CN107918066A - Vacuum environment test equipment - Google Patents
Vacuum environment test equipment Download PDFInfo
- Publication number
- CN107918066A CN107918066A CN201710891179.8A CN201710891179A CN107918066A CN 107918066 A CN107918066 A CN 107918066A CN 201710891179 A CN201710891179 A CN 201710891179A CN 107918066 A CN107918066 A CN 107918066A
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- Prior art keywords
- liquid nitrogen
- vacuum
- test equipment
- nitrogen
- environment test
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/002—Test chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/60—Investigating resistance of materials, e.g. refractory materials, to rapid heat changes
Abstract
The present invention provides a kind of vacuum environment test equipment, which includes vacuum sealing chamber, experimental provision, experiment porch, heating component and cooling component.There is lab space, experimental provision and experiment porch are arranged in vacuum sealing room, and heating component and cooling component are arranged on experiment porch in vacuum sealing room.Cooling component includes liquid nitrogen ice chest, liquid nitrogen intake line and nitrogen output pipe, and liquid nitrogen ice chest is interior formed with liquid nitrogen volatilization space.Liquid nitrogen intake line and nitrogen output pipe are connected with liquid nitrogen ice chest, and liquid nitrogen intake line is used into liquid nitrogen volatilization space be passed through liquid nitrogen, and nitrogen output pipe is used to out of liquid nitrogen volatilization space draw the nitrogen after volatilization, and liquid nitrogen ice chest is used to cool down to testing element.Apply the technical scheme of the present invention, more can really simulate the exceedingly odious temperature change condition of the outer space, more comprehensively be tested with treating testing element.
Description
Technical field
The present invention relates to technical field of experiment equipment, in particular to a kind of vacuum environment test equipment.
Background technology
20th century, the mankind in aerospace field achieved significant achievements, were vigorously sent out into 21 century aerospace cause
Exhibition, will carry out more high-caliber aerospace operations.The mankind are just developing various space probes to explore the solar system at present
Other celestial bodies, the even outer space.Aeronautical and space technology is the comprehensive embodiment of national comprehensive strength, it is acted on will be far beyond
Science and technology field can all produce more extensive and more far-reaching shadow down to human society life in itself, to politics, economic, military affairs
Ring.Aeronautical and space technology is inseparable with the development and breakthrough of aerospace material technology, and wherein one of critical material is exactly exhausted
Edge material.
Aerospace equipment is operated under exceedingly odious environmental condition, and the electric property quality of insulating materials directly affects
The stability and security of aerospace equipment operation.Extreme environment condition includes following several respects:First, extremely low temperature
And the big temperature difference.Spacecraft can bear very big temperature change in emission process, during Earth's orbit longtime running, be exposed to
Ambient temperature is in the environment of 3K, and the change of its surface temperature quickly changes because of running track difference between 113K to 393K.Temperature
On the one hand one of an important factor for degree is influence insulating material properties, extreme temperature can produce material internal stress influence, heat
The storage of stress may cause the deformation of material, or even be discharged by the form of material cracks;On the other hand, insulating materials permitted
Also the change to temperature is very sensitive for more electric parameters, particularly the space charge characteristic under different temperatures environment and dielectric damage
Characteristic etc. is consumed, so as to influence macroscopical electrical property of material.Low temperature environment is usually also with high vacuum environment, under vacuum environment absolutely
Edge material surface is extremely dry, easily forms charge trap.Second, the outer space substantially belongs to vacuum environment.Insulate in vacuum environment
Material internal small-molecule substance is constantly extracted out, can be made a big impact to the resistivity and space charge characteristic of material.Third,
Electric charge can be constantly injected into material surface, make material inner product by the various high energy charged particles irradiation of the outer space, this kind of high energy particle
Poly- electric charge ultimately results in material and breakdown or flashover occurs, directly affect spacecraft so that in two sections of generation potential differences of material
Safety and the service life.
Therefore, simulating test of the exceedingly odious experimental situation of the outer space for insulating materials has positive meaning.And
The chamber of the existing simulation outer space, can not meet the requirement of the temperature change in vacuum environment, while be limited by refrigeration side
Formula, its lowest temperature is higher, is all higher than 200K.In addition, existing chamber, can not also meet at the same time vacuum, high/low temperature circulation,
Electron beam or x-ray bombardment and surface charge test Collaborative experiment.
