CN108080347A - A kind of blowing dust collector for semiconductor packaging device - Google Patents
A kind of blowing dust collector for semiconductor packaging device Download PDFInfo
- Publication number
- CN108080347A CN108080347A CN201710889180.7A CN201710889180A CN108080347A CN 108080347 A CN108080347 A CN 108080347A CN 201710889180 A CN201710889180 A CN 201710889180A CN 108080347 A CN108080347 A CN 108080347A
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- CN
- China
- Prior art keywords
- blowing
- dust collector
- sprayer
- rubber
- rubber tubing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- Packaging Frangible Articles (AREA)
Abstract
A kind of blowing dust collector for semiconductor packaging device, including：Power-equipment, ventilation pipe, rubber tubing, blowing sprayer, fixing bracket, the blowing dust collector is arranged on effect producing line one side, the one side of production flowing water producing line i.e. before feed lead rail end to dispensing module, wherein, the pure air after being filtered in power-equipment sends it to load workshop by gas pipeline, contact front end with hose passages on gas pipeline is provided with valve, and the switch of gas is realized by valve.In the tail end insertion rubber tubing of blowing sprayer, multiple fixing brackets are installed with along effect producing line, the blowing sprayer after being connected with rubber tubing are fixed in the rotatable means on fixing bracket, blowing sprayer tilts down 40~60 °.Above-mentioned blowing dust collector can effectively blow down the dust granule that guide rail and frame are stained in itself, prevent it is follow-up upper piece when generate and tilt and crackle and other issues.
Description
Technical field
The invention belongs to technical field of semiconductor encapsulation, are specially that a kind of air blowing dedusting for semiconductor packaging device fills
It puts.
Background technology
Semiconductor manufacturing process is manufactured by wafer, wafer test, is tested after chip package and encapsulation and is formed.Semiconductor packages
Test refers to the process of to process to obtain individual chips according to product type and functional requirement by the wafer of test.In semiconductor
Popular equipment has up to tens of kinds in encapsulation field load (DA) workshop section, is divided according to manufacturer, just there is HITACHI,
SHINKAWA, ESEC, ASM, ACCURACY etc..The equipment of above-mentioned company, operation logic are all similar.Charging, dispensing, dress
Piece, discharging are to magazine (magazine), and load is greatly all in accordance with the process operation.
During load, the problems such as due to the air circulation of supplied materials and workshop, frame can produce in transmit process
Raw particle (particle) causes occur chip inclination or crack and other issues during thin chip upper piece.In order to evade this feelings
Condition can all install a blowning installation at load (bond) and be used for blowing away particle, and other parts do not have, such as
HITACHIDB800.So particle has simply been blown away at load, and just in non-dispensing product.If fruit product is a little
Glue product, in dispensing, point glue-line is stained with or has adsorbed particle and dust, then in load, blowning installation does not recur
Effect, can generate a series of load quality problems.
In order to solve the above-mentioned technical problem, the present invention proposes a kind of air blowing dedusting for semiconductor packaging device and fills
It puts, including：Power-equipment, ventilation pipe, rubber tubing, blowing sprayer, fixing bracket, the blowing dust collector are arranged on effect
The one side of production flowing water producing line before producing line one side, i.e. feed lead rail end to dispensing module, wherein, the mistake in power-equipment
Pure air after filter sends it to load workshop by gas pipeline, the contact on gas pipeline with hose passages
Front end is provided with valve, and the switch of gas is realized by valve.In the tail end insertion rubber tubing of blowing sprayer, along effect production
Line is installed with multiple fixing brackets, the blowing sprayer after being connected with rubber tubing is fixed on rotatable on fixing bracket
On device, blowing sprayer tilts down 40~60 °.Above-mentioned blowing dust collector can effectively blow down guide rail and frame is stained in itself
Dust granule, prevent it is follow-up upper piece when generate and tilt and crackle and other issues.
The content of the invention
A kind of blowing dust collector for semiconductor packaging device, including：Power-equipment 1, ventilation pipe 2, rubber tube
Road 3, blowing sprayer 4, fixing bracket 5, the blowing dust collector are arranged on effect producing line one side (i.e. feed lead rail end to dispensing
The one side in the production line section before module), pure air after filtering in power-equipment 1 by gas pipeline 2 by its
Load workshop is transmitted to, valve 21 is set with the contact front end of hose passages 3 in gas pipeline 2, by valve 21 come real
The switch of existing gas.In the tail end insertion rubber tubing of blowing sprayer 4, multiple fixing brackets 5 are installed with along effect producing line,
Blowing sprayer 4 after being connected with rubber tubing 3 is fixed in the rotatable means 51 on fixing bracket 5, blowing sprayer 4 is downward
40~60 ° are tilted, (fixing bracket and tumbler do not mark) as shown in Figure 1.
