CN108490740A - System for executing exposure-processed - Google Patents

System for executing exposure-processed Download PDF

Info

Publication number
CN108490740A
CN108490740A CN201810150944.5A CN201810150944A CN108490740A CN 108490740 A CN108490740 A CN 108490740A CN 201810150944 A CN201810150944 A CN 201810150944A CN 108490740 A CN108490740 A CN 108490740A
Authority
CN
China
Prior art keywords
receiving part
processed
exposure
lens
shaft portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201810150944.5A
Other languages
Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foshan Lieutenant Technology Co Ltd
Original Assignee
Foshan Lieutenant Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foshan Lieutenant Technology Co Ltd filed Critical Foshan Lieutenant Technology Co Ltd
Priority to CN201810150944.5A priority Critical patent/CN108490740A/en
Publication of CN108490740A publication Critical patent/CN108490740A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Lens Barrels (AREA)

Abstract

The invention discloses a kind of systems for executing exposure-processed, including exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；Light source assembly, projecting subassembly and plummer may be contained in exposure chamber；Light source assembly is for generating exposure light；Supporting member in projecting subassembly is provided with supporting member, and supporting member is equipped with the first, second receiving part, and the first, second receiving part constitutes the central shaft of the pendulum motion of lens；First, second receiving part is made of attachment and insertion shaft portion, and attachment just extends vertically upward from the upper surface of plate-like portion；It is inserted into the columned component that shaft portion is elongated, the front end for being inserted into shaft portion and attachment continuously extends, and parallelly rearward extends with plate-like portion, and the front end for being inserted into shaft portion is formed about oriented radial outside cricoid contact site outstanding.The present invention can adjust angle of the projecting subassembly in the system for executing exposure-processed.

