CN107972220A - Resin material feedway and method, resin molding apparatus and resin forming product manufacture method - Google Patents

Resin material feedway and method, resin molding apparatus and resin forming product manufacture method Download PDF

Info

Publication number
CN107972220A
CN107972220A CN201710977144.6A CN201710977144A CN107972220A CN 107972220 A CN107972220 A CN 107972220A CN 201710977144 A CN201710977144 A CN 201710977144A CN 107972220 A CN107972220 A CN 107972220A
Authority
CN
China
Prior art keywords
resin material
supply
mentioned
resin
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710977144.6A
Other languages
Chinese (zh)
Other versions
CN107972220B (en
Inventor
荒木芳文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Towa Corp
Original Assignee
Towa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Towa Corp filed Critical Towa Corp
Publication of CN107972220A publication Critical patent/CN107972220A/en
Application granted granted Critical
Publication of CN107972220B publication Critical patent/CN107972220B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C31/00Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
    • B29C31/04Feeding of the material to be moulded, e.g. into a mould cavity
    • B29C31/042Feeding of the material to be moulded, e.g. into a mould cavity using dispensing heads, e.g. extruders, placed over or apart from the moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C31/00Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
    • B29C31/04Feeding of the material to be moulded, e.g. into a mould cavity
    • B29C31/06Feeding of the material to be moulded, e.g. into a mould cavity in measured doses, e.g. by weighting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B29C2043/181Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • B29C2043/3405Feeding the material to the mould or the compression means using carrying means
    • B29C2043/3427Feeding the material to the mould or the compression means using carrying means hopper, vessel, chute, tube, conveying screw, for material in discrete form, e.g. particles or powder or fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • B29C2043/3433Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • B29C2043/3488Feeding the material to the mould or the compression means uniformly distributed into the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5875Measuring, controlling or regulating the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3406Components, e.g. resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

A kind of resin material feedway and method, resin molding apparatus and resin forming product manufacture method, resin material feedway possess:Object maintaining part is supplied, it keeps the supply object of the object as supply resin material;Resin material supply mouth, it is arranged on the top of the supply object maintaining part;Move portion, it makes resin material supply mouth be moved relative to the relative position of the horizontal direction for the supply object for being maintained at above-mentioned supply object maintaining part;And control unit, it is to make above-mentioned relative position not control move portion in a manner of Shangdi is back to the starting position by the entirety of the supply subject area of above-mentioned supply object by same position 2 times in mobile route from starting position.By making relative position be back to starting position, and resin material is nearby supplied again to being just initially supplied the less starting position of the quantity delivered of rear resin material, so that the amount of the resin material near starting position becomes near uniform.

Description

Resin material feedway and method, resin molding apparatus and resin forming product manufacture Method
Technical field
The present invention relates to a kind of resin material feedway for supplying resin material and method, there is resin material supply The resin molding apparatus of device and the resin forming product manufacture method using the resin material supply method.
Background technology
In order to which in the environmental protection electronic component such as light, heat, moisture, electronic component is generally by resin seal.Resin seal There are compression forming method or transfer forming process etc. in method.Compression forming method is by using the finishing die being made of lower die and upper mold Tool, supplies resin material to the die cavity of lower die, the substrate for being equiped with electronic component is installed to upper mold, one in face of lower die with it is upper Mould is heated, and is simultaneously molded both and is formed.Transfer forming process is by being installed to the die cavity of one of upper mold and lower die After substrate, one is heated in face of lower die with upper mold, simultaneously molds both, and is pressed into resin using plunger (plunger) It is formed to die cavity.In forming process is transferred, a part for meeting cull in plunger is to the path of die cavity supply resin And produce waste, and can produce because resin flows cause semiconductor substrate or distribution to damage the problem of, so press in recent years Contracting forming process becomes mainstream.
In compression molding, it is however generally that, it is powdered to supply to the resin material of die cavity or graininess is (below, by it Be referred to as powder shaped) it is or liquid.The resin material of powder shaped will not flow freely in die cavity after supply, on Liquid resin material, the in general viscosity used in compression molding is higher, so less flowed in die cavity.Cause This, in shaping, by causing sticky decline because being heated to resin material, resin flows in die cavity, and has to electricity Sub- part applies the anxiety of load, so resin material is preferably supplied to die cavity as homogeneously as possible in advance before forming.Specially Compression molding apparatuss described in sharp document 1 are that one side falls to resin material to be placed in the resin material supply mouth of saddle Die cavity on XY platforms, simultaneously fixes the position of resin material supply mouth, make XY platforms take the shape of the letter U curve-like movement, it is thus right Supply resin material in die cavity.Represent that resin material supply mouth is relative to die cavity in the existing compression molding apparatuss in fig. 11 The track 92 of 91 relative movement.During the curvilinear relative movement of the U-shaped, translational speed is simultaneously maintained fixed value, Simultaneously resin material is supplied with fixed feed speed (quantity delivered of the resin material of time per unit), thus in die cavity 91 Resin material no matter which position to become uniform in.
[background technology document]
[patent document]
[patent document 1] Japanese Unexamined Patent Publication 2013-042017 publications.
The content of the invention
Problem to be solved by the invention:
In general, in the device to die cavity input resin material, to reaching after the supply action of resin material is started The time (although only needing a little) is needed untill the feed speed of above-mentioned fixation, the feed speed after being just initially supplied is fixed compared with this Feed speed it is low.Therefore, even if the translational speed of die cavity is set to fixed, in die cavity, the position after being just initially supplied (is opened Beginning position) resin material amount also compared with the resin material in other positions amount reduce.Thus, the resin material in die cavity becomes Obtain uneven.
Problem to be solved by this invention be to provide it is a kind of can be in a manner of becoming near uniform compared with existing pair The resin material feedway and method of the supply object supply resin material such as die cavity of resin molding apparatus.
Technical means to solve problem:
The resin material feedway of the invention completed to solve the above-mentioned problems is characterized in that possessing:
A) object maintaining part is supplied, it keeps the supply object of the object of supply resin material;
B) resin material supply mouth, it is arranged at the top of the supply object maintaining part;
C) move portion, it makes above-mentioned resin material supply mouth relative to the supply for being held in above-mentioned supply object maintaining part The relative position movement of the horizontal direction of object;And
D) control unit, it will not be in mobile route by same position 2 times from starting position with above-mentioned relative position The above-mentioned move portion in the supply subject area of above-mentioned supply object is controlled in a manner of Shangdi is back to the starting position It is mobile.
The resin material supply method of the present invention is characterized in that:Simultaneously make the supply pair of the object for supply resin material As the relative position of thing and the horizontal direction of the resin material supply mouth for the top for being arranged at the supply object is with from start bit Put will not in mobile route same position 2 times in a manner of Shangdi is back to the starting position in above-mentioned supply object The supply subject area movement of thing, simultaneously supplies resin material from the resin material supply mouth to the supply object.
The resin molding apparatus of the present invention is characterized in that possessing:
Above-mentioned resin material feedway;
Compression molding portion, its with the 1st shaping dies, the 2nd shaping dies with die cavity and by the 1st shaping dies with The clamping of 2nd shaping dies molding;And
Transferred unit, it will be transferred by above-mentioned resin material feedway to be supplied with the supply object of resin material On to above-mentioned die cavity, the resin material is supplied to the die cavity from the supply object.
The resin forming product manufacture method of the present invention is characterized by having following steps:
The step of resin material is supplied to above-mentioned supply object by above-mentioned resin material supply method;
The supply object for being supplied with resin material is transferred to the die cavity of the 2nd shaping dies, and from the supply object The step of thing supplies the resin material to the die cavity;And
The step of the 2nd shaping dies that resin material is supplied with 1st shaping dies and die cavity is molded.
The effect of invention:
In accordance with the invention it is possible to die cavity of resin molding apparatus etc. is supplied in a manner of becoming near uniform compared with existing Resin material is supplied to object.
Brief description of the drawings
Fig. 1 is the schematic configuration diagram for an embodiment for representing the resin material feedway of the present invention.
Fig. 2 (a) is the figure for representing to be fed with the state of resin material in resin material transfer pallet, and Fig. 2 (b) is by resin Material transfers tray lift and forms the figure of the state of resin material receiving space.
Fig. 3 transfers pallet and in the resin material feedway of the present embodiment to the resinous wood for expression resin material The exemplary top view of the track of material transfer pallet supply resin material.
Fig. 4 is the resin material for representing to transfer the resin material resettlement section of pallet from resin material supply mouth towards resin material Feed speed desired value and measured value time change curve map.
Fig. 5 (a) and Fig. 5 (b) be supply to resin material transfer pallet resin material resettlement section resin material with The parallel profilograph of the moving direction of relative position, Fig. 5 (a) are to represent the state after being just initially supplied, and Fig. 5 (b) is represents State at the end of supply.
Fig. 6 is the shifting with relative position of the resin material for the resin material resettlement section that pallet is transferred in supply to resin material The vertical profilograph in dynamic direction.
