CN101071270A - Colloid pump for spin-coated developing device - Google Patents
Colloid pump for spin-coated developing device Download PDFInfo
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- CN101071270A CN101071270A CN 200610046529 CN200610046529A CN101071270A CN 101071270 A CN101071270 A CN 101071270A CN 200610046529 CN200610046529 CN 200610046529 CN 200610046529 A CN200610046529 A CN 200610046529A CN 101071270 A CN101071270 A CN 101071270A
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Abstract
This invention relates in the lithography process used in photoresist coating device for a specific track-absorbed plastic enhancement equipment used plastic pump, including in the road were set diaphragm pump, on-off valve, to suction valve, divide Pump and plastic bottles connectivity to suction valve with a plastic mouth connectivity. The present invention controlled diaphragm pump with gas-off valve and suction valve to the suction to complete the whole work of plastic sealant can be smoothly completed Fenjiao - off - to absorption function, control modules and plastic pump module can be reliable interconnected , coordinate and complete the work in the use of performance achieved under the premise that reduced the cost of production and realized the localization of plastic pump. The invention of plastic pump system is mainly applied to the field of semiconductor manufacturing.
Description
Technical field
The present invention relates to be applied to the photoresist applying device in the photoetching process, be specially a kind of rail mounted colloid pump for spin-coated developing device.
Background technology
The application of photoetching process is very extensive, and for example all semiconductor elements, photovalve etc. all need to use photoetching process with required electronic component and circuit, transferring on the substrate (wafer or glass substrate) in layer.Generally speaking, the basic technology of photoetching is made of three big steps such as photoresist coating, exposure and developments.Because photoresist contains solvent, make photoresist itself to exist with the form of liquid state, therefore in the photoresist working procedure of coating, utilize the mode of high speed rotating mostly, be coated on photoresist on the substrate uniformly by centrifugal force, a layer thickness is even, tack is strong to form aspire to substrate surface, and does not have the photoresist layer of any defective.
The glue pump is the critical component in even glue/toning system, and it is mainly used in resist coating.Original glue pump performance is good, precision is high, but price is relatively expensive, and not all use producer can both accept.Consider that rail mounted spares the market orientation of glue/developing apparatus, the glue pump that seek a low cost, function admirable, has an independent intellectual property right just seems especially important.Can carry out because be related to the exploitation of complete machine, so significant.
Summary of the invention
The object of the present invention is to provide a kind of rail mounted colloid pump for spin-coated developing device, this glue pump operated easy to use, cost is low.
Technical scheme of the present invention is:
A kind of colloid pump for spin-coated developing device is included in the membrane pump, on-off valve, the suck back valve that set gradually on the pipeline, and membrane pump is communicated with the glue bottle, and suck back valve is communicated with gum outlet.
Source of the gas of the present invention divides three the tunnel, is communicated with membrane pump, on-off valve, suck back valve respectively.
Source of the gas of the present invention is provided with air pressure regulator with the pipeline that membrane pump, on-off valve, suck back valve are communicated with.
Source of the gas of the present invention is provided with three-way solenoid valve with the pipeline that membrane pump, on-off valve, suck back valve are communicated with.
Three-way solenoid valve of the present invention links to each other with single chip machine controlling circuit, the control signal output of single-chip microcomputer, and the control three-way solenoid valve opens and closes, and single-chip microcomputer can link to each other with human-computer interaction interface.
The invention has the beneficial effects as follows:
1, the present invention finishes whole suction glue with gas control membrane pump cooperation on-off valve and suck back valve and plays glue work, can finish spray glue-shutoff-resorption function smoothly, and control module and glue pump module can interconnect reliably, coordinate to finish the work.
2, the advantage of glue pump maximum of the present invention is a price, and a complete set of glue pump aggregate price is no more than 4000 yuans, has reduced production cost under the prerequisite of usability greatly reaching, and has realized the production domesticization of glue pump.
3, glue pumping system of the present invention mainly is applicable to the semiconductor production field.