Description

System for executing exposure-processed
Technical field
The present invention relates to exposure technique fields, more particularly to a kind of system for executing exposure-processed.
Background technology
The system for being traditionally used for executing exposure-processed generally comprises exposure light source and projection eyeglass, which is used for Exposure light is generated, and the exposure light is irradiated to the device of pending exposure-processed by the projection eyeglass.
The projection eyeglass is usually to fix in the above-mentioned position for being traditionally used for executing in the system of exposure-processed and angle , that is to say, that the projection eyeglass can not change its angle for receiving exposure light or exporting exposure light.
It is above-mentioned to be traditionally used for holding when needing to be exposed processing to the bevelled display device of tool or semiconductor devices Exposure light of the system of row exposure-processed without the bevelled display device of the normal direction tool or semiconductor devices output the face inclined-plane Line carries out more preferably exposure-processed to treat the display device for being exposed processing or semiconductor devices.
Therefore, it is necessary to propose a kind of new technical solution, to solve the above technical problems.
Invention content
The purpose of the present invention is to provide a kind of system for executing exposure-processed, can adjust projecting subassembly for Execute the angle in the system of exposure-processed.
To solve the above problems, technical scheme is as follows：
A kind of system for executing exposure-processed, the system for executing exposure-processed include exposure chamber, light Source component, projecting subassembly, plummer, securing supports, braced frame；It the light source assembly, the projecting subassembly and described holds Microscope carrier may be contained in the exposure chamber；The light source assembly is for generating exposure light, and being used for will be generated described Exposure light is exported to the projecting subassembly；There is erecting bed, the erecting bed to include for supporting member in the projecting subassembly The upper surface of supporting member, the plate-like portion of the supporting member is equipped with the first receiving part, the second receiving part, and described first connects Receive component, second receiving part is connect with the lens of the projecting subassembly, first receiving part, second reception Component constitutes the central shaft of the pendulum motion of the lens, and the lower part of first receiving part is arranged in the upper of the plate-like portion The top of the front end on surface, second receiving part is arranged in the rear end of the upper surface of the plate-like portion；Described first Receiving part, second receiving part are formed by the bar-like member for bending to L-shaped, first receiving part, described Two receiving parts are by attachment and are inserted into shaft portion and constitute, and the attachment is elongated columned component, the attachment Just extend vertically upward from the upper surface of the plate-like portion；The columned component for being inserted into shaft portion and being elongated, it is described It is inserted into shaft portion and the front end of the attachment continuously extends, and parallelly rearward extend with the plate-like portion, it is described The front end for being inserted into shaft portion is formed about oriented radial outside cricoid contact site outstanding.
Preferably, between first receiving part, second receiving part are in the axial direction of the central shaft to make a reservation for Every arrangement.
Preferably, first receiving part, second receiving part are arranged before the lens body of the lens Downside near side.
Preferably, the insertion shaft portion extends from the leading flank of the lens body to trailing flank.
Preferably, the shaft portion that is inserted into is protruded towards the trailing flank of the lens body.
Preferably, there are two track components for the edge part installation of the lens body.
Preferably, the first connecting portion part, second connecting portion part are separately fixed in the left and right directions of the track component Between part.
Preferably, the contact site composition limits the first connecting portion part by being abutted with the first connecting portion part The abutting part moved downwards.
Preferably, the shaft portion that is inserted into has the axis being inclined relative to horizontal.
Preferably, the central shaft for being inserted into shaft portion and constituting the pendulum motion of the lens.
Compared with the prior art, the present invention can adjust angle of the projecting subassembly in the system for executing exposure-processed, from And the display device for being exposed processing or semiconductor devices progress more preferably exposure-processed can be treated.
Description of the drawings
Fig. 1 is the schematic diagram of the system for executing exposure-processed of the present invention.
Fig. 2 is the schematic diagram of the projecting subassembly in the system shown in FIG. 1 for executing exposure-processed.
Specific implementation mode
With reference to figure 1 and Fig. 2, Fig. 1 is the schematic diagram of the system for executing exposure-processed of the present invention, and Fig. 2 is shown in Fig. 1 The schematic diagram for executing the projecting subassembly in the system of exposure-processed.
The system for executing exposure-processed of the present invention to display device or semiconductor devices for being exposed processing.
The system for executing exposure-processed of the present invention includes exposure chamber 101, light source assembly 104, projecting subassembly 107, plummer 108, securing supports 102, braced frame 103, the first transmitting mirror 105 and the second speculum 106.
The light source assembly, the projecting subassembly, the plummer, the securing supports, the braced frame are all provided with It is placed in the exposure chamber.
The light source assembly is used to export the generated exposure light to the throwing for generating exposure light Shadow component.Specifically, light source assembly is for being exported exposure light to projecting subassembly by the first speculum and the second speculum.
The plummer is used to carry the display device or semiconductor devices of pending exposure-processed.
The base end part of braced frame is connected and fixed support element, and the terminal part of braced frame connects light source assembly.
Braced frame includes first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot Revolving member.Each moveable part of first movement frame, the second mobility framework and revolving member, which is constituted, has locking structure First movable part of part is to the 7th movable part.