Fig. 7 (a) and Fig. 7 (b) transfers pallet and the resin material feedway in the present embodiment for expression resin material In to resin material transfer pallet supply resin material track another exemplary top view.
Fig. 8 is the schematic configuration diagram of the variation for the resin material feedway for representing the present embodiment.
Fig. 9 is an exemplary vertical section in the compression molding portion for the part for being expressed as the resin molding apparatus of the present invention Figure.
Figure 10 is to represent possess material receiving module, shape module and discharge the exemplary general of the resin molding apparatus of module Sketch map.
Figure 11 is the top view for representing to supply die cavity in existing compression molding apparatuss the track of resin material.
Symbol description:
10、10A:Resin material feedway
11:Resin material maintaining part
12:Groove
121:Resin material supply mouth
13:Excitation
14:Measurement unit
15:Former supply unit
151:Former supply mouth
152:Former supply unit excitation
16:Holding station
17:Move portion
18:Transferred unit
19:Control unit
191:Feed speed test section
192:Alarm sending part
20、20A:Resin material transfers pallet
21、21A:Resin material resettlement section
211:Resin material houses frame
2111:Stop
212:Layer tension frame material
2121:Protuberance
213:Film holding parts
22、22A:Starting position
23、23A1、23A2、92:The track of the movement of relative position
24、241、242、243、244:The edge of resin material resettlement section
245:The center at the edge of the long side of resin material resettlement section
25:The region in the outside of curve
30:Compression molding portion
311:Lower part fixed disk
312:Top fixed disk
32:Connecting rod
33:Movable platform
34:Mold closing mechanism
351:Lower heater
352:Upper portion heater
40:Resin molding apparatus
41:Material receiving module
411:Substrate receiving division
42:Shape module
43:Discharge module
431:Resin forming product maintaining part
46:Main carrying device
47:Secondary carrying device
91:Die cavity
F:From shape film
LM:Lower die (the 2nd shaping dies)
MC:Die cavity
P:Resin material
PA:Resin material receiving space
S:Substrate
UM:Upper mold (the 1st shaping dies).
Embodiment
In the resin material feedway of the present invention and method, simultaneously make resin material supply mouth relative to being held in confession Relative position to the horizontal direction of the supply object of object maintaining part is with will not be in mobile route from starting position Moved 2 supply subject areas in a manner of Shangdi is back to starting position in above-mentioned supply object of same position, Simultaneously resin material is supplied to supply object from resin material supply mouth.Due to so as so that relative position is back to out The beginning mode of position moves the relative position, so part or all by the resin material supplied at the end of movement supplies To starting position.Thus, even if making confession because the feed speed of the resin material after just starting the supply of resin material is relatively slow Quantitative change to the resin material to the starting position is few, can also pass through a part for the resin material supplied at the end of movement Or be all supplied to starting position and made up, so the resin material of supply to supply object becomes near uniform. In addition, in mobile route, relative position will not be more than 2 times by same position, so there is no same position is supplied to set Fat material more than 2 times and make the situation more than the supply quantitative change of resin material.
In the resin material feedway of the present invention and method, above-mentioned relative position " being back to starting position " is except bag Containing above-mentioned relative position be back to starting position for the situation of same position beyond, also comprising resin material extend and to reaching The situation of following location, distance of the position far from starting position only separated by resin material to the degree for reaching starting position.
The movement of above-mentioned relative position can be the mobile person by supplying object maintaining part, also can be to pass through resin material The mobile person of supply mouth, or also can be both mobile persons by supplying object maintaining part and resin material supply mouth.
Supply object may be, for example, the die cavity of resin molding apparatus, also can be to being arranged at from resin material feedway The resin material transport tray of the die cavity conveyance resin material of resin molding apparatus.Alternatively, also can be pair for carrying out ester moulding As thing that is, it is packaged with the substrate of electronic component.
Resin material can be powder shaped, also can be liquid.
In the resin material feedway of the present invention and method, in order to be supplied uniformly across resinous wood to supply object Material, usually supplies supply object by the translational speed of relative position and from resin material supply mouth the supply speed of resin material Degree is set to fixed.But such as when situation as shown below, can also make appointing in above-mentioned translational speed and above-mentioned feed speed One or both is variable.When the situation, since translational speed is compared with feed speed easily control, so more satisfactory is by movement Speed is set to variable and feed speed is set to constant speed.
Variable situation is set to as by translational speed and/or feed speed, following example can be enumerated.
When supplying resin material when the die cavity of the shape with corner to rectangle, if in order to make relative position successfully move Move and the relative position is moved with the track of curve, then there is a situation where that resin material does not diffuse to adjacent corner fully. Therefore, when making relative position curvilinear mobile in adjacent corner, by making translational speed slack-off compared with when linearly moving (and/or accelerating feed speed), can make supply quantitative change of the resin material to adjacent corner more, so as to integrally make resin in die cavity Material is more near uniform.
If in addition, making relative position be moved along the edge of die cavity, resin material will not be extended to compared with the edge more outward Side, so the amount of the resin material of adjacent edges becomes more compared with other positions.Therefore, when making relative position be moved along the edge of die cavity When, by making translational speed compared with the situation that the inside of die cavity is moved when accelerates (and/or make feed speed slack-off), can make Resin material tails off to the quantity delivered of adjacent edges, so as to integrally make resin material more near uniform in die cavity.
The feed speed of resin material except in it is above-mentioned be just initially supplied it is rear it is slack-off in addition to, also exist because to resin material confession Failure of device of resin material etc. is sent out to mouth and becomes unstable situation.Therefore, can be supplied in the resin material of the present invention The feed speed test section of the feed speed of detection resin material is set to device., also can be further in tree when the situation Fat material feeding apparatus is set detects that the exception of feed speed (exceedes or do not reach set setting by feed speed test section Scope) when, the manager of device is made a sound, light or the warning for being shown in the image of display device (display) etc. Warning portion.Alternatively, when the exception of feed speed is detected by feed speed test section, can also stop move portion action and Supply of the resin material from resin material supply mouth., also similarly, can be to upper in the resin material supply method of the present invention The feed speed of resin material is detected during stating supply object supply resin material, further, can also detect supply Give a warning during the exception of speed or stop the supply of resin material.
Hereinafter, using Fig. 1~Figure 10, to the resin material feedway, resin material supply method, resin of the present invention into Shape dress is put and the more particular embodiment of resin forming product manufacture method illustrates.
(1) composition of the resin material feedway of the present embodiment:
The schematic configuration of the resin material feedway 10 of the present embodiment is represented in Fig. 1.Resin material feedway 10 be the device to transferring the resin material P of the supply powder shaped of pallet 20 for the resin material of supply object.
Resin material feedway 10 has the resin material maintaining part 11 and groove 12 for keeping resin material P.The one of groove 12 End is connected to resin material maintaining part 11, and the other end sets the promising supply of the pallet 20 resin material P that transferred to resin material to open The resin material supply mouth 121 of mouth.In addition, resin material feedway 10 has:Excitation 13, it makes resin material maintaining part 11 and groove 12 vibrate;And measurement unit 14, it measures the resin material maintaining part 11 comprising resin material P and the weight of groove 12. The top of resin material maintaining part 11, has the former supply unit 15 to the resin material maintaining part 11 supply resin material P.Original supplies To portion 15 be in its underpart set the promising opening that resin material P is supplied to resin material maintaining part 11 former supply mouth 151 and The former supply unit excitation 152 for vibrating the original supply unit 15.Resin material maintaining part 11 is being arranged in former supply mouth 151 just Lower section.
Holding station (the supply for keeping resin material transfer pallet 20 is configured with the underface of resin material supply mouth 121 Object maintaining part) 16.In the move portion 17 that makes the holding station 16 move in the horizontal direction of being arranged with of holding station 16.It is mobile Portion 17 can make holding station 16 any one of (transverse direction of Fig. 1) and Y-direction (direction vertical with paper of Fig. 1) in X direction With less than in the range of set maximum speed arbitrary speed move, and can make holding station 16 in X direction with Y-direction two Person is mobile at the same time.Therefore, it can also make resin material supply mouth 121 and the relative position edge of the horizontal direction of holding station 16 any Moved with arbitrary speed in direction.In addition, generally by holding station 16 merge with move portion 17 and winner be known as " XY platforms ".
Resin material feedway 10, which also has, moves into the resin material transfer pallet 20 before being supplied to resin material P And be placed on holding station 16, and the resin material being supplied to after resin material P is transferred into 20 self-sustaining platform 16 of pallet On the transferred unit 18 that takes out of.
Resin material feedway 10 further has control unit 19.Control unit 19 by the hardware and software of computer and Realize, control from resin material supply mouth 121 by resin material P supply to resin material transfer pallet 20 when ON/OFF or confession To speed, and control the action of move portion 17.Details on the control carried out using control unit 19, below with resin The overall action of material feeding apparatus 10 illustrates in the lump.
As shown in Fig. 2 (a), resin material transfer pallet 20 possesses with the shaping dies corresponding to compression molding apparatuss Shape, the size of die cavity, and equivalent to the resin material resettlement section 21 of above-mentioned supply subject area.Resin material resettlement section 21 by The opening portion of frame 211 and covering resin material storage frame 211 is housed for the resin material of the frame material with rectangular opening portion Below formed from shape film F.Suction air is provided with below resin material collecting frame 211 and is made thin from shape Film F is adsorbed to the adsorbing mechanism (not shown) below this.The inner side of the opening portion of frame 211 is housed in resin material formed with inner circumferential The end portion of side inwards protrudes the stop 2111 formed.It is provided with and corresponds in the inner side of resin material collecting frame 211 Resin material houses the rectangular frame material of the shape of the opening portion of frame 211, and is to have protuberance 2121, section in outer circumferential side For the layer tension frame material 212 of inverted L-shaped ring.The side that resin material houses frame 211 is held by transferred unit 18.In transferred unit 18 Be arranged with fixing be located at resin material house frame 211 below the end from shape film F film holding parts 213.
Resin material transfer pallet 20 is to make resin material resettlement section 21 by resin material feedway 10 as following After the supply (Fig. 2 (a)) for receiving resin material P, lifted by transferred unit 18, then layer tension frame material 212 is relative to resin material Frame 211 is housed by conducting oneself with dignity relatively to decline untill protuberance 2121 is connected to stop 2111.Thus, formation corresponds to The resin material receiving space PA (Fig. 2 (b)) of the shape of the die cavity of shaping dies.
(2) the resin material supply method of the action of the resin material feedway of the present embodiment and the present embodiment
Hereinafter, the action to resin material feedway 10 (the resin material supply method of the present embodiment) is said It is bright.
Operator is in advance to former supply unit 15 supply resin material P.Then, operator's use is arranged at resin material supply The input units such as the contact panel of device 10 are (not shown) to carry out set operation, thus starts resin material feedway 10 Action.
First, the resin material transfer pallet 20 before being supplied to resin material P is moved into and is placed in guarantor by transferred unit 18 Hold on platform 16.Then, resin material supply mouth 121 is configured at resinous wood by move portion 17 by the control of control unit 19 The mode of the surface of set starting position 22 (with reference to Fig. 3) in the resin material resettlement section 21 of material transfer pallet 20, makes Holding station 16 moves in the horizontal direction.In the example of fig. 3, by the resin material resettlement section with generally rectangular upper surface Position near the edge of 21 long side and near the center 245 of the long side is set to starting position 22, but starting position also may be used For any position in resin material resettlement section 21.
Then, measurement unit 14 is measured resin material maintaining part 11 and groove 12 and the resin material P being contained in them Weight after being added together.Due to resin material maintaining part 11 and the weight of groove 12 it is known that so passing through the measure of place since then Weight subtracts the resin material maintaining part 11 and the weight of groove 12, can obtain the resin in resin material maintaining part 11 and groove 12 The weight of material P.In resin material P weight compared with should supply to resin material transfer pallet 20 resin material resettlement section 21 Resin material weight enough situation when, start the resinous wood to resin material resettlement section 21 described in next paragraph Expect the supply action of P.On the other hand, the weight in resin material P it is insufficient or be zero situation when, control unit 19 with from Former supply unit excitation 152 assigns former supply unit 15 mode of the vibration of given time, controls the original supply unit excitation 152.Thus, the resin material P in former supply unit 15 is only supplied set amount to resin material by former supply mouth 151 to keep Portion 11.
Then, control unit 19 assigns vibration to resin material maintaining part 11 and groove 12 with autoexcitation portion 13 with fixed intensity Mode control the excitation 13.Thus, the resin material of resin material transfer pallet 20 is received from resin material supply mouth 121 Appearance portion 21 is with fixed feed speed supply resin material P.Simultaneously, control unit 19 is so that tree for beginning with the imparting of the vibration The mode that fat material supply mouth 121 is moved relative to the relative position of the horizontal direction of resin material resettlement section 21, control movement Portion 17.
