CN108034361A - A kind of preparation method of acidic alumina polishing fluid - Google Patents

A kind of preparation method of acidic alumina polishing fluid Download PDF

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Publication number
CN108034361A
CN108034361A CN201711394439.7A CN201711394439A CN108034361A CN 108034361 A CN108034361 A CN 108034361A CN 201711394439 A CN201711394439 A CN 201711394439A CN 108034361 A CN108034361 A CN 108034361A
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China
Prior art keywords
preparation
proportion
container
sufficiently stirred
add
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CN201711394439.7A
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Chinese (zh)
Inventor
王田军
何伟东
宁润东
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Huizhou City Mitelun Technology Co Ltd
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Huizhou City Mitelun Technology Co Ltd
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Priority to CN201711394439.7A priority Critical patent/CN108034361A/en
Publication of CN108034361A publication Critical patent/CN108034361A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The invention discloses a kind of preparation method of acidic alumina polishing fluid, following steps are specifically included:(1), aluminium oxide is weighed in proportion to add in container, stirs evenly, makes aluminium oxide fully dispersed in water, discharges air in powder;(2), dispersant is weighed in proportion to add in container, is stirred evenly;Solution mobility is set to improve;(3), suspending agent is weighed in proportion, is slowly added in container, is sufficiently stirred;Solution surface seems more bright at this time;(4), weigh successively in proportion triethanolamine, monoethanolamine add container in, be sufficiently stirred;(5), preservative is weighed in proportion to add in container, is sufficiently stirred;(6), corrosion inhibiting and descaling agent is weighed in proportion and adds container, is sufficiently stirred;(7), add boric acid or tartaric acid adjusts solution ph, be sufficiently stirred, adjust pH value between 3~5.The preparation method step of the present invention is simple, and involved machinery equipment is few, and the cost of raw material is low, suitable for mass production.

Description

A kind of preparation method of acidic alumina polishing fluid
Technical field
The present invention relates to composition preparing technical field, more particularly to a kind of preparation method of acidic alumina polishing fluid.
Background technology
With the development of electronic product, to the surface quality requirements of the metal products such as mobile phone, tablet computer, wrist-watch increasingly Height, consumer are also not content with the visual effect that general anodic oxidation colored zone comes.Chemical Mechanical Polishing Technique (CMP), makes gold Metal surface can reach certain brightness, and metal can be made to have mirror effect, be by the mechanical abrasive action of abrasive particle and oxidation The chemical action of agent organically combines, it can be achieved that ultraprecise not damaged surface processes.The performance of polishing fluid has CMP effects The dispersed homogeneous degree of abrasive size and abrasive material in very important role and influence, particularly polishing fluid, which directly affects, to be polished The brightness in face.Therefore the configuration to the polish abrasive such as abrasive material such as aluminium oxide, silica, carborundum, which carries out research, has very Important meaning.The present invention relates to a kind of collocation method of alumina polishing solution, traditional alumina polishing solution is generally alkalescence Mixed liquor, pH value is more than 12, to there is very big injury effect using equipment.
The content of the invention
It is an object of the invention to provide a kind of preparation method of acidic alumina polishing fluid.
To solve above technical problem, the present invention provides a kind of preparation method of acidic alumina polishing fluid, including following Step:
(1), aluminium oxide is weighed in proportion to add in container, stirs evenly, makes aluminium oxide fully dispersed in water, discharges powder Air in body;
(2), dispersant is weighed in proportion to add in container, is stirred evenly;Solution mobility is set to improve;
(3), suspending agent is weighed in proportion, is slowly added in container, is sufficiently stirred;Solution surface seems more bright at this time It is bright;
(4), weigh successively in proportion triethanolamine, monoethanolamine add container in, be sufficiently stirred;
(5), preservative is weighed in proportion to add in container, is sufficiently stirred;
(6), corrosion inhibiting and descaling agent is weighed in proportion and adds container, is sufficiently stirred;
(7), add boric acid or tartaric acid adjusts solution ph, be sufficiently stirred, adjust pH value between 3~5.
Preferably, aluminium oxide described in step (1) is Alpha-alumina, in 10000 mesh of mesh number position, 12000 mesh, 15000 mesh One kind;The higher alumina particle of mesh number is smaller, and friction coefficient is bigger during polishing, friction velocity lifting, so that Improve polishing efficiency and polishing brightness.
Preferably, dispersant described in step (2) is polyethylene glycol 200 or polyethylene glycol 400.
Preferably, suspending agent described in step (3) is industrial xanthans.
Preferably, preservative described in step (5) is preferred Kathon CG DL-T20.
Preferably, corrosion inhibiting and descaling agent described in step (6) is seen sour (ATMP), 1-hydroxy ethylidene-1,1-diphosphonic acid for amino trident two (HEDP), ethylene diamine tetra methylene phosphonic acid (EDTMP), diethylenetriamine pentamethylphosphonic acid (DTPMP), 2 one phosphonic acid butanes one L, one or more mixing in 2,4 one tricarboxylic acids (PBTCA), 2- hydroxyl phosphino- acetic acid (HPAA).
Preferably, the mixing time of step (1) is 10min.
Preferably, the mixing time in step (2) is 30min.
Obtained by a kind of above-mentioned preparation method of alumina polishing solution.
Alumina polishing solution obtained by above-mentioned preparation method is before metal electron product anodic oxidation in polishing field Using.
The preparation method step of the present invention is simple, and involved machinery equipment is few, and the cost of raw material is low, suitable for batch metaplasia Production.
Embodiment
The technical solution in the embodiment of the present invention is clearly and completely described below in conjunction with specific embodiment.
Embodiment 1
The alumina powder of 20 parts of 10000 mesh is taken, is added in 72.8 parts of pure water, is sufficiently stirred 10min, adds 0.4 The dispersant of part, adds 0.1 part of xanthans, is sufficiently stirred 20min, makes aluminium oxide is fully dispersed to be suspended in pure water, adds 2.0 parts of triethanolamines, monoethanolamines, are sufficiently stirred 10min, add 0.2 part of preservative, corrosion inhibiting and descaling agent, are sufficiently stirred 5min, add Enter 4.5 parts of boric acid, tartaric acid adjusting pH value, pH value is adjusted between 3-5.Be sufficiently stirred both the alumina polishing solution.
Embodiment 2
The alumina powder of 20 parts of 10000 mesh is taken, is added in 71.7 parts of pure water, is sufficiently stirred 10min, adds 0.5 The dispersant of part, adds 0.1 part of xanthans, is sufficiently stirred 20min, makes aluminium oxide is fully dispersed to be suspended in pure water, adds 2.5 parts of triethanolamines, monoethanolamines, are sufficiently stirred 10min, add 0.2 part of preservative, corrosion inhibiting and descaling agent, are sufficiently stirred 5min, add Enter 5 parts of boric acid, tartaric acid adjusting pH value, pH value is adjusted between 3-5.Be sufficiently stirred both the alumina polishing solution.
Embodiment 3
The alumina powder of 20 parts of 15000 mesh is taken, is added in 72 parts of pure water, is sufficiently stirred 10min, adds 0.5 part Dispersant, add 0.1 part of xanthans, be sufficiently stirred 20min, make aluminium oxide is fully dispersed to be suspended in pure water, add 2.3 Part triethanolamine, monoethanolamine, are sufficiently stirred 10min, add 0.15 part of preservative, corrosion inhibiting and descaling agent, are sufficiently stirred 5min, add 4.95 parts of boric acid, tartaric acid adjust pH value, and pH value is between 3-5.Be sufficiently stirred both the alumina polishing solution.
It is polished using the alumina polishing solution of above-mentioned several examples, can obtains the mirror effect of light, reach Good polishing effect, can avoid metal from scratching metal surface during polishing, can be widely used in mobile phone, tablet electricity In the electronics fields such as brain.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as Protection scope of the present invention.

Claims (10)

1. a kind of preparation method of acidic alumina polishing fluid, it is characterised in that comprise the following steps:
(1), aluminium oxide is weighed in proportion to add in container, stirs evenly, makes aluminium oxide fully dispersed in water, is discharged in powder Air;
(2), dispersant is weighed in proportion to add in container, is stirred evenly;
(3), suspending agent is weighed in proportion, is slowly added in container, is sufficiently stirred;
(4), weigh successively in proportion triethanolamine, monoethanolamine add container in, be sufficiently stirred;
(5), preservative is weighed in proportion to add in container, is sufficiently stirred;
(6), corrosion inhibiting and descaling agent is weighed in proportion and adds container, is sufficiently stirred;
(7), add boric acid or tartaric acid adjusts solution ph, be sufficiently stirred, adjust pH value between 3~5.
A kind of 2. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (1) The aluminium oxide is Alpha-alumina, one kind in 10000 mesh of mesh number position, 12000 mesh, 15000 mesh.
A kind of 3. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (2) The dispersant is polyethylene glycol 200 or polyethylene glycol 400.
A kind of 4. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (3) The suspending agent is industrial xanthans.
A kind of 5. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (5) The preservative is preferred Kathon CG DL-T20.
A kind of 6. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (6) The corrosion inhibiting and descaling agent is seen sour (ATMP), 1-hydroxy ethylidene-1,1-diphosphonic acid (HEDP), ethylene diamine tetra methylene phosphonic acid for amino trident two (EDTMP), diethylenetriamine pentamethylphosphonic acid (DTPMP), 2 one phosphonic acid butane one l, 2,4 one tricarboxylic acids (PBTCA), 2- One or more mixing in hydroxyl phosphino- acetic acid (HPAA).
A kind of 7. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:Step (1) Mixing time is 10min.
A kind of 8. preparation method of acidic alumina polishing fluid according to claim 1, it is characterised in that:In step (2) Mixing time be 30min.
A kind of 9. alumina polishing solution as obtained by claim 1~8 any one of them preparation method.
10. a kind of alumina polishing solution as obtained by claim 1~8 any one of them preparation method is produced in metal electron Application before product anodic oxidation in polishing field.
CN201711394439.7A 2017-12-21 2017-12-21 A kind of preparation method of acidic alumina polishing fluid Pending CN108034361A (en)

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CN201711394439.7A CN108034361A (en) 2017-12-21 2017-12-21 A kind of preparation method of acidic alumina polishing fluid

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109913926A (en) * 2019-04-17 2019-06-21 安徽华淮新材料有限公司 Aluminium alloy anode oxide film hole sealing agent and its method for sealing
CN112222953A (en) * 2020-09-04 2021-01-15 山东国晶新材料有限公司 Method for polishing surface of clamping rod

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101831244A (en) * 2010-05-10 2010-09-15 上海高纳粉体技术有限公司 High-precision alumina polishing solution and preparation method thereof
CN102627915A (en) * 2012-03-23 2012-08-08 江苏中晶科技有限公司 Efficient alumina sapphire polishing solution and its preparation method
CN106479371A (en) * 2016-08-15 2017-03-08 惠州市米特仑科技有限公司 A kind of high precision composite polishing liquid and preparation method thereof
CN107312463A (en) * 2017-08-28 2017-11-03 如皋市玉辉助剂厂 A kind of preparation method of alumina polishing solution
CN107406752A (en) * 2015-03-10 2017-11-28 日立化成株式会社 Grinding agent, grinding agent storing liquid and Ginding process

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101831244A (en) * 2010-05-10 2010-09-15 上海高纳粉体技术有限公司 High-precision alumina polishing solution and preparation method thereof
CN102627915A (en) * 2012-03-23 2012-08-08 江苏中晶科技有限公司 Efficient alumina sapphire polishing solution and its preparation method
CN107406752A (en) * 2015-03-10 2017-11-28 日立化成株式会社 Grinding agent, grinding agent storing liquid and Ginding process
CN106479371A (en) * 2016-08-15 2017-03-08 惠州市米特仑科技有限公司 A kind of high precision composite polishing liquid and preparation method thereof
CN107312463A (en) * 2017-08-28 2017-11-03 如皋市玉辉助剂厂 A kind of preparation method of alumina polishing solution

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109913926A (en) * 2019-04-17 2019-06-21 安徽华淮新材料有限公司 Aluminium alloy anode oxide film hole sealing agent and its method for sealing
CN112222953A (en) * 2020-09-04 2021-01-15 山东国晶新材料有限公司 Method for polishing surface of clamping rod

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Application publication date: 20180515

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