Braced frame include the first movable part to the 7th movable part and the first locking component to the 7th locking component, first Locking component is respectively used to lock the first movable part to the 7th movable part to the 7th locking component.
Securing supports are made of three support columns, and each support column is used for through adjuster adjustment length (height), and three A support column is spaced preset distance and is arranged in parallel, and three support columns are connected to each other by coupling bar, two support columns Coupling bar is connected with each other.
In braced frame, the cardinal extremity of first movement frame is attached partially to a support column of securing supports, and The cardinal extremity of second mobility framework is attached partially to the distal portion of first movement frame, the pedestal of revolving member and the second mobility framework Front end connection.
The braced frame includes the first arm body, the second arm body and third arm body.
Second mobility framework is provided with the third arm body for being configured to parallel rod component.Third arm body by first level bar and Second horizon bar connect, first level bar, the second horizon bar and be arranged first level bar, the second horizon bar end between The first vertical rod, the second vertical rod be formed as parallelogram shape.
One support column of connecting block and securing supports is mutually fixed.
The braced frame further includes movable axis.Movable axis constitutes for making that the first arm body pivots in the horizontal direction One movable part, the first locking component are set in movable axis.
Coupling bar connects support column.
Second locking component, third locking component are arranged in corresponding first rotary shaft, the second rotary shaft.
Connection part (distal portions of first movement frame) is connected to the distal end of the second arm body, has along vertical on connection part Histogram to pivot axis.It is provided with the 4th locking component on pivot axis, the second mobility framework is used for through pivot axis relative to the Second arm body of one mobility framework rotates in the horizontal direction.
First pivot and the second pivot are respectively equipped with the 6th locking component, the 7th locking component.6th movable part and the 7th Movable part is made of the first pivot, the second pivot respectively.
The cardinal extremity part of third arm body is by upper end coupling block via the connection part of the front end side of pivot axis and the second arm body Connection, to rotate freely in the horizontal direction.The pedestal of revolving member is fixed to setting and joins in vertical second mobility framework or lower end Connect the second vertical rod at the top and bottom of block.The pedestal of revolving member is mounted on the second shifting being made of parallel rod component The front end of dynamic frame, to be translated in vertical direction while keeping constant posture.
First rotation axis supports the cardinal extremity part of third arm body to rotate in the vertical direction, and third arm body passes through the One rotation axis rotates in the vertical direction.The pedestal of revolving member is used for the displacement according to the distal portions of third arm body and position It moves.5th movable part for rotating in the vertical direction relative to third arm body, with the posture kept constant.It is being configured to parallel In the third arm body of link component, the base end part of first level bar and the second horizon bar is pivotally supported by the first rotation, with vertically Direction rotates, to be swung up in entire Vertical Square.5th movable part is provided with the 5th locking component.
Revolving member mounted on the front end of the second mobility framework, which has, to be turned relative to pedestal centered on the first pivot The first dynamic rotating part, and surround the second pivotally supported second rotating part relative to the first rotating part.First pivot Axis is set as being parallel to the axis in the mobile vertical-horizontal direction of third arm body, and the first rotating part is used to surround horizontal first Pivot is rotated along perpendicular.
Second pivot is arranged on the first rotating part, and as the axis vertical with the first pivot, the second rotating part is used It is pivoted in around second.
Second rotating part is the component as the bracket for being equipped with light source assembly, and light source assembly is attached to the second rotation section Point.
Specifically, the head body of light source assembly is installed on the second rotating part.
First movement frame is used to turn to the from the cardinal extremity part for the first arm body connecting with connecting block by movable axis The cardinal extremity part of two mobility frameworks.
Head body is built-in with to be made for applying ultrasonic activation to the vibrating body kept by the housing body of head body Vibration machine firmly.Vibrating body is connected with head body.Vibrating body is for driving head body to vibrate, so that light source group The display device described in directive while head body is vibrated of light caused by part.
First movable part of braced frame is used to adjust position and/or the posture of light source assembly to the 7th movable part.I.e. One mobility framework is used for by mobile to determine the position in the horizontal direction of light source assembly, and the second mobility framework is for leading to It crosses and moves to determine the position of light source assembly in vertical direction.In addition, the first rotating part and the second rotating part are for adjusting The position of whole light source assembly and/or posture.
After positioning and stance adjustment completes, the first movable part of operation to the locking component of the 7th movable part is to lock the One movable part to the 7th movable part does not move.It, can be steady by light source assembly by making all locking components enter lock-out state Surely it holds and fixes in adjustment position to position location.
Since the second mobility framework uses parallel rod component in the up-down direction, the tip portion of the second mobility framework can Relative to cardinal extremity part translation, the rotation structure of the distal portions of the second mobility framework can be connected to certain posture support The pedestal of part.
The first movable part being arranged between front end and front end is used to make light source by movement to the 7th movable part Component is located at any position in space, to position the posture of light source assembly.
Locking component can be arranged on the first movable part to the 7th movable part.
First arm body and the second arm body are all formed as rectangular frame shape.
Link block is rotatably connected to the first arm body in the horizontal direction by the first rotary shaft, and the second arm body passes through Link block is connected to by the second rotary shaft in the horizontal direction.
