CN108445718A - Exposure sources - Google Patents
Exposure sources Download PDFInfo
- Publication number
- CN108445718A CN108445718A CN201810150964.2A CN201810150964A CN108445718A CN 108445718 A CN108445718 A CN 108445718A CN 201810150964 A CN201810150964 A CN 201810150964A CN 108445718 A CN108445718 A CN 108445718A
- Authority
- CN
- China
- Prior art keywords
- exposure
- braced frame
- light source
- exposure sources
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention discloses a kind of exposure sources, including exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；Light source assembly, projecting subassembly and plummer may be contained in exposure chamber；Light source assembly is for generating exposure light；The base end part of braced frame is connected and fixed support element, and the terminal part of braced frame connects light source assembly；Braced frame includes the first, second mobility framework and revolving member；Braced frame includes the first movable part to the 7th movable part and the first locking component to the 7th locking component, and the first locking component to the 7th locking component is respectively used to lock the first movable part to the 7th movable part；Securing supports are made of three support columns, and three support columns are spaced preset distance and are arranged in parallel, and three support columns are connected to each other by coupling bar, and the coupling bar of two support columns is connected with each other, and coupling bar connects support column.The present invention can adjust position of the light source assembly in exposure sources.
Description
Technical field
The present invention relates to exposure technique field, more particularly to a kind of exposure sources.
Background technology
Traditional exposure sources generally comprise exposure light source and projection eyeglass, which is used to generate exposure light,
And the exposure light is irradiated to the device of pending exposure-processed by the projection eyeglass.
Position of the exposure light source in exposure sources is fixed, that is, traditional exposure light source can not adjust it and expose
Position in light device, therefore, traditional exposure sources, which can not be treated, to be exposed the device of processing and carries out more preferably at exposure
Reason.
Therefore, it is necessary to propose a kind of new technical solution, to solve the above technical problems.
Invention content
The purpose of the present invention is to provide a kind of exposure sources, can adjust position of the light source assembly in exposure sources.
To solve the above problems, technical scheme is as follows：
A kind of exposure sources, the exposure sources to display device or semiconductor devices for being exposed processing；It is described
Exposure sources include exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；The light source group
Part, the projecting subassembly and the plummer may be contained in the exposure chamber；The light source assembly is for generating exposure light
Line, and for exporting the generated exposure light to the projecting subassembly；The plummer is for carrying pending exposure
The display device or semiconductor devices of light processing；The base end part of the braced frame is connected and fixed support element, and the support
The terminal part of frame connects the light source assembly；The braced frame includes first movement frame, the second mobility framework and tool
There is the revolving member of the first orthogonal pivot, the second pivot；The braced frame include the first movable part to the 7th movable part with
And first locking component to the 7th locking component, first locking component is respectively used to the 7th locking component will be described
First movable part to the 7th movable part locks；The securing supports are made of three support columns, three support columns
It is spaced preset distance and is arranged in parallel, three support columns are connected to each other by coupling bar, two support columns
The coupling bar is connected with each other, and the coupling bar connects the support column.
Preferably, in the braced frame, the cardinal extremity of the first movement frame is attached partially to the fixed support
One support column of part, the cardinal extremity of second mobility framework are attached partially to the distal portion of the first movement frame,
The pedestal of the revolving member is connect with the front end of second mobility framework.
Preferably, the braced frame includes the first arm body, the second arm body and third arm body.
Preferably, the first arm body and the second arm body are all formed as rectangular frame shape.
Preferably, second mobility framework is provided with the third arm body for being configured to parallel rod component.
Preferably, the third arm body is connected by first level bar and the second horizon bar.
Preferably, the first level bar, second horizon bar and setting are in the first level bar, described second
The first vertical rod, the second vertical rod between the end of horizon bar are formed as parallelogram shape.
Preferably, the braced frame further includes movable axis, and the movable axis is constituted for making the first arm body in water
Square first movable part being pivoted up.
Preferably, first locking component is set in the movable axis.
Preferably, first movable part of the braced frame is used to adjust the light source group to the 7th movable part
The position of part and/or posture.
