CN1079047A - The high precisely measuring large part inside and outside diameter by laser device and method - Google Patents

The high precisely measuring large part inside and outside diameter by laser device and method Download PDF

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Publication number
CN1079047A
CN1079047A CN 92103740 CN92103740A CN1079047A CN 1079047 A CN1079047 A CN 1079047A CN 92103740 CN92103740 CN 92103740 CN 92103740 A CN92103740 A CN 92103740A CN 1079047 A CN1079047 A CN 1079047A
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China
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measuring head
measuring
laser
unit
locating piece
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CN 92103740
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CN1028383C (en
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冯其波
梁晋文
田芊
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Tsinghua University
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Tsinghua University
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Abstract

The present invention relates to large part inside and outside diameter measuring method and device.Its device comprises laser instrument; The long unit of survey that constitutes by laser length meter and guide rail; By single-mode fiber and be separately fixed at its two ends fiber coupler, have laser alignment, autocollimation unit that the optical fiber outgoing head of light-receiving target constitutes; The measuring head that constitutes by a photelectric receiver that is coated with the pentagonal prism of semi-transparent semi-reflecting film and is fixed together with it; This measuring head is by parts such as guide supporting and the aiming of forming with magnetic locating piece that is adsorbed on measured workpiece diameter both sides and photelectric receiver fixed thereon, positioning units.The present invention can measure in real time to large part inside and outside diameter and length, the precision height, and measurement range is big.

Description

The high precisely measuring large part inside and outside diameter by laser device and method
The invention belongs to the accurate laser measurement technical field, particularly to large part inside and outside diameter measuring method and device.
The high-acruracy survey of large part inside and outside diameter is generally to propose to be badly in need of again the common technology problems of measurement that will solve in the many major technologies and equipment manufacturings of large and medium-sized enterprise, also is all to fail the measurement difficult problem of fine solution both at home and abroad.
The method of measuring at present large part inside and outside diameter has following a few class substantially: 1, traditional mechanical means or some indirect measurement methods, and as large-scale milscale, π chi, bow supreme people's court.The measuring accuracy of these methods is very low, can only measure the part of 7,8 class precisions, is in the state that can't check for the high accessory size of many accuracy requirements; 2, the machining precision to large part inside and outside diameter is to guarantee by the precision of making regular check on lathe, so the dimensional accuracy of large-scale workpiece depends on the precision of lathe itself; 3, adopt laser measuring technique.A kind of laser diameter measurement apparatus and method of prior art as shown in Figure 1.The laser beam that laser instrument (1) sends is via being separately fixed at two mechanical arms (2), two groups of prism squares (3) among (2 '), (3 '), five angle mirrors (4), (4 ') back forms the measuring beam A of pair of parallel, B, raising clothes motors (5) by direct current moves by ring like steel wire (6) drive two mechanical arms, gradually near workpiece for measurement (7), when the energy of every bundle light 50% is blocked by workpiece, just think and aimed at workpiece, distance between two measuring beams is the diameter of workpiece, directly measure this distance by magnetic railings ruler G and just can measure the measured piece diameter, the measurement range of this method is 20mm-280mm, measuring accuracy is ± 10 μ m, the major defect of the method is: owing to there are two mechanical arms on the structure, measurement range is restricted, in-site measurement is extremely inconvenient, and the foozle of laser drift and pentagonal prism makes its measuring accuracy lower.
The present invention's purpose is to improve above-mentioned laser measurement method and device.Overcome its weak point, propose a kind of new laser measurement method and device, make it have the raising measuring accuracy, enlarge measurement range and measurement function, the simplified measurement device also can be realized advantages such as on-the-spot on-position measure simultaneously.
The present invention proposes a kind of high precisely measuring large part inside and outside diameter by laser device, and this installs by laser instrument, aiming, positioning unit, and the long unit of survey that is made of length meter and guide rail etc. partly constitutes, and it is characterized in that also comprising; Said aiming, positioning unit are made up of single measuring head, two magnetic locating pieces and the optoelectronic receiver that is attached thereto; Said measuring head is made up of a photelectric receiver that is coated with the pentagonal prism of semi-transparent semi-reflecting film and is fixed together with it, and this measuring head is by said guide supporting and back and forth movement thereon; Said two magnetic locating pieces are adsorbed on workpiece for measurement diameter both sides respectively, and said laser alignment, autocollimation unit are equipped with fiber coupler, optical fiber outgoing head respectively by single-mode fiber and at the optical fiber two ends and the light-receiving target that is fixed on the outgoing head constitutes.
Measuring method of the present invention is summarized as follows: entered single-mode fiber and penetrated by optical fiber outgoing head through coupling mechanism by the light of laser emitting, be divided into two parts behind the pentagonal prism of this light in single measuring head, the optoelectronic receiver that direct directive of a part and pentagonal prism are fixed together, to be used to regulate the position of measuring head, measuring head position with respect to collimated ray in measuring process is remained unchanged, thereby make the precision of guide rail and position not have influence measurement result; Another part light becomes an angle of 90 degrees with incident ray after this pentagonal prism reflection, measuring head makes this reflection ray photelectric receiver on first and second the magnetic locating piece of directive successively along guide rail movement, adjusting two positions of magnetic locating piece on workpiece respectively makes the light that incides locating piece overlap with its reflection ray, to guarantee that two locating pieces are in correct measuring position, incident ray is guaranteed by the light-receiving target in the laser auto-collimation unit with overlapping of its reflection ray.After above-mentioned adjustment work is finished, just can begin to measure, measuring head aims at the photelectric receiver on first magnetic locating piece earlier during measurement, surveying long unit begins to measure, measuring head moves up to the photelectric receiver that aims on second magnetic locating piece along guide rail, and the long unit of this survey stops to measure, and can obtain the distance between two photelectric receivers, because the distance of measured workpiece edge and photelectric receiver is certain, then can accurately obtain the measured workpiece diameter dimension.
In the above-mentioned measurement scheme that the present invention proposes, the adjusting of measuring head and collimated ray, measuring head moving on guide rail, collimated light can be adopted artificial adjustment mode to the aiming of photelectric receiver etc., also the robotization mode be can adopt, stepper motor and computer control promptly are equipped with.
The invention has the advantages that: one, adopt laser alignment and autocollimator parts, realization is to the measurement point aiming and locate two kinds of functions, and the single-mode fiber alignment method has reduced the influence of laser drift, has improved pointing accuracy; Its two, with magnetic locating piece location, replaced mechanical long-armed location to the large part inside and outside diameter measurement point, increased the measurement range of diameter greatly, enlarge measurement function, can measure internal diameter, external diameter, length etc. simultaneously, and to not having specific (special) requirements in the measuring position of measured piece; They are three years old, adopt single pentagonal prism gauge head to aim at two measurement points successively, make the foozle of pentagonal prism only produce the secondary measuring error (two pentagonal prisms aim at simultaneously two measurement points then the inconsistency error of the manufacturing of two pentagonal prisms then produce the one-shot measurement error), improved aiming bearing accuracy and measuring accuracy greatly; Its four, in measuring head, adopted compensation method, not only make the precision of guide rail and the position measurement result is not had influence, float influence but also significantly reduced the laser angle to measuring accuracy; Its five, replace directing pointing the edge of work with light aiming photelectric receiver, improved the sensitivity of aiming, reduced the influence of workpiece surface quality to aiming.
Brief Description Of Drawings:
Fig. 1 is the laser measuring device for measuring synoptic diagram of prior art
Fig. 2 is a kind of embodiment device synoptic diagram of the present invention
The invention provides a kind of embodiment of high precisely measuring large part inside and outside diameter by laser device, its general structure synoptic diagram as shown in Figure 2, entire measuring device is made up of laser instrument (1), single-mode fiber laser alignment and autocollimation unit (8), location, aiming unit (9), laser length measurement unit (10) and computer controlled automatic and data processing unit parts such as (11).Single-mode fiber laser alignment and autocollimation unit comprise: fiber coupler (12), single-mode fiber (13), the one end links to each other with fiber coupler, receive the light beam that laser instrument sends, the other end is connected with optical fiber outgoing head (14), the outgoing head is fixed on the five times regualting frame, and this outgoing end surface is fixed a light-receiving target (15); Aiming, positioning unit is by a measuring head (16), two magnetic locating pieces (18), (18 ') and four-quadrant photocell (19) fixed thereon, (19 ') are formed, measuring head drives back and forth movement on guide rail by the computer controlled automatic unit by stepper motor (figure part omitted), thereby two four-quadrant photocells are carried out automatic aiming, measuring head (16) is made up of a pentagonal prism (21) and the four-quadrant photocell (22) that has compensating glass (20) that also can carry out trim locations that is fixed together, the part of laser beam is injected four-quadrant photocell by pentagonal prism and compensating glass, the computer controlled automatic unit drives the position that micro-adjusting mechanism is regulated measuring head automatically by stepper motor, its position with respect to collimated ray in measuring process is remained unchanged, another part light is adsorbed on four-quadrant photocell on the magnetic locating piece of measured workpiece diameter both sides through become an angle of 90 degrees directive after the pentagonal prism reflection with incident ray, adjust that two positions of magnetic locating piece on workpiece (7) make the light that incides on the four-quadrant and by reflecting coincidence on it, this moment, reflection ray dropped on the pinwheel of the light-receiving target on the optical fiber outgoing head.Laser length measurement unit (10) is by two-frequency laser, part such as linear rolling track (17), angle coupling prism (23) constitutes, adjust two-frequency laser, its emergent ray is overlapped or parallel with collimated ray, direction of measurement is just consistent with the direction of measured diameter and perpendicular to two sighted directions like this.Measuring head aims at two four-quadrant photocell centers on the magnetic locating piece successively, and the dual-frequency laser length measurement system accurately measures two distances between the four-quadrant photocell center, and computing machine can directly obtain measured workpiece diameter D by calculating.
When adjustment two magnetic locating pieces make it to be positioned at correct measuring position, just can measure automatically, when measuring automatically, computing machine is in correct measuring position by the step motor control measuring head, make first four-quadrant photocell of light automatic aiming of measuring head outgoing then, and measure the deviation value of light with respect to the four-quadrant photocell center, the laser length measurement unit began to measure to drive until stepper motor and stopped when measuring head moves to second four-quadrant photocell center of aiming this moment, measure the deviation value of light equally with respect to the four-quadrant center, automatically calculate measured diameter numerical value by data processing, dual-frequency laser length measurement technology and computer controlled automatic and data processing all adopt existing mature technology, do not do detailed description at this.
The relative accuracy of this measurement device is better than 5 * 10, and looking concrete its relative accuracy of metering system is 2 * 10~5 * 10; 500 millimeters-5 meters of measurement ranges.
The present invention also can have different embodiments, for example, and 1, adopt with other photoelectric device (as CCD, PSD etc.) replacement four-quadrant photocell and may obtain same effect.2, be placed on the magnetic locating piece with catoptron, the edge of work of directing pointing can reach effect preferably equally, but measurement range, range of application are subjected to certain limitation, and measuring accuracy decreases.3, survey long means (as grating, magnetic grid, inductosyn etc.) with other, be equipped with location of the present invention and point technique and can reach certain effect within the specific limits, but its measurement range is less, measuring accuracy reduces.4, adopt artificial adjustment and measurement can realize high-acruracy survey equally, just efficiency of measurement reduces.5, with other laser collimator or directly replace the single-mode fiber laser collimator also may obtain effect preferably with laser instrument, but precision can decrease.