In Fig. 3, as an example, the track 23 that the relative position moves is represented.Relative position is first from starting position 22 edges 241 along a long side of resin material resettlement section 21 are moved near the edge 242 of a short side, are sentenced and are drawn in this The mode of U-shaped, i.e. in a manner of turning U-bend, one facing to 243 side of edge of another long side along short side direction (short side extension side To) the mobile distance for being of same size degree with resin material supply mouth 121, simultaneously make long side direction (direction of long side extension) Movement direction reversion.In addition, the displacement distance of short side direction herein is if the tree supplied from resin material supply mouth 121 In the range of fat material P extensions, then it can also be grown compared with the width of resin material supply mouth 121.Thereafter, when relative position is back to length When near the center 245 of edge direction, similarly turn U-bend and be moved near the edge 242 of an above-mentioned short side.By with this side Formula nearby turns U-bend in the adjacent edges of a short side and the center of long side direction repeatedly, when to the edge 243 for reaching another long side When neighbouring, relative position is moved near the edge 244 of another short side along the edge 243 of another long side.Therefore, relative position One moves facing to 241 side of edge of an above-mentioned long side along short side direction and is of same size degree with resin material supply mouth 121 Distance, simultaneously make long side direction movement direction reversion (turning U-bend).After, relative position one side is in long side direction Center 245 nearby nearby turns U-bend repeatedly with the edge 244 of another short side, is simultaneously moved near the edge 241 of a long side. In this way, entirety of the relative position by the resin material resettlement section 21 for supply subject area, finally along the edge 241 of a long side It is back to starting position 22.In the mobile period of above-described relative position, continue from resin material supply mouth 121 towards resin Material storage portion 21 supplies resin material P.
Herein, relative position " by the entirety for the supply subject area for supplying object " is except comprising so that resin material Supply mouth makes the track of relative movement (be supplied with resin material with being spaced closely together by supplying the overall mode of subject area Mouthful width degree) beyond the situation filled up, also comprising the resin material expansion between track supply from resin material supply mouth The situation opened up and separated throughout the degree to supply subject area entirety.Further, also comprising track and supply subject area End between with supplied from resin material supply mouth resin material extension and throughout to supply subject area entirety degree Situation about separating.
As shown in figure 4, the (" rising stage in figure during the feed speed of resin material P is certain from after being just initially supplied Between ") interior miss the mark value.Therefore, as shown in Fig. 5 (a), supplied when being initially supplied to the resinous wood near starting position 22 The position that the quantity delivered of material P supplies more thereafter tails off.In addition, in Fig. 5 (a), observed from starting position 22, in relative position Also there are resin material P, its reason for the opposite side of moving direction to be:Resin material supply mouth 121 has certain width, with And resin material P extends when falling to resin material resettlement section 21 from resin material supply mouth 121 in the horizontal direction.Moreover, work as When relative position is back to starting position 22 after the entirety by resin material resettlement section 21, to being just initially supplied rear resin material The starting position 22 that the quantity delivered of P is less nearby supplies resin material P again, so the resin material P near starting position 22 Amount when the situation without the supply again compared with, become close to the amount of resin material P in other positions (that is, closely Uniformly) (Fig. 5 (b)).
The speed (translational speed) that relative position moves both was fixed, can be also set to as illustrated in following according to position It is variable.In addition, the translational speed on relative position, compared with during rising after just starting movement, the control after slightly moving System is easier.Therefore, in the present embodiment, the translational speed of time after during relatively rising is set to variable.For example, The position of 23 transfer U-bend of track, supply to the region in the outside of curve (in Fig. 3 label symbol 25 and represent region) tree The amount of fat material P tails off compared with the position of straight line, so by becoming the translational speed of relative position at the position for turning U-bend Slowly, and slightly morely to curved portion supply resin material P.Tree is extended in this way, slightly supply to the resin material P of curve more The outside of the less curve of the amount of fat material P, thus enables that the quantity delivered of resin material P is near uniform.
In addition, as shown in fig. 6, because of the resin supplied when relative position is moved along the edge 24 of resin material resettlement section 21 Material P1 will not extend to 24 side of edge, if so making relative position become with constant speed movement compared with resin material resettlement section The resin material P2 supplied during 21 inside movement is more.Therefore, by making relative position along resin material resettlement section 21 Translational speed when edge 24 moves is fast compared with the translational speed of other positions, and the quantity delivered of resin material P can be made almost equal It is even.
The tree of the resin material transfer pallet of resin material is supplied using the resin material feedway 10 of the present embodiment Fat material storage portion (and corresponding to its compression molding apparatuss shaping dies die cavity) flat shape be not limited to Fig. 3 institutes The rectangle shown, can be set to the arbitrary shapes such as the quadrangle beyond rectangle, the polygon beyond quadrangle, circle.Such as When the use of resin material resettlement section 21A being the situation that circular resin material transfers pallet 20A, relative position can be made along Fig. 7 (a) the track 23A1 movements shown in.In the movement, relative position be using the adjacent edges of resin material resettlement section 21A as Starting position 22A, first, after moving nearly 90 ° in arc-shaped along the edge, one facing to round center movement equivalent to tree The amount of the width of fat material supply mouth 121, simultaneously turns U-bend, in concentric circles (circular arc) shape in the opposite direction mobile nearly 90 ° it Afterwards, further turn U-bend, the action is repeated until to the immediate vicinity for reaching the circle.Be set to " nearly 90 ° " herein and The reason for non-90 degree, is:In order to ensure turning the region needed for U-bend.Then, relative position will in the immediate vicinity movement of the circle Nearly 180 °, one facing to resin material resettlement section 21A edge movement equivalent to the width of resin material supply mouth 121 amount, Simultaneously turn U-bend, after moving nearly 90 ° to opposite direction in concentric circles (circular arc) shape, further turn U-bend, be repeated The action is until to reaching adjacent edges.Further, relative position in adjacent edges move nearly 180 ° after, carry out with before this The identical operation from the center of adjacent edges direction circle, the followed by operation from round centrally directed adjacent edges.Then, Relative position in the adjacent edges in arc-shaped move when to starting position 22A is reached, terminate a series of movement.
In the example of Fig. 7 (a), relative position turns U-bend whenever nearly 90 ° mobile, to reach round center or Nearly 180 ° are moved during edge, but also can turn U-shaped whenever moving nearly 180 ° as shown in Fig. 7 (b) with track 23A2 It is curved, to when reaching round center or edge move nearly 360 °.
The schematic configuration of the resin material feedway 10A of variation is represented in fig. 8.The resin material supply of variation Device 10A is also detected in addition to inscape possessed by above-mentioned resin material feedway 10 with feed speed Portion 191 and alarm sending part 192.Feed speed test section 191 is to during supply object supply resin material, obtaining metering The weight that portion 14 is measured, resin material is detected to the feed speed of supply object from the time change of the weight.Alarm is sent out Portion 192 is sent to deviate the situation of given area in the feed speed using the resin material detected by feed speed test section 191 When send alarm tone.Alarm sending part 192 can also replace sending alarm tone, and send light or in showing image on picture.If for Give speed deviations given area, then the amount of supply to the resin material of supply object can deviate desired value, so by with this Mode sends alarm, can prevent from carrying out ester moulding with the amount of the resin material of mistake.In addition, it can also replace setting alarm to send out Portion 192 is sent, and the feed speed for being arranged on the resin material detected using feed speed test section 191 deviates given area The stop control unit for stopping device during situation.
In example more than, said exemplified by supplying the situation of resin material to resin material transfer pallet 20 It is bright, but also can be from resin material feedway 10 to the resin material transfer pallet supply resinous wood with composition other than the above Material.In addition, can also be set to shaping dies to transport, tree is supplied to the die cavity of the shaping dies from resin material feedway 10 Fat material, also can supply resin material from resin material feedway 10 to the surface for being packaged with the substrate of electronic component.Resin Material is not limited to powder shaped, also can be used liquid.
(3) resin molding apparatus (compression molding apparatuss) of the present embodiment and the embodiment party of resin forming product manufacture method Case:
The resin molding apparatus of the present embodiment has above-mentioned resin material feedway 10 and compression molding portion 30.With Under, the composition in compression molding portion 30 is illustrated using Fig. 9.
In compression molding portion 30, in lower part, the corner of fixed disk 311 is equipped with connecting rod 32 (altogether 4) respectively, even The upper end of bar 32 is nearby provided with rectangular top fixed disk 312.Between lower part fixed disk 311 and top fixed disk 312 It is provided with rectangular movable platform 33.Movable platform 33 is provided with the hole passed through for connecting rod 32 in corner, can be along connecting rod 32 Lower movement.On lower part fixed disk 311, the mold closing mechanism 34 of the promising device for moving up and down movable platform 33 is set.
Lower heater 351 is configured with above movable platform 33, on lower heater 351, is provided with conduct The lower die LM of above-mentioned 2nd shaping dies.
On top, the lower surface of fixed disk 312 is configured with upper portion heater 352, under upper portion heater 352, is provided with For the upper mold UM of above-mentioned 1st shaping dies.Below upper mold UM, the substrate S for being packaged with semiconductor chip can be installed.Upper mold UM and lower die LM systems to ground mutually to configuring.
The action in compression molding portion 30 is as follows.First, by substrate travel mechanism (not shown), pacify below upper mold UM Dress is packaged with the substrate S of semiconductor chip.Then, as described above as will be supplied with resin in resin material feedway 10 The resin material transfer pallet 20 of material P is transferred to the surface of lower die LM by transferred unit 18, by resin material receiving space Resin material P in PA with housing to die cavity MC in the lump from shape film F.In addition, to upper mold UM substrate S installation with downwards The collecting of the resin material P of mould LM can also be contrary to the above order carry out.
In this condition, the resin material P in die cavity MC is heated by using lower heater 351 and makes its soft Change, and substrate S is heated by upper portion heater 352.In the case where resin material P and substrate S are heated state, lead to Crossing mold closing mechanism 34 rises movable platform 33, by shaping dies (upper mold UM and lower die LM) molding, hardens resin material P. After resin material P hardening, decline movable platform 33 by using mold closing mechanism 34 and mold.
Pass through action (the resin forming product manufacturer in resin as described above material feeding apparatus 10 and compression molding portion 30 Method), and manufacturing resin seal has the resin seal product (resin forming product) of semiconductor chip.The resin seal strain obtained is led to The inner face of lower die LM is crossed by being coated to from shape film F, and is successfully demoulded from lower die LM.
Then, using Figure 10, other embodiments of the resin molding apparatus of the present invention are illustrated.The present embodiment Resin molding apparatus 40 have material receiving module 41, shaping module 42 and discharge module 43.Material receiving module 41 is to use With from external reception resin material P and substrate S and be sent to shaping module 42 device, possess above-mentioned resin material feedway 10, and there is substrate receiving division 411.1 shaping module 42 possesses 1 group of above-mentioned compression molding portion 30.3 are indicated in Fig. 10 Platform shapes module 42, but the shaping module 42 of any number of units can be set in resin molding apparatus 40.Even if in addition, by resin Building mortion 40 is completed after beginning to use, and can also increase and decrease shaping module 42.43 system of discharge module will utilize in advance The resin forming product that shaping module 42 manufactures moves into simultaneously keeper, and have resin forming product maintaining part 431 from module 42 is shaped.
In a manner of through 41,1 or more shaping modules 42 of material receiving module and discharge module 43, conveyance base is provided with The main carrying device 46 of plate S, resin material transfer pallet 20 and resin forming product.Above-mentioned transferred unit 18 forms main carrying device 46 A part.In addition, in each module, conveyance substrate S, tree are provided between the device in main carrying device 46 and the module Fat material transfers the secondary carrying device 47 of pallet 20 and resin forming product.
In addition, resin molding apparatus 40 has to make the power supply and control unit (not shown) of above-mentioned each module action.
Action to resin molding apparatus 40 illustrates.Substrate S is to be held in material receiving module 41 by operator Substrate receiving division 411.Main carrying device 46 and secondary carrying device 47 transport substrate S self-reference substrates receiving division 411 in shaping The compression molding portion 30 in 1 in module 42, and substrate S is installed to the upper mold UM in the compression molding portion 30.Then, master removes Device 46 and secondary carrying device 47 is sent to move into resin material transfer pallet 20 to resin material feedway 10.In resin material In feedway 10, as described above as resin material P is supplied to resin material transfer pallet 20.Main carrying device 46 and secondary conveyance Device 47 transports the resin material for being supplied with resin material P transfer pallet 20 to the shaping that substrate S is provided with upper mold UM The compression molding portion 30 of module 42, after resin material transfer pallet 20 is configured on the lower die LM in the compression molding portion 30, Resin material P is supplied to the die cavity MC of lower die LM from resin material transfer pallet 20.Thereafter, main carrying device 46 and pair are passed through Carrying device 47 takes out of resin material transfer pallet 20 from compression molding portion 30, is pressed in the compression molding portion 30 thereafter Shorten shape into.During shaping is compressed using the compression molding portion 30, to other compression molding portions 30 carry out with it is identical before this Operation, thus a face staggering time one side can concurrently be compressed shaping between multiple compression molding portions 30.Pass through compression The resin forming product being shaped to achieve is to be taken out of by main carrying device 46 and secondary carrying device 47 from compression molding portion 30, is moved into To the resin forming product maintaining part 431 for discharging module 43 and keep.User suitably protects resin forming product from resin forming product Portion 431 is held to take out.
The present invention is not limited to above-mentioned each embodiment certainly, in addition to the aspect described in described above, also can Carry out various modifications.

Claims (10)

1. a kind of resin material feedway, it is characterised in that possess:
A) object maintaining part is supplied, it keeps the supply object of the object as supply resin material;
B) resin material supply mouth, it is arranged on the top of the supply object maintaining part;
C) move portion, it makes above-mentioned resin material supply mouth relative to the supply object for being maintained at above-mentioned supply object maintaining part The relative position movement of the horizontal direction of thing;And
D) control unit, it will not be in mobile route by same position more than 2 times from starting position with above-mentioned relative position The mode that ground is back to the starting position controls the movement of the above-mentioned move portion in the supply subject area of above-mentioned supply object.
2. resin material feedway according to claim 1, wherein, the translational speed of above-mentioned relative position and from above-mentioned Any one of feed speed of resin material of resin material supply mouth supply or both is variable.
3. resin material feedway according to claim 2, wherein, above-mentioned translational speed is variable, and above-mentioned supply speed Spend for constant speed.
4. resin material feedway according to any one of claim 1 to 3, it possesses feed speed test section, should Feed speed of the feed speed test section detection from the resin material of above-mentioned resin material supply mouth supply.
A kind of 5. resin material supply method, it is characterised in that:Simultaneously make the supply object of the object for supply resin material Relative position with the horizontal direction of the resin material supply mouth of the top that is arranged on the supply object is with from starting position Will not in mobile route same position 2 times in a manner of Shangdi is back to the starting position in above-mentioned supply object Subject area movement is supplied, resin material simultaneously is supplied to the supply object from the resin material supply mouth.
6. resin material supply method according to claim 5, wherein, the translational speed of above-mentioned relative position and from above-mentioned Any one of feed speed of resin material of resin material supply mouth supply or both is variable.
7. resin material supply method according to claim 6, wherein, above-mentioned translational speed is variable, and above-mentioned supply speed Spend for constant speed.
8. resin material supply method according to any one of claims 5 to 7, it is detected supplies from above-mentioned resin material The feed speed of the resin material of mouth supply.
9. a kind of resin molding apparatus, it is characterised in that possess:
Resin material feedway according to any one of claim 1 to 4;
Compression molding portion, its 2nd shaping dies with the 1st shaping dies, with die cavity and by the 1st shaping dies and this The clamping of 2 shaping dies molding;And
Transferred unit, it will be transferred to by above-mentioned resin material feedway to be supplied with the supply object of resin material State on die cavity, the resin material is supplied to the die cavity from the supply object.
10. a kind of resin forming product manufacture method, it is characterised in that there are following steps:
Above-mentioned supply object is supplied by the resin material supply method according to any one of claim 5 to 8 and is set The step of fat material;
The supply object for being supplied with resin material is transferred to the die cavity of the 2nd shaping dies, and from the supply object pair The die cavity supplies the step of resin material;And
The step of the 2nd shaping dies that resin material is fed with 1st shaping dies and die cavity is molded.
CN201710977144.6A 2016-10-21 2017-10-19 Resin material supply device and method, resin molding device, and resin molded product manufacturing method Active CN107972220B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016206633A JP6298871B1 (en) 2016-10-21 2016-10-21 Resin material supply device, resin material supply method, resin molding device, and resin molded product manufacturing method
JP2016-206633 2016-10-21

