CN107914355A - Resin material feedway and method, resin molding apparatus and resin forming product manufacture method - Google Patents

Resin material feedway and method, resin molding apparatus and resin forming product manufacture method Download PDF

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Publication number
CN107914355A
CN107914355A CN201710935215.6A CN201710935215A CN107914355A CN 107914355 A CN107914355 A CN 107914355A CN 201710935215 A CN201710935215 A CN 201710935215A CN 107914355 A CN107914355 A CN 107914355A
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China
Prior art keywords
resin material
mentioned
groove
supply
maintaining part
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CN201710935215.6A
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CN107914355B (en
Inventor
林口慎也
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Towa Corp
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Towa Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C31/00Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
    • B29C31/04Feeding of the material to be moulded, e.g. into a mould cavity
    • B29C31/06Feeding of the material to be moulded, e.g. into a mould cavity in measured doses, e.g. by weighting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B29C2043/181Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • B29C2043/3405Feeding the material to the mould or the compression means using carrying means
    • B29C2043/3427Feeding the material to the mould or the compression means using carrying means hopper, vessel, chute, tube, conveying screw, for material in discrete form, e.g. particles or powder or fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5875Measuring, controlling or regulating the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Weight Measurement For Supplying Or Discharging Of Specified Amounts Of Material (AREA)

Abstract

A kind of resin material feedway and method, resin molding apparatus and resin forming product manufacture method.Resin material feedway possesses:Resin material maintaining part, it keeps resin material;Groove, it is connected to resin material maintaining part, supplying the resin material for being held in the resin material maintaining part to supply object;Excitation, vibrates resin material maintaining part and groove;Weight determination part, its weight to the resin material maintaining part comprising resin material and groove are measured;Powder supply control part, it is made above-mentioned supply object be located at the outlet of groove, and the oscillation intensity of the gravimetric value setting excitation measured according to weight determination part, resin material is supplied with target flow to above-mentioned supply object;And discharge control unit, its in change supply to the resin material of above-mentioned supply object condition when, resin material receiving division is located at the outlet of groove, the resin material for residuing in groove be expelled to resin material receiving division.

Description

Resin material feedway and method, resin molding apparatus and resin forming product manufacture Method
Technical field
The present invention relates to a kind of resin material feedway for supplying resin material and method, there is resin material supply The resin molding apparatus of device and the resin forming product manufacture method using the resin material supply method.
Background technology
In order to be normally sealed from the environmental protection electronic component such as light, heat, moisture, electronic component in resin.Resin seal Method have compression forming method or transfer forming process etc..Compression forming method is by using the shaping being made of lower die and upper mold Mould, resin material is supplied to the die cavity of lower die, and after the substrate for being mounted with electronic component is installed on upper mold, one faces Lower die and upper mold carry out heating one side and mold both and be formed.It is by the way that substrate is installed on to transfer forming process After the die cavity of one of mould and lower die, one carries out heating one side in face of lower die and upper mold is molded both, and is utilized Resin is pressed into die cavity and is formed by plunger (plunger).In transferring in forming process, due to from plunger by resin give to A part for resin has been remained in the path of die cavity and has caused to waste, and can produce and semiconductor substrate or match somebody with somebody because of resin flowing The problem of line is damaged, so in recent years, compression forming method becomes mainstream.
In compression molding, the general tree for using particulate resins material or powdered resinous material as supply to lower die Fat material.Hereinafter, particulate resins material and powdered resinous material are known as " powder shaped resin material " in the lump.Powder shaped tree Fat material, will not be in freely flowing, so preferably powder shaped resin material is as equally as possible after supply in die cavity In supply to the die cavity of lower die, the flowing of resin material when being molded with reducing in die cavity.Recorded in patent document 1 from tree Powder shaped resin material is equably supplied to the resin material of the shape of corresponding die cavity, size and transfers pallet by fat material supply unit Resin material feedway.Powder shaped resin material is supplied after transferring pallet to resin material, which is moved Send on tray conveying to the lower die of compression molding apparatuss, and by the way that the gate of the bottom of resin material transfer pallet will be arranged at (shutter) open, powder shaped resin material is supplied in (making it drop) to the die cavity of lower die.In described in patent document 2 Resin material feedway in, by powder shaped resin material supply to replace in bottom set gate and be equipped with from shape film Resin material transfer pallet.Thereafter, resin material is transferred on tray conveying to lower die as described above after, pass through Aspirated from lower die side from shape film, powder shaped resin material is supplied to the die cavity of lower die.
When from resin material feedway, powder shaped resin material is supplied to resin material transfer pallet, such as it can be used Described resin material feedway in patent document 3.As shown in fig. 7, the resin material feedway 90 possesses resinous wood Expect maintaining part 91, groove 92, the excitation 93 that vibration is assigned to resin material maintaining part 91 and groove 92, measurement resin material maintaining part 91 weight the 1st measurement unit 94 and transfer mechanism 95 (furthermore in patent document 3, by resin material maintaining part 91 and groove 92 are known as " the 2nd oscillating feeder (feeder) " in the lump).
One end of groove 92 is connected to resin material maintaining part 91, and the other end, which becomes, supplies powder shaped resin material P to tree Fat material transfers the supply mouth 921 of pallet (supply object) T.Resin material transfer pallet T is held in transfer mechanism 95.Move Sending mechanism 95 is configured at the optional position that will can be supplied in the resin material of powder shaped resin material P transfer pallet T The mode of the underface of supply mouth 921 makes resin material transfer pallet T substantially horizontally move, and will be supplied with powder The resin material transfer pallet T of shape resin material P is transferred to the mechanism on lower die.The lower section of transfer mechanism 95 is provided with survey Amount maintains the 2nd measurement unit 96 of the weight of the transfer mechanism 95 of the state of resin material transfer pallet T.
