part and the first connecting portion part, the relative position of second connecting portion part.

Since the first connecting portion part, second connecting portion part are fixed on track component, when lens body is swung, act on The stress of mirror main body can be to avoid the damage to lens body.According to above-described embodiment, it is inserted into shaft portion and is provided with contact site, connect Contact portion is used to limiting the first connecting portion part, second connecting portion part moves down.Therefore, it is possible to prevent from being inserted into inserting in axis hole The position for entering shaft portion deviates in the axial direction, and can steadily swing lens.

It is supported since lens are mounted platform via multiple insertion shaft portions and axis hole, so lens can be swung.

Due to multiple the first connecting portion parts, second connecting portion part is configured near the center of lens body, and support first connects Relay part, second connecting portion part the length of plate-like portion can reduce the size of supporting member.

The central shaft and center of gravity of lens are relatively near to each other.Therefore, because the load of lens and generated near central shaft Torque reduce, so the oscillatory forces of lens can be reduced.

Fixed the first connecting portion part on the rail member, second connecting portion part and the first receiving part, the second receiving part Part is located on position corresponding with track component.

The first connecting portion part, second connecting portion part are formed with axis hole.Alternatively, the first receiving part, in the second receiving part Axis hole is formed, the first connecting portion part forms on second connecting portion part and is inserted into axle portion.

Protruding portion is arranged on the lower part of supporting member, and protruding portion is inserted into the cylindrical portion (insertion section) of support member, bearing Component is mounted on the top of support member.Can also protrusion be set on the top of support member, be set in the lower part of supporting member It is inserted into the insertion section of protrusion.

Through the above technical solutions, the present invention can be fixedly supported the lens in projecting subassembly.

In conclusion although the present invention is disclosed above with preferred embodiment, above preferred embodiment is not to limit The system present invention, those of ordinary skill in the art without departing from the spirit and scope of the present invention, can make various changes and profit Decorations, therefore protection scope of the present invention is subject to the range that claim defines.

Claims (10)

1. a kind of exposure device, which is characterized in that the exposure device includes exposure chamber, light source assembly, projecting subassembly, carrying Platform, securing supports, braced frame；

The light source assembly, the projecting subassembly and the plummer may be contained in the exposure chamber；

The light source assembly is used to export the generated exposure light to the projection group for generating exposure light Part；

The projecting subassembly has lens, link component, for the supporting member that swingingly supports the lens and for putting The lens are moved to change the driving mechanism of the angle of the lens；

The supporting member has erecting bed, and the erecting bed is by support member and the upper end for being set to the support member Supporting member is formed, and the first receiving part, the second receiving part are attached to the upper end of the supporting member；

The support member is the prism component extended in above-below direction, and the lower end of the supporting member, which is formed with, dashes forward downwards The conical section gone out；

The hollow tubular vertically extended is provided on the two sides in the front-back direction of the upper end of the support member Portion, the supporting member include stake, a pair of of strip supporting member and a plate-like portion, the item being formed in the supporting member The lower end of shape supporting member is embedded in the cylindrical portion；

The cylindrical portion forms insertion portion, and the insertion portion has the space being inserted into for the strip supporting member, the item The end portion of shape supporting member forms the protruding portion prominent to the support member.

2. exposure device according to claim 1, which is characterized in that the protruding portion is by being embedded in the cylindrical portion Inside and supported by the support member.

3. exposure device according to claim 1, which is characterized in that the plate-like portion is fixed on the strip supporting member On upper part.

4. exposure device according to claim 1, which is characterized in that the plate-like portion is tilted so that its rear end is located at front end Top.

5. exposure device according to claim 1, which is characterized in that the longitudinal section of the plate-like portion is substantially u-shaped.

6. exposure device according to claim 1, which is characterized in that the plate-like portion is open downwards each described to cover The upper end of strip supporting member.

7. exposure device according to claim 1, which is characterized in that received by first receiving part, described second The distance between lower surface of lens body for being inserted into central shaft and the lens that shaft portion is formed in component is than in described The distance between the lower surface of track component of edge part of the mandrel with being installed on the lens body is small.

8. exposure device according to claim 1, which is characterized in that the braced frame includes the first arm body, the second arm Body and third arm body.

9. exposure device according to claim 8, which is characterized in that link block by the first rotary shaft in the horizontal direction The first arm body is rotatably connected to, and the second arm body is connected to institute in the horizontal direction via the second rotary shaft State link block.

10. exposure device according to claim 9, which is characterized in that the base of the first rotation axis support third arm body Part is held to rotate in the vertical direction, and the third arm body is rotated in the vertical direction by first rotation axis.