CN112557338B - Terahertz superstructure sensor based on multi-feature unit and use method thereof - Google Patents
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Abstract
The invention relates to the field of terahertz devices. The sensor and the substance analysis method thereof can realize specific and sensitive detection on a target object through one-time signal acquisition without resonance frequency adjustment, and have the advantages of high detection speed, convenience in operation, wide application range and the like. The technical scheme is as follows: the utility model provides a terahertz superstructure sensor based on multiple feature cell which characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in a vapor deposition or etching mode.
Description
Technical Field
The invention relates to the field of terahertz devices, in particular to a terahertz superstructure sensor based on multiple feature units and a method for detecting and analyzing substances by using the terahertz superstructure sensor.
Background
Terahertz radiation is an electromagnetic wave with a frequency range of 0.1-10THz (1THz = 10) 12 THz) is between microwave and infrared in the electromagnetic spectrum, and has many properties such as safety, transient property, perspective property, wide frequency band, and spectrum resolution capability. In particular, weak interaction forces among many biochemical molecules, such as hydrogen bonds, van der waals forces, low-frequency collective oscillation modes within molecules, and low-frequency oscillation of crystal lattices in crystals, generally occur in the terahertz frequency band. Therefore, the method has unique advantages of detecting and analyzing substances by using the terahertz waves as signal sources, and has great application potential in the aspects of bioscience, material science, medicine science, food science and the like. However, the terahertz wave has low photon energy and long wavelength, so that the direct substance detection has the problems of serious background signal interference, low detection sensitivity and the like.
The terahertz metamaterial is an artificial electromagnetic material working in a terahertz frequency band and having a sub-wavelength periodic array structure. The interaction between the terahertz waves and the target object can be promoted by utilizing the pseudo surface plasmon effect of the terahertz metamaterial, and the sensitivity of terahertz wave detection is effectively improved. At present, the content of a target object is mainly analyzed through the frequency shift amount of a resonance peak in the detection by using the terahertz metamaterial, the terahertz metamaterial belongs to a refractive index sensor, and the detection specificity is poor. In order to improve the detection specificity, researches find that when the resonance peak of the terahertz metamaterial is consistent with the characteristic absorption peak frequency of a target object, the modulation effect of the target object on the resonance mode of the metamaterial is more obvious; however, for the terahertz metamaterial with only a single or a plurality of discrete resonance modes in a certain frequency band, the method is only suitable for detecting matched target objects, and the applicability is poor. Chinese patent document CN108493567B discloses a superstructure-based adjustable terahertz resonant cavity and a method for substance analysis, wherein the distance between the resonant cavities needs to be continuously adjusted when in use, so that resonant peaks are constructed at different frequencies to complete detection of a single sample, and the detection process is complex and time-consuming. The defects greatly limit the application of the terahertz metamaterial in the field of terahertz sensing detection.
Disclosure of Invention
The invention aims to overcome the defects of the background technology and provide a terahertz superstructure sensor based on a multi-feature unit and a method for analyzing substances.
The invention adopts the following technical scheme:
the utility model provides a terahertz superstructure sensor based on multiple feature cell which characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in a vapor deposition or etching mode.
Preferably, the flat substrate has a lower refractive index and weaker absorption strength in the terahertz frequency band; each characteristic unit in the combined superstructure unit is an artificial electromagnetic medium with a sub-wavelength characteristic size.
Preferably, the flat substrate is a quartz wafer or a high-resistance silicon wafer.
The different feature units refer to different feature sizes of the feature units, including the width direction size or/and the length direction size.
And all the characteristic units in each combined superstructure unit are transversely arranged and longitudinally arranged according to the order that the characteristic size changes from small to large or from large to small regularly.
The resonance modes generated by each characteristic unit in the combined superstructure unit when being excited by terahertz waves are the same, but the resonance modes appear at different terahertz frequencies and appear as uniform resonance peaks or uniform resonance valleys in a terahertz spectrum; and the resonance modes are relatively independent when the characteristic units are combined and excited by the terahertz waves.
Resonance peaks or resonance valleys generated by exciting each characteristic unit in the combined superstructure unit are uniformly distributed in a certain terahertz frequency band, and the number X of the characteristic units in the combined superstructure unit is more than or equal to 9; the specific number can be determined comprehensively according to the characteristic size of the adopted single characteristic unit and the width of the required terahertz frequency band.
The frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting the characteristic units in the combined superstructure unit is less than or equal to half of the full width at half maximum of the resonance peaks or resonance valleys.