Operation to resin material feedway 90 illustrates.If starting the operation of resin material feedway 90, 1st oscillating feeders (not shown) of the powder shaped resin material P gradually from the top for being arranged at resin material maintaining part 91 is supplied To resin material maintaining part 91.Weight of resin material maintaining part 91 is measured when the 1st measurement unit 94 is normal during this. Herein, the weight of resin material maintaining part 91 itself is unchanged, so the weight produced in metering incrementss (or reduce Amount) represent the incrementss (or decrement) of powder shaped resin material P in resin material maintaining part 91.Counted in the 1st measurement unit 94 When the incrementss of the powder shaped resin material P measured reach set value, stop supplying powder shaped tree to resin material maintaining part 91 Fat material P.
Secondly, resin material transfer pallet T is configured at the underface of supply mouth 921 by transfer mechanism 95.Then, excitation 93 pairs of resin material maintaining parts 91 and groove 92 assign vibration.Thus, it is contained in the powder shaped resinous wood of resin material maintaining part 91 Material P is gradually moved in groove 92, and is automatically supplied mouth 921 and dropped and be supplied to resin material transfer pallet T.At this time, more strengthen Using the vibration of excitation 93, the translational speed of powder shaped resin material P, that is, the supply to resin material transfer pallet T is fast It is bigger to spend (flow).Transfer mechanism 95 automatically supplies mouth 921 in powder shaped resin material P and is supplied to resin material transfer pallet T Period, makes resin material transfer pallet T be moved in its opening portion, equably to supply powder shaped resin material P to tree In fat material transfer pallet T.Then, reach set in the weight for the powder shaped resin material P being metered into using the 2nd measurement unit 96 During value, stop the vibration of excitation 93, stop to resin material transfer pallet T supply powder shaped resin materials P.Thus, make to 1 The action of a resin material transfer pallet T supply powder shaped resin materials P stops.Thereafter, transfer mechanism 95 will be fed with powder The resin material transfer pallet T of shape resin material P is transferred on lower die, and next resin material transfer pallet T is configured In the underface of supply mouth 921.
[background technology document]
[patent document]
[patent document 1] Japanese Unexamined Patent Publication 2007-125783 publications
[patent document 2] Japanese Unexamined Patent Publication 2010-036542 publications
[patent document 3] Japanese Unexamined Patent Publication 09-005148 publications
The content of the invention
[the invention problem to be solved]
In terminating the time point to 1 resin material transfer pallet T supply powder shaped resin materials P, such as Fig. 8 (a) and Fig. 8 (b) shown in, in having remained powder shaped resin material P in groove 92.The feed speed of powder shaped resin material P before supply stopping (flow) is faster, and the surplus of the powder shaped resin material P in groove 92 is more.In the example shown in Fig. 8 (a) and Fig. 8 (b), phase Than Fig. 8 (b), the supply of Fig. 8 (a) stop before powder shaped resin material P feed speed faster, so the powder shaped in groove 92 The amount of resin material P is more.
Supplying to the feed speed of the powder shaped resin material P of resin material transfer pallet T is necessary corresponding supply target Resin material transfer pallet T size, that is, the size of the resin forming product manufactured and make a change.For example, in resinous wood During the less situation of situation or its area shallower material transfer pallet T, slow down feed speed, in resin material transfer pallet T compared with During the larger situation of deep situation or its area, accelerate feed speed., thereafter can be such as figure if changing feed speed in this way Supplied before changing from resin material maintaining part 91 to groove 92 there are this in the position by supply mouth 921 in groove 92 as shown in 8 (c) Amount corresponding with the feed speed before changing powder shaped resin material P.On the other hand, in leaning on resin material in groove 92 The position of maintaining part 91 there are after the change of feed speed from resin material maintaining part 91 supply to groove 92 with after the change The powder shaped resin material P that feed speed is measured accordingly.Therefore, even if autoexcitation portion 93 assigns and the feed speed phase after change The vibration answered, actually becomes the feed speed after can changing and supplies powder shaped resin material P to resin material transfer support Disk T is still to wait until all to automatically supply mouth in the powder shaped resin material P supplied to groove 92 from resin material maintaining part 91 before changing After 921 are discharged, it can not be supplied before this with the feed speed after original change.
Also, there is the resin forming product of corresponding manufacture, and powder shaped resin material P is changed to variety classes (for example, material Material or particle diameter difference person) situation.However, the supply in the powder shaped resin material P for making species before changing acts what is stopped At time point, powder shaped resin material P before changing has been remained in resin material maintaining part 91 and groove 92, so can not be immediately by under A kind of powder shaped resin material P is supplied to resin material transfer pallet T.
The problem of the invention to be solved is to provide a kind of in the powder shaped for changing feed speed (flow) or supply The species of resin material can be supplied powder shaped resin material to supply object with correct condition when the condition of resin material The resin material feedway and method of thing, resin molding apparatus and resin forming product manufacture method.
