CN109975722B - Detection method of radio frequency power supply - Google Patents
Detection method of radio frequency power supply Download PDFInfo
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- CN109975722B CN109975722B CN201910200851.3A CN201910200851A CN109975722B CN 109975722 B CN109975722 B CN 109975722B CN 201910200851 A CN201910200851 A CN 201910200851A CN 109975722 B CN109975722 B CN 109975722B
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- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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Abstract
The invention discloses a detection method of a radio frequency power supply, which specifically comprises the following steps: 1) firstly, dividing a radio frequency power supply into five modules, namely a power supply module, an amplification module, a control module, a Sensor module and a complete machine test module; 2) then starting an amplification module to carry out an independent test step, and entering the step 3 after the test is qualified; otherwise, replacing the amplifying module according to the test result; and re-entering the step 2; 3) then starting an independent test step of the control module; after the test is qualified, entering the step 4; otherwise, replacing the control module according to the test result; and re-entering the step 3; 4) then starting an independent test step of the Sensor module; after the test is qualified, entering the step 5; otherwise, replacing the Sensor module according to the test result; and re-entering the step 4; 5) then starting a complete machine test module for independent test; after the test is qualified, entering the step 6; otherwise, adjusting and repairing according to the test result; and re-entering the step 5; 6) and (5) successfully testing and packaging. The invention improves the working efficiency.
Description
Technical Field
The invention relates to the technical field of factory detection methods, in particular to a detection method of a radio frequency power supply.
Background
The radio frequency power supply is a plasma matched power supply, consists of a radio frequency power source, an impedance matcher and an impedance power meter, is a new high-tech field in China at the end of eighty years, and is applied to equipment such as radio frequency sputtering, PECVD chemical vapor deposition, reactive ion etching and the like. The modern radio frequency power supply has been developed, and the tube power supply of eighties has been developed step by step into the present transistor radio frequency power supply, the power is from watt, hundred watt, kilowatt to megawatt, the frequency is 2Mhz/13.56Mhz/27.12Mhz/40.68Mhz, etc., and the application is also expanded from the former vacuum field to other fields, semiconductor, beauty treatment, etc. With the continuous development of the radio frequency power supply, the quality of the radio frequency power supply directly affects the power supply performance of other equipment, so that the radio frequency power supply needs to be integrally detected when the radio frequency power supply leaves a factory, but the current detection steps are complex, and the working efficiency is low.
Disclosure of Invention
The present invention is directed to provide a maintenance and inspection method for a radio frequency power supply, which improves the inspection efficiency in order to overcome the above-mentioned shortcomings in the prior art.
In order to achieve the above object, the present invention provides a method for detecting a radio frequency power supply, which specifically comprises the following steps:
1) firstly, dividing a radio frequency power supply into five modules, namely a power supply module, an amplification module, a control module, a Sensor module and a complete machine test module;
2) then starting an amplification module to carry out an independent test step, and entering the step 3 after the test is qualified; otherwise, replacing the amplifying module according to the test result; and re-entering the step 2;
3) then starting an independent test step of the control module; after the test is qualified, entering the step 4; otherwise, replacing the control module according to the test result; and re-entering the step 3;
4) then starting an independent test step of the Sensor module; after the test is qualified, entering the step 5; otherwise, replacing the Sensor module according to the test result; and re-entering the step 4;
5) then starting a complete machine test module for independent test; after the test is qualified, entering the step 6; otherwise, adjusting and repairing according to the test result; and re-entering the step 5;
6) and (5) successfully testing and packaging.
Further, the amplification module alone test in step 2 adopts a waveform detection method or a power detection method, and the control module alone test in step 3 adopts a power supply detection method.
Further, the Sensor module independent test in step 4 adopts an S-parameter network analyzer test method.
Further, the independent test of the complete machine test module in the step 5 adopts a linear test method, a reflection test method, a cavity test method or a frequency test method.
Further, the waveform detection method comprises the following specific steps: the amplification module is independently powered and provided with signals, so that the amplification module can output power in an off-line mode, the radio frequency amplification module outputs waves with higher frequency, and the oscilloscope samples the waves at an output point to acquire an imaged display high-frequency wave signal.
Further, the power detection method comprises the following specific steps: and independently supplying power and signals to the amplifying module, so that the amplifying module can output power in an off-line mode, reading the output power of the amplifying module through a Sensor and a Meter, and checking whether the amplifying module can output full power.
Further, the power supply detection method comprises the following specific steps: the control panel module is independently powered, and the control module can be visually judged by checking the power supply voltage and current conditions.
The detection method of the radio frequency power supply improves the process efficiency and is relatively simple to operate.
