CN108044243A - Laser Processing method for drilling and secondary fill system with complicated cavity workpiece - Google Patents

Laser Processing method for drilling and secondary fill system with complicated cavity workpiece Download PDF

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Publication number
CN108044243A
CN108044243A CN201711368511.9A CN201711368511A CN108044243A CN 108044243 A CN108044243 A CN 108044243A CN 201711368511 A CN201711368511 A CN 201711368511A CN 108044243 A CN108044243 A CN 108044243A
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CN
China
Prior art keywords
workpiece
powder
filled
laser processing
gas
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Pending
Application number
CN201711368511.9A
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Chinese (zh)
Inventor
贺斌
赵卫
田东坡
李朋
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Xi'an Micromach Technology Co ltd
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XiAn Institute of Optics and Precision Mechanics of CAS
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Application filed by XiAn Institute of Optics and Precision Mechanics of CAS filed Critical XiAn Institute of Optics and Precision Mechanics of CAS
Priority to CN201711368511.9A priority Critical patent/CN108044243A/en
Publication of CN108044243A publication Critical patent/CN108044243A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/144Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing particles, e.g. powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Abstract

The present invention relates to a kind of Laser Processing method for drilling, more particularly to a kind of Laser Processing method for drilling and secondary fill system with complicated cavity workpiece, carrier of the gas as powder particle object is used first, after powder particle object and gas uniformly mixing, blow into the workpiece cavity to be filled with complicated cavity;And Workpiece vibration to be filled is controlled during blowing, ensure that powder particle object is closely knit in the interior intracavitary filling of workpiece to be filled;Then Laser Processing drilling is carried out to filled workpiece;High pressure draught multi-angle is used to clean the inner cavity of workpiece to be cleaned to the part processed in step 2 again;Workpiece vibration to be cleaned is controlled in cleaning process simultaneously.Solve the problems, such as using when laser machining air film hole easily to air film hole opposite walls cause damage.