First locking component, the second locking component, third locking component are used to hold rotary shaft with scheduled angle solid It is fixed.
The both ends of first level bar are connected to the upper end coupling block and lower end coupling block being arranged in the second vertical rod, to pass through The first rotation axis and the second rotation axis that axis is arranged in the horizontal direction rotate in the vertical direction.
Projecting subassembly has lens 1071 and the supporting member 1072 for swingingly supporting lens.
Projecting subassembly is additionally provided with for swinging lens to change the driving mechanism of the angle of lens and be configured to make The link component that the oscillating motion of mirror synchronizes.
Supporting member has the erecting bed being fixed on mounting portion.Erecting bed is by being fixed on the support member of mounting portion and setting The supporting member for being placed in the upper end of support member is constituted.First receiving part, the second receiving part are attached to supporting member Upper end.
Support member is the prism component extended in above-below direction.It is formed in the lower end of supporting member and protrudes downwards Conical section.
Supporting member is made of the stake being fixed on mounting surface, is used as mounting portion by the way that conical section to be inserted into mounting surface Point.The hollow cylindrical portion vertically extended is provided on the two sides in the front-back direction of the upper end of support member. Supporting member further includes a pair of of strip supporting member and a plate-like portion.The lower end for being formed in the strip supporting member in supporting member is embedding Together in cylindrical portion.I.e. cylindrical portion constitutes insertion portion, which has the space being inserted into for strip supporting member.
The end portion of a pair of of strip supporting member is constituted to downside (support member) protruding portion outstanding.Protruding portion passes through embedding It is supported by support member together in the inside of cylindrical portion.A pair of of strip supporting member is in the state that each protruding portion is inserted into cylindrical portion Discretely extend upward in the longitudinal direction.Plate-like portion is fixed on the upper part of strip supporting member.Plate-like portion tilt with Its rear end is set to be located at the top of front end.The longitudinal section of plate-like portion is substantially u-shaped, and plate-like portion is open downwards to cover each strip The upper end of supporting member.
By the way that the protruding portion of a pair of of strip supporting member is inserted into cylindrical portion, to which supporting member is installed on support member. Therefore, by making supporting member rise, strip supporting member is extracted from cylindrical portion, supporting member can be removed from support member.
In the upper end of erecting bed, i.e. the upper surface of the plate-like portion of supporting member is equipped with the first receiving part, the second reception Component.First receiving part, the second receiving part are connect with lens, and the first receiving part, the second receiving part constitute lens The central shaft of pendulum motion.First receiving part, the second receiving part are arranged at a predetermined interval in the axial direction of central shaft.First The downside near the leading flank of lens body is arranged in receiving part, the second receiving part.The lower part of first receiving part is arranged The top of front end in the upper surface of plate-like portion, the second receiving part is arranged in the rear end of the upper surface of plate-like portion.
First receiving part, the second receiving part are formed by the bar-like member for bending to L-shaped.First receiving part, Two receiving parts are made of attachment and insertion shaft portion.Attachment is elongated columned component, and attachment is from plate-like portion Upper surface just extend vertically upward.It is elongated columned component to be inserted into shaft portion, is inserted into shaft portion and attachment Front end continuously extends, and parallelly rearward extends with plate-like portion.It is formed about in the front end for being inserted into shaft portion oriented Radial outside cricoid contact site outstanding.Contact site composition limits the first connecting portion part by being abutted with the first connecting portion part The abutting part (retainer) moved downwards.Shaft portion is inserted into from the leading flank of lens body to trailing flank to extend.It is inserted into axle portion Divide with the axis being inclined relative to horizontal.It is inserted into the central shaft that shaft portion constitutes the pendulum motion of lens.
Lens include lens body, and track component is fixed in the edge part of lens body.In lens body, with center The side that the axial direction of axis is orthogonal becomes the lower end leading flank near mounting portion, and another side is to become from peace The mode of the farthest upper end trailing flank in dress portion tilts.
Two track components are mounted on the edge part of lens body.Track component is spaced up scheduled in the axis of central shaft Interval configuration.The front-rear direction in the front end of lens body and lens body is arranged in a track component in two track components Middle part between.Another track component of two track components is arranged before and after the rear end of lens body and lens body Between the middle part in direction.Track component is the elongated prism portion extended in left-right direction in a manner of with orthogonality of center shaft Part.The upper surface of track component is engaged with the back side of lens body.Track component extends on the left and right ends of lens body.
The first connecting portion part, second connecting portion part are separately fixed at the middle section of the left and right directions of track component.First Connecting component, second connecting portion part are configured to the U-shaped of upward opening.The first connecting portion part, second connecting portion part have proximal end Part and distal portions.
The first connecting portion part, second connecting portion part are than the leading flank of lens body, trailing flank closer in lens body Centre, the first connecting portion part, second connecting portion part are orthogonal to the central shaft of lens body.The first connecting portion part, second connecting portion part Between interval relative narrower.The both ends of the length direction of the plate-like portion of supporting member are connect with the first connecting portion part, second Element crosswise along the axially extending of central shaft.
