CN107907307A - A kind of measuring device and method of wedge-shaped lens transmission wavefront - Google Patents
A kind of measuring device and method of wedge-shaped lens transmission wavefront Download PDFInfo
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- CN107907307A CN107907307A CN201711096259.0A CN201711096259A CN107907307A CN 107907307 A CN107907307 A CN 107907307A CN 201711096259 A CN201711096259 A CN 201711096259A CN 107907307 A CN107907307 A CN 107907307A
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- shaped lens
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- holographic element
- calculating holographic
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims description 28
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000009738 saturating Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
Abstract
The invention discloses a kind of measuring device and method of wedge-shaped lens transmission wavefront.Wherein, the measuring device of wedge-shaped lens transmission wavefront provided by the invention mainly includes the flat interferometer along paths direction, tested wedge-shaped lens, calculating holographic element, and flat interferometer, tested wedge-shaped lens and calculating holographic element are placed on optical table；Angle between the transmission criteria mirror of the calculating holographic element and flat interferometer isγ, the tested wedge-shaped lens are in design position.The present invention is simple using flat interferometer and the transmission wavefront of calculating holographic element measurement wedge-shaped lens, light channel structure, it is easy to accomplish；In addition, by the auxiliary of alignment area and reference area, calculating holographic element and tested wedge-shaped lens easily can be adjusted to design position, light path adjustment is very convenient, has preferable application prospect in practical application and production.
Description
Technical field
The invention belongs to field of optical measurements, and in particular to a kind of measuring device and method of wedge-shaped lens transmission wavefront.
Background technology
Wedge-shaped lens are composed of right-angle prism peace convex lens, it can integrate original optical system, reduce institute
The quantity of the optical element used, improves the performance of optical system, is mainly used in large-scale astronomical telescope, interferometer, laser
Igniter etc..Transmission wavefront is an important indicator of wedge-shaped lens processing, its precision directly affects the quality of light beam, because
This, it would be desirable to accurately measure the transmission wavefront of wedge-shaped lens.In the prior art, currently used wedge-shaped lens transmission wavefront
Measuring method is offset lens method.Offset lens method is to produce a branch of sphere light by sphericity interferometer, and light first passes around compensation
Lens, then by wedge-shaped lens, reflected afterwards by standard flat speculum, along backtracking into interferometer, so as to fulfill saturating
Measurement before ejected wave.However, this method is needed using compensating glass, standard flat speculum, auto-collimation collimator etc., light path is multiple
It is miscellaneous, adjustment inconvenience.
The content of the invention
It is an object of the invention to overcome above-mentioned deficiency existing in the prior art, there is provided a kind of light path is simple and adjusts
The measuring device and method of convenient wedge-shaped lens transmission wavefront.
In order to achieve the above object, the present invention proposes a kind of measuring device of wedge-shaped lens transmission wavefront, along paths
Direction is made of flat interferometer (3), tested wedge-shaped lens (2), the calculating holographic element (1) that the angle of wedge is α successively, plane interference
Instrument (3), tested wedge-shaped lens (2) and calculating holographic element (1) are placed on optical table；The calculating holographic element (1)
Angle between the transmission criteria mirror of flat interferometer (3) is γ；The tested wedge-shaped lens (2) are in design position, quilt
It is d to survey wedge-shaped lens (2) and the distance between calculating holographic element (1), the detection light wave that the flat interferometer (3) sends with
β incides at angle tested wedge-shaped lens (2).
Relation between described α, β and γ meets sin β=nsin α and γ=β-α, wherein, n is tested wedge-shaped lens (2)
Refractive index.
Parameter designing and making of the calculating holographic element (1) according to tested wedge-shaped lens (2)；
The calculating holographic element (1) includes (13) three detection zone (11), alignment area (12) and reference area areas
Domain, wherein, the diffraction time that the computed hologram of detection zone (11) uses is maLevel, for detecting tested wedge-shaped lens (2)
Transmission wavefront；The diffraction time that the computed hologram of alignment area (12) uses is mbLevel, for being directed at calculating holographic element
(1) and flat interferometer (3)；The diffraction time that the computed hologram of reference area (13) uses is mcLevel, marks for projecting
(4), the position of the tested wedge-shaped lens (2) of auxiliary adjustment.
Further, the calculating holographic element (1) plating reflectance coating.
Further, the calculating holographic element (1) uses phase-type computed hologram.
The present invention also proposes a kind of measuring method of wedge-shaped lens transmission wavefront, comprises the following steps：
Step 1, the parameter according to tested wedge-shaped lens (2), design and make calculating holographic element (1)；
Flat interferometer (3) and calculating holographic element (1), be placed on optical table by step 2, and adjustment calculates holographic node
Part (1), it is γ to make the angle between the transmission criteria mirror of calculating holographic element (1) and flat interferometer (3)；
The tested wedge-shaped lens (2) that the angle of wedge is α, is put into light path by step 3, and the tested wedge-shaped lens (2) of adjustment, make tested wedge
Shape lens (2) are in design position；
The interference pattern that step 4, measurement are obtained by step 3, and then obtain the transmission wavefront of tested wedge-shaped lens (2).
The calculating holographic element (1) includes (13) three detection zone (11), alignment area (12) and reference area areas
Domain；
Wherein, the diffraction time that the computed hologram of detection zone (11) uses is maLevel, for detecting tested wedge shape thoroughly
The transmission wavefront of mirror (2)；The diffraction time that the computed hologram of alignment area (12) uses is mbLevel, holography is calculated for being aligned
Element (1) and flat interferometer (3)；The diffraction time that the computed hologram of reference area (13) uses is mcLevel, for projecting
Mark (4), the position of the tested wedge-shaped lens (2) of auxiliary adjustment.
It is γ to make the angle between the transmission criteria mirror of calculating holographic element (1) and flat interferometer (3) in the step 2
Comprise the following steps that：
2.1st, the position of coarse adjustment calculating holographic element (1) and posture, the m for returning to alignment area (12)bOrder diffraction light wave
Interference pattern is formed in flat interferometer (3)；
2.2nd, according to the position of the interference pattern accurate adjustment calculating holographic element (1) of alignment area (12) and posture, until alignment
The interference pattern in region (12) realizes zero striped.
The tested wedge-shaped lens (2) are made to be specially in design position described in the step 3：
Tested the distance between wedge-shaped lens (2) and calculating holographic element (1) are d, what the flat interferometer (3) sent
Detection light wave tested wedge-shaped lens (2) are incided with β angles, wherein the parameter alpha, β and γ meet sin β=nsin α and γ=β-
α, wherein, n is the refractive index of tested wedge-shaped lens (2).
Further, tested wedge-shaped lens (2) are made to be in comprising the following steps that for design position described in the step 3：
3.1st, according to the m of reference area (13)cThe mark (4) of order diffraction light wave projection, coarse adjustment are tested wedge-shaped lens (2)
Position and posture, the m for returning to detection zone (11)aOrder diffraction light wave forms interference pattern in flat interferometer (3)；
3.2nd, position and the posture of wedge-shaped lens (2) are tested according to the interference pattern accurate adjustment of detection zone (11), until detection
The interference pattern in region (11) realizes zero striped.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows：
1st, the present invention provides a kind of measuring device and method of wedge-shaped lens transmission wavefront, mainly using flat interferometer
The measurement of wedge-shaped lens transmission wavefront is realized with calculating holographic element, light channel structure is simple, it is easy to accomplish.
2nd, the measuring device and method of wedge-shaped lens transmission wavefront provided by the invention, utilizes calculating holographic element design
Flexibility, designs detection zone, alignment area and reference area at the same time on calculating holographic element, passes through alignment area and benchmark
The auxiliary in region, easily can be adjusted to design position, light path adjustment is non-by calculating holographic element and tested wedge-shaped lens
It is often convenient, there is preferable application prospect in practical application and production.
Brief description of the drawings
Fig. 1 is a kind of schematic diagram of the measuring device of wedge-shaped lens transmission wavefront provided in an embodiment of the present invention.
Fig. 2 is a kind of flow chart of the measuring method of wedge-shaped lens transmission wavefront provided in an embodiment of the present invention.
Fig. 3 is the regional distribution chart of calculating holographic element provided in an embodiment of the present invention.
Fig. 4 is calculating holographic element adjustment schematic diagram provided in an embodiment of the present invention.
In figure：1-calculating holographic element, 2-tested wedge-shaped lens, 3-flat interferometer, 11-detection zone, 12-
Alignment area, 13-reference area, 4-mark.
Embodiment
In order to make those skilled in the art more fully understand technical scheme, with reference to the present invention attached drawing 1-4,
Clear, complete description, based on the embodiments of the present invention, those of ordinary skill in the art are carried out to technical scheme
The other similar embodiments obtained on the premise of creative work is not made, should all belong to the model of the application protection
Enclose.
Embodiment 1, is a kind of measuring device of wedge-shaped lens transmission wavefront provided by the present invention, such as Fig. 1, passes along light path
Broadcast direction to be made of flat interferometer (3), tested wedge-shaped lens (2), the calculating holographic element (1) that the angle of wedge is α successively, plane is done
Interferometer (3), tested wedge-shaped lens (2) and calculating holographic element (1) are placed on optical table；The calculating holographic element
(1) angle between the transmission criteria mirror of flat interferometer (3) is γ, and the tested wedge-shaped lens (2) are in design position；
The tested wedge-shaped lens (2) are in design position, and the distance between tested wedge-shaped lens (2) and calculating holographic element (1) are
D, the detection light wave that the flat interferometer (3) sends incide tested wedge-shaped lens (2) with β angles.
Parameter designing and making of the calculating holographic element (1) according to tested wedge-shaped lens (2)；
Further, the calculating holographic element (1) plating reflectance coating, reflectance coating are the aluminium film of high reflectance.
Further, the calculating holographic element (1) uses phase-type computed hologram.
In the present embodiment, the Lens Surface Parameters equation of tested wedge-shaped lens (2) is：
Wherein,C=1/R, R are aspherical vertex curvature radius, and k is quadratic surface constant, and A is aspheric
Face coefficient.The angle of wedge of tested wedge-shaped lens (2) is α=7.9 °, and size is 200mm × 200mm × 30mm, and material uses fused quartz
Glass, its refractive index are n=1.457, lens parameter R=-1370.9mm, k=-2.122557, A=-3.717536 × 10-8。
Tested the distance between wedge-shaped lens (2) and calculating holographic element (1) are d=500mm.Due between α, β and γ
Relation meet sin β=nsin α and γ=β-α, then the incidence angle for detecting light wave is β=11.55 °, calculating holographic element (1)
Angle between the transmission criteria mirror of flat interferometer (3) is γ=3.65 °.
As shown in Fig. 2, be a kind of measuring method of wedge-shaped lens transmission wavefront provided by the present invention, including following step
Suddenly：
Step 1, the parameter according to tested wedge-shaped lens (2), design and make calculating holographic element (1).
In the present embodiment, the size of the calculating holographic element (1) is 230mm × 230mm × 30mm, including detection
(13) three region (11), alignment area (12) and reference area regions, as shown in Figure 3.Trizonal computed hologram makes
Diffraction time ma、mbAnd mcIt is+3 grades, wherein, the computed hologram of detection zone (11) is used to detect tested wedge shape thoroughly
The transmission wavefront of mirror (2), the size of the region computed hologram is 170mm × 170mm, and the minimum groove cycle is 19.7 μm；It is right
The computed hologram of quasi- region (12) is used to be directed at calculating holographic element (1) and flat interferometer (3), the region computed hologram
Size be 20mm × 80mm, the minimum groove cycle is 14.3 μm；Reference area (13) is located on the outside of detection zone (11), by four
A 10mm × 10mm square areas are formed, and (4) are marked for projecting, the position of the tested wedge-shaped lens (2) of auxiliary adjustment, the area
The minimum groove cycle of domain computed hologram is 12.4 μm.
Step 2, as shown in figure 4, flat interferometer (3) and calculating holographic element (1) are placed on optical table, adjust
Calculating holographic element (1), make the angle between the transmission criteria mirror of calculating holographic element (1) and flat interferometer (3) be γ=
3.65°；
Specific set-up procedure is as follows：First, the position of coarse adjustment calculating holographic element (1) and posture, make alignment area (12)
+ 3 order diffraction light waves returned form interference pattern in flat interferometer (3), then, according to the interference pattern of alignment area (12) essence
Position and the posture of calculating holographic element (1) are adjusted, until the interference pattern of alignment area (12) realizes zero striped.
Step 3, as shown in Figure 1, the angle of wedge is put into light path for the tested wedge-shaped lens (2) of α=7.9 °, adjust tested wedge shape
Lens (2), are at design position；
Specific set-up procedure is as follows：First, the mark (4) projected according to+3 order diffraction light waves of reference area (13), slightly
Position and the posture of tested wedge-shaped lens (2) are adjusted, makes+3 order diffraction light waves that detection zone (11) returns in flat interferometer (3)
Middle formation interference pattern, then, position and the posture of wedge-shaped lens (2) is tested according to the interference pattern accurate adjustment of detection zone (11), directly
Interference pattern to detection zone (11) realizes zero striped.
The interference pattern of the detection zone (11) obtained in step 4, measuring process 3, and then tested wedge-shaped lens are calculated
(2) transmission wavefront；The present invention calculates the specific of transmission wavefront for calculating tested wedge-shaped lens (2) in the step by interference pattern
Method does not limit.
It should be noted that attached drawing is only for the purpose of description, and map not according to original size.
Any feature disclosed in this specification (including any accessory claim, summary), unless specifically stated,
Replaced by other equivalent or with similar purpose alternative features.I.e., unless specifically stated, each feature is a series of
An example in equivalent or similar characteristics.
The invention is not limited in foregoing embodiment.The present invention, which expands to, any in the present specification to be disclosed
New feature or any new combination, and disclose any new method or process the step of or any new combination.
Claims (10)
1. a kind of measuring device of wedge-shaped lens transmission wavefront, it is characterised in that along paths direction successively by plane interference
Instrument (3), the angle of wedge are the tested wedge-shaped lens (2) of α, calculating holographic element (1) composition, and flat interferometer (3), be tested wedge-shaped lens
(2) it is placed in calculating holographic element (1) on optical table；The calculating holographic element (1) is saturating with flat interferometer (3)
The angle penetrated between standard mirror is γ, and the tested wedge-shaped lens (2) are in design position；Tested wedge-shaped lens (2) place
In design position, it is d to be tested the distance between wedge-shaped lens (2) and calculating holographic element (1), flat interferometer (3) hair
The detection light wave gone out incides tested wedge-shaped lens (2) with β angles.
2. the measuring device of wedge-shaped lens transmission wavefront according to claim 1, it is characterised in that described α, β and γ it
Between relation meet sin β=nsin α and γ=β-α, wherein, n is the refractive index of tested wedge-shaped lens (2).
3. the measuring device of wedge-shaped lens transmission wavefront according to claim 1, it is characterised in that the calculating holographic node
Parameter designing and making of the part (1) according to tested wedge-shaped lens (2)；
The calculating holographic element (1) includes (13) three detection zone (11), alignment area (12) and reference area regions, its
In, the diffraction time that the computed hologram of detection zone (11) uses is maLevel, for detecting the transmitted wave of tested wedge-shaped lens
Before；The diffraction time that the computed hologram of alignment area (12) uses is mbLevel, for being directed at calculating holographic element (1) and plane
Interferometer (3)；The diffraction time that the computed hologram of reference area (13) uses is mcLevel, marks (4), auxiliary is adjusted for projecting
The position of whole tested wedge-shaped lens (2).
4. the measuring device of wedge-shaped lens transmission wavefront according to claim 1, it is characterised in that the calculating is holographic
Element (1) plates reflectance coating.
5. the measuring device of wedge-shaped lens transmission wavefront according to claim 1, it is characterised in that the calculating is holographic
Element (1) uses phase-type computed hologram.
6. a kind of measuring method of wedge-shaped lens transmission wavefront, it is characterised in that this method comprises the following steps：
Step 1, the parameter according to tested wedge-shaped lens (2), design and make calculating holographic element (1)；
Flat interferometer (3) and calculating holographic element (1), be placed on optical table by step 2, adjusts calculating holographic element
(1), it is γ to make the angle between the transmission criteria mirror of calculating holographic element (1) and flat interferometer (3)；
The tested wedge-shaped lens (2) that the angle of wedge is α, is put into light path by step 3, and the tested wedge-shaped lens (2) of adjustment, make tested wedge shape thoroughly
Mirror (2) is in design position；
The interference pattern that step 4, measurement are obtained by step 3, and then obtain the transmission wavefront of tested wedge-shaped lens (2).
7. the measuring method of wedge-shaped lens transmission wavefront according to claim 6, it is characterised in that it is characterized in that, institute
Stating calculating holographic element (1) includes (13) three detection zone (11), alignment area (12) and reference area regions；
Wherein, the diffraction time that the computed hologram of detection zone (11) uses is maLevel, for detecting tested wedge-shaped lens (2)
Transmission wavefront；The diffraction time that the computed hologram of alignment area (12) uses is mbLevel, for being directed at calculating holographic element
(1) and flat interferometer (3)；The diffraction time that the computed hologram of reference area (13) uses is mcLevel, marks for projecting
(4), the position of the tested wedge-shaped lens (2) of auxiliary adjustment.
8. the measuring method of wedge-shaped lens transmission wavefront according to claim 7, it is characterised in that make meter in the step 2
The angle calculated between holographic element (1) and the transmission criteria mirror of flat interferometer (3) is comprising the following steps that for γ：
2.1st, the position of coarse adjustment calculating holographic element (1) and posture, the m for returning to alignment area (12)bOrder diffraction light wave is in plane
Interference pattern is formed in interferometer (3)；
2.2nd, according to the position of the interference pattern accurate adjustment calculating holographic element (1) of alignment area (12) and posture, until alignment area
(12) interference pattern realizes zero striped.
9. the measuring method of wedge-shaped lens transmission wavefront according to claim 7, it is characterised in that institute in the step 3
Stating makes the tested wedge-shaped lens (2) be specially in design position：
Tested the distance between wedge-shaped lens (2) and calculating holographic element (1) are d, the detection that the flat interferometer (3) sends
Light wave incides tested wedge-shaped lens (2) with β angles, wherein the parameter alpha, β and γ meet sin β=nsin α and γ=β-α, its
In, n is the refractive index of tested wedge-shaped lens (2).
10. the measuring method of wedge-shaped lens transmission wavefront according to claim 8, it is characterised in that institute in the step 3
Stating makes tested wedge-shaped lens (2) be in comprising the following steps that for design position：
3.1st, according to the m of reference area (13)cThe mark (4) of order diffraction light wave projection, coarse adjustment are tested the position of wedge-shaped lens (2)
And posture, the m for returning to detection zone (11)aOrder diffraction light wave forms interference pattern in flat interferometer (3)；
3.2nd, position and the posture of wedge-shaped lens (2) are tested according to the interference pattern accurate adjustment of detection zone (11), until detection zone
(11) interference pattern realizes zero striped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711096259.0A CN107907307B (en) | 2017-11-09 | Wedge-shaped lens transmission wavefront measuring device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711096259.0A CN107907307B (en) | 2017-11-09 | Wedge-shaped lens transmission wavefront measuring device and method |
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| Publication Number | Publication Date |
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| CN107907307A true CN107907307A (en) | 2018-04-13 |
| CN107907307B CN107907307B (en) | 2024-04-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112038880A (en) * | 2020-08-21 | 2020-12-04 | 河北工业大学 | Hundred picosecond laser for inhibiting heat effect |
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| CN112038880A (en) * | 2020-08-21 | 2020-12-04 | 河北工业大学 | Hundred picosecond laser for inhibiting heat effect |
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