[technological means for solving problem]
The resin material feedway of the invention completed in order to solve the above problems is characterized in that possessing:
A) resin material maintaining part, it keeps the resin material of powder shaped;
B) groove, it is connected to above-mentioned resin material maintaining part, will be held in the resinous wood of the resin material maintaining part Material supply extremely supply object;
C) excitation, it vibrates above-mentioned resin material maintaining part and above-mentioned groove;
D) weight determination part, its weight to the above-mentioned resin material maintaining part comprising above-mentioned resin material and above-mentioned groove into Row measure;
E) powder supply control part, it makes above-mentioned supply object be located at the outlet of above-mentioned groove, and with based on by above-mentioned Gravimetric value that weight determination part measures and set in a manner of target flow supplies resin material to above-mentioned supply object State the oscillation intensity of excitation;And
F) discharge control unit, its in change supply to the resin material of above-mentioned supply object condition when, make resin Material receiving division is located at the outlet of above-mentioned groove, and the resin material for residuing in the groove is expelled to the resin material receiving division.
The resin material supply method of the present invention is characterized by having:
Resin material keeps step, it makes the resin material of powder shaped be held in resin material maintaining part;
Powder supplying step, it passes through with based on to above-mentioned resin material maintaining part and being connected to the resin material maintaining part Groove weight be measured obtained by gravimetric value and resin material is supplied to the confession positioned at the outlet of the groove with target flow The oscillation intensity that mode to object is set vibrates the resin material maintaining part and the groove, and resin material is specified stream with this Amount is supplied to the supply object;And
Discharge step, its in change supply to the resin material of above-mentioned supply object condition when, make resin material Receiving division is located at the outlet of above-mentioned groove, and the resin material for residuing in the groove is expelled to the resin material receiving division.
The resin molding apparatus of the present invention is characterized in that possessing:
Above-mentioned resin material feedway;
Compression molding portion, its with upper mold, possess die cavity lower die and by the upper mold and the lower die molding clapper die spotting press Structure;And
Transferred unit, it will be supplied with the above-mentioned confession of the resin material of powder shaped by above-mentioned resin material feedway It is transferred on above-mentioned die cavity to object, and supplies the resin material to the die cavity from the supply object.
The resin forming product manufacture method of the present invention is characterized by having following steps:
The resin material of powder shaped is supplied to the step of above-mentioned supply object by above-mentioned resin material supply method Suddenly;
The supply object for being supplied with resin material is transferred to the die cavity of lower die, and sets this from the supply object The step of fat material is supplied to the die cavity;And
The step of above-mentioned lower die that resin material is supplied with upper mold and above-mentioned die cavity is molded.
[The effect of invention]
According to the present invention, in resinous woods such as the species of powder shaped resin material for changing feed speed (flow) or supply During the condition of material, powder shaped resin material can be also supplied to supply object with correct condition thereafter.
Brief description of the drawings
Fig. 1 shows the longitudinal section of an embodiment of the resin material feedway of the present invention.
Fig. 2 is shown in the resin material feedway of this embodiment, when the supply of powder shaped resin material starts The flow chart of action.
The figure of the state of the resin material in groove before Fig. 3 (a) expression change target flows, Fig. 3 (b) are represented to become The figure of the state of the resin material in groove in the operation of more target flow, and Fig. 3 (c) represent change target flow and terminate The figure of the state of the resin material in groove when the supply of resin material prepares.
Fig. 4 is shown in when the condition of resin material is changed in the operation of the resin material feedway of this embodiment The flow chart of action.
Fig. 5 is expressed as the longitudinal section of an example in the compression molding portion of a part for the compression molding apparatuss of the present invention.
Fig. 6 represents the outline for possessing the example of the resin molding apparatus of material receiving module, shaping module and discharge module Figure.
Fig. 7 represents the longitudinal section of the major part of an example of existing resin material feedway.
The figure of the state of the resin material in groove when the feed speed of Fig. 8 (a) expression resin materials is fixed situation, Fig. 8 (b) represents that the feed speed of resin material is the state of the resin material in the fixed groove waited a moment when the situation of Fig. 8 (a) Groove when representing change (quickening) situation of feed speed of figure and Fig. 8 (c) in resin material state figure.
Description of reference numerals:
10、90:Resin material feedway
11、91:Resin material maintaining part
12、92:Groove
121、921:Supply mouth
13、93:Excitation
14:Measurement unit
15、95:Transfer mechanism
16:Resin material receiving division
17:Former supply unit
171:Former supply mouth
172:Former supply unit excitation
19:Control unit
191:Powder supply control part
192:Discharge control unit
20:Compression molding portion
211:Lower part fixed disk
212:Top fixed disk
22:Connecting rod
23:Movable platform
24:Mold closing mechanism
251:Lower heater
252:Upper portion heater
26:From shape film coating device
30:Resin molding apparatus
31:Material receiving module
311:Substrate receiving division
32:Shaping module
33:Discharge module
331:Resin forming product maintaining part
36:Main carrying device
37:Secondary carrying device
94:1st measurement unit
96:2nd measurement unit
LM:Lower die
MC:Die cavity
P:Powder shaped resin material
S:Substrate
T:Resin material transfer pallet (supply object)
UM:Upper mold.