Description

Laser Processing method for drilling and secondary fill system with complicated cavity workpiece
Technical field
There is complicated cavity structure work the present invention relates to a kind of Laser Processing method for drilling more particularly to using Laser Processing The through hole of part, the method for straight slot category feature, it is more particularly to a kind of that the middle-size and small-size workpiece complicated cavity such as atomizer, blade is added The method of work and the auxiliary system being related to.
Background technology
Laser especially ultrafast laser hole fabrication techniques are the state-of-the-art technology means of the workpiece capillary processing such as hollow blade, however Since the cavity body structures such as hollow blade are complicated and size is smaller, cause the last meeting of laser beam in the process for laser machining drilling can not The opposite walls of institute's drilling are avoided damage to, which causes laser to process the skill of micropore on the workpiece with complicated cavity Art lagging in development breaks through the technical bottleneck without ripe technological means both at home and abroad at present.
A kind of method used at present is to close moment for being punched in hole laser, however this method can only weaken and can not Eliminate damage;The method for stopping laser using packing material inside complicated cavity is a kind of effective method, is had at present using powder The filling of last particulate matter stops the process of laser beam damage cavity opposite walls, however and cavity cavity it is complicated, packing material is very Difficulty is closely knit or even bend cavity can not fill by all lumen loadings.
Therefore, the Laser Processing method for drilling with labyrinth cavity work-piece is directed to there is an urgent need for a kind of at present, can swashed Inner wall surface damage is avoided in light process.
The content of the invention
The object of the present invention is to provide a kind of for the Laser Processing method for drilling with labyrinth cavity work-piece and auxiliary Fill system is helped, the method that vibration is aided with by Dual-Phrase Distribution of Gas olid realizes that powder particulate matter is filled out without dead angle densification in complicated cavity It fills, solves the problems, such as to damage using opposite walls when laser machining air film hole.
The technical solution of the present invention is to provide a kind of Laser Processing method for drilling with complicated cavity workpiece, including Following steps:
Step 1:Workpiece to be processed of the filling with complicated cavity
1.1:Using carrier of the gas as powder particle object, after powder particle object and gas uniformly mixing, blow to In workpiece cavity to be filled with complicated cavity;
1.2:Workpiece vibration to be filled is controlled during blowing, ensures interior intracavitary of the powder particle object in workpiece to be filled It fills closely knit;
Step 2:Laser Processing drilling is carried out to filled workpiece in step 1;
Step 3:The part processed in step 2 is cleared up
3.1:The inner cavity of workpiece to be cleaned is cleaned using high pressure draught multi-angle;
3.2:Workpiece vibration to be cleaned is controlled in cleaning process simultaneously.
Preferably, it is sufficient filling with to realize, workpiece to be filled or workpiece to be cleaned are on XOY plane along X-direction and Y Direction of principal axis staggered form vibrates;After the vibration settings time, adjust vibration frequency and change the intersection change rate of direction of vibration.
Preferably, above-mentioned powder particle object is high damage threshold, aspherical particle;Above-mentioned gas are compressed air or work Industry gas.
Preferably, above-mentioned powder particle object is AL2O3Or SIO2
The present invention also provides it is a kind of with complicated cavity workpiece Laser Processing drilling secondary fill system, it is special it Be in:Including powder particle object transport system, workpiece to be filled installation vibrational system and control system;
Above-mentioned powder particle object transport system includes powder feeder and powder separator, and the port of export of above-mentioned powder feeder is mixed by powder Interflow road is connected with powder separator, and above-mentioned powder separator includes N number of transfer passage, and the port of export of N number of transfer passage passes through delivery pipe point It is not connected with workpiece lumen to be filled;Wherein, N is the integer more than or equal to 1;
Above-mentioned workpiece to be filled installation vibrational system includes workbench, sets vibrating disk on the table and positioned at vibration Mounting disc on disk;For fixing workpiece to be filled, above-mentioned vibrating disk installs disc vibration for driving for above-mentioned mounting disc;
Above-mentioned control system includes industrial personal computer, and above-mentioned industrial personal computer is used to control the work of powder feeder and vibrating disk.
Preferably, in order to realize that stablizing for workpiece to be filled is fixed, installs fixture is provided in above-mentioned mounting disc, it is to be filled Workpiece is fixed on by installs fixture in mounting disc.
Preferably, above-mentioned mounting disc is circle, and above-mentioned installation folder is circumferential in mounting disc uniformly to arrange.
Preferably, above-mentioned industrial personal computer control vibrating disk can shake on plane XOY along X-direction and Y direction staggered form Dynamic, the plane where defining mounting disc is XOY plane.
Preferably, delivery pipe is equipped with interfacing conveyor with workpiece lumen connectivity part to be filled, and interfacing conveyor includes coaxial arrangement Dual-Phrase Distribution of Gas olid input port and gas vent, above-mentioned Dual-Phrase Distribution of Gas olid input port connected with delivery pipe;The aperture of above-mentioned gas vent Less than or equal to powder particle object average diameter.
