CN108089771A - Touch base plate, display panel, display device - Google Patents
Touch base plate, display panel, display device Download PDFInfo
- Publication number
- CN108089771A CN108089771A CN201810150528.5A CN201810150528A CN108089771A CN 108089771 A CN108089771 A CN 108089771A CN 201810150528 A CN201810150528 A CN 201810150528A CN 108089771 A CN108089771 A CN 108089771A
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- China
- Prior art keywords
- layer
- blackening
- conductive layer
- electrode layer
- base plate
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Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
Abstract
The present invention provides a kind of touch base plates, including electrode layer, the electrode layer includes conductive layer and the blackening layer positioned at the conductive layer one side, and the blackening layer is used to absorb light, light is avoided to be incident to the conductive layer from blackening layer one side, the material of the conductive layer includes copper.Copper product is relatively low with higher electric conductivity and its opposite purchasing price, and the resistivity of copper product is relatively low.Copper product can be greatly lowered to the resistance of touch screen electrode layer applied to 65 cun or more capacitive touch screens, and then meet requirement of 65 cun or more the capacitive touch screens to electrode layer low square resistance, while blackening layer can increase in electrode layer to the shadow effect that disappears of copper product.
Description
Technical field
The present invention relates to touch-control, display technology field, specifically, the present invention relates to a kind of touch base plate, display panel,
Display device.
Background technology
Touch-screen is as a kind of intelligentized human-computer interaction interface product, in social production and application range in life
It is more and more extensive, it is especially with the fastest developing speed in electronics field (such as smart mobile phone, tablet computer field).Touch-screen
Technology species is various, mainly including resistance-type, condenser type, infrared type, table sound wave type etc..Capacitive touch screen is mainly characterized by instead
It should sensitive, support multi-point touch, long lifespan.Since IC technologies have become mainstream technology currently on the market, but drive IC's
Limitation so that large size capacitive touch screen (>=55 cun) requires very high, the user of existing touch-screen to the sheet resistance of electrode layer
Case can not correspond to, and in order to reduce the square of electrode layer, electrode layer in existing touch screen structure is mainly using metal material, so
And 65 cun or more metal pattern schemes are to the square resistance requirement higher (RS≤0.05 Ω/) of metal electrode layer, it is therefore desirable to
Further reduce the resistivity of metal layer material.
The content of the invention
The purpose of the present invention is intended at least solve one of above-mentioned technological deficiency, and particularly large scale touch-screen square resistance is big
The problem of.
The present invention provides a kind of touch base plates, and including electrode layer, the electrode layer includes conductive layer and positioned at described
The blackening layer of conductive layer one side, the blackening layer avoid light from being incident to the conduction from blackening layer one side for absorbing light
Layer, the material of the conductive layer include copper.
Further, the electrode layer further includes the bonding layer between the conductive layer and the blackening layer.
Further, the electrode layer further includes the first protection positioned at the conductive layer one side and away from the blackening layer
Layer.
Preferably, the thickness of the conductive layer is greater than or equal toAnd two the square resistance of the electrode layer be less than
Or equal to 0.055 Ω/.
Preferably, the material of the blackening layer includes MoNbOx.
Preferably, the material of the bonding layer includes CuOx.
Preferably, the material of first protective layer includes CuNi.
Further, the insulating layer including two electrode layers, between two electrode layers and positioned at an electrode
Second protective layer of the layer away from the insulating layer one side, the electrode layer has mesh shape.
The present invention also provides a kind of display panel, including the electrode layer described in any technical solution.
A kind of display device, including the display panel.
Compared with prior art, the invention has the advantages that:
1st, a kind of touch base plate provided in an embodiment of the present invention, including electrode layer, the electrode layer include conductive layer and
Blackening layer positioned at the conductive layer one side, the blackening layer avoid light from being incident to from blackening layer one side for absorbing light
The conductive layer, the material of the conductive layer include copper.In disclosed embodiments, the preferred pure copper material of conductive layer.
In industrial production application, pure Cu materials are relatively low with higher electric conductivity and its opposite purchasing price, pure copper material
Resistivity 1.75 × 10-8Ωm。Pure Cu square resistances can accomplish 0.05 Ω/below,It is pure
Cu square resistances survey 0.017 Ω/,Pure Cu square resistances actual measurement 0.011 Ω/, therefore, by pure copper material
The resistance of touch screen electrode layer can be greatly lowered applied to 65 cun or more capacitive touch screens, and then meet 65 cun to power on
Requirement of the appearance formula touch-screen to electrode layer low square resistance, while blackening layer can increase in electrode layer to the shadow effect that disappears of pure copper material
Fruit.
2nd, a kind of touch base plate provided in an embodiment of the present invention, the electrode layer are further included positioned at the conductive layer and described
Bonding layer between blackening layer.Bonding layer can increase adhesive force of the pure copper material on blackening layer so that the fine copper of conductive layer
On the attachment blackening layer that material can consolidate, the phenomenon that blackening layer and conductive layer is avoided to be layered.
3rd, a kind of touch base plate provided in an embodiment of the present invention, the electrode layer are further included positioned at the conductive layer opposite side
And the first protective layer away from the blackening layer.The protective layer can avoid the pure copper material of conductive layer from being aoxidized, and then avoid
Increase the square resistance of conductive layer.
The additional aspect of the present invention and advantage will be set forth in part in the description, these will become from the following description
It obtains substantially or is recognized by the practice of the present invention.
Description of the drawings
Above-mentioned and/or additional aspect and advantage of the invention will become from the following description of the accompanying drawings of embodiments
Substantially and it is readily appreciated that, wherein:
Fig. 1 is the structure chart of electrode layer in a kind of exemplary embodiments of touch base plate of the present invention;
Fig. 2 is a kind of structure chart of the exemplary embodiments of touch base plate of the present invention;
Fig. 3 is the microstructure enlarged drawing that layer is not engaged in electrode layer, basically illustrates the conduction of blackening layer and fine copper
Laminating degree between layer;
Fig. 4 is to have the microstructure enlarged drawing of bonding layer in electrode layer shown in Fig. 1, basically illustrate blackening layer, bonding layer,
Laminating degree between the conductive layer of fine copper.
Specific embodiment
The embodiment of the present invention is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end
Same or similar label represents same or similar element or has the function of same or like element.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singulative " one " used herein, " one
It is a ", " described " and "the" may also comprise plural form.It is to be further understood that is used in the specification of the present invention arranges
Diction " comprising " refers to there are the feature, integer, step, operation, element and/or component, but it is not excluded that presence or addition
Other one or more features, integer, step, operation, element, component and/or their group.It should be understood that when we claim member
Part is " connected " or during " coupled " to another element, it can be directly connected or coupled to other elements or there may also be
Intermediary element.In addition, " connection " used herein or " coupling " can include wireless connection or wireless coupling.It is used herein to arrange
Take leave whole or any cell and all combination of the "and/or" including one or more associated list items.
Those skilled in the art of the present technique are appreciated that unless otherwise defined all terms used herein are (including technology art
Language and scientific terminology), there is the meaning identical with the general understanding of the those of ordinary skill in fields of the present invention.Should also
Understand, those terms such as defined in the general dictionary, it should be understood that have in the context of the prior art
The consistent meaning of meaning, and unless by specific definitions as here, idealization or the meaning of overly formal otherwise will not be used
To explain.
In this application, display device refers to TV, computer display etc., and the display member including forming image with being referred to as
The housing of part and support display element.As display element, may be exemplified as Plasmia indicating panel (PDP), liquid crystal display
(LCD), electrophoretic display device (EPD), cathode-ray tube (CRT), OLED display etc..In display element, it can set for presentation figure
The rgb pixel pattern and additional filters of picture.It is general with smart mobile phone, tablet PC, IPTV etc. meanwhile on display device
And accelerate, to human hand being become directly inputting equipment in the case of the not individual input equipment (such as keyboard or remote controler)
The demand of touch function gradually increases.Furthermore, it is necessary to multi-touch function and the specified point identification that can be write.In the application
Ω/ represents square resistance, i.e. resistance under unit square, square resistance instructs the electricity on electric material unit thickness unit area
Resistance value, the resistance of the square edge to edge of arbitrary size are the same, no matter the length of side is 1m or 0.1m, their sheet resistance
It is just as so that sheet resistance is only related with the thickness of conductive film and resistivity.
A kind of touch base plate provided in an embodiment of the present invention, including electrode layer, as shown in Figure 1, the electrode layer includes leading
Electric layer 1 and the blackening layer 2 positioned at 1 one side of conductive layer, the blackening layer 2 avoid light from melanism for absorbing light
2 one side away from the conductive layer 1 of layer are incident to the conductive layer 1, and the material of the conductive layer 1 includes copper.It is of the invention preferred
In ground embodiment, the conductive layer 1 is mainly made of pure copper material, and in industrial production application, pure Cu materials have higher
Electric conductivity and its opposite purchasing price is relatively low, the resistivity 1.75 × 10 of pure copper material-8Ωm。Pure Cu squares
Resistance can accomplish 0.05 Ω/below,Pure Cu square resistances actual measurement 0.017 Ω/,Pure Cu
Square resistance surveys 0.011 Ω/, and therefore, pure copper material can significantly be dropped applied to 65 cun or more capacitive touch screens
The resistance of low touch screen electrode layer, and then meet requirement of 65 cun or more the capacitive touch screens to electrode layer low square resistance, and meanwhile it is black
Changing layer 2 can increase in electrode layer to the shadow effect that disappears of pure copper material, due to the unique luster of metal in conductive layer 1, can generate
The visibility problem such as dazzle the eyes as caused by external light source, therefore, it is necessary to be formed and can reduced in the metal surface of conductive layer 1
The extra play of reflection is blackening layer 2.
Preferably, in an embodiment of the present invention, the thickness of the conductive layer 1 is greater than or equal toAnd described in two
The square resistance of electrode layer is less than or equal to 0.055 Ω/, and the material of the blackening layer 2 includes MoNbOx, the blackening layer 2
ThicknessBlackening layer 2 is mainly used for improving conductive layer 1 and disappears the effect of shadow.It is using with more highly conductive
Property metallic film be used as conductive layer 1 in touch screen panel plate electrode in the case of, when application is fine with given shape
During electrode pattern, in terms of visuality caused by high reflectance, due to higher reflectivity, the haze value etc. to exterior light, meeting
Pattern is led to the problem of to be observed and dazzle the eyes well by human eye.Blackening layer 2 refers to incide into gold by absorbing to reduce
Belong to the layer of the amount of the light of layer itself and the amount of the light from metal layer reflection, in this application, blackening layer 2 can be included selected from metal
At least one of oxide, metal nitride and metal oxynitride, but it is without being limited thereto.Conductive layer 1 can be by such as
The method of direct sputtering method, reactive sputtering method, vapor deposition method etc. is formed, but without being limited thereto.In this application, may be used
Individually or simultaneously make 2 patterned process of conductive layer 1 and blackening layer to also comprise.Conductive layer in the embodiment of the present invention
1 uses pure copper material, can significantly reduce the square resistance of electrode layer, and electrode layer provided in an embodiment of the present invention can answer
For being more than or equal to 65 cun or more of touch panel, while blackening layer 2 further improves metal fine in touch panel
The screening performance of pattern electrode and to the reflection of exterior light and diffractive.
Further, the electrode layer further includes the bonding layer 3 between the conductive layer 1 and the blackening layer 2.
In an embodiment of the present invention, bonding layer 3 is additionally provided between the conductive layer 1 and the blackening layer 2, due to conduction
Layer 1 uses pure copper material, however adhesive force of the pure copper material on blackening layer 2 may not be fine, particularly be led in blackening layer 2
When being made of MoNbOx, adhesive force of the pure copper material in MoNbOx is relatively low, in order to enable conductive layer 1 can be firmly attached to
On MoNbOx, increase bonding layer 3 between blackening layer 2 and conductive layer 1.Preferably, the material of the bonding layer 3 is mainly
CuOx, the thickness of the bonding layer
Further, the electrode layer further includes the first guarantor positioned at 1 one side of conductive layer and away from the blackening layer 2
Sheath 4.It is oxidized easily since pure copper material is directly exposed in air, first is set in 1 another layer of the conductive layer
Protective layer 4, first protective layer 4 are mainly made of CuNi, the thickness of first protective layer 4
CuNi alloys form a protective film on the pure copper material of conductive layer 1 so that the pure copper material of conductive layer 1 will not in air
Oxide contacts directly, and then the pure copper material of conductive layer 1 is avoided to be aoxidized, and avoids increasing the resistance of pure copper material.
Further, as shown in Fig. 2, in wherein a kind of embodiment, two electrode layers 10, position are further included on touch base plate
Insulating layer 20 between two electrode layers 10 and positioned at second of an electrode layer 10 away from the insulating layer one side
Protective layer 30, the thickness of the insulating layer 20 are 0.95 μm~2.5 μm, the thickness of second protective layer 30 for 0.95 μm~
2.5μm.The insulating layer 20 is also known as OC1, which is mainly used for completely cutting off electrode layer and thin film transistor (TFT), avoids being powered
When thin film transistor (TFT) turned on electrode layer.Further, second protective layer 30 is located at any one in two electrode layers 10
The one side of a separate insulating layer 20, and the second protective layer 30, simultaneously away from thin film transistor (TFT), which is mainly used for
The metal bridge that protection overlaps between its electrode layer 20 and the electrode layer 20 and thin film transistor (TFT).
It should be noted that as it was noted above, the electrode layer provided in the embodiment of the present invention has mesh shape.
A kind of display panel provided in an embodiment of the present invention, including the electrode layer described in any technical solution.
Embodiment one
Make frame on the cover board, can be black BM (black matrix") or white WM (white photoresist layer),
It can also be other color resins, more preferably, made the frame on the cover board of photolithographicallpatterned.On the cover board with frame
First layer pattern electrodes layer is made, the pattern electrodes layer is using the touch base plate described in foregoing any technical solution.It is specifically, logical
It crosses plated film (sputter)-gluing-exposure-development-etching mode and stacks gradually making blackening layer, bonding layer, conductive layer, first
Protective layer, MoNbOx-CuOx-Cu-CuNi, wherein, when the first protective layer is made by CuNi alloys, the ratio of copper and mickel alloy is
90:10.More preferably, the material of the electrode layer is the MoNbOx-CuOx-Cu-CuNi stacked gradually, MoNbOx film thicknessCuOx film thicknessCu film thickness >CuNi tunics are thickFurther
Ground makes insulating layer on the electrode layer, more preferably, is made insulating layer (OC1) on the electrode layer of photolithographicallpatterned, and absolutely
Edge layer (OC1) film thickness is 1.0~2.0um.Further, second graph electrode layer, production method are made on which insulating layer
Consistent with the production method, condition and structural condition of first layer pattern electrodes layer, this will not be repeated here.In the second image electricity
Protective layer (OC2) is made on the layer of pole, more preferably, is made the second protective layer (OC2) on the electrode layer of photolithographicallpatterned, second
Protective layer (OC2) film thickness is 1.0~2.0um, and then the sensor for the touch-control that completes on the cover board, and is formed tactile for showing
The display structure of control.Specifically, referring to Fig. 3 and Fig. 4, under micro-structure, the first pattern electrodes layer includes what is stacked gradually respectively
Blackening layer 2 (MoNbOx), bonding layer 3 (CuOx), conductive layer 1 (Cu), the first protective layer 4 (CuNi) found by Fig. 3 and Fig. 4,
When being not engaged layer 3, there is larger gap between the conductive layer 1 of fine copper and blackening layer 2, and between blackening layer 2 and substrate 5
Also there is larger gap, and after increasing bonding layer 3, the conductive layer 1 of pure copper material can be close with the bonding layer 3 of CuOx materials
It is combined together, and the gap between the bonding layer 3 of CuOx materials and the blackening layer 2 of MoNbOx materials is equally also smaller, simultaneously
Gap is also smaller between the blackening layer 2 of MoNbOx materials so that the blackening layer 2 of MoNbOx materials can be good at being fitted in substrate
On.Illustrate that bonding layer 3 improves adhesive force of the conductive layer 1 of pure copper material on blackening layer 2 so that the material of entire electrode layer
It closely can firmly fit together, it is not easily to fall off.
Embodiment two
The first pattern electrodes layer is made on common substrate, the pattern electrodes layer is using described in foregoing any technical solution
Touch base plate.Further, the first image electrode layer, insulating layer (OC1), second graph electrode layer, the second protective layer make
Method, process conditions and structural condition are consistent, and this will not be repeated here.The sensor and cover board to complete on this basis
Fitting, and then form to show the display structure of touch-control.Further, substrate is transparent glass substrate or light-passing plastic base
Plate.
Embodiment three
The first pattern electrodes layer is made on ODF (LCD or OLED) substrate, which uses foregoing any technology
Touch base plate described in scheme.Further, the first image electrode layer, insulating layer (OC1), second graph electrode layer, second protect
Sheath production method, process conditions and structural condition are consistent, and this will not be repeated here.It completes to be formed on this basis
MLOC (microstrip line/banding signal wire) element is bonded by MLOC (microstrip line/banding signal wire) element with cover board, and then
It is formed to show the display structure of touch-control.
A kind of display device provided in an embodiment of the present invention, including the display panel described in any technical solution.
Touch base plate production method described in a kind of any technical solution provided in an embodiment of the present invention, which is characterized in that
Applied to the touch base plate described in any technical solution, including:
The blackening layer is formed on substrate;
The conductive layer is formed on the blackening layer, the material of the conductive layer includes copper.
Specifically, as it was noted above, in this application, it can include individually or simultaneously making conductive layer and blackening layer figure
The process of case.In this application, can also include as shown in embodiment one blackening layer and conductive layer are passed sequentially through plated film-
Gluing-exposure-development-etching mode makes blackening layer and conductive layer respectively, i.e., first on substrate by plated film-gluing-exposure-
Development-etching mode produces blackening layer, then passes through plated film-gluing-exposure-development-etching mode on the basis of blackening layer
Produce conductive layer.
Further, electrode layer described in dioxygen water etching two is passed through.
Specifically, before etching, first copper product and/or molybdenum material are aoxidized, after to the copper product after oxidation and/or
Molybdenum material performs etching, H in hydrogen peroxide2O2It is more than 60% with the ratio of water.
Specifically, copper product etching principle is as follows:
Cu+H2O2→CuO+H2O
CuO+2H+→Cu 2++H2O
Specifically, molybdenum material etching principle is as follows:
Mo+3H2O2→H2MoO4+2H2O
H2MoO4+2OH-→MoO4 2-+2H2O
Hydrogen peroxide has corrosivity easy to control, and reduction easily occurs in etching process and oxidation forms Cu 2+With
MoO4 2-, generate H2O will not generate the particle pollution conductive layer and blackening layer of other materials in the process.
The above is only some embodiments of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of touch base plate, which is characterized in that including electrode layer, the electrode layer includes conductive layer and positioned at the conduction
The blackening layer of layer one side, the blackening layer avoid light from entering from one side of the blackening layer away from the conductive layer for absorbing light
The conductive layer is incident upon, the material of the conductive layer includes copper.
2. touch base plate according to claim 1, which is characterized in that the electrode layer is further included positioned at the conductive layer and institute
State the bonding layer between blackening layer.
3. touch base plate according to claim 1, which is characterized in that the electrode layer is further included positioned at the conductive layer one
Side and the first protective layer away from the blackening layer.
4. touch base plate according to claim 1, which is characterized in that the thickness of the conductive layer is greater than or equal toAnd two the electrode layer square resistance be less than or equal to 0.055 Ω/.
5. touch base plate according to claim 1, which is characterized in that the material of the blackening layer includes MoNbOx.
6. touch base plate according to claim 2, which is characterized in that the material of the bonding layer includes CuOx.
7. touch base plate according to claim 3, which is characterized in that the material of first protective layer includes CuNi.
8. according to the touch base plate described in claim 1 to 7 any one, which is characterized in that further include two electrode layers, position
Insulating layer between two electrode layers and positioned at second protective layer of the electrode layer away from the insulating layer one side,
The electrode layer has mesh shape.
9. a kind of display panel, which is characterized in that including the electrode layer described in claim 1 to 8 any one.
10. a kind of display device, which is characterized in that including the display panel described in claim 9.
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CN201810150528.5A CN108089771A (en) | 2018-02-13 | 2018-02-13 | Touch base plate, display panel, display device |
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