CN108152251A - A kind of blacker-than-black material reflection ratio measuring device and method - Google Patents
A kind of blacker-than-black material reflection ratio measuring device and method Download PDFInfo
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- CN108152251A CN108152251A CN201711250418.8A CN201711250418A CN108152251A CN 108152251 A CN108152251 A CN 108152251A CN 201711250418 A CN201711250418 A CN 201711250418A CN 108152251 A CN108152251 A CN 108152251A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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Abstract
The present invention provides a kind of blacker-than-black material reflection ratio measuring device and measuring method.Described device includes：Light source, acousto-optic modulator, lens, U-shaped light trapping, integrating sphere, detector, wide dynamic range signals collector and computer, wherein：The U-shaped light trapping is positioned between the lens and the integrating sphere, is made of a speculum and a reversed U-shaped extinction cylinder, for absorbing the light that the light source is sent out.Reflection ratio measuring device and method provided by the invention realizes the accurate measurement of ultralow reflectivity.
Description
Technical field
The present invention relates to laser measuring technique fields, and in particular to a kind of blacker-than-black material reflection ratio measuring device and method.
Background technology
Material reflectance properties are the basic characteristics of material, reflect modulation capability of the material to light.Material reflectivity
Although by the development of last 100 years, its structure is always almost to be with bromine tungsten filament lamp (or tengsten lamp) for measuring device and method
Light source, grating are light-splitting device, and integrating sphere is the measurement pattern of light collecting part.Although itself the disadvantage is that, bromine tungsten filament lamp spectrum compared with
Width, but luminous intensity is weak, after light splitting, monochromatic radiation is weaker, therefore measurement lower limit is limited, for the reflection ratio measuring of blacker-than-black material
It is helpless.Minority uses equipment of the laser for light source, although light source is stronger, can measure ultralow reflectivity, exists
The problems such as wavelength band is narrow, and environment light disturbance is big, measurement result accuracy are difficult to ensure that.
Therefore, how to propose a kind of method, can realize the accurate measurement of ultralow reflectivity, become urgently to be resolved hurrily and ask
Topic.
Invention content
For the defects in the prior art, the present invention provides a kind of blacker-than-black material reflection ratio measuring device and methods.
In a first aspect, the present invention provides a kind of blacker-than-black material reflection ratio measuring device, including：Light source, acousto-optic modulator, thoroughly
Mirror, U-shaped light trapping, integrating sphere, detector, wide dynamic range signals collector and computer, wherein：The U-shaped light trapping is put
It is placed between the lens and the integrating sphere, is made of a speculum and a reversed U-shaped extinction cylinder, for absorbing
State the light that light source is sent out.
Second aspect, the present invention provide a kind of blacker-than-black material reflection ratio measuring method, including：
It obtains the system signal S1 of standard white plate, the system signal S2 of sample to be tested and adds in the system letter of U-shaped light trapping
Number S3；
The reflectivity for calculating the sample to be tested is x=(S2-S3) * R/ (S1-S3), and wherein R is the standard white plate
Reflectance value.
Blacker-than-black material reflection ratio measuring device and method provided by the invention, it is ultralow using super continuum source as wide spectrum
The light source of reflection ratio measuring device, by the use of acousto-optic modulator as system light-splitting device, using the diaphragm of ultralow transmitting ratio as system
Zero, height diffusion realize the accurate measurement of ultralow reflectivity than magnitude datum mark of the blank as system.
Description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Some bright embodiments, for those of ordinary skill in the art, without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structure diagram of blacker-than-black material reflection ratio measuring device provided in an embodiment of the present invention；
Fig. 2 is the structure diagram of blacker-than-black material reflection ratio measuring device that further embodiment of this invention provides；
Fig. 3 is the structure diagram of U-shaped light trapping provided in an embodiment of the present invention；
Fig. 4 is the flow diagram of blacker-than-black material reflection ratio measuring method provided in an embodiment of the present invention.