Preferably, above-mentioned powder feeder top is provided with dress powder portion, is provided with to connect compressed gas in powder feeder main body Or the interface of industrial gas cylinder;Interface is additionally provided with air pressure valve or flow valve;
The turntable for powder feeding is additionally provided in powder feeder;
Industrial personal computer controls gas pressure or flow by the air pressure valve or flow valve for controlling air-path interface, and can control Rotary speed.
The beneficial effects of the invention are as follows:
1st, the present invention, which is devised, is aided with the method for vibration using Dual-Phrase Distribution of Gas olid powder particle object is blown into complex-shaped surface mould The method and system of workpiece lumen, using this method can realize powder particle object in complex-shaped surface mould workpiece all sites it is equal Even, fine and close filling, filling consistency is up to 98%, so as to effectively prevent that laser beam is (minimum in the cavity of narrow and small distance Distance is in the range of 0.3mm) wound the opposite walls at work pieces process position;
2nd, the present invention includes powder separator, can once realize the filling of multiple workpiece simultaneously;
3rd, the configuration of the present invention is simple, it is easy to operate, it is at low cost.
Description of the drawings
Fig. 1 is the secondary fill system schematic diagram of the Laser Processing drilling with complicated cavity workpiece;
Fig. 2 is schematic diagram of the Dual-Phrase Distribution of Gas olid in the fill path of hollow blade inner.
Reference numeral is in figure:1- powder feeders, 2- powder mixing runners, 3- powder separators, 4- delivery pipes, 5,10,11,15- Interfacing conveyor, 6,9,12,16- hollow blade installs fixtures, 7,8,13,17- hollow blades, 14- Dual-Phrase Distributions of Gas olid, 18- installation Disk, 19- vibrating disks, 20- workbench, 21- industrial personal computers, the first cavitys of 23-, 24- gussets, 25- gas vents, 26- Dual-Phrase Distributions of Gas olid Input port, 27- output gas flows, the 3rd cavitys of 28-, the second cavitys of 29-, 30- interfaces.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
The present invention proposes a kind of inner utilization Laser Processing through hole, straight slot in hollow blade etc. with complicated cavity workpiece The method of category feature realizes powder particle object without the fine and close filling in dead angle to prevent from wounding work pieces process position in laser processing procedure Opposite walls.
This method blows particulate matter simultaneously using air-flow before starting to laser machine drilling into the cavity of workpiece to be processed Workpiece is vibrated, achievees the effect that the filling of cavity endoparticle object is closely knit, after filling, carries out Laser Processing drilling process.Processing After drilling, using high pressure draught multi-angle cleaning workpiece inner cavity, while workpiece is vibrated so that workpiece inside cavity is without particle Object remains, so as to complete entire laser punching process.
To achieve the above objectives, by taking the manufacture of hollow blade air film hole as an example, the present invention uses following system and technical solution It is achieved.
The present invention provides a kind of Laser Processing method for drilling being directed to labyrinth cavity work-piece and auxiliary fillings System.
It will be seen from figure 1 that the system includes 3 important systems:Control system, hollow blade installation vibrational system, powder Last particulate matter transport system.
Control system mainly includes industrial personal computer 21, and industrial personal computer 21 installs the vibrating disk in vibrational system with hollow blade respectively 19 and powder particle object transport system in powder feeder 1 be electrically connected, for controlling powder particle object transport system and hollow leaf Piece installs the work of vibrational system.
Hollow blade installation vibrational system mainly includes workbench 20, vibrating disk 19 and mounting disc 18, and vibrating disk 19 is located at On workbench 20, vibration can be intersected along X-axis and Y-axis, industrial personal computer 21 can adjust magnitude of vibrations and the vibration side of vibrating disk 19 To.Mounting disc 18 is located on vibrating disk 19, for installing hollow blade 7,8,13,17 to be filled.Mounting disc 18 is equipped with hollow Blade installs fixture, there are four hollow blade installs fixture 6,9,12,16, hollow leaves to be processed for installation in one embodiment Piece is fixed in hollow blade installs fixture.
Powder particle object transport system mainly includes powder feeder 1, powder mixing runner 2, powder separator 3 and delivery pipe 4, send 1 top of powder device is provided with the dress powder portion for the powder particle object that can be put into anti-machining damage, is provided with to connect in 1 main body of powder feeder Connect the interface 30 of compressed gas or industrial gas cylinder.Compressed gas or industrial gasses are inputted by the interface in powder feeder 1, powder Grain object is added in by filling powder portion in powder feeder 1, and mixed uniformly Dual-Phrase Distribution of Gas olid is formed in powder feeder 1.It is also set in powder feeder 1 It is useful for the turntable (not shown) of powder feeding.Industrial personal computer 21 can control gas by the air pressure valve or flow valve for controlling air-path interface Pressure or flow, and rotary speed can be controlled to reach the real-time control to Dual-Phrase Distribution of Gas olid.Powder feeder 1 and powder separator 3 It is connected by powder mixing runner 2, powder separator 3 is used to the Dual-Phrase Distribution of Gas olid of formation being divided into multiply, to realize to multiple processing The transmission of workpiece.The port of export of powder separator 3 is connected by delivery pipe 4 with hollow blade inner, in hollow blade and 4 phase of delivery pipe The position of connection be equipped with interfacing conveyor, in one embodiment, be respectively equipped in four hollow blades interfacing conveyor 5,10, 11、15.Interfacing conveyor include coaxial arrangement Dual-Phrase Distribution of Gas olid input port 26 and gas vent 25, Dual-Phrase Distribution of Gas olid input port 26 with Delivery pipe 4 is connected, and Dual-Phrase Distribution of Gas olid is inputted by input port 26 in hollow blade cavity, and gas is discharged via gas vent 25.Row The diameter of stomata 25 is equal to or slightly less than particle diameter, ensures that powder particle object is stayed in cavity in Dual-Phrase Distribution of Gas olid.Powder Grain object is high damage threshold, aspherical particle.
Below by taking the manufacture of blade air film hole as an example, specific process is described:
(1) fixture clamping and calibration:Blade fixture is installed on machine tooling platform, utilizes distance measuring sensor and calibrated bolck Demarcate fixture and lathe coordinate system;
(2) blade is filled;
(3) blade clamping:By the blade back of blade towards clamp locating pin one side, blade tenon one end abuts positioning pin, so Fastening clips afterwards, until blade does not rock;
(4) positioning of blade air film hole and amendment:Blade is positioned using adaptive location software, determines all air films The machining coordinate in hole, the focal position that all air film holes are corrected by distance measuring sensor show that the new processing of all air film holes is sat Mark;
(5) blade air film hole machined:Blade is processed using the laser, coordinate and scanning process parameter that set, Cooperation penetrates detection device and the situation of punching is detected.The basic technological parameters being related to include:Laser power, repetition rate, Pulsewidth, the scanning linear velocity of helical scanning, starting angular aperture, the angular aperture that terminates, Single Slice Mode time, the individual layer amount of feeding, scanning Total number of plies etc.;
(6) air film hole inside diameter measurement:Air film hole is detected using feeler gauge, ensures the requirements for meeting aperture;
(7) leaf cleaning.
Blade filling step is described in detail referring to Fig. 1:
Hollow blade is installed to mounting disc, is fastened by hollow blade installs fixture, delivery pipe 4 is connected to hollow Blade Dual-Phrase Distribution of Gas olid input port 26, it is ensured that connecting interface seals;
Powder particle object is packed into powder feeder 1, industrial personal computer 21 controls compressed gas input pressure flow and rotary speed, with Mixed uniformly Dual-Phrase Distribution of Gas olid is formed in powder feeder 1;
21 Vibration on Start-up disk 19 of industrial personal computer, the Dual-Phrase Distribution of Gas olid 14 that control powder feeder 1 transfers out are delivered to sky through powder separator The input port 26 of lobus cardiacus piece 22.As shown in Figure 2, multiple gussets 24 are provided in hollow blade 22,24 surface of gusset is provided with Multiple small protruding portions form the complicated cavity structure in hollow blade 22, more clearly to illustrate, show the muscle for plane Plate, wherein, larger ellipse represents filler particles, smaller circular expression air bolus in cavity.By vibrating disk 19 along X-axis It is vibrated with the intersection of Y-axis, Dual-Phrase Distribution of Gas olid 14 was conveyed through the first cavity 23, by the bend of connection, into the second cavity 29, and finally in the case where vibration is aided in into the 3rd cavity 28, realize in the cavity tightly packed without dead angle.In Dual-Phrase Distribution of Gas olid Gas 27 discharged in whole process by gas vent 25, ensure 3 lumen loadings it is closely knit.
Specific filling process is as follows:
1) it is, as shown in Figure 1, each hollow blade 7,8,13,17 is horizontal by hollow blade installs fixture 6,9,12,16 It is fixed in mounting disc 18, and delivery pipe 4 is connected to the powder interfacing conveyor 5,10,11,15 of hollow blade;
2), by Al2O3Powder is fitted into powder feeder 1, wherein, Al2O3Powder can be that grain size is 150-200 μm non-circular Powder particle object.Industrial personal computer 21 controls gas path control valve that compressed air is passed through in powder feeder 1 simultaneously, to be formed in powder feeder Mixed uniformly Dual-Phrase Distribution of Gas olid.The Dual-Phrase Distribution of Gas olid mixed is sprayed from powder flow channel 2.Powder feeding rate and air pressure can be by works The programme-control of control machine 21 is adjusted, and in one embodiment, compressed gas air pressure can be 0.3-0.8MPa, powder feeding rate Can be 50-200g/min.Dual-Phrase Distribution of Gas olid can uniformly be divided into 4 parts or more parts by powder separator 3;
3), 21 Vibration on Start-up disk 19 of industrial personal computer controls the vibration of vibrating disk 19, and mounting disc 18 is under the action of vibrating disk 19 It is vibrated on plane XOY along X-direction and Y direction staggered form;
Dual-Phrase Distribution of Gas olid 14 is delivered to the input port 26 of hollow blade 22 by delivery pipe 4.Dual-Phrase Distribution of Gas olid 14 is in two-phase The driving of gas pressure is lower into the first cavity 23, and the bend by connection is delivered to successively in the second cavity 29 and the 3rd cavity 28. With the continuation of filling process, vibration frequency can be accelerated every 5-10 seconds and change the intersection change rate of direction of vibration to realize It is efficient tightly packed.
As shown in Fig. 2, the gas 27 in Dual-Phrase Distribution of Gas olid is discharged by gas vent 25, ensure that 3 lumen loadings are closely knit.Row The aperture of stomata is less than or equal to grain size average diameter and ensures that particle is stayed in cavity in Dual-Phrase Distribution of Gas olid.

Claims (10)

1. a kind of Laser Processing method for drilling with complicated cavity workpiece, which is characterized in that comprise the following steps:
Step 1:Workpiece to be processed of the filling with complicated cavity
1.1:Using carrier of the gas as powder particle object, after powder particle object and gas uniformly mixing, blow to In the workpiece cavity to be filled of complicated cavity;
1.2:Workpiece vibration to be filled is controlled during blowing, ensures that powder particle object is filled in the interior intracavitary of workpiece to be filled It is closely knit;
Step 2:Laser Processing drilling is carried out to filled workpiece in step 1;
Step 3:The part processed in step 2 is cleared up
3.1:The inner cavity of workpiece to be cleaned is cleaned using high pressure draught multi-angle;
3.2:Workpiece vibration to be cleaned is controlled in cleaning process simultaneously.
2. the Laser Processing method for drilling according to claim 1 with complicated cavity workpiece, it is characterised in that:It is to be filled Workpiece or workpiece to be cleaned vibrate on XOY plane along X-direction and Y direction staggered form;After the vibration settings time, adjustment is shaken Dynamic frequency and the intersection change rate for changing direction of vibration.
3. the Laser Processing method for drilling according to claim 2 with complicated cavity workpiece, it is characterised in that:The powder Last particulate matter is high damage threshold, aspherical particle;The gas is compressed air or industrial gasses.
4. the Laser Processing method for drilling according to claim 3 with complicated cavity workpiece, it is characterised in that:The powder Last particulate matter is AL2O3Or SIO2
5. a kind of secondary fill system of the Laser Processing drilling with complicated cavity workpiece, it is characterised in that:Including powder Grain object transport system, workpiece to be filled installation vibrational system and control system;
The powder particle object transport system includes powder feeder (1) and powder separator (3), and the port of export of the powder feeder (1) passes through Powder mixing runner (2) is connected with powder separator (3), and the powder separator (3) includes N number of transfer passage, the outlet of N number of transfer passage End is connected by delivery pipe (4) with workpiece lumen to be filled respectively;Wherein, N is the integer more than or equal to 1;
The workpiece to be filled installation vibrational system include workbench (20), the vibrating disk (19) being arranged on workbench (20) and Mounting disc (18) on vibrating disk (19);The mounting disc (18) is used to fix workpiece to be filled, the vibrating disk (19) For mounting disc (18) to be driven to vibrate;
The control system includes industrial personal computer (21), and the industrial personal computer (21) is used to control powder feeder (1) and vibrating disk (19) Work.
6. the secondary fill system of the Laser Processing drilling according to claim 5 with complicated cavity workpiece, feature It is:Installs fixture is provided on the mounting disc (18), workpiece to be filled is fixed on by installs fixture in mounting disc (18).
7. the secondary fill system of the Laser Processing drilling according to claim 6 with complicated cavity workpiece, feature It is:The mounting disc (18) is circle, and the installation folder is circumferential in mounting disc (18) uniformly to arrange.
8. the secondary fill system of the Laser Processing drilling according to claim 7 with complicated cavity workpiece, feature It is:Industrial personal computer (21) the control vibrating disk (19) can be vibrated on plane XOY along X-direction and Y direction staggered form, Plane where defining mounting disc (18) is XOY plane.
9. the secondary fill system of the Laser Processing drilling with complicated cavity workpiece according to claim 5-8 is any, It is characterized in that:Delivery pipe (4) is equipped with interfacing conveyor with workpiece lumen connectivity part to be filled, and interfacing conveyor includes coaxial arrangement Dual-Phrase Distribution of Gas olid input port (26) and gas vent (25), the Dual-Phrase Distribution of Gas olid input port (26) connect with delivery pipe (4);It is described The aperture of gas vent (25) is less than or equal to powder particle object average diameter.
10. the secondary fill system of the Laser Processing drilling according to claim 9 with complicated cavity workpiece, feature It is:Powder feeder (1) top is provided with dress powder portion, is provided with to connect compressed gas or work in powder feeder (1) main body The interface of industry gas cylinder;Interface is additionally provided with air pressure valve or flow valve;
The turntable for powder feeding is additionally provided in powder feeder (1);
Industrial personal computer (21) controls gas pressure or flow by the air pressure valve or flow valve for controlling air-path interface, and can control Rotary speed.
CN201711368511.9A 2017-12-18 2017-12-18 Laser Processing method for drilling and secondary fill system with complicated cavity workpiece Pending CN108044243A (en)

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Application Number Priority Date Filing Date Title
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Cited By (5)

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CN110153426A (en) * 2019-06-24 2019-08-23 中国航发动力股份有限公司 A kind of increasing material manufacturing part micro hole manufacturing method
CN112828479A (en) * 2020-12-31 2021-05-25 广东中科微精光子制造科技有限公司 Automatic filling device
CN113634872A (en) * 2021-08-31 2021-11-12 西安交通大学 Online monitoring processing method and system for laser processing cavity
CN113634873A (en) * 2021-08-31 2021-11-12 西安交通大学 Laser processing rear wall combined protection method and system based on interferometry
CN114273802A (en) * 2020-09-27 2022-04-05 中国科学院宁波材料技术与工程研究所 Laser drilling back injury protection method and device

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110153426A (en) * 2019-06-24 2019-08-23 中国航发动力股份有限公司 A kind of increasing material manufacturing part micro hole manufacturing method
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CN112828479A (en) * 2020-12-31 2021-05-25 广东中科微精光子制造科技有限公司 Automatic filling device
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CN113634872A (en) * 2021-08-31 2021-11-12 西安交通大学 Online monitoring processing method and system for laser processing cavity
CN113634873A (en) * 2021-08-31 2021-11-12 西安交通大学 Laser processing rear wall combined protection method and system based on interferometry
CN113634873B (en) * 2021-08-31 2023-07-07 西安交通大学 Interferometry-based laser processing rear wall combined protection method and system

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