A method for detecting substances by using the multi-feature-unit-based terahertz superstructure sensor comprises the following steps:
s1, measuring terahertz transmission of the multi-feature-unit-based terahertz superstructure sensor when no substance is addedPulse signal and extraction of transmission intensity T 0 (f)；
S2, adding a substance to be detected on the surface of the terahertz superstructure sensor with the combined superstructure unit;
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit after adding a substance to be detected and extracting transmission intensity T s (f)；
S4, according to a formula: absorbance = log [ T ] 0 (f)/T s (f)]Obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the strength of the characteristic absorption peak;
and S5, for the situation that the terahertz transmission signal frequency band is translated due to sample addition, correcting the transmission signal frequency band and then performing the step S4.
The invention has the beneficial effects that: through providing a work at the novel structure combination mode of terahertz frequency channel, construct the combination formula superstructure sensor that has continuous resonance mode in certain terahertz frequency channel, carry out signal acquisition (need not resonant frequency and adjust) to the sample that awaits measuring and can realize qualitative quantitative detection, have the advantage of specificity and sensitivity concurrently, have characteristics such as detect fast, convenient operation, application scope extensively.
Drawings
Fig. 1 is a schematic perspective structure diagram (a dotted line portion on the right side in the diagram is a main view enlarged schematic diagram of one combined superstructure unit B in a terahertz superstructure sensor based on a multi-feature unit on the left side) according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of the working state of the embodiment of the invention.
Fig. 3 is three patterns suitable for use as feature cells in combined superstructure cells.
FIG. 4 is a terahertz transmission spectrum of a terahertz superstructure combined by a quartz piece with the same thickness and a multi-feature unit.
Fig. 5 is an absorbance spectrum when substances having different absorption peaks are detected by using a terahertz superstructure composed of a quartz piece and multiple feature units respectively.
Fig. 6 is a graph a in fig. 3 as an example, and respective resonance response spectrums of 16 feature cells with different feature sizes when the terahertz beam irradiation is performed individually.
In the figure: A. the terahertz wave beam detector comprises a flat substrate, a combined superstructure unit B, a terahertz transmitter C, a terahertz detector D and a terahertz wave beam E.
Detailed Description
The present invention will be further described with reference to the following examples, but the present invention is not limited to the following examples.
The terahertz superstructure sensor based on the multi-feature unit as shown in fig. 1 comprises a flat substrate A and a plurality of combined superstructure units B distributed on the surface of the flat substrate in a periodic array.
As shown in fig. 1 and 2, each combined superstructure unit B is composed of 16 (4 × 4 arrangement) different feature units arranged in a square array at fixed center-to-center intervals; the fixed center-to-center distance refers to the same distance between the centers of the adjacent feature cells (including the distance between the centers of the adjacent feature cells arranged in the transverse direction and the distance between the centers of the adjacent feature cells arranged in the longitudinal direction); the combined superstructure units B distributed in a periodic array can be added on the surface of the flat substrate A in an electron beam evaporation or plasma etching mode.
As shown in fig. 1 and fig. 3, the flat substrate a can be made of quartz (preferably square silicon dioxide) or high-resistance silicon wafer with a thickness of 500 μm or 1mm; each feature unit in each combined superstructure unit B is an artificial electromagnetic medium with a subwavelength feature size structure, such as a metal material (gold or copper) structure, such as a contained open resonant ring (as shown in a and B in fig. 3) and a bent rod (as shown in c in fig. 3).
As shown in fig. 2 and 3, the resonance modes generated by the characteristic units in each combined superstructure unit B when excited by terahertz waves alone are the same; since the characteristic dimension of the characteristic unit (i.e. the length dimension of the characteristic unit in the horizontal direction or/and the width dimension of the characteristic unit in the vertical direction; see fig. 1) is in the sub-wavelength level, it is inversely related to the terahertz frequency at resonance; therefore, the characteristic size of each characteristic unit can be adjusted to change regularly from small to large (or from large to small) (the characteristic size of each characteristic unit arranged transversely is sequentially increased or decreased, and the characteristic size of each characteristic unit arranged longitudinally is also sequentially increased or decreased; see fig. 1) so that the resonance modes appear at different terahertz frequencies; when the combined superstructure unit B formed by combining the characteristic units is excited by the terahertz wave, the resonance modes are relatively independent.
For the feature cells in composite building block B (shown in fig. 3), the characteristic dimensions include all of the dimensions necessary to fully reproduce the pattern of feature cells, exemplified by plot c in fig. 3, including the lengths of the segments of the bending beam.
As shown in fig. 1 and fig. 2, the resonance modes generated by exciting each feature unit in the combined superstructure unit B are uniformly distributed in a certain terahertz frequency band (the frequency is usually selected to be 0.3-1.8THz, and the frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting the feature unit in the superstructure unit B should not be more than half of the full width at half maximum of the resonance peaks or resonance valleys).
The following describes a method for detecting a substance by using a multi-feature-unit-based terahertz superstructure sensor in detail with reference to fig. 1, 2, 4 and 5:
s1, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit when no substance is added, and extracting transmission intensity T 0 (f)；
S2, adding a substance to be detected on the surface of the terahertz superstructure sensor with the combined superstructure unit (B);
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit after adding a substance to be detected and extracting transmission intensity T s (f)；
S4, according to a formula: absorbance = log [ T ] 0 (f)/T s (f)]And obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the intensity variation of the characteristic absorption peak.
FIG. 2 shows the mutual position of the parts during inspection; a terahertz wave beam E emitted by the terahertz emitter C is incident perpendicular to a terahertz superstructure sensor (a multi-feature-unit-based terahertz superstructure sensor), and is received by a terahertz detector D after being transmitted; therefore, the terahertz transmission signal is acquired.
FIG. 4 shows terahertz transmission intensity spectra of quartz plates and combined superstructures obtained without any added material, wherein the quartz plates are highly transparent and have no characteristic absorption peak in the 0.5-1.8T frequency band; compared with the terahertz transmission spectrum of the superstructure formed by the single-type characteristic units, the terahertz transmission spectrum of the combined superstructure is flatter and higher in transmission.
Fig. 5 shows absorbance spectra obtained when equal amounts of substances having different characteristic absorption peaks (absorption peaks at 1.2T, 1.3T, and 1.4T, respectively) are added to the surfaces of a quartz plate and a combined superstructure, and this figure shows that target objects having different characteristic absorption peaks are significantly different in terahertz absorbance spectra obtained by combining the superstructure, and the combined superstructure can more significantly reflect the characteristic absorption peaks of the target objects, indicating higher detection sensitivity.
Finally, it should be noted that the above-mentioned list is only a specific embodiment of the present invention. It is obvious that the present invention is not limited to the above embodiments, but many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the present invention are to be considered within the scope of the invention.
Claims (4)
1. A method for detecting substances by a terahertz superstructure sensor based on a multi-feature unit comprises the following steps:
s1, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor of the multi-feature unit when no substance is added and extracting transmission intensity T 0 (f)；
S2, adding a substance to be detected on the surface of the combined superstructure unit of the terahertz superstructure sensor;
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor of the multi-feature unit after adding a substance to be detected and extracting transmission intensity Ts (f);
s4, according to a formula: absorbance = log [ T ] 0 (f)/Ts(f)]Obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the strength of the characteristic absorption peak;
the method is characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array manner; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in an evaporation or etching mode;
the flat substrate has a lower refractive index and a weaker absorption intensity in a terahertz frequency band, and each characteristic unit in the combined superstructure unit is an artificial electromagnetic medium with a sub-wavelength characteristic size;
the flat substrate is a quartz wafer or a high-resistance silicon wafer;
the different characteristic units refer to different characteristic sizes of the characteristic units, including the width direction size or/and the length direction size;
each characteristic unit in each combined superstructure unit is transversely arranged and longitudinally arranged according to the order that the characteristic size changes from small to large or from large to small;
the resonance modes generated by each characteristic unit in the combined superstructure unit when being excited by terahertz waves are the same, but the resonance modes appear at different terahertz frequencies and appear as uniform resonance peaks or uniform resonance valleys in a terahertz spectrum; and the resonance modes are relatively independent when the characteristic units are combined and excited by the terahertz waves.
2. The method for substance detection by the multi-feature-unit-based terahertz superstructure sensor according to claim 1, wherein: resonance peaks or resonance valleys generated by exciting each characteristic unit in the combined superstructure unit are uniformly distributed in a certain terahertz frequency band, and the number X of the characteristic units in the combined superstructure unit is more than or equal to 9.
3. The method for substance detection by the multi-feature-unit-based terahertz superstructure sensor according to claim 2, wherein: the frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting feature units in the combined superstructure unit is less than or equal to half of the half-peak width of the resonance peaks or resonance valleys.
4. The method for substance detection by the multi-feature-unit-based terahertz superstructure sensor according to claim 3, wherein: and for the situation that the terahertz transmission signal frequency band is shifted due to the addition of the sample, correcting the transmission signal frequency band and then performing the step S4.
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