Compared with the prior art, the present invention can adjust position of the light source assembly in exposure sources, so as to pending exposure
The device of light processing carries out more preferably exposure-processed.
Description of the drawings
Fig. 1 is the schematic diagram of the exposure sources of the present invention.
Fig. 2 is the schematic diagram of the projecting subassembly in exposure sources shown in FIG. 1.
Specific implementation mode
It is the schematic diagram of the exposure sources of the present invention with reference to figure 1 and Fig. 2, Fig. 1, Fig. 2 is in exposure sources shown in FIG. 1
The schematic diagram of projecting subassembly.
The exposure sources of the present invention to display device or semiconductor devices for being exposed processing.
The exposure sources of the present invention include exposure chamber 101, light source assembly 104, projecting subassembly 107, plummer 108, consolidate
Determine support element 102, braced frame 103, the first transmitting mirror 105 and the second speculum 106.
The light source assembly, the projecting subassembly, the plummer, the securing supports, the braced frame are all provided with
It is placed in the exposure chamber.
The light source assembly is used to export the generated exposure light to the throwing for generating exposure light
Shadow component.Specifically, light source assembly is for being exported exposure light to projecting subassembly by the first speculum and the second speculum.
The plummer is used to carry the display device or semiconductor devices of pending exposure-processed.
The base end part of braced frame is connected and fixed support element, and the terminal part of braced frame connects light source assembly.
Braced frame includes first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot
Revolving member.Each moveable part of first movement frame, the second mobility framework and revolving member, which is constituted, has locking structure
First movable part of part is to the 7th movable part.
Braced frame include the first movable part to the 7th movable part and the first locking component to the 7th locking component, first
Locking component is respectively used to lock the first movable part to the 7th movable part to the 7th locking component.
Securing supports are made of three support columns, and each support column is used for through adjuster adjustment length (height), and three
A support column is spaced preset distance and is arranged in parallel, and three support columns are connected to each other by coupling bar, two support columns
Coupling bar is connected with each other.
In braced frame, the cardinal extremity of first movement frame is attached partially to a support column of securing supports, and
The cardinal extremity of second mobility framework is attached partially to the distal portion of first movement frame, the pedestal of revolving member and the second mobility framework
Front end connection.
The braced frame includes the first arm body, the second arm body and third arm body.
Second mobility framework is provided with the third arm body for being configured to parallel rod component.Third arm body by first level bar and
Second horizon bar connect, first level bar, the second horizon bar and be arranged first level bar, the second horizon bar end between
The first vertical rod, the second vertical rod be formed as parallelogram shape.
One support column of connecting block and securing supports is mutually fixed.
The braced frame further includes movable axis.Movable axis constitutes for making that the first arm body pivots in the horizontal direction
One movable part, the first locking component are set in movable axis.
Coupling bar connects support column.
Second locking component, third locking component are arranged in corresponding first rotary shaft, the second rotary shaft.
Connection part (distal portions of first movement frame) is connected to the distal end of the second arm body, has along vertical on connection part
Histogram to pivot axis.It is provided with the 4th locking component on pivot axis, the second mobility framework is used for through pivot axis relative to the
Second arm body of one mobility framework rotates in the horizontal direction.
First pivot and the second pivot are respectively equipped with the 6th locking component, the 7th locking component.6th movable part and the 7th
Movable part is made of the first pivot, the second pivot respectively.
The cardinal extremity part of third arm body is by upper end coupling block via the connection part of the front end side of pivot axis and the second arm body
Connection, to rotate freely in the horizontal direction.The pedestal of revolving member is fixed to setting and joins in vertical second mobility framework or lower end
Connect the second vertical rod at the top and bottom of block.The pedestal of revolving member is mounted on the second shifting being made of parallel rod component
The front end of dynamic frame, to be translated in vertical direction while keeping constant posture.
