TW201701125A - Touch panel - Google Patents

Touch panel Download PDF

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TW201701125A
TW201701125A TW104119670A TW104119670A TW201701125A TW 201701125 A TW201701125 A TW 201701125A TW 104119670 A TW104119670 A TW 104119670A TW 104119670 A TW104119670 A TW 104119670A TW 201701125 A TW201701125 A TW 201701125A
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area
touch
electrode
transparent conductive
percentage
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TW104119670A
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TWI584167B (en
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陳煜東
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恆顥科技股份有限公司
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Priority to TW104119670A priority Critical patent/TWI584167B/en
Priority to CN201510420832.3A priority patent/CN106325586A/en
Priority to CN201520519325.0U priority patent/CN204790940U/en
Publication of TW201701125A publication Critical patent/TW201701125A/en
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Publication of TWI584167B publication Critical patent/TWI584167B/en

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Abstract

A touch panel includes a substrate and a patterned transparent conductive layer disposed thereon. The substrate has a peripheral region and a visible region including a touch electrode region and a trace region. The patterned transparent conductive layer includes touch electrodes and traces. The touch electrodes are at least partially disposed in the touch electrode region. The traces are at least partially disposed in the trace region. Each trace is connected to one of the touch electrodes. A ratio of an area of the patterned transparent conductive layer in the touch electrode region to an area of the touch electrode region is equal to a first percentage. A ration of an area of the patterned transparent conductive layer in the trace region to an area of the trace region is equal to a second percentage. A difference between the first percentage and the second percentage is less than 10%.

Description

觸控面板Touch panel

本發明係關於一種觸控面板,尤指一種單層式(one layer sensor,OLS)觸控面板。The invention relates to a touch panel, in particular to a one layer sensor (OLS) touch panel.

觸控面板由於具有人機互動的特性,已被廣泛應用於儀器的外埠輸入介面上。近年來,隨著消費性電子產品的應用面發展越來越廣,將觸控功能與顯示器結合而形成觸控顯示面板之應用產品也越來越多,包括行動電話(mobile phone)、衛星導航系統(GPS navigator system)、平板電腦(tablet PC)、個人數位助理(PDA)以及筆記型電腦(laptop PC)等。Touch panels have been widely used in the external input interface of instruments due to their human-computer interaction. In recent years, as the application of consumer electronic products has become more and more widespread, more and more applications have been made to combine touch functions with displays to form touch display panels, including mobile phones and satellite navigation. GPS navigator system, tablet PC, personal digital assistant (PDA), and laptop PC.

目前觸控面板的技術發展非常多樣化,較常見的技術包括電阻式、電容式以及光學式等。另一方面,在結構上較常見的則有所謂架橋式(例如SITO設計)、雙層式(例如DITO設計)以及單層式(one layer sensor,OLS)等。如第1圖所示,傳統單層式觸控面板100具有一觸控訊號傳遞電極120T以及與其對應設置之複數個觸控訊號接收電極120R。由於觸控訊號傳遞電極120T與觸控訊號接收電極120R係由同一導電材料層進行圖案化而一併形成於透明基板110的可視觸控區AA中,故觸控訊號傳遞電極120T與觸控訊號接收電極120R係彼此分離而未互相重疊。觸控訊號接收電極120R係沿觸控訊號傳遞電極120T之延伸方向排列設置且彼此電性絕緣,各觸控訊號接收電極120R需藉由訊號走線130與其連接用以將接收到的觸控訊號傳遞至訊號處理元件(未圖式)用以進行觸控點的計算。由於部分的訊號走線130必須延伸至可視觸控區AA中藉以與觸控訊號接收電極120R連接,故部分的訊號走線130亦須設置於可視觸控區AA中。在傳統單層式觸控面板100的可視觸控區AA中,訊號走線130所在區域的開口率(未設置訊號走線130之區域的比率)會與設置觸控訊號接收電極120R以及觸控訊號傳遞電極120T的區域之開口率(未設置觸控訊號接收電極120R以及觸控訊號傳遞電極120T之區域的比率)有很明顯的差異(一般相差約30%以上),而此開口率不一致的狀況會造成在整體視覺上產生可視餘影,對於觸控面板的視覺品質產生負面影響。At present, the technology development of touch panels is very diverse, and the more common technologies include resistive, capacitive, and optical. On the other hand, the more common structures are so-called bridge type (for example, SITO design), double layer type (for example, DITO design), and one layer sensor (OLS). As shown in FIG. 1 , the conventional single-layer touch panel 100 has a touch signal transmitting electrode 120T and a plurality of touch signal receiving electrodes 120R disposed corresponding thereto. Since the touch signal transmitting electrode 120T and the touch signal receiving electrode 120R are patterned by the same conductive material layer and formed in the visible touch area AA of the transparent substrate 110, the touch signal transmitting electrode 120T and the touch signal are formed. The receiving electrodes 120R are separated from each other without overlapping each other. The touch signal receiving electrodes 120R are arranged along the extending direction of the touch signal transmitting electrode 120T and are electrically insulated from each other. The touch signal receiving electrodes 120R are connected to the touch signals 130 for receiving the received touch signals. Passed to the signal processing component (not shown) for the calculation of the touch point. Since some of the signal traces 130 must extend into the visible touch area AA to be connected to the touch signal receiving electrodes 120R, some of the signal traces 130 must also be disposed in the visible touch area AA. In the visible touch area AA of the conventional single-layer touch panel 100, the aperture ratio of the area where the signal trace 130 is located (the ratio of the area where the signal trace 130 is not set) and the touch signal receiving electrode 120R and the touch are set. The aperture ratio of the area of the signal transmission electrode 120T (the ratio of the area where the touch signal receiving electrode 120R and the touch signal transmitting electrode 120T are not disposed) has a significant difference (generally about 30% or more), and the aperture ratio is inconsistent. The situation can cause a visual residual in the overall vision, which has a negative impact on the visual quality of the touch panel.

本發明之主要目的之一在於提供一種觸控面板,用同一個圖案化透明導電層來形成觸控電極與走線,並藉由調整觸控電極的設計使得可視區中觸控電極所在的區域與走線所在的區域之間的開口率差異縮小,進而達到改善觸控面板視覺品質的效果。One of the main purposes of the present invention is to provide a touch panel that uses the same patterned transparent conductive layer to form a touch electrode and a trace, and adjusts the design of the touch electrode so that the touch electrode is located in the visible region. The difference in aperture ratio between the area where the trace is located is reduced, thereby improving the visual quality of the touch panel.

