CN109342026A - A kind of detection method of grenz ray glancing incidence telescope angular resolution - Google Patents

A kind of detection method of grenz ray glancing incidence telescope angular resolution Download PDF

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Publication number
CN109342026A
CN109342026A CN201811149680.8A CN201811149680A CN109342026A CN 109342026 A CN109342026 A CN 109342026A CN 201811149680 A CN201811149680 A CN 201811149680A CN 109342026 A CN109342026 A CN 109342026A
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glancing incidence
grenz ray
test target
resolution
ray glancing
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CN109342026B (en
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陈波
张亚超
刘鹏
王孝东
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

The embodiment of the invention discloses a kind of detection methods of grenz ray glancing incidence telescope angular resolution.The light path and calculation method that the detection method of the grenz ray glancing incidence telescope angular resolution passes through setting, the detection for carrying out grenz ray glancing incidence telescope angular resolution indirectly has the advantages that detection difficulty coefficient is low and improves the development efficiency of grenz ray glancing incidence telescope.

Description

A kind of detection method of grenz ray glancing incidence telescope angular resolution
Technical field
The present invention relates to the technical fields of grenz ray glancing incidence telescope, and in particular to a kind of grenz ray glancing incidence is looked in the distance The detection method of pitch-angle resolution ratio.
Background technique
Grenz ray glancing incidence telescope is the important instrument for carrying out space weather forecast.To guarantee that grenz ray glancing incidence is hoped Clearly observed image can be obtained when far mirror is in-orbit, before launching, grenz ray glancing incidence telescope must be on ground Carry out the detection of angular resolution.Currently, the angular resolution detection of grenz ray glancing incidence telescope is carried out in service band. This method needs to build huge detection device, and this detection method needs to carry out in a vacuum, this considerably increases The detection difficulty and cost of the angular resolution of grenz ray glancing incidence telescope.
Therefore, for the angular resolution detection method of existing grenz ray glancing incidence telescope, there are difficulty height and cost Big problem, the embodiment of the present invention propose a kind of detection side of indirect but quick grenz ray glancing incidence telescope angular resolution Method.
Summary of the invention
For the angular resolution detection method of existing grenz ray glancing incidence telescope, there are difficulty, high and cost is big asks Topic, the embodiment of the present invention propose a kind of detection method of grenz ray glancing incidence telescope angular resolution.The detection method is by setting Fixed light path and calculation method carries out the detection of grenz ray glancing incidence telescope angular resolution indirectly, has detection difficult Degree coefficient is low and improves the development efficiency advantage of grenz ray glancing incidence telescope.
A kind of specific side of the detection method of the grenz ray glancing incidence telescope angular resolution provided in the embodiment of the present invention Case is as follows: a kind of detection method of grenz ray glancing incidence telescope angular resolution includes: step S1: based on visible light wave range Angular resolution light path system carries out image checking to grenz ray glancing incidence telescope, obtains the resolution ratio of visible light wave range Test target image;Step S2: according to principle of diffraction optics obtain for calculate grenz ray glancing incidence telescope in visible light wave range and The diffraction point spread function of service band, then using image recovery method from the resolution test target image of the visible light wave range Diffraction by aperture effect is removed, the geometric image of resolution test target is obtained;Step S3: using plunderring for surface profiler measuring telescope The surface power spectral density of incident reflecting mirror, and soft X is obtained based on the surface power spectral density and surface scattering theoretical calculation Scattering point spread function of the ray glancing incidence telescope in service band;Step S4: by the geometric image of the resolution test target, The diffraction point spread function of the service band and the scattering point spread function of the service band carry out convolution algorithm, obtain work Make the resolution test target image of wave band;Step S5: according to the resolution test target image of the service band, acquisition can mutually divide The line pair distinguished, according to the line to the angular resolution for calculating acquisition service band.
Preferably, the angular resolution light path system of the visible light wave range includes: light source;Lens are arranged described The front of light source, the light for emitting the light source are focused effect;The front of the lens is arranged in frosted glass, uses In making the light beam through the lens become uniform;The front of the frosted glass is arranged in narrow band filter, for through institute The light beam for stating frosted glass filters to obtain quasi-monochromatic light;The front of the narrow band filter is arranged in resolution test target, The light beam that the resolution test target is through the narrow band filter illuminates, for detecting the resolution ratio of visible light wave range;It is flat Row light pipe, for receiving through from the light beam on the resolution test target and by the light beam parallelization;Grenz ray glancing incidence It looks in the distance pitch-angle, the front of the parallel light tube is set, for receiving the light beam being emitted from the parallel light tube and will be described Light beam is assembled;The front of the grenz ray glancing incidence telescope is arranged in ccd detector, for receiving from the soft X The light beam that is emitted in ray glancing incidence telescope and the resolution test target image for forming visible light wave range.
Preferably, the focal length of the parallel light tube is 3.75 millimeters, and bore is 250 millimeters, and the dispersion angle of emergent light is small In 2 ".
Preferably, the resolution test target uses the resolution test target of three targets.
Preferably, the pixel dimension of the ccd detector is 6.5 μm, pixel number is 576 × 720.
Preferably, the light source uses tungsten lamp.
Preferably, the image recovery method in the step S2 be by the resolution test target image of the visible light wave range with The diffraction point spread function of the visible light wave range carries out the de-convolution operation of successive ignition.
Preferably, the specific number of the successive ignition is determined using mean square error diagnostic method.
Preferably, by the diffraction point spread function of the resolution test target image of the visible light wave range and the visible light wave range The resolution test target image of the result of several de-convolution operations and the visible light wave range carries out mean square error calculating, when described equal The number of iterations when square error remains unchanged is final the number of iterations.
Preferably, the detailed process of the step S3 includes: the surface power spectrum using surface profiler measurement reflecting mirror Density, the surface power spectral density include middle low-frequency component and radio-frequency component;Using a Gaussian function, two Lorentz letters The sum of number and a K correlation function are fitted the surface power spectral density, obtain the expression formula of surface power spectral density; Fourier transformation is carried out to the expression formula of the surface power spectral density, obtains the surface auto-covariance function of the reflecting mirror; According to the surface auto-covariance function of the reflecting mirror, it is distributed using the bidirectional reflectance that surface scattering theoretical calculation obtains reflecting mirror Function;According to the bidirectional reflectance distribution function of the reflecting mirror, the scattering of grenz ray glancing incidence telescope is established in Zemax Model, and grenz ray glancing incidence telescope is obtained in the scattering point spread function of service band by non-sequence ray tracing.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
The embodiment of the present invention proposes a kind of detection method of grenz ray glancing incidence telescope angular resolution.The grenz ray is plunderred The detection method of incident telescope angular resolution is carried out grenz ray indirectly and is plunderred by the light path and calculation method of setting The detection of incident telescope angular resolution, development effect that is low with detection difficulty coefficient and improving grenz ray glancing incidence telescope Rate advantage.
Detailed description of the invention
Fig. 1 is a kind of detection method of grenz ray glancing incidence telescope angular resolution provided by the embodiment of the present invention Flow diagram;
Fig. 2 shows for a kind of structure of the angular resolution light path system of visible light wave range provided by the embodiment of the present invention It is intended to;
Fig. 3 is another rough schematic view of the step process of embodiment illustrated in fig. 1.
Explanation is marked in attached drawing:
100, the angular resolution light path system 10 of visible light wave range, light source
20, lens 30, frosted glass 40, optical filter
50, resolution test target 60, parallel light tube 80, ccd detector
70, grenz ray glancing incidence telescope
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work It encloses.
Description and claims of this specification and term " first ", " second ", " third ", " in above-mentioned attached drawing The (if present)s such as four " are to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should manage The data that solution uses in this way are interchangeable under appropriate circumstances, so that the embodiments described herein can be in addition to illustrating herein Or the sequence other than the content of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that Cover it is non-exclusive include, for example, containing the process, method, system, product or equipment of a series of steps or units need not limit In step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, produce The other step or units of product or equipment inherently.
As shown in Figure 1, a kind of detection side of grenz ray glancing incidence telescope angular resolution provided by the embodiment of the present invention The flow diagram of method.In this embodiment, the detection method of grenz ray glancing incidence telescope angular resolution includes five steps Suddenly, details are provided below.
Step S1: the angular resolution light path system based on visible light wave range carries out grenz ray glancing incidence telescope Image checking obtains the resolution test target image of visible light wave range.As shown in Fig. 2, one kind provided by the embodiment of the present invention can The structural schematic diagram of the angular resolution light path system of light-exposed wave band.The angular resolution light path system of visible light wave range 100 include: light source 10, and the front of light source 10 is arranged in and the light for being emitted light source 10 is focused the lens of effect 20, the front of lens 20 and the frosted glass 30 for being homogenized to the light beam through lens 20 are set, are arranged in hair glass The front of glass 30 and for filtering the light beam through frosted glass 30 to obtain the narrow band filter 40 of quasi-monochromatic light, setting Narrow band filter 40 front and be through the light beam of narrow band filter 40 and illuminate, for detecting the resolution ratio of visible light wave range Resolution test target 50, penetrate light beam on resolution test target 50 and by the directional light of the light beam parallelization for receiving The front of parallel light tube 60 is arranged in and for receiving the light beam being emitted from parallel light tube 60 and carrying out the light beam in pipe 60 The front of grenz ray glancing incidence telescope 70 is arranged in and for receiving from soft X in the grenz ray glancing incidence telescope 70 of convergence The ccd detector 80 of the light beam that is emitted in ray glancing incidence telescope 70 and the resolution test target image for forming visible light wave range.
The light that light source 10 issues passes through the focusing of lens 20, becomes uniform quasi- single after frosted glass 30 and narrow band filter 40 Then coloured light, quasi-monochromatic light are irradiated on resolution test target 50, project resolution test target 50 using parallel light tube 60 It is converged on the ccd detector 80 of image planes to infinite point, then by grenz ray glancing incidence telescope 70, forms visible light The resolution test target image of wave band.
In this embodiment, the focal length of parallel light tube 60 is 3.75 millimeters, and bore is 250 millimeters, the angle of divergence of emergent light Degree is less than 2 ".Resolution test target 50 is surveyed using the resolution test target of three targets, the specially resolution ratio of USAF1951F model Try target.The pixel dimension of ccd detector 80 is 6.5 μm, pixel number is 576 × 720.Light source 10 uses tungsten lamp.Narrow-band-filter The central wavelength of piece 40 is 570nm.
Step S2: according to principle of diffraction optics obtain for calculate grenz ray glancing incidence telescope in visible light wave range and The diffraction point spread function of service band, then using image recovery method from the resolution test target image of the visible light wave range Diffraction by aperture effect is removed, the geometric image of resolution test target is obtained.In this embodiment, image recovery method is it will be seen that light The resolution test target image of wave band and the diffraction point spread function of visible light wave range carry out the de-convolution operation of successive ignition.Repeatedly The specific number of iteration is determined using mean square error diagnostic method, specific process are as follows: by the resolution of the visible light wave range The result of the de-convolution operation of the diffraction point spread function of rate test target image and the visible light wave range and the visible light wave range Resolution test target image carry out mean square error calculating, the number of iterations when the mean square error remains unchanged be it is final repeatedly Generation number.
Simplifiedly describe are as follows: the diffraction point spread function of the iteration result of kth time and visible light wave range is done into deconvolution, it is right Than deconvolution result and resolution test target image, stop iteration when the mean square error of the two no longer changes, specific k value is The number of iteration.Herein, service band represents X-ray wave band.
Step S3: it using the surface power spectral density of the grazing incidence mirror of surface profiler measuring telescope, and is based on The surface power spectral density and surface scattering theoretical calculation obtain grenz ray glancing incidence telescope in the scattering point of service band Spread function.Step S3's includes five sub-steps, and details are provided below.
Step S31: using the surface power spectral density of surface profiler measurement reflecting mirror, the surface power spectral density packet Include middle low-frequency component and radio-frequency component.The combination of i.e. middle low-frequency component and radio-frequency component is the surface power spectrum of reflecting mirror Degree.
Step S32: using the sum of a Gaussian function, two Lorentzians and a K correlation function to the surface Power spectral density is fitted, and obtains the expression formula of surface power spectral density
Step S33: Fourier transformation is carried out to the expression formula of the surface power spectral density, obtains the table of the reflecting mirror Face auto-covariance function.
Step S34: it according to the surface auto-covariance function of the reflecting mirror, is reflected using surface scattering theoretical calculation The bidirectional reflectance distribution function of mirror.
Step S35: according to the bidirectional reflectance distribution function of the reflecting mirror, the prestige of grenz ray glancing incidence is established in Zemax The scattering model of remote mirror, and grenz ray glancing incidence telescope is obtained in the scattering point of service band by non-sequence ray tracing Spread function.
Step S4: by the geometric image of the resolution test target, the diffraction point spread function of the service band and described The scattering point spread function of service band carries out convolution algorithm, obtains the resolution test target image of service band.
Step S5: according to the resolution test target image of the service band, the line pair that can mutually differentiate is obtained, according to institute Line is stated to the angular resolution for calculating acquisition service band.The line that can mutually differentiate is to can be the line that can be differentiated open just It is right.
The detection that the detection method for the grenz ray glancing incidence telescope angular resolution that the embodiment of the present invention proposes passes through setting Optical path and calculation method carry out the detection of grenz ray glancing incidence telescope angular resolution indirectly, have detection difficulty coefficient low And improve the development efficiency advantage of grenz ray glancing incidence telescope.
As shown in figure 3, another rough schematic view of the step process for embodiment illustrated in fig. 1.According to Fig.3, may be used The resolution test target image of light-exposed wave band and the diffraction by aperture point spread function of visible light wave range carry out de-convolution operation, with removal Diffraction effect in the resolution test target image of visible light wave range, to obtain the geometric image of resolution test target;By resolution ratio Test the geometric image and the scattering point spread function of X-ray wave band (i.e. service band), X-ray wave band (i.e. service band) of target Diffraction by aperture point spread function carries out convolution and then obtains the resolution test target image of X-ray wave band (i.e. service band);Finally, The angle point for obtaining X-ray wave band (i.e. service band) is calculated according to the resolution test target image of X-ray wave band (i.e. service band) Resolution.In fig. 3, it can be seen that the diffraction by aperture point spread function of optical band is with the module table of diffraction by aperture effect (visible light wave range) Show, the diffraction by aperture point spread function of X-ray wave band is indicated with the module of diffraction by aperture effect (X-ray wave band).
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned Embodiment is changed, modifies, replacement and variant.

Claims (10)

1. a kind of detection method of grenz ray glancing incidence telescope angular resolution, which is characterized in that the detection method includes:
Step S1: grenz ray glancing incidence telescope is imaged in the angular resolution light path system based on visible light wave range Detection, obtains the resolution test target image of visible light wave range;
Step S2: it is obtained according to principle of diffraction optics for calculating grenz ray glancing incidence telescope in visible light wave range and work The diffraction point spread function of wave band, then removed from the resolution test target image of the visible light wave range using image recovery method Diffraction by aperture effect obtains the geometric image of resolution test target;
Step S3: using the surface power spectral density of the grazing incidence mirror of surface profiler measuring telescope, and based on described Surface power spectral density and surface scattering theoretical calculation obtain grenz ray glancing incidence telescope and spread in the scattering point of service band Function;
Step S4: by the geometric image of the resolution test target, the diffraction point spread function of the service band and the work The scattering point spread function of wave band carries out convolution algorithm, obtains the resolution test target image of service band;
Step S5: according to the resolution test target image of the service band, the line pair that can mutually differentiate is obtained, according to the line To the angular resolution that service band is calculated.
2. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 1, feature exist In the angular resolution light path system of the visible light wave range includes:
Light source;
The front of the light source is arranged in lens, and the light for emitting the light source is focused effect;
The front of the lens is arranged in frosted glass, for making the light beam through the lens become uniform;
The front of the frosted glass is arranged in narrow band filter, for filtering the light beam through the frosted glass to obtain Obtain quasi-monochromatic light;
Resolution test target, is arranged in the front of the narrow band filter, and the resolution test target is through the narrowband filter The light beam of mating plate illuminates, for detecting the resolution ratio of visible light wave range;
Parallel light tube, for receiving through the light beam on the resolution test target and by the light beam parallelization;
The front of the parallel light tube is arranged in grenz ray glancing incidence telescope, is emitted from the parallel light tube for receiving Light beam and the light beam is assembled;
The front of the grenz ray glancing incidence telescope is arranged in ccd detector, for receiving from the grenz ray glancing incidence The light beam that is emitted in pitch-angle of looking in the distance and the resolution test target image for forming visible light wave range.
3. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 2, feature exist In the focal length of the parallel light tube is 3.75 millimeters, and bore is 250 millimeters, and the dispersion angle of emergent light is less than 2 ".
4. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 2, feature exist In the resolution test target uses the resolution test target of three targets.
5. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 2, feature exist In the pixel dimension of the ccd detector is 6.5 μm, pixel number is 576 × 720.
6. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 2, feature exist In the light source uses tungsten lamp.
7. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 1, feature exist In the image recovery method in the step S2 is by the resolution test target image of the visible light wave range and the visible light wave The diffraction point spread function of section carries out the de-convolution operation of successive ignition.
8. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 7, feature exist In determining the specific number of the successive ignition using mean square error diagnostic method.
9. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 8, feature exist In by the deconvolution fortune of the resolution test target image of the visible light wave range and the diffraction point spread function of the visible light wave range The resolution test target image of the result of calculation and the visible light wave range carries out mean square error calculating, when the mean square error is kept not The number of iterations when change is final the number of iterations.
10. a kind of detection method of grenz ray glancing incidence telescope angular resolution according to claim 1, feature exist In the detailed process of the step S3 includes:
Using the surface power spectral density of surface profiler measurement reflecting mirror, the surface power spectral density includes middle low-frequency component And radio-frequency component;
Using the sum of a Gaussian function, two Lorentzians and a K correlation function to the surface power spectral density into Row fitting, obtains the expression formula of surface power spectral density;
Fourier transformation is carried out to the expression formula of the surface power spectral density, obtains the surface auto-covariance letter of the reflecting mirror Number;
According to the surface auto-covariance function of the reflecting mirror, the bidirectional reflectance of reflecting mirror is obtained using surface scattering theoretical calculation Distribution function;
According to the bidirectional reflectance distribution function of the reflecting mirror, the scattering mould of grenz ray glancing incidence telescope is established in Zemax Type, and grenz ray glancing incidence telescope is obtained in the scattering point spread function of service band by non-sequence ray tracing.
CN201811149680.8A 2018-09-29 2018-09-29 Method for detecting angular resolution of soft X-ray grazing incidence telescope Active CN109342026B (en)

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CN111123538A (en) * 2019-09-17 2020-05-08 印象认知(北京)科技有限公司 Image processing method and method for adjusting diffraction screen structure based on point spread function

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Publication number Priority date Publication date Assignee Title
CN111123538A (en) * 2019-09-17 2020-05-08 印象认知(北京)科技有限公司 Image processing method and method for adjusting diffraction screen structure based on point spread function
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