Projecting subassembly also has fixed part.Fixed part has along the longitudinal wall part of track component and from rear side side forward The cross wall portion that face extends.Front end is formed as flat bearing portion, upward from the front end (front end in cross wall portion) of fixed part Side bends towards lens.The bearing portion for being set to lens body side prolongs from the lower surface of track component towards lens body side It stretches.The internal diameter axis hole bigger than the outer diameter of the insertion shaft portion of the first receiving part, the second receiving part is formed on bearing portion. Axis hole is maintained at the inside of the bearing in the through hole for being set to bearing portion.The i.e. described lens body side is provided with bearing portion, if The bearing being placed in the through hole of bearing portion swingably supports the insertion shaft portion of the first receiving part, the second receiving part.
Lens have the insertion shaft portion of the first receiving part, the second receiving part in downside.It is each to be inserted into shaft portion direction The trailing flank of lens body protrudes.
In the state that lens body is supported component support, the outer edge part of the axis hole in the front surface of bearing portion It is inserted into the contact site for being inserted into shaft portion, is moved down with limiting the first connecting portion part, second connecting portion part and lens, from And lens are positioned.Axis hole is formed in the lower surface than track component closer to the bearing portion of lens body side.Therefore, by It is inserted into following table of the distance between the lower surface of central shaft and lens body that shaft portion is constituted than the central shaft and track component The distance between face is small.
Driving mechanism includes driver, pulley, connecting line.Driver is arranged in the lower surface of the plate-like portion of supporting member. Driver is for swinging lens and lens being maintained at scheduled angle.Driver is, for example, rotary pneumatic driver.
Driver includes the driving main body being fixed on the lower surface of plate-like portion and the center from the upper surface of driving main body The power transmission shaft that part upwardly extends.Discoid pulley is installed in the front end of power transmission shaft.Pulley is transmitted by power Axis drives and rotates.One end of every connecting line is fixed on the peripheral portion of pulley.The other end of every connecting line by from The upper surface pulley outstanding of plate-like portion on the front side of driver is connected to the first connecting portion part.The other end of a piece connecting line It is fixed on the left side (front side) of the central shaft at the back side of the first connecting portion part.The other end of another connecting line is fixed on than first The position of the central shaft at the back side of connecting component (rear side) on the right side.Between the fixed connecting line of the other end and central shaft away from From the radius for being set to be less than pulley.Therefore, the swing angle of lens is bigger than the rotation angle of the power transmission shaft of driver.
When driver starts, power transmission shaft rotation.The rotary force of power transmission shaft is transmitted via pulley and connecting line To the first connecting portion part, lens are swung centered on central shaft, so that lens are towards predetermined angular.
During support member is fixed on setting unit, the conical section of support member hits mounting surface, and supports Component is vertically fixed to installation section.
The lower end (protruding portion) of the strip supporting member of supporting member is inserted into the cylindrical portion of support member.Protruding portion fills It fits in cylindrical portion, and supporting member is supported in the top of support member.
When insertion shaft portion slides in axis hole, the first receiving part, the rear end part of the second receiving part and insertion The contact site of shaft portion contacts.First receiving part, moving further downward for the second receiving part are restricted, and determine the The relative position of one receiving part, the second receiving part and the first connecting portion part, second connecting portion part.
Since the first connecting portion part, second connecting portion part are fixed on track component, when lens body is swung, act on The stress of mirror main body can be to avoid the damage to lens body.According to above-described embodiment, it is inserted into shaft portion and is provided with contact site, connect Contact portion is used to limit the first connecting portion part, second connecting portion part moves down.Therefore, it is possible to prevent from being inserted into inserting in axis hole The position for entering shaft portion deviates in the axial direction, and can steadily swing lens.
Since lens are mounted platform bearing via multiple insertion shaft portions and axis hole, so lens can be swung.
Due to multiple the first connecting portion parts, second connecting portion part configures near the center of lens body, and support first connects Relay part, second connecting portion part the length of plate-like portion can reduce the size of supporting member.
The central shaft and center of gravity of lens are relatively near to each other.Therefore, because the load of lens and generated near central shaft Torque reduce, so the oscillatory forces of lens can be reduced.
Fixed the first connecting portion part on the rail member, second connecting portion part and the first receiving part, the second receiving part Part is located on position corresponding with track component.
The first connecting portion part, second connecting portion part are formed with axis hole.Alternatively, the first receiving part, in the second receiving part Axis hole is formed, the first connecting portion part forms on second connecting portion part and is inserted into axle portion.
Protruding portion is arranged in the lower part of supporting member, and protruding portion is inserted into the cylindrical portion (insertion section) of support member, bearing Component is mounted on the top of support member.Can also protrusion be set on the top of support member, be arranged in the lower part of supporting member It is inserted into the insertion section of protrusion.
Through the above technical solutions, the present invention can adjust angle of the projecting subassembly in the system for executing exposure-processed Degree carries out more preferably exposure-processed so as to treat the display device for being exposed processing or semiconductor devices.
In conclusion although the present invention is disclosed above with preferred embodiment, above preferred embodiment is not to limit The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention Decorations, therefore protection scope of the present invention is subject to the range that claim defines.