為達上述目的,本發明之一實施例提供一種觸控面板,包括一基板以及一圖案化透明導電層。基板具有一可視區以及一周圍區,周圍區係位於可視區之至少一側。可視區包括至少一觸控電極區以及至少一走線區。圖案化透明導電層設置於基板上並至少位於可視區中。圖案化透明導電層包括複數個觸控電極以及複數條走線。觸控電極至少部分設置於可視區之觸控電極區中。走線至少部分設置於可視區之走線區中。各走線係與至少一個觸控電極相連。於觸控電極區中的圖案化透明導電層的面積與觸控電極區之面積相比具有一第一百分比,於走線區中的圖案化透明導電層的面積與走線區之面積相比具有一第二百分比,第一百分比與第二百分比之間的差係小於10%。To achieve the above objective, an embodiment of the present invention provides a touch panel including a substrate and a patterned transparent conductive layer. The substrate has a viewing zone and a surrounding zone, the surrounding zone being located on at least one side of the viewing zone. The visible area includes at least one touch electrode area and at least one trace area. The patterned transparent conductive layer is disposed on the substrate and at least in the visible region. The patterned transparent conductive layer includes a plurality of touch electrodes and a plurality of traces. The touch electrode is at least partially disposed in the touch electrode area of the visible area. The trace is at least partially disposed in the trace area of the viewable area. Each trace is connected to at least one touch electrode. The area of the patterned transparent conductive layer in the touch electrode region has a first percentage compared with the area of the touch electrode region, and the area of the patterned transparent conductive layer in the trace region and the area of the trace region The difference between the first percentage and the second percentage is less than 10% compared to having a second percentage.

在本發明其中一實施例的觸控面板中,第一百分比與第二百分比之間的差係小於5%。In the touch panel of one embodiment of the present invention, the difference between the first percentage and the second percentage is less than 5%.

在本發明其中一實施例的觸控面板中,於觸控電極區中未設置圖案化透明導電層的區域面積與觸控電極區之面積相比具有一第三百分比,於走線區中未設置圖案化透明導電層的區域面積與走線區之面積相比具有一第四百分比,第三百分比與第四百分比之間的差係小於10%。In the touch panel of the embodiment of the present invention, the area of the area where the patterned transparent conductive layer is not disposed in the touch electrode region has a third percentage compared with the area of the touch electrode area, and is in the trace area. The area of the area in which the patterned transparent conductive layer is not disposed has a fourth percentage compared to the area of the trace area, and the difference between the third percentage and the fourth percentage is less than 10%.

在本發明其中一實施例的觸控面板中,各觸控電極具有複數個開口,於各觸控電極中的開口的區域面積與觸控電極外圍輪廓所形成之區域面積相比具有一第五百分比,且第五百分比與第四百分比之間的差係小於10%。In the touch panel of the embodiment of the present invention, each touch electrode has a plurality of openings, and the area of the opening in each touch electrode has a fifth area compared with the area formed by the peripheral contour of the touch electrode. Percentage, and the difference between the fifth percentage and the fourth percentage is less than 10%.

在本發明其中一實施例的觸控面板中,觸控電極與走線係設置於同一平面上。In the touch panel of one embodiment of the present invention, the touch electrodes and the trace lines are disposed on the same plane.

在本發明其中一實施例的觸控面板中,觸控電極包括觸控訊號傳遞電極與觸控訊號接收電極。In the touch panel of one embodiment of the present invention, the touch electrodes include a touch signal transmitting electrode and a touch signal receiving electrode.

在本發明其中一實施例的觸控面板中,圖案化透明導電層更包括至少一輔助電極,設置於觸控電極區中,輔助電極係設置於觸控電極之間,且輔助電極係與觸控電極電性分離。In the touch panel of the embodiment of the present invention, the patterned transparent conductive layer further includes at least one auxiliary electrode disposed in the touch electrode region, the auxiliary electrode is disposed between the touch electrodes, and the auxiliary electrode is in contact with The electrode is electrically separated.

在本發明其中一實施例的觸控面板中,輔助電極為電性浮置(floating)電極。In the touch panel of one embodiment of the present invention, the auxiliary electrode is an electrically floating electrode.

在本發明其中一實施例的觸控面板中,可視區包括複數個觸控電極區,且走線區係位於相鄰的兩觸控電極區之間。In the touch panel of one embodiment of the present invention, the visible area includes a plurality of touch electrode areas, and the routing area is located between the adjacent two touch electrode areas.

在本發明其中一實施例的觸控面板中,圖案化透明導電層係由一透明導電材料所構成,透明導電材料的透光度係大於或等於80%。In the touch panel of one embodiment of the present invention, the patterned transparent conductive layer is composed of a transparent conductive material, and the transmittance of the transparent conductive material is greater than or equal to 80%.

在本發明其中一實施例的觸控面板中,透明導電材料包括金屬氧化物透明導電材料、金屬氧化物透明導電材料與薄金屬層堆疊之多層材料或奈米導電材料。In the touch panel of one embodiment of the present invention, the transparent conductive material comprises a metal oxide transparent conductive material, a metal oxide transparent conductive material and a thin metal layer stacked multilayer material or a nano conductive material.

在本發明其中一實施例的觸控面板中,第二百分比係藉於50%~75%之間。In the touch panel of one embodiment of the present invention, the second percentage is between 50% and 75%.

在本發明其中一實施例的觸控面板中,觸控電極包括複數個第一電極以及複數個第二電極。第一電極係沿一第一方向延伸,且第一電極係沿一第二方向上重複排列設置,各第一電極具有複數個中空區沿第一方向排列。第二電極設置於各第一電極於第二方向上的兩側,且各第二電極係延伸以部分設置於對應之第一電極的一個中空區中。In the touch panel of one embodiment of the present invention, the touch electrode includes a plurality of first electrodes and a plurality of second electrodes. The first electrode system extends along a first direction, and the first electrode is repeatedly arranged along a second direction, and each of the first electrodes has a plurality of hollow regions arranged along the first direction. The second electrode is disposed on both sides of each of the first electrodes in the second direction, and each of the second electrodes extends to be partially disposed in a hollow region of the corresponding first electrode.