During frame feeding and rack are sent to dispensing module, guide rail surface, frame in itself can be due to supplied materials sheets
Air circulation in body or workshop and there is the deposition of dust and particle, between the production circuit before dispensing installation blow and remove
Dirt device and after adjusting the angle of inclination of blowing sprayer 4, can get to open position, using before production line unlatching by valve
The air of dust removal by filtration first blows down the dust of guide rail surface, particle, and the frame after follow-up feeding is avoided to be stained with guide rail surface
Dust granule.During frame feeding is sent to dispensing platform, blowing dust collector can by frame per se with dust
Grain is blown down when avoiding causing piece, and chip tilts or cracking and other issues.
Preferably, the blowing dust collector for semiconductor packaging device, the air pressure of blow gas in blowing sprayer 4
For 0.25~0.35kg/cm2.During air blowing dedusting, power that the gas of flowing generates is relied primarily on by guide rail and the powder on frame surface
Dirt particle is blown down, so the selection of air pressure is particularly important, air pressure too conference blows frame askew, influences subsequent operation；Air pressure
The small purpose for being difficult to realize air blowing dedusting.
Preferably, the blowing dust collector for semiconductor packaging device, is machined with multiple lists on rubber tubing 3
Face is connected with rubber branch to pipeline 31 at single side hole, and the wherein single side hole on plastic tube one end insertion rubber tubing 3 is another
For end insertion rubber branch to pipeline 31, the other end of rubber branch to pipeline 31 is connected with blowing sprayer 4.
By the setting in single side hole, the quantity of blowing sprayer 4 is added in the case where rubber tubing 3 need not be increased, is carried
High air blowing dust removing effects.
Preferably, the blowing dust collector for semiconductor packaging device, the diameter range of rubber tubing 3 is 0.5
~1cm.When pipe diameter is excessive, it is excessive that blowing sprayer 4 generates the air pressure needed during certain air blowing dusting, gas flow,
It causes to waste.
Preferably, the blowing dust collector for semiconductor packaging device, tumbler 51 include being provided with screw thread
The swing arm 511 of through hole, 1/4 arc-shaped slot plectane 512, wherein swing arm 511 are placed in the arc-shaped slot of 1/4 plectane 512, rotate dress
It puts 51 to be secured together by nut bolt component, 511 side of swing arm is equipped with groove 5111 in width and end set has bullet
Property snap ring 5112, the angled groove of lateral surface band of 1/4 arc-shaped slot plectane 512 passes through groove in thickness 5111 and angle and carves
The overlapping positions of line determine angle of inclination, and 4 jet front end of blowing sprayer is stuck in snap ring 5112.Due to blowing dust collector
Air blowing angle have direct effect to dust removing effects, so, by angle of inclination precision further improve dust removing effects.
Description of the drawings：
Specific embodiment is further described below in conjunction with the accompanying drawings, wherein：
Fig. 1 is the connection diagram of blowing dust collector involved in the present invention；
Fig. 2 is the tumbler structure diagram in the specific embodiment of the invention 1~3；
Primary structure number explanation
Following specific embodiment will be further illustrated the present invention with reference to above-mentioned attached drawing.
Specific embodiment
Case 1 is embodied：
A kind of blowing dust collector for semiconductor packaging device, including：Power-equipment 1, ventilation pipe 2, rubber tube
Road 3, blowing sprayer 4, fixing bracket 5, the blowing dust collector are arranged on effect producing line one side, i.e. feed lead rail end to dispensing
The one side in the production line section before module, wherein, the pure air after being filtered in power-equipment 1 passes through gas pipeline
2 send it to load workshop, set valve 21 with the contact front end of hose passages 3 in gas pipeline 2, pass through valve 21
To realize the switch of gas.In the tail end insertion rubber tubing of blowing sprayer 4, multiple fixed branch are installed with along effect producing line
Blowing sprayer 4 after being connected with rubber tubing 3 is fixed in the rotatable means 51 on fixing bracket 5, blowing sprayer 4 by frame 5
Tilt down 45 °.5 single side holes are machined on a slat gum pipeline 3, rubber branch is connected at single side hole to pipeline 31,
The single side hole other end wherein on plastic tube one end insertion rubber tubing 3 is inserted into rubber branch to pipeline 31, and rubber branch is to pipeline 31
The other end be connected with blowing sprayer 4.Tumbler 51 includes the swing arm 511, the 1/4 arc-shaped slot plectane that are provided with tapped through hole
512, wherein swing arm 511 is placed in the arc-shaped slot of 1/4 plectane 512, and tumbler 51 is fixed to one by nut bolt component
It rises, 511 side of swing arm is equipped with groove 5111 and flexible 5112, the 1/4 arc-shaped slot plectane 512 of snap ring of end set in width
The angled groove of lateral surface band, determine angle of inclination by the overlapping positions of groove in width 5111 and angle groove, blow
4 jet front end of nozzle is stuck in snap ring 5112.Since the air blowing angle of blowing dust collector has directly dust removing effects
Effect, so, by angle of inclination precision further improve dust removing effects.The air pressure of blow gas is in blowing sprayer 4
0.25kg/cm2, a diameter of 0.5cm of rubber tubing 3.
Above-mentioned blowing dust collector can effectively blow down the dust granule that guide rail and frame are stained in itself, prevent on follow-up chip
Inclination and crackle and other issues are generated during piece.
Case 2 is embodied：
A kind of blowing dust collector for semiconductor packaging device, including：Power-equipment 1, ventilation pipe 2, rubber tube
Road 3, blowing sprayer 4, fixing bracket 5, the blowing dust collector are arranged on effect producing line one side, i.e. feed lead rail end to dispensing
The one side in the production line section before module, wherein, the pure air after being filtered in power-equipment 1 passes through gas pipeline
2 send it to load workshop, set valve 21 with the contact front end of hose passages 3 in gas pipeline 2, pass through valve 21
To realize the switch of gas.In the tail end insertion rubber tubing of blowing sprayer 4, multiple fixed branch are installed with along effect producing line
Blowing sprayer 4 after being connected with rubber tubing 3 is fixed in the rotatable means 51 on fixing bracket 5, blowing sprayer 4 by frame 5
Tilt down 50 °.5 single side holes are machined on a slat gum pipeline 3, rubber branch is connected at single side hole to pipeline 31,
The single side hole other end wherein on plastic tube one end insertion rubber tubing 3 is inserted into rubber branch to pipeline 31, and rubber branch is to pipeline 31
The other end be connected with blowing sprayer 4.Tumbler 51 includes the swing arm 511, the 1/4 arc-shaped slot plectane that are provided with tapped through hole
512, wherein swing arm 511 is placed in the arc-shaped slot of 1/4 plectane 512, and tumbler 51 is fixed to one by nut bolt component
It rises, 511 side of swing arm is equipped with groove 5111 and flexible 5112, the 1/4 arc-shaped slot plectane 512 of snap ring of end set in width
The angled groove of lateral surface band, determine angle of inclination by the overlapping positions of groove in width 5111 and angle groove, blow
4 jet front end of nozzle is stuck in snap ring 5112.Since the air blowing angle of blowing dust collector has directly dust removing effects
Effect, so, by angle of inclination precision further improve dust removing effects.The air pressure of blow gas is in blowing sprayer 4
0.3kg/cm2, the diameter 0.75cm of rubber tubing 3.
Above-mentioned blowing dust collector can effectively blow down the dust granule that guide rail and frame are stained in itself, prevent on follow-up chip
Inclination and crackle and other issues are generated during piece.
Case 3 is embodied：
A kind of blowing dust collector for semiconductor packaging device, including：Power-equipment 1, ventilation pipe 2, rubber tube
Road 3, blowing sprayer 4, fixing bracket 5, the blowing dust collector are arranged on effect producing line one side, i.e. feed lead rail end to dispensing
The one side in the production line section before module, wherein, the pure air after being filtered in power-equipment 1 passes through gas pipeline
2 send it to load workshop, set valve 21 with the contact front end of hose passages 3 in gas pipeline 2, pass through valve 21
To realize the switch of gas.In the tail end insertion rubber tubing of blowing sprayer 4, multiple fixed branch are installed with along effect producing line
Blowing sprayer 4 after being connected with rubber tubing 3 is fixed in the rotatable means 51 on fixing bracket 5, blowing sprayer 4 by frame 5
Tilt down 60 °.5 single side holes are machined on a slat gum pipeline 3, rubber branch is connected at single side hole to pipeline 31,
The single side hole other end wherein on plastic tube one end insertion rubber tubing 3 is inserted into rubber branch to pipeline 31, and rubber branch is to pipeline 31
The other end be connected with blowing sprayer 4.Tumbler 51 includes the swing arm 511, the 1/4 arc-shaped slot plectane that are provided with tapped through hole
512, wherein swing arm 511 is placed in the arc-shaped slot of 1/4 plectane 512, and tumbler 51 is fixed to one by nut bolt component
It rises, 511 side of swing arm is equipped with groove 5111 and flexible 5112, the 1/4 arc-shaped slot plectane 512 of snap ring of end set in width
The angled groove of lateral surface band, determine angle of inclination by the overlapping positions of groove in width 5111 and angle groove, blow
4 jet front end of nozzle is stuck in snap ring 5112.Since the air blowing angle of blowing dust collector has directly dust removing effects
Effect, so, by angle of inclination precision further improve dust removing effects.The air pressure of blow gas is in blowing sprayer 4
0.35kg/cm2, a diameter of 1cm of rubber tubing 3.
Above-mentioned blowing dust collector can effectively blow down the dust granule that guide rail and frame are stained in itself, prevent on follow-up chip
Inclination and crackle and other issues are generated during piece.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
Cannot the limitation to the scope of the claims of the present invention therefore be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention
Protect scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (5)
1. a kind of blowing dust collector for semiconductor packaging device, including：Power-equipment, ventilation pipe, rubber tubing are blown
Gas nozzle, fixing bracket, which is arranged on effect producing line one side, before contact of the gas pipeline with hose passages
End sets valve, and the switch of gas is realized by valve, and the tail end of blowing sprayer is inserted into rubber tubing, is consolidated along effect producing line
Dingan County is equipped with multiple fixing brackets, it is characterised in that：Blowing sprayer behind connection rubber tube road be mounted on fixing bracket can
On tumbler, blowing sprayer tilts down 40~60 °.
2. blowing dust collector as described in claim 1, it is characterised in that：In blowing sprayer the air pressure of blow gas for 0.25~
0.35kg/cm2。
3. blowing dust collector as described in claim 1, it is characterised in that：Multiple single side holes are machined on rubber tubing,
Rubber branch is connected at single side hole to pipeline, the single side hole other end insertion rubber wherein on plastic tube one end insertion rubber tubing
Branch is connected with blowing sprayer to pipeline, rubber branch to the other end of pipeline.
4. blowing dust collector as described in claim 1, it is characterised in that：The diameter range of rubber tubing is 0.5~1cm.
5. blowing dust collector as described in claim 1, it is characterised in that：Tumbler by be provided with tapped through hole swing arm and
1/4 arc-shaped slot plectane forms, and swing arm is placed in the arc-shaped slot of 1/4 arc-shaped slot plectane and is fixed on by bolt and nut component
Together, wherein there are groove and the flexible snap ring of end set in width in swing arm side stroke, and 1/4 arc-shaped slot plectane lateral surface is carved with
Angle line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710889180.7A CN108080347A (en) | 2017-09-27 | 2017-09-27 | A kind of blowing dust collector for semiconductor packaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710889180.7A CN108080347A (en) | 2017-09-27 | 2017-09-27 | A kind of blowing dust collector for semiconductor packaging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108080347A true CN108080347A (en) | 2018-05-29 |
Family
ID=62171887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710889180.7A Pending CN108080347A (en) | 2017-09-27 | 2017-09-27 | A kind of blowing dust collector for semiconductor packaging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108080347A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109633220A (en) * | 2019-01-29 | 2019-04-16 | 江阴佳泰电子科技有限公司 | A kind of pre- purging formula wafer probe platform |
| CN114247851A (en) * | 2021-12-13 | 2022-03-29 | 广西大学 | Casting and cooling integrated device for gray cast iron production and application thereof |
| CN117253826A (en) * | 2023-11-14 | 2023-12-19 | 盐城芯丰微电子有限公司 | High-precision packaging test machine for integrated circuit chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109633220A (en) * | 2019-01-29 | 2019-04-16 | 江阴佳泰电子科技有限公司 | A kind of pre- purging formula wafer probe platform |
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| CN114247851A (en) * | 2021-12-13 | 2022-03-29 | 广西大学 | Casting and cooling integrated device for gray cast iron production and application thereof |
| CN114247851B (en) * | 2021-12-13 | 2023-09-26 | 广西大学 | Pouring and cooling integrated device for gray cast iron production and application thereof |
| CN117253826A (en) * | 2023-11-14 | 2023-12-19 | 盐城芯丰微电子有限公司 | High-precision packaging test machine for integrated circuit chip |
| CN117253826B (en) * | 2023-11-14 | 2024-02-23 | 江苏芯丰集成电路有限公司 | High-precision packaging test machine for integrated circuit chip |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 215164 Block C5 and C6, 88 Jixiang Road, Xukou Town, Wuzhong District, Suzhou City, Jiangsu Province Applicant after: SUZHOU NUOBAISI AUTOMATION TECHNOLOGY CO., LTD. Address before: 215164 First Floor Workshop, No. 9 Tangxi Road, Suzhou High-tech Zone, Jiangsu Province Applicant before: SUZHOU NUOBAISI AUTOMATION TECHNOLOGY CO., LTD. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180529 |
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| RJ01 | Rejection of invention patent application after publication |