Description of drawings
Fig. 1 is a structural representation of the present invention.Among the figure, 1, source of the gas; 2, filtrator; 3, air pressure regulator; 4, glue bottle; 5, membrane pump; 6, on-off valve; 7, suck back valve; 8, three-way solenoid valve; 9, air pressure regulator; 10, three-way solenoid valve; 11, air pressure regulator.
Fig. 2 is the system principle diagram at place of the present invention.
Fig. 3 is on-off valve of the present invention, suck back valve, membrane pump potential pulse synoptic diagram.
Embodiment
Shown in Fig. 1-2, the present invention mainly is made of membrane pump 5, on-off valve 6, suck back valve 7 etc., cooperates the cooperating of on-off valve 6 and suck back valve 7 to finish whole suction glue by gas control membrane pump 5 and plays glue work.Pressurized air from source of the gas 1, filter the back through filter 2 and divide three the tunnel, the first via enters membrane pump 5 through air pressure regulator (reduction valve) 3, by the switch of three-way solenoid valve in the control membrane pump, by the opening and closing of pressurized air realization membrane pump, the compressed-air actuated pressure in this road is 0.15MPa; The second the tunnel enters on-off valve 6 through air pressure regulator (reduction valve) 9, three-way solenoid valve 8, by the switch of control three-way solenoid valve 8, realizes the opening and closing of on-off valve 6 by pressurized air, and the compressed-air actuated pressure in this road is 0.4MPa; Third Road enters suck back valve 7 through air pressure regulator (reduction valve) 11, three-way solenoid valve 10, and by the switch of control three-way solenoid valve 10, by the opening and closing of pressurized air realization suck back valve 7, the compressed-air actuated pressure in this road is 0.4MPa.Above data are the operation state values that are illustrated in a kind of glue, in the condition downforce of glue different viscosities also along with adjustment; These group data are only as a reference data amount.
As shown in Figure 2, the present invention can carry out initialized parameter (comprise pulsed frequency and each pulse beat the glue amount of glue) to single-chip microcomputer by human-computer interaction interface and set, behind the signal that single-chip microcomputer is accepted to transmit from the device context communication bus, control the amount of glue and the parameter of work is sprayed glue according to order; Single-chip microcomputer detects the relevant external signal of operate outside and comes detected state normal before spray glue, send control signal and give three-way solenoid valve, drives membrane pump, on-off valve, suck back valve, sprays glue then.
As shown in Figure 3, wherein (a) is the voltage on the solenoid valve in the control on-off valve, illustrates that this state solenoid valve opens; (b) be the voltage on the solenoid valve in the suck back valve, illustrate that this state solenoid valve opens, prepare resorption; (c) be the potential pulse on the solenoid valve in the membrane pump, membrane pump be described when every pulse value, its work once.
The principal feature and the principle of glue pump of the present invention have:
The vacuum chamber that forms when 1, utilizing membrane pump 5 interior diaphragms to move down with atm difference of formation in the glue bottle 4, thereby is pressed into glue in the membrane pump 5, is cooperating liquid on-off valve 6 to finish and is dripping glue work.
2, in order to prevent that glue from solidifying in the volatilization of line portals external cause solvent, influence is worked normally, has added the resorption unit especially behind on-off valve 6, with the adjustable resorption that carries out of the glue of gum outlet, effectively prevents the problems referred to above by suck back valve 7.
3, adopt pulse signal control glue pump work, the frequency of pulse signal and number can be set, and make the glue flow speed stability by frequency of utilization control, and it is controllable that the control by pulse realizes that flow accuracy reaches 0.1ml;
4, have friendly human-computer interaction interface, easy and simple to handle;
5, whole glue pump is easy to use, the intellectuality control during the employing single-chip microcomputer is realized using.