為使熟習本發明所屬技術領域之一般技藝者能更進一步了解本發明,下文特列舉本發明之數個較佳實施例,並配合所附圖式,詳細說明本發明的構成內容。The present invention will be described in detail with reference to the preferred embodiments of the invention,

請參考第2圖至第6圖。第2圖繪示了本發明第一實施例之觸控面板的示意圖,第3圖繪示了本實施例之觸控面板省略觸控電極之開口的示意圖,第4圖繪示了第2圖之部分區域放大示意圖,第5圖繪示了本實施例之觸控面板中觸控電極的排列狀況示意圖,第6圖繪示了本實施例之觸控面板的部分區域剖面示意圖。為了方便說明,本發明之各圖式僅為示意以更容易了解本發明,其詳細的比例可依照設計的需求進行調整。如第1圖與第3圖所示,本實施例提供一種觸控面板201,包括一基板10以及一圖案化透明導電層20。基板10具有一可視區R1以及一周圍區R2,周圍區R2係位於可視區R1之至少一側。可視區R1包括至少一觸控電極區R3以及至少一走線區R4。在本實施例中,基板10可包括玻璃基板、塑膠基板、藍寶石基板、透明陶瓷基板、玻璃膜片、塑膠膜片、透光覆蓋板、顯示器的基板、偏光片或其他適合材料或應用的基板。圖案化透明導電層20設置於基板10上並位於可視區R1以及周圍區R2中,但本發明並不以此為限。在本發明的其他實施例中,當觸控面板大型化或是做減少訊號導接墊數目設計時,可以僅在可視區R1設置圖案化透明導電層20,另外在周圍區R2設置多個金屬導線與圖案化透明導電層20中各觸控電極分別電性連接,降低整體導電層的電阻值,或是利用特定金屬導線將多個特定位置的觸控電極電性連接以減少訊號導接墊的數目。在本實施例中,圖案化透明導電層20係由一透明導電材料所構成,換句話說,圖案化透明導電層20可由上述之透明導電材料經由圖案化製程例如微影製程、轉印製程等方式形成於基板10上。上述之透明導電材料的透光度係大於或等於80%,且較佳係大於或等於85%,但並不以此為限。上述之透光度係在可見光的波長範圍下進行量測,例如在波長為550奈米的狀況下,但並不以此為限。此外,上述之透明導電材料可為單層或多層導電層所堆疊而成的結構。舉例來說,上述之透明導電材料可包括金屬氧化物透明導電材料、金屬氧化物透明導電材料與薄金屬層堆疊之多層材料、奈米導電材料例如奈米銀絲或奈米碳管或其他適合之透明導電材料。上述之金屬氧化物透明導電材料可包括氧化銦錫(indium tin oxide, ITO)、氧化銦鋅(indium zinc oxide, IZO)或氧化鋁鋅(aluminum zinc oxide, AZO),但並不以此為限。上述之金屬氧化物透明導電材料與薄金屬層堆疊之多層材料可包括金屬氧化物透明導電材料/薄金屬層之雙層結構、金屬氧化物透明導電材料/薄金屬層/金屬氧化物透明導電材料之三層結構(例如ITO/Al/ITO結構)或其他多層結構。Please refer to Figures 2 to 6. 2 is a schematic view of the touch panel of the first embodiment of the present invention, and FIG. 3 is a schematic view showing the touch panel of the present embodiment omitting the opening of the touch electrode, and FIG. 4 is a second view FIG. 5 is a schematic cross-sectional view showing a portion of the touch panel of the present embodiment. FIG. 6 is a cross-sectional view showing a portion of the touch panel of the present embodiment. For the convenience of description, the drawings of the present invention are only for the purpose of understanding the present invention, and the detailed proportions thereof can be adjusted according to the design requirements. As shown in FIG. 1 and FIG. 3 , the present embodiment provides a touch panel 201 including a substrate 10 and a patterned transparent conductive layer 20 . The substrate 10 has a visible area R1 and a surrounding area R2, and the surrounding area R2 is located on at least one side of the visible area R1. The visible area R1 includes at least one touch electrode area R3 and at least one wiring area R4. In this embodiment, the substrate 10 may include a glass substrate, a plastic substrate, a sapphire substrate, a transparent ceramic substrate, a glass film, a plastic film, a light-transmitting cover plate, a substrate of a display, a polarizer or other substrate suitable for materials or applications. . The patterned transparent conductive layer 20 is disposed on the substrate 10 and located in the visible region R1 and the surrounding region R2, but the invention is not limited thereto. In other embodiments of the present invention, when the touch panel is enlarged or the number of signal guiding pads is reduced, the patterned transparent conductive layer 20 may be disposed only in the visible region R1, and a plurality of metals are disposed in the surrounding region R2. The wires are electrically connected to the touch electrodes of the patterned transparent conductive layer 20, respectively, to reduce the resistance value of the entire conductive layer, or to electrically connect the touch electrodes of a plurality of specific positions by using specific metal wires to reduce the signal guiding pads. Number of. In this embodiment, the patterned transparent conductive layer 20 is composed of a transparent conductive material. In other words, the patterned transparent conductive layer 20 can be processed by the above transparent conductive material via a patterning process such as a lithography process, a transfer process, or the like. The method is formed on the substrate 10. The transmittance of the transparent conductive material is greater than or equal to 80%, and preferably greater than or equal to 85%, but is not limited thereto. The above transmittance is measured in the wavelength range of visible light, for example, in the case of a wavelength of 550 nm, but is not limited thereto. Further, the above transparent conductive material may be a structure in which a single layer or a plurality of conductive layers are stacked. For example, the transparent conductive material may include a metal oxide transparent conductive material, a multilayer material of a metal oxide transparent conductive material and a thin metal layer stack, a nano conductive material such as nano silver wire or a carbon nanotube or other suitable Transparent conductive material. The above metal oxide transparent conductive material may include indium tin oxide (ITO), indium zinc oxide (IZO) or aluminum zinc oxide (AZO), but is not limited thereto. . The multilayer material of the metal oxide transparent conductive material and the thin metal layer stacked may include a double layer structure of a metal oxide transparent conductive material/thin metal layer, a metal oxide transparent conductive material/a thin metal layer/metal oxide transparent conductive material. A three-layer structure (such as ITO/Al/ITO structure) or other multilayer structure.

圖案化透明導電層20包括複數個觸控電極21以及複數條走線22。觸控電極21至少部分設置於可視區R1之觸控電極區R3中,走線22至少部分設置於可視區R1之走線區R4中。各走線22係與至少一個觸控電極21相連,用以傳遞或接受訊號。在本實施例中,觸控電極21未設置於走線區R4中,而走線22亦未設置於觸控電極區R3中,但並不以此為限。於觸控電極區R3中的圖案化透明導電層20的面積與觸控電極區R3之面積相比具有一第一百分比,於走線區R4中的圖案化透明導電層20的面積與走線區R4之面積相比具有一第二百分比,第一百分比與第二百分比之間的差(兩者相減的絕對值)係小於10%,且較佳係小於5%。換句話說,圖案化透明導電層20在觸控電極區R3與走線區R4中的圖案密度係相當接近,藉此可避免因觸控電極區R3與走線區R4之間開口率不一致而導致在整體視覺上產生可視餘影的問題,進而達到提升觸控面板201的視覺品質之目的。值得說明的是,在本發明中所指圖案化透明導電層20的面積可指圖案化透明導電層20的圖案輪廓面積,例如當以奈米導電材料形成圖案化透明導電層20時,圖案化透明導電層20的面積即是代表在圖案化透明導電層20中位於邊緣之奈米導電材料所形成之圖案輪廓所包圍之區域面積。The patterned transparent conductive layer 20 includes a plurality of touch electrodes 21 and a plurality of traces 22. The touch electrode 21 is at least partially disposed in the touch electrode region R3 of the visible region R1, and the trace 22 is at least partially disposed in the trace region R4 of the visible region R1. Each of the traces 22 is connected to at least one touch electrode 21 for transmitting or receiving signals. In this embodiment, the touch electrode 21 is not disposed in the routing area R4, and the routing 22 is not disposed in the touch electrode area R3, but is not limited thereto. The area of the patterned transparent conductive layer 20 in the touch electrode region R3 has a first percentage compared with the area of the touch electrode region R3, and the area of the patterned transparent conductive layer 20 in the trace region R4 is The area of the routing area R4 has a second percentage, and the difference between the first percentage and the second percentage (the absolute value of the subtraction between the two) is less than 10%, and preferably less than 5%. In other words, the pattern density of the patterned transparent conductive layer 20 in the touch electrode region R3 and the trace region R4 is relatively close, thereby avoiding the inconsistency in the aperture ratio between the touch electrode region R3 and the trace region R4. The problem of visual residual shadow is generated in the overall vision, thereby achieving the purpose of improving the visual quality of the touch panel 201. It should be noted that the area of the patterned transparent conductive layer 20 referred to in the present invention may refer to the pattern outline area of the patterned transparent conductive layer 20, for example, when the patterned transparent conductive layer 20 is formed of a nano conductive material, the patterning is performed. The area of the transparent conductive layer 20 is the area of the area surrounded by the outline of the pattern formed by the nano-conductive material located at the edge of the patterned transparent conductive layer 20.

舉例來說,本實施例的第一百分比與第二百分比可分別介於50%至75%之間,且第一百分比較佳係大體上與第二百分比相等,但考量製程變異的狀況下,第一百分比與第二百分比兩者的差異值係小於10%,且較佳係小於5%,例如第一百分比可約為62%,而第二百分比可約為60%,兩者相差值為2%,但並不以此為限。另一方面,於觸控電極區R3中未設置圖案化透明導電層20的區域面積與觸控電極區R3之面積相比具有一第三百分比(亦可視為觸控電極區R3的開口率),於走線區R4中未設置圖案化透明導電層20的區域面積與走線區R4之面積相比具有一第四百分比(亦可視為走線區R4的開口率),第三百分比與第四百分比之間的差係小於10%,且較佳係小於5%。在本實施例中,上述之第一百分比與第三百分比的和大體上為1,而上述之第二百分比與第四百分比的和大體上為1,但並不以此為限。換句話說,觸控電極區R3與走線區R4的開口率(指未設置圖案化透明導電層20的區域面積比率)可分別介於25%至50%之間,但並不以此為限。For example, the first percentage and the second percentage of the embodiment may be between 50% and 75%, respectively, and the first percentage is preferably substantially equal to the second percentage. However, considering the variation of the process, the difference between the first percentage and the second percentage is less than 10%, and preferably less than 5%, for example, the first percentage may be about 62%, and The second percentage can be about 60%, and the difference between the two is 2%, but not limited to this. On the other hand, the area of the area where the patterned transparent conductive layer 20 is not disposed in the touch electrode region R3 has a third percentage compared with the area of the touch electrode region R3 (it can also be regarded as the opening of the touch electrode region R3). Rate), the area of the area in which the patterned transparent conductive layer 20 is not disposed in the wiring area R4 has a fourth percentage (which can also be regarded as the aperture ratio of the wiring area R4), as compared with the area of the wiring area R4. The difference between the three percentages and the fourth percentage is less than 10%, and preferably less than 5%. In this embodiment, the sum of the first percentage and the third percentage is substantially 1, and the sum of the second percentage and the fourth percentage is substantially 1, but not This is limited to this. In other words, the aperture ratio of the touch electrode region R3 and the trace region R4 (refer to the area ratio of the region where the patterned transparent conductive layer 20 is not disposed) may be between 25% and 50%, respectively, but this is not limit.