First rotation axis supports the cardinal extremity part of third arm body to rotate in the vertical direction, and third arm body passes through the
One rotation axis rotates in the vertical direction.The pedestal of revolving member is used for the displacement according to the distal portions of third arm body and position
It moves.5th movable part for rotating in the vertical direction relative to third arm body, with the posture kept constant.It is being configured to parallel
In the third arm body of link component, the base end part of first level bar and the second horizon bar is pivotally supported by the first rotation, with vertically
Direction rotates, to be swung up in entire Vertical Square.5th movable part is provided with the 5th locking component.
Revolving member mounted on the front end of the second mobility framework, which has, to be turned relative to pedestal centered on the first pivot
The first dynamic rotating part, and surround the second pivotally supported second rotating part relative to the first rotating part.First pivot
Axis is set as being parallel to the axis in the mobile vertical-horizontal direction of third arm body, and the first rotating part is used to surround horizontal first
Pivot is rotated along perpendicular.
Second pivot is arranged on the first rotating part, and as the axis vertical with the first pivot, the second rotating part is used
It is pivoted in around second.
Second rotating part is the component as the bracket for being equipped with light source assembly, and light source assembly is attached to the second rotation section
Point.
Specifically, the head body of light source assembly is installed on the second rotating part.
First movement frame is used to turn to the from the cardinal extremity part for the first arm body connecting with connecting block by movable axis
The cardinal extremity part of two mobility frameworks.
Head body is built-in with to be made for applying ultrasonic activation to the vibrating body kept by the housing body of head body
Vibration machine firmly.Vibrating body is connected with head body.Vibrating body is for driving head body to vibrate, so that light source group
The display device described in directive while head body is vibrated of light caused by part.
First movable part of braced frame is used to adjust position and/or the posture of light source assembly to the 7th movable part.I.e.
One mobility framework is used for by mobile to determine the position in the horizontal direction of light source assembly, and the second mobility framework is for leading to
It crosses and moves to determine the position of light source assembly in vertical direction.In addition, the first rotating part and the second rotating part are for adjusting
The position of whole light source assembly and/or posture.
After positioning and stance adjustment completes, the first movable part of operation to the locking component of the 7th movable part is to lock the
One movable part to the 7th movable part does not move.It, can be steady by light source assembly by making all locking components enter lock-out state
Surely it holds and fixes in adjustment position to position location.
Since the second mobility framework uses parallel rod component in the up-down direction, the tip portion of the second mobility framework can
Relative to cardinal extremity part translation, the rotation structure of the distal portions of the second mobility framework can be connected to certain posture support
The pedestal of part.
The first movable part being arranged between front end and front end is used to make light source by movement to the 7th movable part
Component is located at any position in space, to position the posture of light source assembly.
Locking component can be arranged on the first movable part to the 7th movable part.
First arm body and the second arm body are all formed as rectangular frame shape.
Link block is rotatably connected to the first arm body in the horizontal direction by the first rotary shaft, and the second arm body passes through
Link block is connected to by the second rotary shaft in the horizontal direction.
First locking component, the second locking component, third locking component are used to hold rotary shaft with scheduled angle solid
It is fixed.
The both ends of first level bar are connected to the upper end coupling block and lower end coupling block being arranged in the second vertical rod, to pass through
The first rotation axis and the second rotation axis that axis is arranged in the horizontal direction rotate in the vertical direction.
Projecting subassembly has lens 1071 and the supporting member 1072 for swingingly supporting lens.
Projecting subassembly is additionally provided with for swinging lens to change the driving mechanism of the angle of lens and be configured to make
The link component that the oscillating motion of mirror synchronizes.
Supporting member has the erecting bed being fixed on mounting portion.Erecting bed is by being fixed on the support member of mounting portion and setting
The supporting member for being placed in the upper end of support member is constituted.First receiving part, the second receiving part are attached to supporting member
Upper end.
Support member is the prism component extended in above-below direction.It is formed in the lower end of supporting member and protrudes downwards
Conical section.
Supporting member is made of the stake being fixed on mounting surface, is used as mounting portion by the way that conical section to be inserted into mounting surface
Point.The hollow cylindrical portion vertically extended is provided on the two sides in the front-back direction of the upper end of support member.
Supporting member further includes a pair of of strip supporting member and a plate-like portion.The lower end for being formed in the strip supporting member in supporting member is embedding
Together in cylindrical portion.I.e. cylindrical portion constitutes insertion portion, which has the space being inserted into for strip supporting member.
The end portion of a pair of of strip supporting member is constituted to downside (support member) protruding portion outstanding.Protruding portion passes through embedding
It is supported by support member together in the inside of cylindrical portion.A pair of of strip supporting member is in the state that each protruding portion is inserted into cylindrical portion
Discretely extend upward in the longitudinal direction.Plate-like portion is fixed on the upper part of strip supporting member.Plate-like portion tilt with
Its rear end is set to be located at the top of front end.The longitudinal section of plate-like portion is substantially u-shaped, and plate-like portion is open downwards to cover each strip
The upper end of supporting member.
By the way that the protruding portion of a pair of of strip supporting member is inserted into cylindrical portion, to which supporting member is installed on support member.
Therefore, by making supporting member rise, strip supporting member is extracted from cylindrical portion, supporting member can be removed from support member.
In the upper end of erecting bed, i.e. the upper surface of the plate-like portion of supporting member is equipped with the first receiving part, the second reception
Component.First receiving part, the second receiving part are connect with lens, and the first receiving part, the second receiving part constitute lens
The central shaft of pendulum motion.First receiving part, the second receiving part are arranged at a predetermined interval in the axial direction of central shaft.First
The downside near the leading flank of lens body is arranged in receiving part, the second receiving part.The lower part of first receiving part is arranged
The top of front end in the upper surface of plate-like portion, the second receiving part is arranged in the rear end of the upper surface of plate-like portion.
First receiving part, the second receiving part are formed by the bar-like member for bending to L-shaped.First receiving part,
Two receiving parts are made of attachment and insertion shaft portion.Attachment is elongated columned component, and attachment is from plate-like portion
Upper surface just extend vertically upward.It is elongated columned component to be inserted into shaft portion, is inserted into shaft portion and attachment
Front end continuously extends, and parallelly rearward extends with plate-like portion.It is formed about in the front end for being inserted into shaft portion oriented
Radial outside cricoid contact site outstanding.Contact site composition limits the first connecting portion part by being abutted with the first connecting portion part
The abutting part (retainer) moved downwards.Shaft portion is inserted into from the leading flank of lens body to trailing flank to extend.It is inserted into axle portion
Divide with the axis being inclined relative to horizontal.It is inserted into the central shaft that shaft portion constitutes the pendulum motion of lens.
Lens include lens body, and track component is fixed in the edge part of lens body.In lens body, with center
The side that the axial direction of axis is orthogonal becomes the lower end leading flank near mounting portion, and another side is to become from peace
The mode of the farthest upper end trailing flank in dress portion tilts.
Two track components are mounted on the edge part of lens body.Track component is spaced up scheduled in the axis of central shaft
Interval configuration.The front-rear direction in the front end of lens body and lens body is arranged in a track component in two track components
Middle part between.Another track component of two track components is arranged before and after the rear end of lens body and lens body
Between the middle part in direction.Track component is the elongated prism portion extended in left-right direction in a manner of with orthogonality of center shaft
Part.The upper surface of track component is engaged with the back side of lens body.Track component extends on the left and right ends of lens body.
The first connecting portion part, second connecting portion part are separately fixed at the middle section of the left and right directions of track component.First
Connecting component, second connecting portion part are configured to the U-shaped of upward opening.The first connecting portion part, second connecting portion part have proximal end
Part and distal portions.
The first connecting portion part, second connecting portion part are than the leading flank of lens body, trailing flank closer in lens body
Centre, the first connecting portion part, second connecting portion part are orthogonal to the central shaft of lens body.The first connecting portion part, second connecting portion part
Between interval relative narrower.The both ends of the length direction of the plate-like portion of supporting member are connect with the first connecting portion part, second
Element crosswise along the axially extending of central shaft.
Projecting subassembly also has fixed part.Fixed part has along the longitudinal wall part of track component and from rear side side forward
The cross wall portion that face extends.Front end is formed as flat bearing portion, upward from the front end (front end in cross wall portion) of fixed part
Side bends towards lens.The bearing portion for being set to lens body side prolongs from the lower surface of track component towards lens body side
It stretches.The internal diameter axis hole bigger than the outer diameter of the insertion shaft portion of the first receiving part, the second receiving part is formed on bearing portion.
Axis hole is maintained at the inside of the bearing in the through hole for being set to bearing portion.The i.e. described lens body side is provided with bearing portion, if
The bearing being placed in the through hole of bearing portion swingably supports the insertion shaft portion of the first receiving part, the second receiving part.
Lens have the insertion shaft portion of the first receiving part, the second receiving part in downside.It is each to be inserted into shaft portion direction
The trailing flank of lens body protrudes.
In the state that lens body is supported component support, the outer edge part of the axis hole in the front surface of bearing portion
It is inserted into the contact site for being inserted into shaft portion, is moved down with limiting the first connecting portion part, second connecting portion part and lens, from
And lens are positioned.Axis hole is formed in the lower surface than track component closer to the bearing portion of lens body side.Therefore, by
It is inserted into following table of the distance between the lower surface of central shaft and lens body that shaft portion is constituted than the central shaft and track component
The distance between face is small.
Driving mechanism includes driver, pulley, connecting line.Driver is arranged in the lower surface of the plate-like portion of supporting member.
Driver is for swinging lens and lens being maintained at scheduled angle.Driver is, for example, rotary pneumatic driver.
Driver includes the driving main body being fixed on the lower surface of plate-like portion and the center from the upper surface of driving main body
The power transmission shaft that part upwardly extends.Discoid pulley is installed in the front end of power transmission shaft.Pulley is transmitted by power
Axis drives and rotates.One end of every connecting line is fixed on the peripheral portion of pulley.The other end of every connecting line by from
The upper surface pulley outstanding of plate-like portion on the front side of driver is connected to the first connecting portion part.The other end of a piece connecting line
It is fixed on the left side (front side) of the central shaft at the back side of the first connecting portion part.The other end of another connecting line is fixed on than first
The position of the central shaft at the back side of connecting component (rear side) on the right side.Between the fixed connecting line of the other end and central shaft away from
From the radius for being set to be less than pulley.Therefore, the swing angle of lens is bigger than the rotation angle of the power transmission shaft of driver.
When driver starts, power transmission shaft rotation.The rotary force of power transmission shaft is transmitted via pulley and connecting line
To the first connecting portion part, lens are swung centered on central shaft, so that lens are towards predetermined angular.
During support member is fixed on setting unit, the conical section of support member hits mounting surface, and supports
Component is vertically fixed to installation section.
The lower end (protruding portion) of the strip supporting member of supporting member is inserted into the cylindrical portion of support member.Protruding portion fills
It fits in cylindrical portion, and supporting member is supported in the top of support member.
When insertion shaft portion slides in axis hole, the first receiving part, the rear end part of the second receiving part and insertion
The contact site of shaft portion contacts.First receiving part, moving further downward for the second receiving part are restricted, and determine the
The relative position of one receiving part, the second receiving part and the first connecting portion part, second connecting portion part.
Since the first connecting portion part, second connecting portion part are fixed on track component, when lens body is swung, act on
The stress of mirror main body can be to avoid the damage to lens body.According to above-described embodiment, it is inserted into shaft portion and is provided with contact site, connect
Contact portion is used to limit the first connecting portion part, second connecting portion part moves down.Therefore, it is possible to prevent from being inserted into inserting in axis hole
The position for entering shaft portion deviates in the axial direction, and can steadily swing lens.
Since lens are mounted platform bearing via multiple insertion shaft portions and axis hole, so lens can be swung.
Due to multiple the first connecting portion parts, second connecting portion part configures near the center of lens body, and support first connects
Relay part, second connecting portion part the length of plate-like portion can reduce the size of supporting member.
The central shaft and center of gravity of lens are relatively near to each other.Therefore, because the load of lens and generated near central shaft
Torque reduce, so the oscillatory forces of lens can be reduced.
Fixed the first connecting portion part on the rail member, second connecting portion part and the first receiving part, the second receiving part
Part is located on position corresponding with track component.
The first connecting portion part, second connecting portion part are formed with axis hole.Alternatively, the first receiving part, in the second receiving part
Axis hole is formed, the first connecting portion part forms on second connecting portion part and is inserted into axle portion.
Protruding portion is arranged in the lower part of supporting member, and protruding portion is inserted into the cylindrical portion (insertion section) of support member, bearing
Component is mounted on the top of support member.Can also protrusion be set on the top of support member, be arranged in the lower part of supporting member
It is inserted into the insertion section of protrusion.
Through the above technical solutions, the present invention can adjust position of the light source assembly in exposure sources, so as to treat into
The device of row exposure-processed carries out more preferably exposure-processed.
In conclusion although the present invention is disclosed above with preferred embodiment, above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention is subject to the range that claim defines.
Claims (10)
1. a kind of exposure sources, which is characterized in that the exposure sources are for being exposed display device or semiconductor devices
Processing；
The exposure sources include exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；
The light source assembly, the projecting subassembly and the plummer may be contained in the exposure chamber；
The light source assembly is used to export the generated exposure light to the projection group for generating exposure light
Part；
The plummer is used to carry the display device or semiconductor devices of pending exposure-processed；
The base end part of the braced frame is connected and fixed support element, and the terminal part of the braced frame connects the light source group
Part；
The braced frame includes first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot
Revolving member；
The braced frame includes the first movable part to the 7th movable part and the first locking component to the 7th locking component, described
First locking component is respectively used to lock first movable part to the 7th movable part to the 7th locking component；
The securing supports are made of three support columns, and three support columns are spaced preset distance and are arranged in parallel,
Three support columns are connected to each other by coupling bar, and the coupling bar of two support columns is connected with each other, the connection
Bar connects the support column.
2. exposure sources according to claim 1, which is characterized in that in the braced frame, the first movement frame
The cardinal extremity of frame is attached partially to a support column of the securing supports, and the cardinal extremity part of second mobility framework connects
It is connected to the distal portion of the first movement frame, the pedestal of the revolving member and the front end of second mobility framework connect
It connects.
3. exposure sources according to claim 1, which is characterized in that the braced frame includes the first arm body, the second arm
Body and third arm body.
4. exposure sources according to claim 3, which is characterized in that the first arm body and the second arm body are respectively formed
For rectangular frame shape.
5. exposure sources according to claim 4, which is characterized in that second mobility framework be provided be configured to it is parallel
The third arm body of link component.
6. exposure sources according to claim 5, which is characterized in that the third arm body is by first level bar and the second water
Flat bar connection.
7. exposure sources according to claim 6, which is characterized in that the first level bar, second horizon bar with
And be arranged the first level bar, second horizon bar end between the first vertical rod, the second vertical rod is formed as
Parallelogram shape.
8. exposure sources according to claim 3, which is characterized in that the braced frame further includes movable axis, the work
Moving axis constitutes first movable part for making the first arm body pivot in the horizontal direction.
9. exposure sources according to claim 8, which is characterized in that first locking component is set to the movable axis
In.
10. exposure sources according to claim 1, which is characterized in that first movable part of the braced frame is extremely
7th movable part is used to adjust position and/or the posture of the light source assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810150964.2A CN108445718A (en) | 2018-02-13 | 2018-02-13 | Exposure sources |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810150964.2A CN108445718A (en) | 2018-02-13 | 2018-02-13 | Exposure sources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108445718A true CN108445718A (en) | 2018-08-24 |
Family
ID=63192498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810150964.2A Withdrawn CN108445718A (en) | 2018-02-13 | 2018-02-13 | Exposure sources |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108445718A (en) |
-
2018
- 2018-02-13 CN CN201810150964.2A patent/CN108445718A/en not_active Withdrawn
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Application publication date: 20180824 |
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| WW01 | Invention patent application withdrawn after publication |