Drawings
Fig. 1 is a schematic flow chart of a method for detecting a radio frequency power supply in embodiment 1;
FIG. 2 is a schematic diagram of the framework of the waveform detection method in example 1;
FIG. 3 is a schematic diagram of the framework of the power detection method in example 1;
FIG. 4 is a schematic diagram of a framework of a power supply detection method in example 1;
FIG. 5 is a schematic diagram of a framework of the s-parameter analysis method in example 1;
FIG. 6 is a schematic view of the framework of the linear test method in example 1;
FIG. 7 is a schematic diagram of the framework of the reflection test method in example 1;
FIG. 8 is a schematic block diagram of the chamber test method in example 1;
fig. 9 is a schematic diagram of the framework of the frequency test method in example 1.
Detailed Description
The invention will be further described with reference to the following examples.
Example 1:
as shown in fig. 1, the method for detecting a radio frequency power supply provided in this embodiment specifically includes the following steps:
1) firstly, dividing a radio frequency power supply into five modules, namely a power supply module, an amplification module, a control module, a Sensor module and a complete machine test module;
2) then starting an amplification module to carry out an independent test step, and entering the step 3 after the test is qualified; otherwise, replacing the amplifying module according to the test result; and re-entering the step 2;
3) then starting an independent test step of the control module; after the test is qualified, entering the step 4; otherwise, replacing the control module according to the test result; and re-entering the step 3;
4) then starting an independent test step of the Sensor module; after the test is qualified, entering the step 5; otherwise, replacing the Sensor module according to the test result; and re-entering the step 4;
5) then starting a complete machine test module for independent test; after the test is qualified, entering the step 6; otherwise, adjusting and repairing according to the test result; and re-entering the step 5;
6) and (5) successfully testing and packaging.
Further, the amplification module alone test in step 2 adopts a waveform detection method or a power detection method, and the control module alone test in step 3 adopts a power supply detection method.
Further, the Sensor module independent test in step 4 adopts an S-parameter network analyzer test method.
Further, the independent test of the complete machine test module in the step 5 adopts a linear test method, a reflection test method, a cavity test method or a frequency test method.
As shown in fig. 2, further, the waveform detection method includes the following specific steps: the amplification module is independently powered and provided with signals, so that the amplification module can output power in an off-line mode, the radio frequency amplification module outputs waves with higher frequency, and the oscilloscope samples the waves at an output point to acquire an imaged display high-frequency wave signal.
The advantages are that:
the loading capability of the power supply module can be verified very reliably;
the test result can be visually displayed by monitoring the voltage;
as shown in fig. 3, further, the specific steps of the power detection method are: and independently supplying power and signals to the amplifying module, so that the amplifying module can output power in an off-line mode, reading the output power of the amplifying module through a Sensor and a Meter, and checking whether the amplifying module can output full power.
The output power of the module using the Sensor and Meter detection method is an important index for directly detecting the output performance of the amplification module, and can help engineers to quickly judge the performance of the amplification module.
The advantages are that:
1. and the abstract waveform is imaged, so that the problem can be analyzed visually.
2. The acquired signal parameters can effectively analyze waveform characteristics, comprehensively know signal composition and can be directly compared with a standard value.
As shown in fig. 4, further, the power supply detection method includes the specific steps of: the control module is independently powered, and the control panel module can be visually judged by checking the power supply voltage and current conditions. When the control panel supplies power, the power supply pins of each chip on the control panel are checked to assist in detecting the damage condition of the chip.
The advantages are that:
the method is simple and easy to operate, and the detection result is visual;
a certain proportion of faults on the control panel can be eliminated.
Sensor part
As shown in FIG. 5, S parameter network analyzer test method
Working procedure
The S network parameter analyzer is used for measuring four parameters S11, S12, S21 and S22 of a Sensor, and assuming that a port 1 is a signal input port and a port 2 is a signal output port, S11 represents return loss, namely how much energy is reflected back to a source end, the smaller the value is, the better the value is, S21 represents insertion loss, namely how much energy is transmitted to a destination end, the larger the value is, the better the value is, the ideal value is 1, namely 0dB, and the larger the transmission efficiency is. Whether the transmission performance of the Sensor is in a standard range can be seen by analyzing the S parameter.
The advantages are that:
the transmission characteristics of the feedback Sensor in the corresponding frequency band can be visualized.
The equipment operation is simple and easy, and the data is reliable and effective.
Complete machine testing
As shown in FIG. 6, 1, Linear test method
Working procedure
A Sensor is connected between a radio frequency power supply and a load in series, a third party monitors the output condition of the radio frequency power supply under different power settings, the output linearity of the actual power of the radio frequency power supply is detected, the actual output is ensured to be consistent with the power setting, and the power supply feeds back three times.