Reference sign：
01-light source；02-acousto-optic modulator；03-lens；
04-U-shaped light trapping；05-integrating sphere；06-sample；
07-detector；08-wide dynamic range signals collector；09-computer；
10-integrating sphere is open；11-lens translation stage；12-be in the light diaphragm；
13-veiling glare shielding case；14-reference sample；15-diaphragm；
31-light trapping is open；32-plane mirror；33-extinction cylinder is open；
34-extinction cylinder.
Specific embodiment
Purpose, technical scheme and advantage to make the embodiment of the present invention are clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
All other embodiments obtained without creative efforts shall fall within the protection scope of the present invention.
Fig. 1 is the structure diagram of blacker-than-black material reflection ratio measuring device provided in an embodiment of the present invention, as shown in Figure 1,
Described device includes：Light source 01, acousto-optic modulator 02, lens 03, U-shaped light trapping 04, integrating sphere 05, detector 07, wide dynamic
Range signal collector 08 and computer 09, wherein：The U-shaped light trapping 04 is positioned over the lens 03 and the integrating sphere 04
Between, it is made of a speculum 32 and a reversed U-shaped extinction cylinder 34, for absorbing the light that the light source is sent out.
Specifically, Fig. 2 is the structure diagram of blacker-than-black material reflection ratio measuring device that further embodiment of this invention provides,
As shown in Fig. 2, described device includes：Light source 01, acousto-optic modulator 02, lens 03, U-shaped light trapping 04, integrating sphere 05, detector
07th, wide dynamic range signals collector 08 and computer 09, further include diaphragm 15, and veiling glare shielding case 13, wherein lens 03 are height
Pure quartz lens；
The light that light source 01 is sent out is incident in acousto-optic modulator 22, and acousto-optic modulator 02 is adjusted to suitable frequency so that
The monochromatic light for certain wavelength is exported, which, by the opening of veiling glare shielding case 13, is incident on miscellaneous after 15 shaping of diaphragm
The inside of light shielding mask 13 by 03 further shaping of lens, is incident on inside integrating sphere 05.
Monochromatic light through ovennodulation is detected by detector 07 in integrating sphere 05 by the diffusing reflection inside integrating sphere 05
Optical signal so as to be transferred to wide dynamic range signals collector 08, is converted to system signal i.e. electric signal, Jin Erchuan by optical signal
It is defeated to arrive computer 09, it is calculated by computer 09.
Wherein, the optical signal that detector 07 detects includes the reflection letter of the reflection signal of sample 06, reference sample 14
Number and system in increase the optical signal of U-shaped light trapping.
Fig. 3 is the structure diagram of U-shaped light trapping provided in an embodiment of the present invention, as shown in figure 3, increasing in detection U-shaped
When light trapping 04, U-shaped light trapping 04 must be placed between lens 03 and integrating sphere 05.U-shaped light trapping 04 is anti-by one
It penetrates mirror 32 and a reversed U-shaped extinction cylinder 34 forms.
Incident ray is incident on by opening inside U-shaped light trapping 04, and one end is reflected by a plane mirror 32
34 in the U-shaped extinction cylinder of closing, and it must assure that the diameter of incident beam is approximately equal to the one of the diameter of U-shaped extinction cylinder opening 33
Half, and be all incident in U-shaped extinction cylinder 34.
The total reflection of U-shaped light trapping than in principle should 2 orders of magnitude lower than the reflectivity of sample so that system
There is sufficiently high measurement dynamic range, ensure the accuracy of measurement.
Blacker-than-black material reflection ratio measuring device provided by the invention, realizes in the range of broadband, and blacker-than-black material is ultralow anti-
Penetrate than the accurate measurement of magnitude, blacker-than-black material reflectivity in 400nm-2500nm wavelength bands can be realized using the device
High-acruracy survey, magnitude measurement lower limit can reach 0.001% level.
Optionally, the light source is super continuum source.
On the basis of above-described embodiment, the light source is super continuum source, and the embodiment of the present invention is by super continuous spectrums light
Light source of the source as the ultralow reflection ratio measuring device of wide spectrum, can divide super continuum source according to no demand
Light is suitable for the monochromatic light of various different wave lengths.
