CN108107376A - Radio-frequency power supply test system and test method based on plasma ambient - Google Patents
Radio-frequency power supply test system and test method based on plasma ambient Download PDFInfo
- Publication number
- CN108107376A CN108107376A CN201711443387.8A CN201711443387A CN108107376A CN 108107376 A CN108107376 A CN 108107376A CN 201711443387 A CN201711443387 A CN 201711443387A CN 108107376 A CN108107376 A CN 108107376A
- Authority
- CN
- China
- Prior art keywords
- cavity
- power supply
- radio
- frequency power
- plasma ambient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/40—Testing power supplies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of radio-frequency power supply test systems based on plasma ambient and test method, the system to include sequentially connected adaptation, dynamic load simulator and plasma ambient analog machine.Radio-frequency power supply test system provided by the invention based on plasma ambient, can establish the plasma ambient similar to curstomer's site condition, the impedance point of curstomer's site can be simulated based on plasma ambient；Radio-frequency power supply test method provided by the invention based on plasma ambient, the performance and its reliability that radio-frequency power supplies work under plasma ambient can be verified by simulating several impedance points and gathers relevant data, the reliability of power supply can be verified exactly, the failure of power supply is clarified, the needs of practical application can be met well.
Description
Technical field
The invention belongs to radio-frequency power supply technical field of measurement and test, and in particular to a kind of radio-frequency power supply based on plasma ambient is surveyed
Test system and test method.
Background technology
In radio-frequency power supply service industry, at present there are two types of the ubiquitous systems of test radio-frequency power supply：One kind is by radio frequency electrical
The defects of source is directly accessed fixed fictitious load and is tested, the system is that impedance is fixed and can only test the one of radio-frequency power supply
As performance and basic parameter, can not reflect performance and parameter of the power supply when curstomer's site uses；It is another as shown in Figure 1,
Radio-frequency power supply, adaptation, dynamic load simulator and fixed fictitious load are sequentially connected and are tested, although this kind of system can
Impedance is adjusted, reflects performance and parameter of the power supply when curstomer's site uses to a certain extent, is the transverse direction of power source performance
Contrast test provides certain help, but there are larger difference, power supplys with the impedance under curstomer's site plasma ambient after all
Reliability and the property of can refer to of data be still difficult to ensure that.
The content of the invention
Problem present in for the above-mentioned prior art, it is an object of the invention to provide one kind can avoid the occurrence of above-mentioned skill
The test system of the radio-frequency power supply based on plasma ambient and test method of art defect, so as to establish and curstomer's site condition
Similar plasma ambient based on the impedance point of plasma ambient simulation curstomer's site, is established radio-frequency power supply test system, is passed through
It simulates the performance and its reliability that several impedance points verification radio-frequency power supplies work under plasma ambient and gathers relevant data.
In order to realize foregoing invention purpose, technical solution provided by the invention is as follows：
A kind of radio-frequency power supply test system based on plasma ambient, including sequentially connected adaptation, dynamic load mould
Intend device and plasma ambient analog machine.
Further, plasma ambient analog machine includes cavity, vacuum pump, frozen water machine, switch board and gas cylinder, wherein,
Switch board, gas cylinder and cavity are sequentially connected；Switch board, vacuum pump and cavity are sequentially connected；Switch board, frozen water machine and cavity are successively
Connection；Switch board is directly connected to cavity；Dynamic load simulator is connected with cavity.
Further, the cavity is inductance chamber or capacitance cavity.
A kind of radio-frequency power supply test method based on plasma ambient, comprises the following steps：
Step 1), which vacuumizes cavity, reaches standard vacuum degree；
Step 2) is filled with experimental gas into cavity, determines gas flow；
Step 3) opens radio-frequency power supply and exports suitable power, and adaptation is made to be in automatic mode, and it is negative to adjust dynamic manually
Carrying simulator makes cavity starter generate plasma；
After step 4) starter, continue to adjust the stream that dynamic load simulator adjusts several impedance points and/or change gas
It measures to change impedance environment, then gathered data.
Further, the step 1) is：Cavity is vacuumized with vacuum pump and reaches standard vacuum degree.
Further, the step 2) is：Experimental gas is filled with into cavity using gas cylinder, determines gas flow.
Radio-frequency power supply test system provided by the invention based on plasma ambient, can establish and curstomer's site condition phase
As plasma ambient, can based on plasma ambient simulate curstomer's site impedance point；It is provided by the invention to be based on plasma
The radio-frequency power supply test method of environment can verify what radio-frequency power supply worked under plasma ambient by simulating several impedance points
Performance and its reliability simultaneously gather relevant data, can verify the reliability of power supply exactly, clarify the failure of power supply, can be with
Meet the needs of practical application well.
Description of the drawings
Fig. 1 is the radio-frequency power supply test system structure block diagram of the prior art；
Fig. 2 is that the radio-frequency power supply based on plasma ambient of the present invention tests the structure diagram of system；
Fig. 3 is the structure diagram of plasma ambient analog machine；
Fig. 4 is the structure diagram of cavity.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with the accompanying drawings and specific implementation
The present invention will be further described for example.It should be appreciated that specific embodiment described herein is only to explain the present invention, and do not have to
It is of the invention in limiting.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Lower all other embodiments obtained, belong to the scope of protection of the invention.
As shown in Fig. 2, it is a kind of based on plasma ambient radio-frequency power supply test system, including sequentially connected adaptation,
Dynamic load simulator and plasma ambient analog machine, plasma ambient analog machine are the necessary conditions for generating plasma；
As shown in figure 3, plasma ambient analog machine includes cavity, vacuum pump, frozen water machine, switch board and gas cylinder, wherein, switch board,
Gas cylinder and cavity are sequentially connected；Switch board, vacuum pump and cavity are sequentially connected；Switch board, frozen water machine and cavity are sequentially connected；Control
Cabinet processed is directly connected to cavity.Dynamic load simulator is connected with cavity.The power of radio-frequency power supply output is introduced into adaptation,
Using dynamic load simulator, finally enter in cavity.The structure of cavity is as shown in Figure 4.The cavity can be inductance
Chamber or capacitance cavity.
Adaptation is mainly used on transmission line, can all reach the purpose of load point to reach all radiofrequency signals, not have
Signal reflex returns to source point, so as to promote source benefit, the adaptation usually to match with tested radio-frequency power supply.
Dynamic load simulator is the load simulator that can be adjusted, and is used cooperatively with cavity, to make up and client institute
Difference between the cavity used, so as to simulate the impedance environment similar or even consistent to curstomer's site.
This radio-frequency power supply test system can test the parameter of power supply under different capacity, different impedance environment, performance and its
Reliability.
A kind of radio-frequency power supply test method based on plasma ambient, comprises the following steps：
1) cavity is vacuumized with vacuum pump and reaches standard vacuum degree；
2) experimental gas is filled with into cavity using gas cylinder, determines gas flow；
3) open radio-frequency power supply and export suitable power, adaptation is made to be in automatic mode, adjust dynamic load mould manually
Intending device makes cavity starter generate plasma；
If the scope that dynamic load simulator is adjusted can not enough lead to not starter, it is impossible to generate plasma, at this moment
It must be modified, until requirement can be reached, cavity starter can be made to generate plasma；
4) after starter, continue to adjust several impedance points of dynamic load simulator adjusting and/or the flow of change gas comes
Change impedance environment, at this moment can gather related data, scaffold tower can also be cured and do across comparison.
Validity to verify this method is tested, and two radio-frequency power supplies of the same model of across comparison are in plasma
The Auto-matching situation of some impedance point under environment, experiment are as follows：
No. 1 power supply：Non-defective unit；No. 2 power supplys：It is confirmed, client feedback, reflection power is big；Utilize what is mentioned in background technology
The prior art is tested, and does not find difference；
It is tested using the system, step is as follows：
1) No. 1 power supply (non-defective unit) is first installed, after cavity vacuumizes and reaches standard vacuum degree, is filled with experimental gas, gas
Body flow is set to P1；
2) radio-frequency power supply output A power is opened, adaptation is made to be in automatic mode, adjusting dynamic load simulator manually makes
Cavity starter generates plasma；
3) continuing adjusting dynamic load simulator makes reflection power RP1 drop in critical field；
4) radio-frequency power supply output B power records the final reflection power value RP2 of power supply after Auto-matching；
5) No. 1 power supply is changed to No. 2 power supplys, other are remained unchanged, the reflection power after output A power trace matchings
Reflection power RP4 after RP3, output B power trace matching.
As a result：RP1, RP3 be in critical field under A power situations, under B power situations RP2 in critical field,
But RP4 illustrates that power supply there may be problem, by maintenance, has found trouble point simultaneously really far beyond critical field
It re-uses the system after excluding to be tested, reflection power value illustrates system and method all in critical field
Validity.
Radio-frequency power supply test system provided by the invention based on plasma ambient, can establish and curstomer's site condition phase
As plasma ambient, can based on plasma ambient simulate curstomer's site impedance point；It is provided by the invention to be based on plasma
The radio-frequency power supply test method of environment can verify what radio-frequency power supply worked under plasma ambient by simulating several impedance points
Performance and its reliability simultaneously gather relevant data, can verify the reliability of power supply exactly, clarify the failure of power supply, can be with
Meet the needs of practical application well.
Embodiment described above only expresses embodiments of the present invention, and description is more specific and detailed, but can not
Therefore it is interpreted as the limitation to the scope of the claims of the present invention.It should be pointed out that for those of ordinary skill in the art,
Without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection model of the present invention
It encloses.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (6)
1. a kind of radio-frequency power supply test system based on plasma ambient, which is characterized in that including sequentially connected adaptation, move
State load simulator and plasma ambient analog machine.
2. radio frequency test system according to claim 1, which is characterized in that plasma ambient analog machine include cavity,
Vacuum pump, frozen water machine, switch board and gas cylinder, wherein, switch board, gas cylinder and cavity are sequentially connected；Switch board, vacuum pump and cavity
It is sequentially connected；Switch board, frozen water machine and cavity are sequentially connected；Switch board is directly connected to cavity；Dynamic load simulator and chamber
Body is connected.
3. radio frequency test system according to claim 1, which is characterized in that the cavity is inductance chamber or capacitance cavity.
4. a kind of radio-frequency power supply test method based on plasma ambient, which is characterized in that comprise the following steps：
Step 1), which vacuumizes cavity, reaches standard vacuum degree；
Step 2) is filled with experimental gas into cavity, determines gas flow；
Step 3) opens radio-frequency power supply and exports suitable power, and adaptation is made to be in automatic mode, adjusts dynamic load mould manually
Intending device makes cavity starter generate plasma；
After step 4) starter, continue to adjust several impedance points of dynamic load simulator adjusting and/or the flow of change gas comes
Change impedance environment, then gathered data.
5. the radio-frequency power supply test method according to claim 1-4, which is characterized in that the step 1 is：With vacuum pump pair
Cavity, which vacuumizes, reaches standard vacuum degree.
6. the radio-frequency power supply test method according to claim 1-4, which is characterized in that the step 2 is：Using gas cylinder to
Experimental gas is filled in cavity, determines gas flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711443387.8A CN108107376B (en) | 2017-12-27 | 2017-12-27 | radio frequency power supply testing system and method based on plasma environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711443387.8A CN108107376B (en) | 2017-12-27 | 2017-12-27 | radio frequency power supply testing system and method based on plasma environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108107376A true CN108107376A (en) | 2018-06-01 |
| CN108107376B CN108107376B (en) | 2019-12-13 |
Family
ID=62211867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711443387.8A Active CN108107376B (en) | 2017-12-27 | 2017-12-27 | radio frequency power supply testing system and method based on plasma environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108107376B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975722A (en) * | 2019-03-17 | 2019-07-05 | 江苏神州半导体科技有限公司 | A kind of detection method of radio-frequency power supply |
| CN111397810A (en) * | 2020-04-28 | 2020-07-10 | 江苏神州半导体科技有限公司 | Gas leakage detection method for RPS gas dissociation |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101566674A (en) * | 2008-04-24 | 2009-10-28 | 中芯国际集成电路制造(上海)有限公司 | Radio-frequency power supply testing device |
| CN101587156A (en) * | 2003-04-24 | 2009-11-25 | 东京毅力科创株式会社 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| CN101796624A (en) * | 2007-06-28 | 2010-08-04 | 朗姆研究公司 | Method and apparatus for a voltage/current probe test arrangements |
| CN103869260A (en) * | 2012-12-13 | 2014-06-18 | 中兴通讯股份有限公司 | Power supply test system and method |
| US20140232374A1 (en) * | 2013-02-21 | 2014-08-21 | Applied Materials, Inc. | Measurement of plural rf sensor devices in a pulsed rf plasma reactor |
| CN104051215A (en) * | 2013-03-15 | 2014-09-17 | 朗姆研究公司 | Determining A Malfunctioning Device in A Plasma System |
| CN106908742A (en) * | 2015-12-18 | 2017-06-30 | 技嘉科技股份有限公司 | Power supply testing device and method |
-
2017
- 2017-12-27 CN CN201711443387.8A patent/CN108107376B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101587156A (en) * | 2003-04-24 | 2009-11-25 | 东京毅力科创株式会社 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| CN101796624A (en) * | 2007-06-28 | 2010-08-04 | 朗姆研究公司 | Method and apparatus for a voltage/current probe test arrangements |
| CN101566674A (en) * | 2008-04-24 | 2009-10-28 | 中芯国际集成电路制造(上海)有限公司 | Radio-frequency power supply testing device |
| CN103869260A (en) * | 2012-12-13 | 2014-06-18 | 中兴通讯股份有限公司 | Power supply test system and method |
| US20170178873A1 (en) * | 2013-01-31 | 2017-06-22 | Lam Research Corporation | Determining A Malfunctioning Device in A Plasma System |
| US20140232374A1 (en) * | 2013-02-21 | 2014-08-21 | Applied Materials, Inc. | Measurement of plural rf sensor devices in a pulsed rf plasma reactor |
| CN104051215A (en) * | 2013-03-15 | 2014-09-17 | 朗姆研究公司 | Determining A Malfunctioning Device in A Plasma System |
| CN106908742A (en) * | 2015-12-18 | 2017-06-30 | 技嘉科技股份有限公司 | Power supply testing device and method |
Non-Patent Citations (1)
| Title |
|---|
| 佚名: "射频电源工作原理", 《豆丁网》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975722A (en) * | 2019-03-17 | 2019-07-05 | 江苏神州半导体科技有限公司 | A kind of detection method of radio-frequency power supply |
| CN109975722B (en) * | 2019-03-17 | 2021-09-14 | 江苏神州半导体科技有限公司 | Detection method of radio frequency power supply |
| CN111397810A (en) * | 2020-04-28 | 2020-07-10 | 江苏神州半导体科技有限公司 | Gas leakage detection method for RPS gas dissociation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108107376B (en) | 2019-12-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107122304B (en) | JTAG remote debugging method | |
| CN103344936B (en) | Method for fault simulation test of capacitor voltage transformer | |
| CN102185664B (en) | Automatic testing system of radio frequency passive device | |
| US20090265138A1 (en) | Testing system and method for testing a vibration function of a mobile phone | |
| CN101902255A (en) | Simulation test device and method of power line carrier communication | |
| CN108107376A (en) | Radio-frequency power supply test system and test method based on plasma ambient | |
| CN111427781B (en) | Simulation and entity compatible logic function test method and platform | |
| CN105282347B (en) | The appraisal procedure and device of voice quality | |
| CN103234725B (en) | Method for testing vibration damage limit of anti-skidding braking control box | |
| CN105425201A (en) | Metering chip simulation test method used for intelligent electric energy meter software reliability detection | |
| CN105911500A (en) | Assessment verifying device and method for on-line ultrahigh-frequency partial discharge monitoring system | |
| CN110082656A (en) | A kind of method and device thereof of cable aging dealing monitoring | |
| CN110072166A (en) | A kind of hardware adjustment method of digital microphone | |
| CN103954946B (en) | A kind of TR assembly debugging instrument | |
| US20050240389A1 (en) | Virtual test environment | |
| CN203178379U (en) | Intelligent electric-energy-meter electromagnetic compatibility test system | |
| US6898746B2 (en) | Method of and apparatus for testing a serial differential/mixed signal device | |
| CN201590907U (en) | Device for automatic power calibration for TD-CDMA transmitter module | |
| CN107678902A (en) | A kind of method of testing and its device of unified storage array | |
| CN203722647U (en) | Testing system for high-frequency transceiver | |
| CN103323252B (en) | Extraction method for power response characteristic parameter of steam turbine | |
| CN205607595U (en) | Electronic dynamic pressure calibrator | |
| CN106019021B (en) | The universal test tooling and its test method of testing for electrical equipment device | |
| CN209313856U (en) | A kind of ARINC429 bus communication fault injection device | |
| CN103401734A (en) | Method and device for debugging signal quality of high-speed data buses |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20191106 Address after: 225000 No. 19, Shugang West Road, Hangjiang District, Yangzhou City, Jiangsu Province Applicant after: Jiangsu Shenzhou Semiconductor Technology Co., Ltd. Address before: 225000 No. 19, Shu Gang West Road, Hanjiang District, Yangzhou, Jiangsu Applicant before: Yangzhou Shenzhou science and Technology Co., Ltd. |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |