CN108107376B - radio frequency power supply testing system and method based on plasma environment - Google Patents
radio frequency power supply testing system and method based on plasma environment Download PDFInfo
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- CN108107376B CN108107376B CN201711443387.8A CN201711443387A CN108107376B CN 108107376 B CN108107376 B CN 108107376B CN 201711443387 A CN201711443387 A CN 201711443387A CN 108107376 B CN108107376 B CN 108107376B
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- radio frequency
- frequency power
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/40—Testing power supplies
Abstract
the invention relates to a radio frequency power supply testing system and a testing method based on a plasma environment. The radio frequency power supply testing system based on the plasma environment can establish the plasma environment similar to the client site condition and simulate the client site impedance point based on the plasma environment; the radio frequency power supply testing method based on the plasma environment can verify the working performance and reliability of the radio frequency power supply in the plasma environment and collect related data by simulating a plurality of impedance points, can accurately verify the reliability of the power supply, clarifies the fault of the power supply, and can well meet the requirements of practical application.
Description
Technical Field
the invention belongs to the technical field of radio frequency power supply testing, and particularly relates to a radio frequency power supply testing system and a radio frequency power supply testing method based on a plasma environment.
Background
In the rf power service industry, there are two common systems for testing rf power at present: one is to directly connect the radio frequency power supply to a fixed dummy load for testing, and the system has the defects that the impedance is fixed, only the general performance and basic parameters of the radio frequency power supply can be tested, and the performance and the parameters of the power supply when used in a client field cannot be reflected; another is as shown in fig. 1, the radio frequency power supply, the matcher, the dynamic load simulator and the fixed dummy load are connected in sequence for testing, and the system can adjust impedance, reflect the performance and parameters of the power supply when used on the spot of a customer to a certain extent, and provide certain help for the transverse comparison test of the performance of the power supply, but after all, the impedance is greatly different from that of the power supply in the plasma environment on the spot of the customer, and the reliability of the power supply and the referential performance of data are still difficult to guarantee.
Disclosure of Invention
In view of the above problems in the prior art, an object of the present invention is to provide a plasma environment-based rf power testing system and a testing method, which can avoid the above technical defects, so as to establish a plasma environment similar to the customer site conditions, simulate the impedance points of the customer site based on the plasma environment, establish an rf power testing system, verify the performance and reliability of the rf power in the plasma environment by simulating a plurality of impedance points, and collect related data.
In order to achieve the above object, the present invention provides the following technical solutions:
a radio frequency power supply testing system based on a plasma environment comprises a matcher, a dynamic load simulator and plasma environment simulation equipment which are sequentially connected.
further, the plasma environment simulation equipment comprises a cavity, a vacuum pump, an ice water machine, a control cabinet and a gas cylinder, wherein the control cabinet, the gas cylinder and the cavity are sequentially connected; the control cabinet, the vacuum pump and the cavity are sequentially connected; the control cabinet, the water chiller and the cavity are sequentially connected; the control cabinet is directly connected with the cavity; the dynamic load simulator is connected with the cavity.
further, the cavity is an inductance cavity or a capacitance cavity.
A radio frequency power supply testing method based on a plasma environment comprises the following steps:
Step 1) vacuumizing a cavity to reach a standard vacuum degree;
step 2) filling experimental gas into the cavity to determine the gas flow;
Step 3) turning on a radio frequency power supply to output proper power, enabling a matcher to be in an automatic mode, and manually adjusting a dynamic load simulator to enable a cavity to be ignited to generate plasma;
And 4) after starting, continuously adjusting the dynamic load simulator to adjust a plurality of impedance points and/or change the flow of gas to change the impedance environment, and then collecting data.
Further, the step 1) is as follows: and vacuumizing the cavity by using a vacuum pump to reach the standard vacuum degree.
further, the step 2) is as follows: and filling experimental gas into the cavity by using the gas cylinder to determine the gas flow.
The radio frequency power supply testing system based on the plasma environment can establish the plasma environment similar to the client site condition and simulate the client site impedance point based on the plasma environment; the radio frequency power supply testing method based on the plasma environment can verify the working performance and reliability of the radio frequency power supply in the plasma environment and collect related data by simulating a plurality of impedance points, can accurately verify the reliability of the power supply, clarifies the fault of the power supply, and can well meet the requirements of practical application.
drawings
FIG. 1 is a block diagram of a prior art RF power source test system;
FIG. 2 is a block diagram of an RF power source testing system based on a plasma environment according to the present invention;
FIG. 3 is a block diagram of a plasma environment simulation apparatus;
Fig. 4 is a schematic structural view of the chamber.
Detailed Description
in order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 2, a radio frequency power source testing system based on a plasma environment includes a matcher, a dynamic load simulator and a plasma environment simulation device, which are connected in sequence, wherein the plasma environment simulation device is a necessary condition for generating plasma; as shown in fig. 3, the plasma environment simulation device comprises a cavity, a vacuum pump, an ice water machine, a control cabinet and a gas cylinder, wherein the control cabinet, the gas cylinder and the cavity are connected in sequence; the control cabinet, the vacuum pump and the cavity are sequentially connected; the control cabinet, the water chiller and the cavity are sequentially connected; the control cabinet is directly connected with the cavity. The dynamic load simulator is connected with the cavity. The power output by the radio frequency power supply firstly enters the matcher, then passes through the dynamic load simulator and finally is input into the cavity. The structure of the cavity is shown in fig. 4. The cavity may be an inductive cavity or a capacitive cavity.
