CN105572050B - The detection method of spherical lens material homogeneity - Google Patents
The detection method of spherical lens material homogeneity Download PDFInfo
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- CN105572050B CN105572050B CN201510962193.3A CN201510962193A CN105572050B CN 105572050 B CN105572050 B CN 105572050B CN 201510962193 A CN201510962193 A CN 201510962193A CN 105572050 B CN105572050 B CN 105572050B
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract
The detection method of spherical lens material homogeneity belongs to optical interferometry technical field, this method combination phase-shifting interference measuring technology, index-matching fluid and posts plate and realizes the detection of spherical lens material homogeneity.By the matching of index-matching fluid and the tested index of refraction in lens, tested lens is allow to be detected using interferometer plane wave front.Meanwhile by stirring index-matching fluid, the interference testing result that then repeated measurement is had one's bosom filled under state eliminates influence of the index-matching fluid uniformity to testing result.Finally, subtract each other the material homogeneity that can obtain tested lens with cavity interference testing result using having one's bosom filled with.The advantageous effect of this method is can not only to measure the material homogeneity of plate glass, can also measure the material homogeneity of spherical lens.
Description
Technical field
The invention belongs to optical interferometry technical fields, are related to a kind of optical spherical lens material homogeneity detection side
Method.
Background technology
High-precision optical imaging lens are usually made of multiple optical lenses, in order to reach ideal image quality, it is desirable that
The transmission wavefront of optical lens reaches diffraction limit, and the material homogeneity of optical glass is optical lens transmission wavefront error
One of main source.In addition, when detecting aspherical mirror shape using zero compensation mirror method, in order to obtain High-precision aspheric face shape
Testing result needs to correct the various error sources of zero-bit compensating glass, wherein it is non-to compensating glass just to include compensating glass material homogeneity
The influence of spheric wave front.In above application field, optical glass material uniformity detection technique is to develop high-precision optical imaging
Camera lens and the indispensable important link of zero compensation mirror.In the prior art, the detection method packet of optical glass material uniformity
Include transmission beam method based on phase-shifting interferometer and post plate method, but both methods can only all detect plate glass material it is uniform
Property, the final material homogeneity of lens can not be assessed after plate glass is processed as spherical lens.
Invention content
In order to solve the problems in the existing technology, the present invention provides a kind of spherical lens material homogeneity detection sides
Method, this method combination phase-shifting interference measuring technology, index-matching fluid and the inspection for posting plate realization spherical lens material homogeneity
It surveys.
The technical proposal for solving the technical problem of the invention is as follows：
The detection method of spherical lens material homogeneity, this method comprises the following steps：
Step 1：Spherical lens material homogeneity detection device is built, including interferometer, transmission plane etalon, is posted
Plate and plane of reflection etalon, all element coaxials are placed；Tested lens are placed in the container for posting plate composition, in light path
Index-matching fluid, refraction of the index-matching fluid under interferometer work wavelength are uniformly adhered in posting for passing through on the inside of plate
Rate is approached with the tested index of refraction in lens, and it is identical with tested lens material to post plate, appearance mirror polish；
Step 2：Transmission plane etalon is installed on interferometer；Adjustment, which posts plate inclination, makes its reflected light be in interference
Other than instrument visual field；Plane of reflection etalon is installed and adjusting inclination makes its interference fringe formed with transmission plane etalon be zero
Striped, and adjust the object plane that interferometer focal position makes plane of reflection etalon become interferometer imaging mirror；
Step 3：In having one's bosom filled with comprising tested lens, transmission plane etalon is formed with plane of reflection etalon
Interference cavity, interference testing result CFCFor：
CFC=-STF-SRF+HPlate1+HOil+HLens+HPlate2+k1
Wherein, STFAnd SRFThe respectively face shape error of transmission plane etalon and plane of reflection etalon, HPlate1、
HPlate2、HOilAnd HLensRespectively first posts plate, second posts the uniformity of plate, index-matching fluid and tested lens, k1For
Constant term；
Step 4：Index-matching fluid is stirred, liquid to be matched measures having one's bosom filled with as a result, repeating the process again after stablizing again
Repeatedly, and by multiple measurement results it is averaged, obtains the average interference testing result having one's bosom filled with：
Wherein, index-matching fluid uniformity is eliminated after multigroup repeated measuring results are average；
Step 5：Tested lens are taken out, are blanked index-matching fluid, transmission plane etalon and plane of reflection etalon
Form cavity, interference testing result CECFor：
CEC=-STF-SRF+HPlate1+HPlate2+k2
Wherein, k2For constant term；The material homogeneity H of tested lensLensBy average result of interference of having one's bosom filled in step 4
With the testing result C of step 5 hollow cavityECSubtract each other to obtain：
The beneficial effects of the invention are as follows：The present invention propose a kind of combination phase-shifting interference measuring technology, index-matching fluid and
Post the method that plate realizes the detection of spherical lens material homogeneity.Pass through index-matching fluid and of the tested index of refraction in lens
Match, tested lens is allow to be detected using interferometer plane wave front.Meanwhile it by stirring index-matching fluid, then surveys repeatedly
The interference testing result that amount is had one's bosom filled under state eliminates influence of the index-matching fluid uniformity to testing result.Finally, using full
Chamber and cavity interference testing result subtract each other the material homogeneity that can obtain tested lens.The advantageous effect of this method is not only may be used
To measure the material homogeneity of plate glass, the material homogeneity of spherical lens can also be measured.
Description of the drawings
The detection method installation drawing of Fig. 1 spherical lens material homogeneities of the present invention.
In figure：1st, interferometer, 2, transmission plane etalon, 3, index-matching fluid, 4, second posts plate, and 5, tested saturating
Mirror, 6, plane of reflection etalon and 7, first post plate.
Specific embodiment
The present invention is described in further details with reference to the accompanying drawings and examples.
Fig. 1 is spherical lens material homogeneity detection method schematic diagram, with reference to phase-shifting interference measuring technology, index matching
Liquid realizes that the detection of spherical lens material homogeneity includes the following steps with plate is posted：
Step 1：Spherical lens material homogeneity detection device is built, including interferometer 1, transmission plane etalon (TF)
2nd, index-matching fluid 3, post plate 4, tested lens 5 and plane of reflection etalon (RF) 6, all element coaxials are placed.It will be by
It examines lens 5 to immerse in index-matching fluid 3, and the container for being posted plate 4 with two pieces and being formed index-matching fluid 3, wherein, refractive index
Refractive index needs of the matching fluid 3 under 1 operation wavelength of interferometer are sufficiently close to being detected 5 refractive index of lens, post plate 4 with being detected
5 material identical of lens, outer surface need to be polished to certain surface figure accuracy.
Step 2：First, TF 2 is installed on interferometer 1, adjustment, which tilts, makes its normal parallel with 1 optical axis of interferometer；So
Afterwards, adjustment, which posts the inclination of plate 4, makes its reflected light be in other than 1 visual field of interferometer, i.e., interference item can not be formed with 2 reflected lights of TF
Line；Finally, RF 6 is installed and adjusting inclination makes its interference fringe formed with TF 2 be zero striped, and adjust interferometer 1 and focus on
Position makes object planes of the RF 6 as 1 imaging lens of interferometer.
Step 3：In having one's bosom filled with comprising tested lens 5, TF 2 and RF 6 forms interference cavity, interference detection knot
Fruit CFCIt is determined by following formula：
CFC=-STF-SRF+HPlate1+HOil+HLens+HPlate2+k1
Wherein, STFAnd SRFThe respectively face shape error of TF 2 and RF 6, HPlate1、HPlate2、HOilAnd HLensRespectively second
It posts plate 4, first post the uniformity of plate 7, index-matching fluid 3 and tested lens 5, k1For constant term.
Step 4：Index-matching fluid 3 is stirred, is measured again after it stablizes again having one's bosom filled with as a result, the repetition process is more
It is secondary, and multiple measurement results are averaged, obtain the average interference testing result having one's bosom filled with
Wherein, 3 uniformity of index-matching fluid is eliminated after multigroup repeated measuring results are average.
Step 5：Tested lens 5 are taken out, and are blanked the index-matching fluid 3 posted in plate 4, TF2 and RF 6 forms sky
Chamber, interference testing result CECIt is as follows：
CEC=-STF-SRF+HPlate1+HPlate2+k2
Wherein, k2For constant term.Therefore, it is detected the material homogeneity H of lens 5LensIt can be by average interference of having one's bosom filled in step 4
As a resultWith the testing result C of step 5 hollow cavityECSubtract each other to obtain：
Claims (1)
1. the detection method of spherical lens material homogeneity first, builds spherical lens material homogeneity detection device, including dry
Interferometer, transmission plane etalon post plate and plane of reflection etalon, and all element coaxials are placed；Tested lens are placed on
In the container for posting plate composition, uniformly adhere to index-matching fluid on the inside of plate in posting for light path process, which is characterized in that the party
Method includes the following steps：
Step 1：Refractive index of the index-matching fluid under interferometer work wavelength is approached with the tested index of refraction in lens, patch
It is identical with tested lens material to put plate, appearance mirror polish；
Step 2：Transmission plane etalon is installed on interferometer；Adjustment, which posts plate inclination, makes its reflected light be regarded in interferometer
Other than；Plane of reflection etalon is installed and adjusting inclination makes its interference fringe formed with transmission plane etalon be zero
Line, and adjust the object plane that interferometer focal position makes plane of reflection etalon become interferometer imaging mirror；
Step 3：In having one's bosom filled with comprising tested lens, transmission plane etalon is formed with plane of reflection etalon interferes
Chamber, interference testing result CFCFor：
CFC=-STF-SRF+HPlate1+HOil+HLens+HPlate2+k1
Wherein, STFAnd SRFThe respectively face shape error of transmission plane etalon and plane of reflection etalon, HPlate1、HPlate2、HOil
And HLensRespectively first posts plate, second posts the uniformity of plate, index-matching fluid and tested lens, k1For constant term；
Step 4：Index-matching fluid is stirred, liquid to be matched measures again having one's bosom filled with after stablizing again as a result, the repetition process is more
It is secondary, and multiple measurement results are averaged, obtain the average interference testing result having one's bosom filled with
Wherein, index-matching fluid uniformity is eliminated after multigroup repeated measuring results are average；
Step 5：Tested lens are taken out, empty the index-matching fluid posted in plate, transmission plane etalon and plane of reflection mark
Quasi- tool forms cavity, interference testing result CECFor：
CEC=-STF-SRF+HPlate1+HPlate2+k2
Wherein, k2For constant term；The material homogeneity H of tested lensLensBy average result of interference of having one's bosom filled in step 4And step
The testing result C of rapid five hollow cavityECSubtract each other to obtain：
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| CN108917662B (en) * | 2018-05-18 | 2020-05-19 | 上海理工大学 | Optimization method for reference surface flatness inspection |
| CN109406107B (en) * | 2018-10-19 | 2020-02-14 | 中国兵器工业标准化研究所 | Control method for sample surface shape error of infrared optical material uniformity test |
| CN110687074A (en) * | 2019-10-28 | 2020-01-14 | 华中科技大学 | Wavefront sensor-based optical part uniformity detection device and method |
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| CN101251497A (en) * | 2008-03-19 | 2008-08-27 | 中国科学院上海光学精密机械研究所 | Apparatus and method for testing optical glass homogeneity |
| CN101587012A (en) * | 2009-06-30 | 2009-11-25 | 成都光明光电股份有限公司 | Optical glass optical homogeneity test device and test method |
| CN101603921A (en) * | 2009-07-03 | 2009-12-16 | 清华大学深圳研究生院 | A kind of detection system of refractive index dispersion properties and detection method thereof |
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| JP2678464B2 (en) * | 1988-06-27 | 1997-11-17 | 旭光学工業株式会社 | Refractive index measurement method |
| JP3913407B2 (en) * | 1999-07-09 | 2007-05-09 | 株式会社リコー | Refractive index distribution measuring apparatus and method |
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| CN101251497A (en) * | 2008-03-19 | 2008-08-27 | 中国科学院上海光学精密机械研究所 | Apparatus and method for testing optical glass homogeneity |
| CN101587012A (en) * | 2009-06-30 | 2009-11-25 | 成都光明光电股份有限公司 | Optical glass optical homogeneity test device and test method |
| CN101603921A (en) * | 2009-07-03 | 2009-12-16 | 清华大学深圳研究生院 | A kind of detection system of refractive index dispersion properties and detection method thereof |
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