Embodiment
In the resin material feedway of the present invention, kept by making the resin material of powder shaped be held in resin material After portion, resin material maintaining part and groove are vibrated using excitation, and the resin material in resin material maintaining part is passed through Groove and supply to the supply object for the outlet for being configured at the groove.At this time, weight determination part is to the resinous wood comprising resin material Material maintaining part and the weight of groove are measured, and powder supply control part is with based on the gravimetric value measured and with target flow by resin Material supplies to the mode of supply object the oscillation intensity for setting excitation.Herein, resin material maintaining part and the weight of groove It is constant, so the change of the gravimetric value measured represents the change of resin material maintaining part and the weight of the resin material in groove.Base In the change of the weight of the resin material, powder supply control part can obtain the flow of actual resin material, and be based on the stream Measure and carry out the adjustment of oscillation intensity.
In change by resin material supply to supply object resin material condition when, discharge control unit will remain Resin material receiving division is expelled in the resin material of groove.Herein, on resin material condition change, specified stream can be enumerated The change of amount and the change of the species of resin material.
When the situation of target flow is changed, control unit is discharged so that the resin of groove will be residued in when changing the target flow Material controls excitation in a manner of the target flow (target flow after change) is expelled to resin material receiving division.Thus, Resin material in groove is residued in for example with by by the target flow after change with amount corresponding with target flow before changing Supply to the mode of the new resin material extrusion in groove and be discharged to resin material receiving division, and in exist in groove with after change The resin material of the corresponding amount of target flow.Therefore, after the discharge step, can be incited somebody to action with the correct target flow after change Resin material is supplied to supply object.
When the situation of species of resin material is changed, as described above, when the species is changed, discharge control unit will be residual Stay and be expelled to resin material receiving division in the resin material before changing in groove.Also, discharge control unit will also residue in resin The discharge of resin material before changing of material maintaining part.At this time, in order to improving production efficiency, i.e. after starting change as early as possible Resin material supply, flow during the more satisfactory resin material before changing for discharge is as fast as possible.In this way by groove and After resin material discharge in resin material maintaining part, the resin material after change is set to be held in resin material maintaining part, And the resin material is supplied to supply object.
Further, discharging control unit also can be more than from resin material feedway stopping by given time When restarting to start the resin material feedway afterwards, resin material receiving division is set to be located at the outlet of above-mentioned groove, and will be residual The resin material stayed in above-mentioned resin material maintaining part and the groove is expelled to the resin material receiving division.Due to thermosetting resin It is easy to deteriorate in room temperature Deng resin material, therefore by taking such a composition, it can prevent in resin material maintaining part or groove The resin material of deterioration is supplied to supply object.When this situation, also flow during the more satisfactory resin material for discharge is use up May be fast.Elapsed time from the stopping of resin material feedway, for example, discharge control unit has the operation of device from record E-file (charge book shelves (log file)) at the time of obtain last operation and stop, at the time of can be from during the stopping and The elapsed time is obtained at the time of now.
In addition, being expelled to the resin material of resin material receiving division can also discard, but except discharging deterioration as described above Resin material situation beyond, can also back into resin material maintaining part or former supply unit described below is used.
The resin material feedway of the present invention, which can further possess to supply resin material to above-mentioned resin material, to be kept The former supply unit in portion.From former supply unit to the supply of the resin material of resin material maintaining part, 1 time can be carried out to being kept in every Portion's (supplying object) supply resin material when carry out, but usually more efficiently be in advance by the appearance of resin material maintaining part Amount is set to be sufficiently more than maintained portion, is carried out in every to being carried out 1 time during the maintained portion multiple resin material of supply.
Hereinafter, using Fig. 1~Fig. 6, to the resin material feedway, resin material supply method, resin of the present invention into Shape dress is put and the more specifically embodiment of resin forming product manufacture method illustrates.
(1) composition of the resin material feedway of this embodiment
The resin material feedway 10 of this embodiment is that powder shaped resin material P supplies are most supplied object The device of resin material transfer pallet T.There is resin material feedway 10 resin material for keeping powder shaped resin material P to protect Hold portion 11 and groove 12.One end of groove 12 is connected to resin material maintaining part 11, and the other end sets promising by powder shaped resin material P supplies the supply mouth 121 of the opening to resin material transfer pallet T.Also, resin material feedway 10, which has, makes resin material The resin material maintaining part 11 and groove that the excitation 13 and measure that maintaining part 11 and groove 12 vibrate include powder shaped resin material P The measurement unit (weight determination part) 14 of 12 weight.The composition in the so far described each portion and existing resin material feedway 90 Each portion composition it is identical.
Resin material receiving division 16 is configured with the underface of supply mouth 121.As described below, resin material receiving division 16, It is when powder shaped resin material P discharges are transferred pallet T to resin material without supplying, receives powder shaped resin material P Container.
Also, resin material feedway 10 has transfer mechanism 15.Transfer mechanism 15 is that resin material is transferred pallet T to protect The position held and be configured between supply mouth 121 and resin material receiving division 16, resin material can be transferred to appointing in pallet T The mode of the meaning position underface that is configured at supply mouth 121 makes resin material transfer pallet T substantially horizontally move, and will be by The resin material for being fed with powder shaped resin material P transfers the mechanism that pallet T is transferred on lower die.In by powder shaped resinous wood When expecting P discharges without supplying to resin material transfer pallet T, resin material is transferred pallet T by transfer mechanism 15 and automatically supply The underface movement of mouth 121, and powder shaped resin material P is directed into resin material receiving division 16.Also can replace resinous wood Material receiving division 16 is configured at the underface of supply mouth 121 when normal, and receives resin material when powder shaped resin material P is discharged Portion 16 is moved to the underface of supply mouth 121.
