CN108232398A - A kind of lamination component and preparation method thereof - Google Patents

A kind of lamination component and preparation method thereof Download PDF

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Publication number
CN108232398A
CN108232398A CN201711420206.XA CN201711420206A CN108232398A CN 108232398 A CN108232398 A CN 108232398A CN 201711420206 A CN201711420206 A CN 201711420206A CN 108232398 A CN108232398 A CN 108232398A
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China
Prior art keywords
electrode
ceramic chips
lamination
interior
interior electrode
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CN201711420206.XA
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Chinese (zh)
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CN108232398B (en
Inventor
李志龙
伍隽
庞新锋
苏柯铭
莫辉海
李威
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Shenzhen Shunluo Layered Electronics Co ltd
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Shenzhen Sunlord Electronics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/007Manufacturing frequency-selective devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • H01P1/201Filters for transverse electromagnetic waves
    • H01P1/203Strip line filters

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

The invention discloses a kind of lamination component and preparation method thereof, production method include making in electrode the step of, it is characterised in that:Include the step of electrode in the making:1) electrode pattern makes:In being cut into interior electrode pattern through-hole on the first ceramic chips;2) lamination:Not cut second ceramic chips are taken, lamination is carried out under a predetermined with first ceramic chips, obtain the laminated body with interior electrode pattern groove;3) electrode print in:Using electrocondution slurry, contraposition printing is carried out to the interior electrode pattern groove in the laminated body, to print out interior electrode;Wherein, electrocondution slurry at least fills up the interior electrode pattern groove.Lamination component has the interior electrode made through above-mentioned steps, and thickness is 20~100 μm.

Description

A kind of lamination component and preparation method thereof
Technical field
The present invention relates to a kind of lamination components and preparation method thereof.
Background technology
With the development of electronics industry, industry has the more electrical and unfailing performance of lamination component such as radio-frequency devices For harsh requirement, and properties of product can be substantially improved in thick electrode technology and reduce loss, as realization high-performance member device The preferred embodiment of part, has been a concern.Traditional lamination component manufacturing process, is limited to the influence of printing condition, made For the interior thickness of electrode made substantially at 10 μm or so, maximum is no more than 20 μm;And the thickness of electrode the thick, is protected on electrode width Shape is poor, reduces making precision;Even if having produced thick electrode, also torn in lamination process or bubbling equivalent risk may Lead to critical defect.
The disclosure of background above technology contents is only used for inventive concept and the technical solution that auxiliary understands the present invention, not The prior art of present patent application is necessarily belonged to, shows the applying date of the above in present patent application in no tangible proof Before have disclosed in the case of, above-mentioned background technology should not be taken to evaluation the application novelty and creativeness.
Invention content
The present invention proposes a kind of production method of lamination component, passes through internally electricity for overcome the deficiencies in the prior art The processing technology of pole is improved, and can make to obtain the lamination component with electrode in super thick, so as to improve lamination member device The performance of part.
The technical solution that the present invention is proposed for the above-mentioned purpose is as follows:
A kind of production method of lamination component, including the step of electrode, being wrapped the step of electrode in the making in making It includes:
1) electrode pattern makes:In being cut into interior electrode pattern through-hole on the first ceramic chips;
2) lamination:Not cut second ceramic chips are taken, lamination is carried out under a predetermined with first ceramic chips, obtains To the laminated body with interior electrode pattern groove;
3) electrode print in:Using electrocondution slurry, contraposition printing is carried out to the interior electrode pattern groove in the laminated body, To print out interior electrode;Wherein, electrocondution slurry at least fills up the interior electrode pattern groove.
Above-mentioned technical proposal provided by the invention by carrying out trepanning on the ceramic chips of pre- lamination, outputs electrode pattern Electrocondution slurry is printed in groove (through-hole is rendered as groove after lamination) during interior electrode print, then by through-hole, then carry out lamination Ensure that electrocondution slurry at least fills up groove (usually slightly above little by little).It thus can be thick with on-demand customization thick electrode Degree can make thickness and be up to 100 μm much larger than electrode in the super thick of thickness of electrode in traditional laminated component.
Lead to it is highly preferred that being cut using laser opening machine to first ceramic chips and obtaining the interior electrode pattern Hole.
It is highly preferred that also utilize the laser opening machine register guide required when being cut into interior electrode print on the first ceramic chips Know.
It is highly preferred that the first and second ceramic chips are made by casting technique.It is accurately controlled using the technique of curtain coating The thickness of ceramic chips, and in the present invention, the thickness of the first ceramic chips has with final required interior thickness of electrode directly to close Connection, therefore, control ceramic chips thickness are most important.
It is highly preferred that predetermined pressure when carrying out lamination is no more than 30MPa.
It is highly preferred that obtain required interior thickness of electrode, then based on the first ceramic chips using electromagnetic field simulation software simulation Sintering shrinkage, the thickness of the first ceramic chips is conversed using the interior thickness of electrode.
The present invention separately also proposed a kind of lamination component, which has electrode in a super thick, the super thick It is 20 μm~100 μm to refer to thickness;Wherein, electrode makes to obtain by the following method in the super thick:In on the first ceramic chips It is cut into interior electrode pattern through-hole;Not cut second ceramic chips are taken, are carried out under a predetermined with first ceramic chips Lamination obtains the laminated body with interior electrode pattern groove;It is recessed to the interior electrode pattern in the laminated body using electrocondution slurry Slot carries out contraposition printing, to print out interior electrode;Wherein, electrocondution slurry at least fills up the interior electrode pattern groove.
The above-mentioned lamination component with electrode in super thick of the present invention, the component of the same race with electrode in conventional method making It compares, there is more preferably electric property.
Description of the drawings
Fig. 1 is to cut out the vertical view of the first ceramic chips of interior electrode pattern through-hole;
Fig. 2 is the overlapping schematic diagram of the first ceramic chips and the second ceramic chips;
Fig. 3 is interior electrode print schematic diagram;
Fig. 4 is the electrode schematic diagram that interior electrode print is not up to print request in the process;
Fig. 5 is the electrode schematic diagram that interior electrode print reaches print request in the process;
Fig. 6 is the DPA surface charts of the lamination component made by the thick electrode processing method of the present invention;
Fig. 7 is the DPA surface charts of the lamination component of electrode in existing method makes;
Fig. 8 is the insertion loss comparison diagram of bandpass filter and existing bandpass filter that the method for the present invention makes.
Specific embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings.
The specific embodiment of the present invention provides to make and processes thick electrode during lamination component (thickness is larger Interior electrode) method, including following three steps:
1) electrode pattern makes:In being cut into interior electrode pattern through-hole on the first ceramic chips;This step may be used laser and open Hole machine is cut, the contraposition required during electrode print also while in the follow-up progress of cutting when being cut into interior electrode pattern through-hole Mark;
2) lamination:Not cut second ceramic chips are taken, lamination is carried out under a predetermined with first ceramic chips, obtains To the laminated body with interior electrode pattern groove;
3) electrode print in:Using electrocondution slurry, contraposition printing is carried out to the interior electrode pattern groove in the laminated body, To print out interior electrode;Wherein, electrocondution slurry at least fills up the interior electrode pattern groove.
The above-mentioned thick electrode processing method that the specific embodiment of the invention provides, can be in the manufacturing process of lamination component Interior electrode of the thickness at 20 μm~100 μm is processed, the thickness than traditional lamination component inner electrode is much larger, and traditional is interior General 10 μm or so of electrode is most thick to be also no more than 20 μm.And the process of entire thick electrode does not need to too high cost And complex device.
To carry out technical scheme of the present invention in further detail and sufficient explanation below by a specific embodiment.
The present embodiment is drawn up 95 ± 0.8 μm of the lamination component inner electrode thickness of work, and lamination component is specifically a band logical Wave filter, the detailed process of interior electrode are as follows:
With reference to figure 1, the interior electrode pattern 11 of pre- making is first cut on the first ceramic chips 10 using laser-beam drilling machine, it should Interior electrode pattern is through-hole, i.e., through the two sides of the first ceramic chips 10.In addition, also it is cut into printing contraposition mark (in figure not Show).Before trepanning, first the interior electrode pattern document made in advance is passed in laser opening machine, then, laser opening machine can be according to text Shelves are cut by laser along electrode pattern profile, and the ceramic chips of area of the pattern are hollowed out, while output to print positioning Contraposition mark.
The second ceramic chips that one is not cut through again (do not surpass with the first above-mentioned ceramic chips 10 in a scheduled stack pressure Cross 30MPa) under overlapped, a laminated body 20 is obtained, as shown in Fig. 2, so as to, the interior electrode pattern on the first ceramic chips 10 Through-hole 11 formed in laminated body 20 in electrode pattern groove 11 '.In lamination, appropriate dwell time and dwell pressure are set (being no more than 30Mpa), two layers of ceramic chips close adhesion can be kept in this way, recess region will not be collapsed again.
The thickness of first ceramic chips and the second ceramic chips can be identical, also can be different.But the thickness of the first ceramic chips with it is required Interior thickness of electrode have direct correlation, in particular to:When the lamination component that given one makes in advance, according to the whole thick of component Degree obtains the best interior thickness of electrode for the component, then based on best interior electricity by electromagnetic field simulation software simulation Pole thickness (being given herein above 95 ± 0.8 μm in the present embodiment), according to the sintering shrinkage of the first ceramic chips, converses first The thickness of ceramic chips, the thickness of the first ceramic chips that is, before sintering interior electrode thickness, and interior thickness of electrode (phase before being sintered When the electrocondution slurry thickness filled when printing) it can be according to required interior thickness of electrode (in this example 95 ± 0.8 μm) and electrode slurry Material shrinking percentage is calculated.
Preferably, the first ceramic chips and the second ceramic chips are made using the tape casting, accurately control ceramic chips thickness in this way Degree.For example, being cast using dry type, porcelain powder, solvent, adhesive, dispersant and plasticizer etc. particular viscosity and stream have been made into The slurry of kinetic force is transported to slurry in one fixed hopper, and slurry flows out hopper below hopper under the effect of gravity, directly Trickling is connect in the base band of responsible carrying, while base band level moves, and does with slurry and at the uniform velocity moves together, base band and hopper it Between, by being cast scraper control distance therebetween, so as to achieve the purpose that control base band spreading mass thickness, stream is controlled in the present embodiment Prolong thickness at 118 ± 1 μm, that is, need the ceramic chips of 118 ± 1 μm of thickness.
After the aforementioned laminated body 20 with interior electrode pattern groove is obtained, you can electrode print in progress, such as Fig. 3 institutes Show, being aligned and being printed using screen process press, the first ceramic chips being cut by laser are printing face, ink-covered area domain and interior electrode under silk screen Pattern coincide, and printing process scraper 40 rolls forward with electrocondution slurry 30, and the ink-covered area domain under silk screen of electrocondution slurry 30, which is fallen on, holds Fill groove 11 ' in print face.Micro- Microscopic observation recess region fills pattern, and measures fill part conductive paste with laser thickness gauge Material height, if electrocondution slurry height needs to print filling again, until filling not as good as depth of groove (situation shown in Fig. 4) Point, it is advisable with being slightly above groove, i.e. printing situation in Fig. 5 meets the requirements.
Final bandpass filter is subsequently formed through techniques such as oversinterings, by DPA (Destructive Physical Analysis) and is carried out Interior thickness of electrode is surveyed, and thickness of electrode is d1=96 μm in obtained reality, as shown in Figure 6.For similary product, using tradition The interior electrode of method processing, as shown in fig. 7,2=11 μm of thickness d, the manufacturing conditions of traditional handicraft determine that thickness of electrode can not It can be made especially thick, if being made too thick, a variety of severe consequences can be brought to product.
By in above-described embodiment, the bandpass filter of electrode using conventional method with being added in method processing using the present invention The bandpass filter of the same race of electrode is compared in work, mainly compares insertion loss, obtained correlation curve as shown in figure 8, Wherein, the curve with black circle is the insertion loss of the bandpass filter of electrode in the method processing of the present invention, with small triangle Curve be using the insertion loss of the bandpass filter of the same race of electrode in conventional method processing, abscissa is frequency, ordinate That is insertion loss (more up closer to 0).As can be seen from Figure 8, on passband, the product that the present invention processes is compared to conventional method Product, insertion loss reduce 0.7dB.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, it is impossible to assert The specific implementation of the present invention is confined to these explanations.For those skilled in the art to which the present invention belongs, it is not taking off Under the premise of from present inventive concept, several equivalent substitute or obvious modifications can also be made, and performance or use is identical, all should When being considered as belonging to protection scope of the present invention.

Claims (7)

1. a kind of production method of lamination component, including in making the step of electrode, it is characterised in that:Electrode in the making The step of include:
1) electrode pattern makes:In being cut into interior electrode pattern through-hole on the first ceramic chips;
2) lamination:Not cut second ceramic chips are taken, lamination is carried out under a predetermined with first ceramic chips, obtains band There is the laminated body of interior electrode pattern groove;
3) electrode print in:Using electrocondution slurry, contraposition printing is carried out to the interior electrode pattern groove in the laminated body, with print Brush out interior electrode;Wherein, electrocondution slurry at least fills up the interior electrode pattern groove.
2. production method as described in claim 1, it is characterised in that:First ceramic chips are carried out using laser opening machine It cuts and obtains the interior electrode pattern through-hole.
3. production method as claimed in claim 2, it is characterised in that:Also cut on the first ceramic chips using laser opening machine Go out contraposition mark required during interior electrode print.
4. production method as described in claim 1, it is characterised in that:First and second ceramic chips are by casting technique system .
5. production method as described in claim 1, it is characterised in that:Predetermined pressure when carrying out lamination is no more than 30MPa.
6. production method as described in claim 1, it is characterised in that:It is obtained in required using electromagnetic field simulation software simulation Thickness of electrode, then the sintering shrinkage based on the first ceramic chips converse the thickness of the first ceramic chips using the interior thickness of electrode Degree.
7. a kind of lamination component, it is characterised in that:With electrode in a super thick, the super thick refers to that thickness is 20 μm~100 μ m;Wherein, electrode makes to obtain by the following method in the super thick:
In being cut into interior electrode pattern through-hole on the first ceramic chips;Not cut second ceramic chips are taken, with first green Piece carries out lamination under a predetermined, obtains the laminated body with interior electrode pattern groove;Using electrocondution slurry, to the lamination Interior electrode pattern groove on body carries out contraposition printing, to print out interior electrode;Wherein, electrocondution slurry at least fills up the interior electricity Pole pattern groove.
CN201711420206.XA 2017-12-25 2017-12-25 Laminated component and manufacturing method thereof Active CN108232398B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020058002A1 (en) * 2018-09-20 2020-03-26 International Business Machines Corporation Dc-capable cryogenic microwave filter with reduced kapitza resistance
WO2020069883A1 (en) * 2018-10-02 2020-04-09 International Business Machines Corporation Reduced kapitza resistance microwave filter for cryogenic environments

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102148081A (en) * 2010-11-11 2011-08-10 深圳顺络电子股份有限公司 Manufacturing method of laminated type ceramic electronic element
CN103021657A (en) * 2012-12-31 2013-04-03 广东风华高新科技股份有限公司 Method for printing inner electrode patterns of surface-mounted type multi-layer ceramic capacitor
CN103606450A (en) * 2013-11-26 2014-02-26 深圳顺络电子股份有限公司 Laminated-coil-type device manufacturing method
CN103632785A (en) * 2013-12-12 2014-03-12 深圳顺络电子股份有限公司 Manufacturing method for inner electrode of chip component

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102148081A (en) * 2010-11-11 2011-08-10 深圳顺络电子股份有限公司 Manufacturing method of laminated type ceramic electronic element
CN103021657A (en) * 2012-12-31 2013-04-03 广东风华高新科技股份有限公司 Method for printing inner electrode patterns of surface-mounted type multi-layer ceramic capacitor
CN103606450A (en) * 2013-11-26 2014-02-26 深圳顺络电子股份有限公司 Laminated-coil-type device manufacturing method
CN103632785A (en) * 2013-12-12 2014-03-12 深圳顺络电子股份有限公司 Manufacturing method for inner electrode of chip component

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020058002A1 (en) * 2018-09-20 2020-03-26 International Business Machines Corporation Dc-capable cryogenic microwave filter with reduced kapitza resistance
US10886585B2 (en) 2018-09-20 2021-01-05 International Business Machines Corporation DC-capable cryogenic microwave filter with reduced Kapitza resistance
CN112640200A (en) * 2018-09-20 2021-04-09 国际商业机器公司 Low temperature microwave filter with reduced DC capability of the Peking resistance
US11108120B2 (en) 2018-09-20 2021-08-31 International Business Machines Corporation DC-capable cryogenic microwave filter with reduced Kapitza resistance
WO2020069883A1 (en) * 2018-10-02 2020-04-09 International Business Machines Corporation Reduced kapitza resistance microwave filter for cryogenic environments
US10897069B2 (en) 2018-10-02 2021-01-19 International Business Machines Corporation Reduced kapitza resistance microwave filter for cryogenic environments
CN112771717A (en) * 2018-10-02 2021-05-07 国际商业机器公司 Reduced impedance microwave filter for low temperature environments
JP2022502836A (en) * 2018-10-02 2022-01-11 インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation Reduced Kapitsa resistance microwave filter for cryogenic environments
CN112771717B (en) * 2018-10-02 2022-08-09 国际商业机器公司 Thermal decoupling device and implementation method thereof
US11552380B2 (en) 2018-10-02 2023-01-10 Iniernational Business Machines Corporation Reduced Kapitza resistance microwave filter for cryogenic environments
US11757169B2 (en) 2018-10-02 2023-09-12 International Business Machines Corporation Reduced kapitza resistance microwave filter for cryogenic environments

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Effective date of registration: 20231120

Address after: Building A, Building 101, Building 16, Dafu Industrial Zone, Dafu Community, Guanlan Street, Longhua District, Shenzhen City, Guangdong Province, 518000

Patentee after: Shenzhen Shunluo Layered Electronics Co.,Ltd.

Address before: Shenzhen City, Guangdong province Baoan District 518110 sightseeing road s Fuyuan sunlord Industrial Park

Patentee before: SHENZHEN SUNLORD ELECTRONICS Co.,Ltd.