進一步說明,在本實施例中,各觸控電極21具有複數個開口H,於各觸控電極21中的開口H的區域面積與觸控電極21外圍輪廓所形成之區域面積相比具有一第五百分比,且第五百分比與上述之第四百分比之間的差係小於10%,且較佳係小於5%。換句話說,藉由於各觸控電極21中設置開口H並控制開口H的大小與形狀,可使得各觸控電極21本身的開口率與走線區R4的開口率之間的差異縮小,進而達到視覺品質之目的。如第2圖與第3圖所示,當各觸控電極21未設置開口H時(如第3圖的狀況),於觸控電極區R3以及走線區R4之間在圖案化透明導電層20以外區域之開口率上有很明顯的差異(一般未設置開口H時,觸控電極區R3與走線區R4的開口率相差值係大於30%),而於各觸控電極21中設置開口H並控制開口H的形狀與大小,可使得觸控電極區R3中開口H的形狀與大小與走線區R4中各走線22之間的間隙相似,降低因圖案化透明導電層20在可視區R1中不同區域的形狀不同所導致的視覺不均勻狀況,進而提升觸控面板201的視覺品質。Further, in the embodiment, each touch electrode 21 has a plurality of openings H, and the area of the opening H in each touch electrode 21 has a surface area larger than the area formed by the peripheral contour of the touch electrode 21. Five percent, and the difference between the fifth percentage and the fourth percentage above is less than 10%, and preferably less than 5%. In other words, by providing the opening H in each touch electrode 21 and controlling the size and shape of the opening H, the difference between the aperture ratio of each touch electrode 21 itself and the aperture ratio of the routing region R4 can be reduced. To achieve the purpose of visual quality. As shown in FIG. 2 and FIG. 3, when the touch electrodes 21 are not provided with the opening H (as in the case of FIG. 3), the transparent conductive layer is patterned between the touch electrode region R3 and the wiring region R4. There is a significant difference in the aperture ratio of the region other than 20 (the aperture ratio between the touch electrode region R3 and the trace region R4 is greater than 30% when the opening H is not provided), and is set in each touch electrode 21 The opening H and the shape and size of the opening H are such that the shape and size of the opening H in the touch electrode region R3 are similar to the gap between the traces 22 in the trace region R4, and the patterned transparent conductive layer 20 is lowered. The visual unevenness caused by the different shapes of different regions in the visible region R1 improves the visual quality of the touch panel 201.

此外,如第2圖與第5圖所示,本實施例的觸控電極21可包括複數個第一電極21A以及複數個第二電極21B。第一電極21A係沿一第一方向Y延伸,且第一電極21係沿一第二方向X上重複排列設置,各第一電極21A具有複數個中空區21H沿第一方向Y排列。第二電極21B設置於各第一電極21A於第二方向X上的兩側,且各第二電極21B係延伸以部分設置於對應之第一電極21A的一個中空區21H中,但本發明之觸控電極21並不以上述的排列方式為限。在本實施例中,第一電極21A與第二電極21B可分別為一觸控訊號接收電極以及一觸控訊號傳遞電極,或者第一電極21A與第二電極21B亦可分別為一觸控訊號傳遞電極以及一觸控訊號接收電極,但並不以此為限。換句話說,觸控電極21可包括觸控訊號傳遞電極與觸控訊號接收電極,用以互相搭配進行一互電容式觸控檢測,但並不以此為限。在本發明之其他實施例中,亦可利用觸控電極21進行自電容式觸控檢測。In addition, as shown in FIG. 2 and FIG. 5, the touch electrode 21 of the present embodiment may include a plurality of first electrodes 21A and a plurality of second electrodes 21B. The first electrode 21A extends along a first direction Y, and the first electrodes 21 are repeatedly arranged along a second direction X. Each of the first electrodes 21A has a plurality of hollow regions 21H arranged along the first direction Y. The second electrode 21B is disposed on both sides of each of the first electrodes 21A in the second direction X, and each of the second electrodes 21B extends to be partially disposed in a hollow region 21H of the corresponding first electrode 21A, but the present invention The touch electrodes 21 are not limited to the above arrangement. In this embodiment, the first electrode 21A and the second electrode 21B are respectively a touch signal receiving electrode and a touch signal transmitting electrode, or the first electrode 21A and the second electrode 21B are respectively a touch signal. The transfer electrode and a touch signal receiving electrode are not limited thereto. In other words, the touch electrode 21 can include a touch signal transmitting electrode and a touch signal receiving electrode for performing mutual capacitive touch detection, but is not limited thereto. In other embodiments of the present invention, the touch electrode 21 can also be used for self-capacitive touch detection.

此外,如第2圖與第4圖所示,在本實施例之觸控面板201中,圖案化透明導電層20可更包括至少一輔助電極(或可稱為dummy electrode)23設置於觸控電極區R3中,輔助電極23係設置於觸控電極21之間,且輔助電極23係與觸控電極21電性分離。在本實施例中,輔助電極23較佳可為電性浮置(floating)電極設置於第一電極21A與第二電極21B之間,也就是說輔助電極23較佳可未與任何元件電性連接,但並不以此為限。輔助電極23可用以填補各觸控電極21之間的空隙且提升觸控電極區R3中有無設置觸控電極21之區域間的視覺一致性,藉此降低觸控電極21的輪廓明顯度,達到更進一步提升視覺品質的效果。此外,本實施例之輔助電極23的形狀與大小較佳係與位於走線區R4的走線22相似,藉此提升圖案化透明導電層20在觸控電極區R3與走線區R4之間的圖形一致性。換句話說,位於觸控電極區R3中的圖案化透明導電層20包括了第一電極21A、第二電極21B以及輔助電極23,而上述之第一百分比(於觸控電極區R3中的圖案化透明導電層20的面積與觸控電極區R3之面積相比的比值)即可由輔助電極23、第一電極21A以及第二電極21B的形狀大小以及開口H的形狀大小來進行調整與控制。In addition, as shown in FIG. 2 and FIG. 4 , in the touch panel 201 of the present embodiment, the patterned transparent conductive layer 20 may further include at least one auxiliary electrode (or may be referred to as a dummy electrode) 23 disposed on the touch. In the electrode region R3, the auxiliary electrode 23 is disposed between the touch electrodes 21, and the auxiliary electrode 23 is electrically separated from the touch electrode 21. In this embodiment, the auxiliary electrode 23 is preferably disposed between the first electrode 21A and the second electrode 21B, that is, the auxiliary electrode 23 is preferably not electrically connected to any of the components. Connected, but not limited to this. The auxiliary electrode 23 can be used to fill the gap between the touch electrodes 21 and improve the visual consistency between the touch electrodes 21 and the regions where the touch electrodes 21 are disposed, thereby reducing the contour of the touch electrodes 21 and achieving Further enhance the visual quality effect. In addition, the shape and size of the auxiliary electrode 23 of the present embodiment is preferably similar to the trace 22 located in the trace region R4, thereby lifting the patterned transparent conductive layer 20 between the touch electrode region R3 and the trace region R4. Graphical consistency. In other words, the patterned transparent conductive layer 20 in the touch electrode region R3 includes the first electrode 21A, the second electrode 21B, and the auxiliary electrode 23, and the first percentage (in the touch electrode region R3) The ratio of the area of the patterned transparent conductive layer 20 to the area of the touch electrode region R3 can be adjusted by the shape and size of the auxiliary electrode 23, the first electrode 21A and the second electrode 21B, and the shape of the opening H. control.

此外,如第2圖與第5圖所示,在本實施例中,可視區R1可包括複數個觸控電極區R3,而走線區R4可於第二方向X上位於相鄰的兩個觸控電極區R3之間,但並不以此為限。由於本實施例之第一電極21A係於第一方向Y上由可視區R1的一邊緣延伸至相對的另一邊緣,故對應第一電極21A的走線可不需設置於可視區R1中。也就是說,設置於可視區R1之走線區R4中的走線22係對應連接至第二電極21B。值得說明的是,如第6圖所示,由於觸控電極21、走線22以及輔助電極23均係設置於基板10上的圖案化透明導電層20的一部分,故位於觸控電極區R3的觸控電極21與輔助電極23以及位於走線區R4的走線22均係設置於同一平面上,且觸控電極21、走線22以及輔助電極23於垂直方向Z上均未互相重疊,而本實施例之觸控面板201可被視為一單層式(one layer sensor,OLS)觸控面板。也就是說,本實施例之觸控電極21、走線22以及輔助電極23可藉由圖案化透明導電層20一併形成,藉此達到簡化製程的效果。此外,本實施例之觸控面板201可選擇性地更包括一絕緣保護層(未繪示)形成於基板10上並覆蓋觸控電極21、走線22以及輔助電極23,但並不以此為限。In addition, as shown in FIG. 2 and FIG. 5, in the embodiment, the visible region R1 may include a plurality of touch electrode regions R3, and the routing region R4 may be located adjacent to the second two in the second direction X. Between the touch electrode regions R3, but not limited thereto. Since the first electrode 21A of the embodiment extends from one edge of the visible region R1 to the opposite edge in the first direction Y, the trace corresponding to the first electrode 21A need not be disposed in the visible region R1. That is, the trace 22 disposed in the trace region R4 of the visible region R1 is correspondingly connected to the second electrode 21B. It should be noted that, as shown in FIG. 6 , since the touch electrodes 21 , the traces 22 , and the auxiliary electrodes 23 are all disposed on the portion of the patterned transparent conductive layer 20 on the substrate 10 , the touch electrode region R3 is located. The touch electrodes 21 and the auxiliary electrodes 23 and the traces 22 in the trace region R4 are disposed on the same plane, and the touch electrodes 21, the traces 22, and the auxiliary electrodes 23 do not overlap each other in the vertical direction Z. The touch panel 201 of this embodiment can be regarded as a one layer sensor (OLS) touch panel. That is to say, the touch electrode 21, the trace 22 and the auxiliary electrode 23 of the present embodiment can be formed by patterning the transparent conductive layer 20, thereby achieving the effect of simplifying the process. In addition, the touch panel 201 of the present embodiment can further include an insulating protective layer (not shown) formed on the substrate 10 and covering the touch electrode 21, the trace 22, and the auxiliary electrode 23, but not Limited.

下文將針對本發明的不同實施例進行說明,且為簡化說明,以下說明主要針對各實施例不同之處進行詳述,而不再對相同之處作重覆贅述。此外,本發明之各實施例中相同之元件係以相同之標號進行標示,以利於各實施例間互相對照。The different embodiments of the present invention are described below, and the following description is mainly for the sake of simplification of the description of the embodiments, and the details are not repeated. In addition, the same elements in the embodiments of the present invention are denoted by the same reference numerals to facilitate the comparison between the embodiments.

請參考第7圖,第7圖繪示了本發明第二實施例之觸控面板的示意圖。如第7圖所示,本實施例的觸控面板202與上述第一實施例不同的地方在於,本實施例之圖案化透明導電層20可由堆疊之第一氧化物透明導電層20A、薄金屬層20B以及第二氧化物透明導電層20C所構成。第一氧化物透明導電層20A與第二氧化物透明導電層20C可包括氧化銦錫、氧化銦鋅、氧化鋁鋅或其他適合之金屬氧化物透明導電材料。薄金屬層20B可包括鋁、銅、銀、鉻、鈦、鉬等導電性較佳的金屬材料、上述材料之複合層或上述材料之合金,且藉由控制薄金屬層20B的厚度(約10奈米)可使圖案化透明導電層20具有高透光度(在波長約為550奈米的狀況下,其透光度約大於或等於86%)。因此,相較於單純的金屬氧化物透明導電材料具有約88%以上的透光度,本實施例之金屬氧化物透明導電材料/薄金屬層/金屬氧化物透明導電材料之三層結構雖然在透光度上表現些微較差,但卻可藉由薄金屬層20B來達到降低圖案化透明導電層20之電阻率的效果,對於以圖案化透明導電層20形成之走線22的阻值降低有顯著的效果。Please refer to FIG. 7. FIG. 7 is a schematic diagram of a touch panel according to a second embodiment of the present invention. As shown in FIG. 7, the touch panel 202 of the present embodiment is different from the first embodiment in that the patterned transparent conductive layer 20 of the present embodiment can be stacked with the first oxide transparent conductive layer 20A and a thin metal. The layer 20B and the second oxide transparent conductive layer 20C are formed. The first oxide transparent conductive layer 20A and the second oxide transparent conductive layer 20C may include indium tin oxide, indium zinc oxide, aluminum zinc oxide or other suitable metal oxide transparent conductive material. The thin metal layer 20B may include a metal material having better conductivity such as aluminum, copper, silver, chromium, titanium, molybdenum, a composite layer of the above materials or an alloy of the above materials, and by controlling the thickness of the thin metal layer 20B (about 10 The nano-patterned transparent conductive layer 20 can have high transmittance (the transmittance is about 86% or more at a wavelength of about 550 nm). Therefore, compared with the simple metal oxide transparent conductive material having a transmittance of about 88% or more, the three-layer structure of the metal oxide transparent conductive material/thin metal layer/metal oxide transparent conductive material of the present embodiment is The transmittance is slightly inferior, but the effect of reducing the resistivity of the patterned transparent conductive layer 20 can be achieved by the thin metal layer 20B, and the resistance of the trace 22 formed by patterning the transparent conductive layer 20 is lowered. Significant effect.