The detailed operation process of this glue pump is as follows:
Three-way solenoid valves in the external power control membrane pump 5 are opened, and diaphragms in the membrane pump 5 are moved down form a vacuum chamber, and itself and the external world have formed an atm difference like this.At this moment this atm difference has been pressed into glue in the membrane pump 5.After glue was inhaled into membrane pump 5, three-way solenoid valve was opened and can be made pressurized air be imported into on-off valve 6, and then the switching of control on-off valve 6 realizes that glue flows.Because this glue pumping system is mainly used in the semi-conductive production, so precision prescribed is higher, the present invention also has the resorption function of glue, and its principle to the control break-make is similar, utilizes three-way solenoid valve to open pressurized air is entered in the suck back valve, finishes the resorption process.The present invention adds the experiment of resorption effect, can finish the predetermined course of work promptly fully in experiment: pump glue → stop pump glue → shutoff is the resorption glue simultaneously.Shuttoff Valve when stopping pump glue, the while resorption, the good results are evident for resorption (it is interior to suck back pipe to the outer liquid of pipe when air pressure is big).
Claims (6)
1, a kind of colloid pump for spin-coated developing device is characterized in that: be included in the membrane pump (5), on-off valve (6), the suck back valve (7) that set gradually on the pipeline, membrane pump (5) is communicated with glue bottle (4), and suck back valve (7) is communicated with gum outlet.
2, according to the described colloid pump for spin-coated developing device of claim 1, it is characterized in that: source of the gas divides three the tunnel to be communicated with membrane pump (5), on-off valve (6), suck back valve (7) respectively.
3, according to the described colloid pump for spin-coated developing device of claim 2, it is characterized in that: source of the gas is provided with air pressure regulator with the pipeline that membrane pump (5), on-off valve (6), suck back valve (7) are communicated with.
4, according to the described colloid pump for spin-coated developing device of claim 2, it is characterized in that: source of the gas is provided with three-way solenoid valve with the pipeline that membrane pump (5), on-off valve (6), suck back valve (7) are communicated with.
5, according to the described colloid pump for spin-coated developing device of claim 4, it is characterized in that: three-way solenoid valve links to each other with single chip machine controlling circuit, the control signal output of single-chip microcomputer, and the control three-way solenoid valve opens and closes.
6, according to the described colloid pump for spin-coated developing device of claim 5, it is characterized in that: single-chip microcomputer links to each other with human-computer interaction interface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610046529 CN101071270A (en) | 2006-05-10 | 2006-05-10 | Colloid pump for spin-coated developing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610046529 CN101071270A (en) | 2006-05-10 | 2006-05-10 | Colloid pump for spin-coated developing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101071270A true CN101071270A (en) | 2007-11-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610046529 Pending CN101071270A (en) | 2006-05-10 | 2006-05-10 | Colloid pump for spin-coated developing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101071270A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101738868B (en) * | 2008-11-14 | 2012-07-25 | 沈阳芯源微电子设备有限公司 | High-precision photoresist dispensing pump control device and control method thereof |
| CN103645607A (en) * | 2013-12-19 | 2014-03-19 | 合肥京东方光电科技有限公司 | Gluing system |
| CN107991914A (en) * | 2016-10-27 | 2018-05-04 | 沈阳芯源微电子设备有限公司 | A kind of SCM Based switch suck back valve numerical control system and its control method |
-
2006
- 2006-05-10 CN CN 200610046529 patent/CN101071270A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101738868B (en) * | 2008-11-14 | 2012-07-25 | 沈阳芯源微电子设备有限公司 | High-precision photoresist dispensing pump control device and control method thereof |
| CN103645607A (en) * | 2013-12-19 | 2014-03-19 | 合肥京东方光电科技有限公司 | Gluing system |
| CN103645607B (en) * | 2013-12-19 | 2016-09-07 | 合肥京东方光电科技有限公司 | coating system |
| CN107991914A (en) * | 2016-10-27 | 2018-05-04 | 沈阳芯源微电子设备有限公司 | A kind of SCM Based switch suck back valve numerical control system and its control method |
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| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |