CN107994353B - Broadband metamaterial terahertz wave absorber - Google Patents
Broadband metamaterial terahertz wave absorber Download PDFInfo
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- CN107994353B CN107994353B CN201810022439.2A CN201810022439A CN107994353B CN 107994353 B CN107994353 B CN 107994353B CN 201810022439 A CN201810022439 A CN 201810022439A CN 107994353 B CN107994353 B CN 107994353B
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- 239000006096 absorbing agent Substances 0.000 title claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000010521 absorption reaction Methods 0.000 claims abstract description 23
- 238000005516 engineering process Methods 0.000 claims abstract description 9
- 238000011161 development Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 5
- 238000007747 plating Methods 0.000 claims abstract description 5
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 4
- 238000005530 etching Methods 0.000 claims abstract description 4
- 230000008020 evaporation Effects 0.000 claims abstract description 4
- 238000001704 evaporation Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 238000001259 photo etching Methods 0.000 claims abstract description 4
- 230000008569 process Effects 0.000 claims abstract description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 26
- 239000004408 titanium dioxide Substances 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 238000012545 processing Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 229910021389 graphene Inorganic materials 0.000 description 8
- 230000010287 polarization Effects 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 239000012237 artificial material Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
- H01Q17/008—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
Landscapes
- Aerials With Secondary Devices (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The invention discloses a broadband metamaterial terahertz wave absorber, which consists of a metal substrate and a dielectric square block on the metal substrate; the metal substrate is plated on one surface of a medium layer with a flat surface through an evaporation process, and then the surface without metal plating is reversely subjected to traditional photoetching exposure and development etching technology to manufacture a medium square block. The dielectric square blocks are arranged on the metal substrate periodically, the period is smaller than the incident wavelength, 9 dielectric square blocks are contained in each period, the dielectric square blocks are arranged in the same period in a 3*3 mode, and the side length of each dielectric square block is different. The dielectric squares of different sizes respectively generate magnetic resonance at different frequencies, and are coupled with an incident electromagnetic field to form absorption. The invention breaks the limitation of the traditional metamaterial structural design, combines a plurality of medium square blocks with different sizes in the same period of the metamaterial, and forms broadband absorption. The invention has simple structure, easy processing and better effect.
Description
Technical Field
The invention belongs to the technical field of electromagnetic wave absorption, and relates to a broadband metamaterial terahertz wave absorber.
Background
In the fields of military stealth and electromagnetic compatibility technologies, electromagnetic wave absorbing technology is increasingly widely applied. The electromagnetic wave absorber can help airplanes, tanks and the like avoid radar detection, and can also help an electronic system to work more stably in the surrounding of the electromagnetic waves which are increasingly complicated and disordered along with the development of modern communication.
The electronic technology university proposes a resistor-loading-based ultra-wideband absorber according to the application number 201610220687.9, and the ultra-wideband absorber comprises a dipole array antenna, a patch resistor, a metal floor and four plastic screws for positioning and fixing the dipole array antenna and the metal floor, wherein the dipole array antenna is formed by periodically arranging a plurality of identical butterfly-like wing dipoles, two welding points of a single patch resistor are respectively welded at two ends of a dipole arm so as to be perfectly matched with the single dipole, and the dipole array antenna can receive electromagnetic waves and consume the electromagnetic waves through the patch resistor, so that the purpose of absorbing the waves is achieved; the implementation method needs to make a plurality of dipole arms with complex structures on the metal plate, and then, a resistor is welded on each dipole arm, thereby being time-consuming and labor-consuming. The ultra-wideband graphene absorber based on a local non-periodic structure is provided by the university of North China water conservancy and hydropower at the year 2016 for 26, and has the application number 201610361365.6, and comprises a metal plate layer, wherein at least one wave absorbing layer is arranged on the metal plate layer, a dielectric layer, a silicon layer, an insulating dielectric layer and a graphene layer are sequentially arranged on the wave absorbing layer from bottom to top, the silicon layer, the insulating dielectric layer and the graphene layer form a bias layer, the graphene layer and the silicon layer are respectively connected with positive and negative electrodes for externally applying bias voltage, and the graphene layer is formed by a plurality of graphene units in a display mode in the two-dimensional direction; the absorber needs external voltage to realize functions, and the graphene layer is arranged on the outermost layer and is easily damaged by the outside (such as the transparent adhesive tape can be used for adhering away the graphene layer), and once the graphene layer is damaged, the performance of the absorber cannot be ensured. The university of electronic technology proposes a 'dual-frequency broadband wave absorber' with application number 201710162657.1, comprising a periodic wave absorbing surface structure, a first layer of medium substrate, a periodic frequency selective surface structure, a second layer of medium substrate, a metal shielding floor and plastic screws for connecting the first layer of medium substrate and the second layer of medium substrate, wherein the first layer of medium substrate is a metal shielding floor; the periodic wave-absorbing surface structure is printed on the first layer of medium substrate and consists of two metal discs which are symmetrical left and right, two split resonant rings which are symmetrical left and right and a wave-absorbing structure unit welded between two metal disc arms, the structure is complex, and the processing is difficult; furthermore, this multi-layer structure undoubtedly increases the processing difficulties.
The metamaterial is a new academic vocabulary in the century physics field, and is an artificial material with characteristic dimensions far smaller than working wavelength, and can realize functions which cannot be realized by a plurality of natural materials. The metamaterial is very suitable for application of micro optical functional devices due to novel and various functions and sub-wavelength size properties, various application researches based on the metamaterial exist at present, but a wave absorber based on the metamaterial for realizing broadband does not exist yet.
Disclosure of Invention
Aiming at the defects in the prior art and the current research situation, the invention provides a broadband metamaterial terahertz wave absorber.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a broadband metamaterial terahertz wave absorber is composed of a metal substrate and a dielectric square block on the metal substrate; the metal substrate is plated on one surface of a medium layer with a flat surface through an evaporation process, and then the surface without metal plating is reversely subjected to traditional photoetching exposure and development etching technology to manufacture a medium square block.
The invention relates to a broadband metamaterial terahertz wave absorber, which is characterized in that: the dielectric square blocks are arranged on the metal substrate periodically, the period is smaller than the incident wavelength, 9 dielectric square blocks are contained in each period, the dielectric square blocks are arranged in the same period in a 3*3 mode, and the side length of each dielectric square block is different.
The technical principle of the invention is as follows: the metamaterial dielectric square block and the incident electromagnetic wave generate magnetic resonance, the dielectric square block and the magnetic field of the incident electromagnetic wave generate strong coupling, the metal substrate and the electric field of the incident electromagnetic wave are coupled, the whole metamaterial terahertz wave absorber and the free space form impedance matching, the reflectivity of a wave band (or a frequency band) where the magnetic resonance occurs is greatly reduced, and the transmissivity of the metal substrate on the back is 0, so that the sum of the absorptivity, the transmissivity and the reflectivity is 1, and the metamaterial wave absorber can be deduced to realize high absorptivity in the frequency band where the magnetic resonance occurs in the dielectric material block. Because each structural unit period of the designed metamaterial wave absorber is provided with a plurality of medium square blocks with different sizes, the wavelengths and frequencies of magnetic resonances corresponding to the different sizes are different, and therefore broadband absorption can be realized in a wider wavelength range by containing a plurality of medium square blocks with different sizes in one period.
Compared with the prior art, the invention has the following characteristics and advantages:
1. the invention realizes the broadband wave absorbing function based on the metamaterial, the related processing technology is compatible with the semiconductor processing technology, the related structure is simple, the processing is easy, the related steps are basically completed by a machine, and the invention can be produced in a large scale.
2. The invention breaks the limitation of the traditional metamaterial structural design, designs a plurality of structures in one large period, can realize functions in different specific frequency bands, and can widen the working frequency band after combination.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those of ordinary skill in the art that the drawings in the following description are of some embodiments of the invention and that other drawings may be derived from them without undue effort.
Fig. 1 is a top view of a broadband metamaterial terahertz wave absorber.
Fig. 2 is a schematic structural diagram of a broadband metamaterial terahertz wave absorber.
Fig. 3 is a graph showing absorption, transmittance, and reflectance spectra of a broadband metamaterial terahertz absorber formed by arranging titanium dioxide cubes (dielectric constant 114 in the terahertz band, loss angle 0.01) having a thickness of 10 micrometers and side lengths of 9.4 micrometers, 9.55 micrometers, 9.7 micrometers, 9.85 micrometers, 10 micrometers, 10.15 micrometers, 10.3 micrometers, 10.45 micrometers, and 10.6 micrometers on an aluminum substrate having a thickness of 0.5 micrometers in a 36-micrometer period in the same large period in the form of 3*3.
Fig. 4 is an absorption spectrum of a titania square (dielectric constant at the terahertz band is 114, loss angle is 0.01) with a thickness of 10 micrometers and side lengths of 9.4 micrometers, 9.55 micrometers, 9.7 micrometers, 9.85 micrometers, 10 micrometers, 10.15 micrometers, 10.3 micrometers, 10.45 micrometers, 10.6 micrometers respectively, which are individually arranged on an aluminum substrate with a thickness of 0.5 micrometers with a period of 25 micrometers, and the formed metamaterial structures are near respective occurrence magnetic resonance frequency bands.
Fig. 5 is a graph of the absorption bandwidth of a broadband metamaterial terahertz absorber with 9 titania blocks in the same period compared with the absorption bandwidth of a metamaterial medium formed by only a single titania block in the period.
Fig. 6 is an absorption spectrum diagram of the broadband metamaterial terahertz wave absorber for incident electromagnetic waves with different polarizations.
Fig. 7 is an absorption spectrum diagram of the broadband metamaterial terahertz wave absorber under the condition that electromagnetic waves irradiate at different incident angles.
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific examples.
As shown in fig. 1, a broadband metamaterial terahertz wave absorber is composed of a metal substrate (1) and a dielectric square (2) on the metal substrate (1); the metal substrate (1) is plated on one surface of a medium layer with a flat surface through an evaporation process, and then the surface without metal plating is reversely subjected to traditional photoetching exposure and development etching technology to manufacture the medium square block (2).
As shown in fig. 2, dielectric squares (2) are periodically arranged on a metal substrate (1) with a period smaller than the incident wavelength, wherein a dotted line square surrounds a period, each period contains 9 dielectric squares (2), each dielectric square (2) is arranged in the same period in a 3*3 mode, the side lengths of the dielectric squares (2) are different, in this embodiment, titanium dioxide squares (the dielectric constant in the terahertz wave band is 114, the loss angle is 0.01), the thickness is 10 micrometers, the side lengths gradually increase from left to right and from top to bottom, and are sequentially 9.4 micrometers, 9.55 micrometers, 9.7 micrometers, 9.85 micrometers, 10 micrometers, 10.15 micrometers, 10.3 micrometers, 10.45 micrometers and 10.6 micrometers; the greater the thickness of the metal substrate (1) the lower the transmittance, the embodiment uses metallic aluminum, the transmittance being negligible already when the thickness of the aluminum substrate reaches 0.5 microns.
As shown in fig. 3, the titanium dioxide cubes with the thickness of 10 micrometers and the side lengths of 9.4 micrometers, 9.55 micrometers, 9.7 micrometers, 9.85 micrometers, 10 micrometers, 10.15 micrometers, 10.3 micrometers, 10.45 micrometers and 10.6 micrometers are respectively placed in the same large period in the form of 3*3, the absorption rate, the transmittance and the reflectance frequency spectrum of the broadband metamaterial terahertz wave absorber formed by arranging the titanium dioxide cubes on an aluminum substrate in the period of 36 micrometers are near the working wave band, and the metamaterial wave absorber can be seen to have better absorption rate (more than 0.8) in the range of 2.6 THz to 2.75 THz, the transmittance is 0 in the whole frequency spectrum range, and the sum of the reflectance and the reflectance is 1.
As shown in fig. 4, when titanium dioxide cubes having a side length of 9.4 to 10.6 micrometers and a thickness of 10 micrometers are individually arranged on an aluminum substrate with a period of 25 micrometers, absorption can be achieved in a smaller frequency range, and the frequency of absorption is different for different side lengths of the titanium dioxide cubes.
As shown in fig. 5, the absorption bandwidth of the broadband metamaterial terahertz wave absorber with 9 titanium dioxide cubes with different sizes in the period is compared with the absorption bandwidth of the metamaterial structure with titanium dioxide cubes with 1 size in the period, and it can be seen that the broadband metamaterial terahertz wave absorber greatly widens the absorption frequency range (corresponding to superposition of the independent working absorption frequency ranges of the original 9 structural sizes) by combining the structures with a plurality of sizes in the same period, so that the purpose of broadband absorption is realized; further, it is anticipated that the absorption bandwidth can be made larger if the number of differently sized structures combined in a single cycle is increased even further.
As shown in fig. 6, the broadband metamaterial terahertz wave absorber has the advantages that the wave absorbing efficiency is good under the condition of different incident electromagnetic field polarizations, and when the electric field polarization is along the y direction and the magnetic field polarization is along the x direction, the absorption bandwidth is maximum; when the electric field polarization is along the x-direction and the magnetic field polarization is along the y-direction, the absorption bandwidth is reduced by about half, but this is also much better than the absorption bandwidth of a metamaterial with only one structure in the original period (refer to fig. 5).
As shown in fig. 7, the broadband metamaterial terahertz absorber has the wave absorbing efficiency under the condition that the incident electromagnetic field is incident at different incidence angles, and can realize broadband absorption in a larger incidence angle range without being limited by normal incidence, and can still realize the absorption rate of more than 75% in the range of 2.6 THz-2.75 THz when the broadband metamaterial terahertz absorber is incident at an angle of 45 degrees.
It should be noted that the foregoing embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the present invention and implement the same according to the present invention without limiting the scope of the present invention accordingly. All equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (1)
1. A broadband metamaterial terahertz wave absorber consists of a metal substrate and a dielectric square; the dielectric square blocks are arranged on the metal substrate periodically, the period is smaller than the incident wavelength, 9 dielectric square blocks are contained in each period, the dielectric square blocks are arranged in the same period in a 3*3 mode, and the side length of each dielectric square block is different; the dielectric square blocks with different sizes respectively generate magnetic resonance at different frequencies and are coupled with an incident electromagnetic field to form broadband absorption; plating the metal substrate on one surface of a medium layer with a flat surface through an evaporation process, and manufacturing a medium square block on the surface without plating metal by utilizing the traditional photoetching exposure and development etching technology;
the metal is aluminum and the medium is titanium dioxide; the dielectric constant of the titanium dioxide square block in the terahertz wave band is 114, the loss angle is 0.01, the thickness is 10 microns, the side length gradually increases from left to right and from top to bottom, and the dielectric constant is 9.4 microns, 9.55 microns, 9.7 microns, 9.85 microns, 10 microns, 10.15 microns, 10.3 microns, 10.45 microns and 10.6 microns in sequence.
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Families Citing this family (10)
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| CN108957603B (en) * | 2018-07-17 | 2020-11-17 | 中国科学院光电技术研究所 | Ultra-wideband electromagnetic absorption material based on exchange principle of propagation waves and super-structured surface waves in multi-layer sub-wavelength structure |
| CN109411898B (en) * | 2018-10-22 | 2021-04-23 | 桂林电子科技大学 | Terahertz dual-band adjustable wave absorber based on graphene |
| CN109799556A (en) * | 2019-03-11 | 2019-05-24 | 浙江科技学院 | Polarization independent wideband absorber based on doped silicon grating array |
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| CN112448169A (en) * | 2020-11-18 | 2021-03-05 | 唐明春 | Electromagnetic wave absorbing structure |
| CN112557338B (en) * | 2020-11-20 | 2022-10-18 | 广东省农业科学院农产品公共监测中心 | Terahertz superstructure sensor based on multi-feature unit and use method thereof |
| CN113314849A (en) * | 2021-04-20 | 2021-08-27 | 上海海事大学 | Periodic unit of metamaterial broadband wave absorber and metamaterial broadband wave absorber |
| TWI782593B (en) * | 2021-06-24 | 2022-11-01 | 明泰科技股份有限公司 | Multi-antenna system and its isolator module capable of improving background scanning antenna isolation |
| CN117559141B (en) * | 2023-11-01 | 2024-06-25 | 广东技术师范大学 | Transparent broadband metamaterial wave absorber based on topological optimization and preparation method thereof |
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