請參考第8圖,第8圖繪示了本發明第三實施例之觸控面板的示意圖。如第8圖所示,本實施例的觸控面板203與上述第一實施例不同的地方在於,本實施例的觸控電極21可為形狀相同的電極分布於觸控電極區R3中,藉此可進行一自電容式觸控檢測,但並不以此為限。此外,在觸控面板203中,圖案化透明導電層20可更包括一輔助走線24設置於走線區R4中,輔助走線24係與走線22電性分離,且輔助走線24較佳為電性浮置狀態而未與任何元件電性連接或者可電性接地,但並不以此為限。輔助走線24的形狀較佳係與同樣位於走線區R4的走線22相似,而輔助走線24可用以填補走線區R4中未設置走線22之區域,藉此提升走線區R4中的視覺一致性。Please refer to FIG. 8. FIG. 8 is a schematic diagram of a touch panel according to a third embodiment of the present invention. As shown in FIG. 8 , the touch panel 203 of the present embodiment is different from the first embodiment in that the touch electrodes 21 of the present embodiment are distributed in the touch electrode region R3. This allows for a self-capacitive touch detection, but is not limited to this. In addition, in the touch panel 203, the patterned transparent conductive layer 20 may further include an auxiliary trace 24 disposed in the trace region R4, and the auxiliary trace 24 is electrically separated from the trace 22, and the auxiliary trace 24 is further separated. It is preferably electrically floating and not electrically connected to any component or electrically grounded, but is not limited thereto. The shape of the auxiliary trace 24 is preferably similar to the trace 22 also located in the trace area R4, and the auxiliary trace 24 can be used to fill the area of the trace area R4 where the trace 22 is not provided, thereby lifting the trace area R4. Visual consistency in the middle.

綜上所述,在本發明的觸控面板中,位於可視區中的觸控電極與走線係由同一個圖案化透明導電層所形成,且於觸控電極區中設置有圖案化透明導電層以外之區域面積的比率(開口率)與走線區中設置有圖案化透明導電層以外之區域面積的比率相近(相差值小於10%),可避免因觸控電極區與走線區之間開口率不一致而導致在整體視覺上產生可視餘影的問題,進而達到提升觸控面板的視覺品質之目的。   以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。In summary, in the touch panel of the present invention, the touch electrodes and the traces located in the visible region are formed by the same patterned transparent conductive layer, and patterned transparent conductive is disposed in the touch electrode region. The ratio of the area of the area other than the layer (the aperture ratio) is close to the ratio of the area of the area outside the patterned transparent conductive layer in the wiring area (the difference is less than 10%), which avoids the touch electrode area and the wiring area. The inconsistent aperture ratio results in a problem of visual residual vision in the overall vision, thereby achieving the objective of improving the visual quality of the touch panel. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

10‧‧‧基板
20‧‧‧圖案化透明導電層
20A‧‧‧第一氧化物透明導電層
20B‧‧‧薄金屬層
20C‧‧‧第二氧化物透明導電層
21‧‧‧觸控電極
21A‧‧‧第一電極
21B‧‧‧第二電極
21H‧‧‧中空區
22‧‧‧走線
23‧‧‧輔助電極
24‧‧‧輔助走線
100‧‧‧觸控面板
110‧‧‧透明基板
120R‧‧‧觸控訊號接收電極
120T‧‧‧觸控訊號傳遞電極
130‧‧‧訊號走線
201-203‧‧‧觸控面板
AA‧‧‧可視觸控區
H‧‧‧開口
R1‧‧‧可視區
R2‧‧‧周圍區
R3‧‧‧觸控電極區
R4‧‧‧走線區
X‧‧‧第二方向
Y‧‧‧第一方向
Z‧‧‧垂直方向
10‧‧‧Substrate
20‧‧‧ patterned transparent conductive layer
20A‧‧‧First oxide transparent conductive layer
20B‧‧‧thin metal layer
20C‧‧‧Second oxide transparent conductive layer
21‧‧‧Touch electrode
21A‧‧‧First electrode
21B‧‧‧Second electrode
21H‧‧‧ hollow area
22‧‧‧Wiring
23‧‧‧Auxiliary electrode
24‧‧‧Auxiliary wiring
100‧‧‧ touch panel
110‧‧‧Transparent substrate
120R‧‧‧ touch signal receiving electrode
120T‧‧‧ touch signal transmission electrode
130‧‧‧Signal trace
201-203‧‧‧Touch panel
AA‧‧·visual touch area
H‧‧‧ openings
R1‧‧ visible area
R2‧‧‧ surrounding area
R3‧‧‧Touch electrode area
R4‧‧‧Drop area
X‧‧‧second direction
Y‧‧‧First direction
Z‧‧‧Vertical direction

第1圖繪示了傳統單層式觸控面板的示意圖。 第2圖繪示了本發明第一實施例之觸控面板的示意圖。 第3圖繪示了本發明第一實施例之觸控面板省略觸控電極之開口的示意圖。 第4圖繪示了第2圖之部分區域放大示意圖。 第5圖繪示了本發明第一實施例之觸控面板中觸控電極的排列狀況示意圖。 第6圖繪示了本發明第一實施例之觸控面板的部分區域剖面示意圖。 第7圖繪示了本發明第二實施例之觸控面板的示意圖。 第8圖繪示了本發明第三實施例之觸控面板的示意圖。FIG. 1 is a schematic diagram of a conventional single-layer touch panel. FIG. 2 is a schematic view of a touch panel according to a first embodiment of the present invention. FIG. 3 is a schematic view showing the touch panel of the first embodiment of the present invention omitting the opening of the touch electrode. Fig. 4 is a schematic enlarged view of a partial area of Fig. 2. FIG. 5 is a schematic view showing the arrangement of touch electrodes in the touch panel according to the first embodiment of the present invention. FIG. 6 is a cross-sectional view showing a portion of the touch panel of the first embodiment of the present invention. FIG. 7 is a schematic view showing a touch panel according to a second embodiment of the present invention. FIG. 8 is a schematic diagram of a touch panel according to a third embodiment of the present invention.