Blacker-than-black material reflection ratio measuring device provided by the invention, using super continuum source as the ultralow reflectivity of wide spectrum
The light source of measuring device is high using the diaphragm of ultralow transmitting ratio as system zero by the use of acousto-optic modulator as system light-splitting device
Diffusion realizes the accurate measurement of ultralow reflectivity than magnitude datum mark of the blank as system.
Optionally, described device further includes lens translation stage, for carrying the lens so that light beam is in the integrating sphere
Opening hot spot it is minimum.
On the basis of above-described embodiment, described device further includes lens displacement platform 6 so that lens 03 can control shifting
It is dynamic, until light beam, in 05 opening hot spot of integrating sphere minimum, and at integrating sphere outlet 10, spot diameter is less than outlet diameter,
And beam center and integrating sphere are incident, the center of integrating sphere outlet is concentric.
Optionally, described device further includes the diaphragm that is in the light, installation with inside the integrating sphere, for avoiding the reflection of sample
Light is not homogenized by integrating sphere to be directly incident on the detector.
On the basis of above-described embodiment, described device further includes the diaphragm 12 that is in the light, and is positioned over inside the integrating sphere 05,
The reflected light of sample is avoided not homogenize by integrating sphere to be just directly incident on detector 07, causes measurement error.Be in the light light
Door screen 12 needs and 05 inner-wall spraying space reflection distribution function (Bidirectional Reflectance of integrating sphere
Distribution Function, BRDF) consistent polytetrafluoroethylene PTFE material.
Optionally, the integrating sphere further includes：Integrating sphere exports, and for placing sample, the sample normal direction is with entering
Irradiating light beam is angled.
Optionally, the sample normal direction and incident beam are into 8 ° of angles.
On the basis of above-described embodiment, the integrating sphere further includes integrating sphere outlet 10, is an oblique tangent plane, is used for
Sample 06 and reference sample 14 are placed, after ensureing planar sample installation, sample normal direction and incident beam are pressed from both sides into 8 degree
Angle.It is intended that the largest light intensity of the reflected light of most of sample (being assumed to be minute surface sample) is located at its sample mirror-reflection
Place, if sample normal and incident light overlap, there will be the part energy that can not ignore due to reflecting from integrating sphere inlet
Leakage, causes measurement error.
Blacker-than-black material reflection ratio measuring device provided by the invention, using super continuum source as the ultralow reflectivity of wide spectrum
The light source of measuring device is high using the diaphragm of ultralow transmitting ratio as system zero by the use of acousto-optic modulator as system light-splitting device
Diffusion realizes the accurate measurement of ultralow reflectivity than magnitude datum mark of the blank as system.
Optionally, the U-shaped high light absorbent of light trapping inner-wall spraying, wherein the U-shaped extinction cylinder is multi-wall carbon nano-tube
Pipe.
On the basis of above-described embodiment, the U-shaped high light absorbent of extinction cylinder inner-wall spraying, multi-walled carbon nanotube.Light
Line is repeatedly absorbed so that can not leak repeatedly inside it after lens 03 are incident in U-shaped light trapping.U-shaped light
Trap inner wall also needs the conventional high-selenium corn coating of spraying, avoids leaking for light.U-shaped light trapping is miscellaneous in measurement process for excluding
Influence of the astigmatism to measurement.
Blacker-than-black material reflection ratio measuring device provided by the invention, using super continuum source as the ultralow reflectivity of wide spectrum
The light source of measuring device is high using the diaphragm of ultralow transmitting ratio as system zero by the use of acousto-optic modulator as system light-splitting device
Diffusion realizes the accurate measurement of ultralow reflectivity than magnitude datum mark of the blank as system.
Fig. 4 is the flow diagram of blacker-than-black material reflection ratio measuring method provided in an embodiment of the present invention, as shown in figure 4,
The method includes：
S101, obtain the system signal S1 of standard white plate, sample to be tested system signal S2 and add in U-shaped light trapping be
Unite signal S3；
S102, the reflectivity for calculating the sample to be tested are x=(S2-S3) * R/ (S1-S3), and wherein R is the standard white
The reflectance value of plate.
Blacker-than-black material reflection ratio measuring method provided in an embodiment of the present invention, it is based on the embodiment of the present invention to measure dress
It puts, before measuring, the reflectance value R by the i.e. standard white plate of reference sample is needed to measure, the prior art may be used
It measures, and wide dynamic signal range collector is demarcated, such as the voltage value and/or current value of calibration collector；
By the way that the acousto-optic modulator in device is adjusted, the wavelength to be measured is determined, after system stabilization, by known to
The standard white plate of reflectance value R is mounted on integrating sphere exit, records this collected system of time width dynamic signal range collector
Unite signal S1；
Standard white plate is removed, sample to be measured, that is, blacker-than-black material is put into integrating sphere exit, records this time width dynamic
The collected system signal S2 of range of signal collector；
U-shaped light trapping is put between lens and integrating sphere, this time width dynamic signal range collector is recorded and collects
System signal S3；
Above-mentioned data are uploaded to computer, calculate reflectivity x=(S2-S3) the * R/ (S1-S3) of sample, wherein R
Reflectance value for the standard white plate.
Blacker-than-black material reflection ratio measuring method provided by the invention, using super continuum source as the ultralow reflectivity of wide spectrum
The light source of measuring device is high using the diaphragm of ultralow transmitting ratio as system zero by the use of acousto-optic modulator as system light-splitting device
Diffusion realizes the accurate measurement of ultralow reflectivity than magnitude datum mark of the blank as system.
Device and system embodiment described above is only schematical, wherein described be used as separating component explanation
Unit may or may not be physically separate, the component shown as unit may or may not be
Physical unit, you can be located at a place or can also be distributed in multiple network element.It can be according to the actual needs
Some or all of module therein is selected to realize the purpose of this embodiment scheme.Those of ordinary skill in the art are not paying
In the case of performing creative labour, you can to understand and implement.
Claims (8)
1. a kind of blacker-than-black material reflection ratio measuring device, which is characterized in that including：Light source, acousto-optic modulator, lens, U-shaped light are fallen into
Trap, integrating sphere, detector, wide dynamic range signals collector and computer, wherein：The U-shaped light trapping is positioned over described
Between mirror and the integrating sphere, it is made of a speculum and a reversed U-shaped extinction cylinder, is sent out for absorbing the light source
Light.
2. the apparatus according to claim 1, which is characterized in that the light source is super continuum source.
3. the apparatus according to claim 1, which is characterized in that described device further includes lens translation stage, for carrying
State lens so that light beam is minimum in the hot spot of the opening of the integrating sphere.
4. the apparatus according to claim 1, which is characterized in that described device further includes the diaphragm that is in the light, installation and the product
Inside bulb separation, it is directly incident on the detector for the reflected light of sample to be avoided not homogenized by integrating sphere.
5. the apparatus according to claim 1, which is characterized in that the integrating sphere further includes：Integrating sphere exports, for placing
Sample, the sample normal direction and incident beam are angled.
6. device according to claim 5, which is characterized in that the sample normal direction and incident beam are into 8 ° of angles.
7. the apparatus according to claim 1, which is characterized in that the U-shaped high light absorbent of light trapping inner-wall spraying, wherein
The U-shaped extinction cylinder is multi-walled carbon nanotube.
A kind of 8. blacker-than-black material reflection ratio measuring method, which is characterized in that including：
Obtain the system signal S1 of standard white plate, the system signal S2 of sample to be tested and the system signal S3 for adding in U-shaped light trapping；
The reflectivity for calculating the sample to be tested is x=(S2-S3) * R/ (S1-S3), and wherein R is the reflection of the standard white plate
Ratio.
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| CN201711250418.8A CN108152251A (en) | 2017-12-01 | 2017-12-01 | A kind of blacker-than-black material reflection ratio measuring device and method |
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Application publication date: 20180612 |