CN112557338A - Terahertz superstructure sensor based on multi-feature unit and use method thereof - Google Patents
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Abstract
The invention relates to the field of terahertz devices. The sensor and the substance analysis method thereof can realize specific sensitive detection on a target object through one-time signal acquisition without resonance frequency adjustment, and have the advantages of high detection speed, convenience in operation, wide application range and the like. The technical scheme is as follows: the utility model provides a terahertz superstructure sensor based on multiple feature cell which characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in a vapor deposition or etching mode.
Description
Technical Field
The invention relates to the field of terahertz devices, in particular to a terahertz superstructure sensor based on a multi-feature unit and a method for detecting and analyzing substances by using the terahertz superstructure sensor.
Background
Terahertz radiation is an electromagnetic wave with a frequency range of 0.1-10THz (1 THz-10)12THz) is between microwave and infrared in the electromagnetic spectrum, and has various properties such as safety, transient property, transparency, wide band, and spectrum resolution ability. In particular, weak interaction forces among many biochemical molecules, such as hydrogen bonds, van der waals forces, low-frequency collective oscillation modes within molecules, and low-frequency oscillation of crystal lattices in crystals, generally occur in the terahertz frequency band. Therefore, the method has unique advantages of detecting and analyzing substances by using the terahertz waves as signal sources, and has great application potential in the aspects of bioscience, material science, medicine science, food science and the like. However, the terahertz wave has low photon energy and long wavelength, so that the direct substance detection has the problems of serious background signal interference, low detection sensitivity and the like.
The terahertz metamaterial is an artificial electromagnetic material working in a terahertz frequency band and having a sub-wavelength periodic array structure. The interaction between the terahertz waves and the target object can be promoted by utilizing the pseudo surface plasmon effect of the terahertz metamaterial, and the sensitivity of terahertz wave detection is effectively improved. At present, the content of a target object is mainly analyzed through the frequency shift amount of a resonance peak in the detection by using the terahertz metamaterial, the terahertz metamaterial belongs to a refractive index sensor, and the detection specificity is poor. In order to improve the detection specificity, researches find that when the resonance peak of the terahertz metamaterial is consistent with the characteristic absorption peak frequency of a target object, the modulation effect of the target object on the resonance mode of the metamaterial is more obvious; however, for the terahertz metamaterial with only a single or a plurality of discrete resonance modes in a certain frequency band, the method is only suitable for detecting matched target objects, and the applicability is poor. Chinese patent document CN108493567B discloses a superstructure-based adjustable terahertz resonant cavity and a method for analyzing substances thereof, wherein the distance between resonant cavities needs to be continuously adjusted when in use, so that resonant peaks are constructed at different frequencies to complete the detection of a single sample, and the detection process is complex and time-consuming. The defects greatly limit the application of the terahertz metamaterial in the field of terahertz sensing detection.
Disclosure of Invention
The invention aims to overcome the defects of the background technology and provide a terahertz superstructure sensor based on a multi-feature unit and a method for analyzing substances.
The invention adopts the following technical scheme:
the utility model provides a terahertz superstructure sensor based on multiple feature cell which characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in a vapor deposition or etching mode.
Preferably, the flat substrate has a lower refractive index and weaker absorption strength in the terahertz frequency band; each characteristic unit in the combined superstructure unit is an artificial electromagnetic medium with a sub-wavelength characteristic size.
Preferably, the flat substrate is a quartz wafer or a high-resistance silicon wafer.
The different feature units refer to different feature sizes of the feature units, including a width-direction size or/and a length-direction size.
And all the characteristic units in each combined superstructure unit are transversely arranged and longitudinally arranged according to the order that the characteristic size changes from small to large or from large to small regularly.
The resonance modes generated by each characteristic unit in the combined superstructure unit when being excited by terahertz waves are the same, but the resonance modes appear at different terahertz frequencies and appear as uniform resonance peaks or uniform resonance valleys in a terahertz spectrum; and the resonance modes are relatively independent when the characteristic units are combined and excited by the terahertz waves.
Resonance peaks or resonance valleys generated by exciting each characteristic unit in the combined superstructure unit are uniformly distributed in a certain terahertz frequency band, and the number X of the characteristic units in the combined superstructure unit is more than or equal to 9; the specific number can be determined comprehensively according to the characteristic size of the adopted single characteristic unit and the width of the required terahertz frequency band.
The frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting the characteristic units in the combined superstructure unit is less than or equal to half of the full width at half maximum of the resonance peaks or resonance valleys.
A method for detecting substances by using the multi-feature-unit-based terahertz superstructure sensor comprises the following steps:
s1, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit when no substance is added, and extracting transmission intensity T0(f)；
S2, adding a substance to be detected on the surface of the terahertz superstructure sensor with the combined superstructure unit;
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit after adding a substance to be detected and extracting transmission intensity Ts(f)；
S4, according to a formula: absorbance log [ T ]0(f)/Ts(f)]Obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the strength of the characteristic absorption peak;
and S5, for the situation that the terahertz transmission signal frequency band is translated due to sample addition, correcting the transmission signal frequency band and then performing the step S4.
The invention has the beneficial effects that: through providing a work at the novel structure combination mode of terahertz frequency channel, construct the combination formula superstructure sensor that has continuous resonance mode in certain terahertz frequency channel, carry out signal acquisition (need not resonant frequency and adjust) to the sample that awaits measuring and can realize qualitative quantitative detection, have the advantage of specificity and sensitivity concurrently, have characteristics such as detect fast, convenient operation, application scope extensively.
Drawings
Fig. 1 is a schematic perspective structure diagram (a dotted line portion on the right side in the diagram is a main view enlarged schematic diagram of one combined superstructure unit B in a terahertz superstructure sensor based on a multi-feature unit on the left side) according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of the working state of the embodiment of the invention.
Fig. 3 is three patterns suitable for use as feature cells in combined superstructure cells.
FIG. 4 is a terahertz transmission spectrum of a terahertz superstructure combined by a quartz piece with the same thickness and a multi-feature unit.
Fig. 5 is an absorbance spectrum when substances having different absorption peaks are detected by using a terahertz superstructure composed of a quartz piece and multiple feature units respectively.
Fig. 6 is a graph a in fig. 3 as an example, and respective resonance response spectrums of 16 feature cells with different feature sizes when the terahertz beam irradiation is performed individually.
In the figure: A. the terahertz wave beam detector comprises a flat substrate, a combined superstructure unit B, a terahertz transmitter C, a terahertz detector D and a terahertz wave beam E.
Detailed Description
The present invention will be further described with reference to the following examples, but the present invention is not limited to the following examples.
The terahertz superstructure sensor based on the multi-feature unit as shown in fig. 1 comprises a flat substrate A and a plurality of combined superstructure units B distributed on the surface of the flat substrate in a periodic array.
As shown in fig. 1 and 2, each combined superstructure unit B is composed of 16(4 × 4 arrangement) different feature units arranged in a square array at fixed center-to-center intervals; the fixed center-to-center distance refers to the same distance between the centers of the adjacent feature cells (including the distance between the centers of the adjacent feature cells arranged in the transverse direction and the distance between the centers of the adjacent feature cells arranged in the longitudinal direction); the combined superstructure units B distributed in a periodic array can be added on the surface of the flat substrate A in an electron beam evaporation or plasma etching mode.
As shown in fig. 1 and fig. 3, the flat substrate a can be a quartz plate (preferably a square silicon dioxide plate) or a high-resistance silicon plate, and has a thickness of 500 μm or 1 mm; each feature unit in each combined superstructure unit B is an artificial electromagnetic medium with a subwavelength feature size structure, such as a metal material (gold or copper) structure, such as a contained open resonant ring (as shown in a and B in fig. 3) and a bent rod (as shown in c in fig. 3).
As shown in fig. 2 and 3, the resonance modes generated by the characteristic units in each combined superstructure unit B when excited by terahertz waves alone are the same; since the feature size of the feature cell (i.e., the length dimension of the feature cell in the horizontal direction or/and the width dimension of the feature cell in the vertical direction; see fig. 1) is of the sub-wavelength order, it is inversely related to the terahertz frequency at resonance; therefore, the characteristic size of each characteristic unit can be adjusted to change regularly from small to large (or from large to small) (the characteristic size of each characteristic unit arranged transversely is sequentially increased or decreased, and the characteristic size of each characteristic unit arranged longitudinally is also sequentially increased or decreased; see fig. 1) so that the resonance modes appear at different terahertz frequencies; when the combined superstructure unit B formed by combining the characteristic units is excited by terahertz waves, the resonance modes are relatively independent.
For the feature cells in composite building block B (shown in fig. 3), the characteristic dimensions include all of the dimensions necessary to fully reproduce the pattern of feature cells, exemplified by plot c in fig. 3, including the lengths of the segments of the bending beam.
As shown in fig. 1 and fig. 2, the resonance modes generated by exciting each feature unit in the combined superstructure unit B are uniformly distributed in a certain terahertz frequency band (usually, the selected frequency is 0.3-1.8THz, and the frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting the feature unit in the superstructure unit B should not be more than half of the full width at half maximum of the resonance peaks or resonance valleys, preferably, on the premise of satisfying the period size and matching the target waveband, the larger the number of feature units in the combined superstructure unit B, the smaller the frequency spacing between two adjacent resonance modes generated by exciting the feature units, the better the performance of the terahertz superstructure sensor formed by combining, taking the diagram a in fig. 3 as an example, the combined feature unit formed by combining 16 feature units with different feature sizes, when terahertz beam irradiation is performed separately, the respective resonant frequency (see fig. 6) waveforms are identical, and the adjacent waveforms are uniformly spaced, so that the detection performance is excellent.
The following describes a method for detecting a substance by using a multi-feature-unit-based terahertz superstructure sensor in detail with reference to fig. 1, 2, 4 and 5:
s1, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit when no substance is added, and extracting transmission intensity T0(f)；
S2, adding a substance to be detected on the surface of the terahertz superstructure sensor with the combined superstructure unit (B);
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit after adding a substance to be detected and extracting transmission intensity Ts(f)；
S4, according to a formula: absorbance log [ T ]0(f)/Ts(f)]And obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the intensity variation of the characteristic absorption peak.
FIG. 2 shows the mutual position of the parts during inspection; a terahertz wave beam E emitted by the terahertz emitter C is incident perpendicular to a terahertz superstructure sensor (a multi-feature-unit-based terahertz superstructure sensor), and is received by a terahertz detector D after penetrating through the terahertz wave beam E; therefore, the terahertz transmission signal is acquired.
FIG. 4 shows a terahertz transmission intensity spectrum of a quartz plate and a combined superstructure obtained without adding any substance, wherein the quartz plate has high transmittance and no characteristic absorption peak in a 0.5-1.8T frequency band; compared with the terahertz transmission spectrum of the superstructure formed by the single-type characteristic units, the terahertz transmission spectrum of the combined superstructure is flatter and higher in transmission.
Fig. 5 shows absorbance spectra obtained when equal amounts of substances having different characteristic absorption peaks (absorption peaks at 1.2T, 1.3T, and 1.4T, respectively) are added to the surfaces of a quartz plate and a combined superstructure, and this figure shows that target objects having different characteristic absorption peaks are significantly different in terahertz absorbance spectra obtained by combining the superstructure, and the combined superstructure can more significantly reflect the characteristic absorption peaks of the target objects, indicating higher detection sensitivity.
Finally, it should be noted that the above-mentioned list is only a specific embodiment of the present invention. It is obvious that the present invention is not limited to the above embodiments, but many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the present invention are to be considered within the scope of the invention.
Claims (10)
1. The utility model provides a terahertz superstructure sensor based on multiple feature cell which characterized in that: the terahertz superstructure sensor comprises a flat substrate and a plurality of combined superstructure units distributed on the surface of the flat substrate in a periodic array; each combined superstructure unit is formed by arranging X different characteristic units in a square array at fixed center spacing; the combined superstructure units distributed in the periodic array are added on the surface of the flat substrate in a vapor deposition or etching mode.
2. The multi-feature cell based terahertz superstructure sensor of claim 1, wherein: the flat substrate has a low refractive index and a weak absorption intensity in a terahertz frequency band, and each characteristic unit in the combined superstructure unit is an artificial electromagnetic medium with a sub-wavelength characteristic size.
3. The multi-feature cell based terahertz superstructure sensor of claim 2, wherein: the flat substrate is a quartz wafer or a high-resistance silicon wafer.
4. The multi-feature cell based terahertz superstructure sensor of claim 3, wherein: the different feature units refer to different feature sizes of the feature units, including a width-direction size or/and a length-direction size.
5. The multi-feature cell based terahertz superstructure sensor of claim 4, wherein: and all the characteristic units in each combined superstructure unit are transversely arranged and longitudinally arranged according to the order that the characteristic size changes from small to large or from large to small regularly.
6. The multi-feature cell based terahertz superstructure sensor of claim 5, wherein: the resonance modes generated by each characteristic unit in the combined superstructure unit when being excited by terahertz waves are the same, but the resonance modes appear at different terahertz frequencies and appear as uniform resonance peaks or uniform resonance valleys in a terahertz spectrum; and the resonance modes are relatively independent when the characteristic units are combined and excited by the terahertz waves.
7. The multi-feature cell based terahertz superstructure sensor of claim 6, wherein: resonance peaks or resonance valleys generated by exciting each characteristic unit in the combined superstructure unit are uniformly distributed in a certain terahertz frequency band, and the number X of the characteristic units in the combined superstructure unit is more than or equal to 9.
8. The multi-feature cell based terahertz superstructure sensor of claim 7, wherein: the frequency spacing between two adjacent resonance peaks or resonance valleys generated by exciting the characteristic units in the combined superstructure unit is less than or equal to half of the full width at half maximum of the resonance peaks or resonance valleys.
9. A method for detecting substances by using the multi-feature-cell-based terahertz superstructure sensor comprises the following steps:
s1, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit when no substance is added, and extracting transmission intensity T0(f)；
S2, adding a substance to be detected on the surface of the terahertz superstructure sensor with the combined superstructure unit;
s3, measuring a terahertz transmission pulse signal of the terahertz superstructure sensor based on the multi-feature unit after adding a substance to be detected and extracting transmission intensity Ts(f)；
S4, according to a formula: absorbance log [ T ]0(f)/Ts(f)]And obtaining a characteristic absorption spectrum of the substance to be detected, qualitatively analyzing the substance to be detected according to the position of the characteristic absorption peak in the characteristic absorption spectrum, and quantitatively analyzing the substance to be detected according to the strength of the characteristic absorption peak.
10. The method of substance detection using the multi-feature cell based terahertz superstructure sensor of claim 9, wherein: in the case where the terahertz transmission signal band is shifted due to the addition of the sample, the transmission signal band may be corrected and then the step S4 may be performed.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237846A (en) * | 2021-05-06 | 2021-08-10 | 南京大学 | Preparation of pixilated terahertz spectrum sensing chip and preparation method thereof |
| CN113241529A (en) * | 2021-05-20 | 2021-08-10 | 天津工业大学 | Super-surface micro antenna array based on multiple high structure |
| CN113670848A (en) * | 2021-08-23 | 2021-11-19 | 中国人民解放军军事科学院国防科技创新研究院 | High-resolution broadband terahertz detector based on pixelized structure and detection method |
| CN117388210A (en) * | 2023-12-12 | 2024-01-12 | 常熟理工学院 | Super-surface sensor and application |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100148050A1 (en) * | 2007-03-09 | 2010-06-17 | Mazhar Ali Bari | Security mark |
| CN103499534A (en) * | 2013-07-25 | 2014-01-08 | 中国科学院苏州纳米技术与纳米仿生研究所 | High-sensitivity terahertz microfluidic channel sensor and preparation method thereof |
| CN103984124A (en) * | 2014-05-15 | 2014-08-13 | 东南大学 | Multi-frequency response TeraHertz wave modulator |
| CN105738314A (en) * | 2016-01-12 | 2016-07-06 | 浙江大学 | Portable terahertz spectrum detection device and detection method |
| CN107579328A (en) * | 2017-09-26 | 2018-01-12 | 中国计量大学 | A kind of super transparent resonance device of surface electromagnetically induced of E shapes all dielectric |
| CN107994353A (en) * | 2018-01-10 | 2018-05-04 | 中国计量大学 | A kind of broadband Meta Materials Terahertz wave absorbing device |
| CN108493567A (en) * | 2018-02-13 | 2018-09-04 | 浙江大学 | Adjustable Terahertz resonant cavity based on superstructure and its method for species analysis |
-
2020
- 2020-11-20 CN CN202011305418.5A patent/CN112557338B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100148050A1 (en) * | 2007-03-09 | 2010-06-17 | Mazhar Ali Bari | Security mark |
| CN103499534A (en) * | 2013-07-25 | 2014-01-08 | 中国科学院苏州纳米技术与纳米仿生研究所 | High-sensitivity terahertz microfluidic channel sensor and preparation method thereof |
| CN103984124A (en) * | 2014-05-15 | 2014-08-13 | 东南大学 | Multi-frequency response TeraHertz wave modulator |
| CN105738314A (en) * | 2016-01-12 | 2016-07-06 | 浙江大学 | Portable terahertz spectrum detection device and detection method |
| CN107579328A (en) * | 2017-09-26 | 2018-01-12 | 中国计量大学 | A kind of super transparent resonance device of surface electromagnetically induced of E shapes all dielectric |
| CN107994353A (en) * | 2018-01-10 | 2018-05-04 | 中国计量大学 | A kind of broadband Meta Materials Terahertz wave absorbing device |
| CN108493567A (en) * | 2018-02-13 | 2018-09-04 | 浙江大学 | Adjustable Terahertz resonant cavity based on superstructure and its method for species analysis |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237846A (en) * | 2021-05-06 | 2021-08-10 | 南京大学 | Preparation of pixilated terahertz spectrum sensing chip and preparation method thereof |
| CN113241529A (en) * | 2021-05-20 | 2021-08-10 | 天津工业大学 | Super-surface micro antenna array based on multiple high structure |
| CN113670848A (en) * | 2021-08-23 | 2021-11-19 | 中国人民解放军军事科学院国防科技创新研究院 | High-resolution broadband terahertz detector based on pixelized structure and detection method |
| CN113670848B (en) * | 2021-08-23 | 2022-08-02 | 中国人民解放军军事科学院国防科技创新研究院 | High-resolution broadband terahertz detector based on pixelized structure and detection method |
| CN117388210A (en) * | 2023-12-12 | 2024-01-12 | 常熟理工学院 | Super-surface sensor and application |
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