Claims (10)

1. a kind of system for executing exposure-processed, which is characterized in that the system for executing exposure-processed includes exposing Optical cavity room, light source assembly, projecting subassembly, plummer, securing supports, braced frame；
The light source assembly, the projecting subassembly and the plummer may be contained in the exposure chamber；
The light source assembly is used to export the generated exposure light to the projection group for generating exposure light Part；
Supporting member in the projecting subassembly has erecting bed, and the erecting bed includes supporting member, the supporting member The upper surface of plate-like portion is equipped with the first receiving part, the second receiving part, first receiving part, second receiving part It is connect with the lens of the projecting subassembly, first receiving part, second receiving part constitute the swing of the lens The central shaft of movement, the lower part of first receiving part are arranged in the front end of the upper surface of the plate-like portion, and described second The rear end in the upper surface of the plate-like portion is arranged in the top of receiving part；
First receiving part, second receiving part are formed by the bar-like member for bending to L-shaped, and described first receives Component, second receiving part by attachment and are inserted into shaft portion and are constituted, and the attachment is elongated columned component, The attachment just extends vertically upward from the upper surface of the plate-like portion；
The front end of the columned component for being inserted into shaft portion and being elongated, the insertion shaft portion and the attachment is continuously Extend, and parallelly rearward extend with the plate-like portion, the front end for being inserted into shaft portion is formed about oriented radial direction Outside cricoid contact site outstanding.
2. the system according to claim 1 for executing exposure-processed, which is characterized in that first receiving part, Second receiving part is arranged at a predetermined interval in the axial direction of the central shaft.
3. the system according to claim 1 for executing exposure-processed, which is characterized in that first receiving part, The downside near the leading flank of the lens body of the lens is arranged in second receiving part.
4. the system according to claim 3 for executing exposure-processed, which is characterized in that the insertion shaft portion is from institute The leading flank for stating lens body extends to trailing flank.
5. the system according to claim 3 for executing exposure-processed, which is characterized in that the insertion shaft portion direction The trailing flank of the lens body protrudes.
6. the system according to claim 3 for executing exposure-processed, which is characterized in that the edge of the lens body There are two track components for portion's installation.
7. the system according to claim 6 for executing exposure-processed, which is characterized in that the first connecting portion part, second Connecting component is separately fixed at the middle section of the left and right directions of the track component.
8. the system according to claim 7 for executing exposure-processed, which is characterized in that the contact site composition passes through It is abutted with the first connecting portion part and limits the abutting part that the first connecting portion part moves downwards.
9. the system according to claim 1 for executing exposure-processed, which is characterized in that the insertion shaft portion has The axis being inclined relative to horizontal.
10. the system according to claim 1 for executing exposure-processed, which is characterized in that the insertion shaft portion structure At the central shaft of the pendulum motion of the lens.
CN201810150944.5A 2018-02-13 2018-02-13 System for executing exposure-processed Withdrawn CN108490740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810150944.5A CN108490740A (en) 2018-02-13 2018-02-13 System for executing exposure-processed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810150944.5A CN108490740A (en) 2018-02-13 2018-02-13 System for executing exposure-processed

Publications (1)

Publication Number Publication Date
CN108490740A true CN108490740A (en) 2018-09-04

Family

ID=63340713

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810150944.5A Withdrawn CN108490740A (en) 2018-02-13 2018-02-13 System for executing exposure-processed

Country Status (1)

Country Link
CN (1) CN108490740A (en)

Similar Documents

Publication Publication Date Title
JP2020201494A (en) Positioning device for image stabilizer
JP2008189303A (en) Seat frame of seat for vehicle with motor with its seat carrier having two side members
JP3814460B2 (en) Reflector adjustment mechanism
JP2007120958A (en) Laser surveying apparatus
CN108490740A (en) System for executing exposure-processed
CN108490729A (en) Equipment for executing exposure-processed
KR100968365B1 (en) Jig for camera
JPH11114751A (en) Multidegree of freedom positioning stage
CN108445718A (en) Exposure sources
CN108415223A (en) Device for executing exposure-processed
CN108267828A (en) Exposure system
CN108267935A (en) Exposure device
TWI498935B (en) Scan head and scan arm using the same
CN102113911B (en) Supporter for medical imaging apparatus using multi-step and mult-axis
US20100050447A1 (en) Laser device
JP2006310709A (en) Holding device and method for semiconductor wafer
CN104728727B (en) Lighting device for motor-driven vehicle headlight adapter
JP2001082001A (en) Damping device for vibration control
JP5545973B2 (en) Vehicle headlamp
US4660798A (en) Handpiece support arrangement
JP3885964B2 (en) Curved surface polishing apparatus and curved surface polishing method
JP2014234973A (en) Sunlight panel unit
KR100628707B1 (en) Bonding apparatus
JP2008170226A (en) Laser marking device
CN221490239U (en) Support for holding mirror during operation

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication

Application publication date: 20180904

WW01 Invention patent application withdrawn after publication