CN109975722A - A kind of detection method of radio-frequency power supply - Google Patents
A kind of detection method of radio-frequency power supply Download PDFInfo
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- CN109975722A CN109975722A CN201910200851.3A CN201910200851A CN109975722A CN 109975722 A CN109975722 A CN 109975722A CN 201910200851 A CN201910200851 A CN 201910200851A CN 109975722 A CN109975722 A CN 109975722A
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- power supply
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/40—Testing power supplies
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Abstract
The invention discloses a kind of detection methods of radio-frequency power supply, specifically includes the following steps: radio-frequency power supply first 1) is divided into power supply module, amplification module, control module, Sensor module and system test module this 5 modules；2) the then starting independent testing procedure of amplification module, after test passes, enters step 3；Otherwise, amplification module is replaced according to test result；And 2 are entered step again；3) then start the independent testing procedure of control module；After test passes, 4 are entered step；Otherwise, control module is replaced according to test result；And 3 are entered step again；4) then start the independent testing procedure of Sensor module；After test passes, 5 are entered step；Otherwise, Sensor module is replaced according to test result；And 4 are entered step again；5) then start the independent testing procedure of system test module；After test passes, 6 are entered step；Otherwise, adjusting is carried out according to test result；And 5 are entered step again；6) it is successfully tested, is packed.The present invention improves working efficiency.
Description
Technical field
The present invention relates to a kind of technical field of delivery detection method, especially a kind of detection method of radio-frequency power supply.
Background technique
Radio-frequency power supply is the mating power supply of plasma, it is by radio frequency power source, impedance matching box and impedance power meter
Composition is 80 year latter stage high-tech area emerging in China, is applied to radio-frequency sputtering, PECVD chemical vapor deposition, instead
It answers in the equipment such as ion etching.Modern radio-frequency power supply has tremendous development, by the eighties electron tube power supply step by step
Develop into present transistor radio-frequency power supply, power by watt, hectowatt, kilowatt, to megawatt, frequency has 2Mhz/13.56Mhz/
27.12Mhz/40.68Mhz etc., and apply and also expand to other field, semiconductor, beauty etc. from pervious Vacuum Field.With
The quality of the continuous development of radio-frequency power supply, radio-frequency power supply directly affects the power supply performance of other equipment, therefore in radio-frequency power supply
It needs integrally to detect radio-frequency power supply when factory, but current detecting step is complicated, and working efficiency is low.
Summary of the invention
A kind of radio frequency improving detection efficiency is provided the purpose of the present invention is to solve above-mentioned the deficiencies in the prior art
The maintenance conditions method of power supply.
To achieve the goals above, the detection method of a kind of radio-frequency power supply designed by the present invention, specifically includes following step
It is rapid:
1) radio-frequency power supply is first divided into power supply module, amplification module, control module, Sensor module and system test module
This 5 modules；
2) the then starting independent testing procedure of amplification module, after test passes, enters step 3；Otherwise, it is replaced according to test result
Amplification module；And 2 are entered step again；
3) then start the independent testing procedure of control module；After test passes, 4 are entered step；Otherwise, more according to test result
Change control module；And 3 are entered step again；
4) then start the independent testing procedure of Sensor module；After test passes, 5 are entered step；Otherwise, according to test result
Replace Sensor module；And 4 are entered step again；
5) then start the independent testing procedure of system test module；After test passes, 6 are entered step；Otherwise, according to test result
Carry out adjusting；And 5 are entered step again；
6) it is successfully tested, is packed.
Further, the power supply module individually test using voltage detection method or with load method of testing in step 2.
Further, the amplification module individually test using detection method of powering in step 3.
Further, the Sensor module individually test and uses wave detection or power detection method in step 4.
Further, the system test module individually test use linear method of testing or reflection measurement method in steps of 5
Or cavity method of testing or frequency test method.
Further, the voltage detection method comprises the concrete steps that: each using the voltage gear test power supply module of multimeter
Then the output voltage on road intuitively checks situation of the power supply module with the presence or absence of voltage without output or voltage output deficiency.
Further, the band carries comprising the concrete steps that for method of testing, according to Ohm's law: electric current=voltage ÷ resistance, and combines
The nominal current value of various power supplys and the output voltage of power supply flexibly set different load resistance values, so that power supply is specified full
It works under power, and continues voltage swing when full power exports with multimeter monitoring power supply.
Further, the wave detection comprises the concrete steps that: to amplification module carry out it is independently-powered, for signal so that
Amplification module is able to carry out power output in disconnection mode, and RF Amplifier Module output is the higher wave of frequency, by showing
Wave device is sampled to obtain the displaying high frequency waves signal of image conversion in output point.
Further, the power detection method comprises the concrete steps that: to amplification module carry out it is independently-powered, for signal so that
Amplification module is able to carry out power output in disconnection mode, and the output power of amplification module is read by Sensor and Meter,
Check whether amplification module being capable of full power output.
Further, the power supply detection method comprises the concrete steps that: control plate module is carried out it is independently-powered, by checking confession
Piezoelectric voltage and current conditions can intuitively judge control plate module.
A kind of detection method for radio-frequency power supply that the present invention obtains improves process efficiency, and operates relatively easy.
Detailed description of the invention
Fig. 1 is a kind of flow diagram of the detection method of radio-frequency power supply in embodiment 1；
Fig. 2 is the block schematic illustration of voltage detecting method in embodiment 1；
Fig. 3 is the block schematic illustration of voltage detecting method in embodiment 1；
Fig. 4 is in embodiment 1 with the block schematic illustration for carrying method of testing；
Fig. 5 is the block schematic illustration of power detection method in embodiment 1；
Fig. 6 is the block schematic illustration of power supply detection method in embodiment 1；
Fig. 7 is the block schematic illustration of s Parameter analysis method in embodiment 1；
Fig. 8 is linear method of testing block schematic illustration in embodiment 1；
Fig. 9 is the block schematic illustration of reflection measurement method in embodiment 1；
Figure 10 is the block schematic illustration of cavity method of testing in embodiment 1；
Figure 11 is the block schematic illustration of frequency test method in embodiment 1.
Specific embodiment
Innovation and creation are described further below with reference to embodiment.
Embodiment 1:
As shown in Figure 1, a kind of detection method of radio-frequency power supply provided in this embodiment, specifically includes the following steps:
1) radio-frequency power supply is first divided into power supply module, amplification module, control module, Sensor module and system test module
This 5 modules；
2) the then starting independent testing procedure of amplification module, after test passes, enters step 3；Otherwise, it is replaced according to test result
Amplification module；And 2 are entered step again；
3) then start the independent testing procedure of control module；After test passes, 4 are entered step；Otherwise, more according to test result
Change control module；And 3 are entered step again；
4) then start the independent testing procedure of Sensor module；After test passes, 5 are entered step；Otherwise, according to test result
Replace Sensor module；And 4 are entered step again；
5) then start the independent testing procedure of system test module；After test passes, 6 are entered step；Otherwise, according to test result
Carry out adjusting；And 5 are entered step again；
6) it is successfully tested, is packed.
Further, the power supply module individually test using voltage detection method or with load method of testing in step 2.
Further, the amplification module individually test using detection method of powering in step 3.
Further, the Sensor module individually test and uses wave detection or power detection method in step 4.
Further, the system test module individually test use linear method of testing or reflection measurement method in steps of 5
Or cavity method of testing or frequency test method.
As shown in Fig. 2, further, the voltage detection method comprises the concrete steps that: being tested using the voltage gear of multimeter
The output voltage on each road of power supply module, then intuitively check power supply module with the presence or absence of voltage without output or voltage output not
The situation of foot.
Advantage
It is independent that method module is tested, it being capable of the individually detection amplification in the case where other modules of radio-frequency power supply are not involved in
The power output performance of module, in module itself, there are being capable of quick lock in fault point when failure
As shown in figure 3, further, the band carries comprising the concrete steps that for method of testing, according to Ohm's law: electric current=voltage ÷ resistance,
And the nominal current value of various power supplys and the output voltage of power supply are combined, different load resistance values is flexibly set, so that power supply exists
It works under rated full power, and continues the stability of voltage swing when full power exports with multimeter monitoring power supply, with verifying
The load capacity of power module.
Advantage
Operation is simple
Intuitive measurement results and the quality that can directly reflect power supply module.
As shown in figure 4, further, the wave detection comprises the concrete steps that: carrying out independently-powered, confession to amplification module
Signal, so that amplification module is able to carry out power output in disconnection mode, RF Amplifier Module output is that frequency is higher
Wave is sampled by oscillograph in output point to obtain the displaying high frequency waves signal of image conversion.
Advantage:
The load capacity of power module can highly reliably be verified；
Test result can be intuitively shown by monitoring voltage；
As shown in figure 5, further, the power detection method comprises the concrete steps that: to amplification module carry out it is independently-powered, for letter
Number, so that amplification module is able to carry out power output in disconnection mode, the defeated of amplification module is read by Sensor and Meter
Power out checks whether amplification module being capable of full power output.
The output power that detection method module is gone using Sensor&Meter is Direct Test amplification module output performance
Important indicator can help engineer quickly to judge amplification module performance.
Advantage:
1. abstract waveform image is convenient for intuitive problem analysis.
2. the signal parameter of acquisition can effectively analyze waveform characteristic, comprehensive to understand signal composition, with standard value
It can be direct after comparing.
As shown in fig. 6, further, the power supply detection method comprises the concrete steps that: it is independently-powered to control plate module progress,
By checking that supply voltage and current conditions can intuitively judge control plate module.In control panel power supply, to control
The power supply foot of each chip, which carries out an inspection, in making sheet can also assist the damaged condition of detection chip.
Advantage:
Simple to operation, testing result is intuitive；
It can exclude a certain proportion of failure on control panel.
The part Sensor
As shown in fig. 7, S parameter Network Analyzer method of testing
Work step
Measurement Sensor tetra- parameters S11, S12, S21, S22 are removed by S network parameter analyzer, it is assumed that port 1 is that signal is defeated
Inbound port, port 2 are signal output port, then S11 indicates that return loss, that is, how many energy are reflected back toward source,
This value is the smaller the better, and S21 indicates insertion loss, that is, how many energy is transferred to destination, this value it is more big more
Good, ideal value is 1, i.e. 0dB, and the efficiency of bigger transmission is higher.It can be seen that the transmission of Sensor by carrying out analysis to S parameter
Whether performance is in critical field.
Advantage:
Transmission characteristic of the feedback Sensor that can be embodied in corresponding frequency band.
Equipment operation is simple, and data are reliably effective.
System test
As shown in figure 8,1, linear method of testing
Work step
By sealing in a Sensor between radio-frequency power supply and load, monitoring radio-frequency power supply is gone to set in different capacity by third party
The output situation fixed, the output for detecting radio-frequency power supply actual power is linear, guarantees reality output and power settings, power supply itself
Feedback three is consistent.
Advantage
Operation is simple, easy to use；
Power intuitive display effectively monitors the output power of radio-frequency power supply；
As shown in figure 9,2, reflection measurement method
Work step
We are negative to radio frequency in power transmission to reach radio-frequency power supply by sealing in DDL between radio-frequency power supply and rf load
The purpose that impedance cannot exactly match when load, in such happen, radio-frequency power have part can not be transmitted to load and
It is that power supply is reflected back in the form of back wave.
Advantage:
Client can not also accomplish impedance perfect matching when in use, transmitting test can more preferable simulation curstomer's site use feelings
Condition；
It is appropriate to radio-frequency power supply reflected carry out follow-on test can verify radio-frequency power supply compared with the stabilization under bad working environments
Property, some not noticeable problems can be exposed.
As shown in Figure 10,3, cavity method of testing
Work step
DDL is accessed in the output of radio-frequency power supply, then cavity is accessed by DDL, is the test side that further simulation curstomer's site uses
Method replaces simple rf load with internal environment cavity complicated and changeable, and be more in line with radio-frequency power supply makes in process of production
Actual conditions.
Advantage:
It is more in line with the actual conditions that radio-frequency power supply uses；
It is able to verify that impedance matching capability of the radio-frequency power supply under load environment complicated and changeable；
It can help the problem of can not realizing under group some common test environment of exposure；
As shown in figure 11,4, frequency test method
Work step
Frequency spectrograph test is to carry out sampling analysis to the frequency wave of radio-frequency power supply output, in Main Analysis waveform each frequency at
Point, the output of perfect radio frequency should a kind of our frequency waves for needing, but often generated in complicated circuit certain
Clutter, frequency spectrograph can intuitively show the waveform for having which kind frequency in surveyed waveform.
Advantage:
1. test result is intuitively accurate, measured waveform frequency is the important parameter of output signal, can help us rapidly
Judge whether output power is abnormal；
2. operating method is simple, convenient.
Therefore process efficiency is improved through the invention, and is operated relatively easy.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from spirit of the invention or
In the case where essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention
It is interior.Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, it is possible to understand that
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where not departing from the principle and spirit of the invention,
The scope of the present invention is defined by the appended.
Claims (10)
1. a kind of detection method of radio-frequency power supply, which is characterized in that specifically includes the following steps:
1) radio-frequency power supply is first divided into power supply module, amplification module, control module, Sensor module and system test module
This 5 modules；
2) the then starting independent testing procedure of amplification module, after test passes, enters step 3；Otherwise, it is replaced according to test result
Amplification module；And 2 are entered step again；
3) then start the independent testing procedure of control module；After test passes, 4 are entered step；Otherwise, more according to test result
Change control module；And 3 are entered step again；
4) then start the independent testing procedure of Sensor module；After test passes, 5 are entered step；Otherwise, according to test result
Replace Sensor module；And 4 are entered step again；
5) then start the independent testing procedure of system test module；After test passes, 6 are entered step；Otherwise, according to test result
Carry out adjusting；And 5 are entered step again；
6) it is successfully tested, is packed.
2. a kind of detection method of radio-frequency power supply according to claim 1, which is characterized in that the confession in step 2
Electric module is individually tested using voltage detection method or with load method of testing.
3. a kind of detection method of radio-frequency power supply according to claim 1, which is characterized in that putting described in step 3
Big module is individually tested using power supply detection method.
4. a kind of detection method of radio-frequency power supply according to claim 1, which is characterized in that described in step 4
Sensor module is individually tested using wave detection or power detection method.
5. a kind of detection method of radio-frequency power supply according to claim 1, which is characterized in that whole described in steps of 5
Machine test module is individually tested using linear method of testing or reflection measurement method or cavity method of testing or frequency test method.
6. a kind of detection method of radio-frequency power supply according to claim 2, which is characterized in that the voltage detection method
It comprises the concrete steps that: using the output voltage on voltage gear test each road of power supply module of multimeter, then intuitively checking power supply mould
Situation of the block with the presence or absence of voltage without output or voltage output deficiency.
7. a kind of detection method of radio-frequency power supply according to claim 2, which is characterized in that the band carries the tool of method of testing
Body step is, according to Ohm's law: electric current=voltage ÷ resistance, and combines the output of the nominal current value and power supply of various power supplys
Voltage flexibly sets different load resistance values, so that power supply works under rated full power, and is continued with multimeter monitoring power supply
Voltage swing when full power exports.
8. a kind of detection method of radio-frequency power supply according to claim 4, which is characterized in that the tool of the wave detection
Body step is: to amplification module carry out it is independently-powered, for signal so as to be able to carry out power in disconnection mode defeated for amplification module
Out, RF Amplifier Module output is the higher wave of frequency, is sampled by oscillograph in output point to obtain image conversion
Show high frequency waves signal.
9. a kind of detection method of radio-frequency power supply according to claim 4, which is characterized in that the tool of the power detection method
Body step is: to amplification module carry out it is independently-powered, for signal so as to be able to carry out power in disconnection mode defeated for amplification module
Out, the output power that amplification module is read by Sensor and Meter checks whether amplification module being capable of full power output.
10. a kind of detection method of radio-frequency power supply according to claim 3, which is characterized in that the power supply detection method
It comprises the concrete steps that: it is independently-powered to control plate module progress, by checking that supply voltage and current conditions can be to control template dies
Block is intuitively judged.
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| CN109886438A (en) * | 2019-03-17 | 2019-06-14 | 江苏神州半导体科技有限公司 | A kind of maintenance conditions method of radio-frequency power supply |
| CN117639281A (en) * | 2024-01-26 | 2024-03-01 | 江苏神州半导体科技有限公司 | On-load monitoring protection method and system for radio frequency power supply |
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