In addition, measurement unit 14, equivalent to the 1st measurement unit 94 in existing resin material feedway 90, it has measurement 1st measurement unit 94 of the weight (weight for including the powder shaped resin material P being held therein in) of resin material maintaining part 91 While function, also have from powder shaped resin material P supply to resin material transfer pallet T when the decrement of weight count The function of the resin material quantity delivered of direction finding resin material transfer pallet T supplies.Therefore, the resin material of this embodiment supplies To in device 10 and being not provided with, equivalent to the 2nd measurement unit 96 in existing resin material feedway 90, thereby simplify dress The composition put.
Have in the top of resin material maintaining part 11 and supply powder shaped resin material P to the resin material maintaining part 11 Former supply unit 17.The lower part setting of former supply unit 17 is promising to supply powder shaped resin material P to resin material maintaining part 11 Opening former supply mouth 171 and make the original supply unit 17 vibrate former supply unit excitation 172.
Resin material feedway 10 further has control unit 19.Control unit 19 be by the hardware and software of computer and Realize, include powder supply control part 191 and discharge control unit 192.Powder supply control part 191 is to by powder shaped resin material The action in each portion when P is supplied to resin material transfer pallet T is controlled.Control unit 192 is discharged to by (and the resinous wood of groove 12 Material maintaining part 11 (optionally)) in each portions of powder shaped resin material P when being expelled to resin material receiving division 16 action into Row control.
(2) the resin material supply method of the operation of the resin material feedway of this embodiment and this embodiment
Hereinafter, using Fig. 2~Fig. 4, to including the control carried out with powder supply control part 191 and discharge control unit 192 Detailed content this embodiment resin material feedway 10 operation (the resin material supplying party of this embodiment Method) illustrate.
The operation of resin material feedway 10 when the supply of (2-1) powder shaped resin material P starts
Fig. 2 represents the flow chart of the operation of the resin material feedway 10 when the supply of powder shaped resin material P starts.
Operator in advance supplies powder shaped resin material P to former supply unit 17.Then, it is arranged at by operator's use The input units such as the contact panel (not shown) of resin material feedway 10 carry out set operation, and start resin material confession Operation to device 10.The set operation comprising input supply to the species of the resin material of resin material transfer pallet T or The operation of the condition of the resin materials such as target flow.
First, the data (step S1) that control unit 192 obtains the weight that measurement unit 14 is metered into are discharged.Herein, from meter The weight w that amount portion 14 obtains is by resin material maintaining part 11 and the total weight formed of groove 12 that is, receptacle w0, Yi Jicun It is the weight that is, resin material weight w of the powder shaped resin material P in the resin material maintaining part 11 and groove 121It is total Form.Due to receptacle w0It is constant, so it is more than receptacle w in the weight w that self-measuring portion 14 obtains0Situation when, be before Make resin material feedway 10 run when used powder shaped resin material P residue in resin material maintaining part 11 and/or In groove 12.Therefore, in step S2, discharge control unit 192 judges whether the weight w that self-measuring portion 14 obtains is more than receptacle w0.When in step s 2 to be the situation of (YES), S3 is entered step, when being the situation of no (NO), enters step S8.
In step S3 (being yes in step S2), discharge control unit 192 makes resin material feedway 10 before judging Whether set deterioration time started when small (for example, 8) more than have passed through after operation.Last time makes resin material feedway 10 Record (charge book shelves) at the time of operation can be retained in the record portion (not shown) of the device, and discharge control unit 192 is based on The record and carry out the judgement.Herein, the deterioration time started refers to because stopping resin material feedway 10 after last use Powder shaped resin material P is residued in groove 12 afterwards, and powder shaped resin material P occur deterioration into it is unsuitable use when Between.During the situation for being yes in step S3, S5 is entered step, during the situation for being no, enters step S4.
In step S4 (being no in step S3), the tree that operator is inputted when control unit 192 starts operation is discharged The species of fat material and the species of used resin material when being recorded in the last operation of charge book shelves are contrasted, and are sentenced It is both fixed whether identical.During the situation for being yes in step S4, S7 is entered step, during the situation for being no, enters step S5.
In step S5 (be yes in step S3, or in step S4 be no), first, discharge control unit 192 so that The mode that the state of resin material transfer pallet T is not configured in the underface of supply mouth 121 controls the position of transfer mechanism 15, Afterwards to make excitation 13 control the excitation 13 in a manner of maximum strength vibration, thus by resin material maintaining part 11 and Powder shaped resin material P in groove 12 is expelled to resin material receiving division 16.Discharge control unit 192 obtains measurement unit 14 and is measured The data of the weight arrived, and in the weight and receptacle w0Roughly the same time point, be judged as resin material maintaining part 11 and Powder shaped resin material P in groove 12 is all discharged, and stops the vibration of excitation 13.This prevents that will deteriorate, Or mistakenly supplied for different types of powder shaped resin material P with the resin material of this supply to resin material transfer pallet T Pallet T is transferred to resin material.Then, discharge control unit 192 with by the powder shaped resin material P of sufficient amount from former supply unit The mode of 17 supply to resin material maintaining parts 11 makes former supply unit excitation 172 vibrate (step S6).After the operation, into Enter step S8.
In step S7 (being yes in step S4), the finger that operator is inputted when control unit 192 starts operation is discharged Constant flow be recorded in charge book shelves it is last run when used target flow contrasted, judge both whether phase Together.When the situation that the judgement result is yes, it is meant that in should supply to tree in the presence of amount corresponding with target flow in groove 12 The powder shaped resin material P of the species of fat material transfer pallet T, so the supply of powder shaped resin material P prepares to terminate.It is another Aspect, when the situation that judgement result is no, enters step S8.
In the time point for starting step S8, though not be and target flow pair for the species that should be supplied in that can be remained in groove 12 The powder shaped resin material P (being determined as no situation in step S7, with reference to Fig. 3 (a)) for the amount answered.In step S8, discharge Control unit 192 is controlled sharp in a manner of making the corresponding strength vibration of its target flow for being inputted of operator when to start with operation Encourage portion 13.Thus, the powder shaped resin material P of amount corresponding with target flow is supplied to groove from resin material maintaining part 11 12.At this time, in this embodiment, the identical bar when transferring pallet T to resin material with supplying powder shaped resin material P Under part, i.e. will be only supplied to the powder shaped resin material P of the amount of 1 resin material transfer pallet T from resin material maintaining part 11 Supply is repeated a number of times the operation to groove 12.But it is such a operate in the present invention not necessarily, for example, also can be with one Secondary operation supplies the powder shaped resin material P of given amount to groove 12 from resin material maintaining part 11.
When starting to be not present the situation of powder shaped resin material P in time slot 12, powder shaped resin material P is gradually supplied To in groove 12, when reaching supply mouth 121, the entirety in groove 12 can spread all over the powder shaped resinous wood of amount corresponding with target flow Expect P.On the other hand, the feelings in groove 12 are residued in when the powder shaped resin material P of amount not corresponding with target flow is starting During shape, which is moved in a manner of gradually being extruded by the powder shaped resin material P supplied by new target flow To 121 side of supply mouth (Fig. 3 (b)), the overall powder shaped resin material P by amount corresponding with target flow in groove 12 is replaced (same to Fig. 3 (c)).When any case, by the operation, and the supply for terminating powder shaped resin material P prepares.
Terminate as described above powder shaped resin material P supply prepare after, powder supply control part 191 will be will keep The mode for the underface that the transfer mechanism 15 for having resin material transfer pallet T is configured at supply mouth 121 controls transfer mechanism 15.So Afterwards, powder supply control part 191 encourages excitation 13 with intensity corresponding with target flow, is measured in oneself using measurement unit 14 To result time point of powder shaped resin material P reductions for having the component of 1 resin material transfer pallet T stop excitation 13 Excitation, thus the powder shaped resin material P of the component is supplied to resin material transfer pallet T.Thereafter, so as to be supplied with The resin material transfer pallet T of powder shaped resin material P automatically supplies the underface movement of mouth 121, will should supply powder next time The mode for the underface that the empty resin material transfer pallet T of shape resin material P is configured at supply mouth 121 controls transfer mechanism 15. Action to resin material transfer pallet T supply powder shaped resin materials P is repeated until operator inputs what is stopped Untill instruction, or the instruction of the condition of input change resin material.
(2-2) changes the action during condition of resin material in the operation of resin material feedway 10
Fig. 4 is shown in the operation of resin material feedway 10 to change and supplies powder shaped resin material P to resin The flow chart of action during condition (condition of resin material) of material transfer pallet T.
When operator inputs the instruction of the condition of change resin material in the operation of resin material feedway 10, discharge Control unit 192 is not first to configure the state of resin material transfer pallet T in the underface of supply mouth 121, i.e. in supply mouth The mode that 121 underface is configured with the state of resin material receiving division 16 controls the position (step S11) of transfer mechanism 15.
Then, discharge control unit 192 judges the species and the resinous wood of operator's input of the resin material currently supplied Whether the species of material is identical (step S12).During the situation for being yes in step S12, S15 is entered step, during the situation for being no, into Enter step S13.
In step S13, discharge control unit 192 controls the excitation to make excitation 13 in a manner of maximum strength vibration Portion 13.Thus, the powder shaped resin material P of the species before changing residued in resin material maintaining part 11 and groove 12 is discharged To resin material receiving division 16.Discharge control unit 192 obtains the data of weight that measurement unit 14 is metered into, and in the weight with Receptacle w0At roughly the same time point, be judged as that the powder shaped resin material P in resin material maintaining part 11 and groove 12 is whole It is discharged, and stops the vibration of excitation 13.Then, discharge control unit 192 with by the powder shaped resin material P of sufficient amount from Former supply unit 17, which is supplied to the mode of resin material maintaining part 11, makes former supply unit excitation 172 vibrate (step S14).In the behaviour After work, S15 is entered step.
In step S15, discharge control unit 192 is sharp to make it be controlled in a manner of strength vibration corresponding with target flow Encourage portion 13.At this time, when operator inputs situation of the instruction as the condition of resin material of change target flow, by with this The corresponding intensity of target flow after change vibrates excitation 13, and by the powder shaped tree of amount corresponding with new target flow Fat material P is supplied to groove 12 from resin material maintaining part 11.On the other hand, the instruction of the species of resin material is only changed in input It is corresponding strong by the target flow identical before changing of the condition with resin material during situation as the condition of resin material Degree vibrates excitation 13, and by the powder shaped resin material P of amount corresponding with the target flow from resin material maintaining part 11 Supply to empty groove 12.Powder shaped resin material P at this time supply action also when above-mentioned action starts in the same manner as, can be multiple Supply is only supplied the powder shaped resin that given amount to the amount of 1 resin material transfer pallet T, can be also supplied with once-through operation repeatedly Material P.
The action of step S15 more than, the preparation that powder shaped resin material P is supplied under New Terms terminate.Thereafter, In the underface of supply mouth 121 configuration resin material transfer pallet T.Powder supply control part 191 can be by moved with above-mentioned Same operation when making to start, and powder shaped resin material P is supplied to resin material transfer pallet T.
(3) resin molding apparatus (compression molding apparatuss) of this embodiment and an implementation of resin forming product manufacture method Form
The resin molding apparatus of this embodiment has above-mentioned resin material feedway 10 and compression molding portion 20.With Under, the composition in compression molding portion 20 is illustrated using Fig. 5.
Compression molding portion 20 is equipped with connecting rod 22 (altogether 4) respectively in the corner of lower part fixed disk 211, in connecting rod 22 Upper end is nearby provided with rectangular top fixed disk 212.It is provided between lower part fixed disk 211 and top fixed disk 212 Rectangular movable platform 23.Movable platform 23 is provided with the hole passed through for connecting rod 22 in corner, and can be along connecting rod about 22 It is mobile.The device that can move up and down movable platform 23 that is, mold closing mechanism 24 are provided with lower part fixed disk 211.
Lower heater 251 is configured with above movable platform 23, lower die is provided with lower heater 251 LM.It is provided with lower die LM from shape film coating device 26.From shape film coating device 26 be by set on die cavity MC from After shape film, and the pump orifice (not shown) for being arranged at the inner face of die cavity MC certainly is aspirated, and in the inner face quilt of die cavity MC Cover from shape film.
Upper portion heater 252 is configured with below top fixed disk 212, upper mold is installed under upper portion heater 252 UM.The substrate S for being packaged with semiconductor chip can be installed below upper mold UM.
The action in compression molding portion 20 is as described below.First, by substrate travel mechanism (not shown), and in upper mold UM's The substrate S for being packaged with semiconductor chip is installed below.Also, by from shape film coating device 26, and in the die cavity of lower die LM The inner face of MC is set from shape film.Then, by as described above as transfer mechanism 15 is utilized in resin material feedway 10 The resin material for being supplied with resin material P transfer pallet T is transferred to the surface of lower die LM, and resin material will be arranged at The gate for transferring the bottom of pallet T is opened, and the resin material P in resin material transfer pallet T is supplied to die cavity MC.Separately Outside, can also be carried out to upper mold UM installation base plates S and to lower die LM supply resin materials P according to order contrary to the above.
Under the state, the resin material P in die cavity MC is heated by using lower heater 251 and makes its soft Change, and substrate S is heated using upper portion heater 252.In the state of resin material P and substrate S are heated, utilize Mold closing mechanism 24 rises movable platform 23, and shaping dies (upper mold UM and lower die LM) is molded, and hardens resin material P. After resin material P hardening, decline movable platform 23 by using mold closing mechanism 24 and molded.
Pass through action (the resin forming product manufacturer in resin as described above material feeding apparatus 10 and compression molding portion 20 Method), and manufacturing resin seal has the resin seal product (resin forming product) of semiconductor chip.The resin seal product obtained pass through Using being coated to the inner face of lower die LM from shape film, and successfully demoulded from lower die LM.
Then, using Fig. 6, other embodiments of the resin molding apparatus of the present invention are illustrated.This embodiment Resin molding apparatus 30 have material receiving module 31, shaping module 32 and discharge module 33.Material receiving module 31 is to use With from external reception resin material P and substrate S and the device for being sent to shaping module 32, it possesses above-mentioned resin material and supplies To device 10, and there is substrate receiving division 311.1 shaping module 32 possesses 1 group of above-mentioned compression molding portion 20.Fig. 6 is illustrated 3 shaping modules 32, but the shaping module 32 of any number of units can be set in resin molding apparatus 30.Also, i.e. easy to assembling resin Building mortion 30 and after beginning to use, also changeable shaping module 32.Discharge module 33 will be manufactured using shaping module 32 Resin forming product is moved into and kept from shaping module 32, it is with resin forming product maintaining part 331.
Conveyance base is set in a manner of penetrating through material receiving module 31,1 or more shaping modules 32 and discharge module 33 The main carrying device 36 of plate S, resin material transfer pallet T and resin forming product.Above-mentioned transfer mechanism 15 forms main carrying device 36 part.Also, transport substrate S, tree in each module, being provided between the device in main carrying device 36 and the module Fat material transfers the secondary carrying device 37 of pallet T and resin forming product.
In addition, resin molding apparatus 30 also has power supply to make above-mentioned each module operation and control unit (not Diagram).
Operation to resin molding apparatus 30 illustrates.Substrate S is held in the base of material receiving module 31 by operator Plate receiving division 311.Main carrying device 36 and secondary carrying device 37 transport substrate S self-reference substrates receiving division 311 to being present in shaping The compression molding portion 20 of 1 in module 32, and substrate S is installed on to the upper mold UM in the compression molding portion 20.Then, main conveyance Device 36 and secondary carrying device 37 move into resin material transfer pallet T to resin material feedway 10.Supplied in resin material To in device 10, as described above as resin material P is supplied to resin material transfer pallet T.Main carrying device 36 and secondary conveyance The resin material for being supplied with resin material P transfer pallet T is transported to upper mold UM the shaping module for being provided with substrate S by device 37 32 compression molding portion 20, and after resin material transfer pallet T is configured on the lower die LM in the compression molding portion 20, from resin Material transfer pallet T supplies resin material P to the die cavity MC of lower die LM.Thereafter, main carrying device 36 and secondary conveyance dress are utilized Put 37 by resin material transfer pallet T taken out of from compression molding portion 20 after, be compressed shaping in the compression molding portion 20. During shaping is compressed using the compression molding portion 20, can by other compression molding portions 20 carry out with it is same before this Operation, and in multiple compression molding portions 20, a face staggering time one side is concurrently compressed shaping.Pass through compression molding And the resin forming product obtained is taken out of by main carrying device 36 and secondary carrying device 37 from compression molding portion 20, and it is moved to row Go out the resin forming product maintaining part 331 of module 33 and be maintained.User can be suitably by resin forming product from ester moulding Product maintaining part 331 is taken out.
The present invention is not limited to above-mentioned each embodiment certainly, can carry out various modifications.

Claims (10)

1. a kind of resin material feedway, it is characterised in that possess:
A) resin material maintaining part, it keeps the resin material of powder shaped;
B) groove, it is connected to above-mentioned resin material maintaining part, the resin material for being held in the resin material maintaining part to be supplied To extremely supply object;
C) excitation, it vibrates above-mentioned resin material maintaining part and above-mentioned groove;
D) weight determination part, its weight to the above-mentioned resin material maintaining part comprising above-mentioned resin material and above-mentioned groove are surveyed It is fixed;
E) powder supply control part, it makes above-mentioned supply object be located at the outlet of above-mentioned groove, and with based on by above-mentioned weight Gravimetric value that determination part measures and set and above-mentioned swash in a manner of target flow supplies resin material to above-mentioned supply object Encourage the oscillation intensity in portion;And
F) discharge control unit, its in change supply to the resin material of above-mentioned supply object condition when, make resin material Receiving division is located at the outlet of above-mentioned groove, and the resin material for residuing in the groove is expelled to the resin material receiving division.
2. resin material feedway according to claim 1, wherein above-mentioned condition are target flow,
Above-mentioned discharge control unit is arranged when above-mentioned condition is changed, by the resin material for residuing in above-mentioned groove with the target flow Go out to the mode of above-mentioned resin material receiving division and control above-mentioned excitation.
3. resin material feedway according to claim 1, wherein above-mentioned condition are the species of resin material,
Above-mentioned discharge control unit arranges the resin material for residuing in above-mentioned resin material maintaining part when above-mentioned condition is changed Go out to the mode of above-mentioned resin material receiving division and control above-mentioned excitation.
4. resin material feedway according to any one of claim 1 to 3, wherein
Above-mentioned discharge control unit with from resin material feedway stopping by opening again after more than given time When beginning to start the resin material feedway, resin material receiving division is located at the outlet of above-mentioned groove, above-mentioned resin will be residued in The mode that the resin material of material maintaining part and the groove is expelled to the resin material receiving division controls above-mentioned excitation.
5. a kind of resin material supply method, it is characterised in that have:
Resin material keeps step, it makes the resin material of powder shaped be held in resin material maintaining part;
Powder supplying step, it passes through with based on to above-mentioned resin material maintaining part and being connected to the groove of the resin material maintaining part Weight be measured obtained by gravimetric value and resin material is supplied to the supply pair positioned at the outlet of the groove with target flow As oscillation intensity that the mode of thing is set with excitation vibrates the resin material maintaining part and the groove, resin material is referred to this Constant flow is supplied to the supply object;And
Discharge step, its in discharge control unit change supply to the resin material of above-mentioned supply object condition when, make Resin material receiving division is located at the outlet of above-mentioned groove, and the resin material for residuing in the groove is expelled to the resin material receiving division.
6. resin material supply method according to claim 5, wherein above-mentioned condition are target flow,
In above-mentioned discharge step, when above-mentioned condition is changed, the resin material for residuing in above-mentioned groove is specified into stream with this The mode that amount is expelled to above-mentioned resin material receiving division controls above-mentioned excitation.
7. resin material supply method according to claim 5, wherein above-mentioned condition are the species of resin material,
In above-mentioned discharge step, when above-mentioned condition is changed, the resin material of above-mentioned resin material maintaining part will be residued in It is expelled to above-mentioned resin material receiving division.
8. resin material supply method according to any one of claims 5 to 7, wherein
Above-mentioned discharge control unit using the operation of the resin material supply method with more than from being stopped by given time When restarting to start the resin material feedway afterwards, resin material receiving division is located at the outlet of above-mentioned groove, will remain The mode that the resin material receiving division is expelled in the resin material of above-mentioned resin material maintaining part and the groove controls above-mentioned excitation Portion.
9. a kind of resin molding apparatus, it is characterised in that possess:
Resin material feedway as claimed any one in claims 1 to 3;
Compression molding portion, its with upper mold, possess die cavity lower die and by the upper mold and the lower die molding clamping;With And
Transferred unit, it will be supplied with the above-mentioned supply pair of the resin material of powder shaped by above-mentioned resin material feedway As thing is transferred on above-mentioned die cavity, and the resin material is supplied to the die cavity from the supply object.
10. a kind of resin forming product manufacture method, it is characterised in that there are following steps:
The resin material of powder shaped is supplied by the resin material supply method as any one of claim 5 to 7 The step of to above-mentioned supply object;
The supply object for being supplied with resin material is transferred to the die cavity of lower die, and from the supply object by the resinous wood The step of material supply is to the die cavity;And
The step of above-mentioned lower die that resin material is supplied with upper mold and above-mentioned die cavity is molded.
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