Advantages of the invention
The operation is simple and convenient and fast;
the power display is visual, and the output power of the radio frequency power supply is effectively monitored;
FIG. 7, 2, reflection test method
Working procedure
The purpose that impedance of a radio frequency power supply cannot be completely matched when power is transmitted to a radio frequency load is achieved by serially connecting a DDL between the radio frequency power supply and the radio frequency load, and when the impedance of the radio frequency power supply cannot be completely matched when the power is transmitted to the radio frequency load, part of radio frequency power cannot be transmitted to the load and is reflected back to the power supply in the form of reflected waves.
The advantages are that:
the impedance perfect matching can not be realized when the client uses the device, and the transmission test can better simulate the use condition of the client on site;
proper reflection of the radio frequency power supply is continuously tested, so that the stability of the radio frequency power supply under a severe working condition can be verified, and some problems which are not easy to perceive can be exposed.
FIG. 8, 3, Chamber test method
Working procedure
The DDL is connected to the output of the radio frequency power supply and then connected to the cavity, so that the test method is a test method for further simulating the field use of a client, a simple radio frequency load is replaced by the cavity with a complicated and changeable internal environment, and the actual condition of the radio frequency power supply in the production process is better met.
The advantages are that:
the practical situation of the use of the radio frequency power supply is better met;
the impedance matching capability of the radio frequency power supply under a complex and changeable load environment can be verified;
the problem which cannot be found under some common test environments can be solved;
FIG. 9, 4, frequency test method
Working procedure
The frequency spectrum instrument test is to sample and analyze frequency waves output by a radio frequency power supply, each frequency component in the waveform is mainly analyzed, perfect radio frequency outputs a frequency wave which is needed by people, certain clutter is often generated in a complex circuit, and the frequency spectrum instrument can visually display the waveforms with certain frequencies in the measured waveform.
The advantages are that:
1. the test result is visual and accurate, the measured waveform frequency is an important parameter of the output signal, and the output power can be rapidly judged whether the output power is abnormal;
2. the operation method is simple and convenient.
Therefore, the invention improves the process efficiency and has relatively simple operation.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A detection method of a radio frequency power supply is characterized by comprising the following steps:
1) firstly, dividing a radio frequency power supply into five modules, namely a power supply module, an amplification module, a control module, a Sensor module and a complete machine test module;
2) then starting an amplification module to carry out an independent test step, and entering the step 3 after the test is qualified; otherwise, replacing the amplifying module according to the test result; and re-entering the step 2;
3) then starting an independent test step of the control module; after the test is qualified, entering the step 4; otherwise, replacing the control module according to the test result; and re-entering the step 3;
4) then starting an independent test step of the Sensor module; after the test is qualified, entering the step 5; otherwise, replacing the Sensor module according to the test result; and re-entering the step 4;
5) then starting a complete machine test module for independent test; after the test is qualified, entering the step 6; otherwise, adjusting and repairing according to the test result; and re-entering the step 5;
6) and (5) successfully testing and packaging.
2. The method of claim 1, wherein the amplifying module alone test in step 2 uses a waveform detection method or a power detection method, and the control module alone test in step 3 uses a power detection method.
3. The method according to claim 1, wherein the Sensor module alone test in step 4 is performed by an S-parameter network analyzer test method.
4. The method as claimed in claim 1, wherein the individual testing of the complete machine testing module in step 5 is performed by a linear testing method, a reflection testing method, a cavity testing method or a frequency testing method.
5. The method as claimed in claim 2, wherein the waveform detection method comprises the following steps: the amplification module is independently powered and provided with signals, so that the amplification module can output power in an off-line mode, the radio frequency amplification module outputs waves with higher frequency, and the oscilloscope samples the waves at an output point to acquire an imaged display high-frequency wave signal.
6. The method for detecting the radio frequency power supply according to claim 2, wherein the power detection method comprises the following specific steps: and independently supplying power and signals to the amplifying module, so that the amplifying module can output power in an off-line mode, reading the output power of the amplifying module through a Sensor and a Meter, and checking whether the amplifying module can output full power.
7. The method for detecting the radio frequency power supply according to claim 2, wherein the power supply detection method comprises the following specific steps: the control module is independently powered, and the control panel module can be visually judged by checking the power supply voltage and current conditions.
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| CN109886438A (en) * | 2019-03-17 | 2019-06-14 | 江苏神州半导体科技有限公司 | A kind of maintenance conditions method of radio-frequency power supply |
| CN117639281B (en) * | 2024-01-26 | 2024-03-29 | 江苏神州半导体科技有限公司 | On-load monitoring protection method and system for radio frequency power supply |
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