The content of the invention
It is a primary object of the present invention to provide a kind of vacuum environment test equipment, to solve vacuum environment in the prior art
Test equipment more can not really simulate the problem of outer space exceedingly odious experimental situation.
To achieve these goals, the present invention provides a kind of vacuum environment test equipment, including:Vacuum sealing chamber, institute
Stating has lab space in vacuum sealing room;Experimental provision, is arranged in the vacuum sealing room, for treat testing element into
Row test;Experiment porch, is arranged in the vacuum sealing room, for placing the element to be tested;Heating component, is arranged on
On the experiment porch, for being heated to the element to be tested;Cool down component, is arranged on the experiment porch, uses
Cool down in the element to be tested, the cooling component includes liquid nitrogen ice chest, liquid nitrogen intake line and nitrogen efferent duct
Road, in the liquid nitrogen ice chest formed with liquid nitrogen volatilize space, the liquid nitrogen intake line and the nitrogen output pipe with it is described
Liquid nitrogen ice chest is connected, and the liquid nitrogen intake line is used into liquid nitrogen volatilization space be passed through liquid nitrogen, the nitrogen output
Pipeline is used to out of the liquid nitrogen volatilization space draw the nitrogen after volatilization, and the liquid nitrogen ice chest is used to drop the testing element
Temperature.
Further, the cooling component further includes:Dewar container for liquefied nitrogen, is connected, the liquid nitrogen with the liquid nitrogen intake line
Liquid nitrogen is stored in Dewar;Mechanical pump, is connected with the Dewar container for liquefied nitrogen, and the mechanical pump is used for the liquid in the Dewar container for liquefied nitrogen
Nitrogen is conveyed to the liquid nitrogen intake line.
Further, the vacuum environment test equipment further includes vacuum generating device, the vacuum generating device and institute
Vacuum sealing chamber's connection is stated, for being vacuumized to the lab space.
Further, the vacuum generating device includes:Molecular pump, is connected with the vacuum sealing chamber;Vacuum pump, passes through
The molecular pump is connected with the vacuum pump.
Further, the experimental provision includes:Probe mounting bracket, is arranged in the lab space;Probe, installation
In the probe mounting bracket, the probe can the activity in the probe mounting bracket.
Further, the probe mounting bracket includes:Horizontal stand, is arranged horizontally at the lab space
It is interior;Vertical rack, is movably mounted on the horizontal stand in the horizontal direction, and the probe is movably in a vertical direction
On the vertical rack.
Further, the probe mounting bracket further includes:Swinging mounting, is arranged horizontally at the lab space
Interior, the horizontal stand is rotatably arranged on the swinging mounting along the horizontal plane.
Further, the swinging mounting is circle, and the both ends of the horizontal stand are slidably disposed on the rotation
On stent, and the horizontal stand can be rotated along the center of circle of the swinging mounting.
Further, the vacuum sealing chamber includes columnar sealing chamber body and covers half be located in the sealing chamber body
Spherical lid, the swinging mounting are installed in the sealing chamber body.
Further, the vacuum environment test equipment further includes vacuum checking device, and the vacuum checking device is set
In the vacuum sealing chamber, for detecting the air pressure in the lab space.
Further, the vacuum checking device includes:Ionization gauge detection unit, is arranged in the vacuum sealing chamber,
For detecting the air pressure of below 1pa;Pirani gauge detection unit, is arranged in the vacuum sealing chamber, for detecting more than 1pa's
Air pressure.
Further, the experimental provision further includes:Power device, is arranged on the experiment porch, for described
Element to be tested is powered.
Further, the power device includes energization stent and two be movably mounted on the energization stent
Electrode, spacing is adjustably set between described two electrodes.
Further, the experimental provision further includes electron gun, and the electron gun is arranged in the lab space, is used for
Ionising radiation is carried out to the element to be tested.
Apply the technical scheme of the present invention, liquid nitrogen is passed through into liquid nitrogen ice chest by liquid nitrogen intake line, by liquid nitrogen
Low temperature cools down to treat testing element by liquid nitrogen ice chest, and the nitrogen after liquid nitrogen is volatilized again afterwards passes through nitrogen efferent duct
Pass goes out liquid nitrogen ice chest., can be quickly by element to be tested by using the characteristic of the low temperature of liquid nitrogen using the technical solution
Temperature is reduced to close to 78K.It can stop being passed through liquid nitrogen to liquid nitrogen ice chest after cooling, then open heating component to be tested
Element is heated, quickly to raise the temperature of element to be tested.Extremely disliked in this way, just more can really simulate the outer space
Bad temperature change condition, is more comprehensively tested with treating testing element.
In addition to objects, features and advantages described above, the present invention also has other objects, features and advantages.
Below with reference to figure, the present invention is described in further detail.
Brief description of the drawings
The Figure of description for forming the part of the present invention is used for providing a further understanding of the present invention, and of the invention shows
Meaning property embodiment and its explanation are used to explain the present invention, do not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 shows the overall structure diagram of the embodiment of vacuum environment test equipment according to the present invention;
Fig. 2 shows the schematic top plan view of the probe mounting bracket of the vacuum environment test equipment of Fig. 1;
Fig. 3 shows the schematic front view of the probe mounting bracket of Fig. 2.
Wherein, above-mentioned attached drawing is marked including the following drawings:
10th, vacuum sealing chamber;11st, chamber body is sealed;111st, observation window;12nd, lid;121st, light hole;20th, experimental provision;
21st, pop one's head in;22nd, horizontal stand;23rd, vertical rack;24th, swinging mounting;25th, energization stent;26th, electrode;261st, bushing;
262nd, ground wire introduces interface;27th, electron gun;28th, aviation plug;30th, experiment porch;40th, heating component;50th, cool down component;
51st, liquid nitrogen ice chest;52nd, liquid nitrogen intake line;53rd, nitrogen output pipe;54th, Dewar container for liquefied nitrogen;55th, mechanical pump;60th, vacuum occurs
Device;61st, molecular pump;62nd, vacuum pump;71st, ionization gauge detection unit;72nd, Pirani gauge detection unit.
Embodiment
It should be noted that in the case where there is no conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.Below with reference to the accompanying drawings and the present invention will be described in detail in conjunction with the embodiments.
In order to make those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Attached drawing, is clearly and completely described the technical solution in the embodiment of the present invention, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained without making creative work, should all belong to the model that the present invention protects
Enclose.
It should be noted that term " first " in description and claims of this specification and above-mentioned attached drawing, "
Two " etc. be for distinguishing similar object, without for describing specific order or precedence.It should be appreciated that so use
Term can exchange in the appropriate case, so as to the embodiment of the present invention described herein.In addition, term " comprising " and " tool
Have " and their any deformation, it is intended that cover it is non-exclusive include, for example, containing series of steps or unit
Process, method, system, product or equipment are not necessarily limited to those steps clearly listed or unit, but may include without clear
It is listing to Chu or for the intrinsic other steps of these processes, method, product or equipment or unit.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
Fig. 1 shows the embodiment of the vacuum environment test equipment of the present invention, which includes vacuum
Closed chamber 10, experimental provision, experiment porch 30, heating component 40 and cooling component.There is experiment sky in vacuum sealing chamber 10
Between, experimental provision and experiment porch 30 are arranged in vacuum sealing chamber 10, and experimental provision is tested for treating testing element,
Experiment porch 30 is used to place element to be tested.Heating component 40 and cooling component are arranged on experiment porch 30, heating component
40 are heated for treating testing element, and cooling component cools down for treating testing element.Cooling component includes liquid nitrogen
Ice chest 51, liquid nitrogen intake line 52 and nitrogen output pipe 53, liquid nitrogen ice chest 51 are interior formed with liquid nitrogen volatilization space.Liquid nitrogen inputs
Pipeline 52 and nitrogen output pipe 53 are connected with liquid nitrogen ice chest 51, and liquid nitrogen intake line 52 is used into liquid nitrogen volatilization space lead to
Enter liquid nitrogen, nitrogen output pipe 53 is used to out of liquid nitrogen volatilization space draw the nitrogen after volatilization, and liquid nitrogen ice chest 51 is used for surveying
Try element cooling.
Apply the technical scheme of the present invention, liquid nitrogen is passed through into liquid nitrogen ice chest 51 by liquid nitrogen intake line 52, by liquid
The low temperature of nitrogen cools down to treat testing element by liquid nitrogen ice chest 51, and the nitrogen after liquid nitrogen is volatilized again afterwards passes through nitrogen
Output pipe 53 draws liquid nitrogen ice chest 51.Using the technical solution, by using the characteristic of the low temperature of liquid nitrogen, will quickly can treat
The temperature of testing element is reduced to close to 78K.It can stop being passed through liquid nitrogen to liquid nitrogen ice chest 51 after cooling, then open heating
Component 40 is treated testing element and is heated, quickly to raise the temperature of element to be tested.In this way, just more can really it simulate
Go out the exceedingly odious temperature change condition of the outer space, more comprehensively tested with treating testing element.
Optionally, in the technical solution of the present embodiment, heating component 40 is heating plate.It is more highly preferred to, allows heating group
Part 40 and cooling component carry out temperature adjustment all in a manner of contact heat conductien to treat testing element, it is possible to achieve member to be tested
Part continuous fast tunable between 78K-573K, its rate temperature change maximum are 100K/min.
As shown in Figure 1, as an alternative embodiment, cooling component further include Dewar container for liquefied nitrogen 54 and mechanical pump 55,
Dewar container for liquefied nitrogen 54 is connected with liquid nitrogen intake line 52, and mechanical pump 55 is connected with Dewar container for liquefied nitrogen 54.Liquid is stored in Dewar container for liquefied nitrogen 54
Nitrogen, is conveyed to liquid nitrogen intake line 52 during use by mechanical pump 55 by the liquid nitrogen in Dewar container for liquefied nitrogen 54.It is more highly preferred to, in liquid
Valve is both provided with nitrogen addition pipeline 52 and nitrogen output pipe 53, can be controlled by the valve on liquid nitrogen intake line 52
The input of liquid nitrogen, the output of nitrogen can be controlled by the valve on nitrogen output pipe 53.When in use, mechanical pump 55 is passed through
Liquid nitrogen in Dewar, is conveyed into liquid nitrogen ice chest 51 by the air-blowing into Dewar container for liquefied nitrogen 54 using law of connected vessels, defeated by liquid nitrogen
Enter the Valve controlling liquid nitrogen flow velocity on the valve and nitrogen output pipe 53 on pipeline 52, to realize the control of rate of temperature fall.
Specifically, when carrying out temperature control:
1st, when pre-set programs enter cooling step, heating component 40 is stopped, and opens on liquid nitrogen intake line 52
Valve, control machinery pump 55 air-blowing into Dewar container for liquefied nitrogen 54 so that in the liquid nitrogen press-in liquid nitrogen ice chest 51 in Dewar container for liquefied nitrogen 54, when
Liquid nitrogen, which enters after liquid nitrogen ice chest 51 preheats, to volatilize, and is discharged gaseous nitrogen atmosphere by the valve on nitrogen output pipe 53.
2nd, mechanical pump 55 stops air-blowing and simultaneously closes off valve on nitrogen output pipe 53 after preset temperature is reached, and presets
Program, which enters, keeps low temperature step.Only when rise again exceed preset range when, mechanical pump 55 starts, the valve on liquid nitrogen intake line 52
Door is opened, and liquid nitrogen is supplemented into liquid nitrogen ice chest 51.
When the 3rd, into heating step, 40 energization work of heating component, the valve on liquid nitrogen intake line 52 is closed, and nitrogen is defeated
Go out the valve opening on pipeline 53 so that volatilization liquid nitrogen can discharge, and heating rate adjusts heating component by temperature controller
40 temperature, realize automatic control linear temperature increase.
When the 4th, keeping step into high temperature, 40 power of heating component reduces so that specimen temperature maintains a certain range.
In the technical solution of the present embodiment, as shown in Figure 1, vacuum environment test equipment further includes vacuum generating device
60, vacuum generating device 60 is connected with vacuum sealing chamber 10, for being vacuumized to lab space.It is right by vacuum generating device 60
Vacuumized in vacuum sealing chamber 10, it is ensured that the vacuum in lab space, and then more really simulate outer space pole
Hold severe experimental situation.As a preferred embodiment, vacuum generating device 60 includes molecular pump 61 and vacuum pump 62,
Molecular pump 61 is connected with vacuum sealing chamber 10, and vacuum pump 62 is connected by molecular pump 61 with vacuum pump 62.When in use, by true
Sky pump 62 under the near 10Pa of air pressure in cavity, will open molecular pump 61 afterwards and cavity air pressure be down to 10-3Below Pa.It is if default
When gaseous environment is vacuum, molecular pump operating is kept.If pre-set gas environment is air or nitrogen, molecular pump is closed,
Open charging valve to inflate into lab space, valve is closed after preset pressure is reached.Pass through above-mentioned vacuum generating device
60, the vacuum in lab space can be maintained 10-3Below Pa, to simulate exceedingly odious outer space environment.
Preferably, in the technical solution of the present embodiment, vacuum environment test equipment further includes vacuum checking device, vacuum
Detection device is arranged in vacuum sealing chamber 10.Pass through the air pressure in vacuum checking device test experience space, it can be ensured that real
The air pressure tested in space maintains predetermined value, if the atmospheric pressure value detected and predetermined value are variant, can be sent out again by vacuum
Air pressure is adjusted in generating apparatus 60.As shown in Figure 1, in the technical solution of the present embodiment, vacuum checking device includes electricity
It is arranged on from rule detection unit 71 and Pirani gauge detection unit 72, ionization gauge detection unit 71 in vacuum sealing chamber 10, Pirani gauge
Detection unit 72 is arranged in vacuum sealing chamber 10.Ionization gauge detection unit 71 is used for the air pressure for detecting below 1pa, Pirani gauge inspection
Survey the air pressure that unit 72 is used to detect more than 1pa.In this way, the air pressure in vacuum sealing chamber 10 can be more targetedly detected,
To improve the precision of detection.
As shown in Figure 1, in the technical solution of the present embodiment, experimental provision includes probe mounting bracket and probe 21, visits
Head mounting bracket is arranged in lab space, and probe 21 is installed in probe mounting bracket, and probe 21 can be in probe mounting bracket
Upper activity.In use, the mobile probe 21 in probe mounting bracket, can allow probe 21 treat the different parts of testing element into
Row detection.As shown in figure 3, in the technical solution of the present embodiment, probe mounting bracket includes horizontal stand 22 and vertical rack
23, horizontal stand 22 is arranged horizontally in lab space, and vertical rack 23 is movably mounted at water in the horizontal direction
On flat stent 22, probe 21 is installed on vertical rack 23 movably in a vertical direction.When in use, by horizontal stand
Mobile vertical rack 23 on 22, can adjust 21 position in the horizontal direction of probe, be visited by mobile on vertical rack 23
First 21, the position of 21 in the vertical directions of probe can be adjusted.It is more highly preferred to, as shown in Figure 1, the probe installation of the present embodiment
Stent further includes swinging mounting 24, and swinging mounting 24 is arranged horizontally in lab space, and horizontal stand 22 is along the horizontal plane
It is rotatably arranged on swinging mounting 24.In use, matching somebody with somebody by swinging mounting 24, horizontal stand 22 and vertical rack 23
Close, it is possible to achieve 21 three-dimensional position in lab space of probe is adjustable.As shown in Fig. 2, in the technical solution of the present embodiment,
Swinging mounting 24 is circle, and the both ends of horizontal stand 22 are slidably disposed on swinging mounting 24, and horizontal stand 22 can
To be rotated along the center of circle of swinging mounting 24.By probe mounting bracket on driving device is installed, can drive horizontal stand 22,
The movement of vertical rack 23 and probe 21.Optionally, driving device is that motor can be selected to coordinate leadscrew-nut mechanism or tooth
Rackwork is taken turns to realize the movement of above-mentioned component.
In the technical solution of the present embodiment, state vacuum sealing chamber 10 include it is columnar sealing chamber body 11 and lid be located at it is close
The hemispheric lid 12 in chamber body 11 is sealed, swinging mounting 24 is installed in sealing chamber body 11.Optionally, in sealing chamber body 11
Observation window 111 is provided with, can be with the experiment progress in observation experiment space by observation window 111.It is more highly preferred to, in lid 12
On be provided with light hole 121, and sapphire glass is installed to seal on light hole 121, with to thang-kng in lab space, with
The light of observation is provided.Alternatively, it is also possible to carry out X-ray, electron beam and ultraviolet spoke to lab space by the light hole 121
According to.
As shown in Figure 1, the experimental provision of the present embodiment further includes power device, power device is arranged on experiment porch 30
On, it is powered for treating testing element.Testing element is treated by power device to be powered, and can coordinate 21 pairs of probe
Element to be tested carries out surface charge test.As a preferred embodiment, in the present embodiment, power device includes logical
Electric stent 25 and two electrodes 26 being movably mounted on energization stent 25, spacing is adjustably set between two electrodes 26
Put.In use, by adjusting spacing between two electrodes 26, testing element can be treated and be fixed.Preferably, electrode 26 is
Brass electrode.As shown in Figure 1, in the technical solution of the present embodiment, ground wire introducing is provided with vacuum sealing chamber 10 and is connect
Mouth 262 and bushing 261.In use, between element to be tested is put into two brass electrodes, and pass through energization stent 25
Brass electrode is fixed.High-voltage potential and ground potential introduce interface 262 and two Huangs by bushing 261 and ground wire respectively
Copper electrode connects, so as to fulfill the injection of testing element internal charge is treated.
As a kind of embodiment being more highly preferred to, as shown in Figure 1, the experimental provision of the present embodiment further includes electron gun
27, electron gun 27 is arranged in lab space, carries out ionising radiation for treating testing element, and then simulate the outer space to have
The environment of height radiation.Optionally, aviation plug 28 is additionally provided with vacuum sealing chamber 10, can also be connected by aviation plug 28
Connect other electrical equipments.
Unless specifically stated otherwise, the component and positioned opposite, the digital table of step otherwise illustrated in these embodiments
Do not limited the scope of the invention up to formula and numerical value.At the same time, it should be appreciated that for the ease of description, each portion shown in attached drawing
The size divided not is to be drawn according to actual proportionate relationship.For technology, side known to person of ordinary skill in the relevant
Method and equipment may be not discussed in detail, but in the appropriate case, the technology, method and apparatus should be considered as authorizing explanation
A part for book.In shown here and discussion all examples, any occurrence should be construed as merely exemplary, and
Not by way of limitation.Therefore, the other examples of exemplary embodiment can have different values.It should be noted that:Similar label
Similar terms is represented in following attached drawing with letter, therefore, once it is defined in a certain Xiang Yi attached drawing, then subsequent attached
It need not be further discussed in figure.
For the ease of description, spatially relative term can be used herein, as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation of sign.It should be appreciated that spatially relative term is intended to comprising the orientation except device described in figure
Outside different azimuth in use or operation.For example, if the device in attached drawing is squeezed, it is described as " in other devices
It will be positioned as " under other devices or construction after the device of part or construction top " or " on other devices or construction "
Side " or " under other devices or construction ".Thus, exemplary term " ... top " can include " ... top " and
" in ... lower section " two kinds of orientation.The device can also other different modes positioning (being rotated by 90 ° or in other orientation), and
And respective explanations are made to the opposite description in space used herein above.
In the description of the present invention, it is to be understood that the noun of locality such as " forward and backward, upper and lower, left and right ", " laterally, vertical,
Vertically, orientation or position relationship indicated by level " and " top, bottom " etc. are normally based on orientation or position shown in the drawings and close
System, is for only for ease of the description present invention and simplifies description, in the case where not making conversely explanation, these nouns of locality do not indicate that
There must be specific orientation with the device or element for implying meaning or with specific azimuth configuration and operation, therefore cannot manage
Solve as limiting the scope of the invention;The noun of locality " inside and outside " refers to relative to inside and outside each component profile in itself.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the invention, for the skill of this area
For art personnel, the invention may be variously modified and varied.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (14)
- A kind of 1. vacuum environment test equipment, it is characterised in that including:Vacuum sealing chamber (10), the vacuum sealing chamber (10) is interior to have lab space;Experimental provision, is arranged in the vacuum sealing chamber (10), is tested for treating testing element;Experiment porch (30), is arranged in the vacuum sealing chamber (10), for placing the element to be tested;Heating component (40), is arranged on the experiment porch (30), for being heated to the element to be tested;Cool down component, is arranged on the experiment porch (30), for cooling down to the element to be tested, the cooling group Part includes liquid nitrogen ice chest (51), liquid nitrogen intake line (52) and nitrogen output pipe (53), is formed in the liquid nitrogen ice chest (51) There are liquid nitrogen volatilization space, the liquid nitrogen intake line (52) and the nitrogen output pipe (53) and liquid nitrogen ice chest (51) phase Connection, the liquid nitrogen intake line (52) are used to be passed through liquid nitrogen, the nitrogen output pipe into liquid nitrogen volatilization space (53) it is used to out of the liquid nitrogen volatilization space draw the nitrogen after volatilization, the liquid nitrogen ice chest (51) is used for the test member Part cools down.
- 2. vacuum environment test equipment according to claim 1, it is characterised in that the cooling component further includes:Dewar container for liquefied nitrogen (54), is connected with the liquid nitrogen intake line (52), and liquid nitrogen is stored in the Dewar container for liquefied nitrogen (54);Mechanical pump (55), is connected with the Dewar container for liquefied nitrogen (54), and the mechanical pump (55) is used in the Dewar container for liquefied nitrogen (54) Liquid nitrogen be conveyed to the liquid nitrogen intake line (52).
- 3. vacuum environment test equipment according to claim 1, it is characterised in that the vacuum environment test equipment also wraps Vacuum generating device (60) is included, the vacuum generating device (60) is connected with the vacuum sealing chamber (10), for the reality Space is tested to vacuumize.
- 4. vacuum environment test equipment according to claim 3, it is characterised in that vacuum generating device (60) bag Include:Molecular pump (61), is connected with the vacuum sealing chamber (10);Vacuum pump (62), is connected by the molecular pump (61) with the vacuum pump (62).
- 5. vacuum environment test equipment according to claim 1, it is characterised in that the experimental provision includes:Probe mounting bracket, is arranged in the lab space;Pop one's head in (21), in the probe mounting bracket, the probe (21) can the activity in the probe mounting bracket.
- 6. vacuum environment test equipment according to claim 5, it is characterised in that the probe mounting bracket includes:Horizontal stand (22), is arranged horizontally in the lab space;Vertical rack (23), is movably mounted on the horizontal stand (22) in the horizontal direction, and the probe (21) is along perpendicular Nogata is to being movably mounted on the vertical rack (23).
- 7. vacuum environment test equipment according to claim 6, it is characterised in that the probe mounting bracket further includes:Swinging mounting (24), is arranged horizontally in the lab space, and the horizontal stand (22) can turn along the horizontal plane It is arranged on dynamicly on the swinging mounting (24).
- 8. vacuum environment test equipment according to claim 7, it is characterised in that the swinging mounting (24) is circle, The both ends of the horizontal stand (22) are slidably disposed on the swinging mounting (24), and the horizontal stand (22) can To be rotated along the center of circle of the swinging mounting (24).
- 9. vacuum environment test equipment according to claim 8, it is characterised in that the vacuum sealing chamber (10) includes circle The sealing chamber body (11) and lid of tubular are located at the hemispheric lid (12) on the sealing chamber body (11), the swinging mounting (24) it is installed on the sealing chamber body (11).
- 10. vacuum environment test equipment according to claim 1, it is characterised in that the vacuum environment test equipment is also Including vacuum checking device, the vacuum checking device is arranged in the vacuum sealing chamber (10), for detecting the experiment Air pressure in space.
- 11. vacuum environment test equipment according to claim 10, it is characterised in that the vacuum checking device includes:Ionization gauge detection unit (71), is arranged in the vacuum sealing chamber (10), for detecting the air pressure of below 1pa;Pirani gauge detection unit (72), is arranged in the vacuum sealing chamber (10), for detecting the air pressure of more than 1pa.
- 12. vacuum environment test equipment according to claim 1, it is characterised in that the experimental provision further includes:Power device, is arranged on the experiment porch (30), for being powered to the element to be tested.
- 13. vacuum environment test equipment according to claim 12, it is characterised in that the power device includes the branch that is powered Frame (25) and two electrodes (26) being movably mounted on the energization stent (25), between described two electrodes (26) between Away from adjustably setting.
- 14. vacuum environment test equipment according to claim 1, it is characterised in that the experimental provision further includes electronics Rifle (27), the electron gun (27) are arranged in the lab space, for carrying out ionising radiation to the element to be tested.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710891179.8A CN107918066A (en) | 2017-09-27 | 2017-09-27 | Vacuum environment test equipment |
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CN201710891179.8A CN107918066A (en) | 2017-09-27 | 2017-09-27 | Vacuum environment test equipment |
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CN107918066A true CN107918066A (en) | 2018-04-17 |
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