The matcher is mainly used on a transmission line to achieve the purpose that all radio frequency signals can be transmitted to a load point, and no signal is reflected back to a source point, so that energy benefit is improved.
The dynamic load simulator is an adjustable load simulator and is matched with the cavity for use to make up for the difference between the dynamic load simulator and the cavity used by a client, so that an impedance environment similar to or even consistent with the field of the client is simulated.
The radio frequency power supply testing system can test parameters, performance and reliability of the power supply under different power and different impedance environments.
A radio frequency power supply testing method based on a plasma environment comprises the following steps:
1) vacuumizing the cavity by using a vacuum pump to reach the standard vacuum degree;
2) filling experimental gas into the cavity by using a gas cylinder to determine the gas flow;
3) Turning on a radio frequency power supply to output proper power, enabling a matcher to be in an automatic mode, and manually adjusting a dynamic load simulator to enable a cavity to be ignited to generate plasma;
if the adjustment range of the dynamic load simulator is not enough, the plasma cannot be generated and cannot be started, and the dynamic load simulator needs to be modified until the plasma can meet the requirements, so that the plasma can be generated by starting the cavity;
4) After the lighting, the dynamic load simulator is continuously adjusted to adjust a plurality of impedance points and/or change the flow of gas to change the impedance environment, and at the moment, relevant data can be collected, and a measuring table can be solidified for transverse comparison.
In order to verify the effectiveness of the method, experiments are carried out, the automatic matching conditions of two radio frequency power supplies of the same type at a certain impedance point in a plasma environment are transversely compared, and the experiments are as follows:
Power supply No. 1: obtaining good products; power supply No. 2: if not, the client feeds back that the reflected power is large; the prior art mentioned in the background technology is used for testing, and no difference is found;
The test by using the system comprises the following steps:
1) firstly, installing a No. 1 power supply (good product), and filling experimental gas after the cavity is vacuumized to reach the standard vacuum degree, wherein the gas flow is set as P1;
2) turning on a radio frequency power supply to output power A, enabling a matcher to be in an automatic mode, and manually adjusting a dynamic load simulator to enable a cavity to be ignited to generate plasma;
3) Continuing to adjust the dynamic load simulator to reduce the reflected power RP1 to be within the standard range;
4) the radio frequency power supply outputs B power, and the final reflection power value RP2 of the power supply after automatic matching is recorded;
5) And (4) replacing the No. 1 power supply with the No. 2 power supply, keeping the others unchanged, outputting the reflected power RP3 after the A power record is matched, and outputting the reflected power RP4 after the B power record is matched.
as a result: both RP1 and RP3 were within the standard range for a power and RP2 was within the standard range for B power, but RP4 was far outside the standard range, indicating that the power supply may be problematic, that the fault point was found and tested again after removal after inspection, and that the reflected power values were within the standard range, indicating the effectiveness of the system and method.
the radio frequency power supply testing system based on the plasma environment can establish the plasma environment similar to the client site condition and simulate the client site impedance point based on the plasma environment; the radio frequency power supply testing method based on the plasma environment can verify the working performance and reliability of the radio frequency power supply in the plasma environment and collect related data by simulating a plurality of impedance points, can accurately verify the reliability of the power supply, clarifies the fault of the power supply, and can well meet the requirements of practical application.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (4)
1. a radio frequency power supply test system based on plasma environment realizes the test method of the radio frequency power supply, characterized by that, the said radio frequency power supply test system includes matcher, dynamic load simulator and plasma environment analog device connected sequentially; the plasma environment simulation equipment comprises a cavity, a vacuum pump, an ice water machine, a control cabinet and a gas cylinder, wherein the control cabinet, the gas cylinder and the cavity are sequentially connected; the control cabinet, the vacuum pump and the cavity are sequentially connected; the control cabinet, the water chiller and the cavity are sequentially connected; the control cabinet is directly connected with the cavity; the dynamic load simulator is connected with the cavity;
The test method comprises the following steps:
step 1) vacuumizing a cavity to reach a standard vacuum degree;
step 2) filling experimental gas into the cavity to determine the gas flow;
Step 3) turning on a radio frequency power supply to output proper power, enabling a matcher to be in an automatic mode, and manually adjusting a dynamic load simulator to enable a cavity to be ignited to generate plasma;
And 4) after starting, continuously adjusting the dynamic load simulator to adjust a plurality of impedance points and/or change the flow of gas to change the impedance environment, and then collecting data.
2. the test method according to claim 1, wherein the step 1 is: and vacuumizing the cavity by using a vacuum pump to reach the standard vacuum degree.
3. The test method according to claim 1, wherein the step 2 is: and filling experimental gas into the cavity by using the gas cylinder to determine the gas flow.
4. the testing method of claim 1, wherein the cavity is an inductive cavity or a capacitive cavity.
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| CN109975722B (en) * | 2019-03-17 | 2021-09-14 | 江苏神州半导体科技有限公司 | Detection method of radio frequency power supply |
| CN111397810A (en) * | 2020-04-28 | 2020-07-10 | 江苏神州半导体科技有限公司 | Gas leakage detection method for RPS gas dissociation |
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