CN108415223A - Device for executing exposure-processed - Google Patents
Device for executing exposure-processed Download PDFInfo
- Publication number
- CN108415223A CN108415223A CN201810150849.5A CN201810150849A CN108415223A CN 108415223 A CN108415223 A CN 108415223A CN 201810150849 A CN201810150849 A CN 201810150849A CN 108415223 A CN108415223 A CN 108415223A
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- CN
- China
- Prior art keywords
- exposure
- processed
- light source
- source assembly
- executing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of devices for executing exposure-processed, including exposure chamber, light source assembly, projecting subassembly, plummer, securing supports, braced frame；Light source assembly, projecting subassembly and plummer may be contained in exposure chamber；Light source assembly is for generating exposure light；Braced frame includes the first, second mobility framework and the revolving member with the first, second orthogonal pivot；Braced frame includes the first, second, and third arm body；First movement frame is used to turn to the cardinal extremity part of the second mobility framework from the cardinal extremity part of the first arm body；Revolving member has the first, second rotating part；The head body of light source assembly is installed on the second rotating part；Head body is built-in with the vibration machine for applying ultrasonic activation active force to vibrating body, and vibrating body is connected with head body.The present invention can be so that be exposed the blur boundary between the part of processing and the part for being not affected by exposure-processed in device.
Description
Technical field
The present invention relates to exposure technique field, more particularly to a kind of devices for executing exposure-processed.
Background technology
The device for being traditionally used for executing exposure-processed generally comprises exposure light source and projection eyeglass, which is used for
Exposure light is generated, and the exposure light is irradiated to the device of pending exposure-processed by the projection eyeglass.
Position of the exposure light source in the device for executing exposure-processed is fixed, that is to say, that the exposure light
The device of pending exposure-processed is irradiated in source by projecting eyeglass in a static manner, in the device Jing Guo exposure-processed, by
To the division is clearly demarcated between the part and the part for being not affected by exposure-processed of exposure-processed.
However, it is required that being exposed the blur boundary between the part of processing and the part for being not affected by exposure-processed
In the case of change, the above-mentioned device for being traditionally used for executing exposure-processed then cannot achieve.
Therefore, it is necessary to propose a kind of new technical solution, to solve the above technical problems.
Invention content
The purpose of the present invention is to provide a kind of devices for executing exposure-processed, can make by exposure-processed
The blur boundary being exposed in device between the part of processing and the part for being not affected by exposure-processed.
To solve the above problems, technical scheme is as follows：
It is a kind of for executing the device of exposure-processed, described for executing the device of exposure-processed includes exposure chamber, light
Source component, projecting subassembly, plummer, securing supports, braced frame；It the light source assembly, the projecting subassembly and described holds
Microscope carrier may be contained in the exposure chamber；The light source assembly is for generating exposure light, and being used for will be generated described
Exposure light is exported to the projecting subassembly；The base end part of the braced frame connects the securing supports, and the branch
The terminal part of support frame frame connects the light source assembly, the braced frame include first movement frame, the second mobility framework and
Revolving member with the first orthogonal pivot, the second pivot；The braced frame includes the first arm body, the second arm body and third
Arm body；The first movement frame is used to turn to the cardinal extremity of second mobility framework from the cardinal extremity part of the first arm body
Part；The revolving member mounted on the front end of second mobility framework has the pedestal relative to the revolving member
The first rotating part rotated centered on first pivot, and surround described second relative to first rotating part
Pivotally supported second rotating part；The head body of the light source assembly is installed on second rotating part；The head
Main body is built-in with for applying shaking for ultrasonic activation active force to the vibrating body kept by the housing body of the head body
Dynamic generator, the vibrating body are connected with the head body.
Preferably, the vibrating body is for driving the head body to vibrate, so that light caused by the light source assembly
Line display device described in directive while the head body is vibrated.
Preferably, the first arm body and the second arm body are all formed as rectangular frame shape.
Preferably, first rotating part is used to rotate along perpendicular around horizontal first pivot.
Preferably, second pivot is arranged on first rotating part, as vertical with first pivot
Axis.
Preferably, second rotating part around described second for pivoting.
Preferably, second mobility framework is used to pass through described second of pivot axis relative to the first movement frame
Arm body rotates in the horizontal direction.
Preferably, the pedestal of the revolving member is mounted on the front end of second mobility framework, to keep
It is translated in vertical direction while constant posture.
Preferably, the first movement frame is used for by mobile with the upper in the horizontal direction of the determination light source assembly
It sets.
Preferably, second mobility framework is used for through the mobile position with the determination light source assembly in vertical direction
It sets.
Compared with the prior art, due to applying effect of vibration to light source assembly during light source assembly exports exposure light
Power, therefore, the present invention can be exposed the part of processing in the device Jing Guo exposure-processed and be not affected by exposure-processed
Blur boundary between part.
Description of the drawings
Fig. 1 is the schematic diagram of the device for executing exposure-processed of the present invention.
Fig. 2 is the schematic diagram of the projecting subassembly in the device shown in FIG. 1 for executing exposure-processed.
Specific implementation mode
With reference to figure 1 and Fig. 2, Fig. 1 is the schematic diagram of the device for executing exposure-processed of the present invention, and Fig. 2 is shown in Fig. 1
The schematic diagram for executing the projecting subassembly in the device of exposure-processed.
The device for executing exposure-processed of the present invention to display device or semiconductor devices for being exposed processing.
The present invention includes exposure chamber 101, light source assembly 104, projecting subassembly for executing the device of exposure-processed
107, plummer 108, securing supports 102, braced frame 103, the first transmitting mirror 105 and the second speculum 106.
The light source assembly, the projecting subassembly, the plummer, the securing supports, the braced frame are all provided with
It is placed in the exposure chamber.
The light source assembly is used to export the generated exposure light to the throwing for generating exposure light
Shadow component.Specifically, light source assembly is for being exported exposure light to projecting subassembly by the first speculum and the second speculum.
The plummer is used to carry the display device or semiconductor devices of pending exposure-processed.
The base end part of braced frame is connected and fixed support element, and the terminal part of braced frame connects light source assembly.
Braced frame includes first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot
Revolving member.Each moveable part of first movement frame, the second mobility framework and revolving member, which is constituted, has locking structure
First movable part of part is to the 7th movable part.
Braced frame include the first movable part to the 7th movable part and the first locking component to the 7th locking component, first
Locking component is respectively used to lock the first movable part to the 7th movable part to the 7th locking component.
Securing supports are made of three support columns, and each support column is used for through adjuster adjustment length (height), and three
A support column is spaced preset distance and is arranged in parallel, and three support columns are connected to each other by coupling bar, two support columns
Coupling bar is connected with each other.
In braced frame, the cardinal extremity of first movement frame is attached partially to a support column of securing supports, and
The cardinal extremity of second mobility framework is attached partially to the distal portion of first movement frame, the pedestal of revolving member and the second mobility framework
Front end connection.
The braced frame includes the first arm body, the second arm body and third arm body.
Second mobility framework is provided with the third arm body for being configured to parallel rod component.Third arm body by first level bar and
Second horizon bar connect, first level bar, the second horizon bar and be arranged first level bar, the second horizon bar end between
The first vertical rod, the second vertical rod be formed as parallelogram shape.
One support column of connecting block and securing supports is mutually fixed.
The braced frame further includes movable axis.Movable axis constitutes for making that the first arm body pivots in the horizontal direction
One movable part, the first locking component are set in movable axis.
Coupling bar connects support column.
Second locking component, third locking component are arranged in corresponding first rotary shaft, the second rotary shaft.
Connection part (distal portions of first movement frame) is connected to the distal end of the second arm body, has along vertical on connection part
Histogram to pivot axis.It is provided with the 4th locking component on pivot axis, the second mobility framework is used for through pivot axis relative to the
Second arm body of one mobility framework rotates in the horizontal direction.
First pivot and the second pivot are respectively equipped with the 6th locking component, the 7th locking component.6th movable part and the 7th
Movable part is made of the first pivot, the second pivot respectively.
The cardinal extremity part of third arm body is by upper end coupling block via the connection part of the front end side of pivot axis and the second arm body
Connection, to rotate freely in the horizontal direction.The pedestal of revolving member is fixed to setting and joins in vertical second mobility framework or lower end
Connect the second vertical rod at the top and bottom of block.The pedestal of revolving member is mounted on the second shifting being made of parallel rod component
The front end of dynamic frame, to be translated in vertical direction while keeping constant posture.
First rotation axis supports the cardinal extremity part of third arm body to rotate in the vertical direction, and third arm body passes through the
One rotation axis rotates in the vertical direction.The pedestal of revolving member is used for the displacement according to the distal portions of third arm body and position
It moves.5th movable part for rotating in the vertical direction relative to third arm body, with the posture kept constant.It is being configured to parallel
In the third arm body of link component, the base end part of first level bar and the second horizon bar is pivotally supported by the first rotation, with vertically
Direction rotates, to be swung up in entire Vertical Square.5th movable part is provided with the 5th locking component.
Revolving member mounted on the front end of the second mobility framework, which has, to be turned relative to pedestal centered on the first pivot
The first dynamic rotating part, and surround the second pivotally supported second rotating part relative to the first rotating part.First pivot
Axis is set as being parallel to the axis in the mobile vertical-horizontal direction of third arm body, and the first rotating part is used to surround horizontal first
Pivot is rotated along perpendicular.
Second pivot is arranged on the first rotating part, and as the axis vertical with the first pivot, the second rotating part is used
It is pivoted in around second.
Second rotating part is the component as the bracket for being equipped with light source assembly, and light source assembly is attached to the second rotation section
Point.
Specifically, the head body of light source assembly is installed on the second rotating part.
First movement frame is used to turn to the from the cardinal extremity part for the first arm body connecting with connecting block by movable axis
The cardinal extremity part of two mobility frameworks.
Head body is built-in with to be made for applying ultrasonic activation to the vibrating body kept by the housing body of head body
Vibration machine firmly.Vibrating body is connected with head body.Vibrating body is for driving head body to vibrate, so that light source group
The display device described in directive while head body is vibrated of light caused by part.
First movable part of braced frame is used to adjust position and/or the posture of light source assembly to the 7th movable part.I.e.
One mobility framework is used for by mobile to determine the position in the horizontal direction of light source assembly, and the second mobility framework is for leading to
It crosses and moves to determine the position of light source assembly in vertical direction.In addition, the first rotating part and the second rotating part are for adjusting
The position of whole light source assembly and/or posture.
After positioning and stance adjustment completes, the first movable part of operation to the locking component of the 7th movable part is to lock the
One movable part to the 7th movable part does not move.It, can be steady by light source assembly by making all locking components enter lock-out state
Surely it holds and fixes in adjustment position to position location.
Since the second mobility framework uses parallel rod component in the up-down direction, the tip portion of the second mobility framework can
Relative to cardinal extremity part translation, the rotation structure of the distal portions of the second mobility framework can be connected to certain posture support
The pedestal of part.
The first movable part being arranged between front end and front end is used to make light source by movement to the 7th movable part
Component is located at any position in space, to position the posture of light source assembly.
Locking component can be arranged on the first movable part to the 7th movable part.
First arm body and the second arm body are all formed as rectangular frame shape.
Link block is rotatably connected to the first arm body in the horizontal direction by the first rotary shaft, and the second arm body passes through
Link block is connected to by the second rotary shaft in the horizontal direction.
First locking component, the second locking component, third locking component are used to hold rotary shaft with scheduled angle solid
It is fixed.
The both ends of first level bar are connected to the upper end coupling block and lower end coupling block being arranged in the second vertical rod, to pass through
The first rotation axis and the second rotation axis that axis is arranged in the horizontal direction rotate in the vertical direction.
Projecting subassembly has lens 1071 and the supporting member 1072 for swingingly supporting lens.
Projecting subassembly is additionally provided with for swinging lens to change the driving mechanism of the angle of lens and be configured to make
The link component that the oscillating motion of mirror synchronizes.
Supporting member has the erecting bed being fixed on mounting portion.Erecting bed is by being fixed on the support member of mounting portion and setting
The supporting member for being placed in the upper end of support member is constituted.First receiving part, the second receiving part are attached to supporting member
Upper end.
Support member is the prism component extended in above-below direction.It is formed in the lower end of supporting member and protrudes downwards
Conical section.
Supporting member is made of the stake being fixed on mounting surface, is used as mounting portion by the way that conical section to be inserted into mounting surface
Point.The hollow cylindrical portion vertically extended is provided on the two sides in the front-back direction of the upper end of support member.
Supporting member further includes a pair of of strip supporting member and a plate-like portion.The lower end for being formed in the strip supporting member in supporting member is embedding
Together in cylindrical portion.I.e. cylindrical portion constitutes insertion portion, which has the space being inserted into for strip supporting member.
The end portion of a pair of of strip supporting member is constituted to downside (support member) protruding portion outstanding.Protruding portion passes through embedding
It is supported by support member together in the inside of cylindrical portion.A pair of of strip supporting member is in the state that each protruding portion is inserted into cylindrical portion
Discretely extend upward in the longitudinal direction.Plate-like portion is fixed on the upper part of strip supporting member.Plate-like portion tilt with
Its rear end is set to be located at the top of front end.The longitudinal section of plate-like portion is substantially u-shaped, and plate-like portion is open downwards to cover each strip
The upper end of supporting member.
By the way that the protruding portion of a pair of of strip supporting member is inserted into cylindrical portion, to which supporting member is installed on support member.
Therefore, by making supporting member rise, strip supporting member is extracted from cylindrical portion, supporting member can be removed from support member.
In the upper end of erecting bed, i.e. the upper surface of the plate-like portion of supporting member is equipped with the first receiving part, the second reception
Component.First receiving part, the second receiving part are connect with lens, and the first receiving part, the second receiving part constitute lens
The central shaft of pendulum motion.First receiving part, the second receiving part are arranged at a predetermined interval in the axial direction of central shaft.First
The downside near the leading flank of lens body is arranged in receiving part, the second receiving part.The lower part of first receiving part is arranged
The top of front end in the upper surface of plate-like portion, the second receiving part is arranged in the rear end of the upper surface of plate-like portion.
First receiving part, the second receiving part are formed by the bar-like member for bending to L-shaped.First receiving part,
Two receiving parts are made of attachment and insertion shaft portion.Attachment is elongated columned component, and attachment is from plate-like portion
Upper surface just extend vertically upward.It is elongated columned component to be inserted into shaft portion, is inserted into shaft portion and attachment
Front end continuously extends, and parallelly rearward extends with plate-like portion.It is formed about in the front end for being inserted into shaft portion oriented
Radial outside cricoid contact site outstanding.Contact site composition limits the first connecting portion part by being abutted with the first connecting portion part
The abutting part (retainer) moved downwards.Shaft portion is inserted into from the leading flank of lens body to trailing flank to extend.It is inserted into axle portion
Divide with the axis being inclined relative to horizontal.It is inserted into the central shaft that shaft portion constitutes the pendulum motion of lens.
Lens include lens body, and track component is fixed in the edge part of lens body.In lens body, with center
The side that the axial direction of axis is orthogonal becomes the lower end leading flank near mounting portion, and another side is to become from peace
The mode of the farthest upper end trailing flank in dress portion tilts.
Two track components are mounted on the edge part of lens body.Track component is spaced up scheduled in the axis of central shaft
Interval configuration.The front-rear direction in the front end of lens body and lens body is arranged in a track component in two track components
Middle part between.Another track component of two track components is arranged before and after the rear end of lens body and lens body
Between the middle part in direction.Track component is the elongated prism portion extended in left-right direction in a manner of with orthogonality of center shaft
Part.The upper surface of track component is engaged with the back side of lens body.Track component extends on the left and right ends of lens body.
The first connecting portion part, second connecting portion part are separately fixed at the middle section of the left and right directions of track component.First
Connecting component, second connecting portion part are configured to the U-shaped of upward opening.The first connecting portion part, second connecting portion part have proximal end
Part and distal portions.
The first connecting portion part, second connecting portion part are than the leading flank of lens body, trailing flank closer in lens body
Centre, the first connecting portion part, second connecting portion part are orthogonal to the central shaft of lens body.The first connecting portion part, second connecting portion part
Between interval relative narrower.The both ends of the length direction of the plate-like portion of supporting member are connect with the first connecting portion part, second
Element crosswise along the axially extending of central shaft.
Projecting subassembly also has fixed part.Fixed part has along the longitudinal wall part of track component and from rear side side forward
The cross wall portion that face extends.Front end is formed as flat bearing portion, upward from the front end (front end in cross wall portion) of fixed part
Side bends towards lens.The bearing portion for being set to lens body side prolongs from the lower surface of track component towards lens body side
It stretches.The internal diameter axis hole bigger than the outer diameter of the insertion shaft portion of the first receiving part, the second receiving part is formed on bearing portion.
Axis hole is maintained at the inside of the bearing in the through hole for being set to bearing portion.The i.e. described lens body side is provided with bearing portion, if
The bearing being placed in the through hole of bearing portion swingably supports the insertion shaft portion of the first receiving part, the second receiving part.
Lens have the insertion shaft portion of the first receiving part, the second receiving part in downside.It is each to be inserted into shaft portion direction
The trailing flank of lens body protrudes.
In the state that lens body is supported component support, the outer edge part of the axis hole in the front surface of bearing portion
It is inserted into the contact site for being inserted into shaft portion, is moved down with limiting the first connecting portion part, second connecting portion part and lens, from
And lens are positioned.Axis hole is formed in the lower surface than track component closer to the bearing portion of lens body side.Therefore, by
It is inserted into following table of the distance between the lower surface of central shaft and lens body that shaft portion is constituted than the central shaft and track component
The distance between face is small.
Driving mechanism includes driver, pulley, connecting line.Driver is arranged in the lower surface of the plate-like portion of supporting member.
Driver is for swinging lens and lens being maintained at scheduled angle.Driver is, for example, rotary pneumatic driver.
Driver includes the driving main body being fixed on the lower surface of plate-like portion and the center from the upper surface of driving main body
The power transmission shaft that part upwardly extends.Discoid pulley is installed in the front end of power transmission shaft.Pulley is transmitted by power
Axis drives and rotates.One end of every connecting line is fixed on the peripheral portion of pulley.The other end of every connecting line by from
The upper surface pulley outstanding of plate-like portion on the front side of driver is connected to the first connecting portion part.The other end of a piece connecting line
It is fixed on the left side (front side) of the central shaft at the back side of the first connecting portion part.The other end of another connecting line is fixed on than first
The position of the central shaft at the back side of connecting component (rear side) on the right side.Between the fixed connecting line of the other end and central shaft away from
From the radius for being set to be less than pulley.Therefore, the swing angle of lens is bigger than the rotation angle of the power transmission shaft of driver.
When driver starts, power transmission shaft rotation.The rotary force of power transmission shaft is transmitted via pulley and connecting line
To the first connecting portion part, lens are swung centered on central shaft, so that lens are towards predetermined angular.
During support member is fixed on setting unit, the conical section of support member hits mounting surface, and supports
Component is vertically fixed to installation section.
The lower end (protruding portion) of the strip supporting member of supporting member is inserted into the cylindrical portion of support member.Protruding portion fills
It fits in cylindrical portion, and supporting member is supported in the top of support member.
When insertion shaft portion slides in axis hole, the first receiving part, the rear end part of the second receiving part and insertion
The contact site of shaft portion contacts.First receiving part, moving further downward for the second receiving part are restricted, and determine the
The relative position of one receiving part, the second receiving part and the first connecting portion part, second connecting portion part.
Since the first connecting portion part, second connecting portion part are fixed on track component, when lens body is swung, act on
The stress of mirror main body can be to avoid the damage to lens body.According to above-described embodiment, it is inserted into shaft portion and is provided with contact site, connect
Contact portion is used to limit the first connecting portion part, second connecting portion part moves down.Therefore, it is possible to prevent from being inserted into inserting in axis hole
The position for entering shaft portion deviates in the axial direction, and can steadily swing lens.
Since lens are mounted platform bearing via multiple insertion shaft portions and axis hole, so lens can be swung.
Due to multiple the first connecting portion parts, second connecting portion part configures near the center of lens body, and support first connects
Relay part, second connecting portion part the length of plate-like portion can reduce the size of supporting member.
The central shaft and center of gravity of lens are relatively near to each other.Therefore, because the load of lens and generated near central shaft
Torque reduce, so the oscillatory forces of lens can be reduced.
Fixed the first connecting portion part on the rail member, second connecting portion part and the first receiving part, the second receiving part
Part is located on position corresponding with track component.
The first connecting portion part, second connecting portion part are formed with axis hole.Alternatively, the first receiving part, in the second receiving part
Axis hole is formed, the first connecting portion part forms on second connecting portion part and is inserted into axle portion.
Protruding portion is arranged in the lower part of supporting member, and protruding portion is inserted into the cylindrical portion (insertion section) of support member, bearing
Component is mounted on the top of support member.Can also protrusion be set on the top of support member, be arranged in the lower part of supporting member
It is inserted into the insertion section of protrusion.
Through the above technical solutions, being vibrated due to applying to light source assembly during light source assembly exports exposure light
Active force, therefore, the present invention can be exposed the part of processing in the device Jing Guo exposure-processed and be not affected by exposure
Blur boundary between the part of reason.
In conclusion although the present invention is disclosed above with preferred embodiment, above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention is subject to the range that claim defines.
Claims (10)
1. a kind of device for executing exposure-processed, which is characterized in that the device for executing exposure-processed includes exposing
Optical cavity room, light source assembly, projecting subassembly, plummer, securing supports, braced frame；
The light source assembly, the projecting subassembly and the plummer may be contained in the exposure chamber；
The light source assembly is used to export the generated exposure light to the projection group for generating exposure light
Part；
The base end part of the braced frame connects the securing supports, and the terminal part of the braced frame connects the light
Source component, the braced frame include first movement frame, the second mobility framework and with the first orthogonal pivot, the second pivot
The revolving member of axis；
The braced frame includes the first arm body, the second arm body and third arm body；
The first movement frame is used to turn to the cardinal extremity of second mobility framework from the cardinal extremity part of the first arm body
Part；
The revolving member mounted on the front end of second mobility framework has the pedestal relative to the revolving member
The first rotating part rotated centered on first pivot, and surround described second relative to first rotating part
Pivotally supported second rotating part；
The head body of the light source assembly is installed on second rotating part；
The head body is built-in with shakes for applying ultrasonic wave to the vibrating body kept by the housing body of the head body
The vibration machine of dynamic deformation from motion, the vibrating body are connected with the head body.
2. the device according to claim 1 for executing exposure-processed, which is characterized in that the vibrating body is for driving
Head body vibration, so that light caused by the light source assembly is while the head body is vibrated described in directive
Display device.
3. according to claim 1 for executing the device of exposure-processed, which is characterized in that the first arm body and described
Second arm body is all formed as rectangular frame shape.
4. the device according to claim 1 for executing exposure-processed, which is characterized in that first rotating part is used
In around horizontal first pivot along perpendicular rotate.
5. the device according to claim 1 for executing exposure-processed, which is characterized in that the second pivot setting exists
On first rotating part, as the axis vertical with first pivot.
6. the device according to claim 1 for executing exposure-processed, which is characterized in that second rotating part is used
It is pivoted in around described second.
7. the device according to claim 1 for executing exposure-processed, which is characterized in that second mobility framework is used
It is rotated in the horizontal direction in the second arm body by pivot axis relative to the first movement frame.
8. according to claim 1 for executing the device of exposure-processed, which is characterized in that the revolving member it is described
Pedestal is mounted on the front end of second mobility framework, to be translated in vertical direction while keeping constant posture.
9. the device according to claim 1 for executing exposure-processed, which is characterized in that the first movement frame is used
In passing through the mobile position in the horizontal direction with the determination light source assembly.
10. the device according to claim 1 for executing exposure-processed, which is characterized in that second mobility framework
For passing through the mobile position with the determination light source assembly in vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810150849.5A CN108415223A (en) | 2018-02-13 | 2018-02-13 | Device for executing exposure-processed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810150849.5A CN108415223A (en) | 2018-02-13 | 2018-02-13 | Device for executing exposure-processed |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108415223A true CN108415223A (en) | 2018-08-17 |
Family
ID=63128776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810150849.5A Withdrawn CN108415223A (en) | 2018-02-13 | 2018-02-13 | Device for executing exposure-processed |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108415223A (en) |
-
2018
- 2018-02-13 CN CN201810150849.5A patent/CN108415223A/en not_active Withdrawn
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Application publication date: 20180817 |
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| WW01 | Invention patent application withdrawn after publication |