Publications (2)

Publication Number Publication Date
CN107972220A true CN107972220A (en) 2018-05-01
CN107972220B CN107972220B (en) 2019-12-27

Family

ID=61629156

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710977144.6A Active CN107972220B (en) 2016-10-21 2017-10-19 Resin material supply device and method, resin molding device, and resin molded product manufacturing method

Country Status (4)

Country Link
JP (1) JP6298871B1 (en)
KR (1) KR102074404B1 (en)
CN (1) CN107972220B (en)
TW (1) TWI656958B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112776241A (en) * 2019-11-07 2021-05-11 东和株式会社 Resin material supply device, resin molding device, and method for manufacturing molded article
CN112840441A (en) * 2018-10-16 2021-05-25 东和株式会社 Conveying device, resin molding device, conveying method, and method for manufacturing resin molded product
US11981059B2 (en) 2018-10-16 2024-05-14 Towa Corporation Conveying apparatus and resin molding apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6894479B2 (en) * 2018-04-16 2021-06-30 Towa株式会社 Powder / granular material supply device, resin molding device, powder / granular material supply method, and method for manufacturing resin molded products
JP6598918B2 (en) * 2018-04-16 2019-10-30 Towa株式会社 Granule supply device, resin molding device, powder supply method, and method of manufacturing resin molded product

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1099189A (en) * 1993-04-22 1995-02-22 东和株式会社 Moulded resin is with the method and apparatus of seal electronic element
CN101460256A (en) * 2006-06-02 2009-06-17 三键株式会社 Material application device and material application method
CN104708734A (en) * 2013-11-28 2015-06-17 东和株式会社 Method and mechanism for supplying resin material of compression molding apparatus, compression molding method and compression molding apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5793806B2 (en) * 2011-08-17 2015-10-14 アピックヤマダ株式会社 Resin molding equipment
JP5731009B2 (en) * 2011-11-08 2015-06-10 アピックヤマダ株式会社 Resin sealing device and resin supply device
JP6057880B2 (en) * 2013-11-28 2017-01-11 Towa株式会社 Resin material supply method and supply device for compression molding apparatus
JP6612172B2 (en) * 2016-04-25 2019-11-27 Towa株式会社 Resin molding apparatus, resin molding method, resin molded product manufacturing method, and product manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1099189A (en) * 1993-04-22 1995-02-22 东和株式会社 Moulded resin is with the method and apparatus of seal electronic element
CN101460256A (en) * 2006-06-02 2009-06-17 三键株式会社 Material application device and material application method
CN104708734A (en) * 2013-11-28 2015-06-17 东和株式会社 Method and mechanism for supplying resin material of compression molding apparatus, compression molding method and compression molding apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112840441A (en) * 2018-10-16 2021-05-25 东和株式会社 Conveying device, resin molding device, conveying method, and method for manufacturing resin molded product
CN112840441B (en) * 2018-10-16 2024-03-26 东和株式会社 Conveying device, resin molding device, conveying method, and method for manufacturing resin molded product
US11981059B2 (en) 2018-10-16 2024-05-14 Towa Corporation Conveying apparatus and resin molding apparatus
CN112776241A (en) * 2019-11-07 2021-05-11 东和株式会社 Resin material supply device, resin molding device, and method for manufacturing molded article

Also Published As

Publication number Publication date
TW201815546A (en) 2018-05-01
CN107972220B (en) 2019-12-27
TWI656958B (en) 2019-04-21
KR102074404B1 (en) 2020-02-06
JP6298871B1 (en) 2018-03-20
JP2018065335A (en) 2018-04-26
KR20180044190A (en) 2018-05-02

Similar Documents

Publication Publication Date Title
CN107972220A (en) Resin material feedway and method, resin molding apparatus and resin forming product manufacture method
CN104708734B (en) The resin material supply method and feed mechanism and compress moulding method and compression molding apparatuss of compression molding apparatuss
CN105984081B (en) Resin sealing apparatus and method of resin-sealing
CN105291335B (en) Shaping dies, forming device, the manufacturing method of formed products and resin molding method
CN105283294B (en) Resin molding machine and resin molding method
KR102059738B1 (en) Molding die, resin molding apparatus, resin molding method and method for manufacturing resin-molded component
CN102971127A (en) Method for producing resin sealed electronic component and resin sealing device for electronic component
TWI624346B (en) Resin molding device and resin molding method
KR20190093607A (en) Frame body jig, resin supply jig, and its measuring method, metering device and method of molded resin, resin supply device, resin supply metering device and method, resin mold device and method
CN103921384A (en) Method For Compression-molding Electronic Component And Die Apparatus
KR20180087161A (en) Discharging apparatus, discharging method, resin molding apparatus, and method for producing resin molded product
KR102288581B1 (en) Resin molding device, and method for producing resin-molded product
CN105082432B (en) Resin molding apparatus and resin molding method
CN107437510A (en) Resin seal product manufacture method and resin sealing apparatus
KR20180014660A (en) Resin molding apparatus and resin molding product manufacturing method
CN107303706A (en) Resin molding apparatus and resin molding method
CN107685412A (en) The manufacture method of shaping mould, resin molding apparatus and synthetic resin
CN109177474B (en) Gilt equipment
CN108400217A (en) A kind of high efficiency LED chip flip-chip packaged method
CN107914355A (en) Resin material feedway and method, resin molding apparatus and resin forming product manufacture method
CN110039686A (en) Resin molding apparatus and resin forming product manufacturing method
KR100813498B1 (en) Method for manufacturing friction material of brake pad and apparatus thereof
CN206322728U (en) A kind of COB optical assemblies test benefit powder all-in-one automatically
CN106273168B (en) The resin material feedway and method of compression molding apparatuss, compression molding apparatuss and method
CN107756707A (en) Resin molding apparatus and resin forming product manufacture method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant