CN107980013B - 表面被覆切削工具及其制造方法 - Google Patents

表面被覆切削工具及其制造方法 Download PDF

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Publication number
CN107980013B
CN107980013B CN201780002260.4A CN201780002260A CN107980013B CN 107980013 B CN107980013 B CN 107980013B CN 201780002260 A CN201780002260 A CN 201780002260A CN 107980013 B CN107980013 B CN 107980013B
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China
Prior art keywords
layer
lower layer
substrate
chlorine
atomic concentration
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CN201780002260.4A
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English (en)
Chinese (zh)
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CN107980013A (zh
Inventor
吉村光平
今村晋也
金冈秀明
阿侬萨克·帕索斯
小野聪
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Sumitomo Electric Hardmetal Corp
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Sumitomo Electric Hardmetal Corp
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/16—Milling-cutters characterised by physical features other than shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D77/00—Reaming tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23F—MAKING GEARS OR TOOTHED RACKS
    • B23F21/00—Tools specially adapted for use in machines for manufacturing gear teeth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G5/00—Thread-cutting tools; Die-heads
    • B23G5/02—Thread-cutting tools; Die-heads without means for adjustment
    • B23G5/06—Taps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26B—HAND-HELD CUTTING TOOLS NOT OTHERWISE PROVIDED FOR
    • B26B9/00—Blades for hand knives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Milling, Broaching, Filing, Reaming, And Others (AREA)
CN201780002260.4A 2016-08-24 2017-04-25 表面被覆切削工具及其制造方法 Active CN107980013B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016163628A JP6635340B2 (ja) 2016-08-24 2016-08-24 表面被覆切削工具およびその製造方法
JP2016-163628 2016-08-24
PCT/JP2017/016405 WO2018037625A1 (ja) 2016-08-24 2017-04-25 表面被覆切削工具およびその製造方法

Publications (2)

Publication Number Publication Date
CN107980013A CN107980013A (zh) 2018-05-01
CN107980013B true CN107980013B (zh) 2019-07-05

Family

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Application Number Title Priority Date Filing Date
CN201780002260.4A Active CN107980013B (zh) 2016-08-24 2017-04-25 表面被覆切削工具及其制造方法

Country Status (6)

Country Link
US (1) US10654181B2 (https=)
EP (1) EP3308886B1 (https=)
JP (1) JP6635340B2 (https=)
KR (1) KR102170166B1 (https=)
CN (1) CN107980013B (https=)
WO (1) WO2018037625A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7289186B2 (ja) * 2018-03-14 2023-06-09 住友ゴム工業株式会社 耐摩耗性能及び耐破壊性能を予測する方法
WO2020241533A1 (ja) * 2019-05-29 2020-12-03 京セラ株式会社 被覆工具および切削工具
US12325074B2 (en) 2020-06-11 2025-06-10 Sumitomo Electric Hardmetal Corp. Cutting tool
US12325075B2 (en) 2020-06-11 2025-06-10 Sumitomo Electric Hardmetal Corp. Cutting tool
US12427580B2 (en) 2020-06-11 2025-09-30 Sumitomo Electric Hardmetal Corp. Cutting tool
JP7103568B1 (ja) * 2021-03-22 2022-07-20 住友電工ハードメタル株式会社 切削工具
EP4091747B1 (en) * 2021-03-22 2024-07-17 Sumitomo Electric Hardmetal Corp. Cutting tools
WO2022201228A1 (ja) * 2021-03-22 2022-09-29 住友電工ハードメタル株式会社 切削工具
WO2023034286A1 (en) 2021-08-30 2023-03-09 Kennametal Inc. Surface coated cutting tools
CN117203010B (zh) * 2022-01-25 2024-06-07 住友电气工业株式会社 切削工具及其制造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1079716A (zh) * 1992-06-02 1993-12-22 住友化学工业株式会社 α-氧化铝
CN1138881A (zh) * 1994-01-14 1996-12-25 桑德维克公司 具有氧化物涂层的切削刀具
CN1318015A (zh) * 1999-06-16 2001-10-17 Tdy工业公司 基材的处理方法
JP2008173737A (ja) * 2007-01-22 2008-07-31 Hitachi Tool Engineering Ltd 酸化アルミニウム被覆工具
CN101652500A (zh) * 2007-04-02 2010-02-17 森拉天时奥地利有限公司 多层cvd涂层
CN102677016A (zh) * 2011-03-15 2012-09-19 钴碳化钨硬质合金公司 氧氮化铝涂覆的物品及其制造方法
CN103317157A (zh) * 2012-03-21 2013-09-25 三菱综合材料株式会社 表面包覆切削工具
JP2014018886A (ja) * 2012-07-13 2014-02-03 Mitsubishi Materials Corp 硬質被覆層がすぐれた初期なじみ性、耐チッピング性を発揮する表面被覆切削工具
CN104726848A (zh) * 2013-12-24 2015-06-24 三菱综合材料株式会社 表面包覆切削工具

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DE69721600T2 (de) * 1996-01-24 2004-04-08 Mitsubishi Materials Corp. Beschichtetes Schneidwerkzeug
SE522736C2 (sv) * 2001-02-16 2004-03-02 Sandvik Ab Aluminiumoxidbelagt skärverktyg och metod för att framställa detsamma
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ES2567039T5 (es) 2011-09-16 2019-07-03 Walter Ag Herramienta de corte revestida con alúmina alfa que contiene azufre
JP5854321B2 (ja) 2011-11-30 2016-02-09 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5838789B2 (ja) * 2011-12-22 2016-01-06 三菱マテリアル株式会社 硬質被覆層が高速断続切削ですぐれた耐チッピング性を発揮する表面被覆切削工具
RU2667187C2 (ru) 2013-06-27 2018-09-17 Сандвик Интеллекчуал Проперти Аб Снабженный покрытием режущий инструмент
JP6272356B2 (ja) * 2013-12-26 2018-01-31 京セラ株式会社 切削工具
RU2675190C2 (ru) * 2014-01-30 2018-12-17 Сандвик Интеллекчуал Проперти Аб Покрытый оксидом алюминия режущий инструмент
KR102216097B1 (ko) * 2015-08-28 2021-02-15 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구 및 그 제조 방법
US9863064B2 (en) * 2015-10-09 2018-01-09 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1079716A (zh) * 1992-06-02 1993-12-22 住友化学工业株式会社 α-氧化铝
CN1138881A (zh) * 1994-01-14 1996-12-25 桑德维克公司 具有氧化物涂层的切削刀具
CN1318015A (zh) * 1999-06-16 2001-10-17 Tdy工业公司 基材的处理方法
JP2008173737A (ja) * 2007-01-22 2008-07-31 Hitachi Tool Engineering Ltd 酸化アルミニウム被覆工具
CN101652500A (zh) * 2007-04-02 2010-02-17 森拉天时奥地利有限公司 多层cvd涂层
CN102677016A (zh) * 2011-03-15 2012-09-19 钴碳化钨硬质合金公司 氧氮化铝涂覆的物品及其制造方法
CN103317157A (zh) * 2012-03-21 2013-09-25 三菱综合材料株式会社 表面包覆切削工具
JP2014018886A (ja) * 2012-07-13 2014-02-03 Mitsubishi Materials Corp 硬質被覆層がすぐれた初期なじみ性、耐チッピング性を発揮する表面被覆切削工具
CN104726848A (zh) * 2013-12-24 2015-06-24 三菱综合材料株式会社 表面包覆切削工具

Also Published As

Publication number Publication date
EP3308886A1 (en) 2018-04-18
WO2018037625A1 (ja) 2018-03-01
EP3308886A4 (en) 2019-07-31
KR102170166B1 (ko) 2020-10-26
US20180339415A1 (en) 2018-11-29
CN107980013A (zh) 2018-05-01
US10654181B2 (en) 2020-05-19
JP2018030193A (ja) 2018-03-01
JP6635340B2 (ja) 2020-01-22
KR20190041885A (ko) 2019-04-23
EP3308886B1 (en) 2022-07-20

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