10‧‧‧基板 10‧‧‧Substrate

20‧‧‧圖案化透明導電層 20‧‧‧ patterned transparent conductive layer

21‧‧‧觸控電極 21‧‧‧Touch electrode

21A‧‧‧第一電極 21A‧‧‧First electrode

21B‧‧‧第二電極 21B‧‧‧Second electrode

22‧‧‧走線 22‧‧‧Wiring

23‧‧‧輔助電極 23‧‧‧Auxiliary electrode

201‧‧‧觸控面板 201‧‧‧ touch panel

H‧‧‧開口 H‧‧‧ openings

R1‧‧‧可視區 R1‧‧ visible area

R2‧‧‧周圍區 R2‧‧‧ surrounding area

R3‧‧‧觸控電極區 R3‧‧‧Touch electrode area

R4‧‧‧走線區 R4‧‧‧Drop area

X‧‧‧第二方向 X‧‧‧second direction

Y‧‧‧第一方向 Y‧‧‧First direction

Z‧‧‧垂直方向 Z‧‧‧Vertical direction

Claims (13)

一種觸控面板,包括: 一基板,具有一可視區以及一周圍區,該周圍區係位於該可視區之至少一側,其中該可視區包括至少一觸控電極區以及至少一走線區;以及 一圖案化透明導電層,設置於該基板上並至少位於該可視區中,該圖案化透明導電層包括: 複數個觸控電極,至少部分設置於該可視區之該觸控電極區中;以及 複數條走線,至少部分設置於該可視區之該走線區中,其中各該走線係與至少一個該觸控電極相連,於該觸控電極區中的該圖案化透明導電層的面積與該觸控電極區之面積相比具有一第一百分比,於該走線區中的該圖案化透明導電層的面積與該走線區之面積相比具有一第二百分比,該第一百分比與該第二百分比之間的差係小於10%。A touch panel includes: a substrate having a visible area and a surrounding area, the surrounding area being located on at least one side of the visible area, wherein the visible area comprises at least one touch electrode area and at least one routing area; And a patterned transparent conductive layer disposed on the substrate and at least in the visible region, the patterned transparent conductive layer comprising: a plurality of touch electrodes disposed at least partially in the touch electrode region of the visible region; And the plurality of traces are at least partially disposed in the trace area of the visible area, wherein each of the traces is connected to the at least one touch electrode, and the patterned transparent conductive layer in the touch electrode area The area has a first percentage compared to the area of the touch electrode area, and the area of the patterned transparent conductive layer in the trace area has a second percentage compared to the area of the trace area The difference between the first percentage and the second percentage is less than 10%. 如請求項1所述之觸控面板,其中該第一百分比與該第二百分比之間的差係小於5%。The touch panel of claim 1, wherein a difference between the first percentage and the second percentage is less than 5%. 如請求項1所述之觸控面板,其中於該觸控電極區中未設置該圖案化透明導電層的區域面積與該觸控電極區之面積相比具有一第三百分比,於該走線區中未設置該圖案化透明導電層的區域面積與該走線區之面積相比具有一第四百分比,該第三百分比與該第四百分比之間的差係小於10%。The touch panel of claim 1, wherein an area of the area in which the patterned transparent conductive layer is not disposed in the touch electrode area has a third percentage compared to an area of the touch electrode area. The area of the area in the trace area where the patterned transparent conductive layer is not disposed has a fourth percentage compared to the area of the trace area, and the difference between the third percentage and the fourth percentage is Less than 10%. 如請求項3所述之觸控面板,其中各該觸控電極具有複數個開口,於各該觸控電極中的該等開口的區域面積與該觸控電極外圍輪廓所形成之區域面積相比具有一第五百分比,且該第五百分比與該第四百分比之間的差係小於10%。The touch panel of claim 3, wherein each of the touch electrodes has a plurality of openings, and an area of the openings in each of the touch electrodes is larger than an area formed by a peripheral contour of the touch electrodes. There is a fifth percentage, and the difference between the fifth percentage and the fourth percentage is less than 10%. 如請求項1所述之觸控面板,其中該等觸控電極與該等走線係設置於同一平面上。The touch panel of claim 1, wherein the touch electrodes are disposed on the same plane as the trace lines. 如請求項1所述之觸控面板,其中該等觸控電極包括觸控訊號傳遞電極與觸控訊號接收電極。The touch panel of claim 1, wherein the touch electrodes comprise a touch signal transmitting electrode and a touch signal receiving electrode. 如請求項1所述之觸控面板,其中該圖案化透明導電層更包括至少一輔助電極,設置於該觸控電極區中,該輔助電極係設置於該等觸控電極之間,且該輔助電極係與該等觸控電極電性分離。The touch panel of claim 1 , wherein the patterned transparent conductive layer further comprises at least one auxiliary electrode disposed in the touch electrode region, the auxiliary electrode is disposed between the touch electrodes, and the The auxiliary electrode system is electrically separated from the touch electrodes. 如請求項7所述之觸控面板,其中該輔助電極為電性浮置(floating)電極。The touch panel of claim 7, wherein the auxiliary electrode is an electrically floating electrode. 如請求項1所述之觸控面板,其中該可視區包括複數個觸控電極區,且該走線區係位於相鄰的兩該等觸控電極區之間。The touch panel of claim 1, wherein the visible area comprises a plurality of touch electrode areas, and the line area is located between two adjacent touch electrode areas. 如請求項1所述之觸控面板,其中該圖案化透明導電層係由一透明導電材料所構成,該透明導電材料的透光度係大於或等於80%。The touch panel of claim 1, wherein the patterned transparent conductive layer is composed of a transparent conductive material having a transmittance greater than or equal to 80%. 如請求項10所述之觸控面板,其中該透明導電材料包括金屬氧化物透明導電材料、金屬氧化物透明導電材料與薄金屬層堆疊之多層材料或奈米導電材料。The touch panel of claim 10, wherein the transparent conductive material comprises a metal oxide transparent conductive material, a metal oxide transparent conductive material and a thin metal layer stacked multilayer material or a nano conductive material. 如請求項1所述之觸控面板,其中該第二百分比係藉於50%至75%之間。The touch panel of claim 1, wherein the second percentage is between 50% and 75%. 如請求項1所述之觸控面板,其中該等觸控電極包括: 複數個第一電極,各該第一電極係沿一第一方向延伸,且該等第一電極係沿一第二方向上重複排列設置,其中各該第一電極具有複數個中空區沿該第一方向排列;以及 複數個第二電極,設置於各該第一電極於該第二方向上的兩側,且各該第二電極係延伸以部分設置於對應之該第一電極的一個該中空區中。The touch panel of claim 1, wherein the touch electrodes comprise: a plurality of first electrodes, each of the first electrodes extending in a first direction, and the first electrodes are along a second direction And repeating the arrangement, wherein each of the first electrodes has a plurality of hollow regions arranged along the first direction; and a plurality of second electrodes are disposed on both sides of each of the first electrodes in the second direction, and each of the The second electrode system extends to be partially disposed in one of the hollow regions corresponding to the first electrode.
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