Claims (6)

1, a kind of laser measurement large part inside and outside diameter device, by laser instrument, aiming, positioning unit, long unit of survey that is made of length meter and guide rail etc. partly constitutes, it is characterized in that also comprising laser alignment, autocollimation unit, said aiming, positioning unit are made up of single measuring head, two magnetic locating pieces and the photelectric receiver that is attached thereto; Said measuring head is made up of a photelectric receiver that is coated with the pentagonal prism of semi-transparent semi-reflecting film and is fixed together with it, and this measuring head is by said guide supporting and back and forth movement thereon; Said two magnetic locating pieces are adsorbed on workpiece for measurement diameter both sides respectively.
2, device as claimed in claim 1, the laser alignment, autocollimation unit that it is characterized in that institute's hand are equipped with fiber coupler, optical fiber outgoing head respectively by single-mode fiber and at the optical fiber two ends and the light-receiving target that is fixed on the outgoing head constitutes; Said photelectric receiver adopts four-quadrant photocell; Said magnetic locating piece is a flute profile; Have compensating glass on the said pentagonal prism; Said length meter adopts dual-frequency laser length measuring instrument.
3, device as claimed in claim 1 is characterized in that the photelectric receiver on the said magnetic locating piece replaces with catoptron.
4, device as claimed in claim 1, it is characterized in that also comprising computer controlled automatic and data processing unit, said measuring head, guide rail all are equipped with stepper motor, and automatic control unit control step motor realizes that adjustment, measuring head to the measuring head position is to the aiming and the back and forth movement of measuring head on guide rail at four-quadrant photocell center on the magnetic locating piece.
5, device as claimed in claim 1 is characterized in that said guide rail adopts linear rolling track.
6, a kind of measuring method of device according to claim 1, it is characterized in that comprising the steps: being divided into two parts behind the pentagonal prism of light in single measuring head by laser alignment, the outgoing of autocollimation unit, the optoelectronic receiver that direct directive of a part and pentagonal prism are fixed together, to be used to regulate the position of measuring head, measuring head position with respect to collimated ray in measuring process is remained unchanged, thereby make the precision of guide rail and position not have influence measurement result; Another part light becomes an angle of 90 degrees with incident ray after this pentagonal prism reflection, measuring head makes this reflection ray photelectric receiver on first and second the magnetic locating piece of directive successively along guide rail movement, adjusting two positions of magnetic locating piece on workpiece respectively makes the light that incides locating piece overlap with its reflection ray, to guarantee that two locating pieces are in correct measuring position, incident ray is guaranteed by the light-receiving target in the laser auto-collimation unit with overlapping of its reflection ray.After above-mentioned adjustment work is finished, just can begin to measure, measuring head aims at the photelectric receiver on first magnetic locating piece earlier, surveying long unit begins to measure, measuring head moves up to the photelectric receiver that aims on second magnetic locating piece along guide rail, the long unit of this survey stops to measure, and can obtain the distance between two photelectric receivers, calculates the measured workpiece diameter dimension again.
CN 92103740 1992-05-21 1992-05-21 Apparatus and method for high precisely measuring large part inside and outside diameter by laser Expired - Fee Related CN1028383C (en)

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CN 92103740 CN1028383C (en) 1992-05-21 1992-05-21 Apparatus and method for high precisely measuring large part inside and outside diameter by laser

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CN 92103740 CN1028383C (en) 1992-05-21 1992-05-21 Apparatus and method for high precisely measuring large part inside and outside diameter by laser

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CN1028383C CN1028383C (en) 1995-05-10

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007073650A1 (en) * 2005-12-27 2007-07-05 Bohai Shipbuilding Industry Co., Ltd. A measuring system for inner diameter of axle hole
CN1329711C (en) * 2005-09-14 2007-08-01 哈尔滨工业大学 Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling
CN1330927C (en) * 2005-10-26 2007-08-08 武汉理工大学 Optical projection measurer for external diameter of large wheel diameter
CN100464154C (en) * 2006-07-07 2009-02-25 中国科学院长春光学精密机械与物理研究所 Photo-electric type major diameter measuring apparatus
CN101120231B (en) * 2005-02-22 2010-09-29 信越化学工业株式会社 Method for measuring non-circularity at core portion of optical fiber parent material
CN103212840A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Medical bracket machining method
CN103424079A (en) * 2012-05-14 2013-12-04 中国测试技术研究院力学研究所 Large workpiece diameter laser measuring system and method
CN104596432A (en) * 2014-12-10 2015-05-06 安东检测有限公司 Petroleum drill pipe joint detection device and method
CN105973153A (en) * 2016-06-16 2016-09-28 浙江万克自动化工程有限公司 Cylindrical battery testing platform
CN106289084A (en) * 2016-11-02 2017-01-04 湖南美蓓达科技股份有限公司 A kind of high-precision bearing inner diameter measuring device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101120231B (en) * 2005-02-22 2010-09-29 信越化学工业株式会社 Method for measuring non-circularity at core portion of optical fiber parent material
CN1329711C (en) * 2005-09-14 2007-08-01 哈尔滨工业大学 Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling
CN1330927C (en) * 2005-10-26 2007-08-08 武汉理工大学 Optical projection measurer for external diameter of large wheel diameter
WO2007073650A1 (en) * 2005-12-27 2007-07-05 Bohai Shipbuilding Industry Co., Ltd. A measuring system for inner diameter of axle hole
CN100464154C (en) * 2006-07-07 2009-02-25 中国科学院长春光学精密机械与物理研究所 Photo-electric type major diameter measuring apparatus
CN103212840A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Medical bracket machining method
CN103424079A (en) * 2012-05-14 2013-12-04 中国测试技术研究院力学研究所 Large workpiece diameter laser measuring system and method
CN104596432A (en) * 2014-12-10 2015-05-06 安东检测有限公司 Petroleum drill pipe joint detection device and method
CN104596432B (en) * 2014-12-10 2018-05-04 安东检测有限公司 Joint of petroleum drill rod detection device and method
CN105973153A (en) * 2016-06-16 2016-09-28 浙江万克自动化工程有限公司 Cylindrical battery testing platform
CN105973153B (en) * 2016-06-16 2018-08-17 浙江万克新能源科技有限公司 A kind of cylindrical cell detection platform
CN106289084A (en) * 2016-11-02 2017-01-04 湖南美蓓达科技股份有限公司 A kind of high-precision bearing inner diameter measuring device

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