CN107881471A - A kind of high efficiency nano material vacuum coating machine - Google Patents
A kind of high efficiency nano material vacuum coating machine Download PDFInfo
- Publication number
- CN107881471A CN107881471A CN201711195246.9A CN201711195246A CN107881471A CN 107881471 A CN107881471 A CN 107881471A CN 201711195246 A CN201711195246 A CN 201711195246A CN 107881471 A CN107881471 A CN 107881471A
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- Prior art keywords
- main pump
- pump
- evaporation
- fuselage
- power supply
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 29
- 238000001704 evaporation Methods 0.000 claims abstract description 67
- 230000008020 evaporation Effects 0.000 claims abstract description 62
- 239000011521 glass Substances 0.000 claims abstract description 28
- 229910001220 stainless steel Inorganic materials 0.000 claims description 17
- 239000010935 stainless steel Substances 0.000 claims description 17
- 235000004443 Ricinus communis Nutrition 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 210000000481 breast Anatomy 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of high efficiency nano material vacuum coating machine, including main pump, exhaust gear and fuselage, the lower end of the fuselage is movably installed with universal wheel, and the leading exterior surface middle position of fuselage is provided with guidance panel, the outer surface of the guidance panel is installed with main pump switch, the outer surface of the guidance panel is provided with auxiliary switch pump close to the side that main pump switchs, and the outer surface of guidance panel is provided with scram button close to the opposite side that main pump switchs, the main pump is fixedly mounted on the upper end outer surface of fuselage, the upper end outer surface of the main pump is installed with glass bell jar, and the lower end outer surface of main pump is installed with auxiliary pump.The high efficiency nano material vacuum coating machine, by the addition for the evaporation electrode for evaporating power supply, it is possible to achieve while evaporation and multilayer evaporation, solve the problems, such as that existing low production efficiency, product component uniformity are bad, exhaust apparatus is be easily moved simultaneously, facilitates human users.
Description
Technical field
The present invention relates to machinery equipment field, specially a kind of high efficiency nano material vacuum coating machine.
Background technology
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include many kinds such as vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxies, PLD pulsed laser depositions.Main thought is divided into
Two kinds of evaporation and sputtering, evaporation coating are usually to heat target to make surface component be evaporated with atomic group or ionic species.
And substrate surface is deposited in, film is formed by film forming procedure.For sputtering class plated film, can simply be interpreted as utilizing electronics
Or superlaser bombardment target, and make surface component be sputtered out with atomic group or ionic species, and it is eventually deposited at base
Piece surface, film forming procedure is undergone, ultimately forms film, traditional evaporation coating component uniformity is not to be easy to ensure, specifically
The factor that can regulate and control has many, for example the Lattice Matching degree of substrate material and target, substrate surface temperature, evaporation power with
Speed, vacuum etc., but by principle is limited, for non-one-component plated film, the component uniformity of evaporation coating is bad, from
And the quality and production efficiency of coated product are affected.
The content of the invention
（One）The technical problem of solution
In view of the shortcomings of the prior art, the invention provides a kind of high efficiency nano material vacuum coating machine, solve existing
The problem of low production efficiency, bad product component uniformity.
（Two）Technical scheme
To realize object above, the present invention is achieved by the following technical programs：A kind of high efficiency nano material vacuum plated film
Machine, including main pump, exhaust gear and fuselage, the lower end of the fuselage are movably installed with universal wheel, and the leading exterior surface of fuselage
Middle position is provided with guidance panel, and the outer surface of the guidance panel is installed with main pump switch, the guidance panel
Outer surface the side that main pump switchs is provided with auxiliary switch pump, and the outer surface of guidance panel switched close to main pump it is another
Side is provided with scram button, and the main pump is fixedly mounted on the upper end outer surface of fuselage, and the upper end outer surface of the main pump is consolidated
Dingan County is equipped with glass bell jar, and the lower end outer surface of main pump is installed with auxiliary pump, and a side external surface of the main pump is fixed
No.1 corrugated stainless steel tubing is installed, and a side external surface of main pump is installed with main pump vacuum above glass bell jar
Table, three-way valve is provided with below the No.1 corrugated stainless steel tubing, the lower end outer surface of the glass bell jar is close to main pump
Side be installed with one-way cock, and the bosom opening position of glass bell jar is provided with substrate, and the glass bell jar leans on
The surrounding of nearly lower end is installed with service hatch, and evaporation electrode, the evaporation electricity are provided between service hatch described in two adjacent groups
Pole is respectively arranged with vacuum meter hole and vacuum by the embedded inside for being symmetrically mounted on glass bell jar, the side of the service hatch
Sealing hole；
The inside of the fuselage is provided with evaporation power supply close to the side of auxiliary pump, and the exhaust gear is arranged on the inside of fuselage
Close to the opposite side of auxiliary pump, the leading exterior surface of the evaporation power supply is provided with evaporation power switch, the evaporation power supply
Leading exterior surface is installed with evaporation power supply handle close to the side of evaporation power switch, and evaporates the leading exterior surface of power supply
Display screen is installed with close to the opposite side of evaporation power switch, the leading exterior surface of the evaporation power supply is close to evaporation power supply
Heat emission hole is provided with below switch, the leading exterior surface of the evaporation power supply is provided with parameter regulation below display screen
Key, base is provided with below the exhaust gear, and the lower end of exhaust gear is provided with castor, the rear end appearance of the fuselage
Face is installed with exhaust outlet close to the opening position of exhaust gear.
Optionally, the quantity of the universal wheel is four groups, and it be arranged in parallel, and the inside of the universal wheel is provided with system
Moving plate.
Optionally, the surrounding of the guidance panel is provided with fixing bolt, and guidance panel passes through fixing bolt and machine
Body is fixedly connected, and opening position of the guidance panel outer surface close to top is installed with equipment nameplate, the switch pump, auxiliary
Help above switch pump and scram button and be equipped with corresponding indicator lamp.
Optionally, a side external surface of the auxiliary pump is installed with auxiliary pump vacuum meter, and the opposite side of auxiliary pump
Outer surface is provided with No. two corrugated stainless steel tubings, the port of export of No. two corrugated stainless steel tubings and No.1 corrugated stainless steel tubing with
Three-way valve connects.
Optionally, the lower end of the exhaust outlet is provided with blast pipe, and exhaust outlet is connected by blast pipe with exhaust gear
Connect.
Optionally, the outer surface of the evaporation power supply is provided with guard shield, and evaporates power supply and installed by guard shield
In the inside of fuselage, the evaporation electrode is electrically connected with evaporation power supply.
Optionally, the quantity of the castor is four groups, and the evaporation power supply is movably connected with the base by castor.
Optionally, the center line of the main pump and auxiliary pump is in same level, and main pump and auxiliary pump, main pump and glass
The junction of bell jar is provided with intact sealing.
（Three）Beneficial effect
The invention provides a kind of high efficiency nano material vacuum coating machine, possesses following beneficial effect：
（1）, the high efficiency nano material vacuum coating machine, by setting evaporation power supply and evaporation electrode addition, pass through electricity
Resistive mode of heating makes target be rapidly heated heating, effectively accelerates the evaporation rate of target, and can realize while steam
Plating and multilayer evaporation, greatly improve the efficiency of plated film, and the basic research particularly suitable for small substrate size is developed.
（2）, the high efficiency nano material vacuum coating machine, operated simultaneously with auxiliary pump by the main pump of setting, on the one hand
It can make to keep a higher vacuum inside glass bell jar, ensure the quality of plated film, on the other hand can avoid main pump
Shut down, effectively extend the service life of equipment, and reduce the probability of equipment failure, after facilitating worker
The maintenance work of phase.
（3）, the high efficiency nano material vacuum coating machine, by setting glass bell jar, operating personnel can clearly see
Plated film situation inside to bell jar, facilitate personnel to control whole coating process, effectively raise the operation for changing vacuum coating equipment
Performance.
（4）, the high efficiency nano material vacuum coating machine, pass through the design using installation castor to exhaust gear, it is convenient
The movement of exhaust gear, is fixedly mounted on fuselage interior, the design of castor facilitates personnel compared to traditional exhaust gear
Demolition and maintenance and maintenance to exhaust gear.
Brief description of the drawings
Fig. 1 is a kind of overall structure front view of high efficiency nano material vacuum coating machine of the present invention；
Fig. 2 is a kind of side view of high efficiency nano material vacuum coating machine of the present invention；
Fig. 3 is a kind of evaporation power supply architecture schematic diagram of high efficiency nano material vacuum coating machine of the present invention；
Fig. 4 is a kind of internal view of high efficiency nano material vacuum coating machine glass bell jar of the present invention.
In figure：1st, universal wheel；2nd, guidance panel；3rd, auxiliary pump vacuum meter；4th, one-way cock；5th, glass bell jar；6th, No.1
Corrugated stainless steel tubing；7th, three-way valve；8th, main pump switchs；9th, switch pump is aided in；10th, scram button；11st, auxiliary pump；12nd, it is main
Pump；13rd, power supply is evaporated；14th, service hatch；15th, evaporation electrode；16th, No. two corrugated stainless steel tubings；17th, exhaust outlet；18th, air exhauster
Structure；19th, castor；20th, base；21st, substrate；22nd, vacuum sealing hole；23rd, vacuum meter hole；24th, power switch is evaporated；25th, evaporate
Power supply handle；26th, heat emission hole；27th, display screen；28th, parameter regulation key；29th, main pump vacuum meter；30th, fuselage.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
Fig. 1-4 are referred to, the present invention provides a kind of technical scheme：A kind of high efficiency nano material vacuum coating machine, including
Main pump 12, exhaust gear 18 and fuselage 30, the lower end of fuselage 30 is movably installed with universal wheel 1, and the leading exterior surface of fuselage 30
Middle position is provided with guidance panel 2, and the outer surface of guidance panel 2 is installed with main pump switch 8, guidance panel 2 it is outer
Surface is provided with auxiliary switch pump 9 close to the side of main pump switch 8, and the outer surface of guidance panel 2 is close to the another of main pump switch 8
Side is provided with scram button 10, and main pump 12 is fixedly mounted on the upper end outer surface of fuselage 30, and the upper end outer surface of main pump 12 is consolidated
Dingan County is equipped with glass bell jar 5, and the lower end outer surface of main pump 12 is installed with auxiliary pump 11, and a side external surface of main pump 12 is consolidated
Dingan County is equipped with No.1 corrugated stainless steel tubing 6, and a side external surface of main pump 12 is installed with master close to the top of glass bell jar 5
Pump vacuum meter 29, the lower section of No.1 corrugated stainless steel tubing 6 are provided with three-way valve 7, and the lower end outer surface of glass bell jar 5 is close to main
The side of pump 12 is installed with one-way cock 4, and the bosom opening position of glass bell jar 5 is provided with substrate 21, glass clock
5 surrounding close to lower end of cover is installed with service hatch 14, and evaporation electrode 15 is provided between two adjacent groups service hatch 14, evaporates
Electrode 15 is respectively arranged with vacuum meter hole 23 by the embedded inside for being symmetrically mounted on glass bell jar 5, the side of service hatch 14
With vacuum sealing hole 22, the inside of fuselage 30 is provided with evaporation power supply 13 close to the side of auxiliary pump 11, and exhaust gear 18 is set
Opposite side in the inside of fuselage 30 close to auxiliary pump 11, the leading exterior surface of evaporation power supply 13 are provided with evaporation power switch
24, the leading exterior surface for evaporating power supply 13 is installed with evaporation power supply handle 25 close to the side of evaporation power switch 24, and
The leading exterior surface for evaporating power supply 13 is installed with display screen 27 close to the opposite side of evaporation power switch 24, evaporates power supply 13
Leading exterior surface the lower section of evaporation power switch 24 is provided with heat emission hole 26, the leading exterior surface for evaporating power supply 13 is close
The lower section of display screen 27 is provided with parameter regulation key 28, and the lower section of exhaust gear 18 is provided with base 20, and exhaust gear 18
Lower end is provided with castor 19, and the back end outer surface of fuselage 30 is installed with exhaust outlet 17 close to the opening position of exhaust gear 18,
The quantity of universal wheel 1 is four groups, and it be arranged in parallel, and the inside of universal wheel 1 is provided with brake(-holder) block, the surrounding of guidance panel 2
Fixing bolt is provided with, and guidance panel 2 is fixedly connected by fixing bolt with fuselage 30, the outer surface of guidance panel 2 is close
The opening position of top is installed with equipment nameplate, the top of switch pump 8, auxiliary switch pump 9 and scram button 10 be equipped with
Corresponding to indicator lamp, a side external surface of auxiliary pump 11 is installed with auxiliary pump vacuum meter 3, and the opposite side of auxiliary pump 11
Outer surface is provided with No. two corrugated stainless steel tubings 16, the port of export of No. two corrugated stainless steel tubings 16 and No.1 corrugated stainless steel tubing 6
It is connected with three-way valve 7, the lower end of exhaust outlet 17 is provided with blast pipe, and exhaust outlet 17 passes through blast pipe and the phase of exhaust gear 18
Connection, the outer surface of evaporation power supply 13 is provided with guard shield, and evaporates power supply 13 and be arranged on fuselage 30 by guard shield
Inside, evaporation electrode 15 are electrically connected with evaporation power supply 13, and the quantity of castor 19 is four groups, evaporation power supply 13 by castor 19 with
Base 20 is flexibly connected, and the center line of main pump 12 and auxiliary pump 11 is in same level, and main pump 12 and auxiliary pump 11, main pump 12
Intact sealing is provided with the junction of glass bell jar 5.
In summary, the high efficiency nano material vacuum coating machine, evaporation power supply 13 and the evaporation electrode 15 of setting are passed through
Addition, target is rapidly heated heating by resistance-type mode of heating, effectively accelerate the evaporation rate of target, and can
To realize evaporation simultaneously and multilayer evaporation, the efficiency of plated film, the basis particularly suitable for small substrate size are greatly improved
Research and development.
The high efficiency nano material vacuum coating machine, operated simultaneously by the main pump 12 and auxiliary pump 11 of setting, on the one hand
The inside of glass bell jar 5 can be made to keep a higher vacuum, the quality of plated film has been ensured, on the other hand can avoid main pump
12 shut down, and effectively extend the service life of equipment, and reduce the probability of equipment failure, facilitate worker
The maintenance work in later stage.
The high efficiency nano material vacuum coating machine, by setting glass bell jar 5, operating personnel can be clearly seen that clock
Plated film situation inside cover, facilitate personnel to control whole coating process, effectively raise the operating characteristics for changing vacuum coating equipment.
The high efficiency nano material vacuum coating machine, it is convenient by the design to exhaust gear 18 using installation castor 19
The movement of exhaust gear 18, is fixedly mounted on inside fuselage 30, the design side of castor 19 compared to traditional exhaust gear 18
Demolition and maintenance and maintenance of the personnel to exhaust gear 18.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.In the absence of more restrictions.By sentence " including one ... the key element limited, it is not excluded that
Other identical element in the process including the key element, method, article or equipment also be present ", the electricity occurred in this article
Device element electrically connects with the main controller and 220V civil powers in the external world, and main controller can be that computer etc. has played the routine of control
Know equipment.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of changes, modification can be carried out to these embodiments, replace without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of high efficiency nano material vacuum coating machine, including main pump（12）, exhaust gear（18）With fuselage（30）, the machine
Body（30）Lower end be movably installed with universal wheel（1）, and fuselage（30）Leading exterior surface middle position be provided with operating surface
Plate（2）, the guidance panel（2）Outer surface be installed with main pump switch（8）, the guidance panel（2）Outer surface lean on
Nearly main pump switch（8）Side be provided with auxiliary switch pump（9）, and guidance panel（2）Outer surface close to main pump switch（8）'s
Opposite side is provided with scram button（10）, the main pump（12）It is fixedly mounted on fuselage（30）Upper end outer surface, the main pump
（12）Upper end outer surface be installed with glass bell jar（5）, and main pump（12）Lower end outer surface be installed with auxiliary pump
（11）, the main pump（12）A side external surface be installed with No.1 corrugated stainless steel tubing（6）, and main pump（12）Side outside
Surface is close to glass bell jar（5）Top be installed with main pump vacuum meter（29）, the No.1 corrugated stainless steel tubing（6）Under
Side is provided with three-way valve（7）, the glass bell jar（5）Lower end outer surface close to main pump（12）Side be installed with list
To valve（4）, and glass bell jar（5）Bosom opening position be provided with substrate（21）, the glass bell jar（5）Close to lower end
Surrounding be installed with service hatch（14）, service hatch described in two adjacent groups（14）Between be provided with evaporation electrode（15）, it is described
Evaporation electrode（15）Glass bell jar is symmetrically mounted on by embedded（5）Inside, the service hatch（14）Side set respectively
It is equipped with vacuum meter hole（23）With vacuum sealing hole（22）；
The fuselage（30）Inside close to auxiliary pump（11）Side be provided with evaporation power supply（13）, the exhaust gear（18）
It is arranged on fuselage（30）Inside close to auxiliary pump（11）Opposite side, the evaporation power supply（13）Leading exterior surface be provided with
Evaporate power switch（24）, the evaporation power supply（13）Leading exterior surface close to evaporation power switch（24）Side fix peace
Equipped with evaporation power supply handle（25）, and evaporate power supply（13）Leading exterior surface close to evaporation power switch（24）Opposite side consolidate
Dingan County is equipped with display screen（27）, the evaporation power supply（13）Leading exterior surface close to evaporation power switch（24）Lower section set
There is heat emission hole（26）, the evaporation power supply（13）Leading exterior surface close to display screen（27）Lower section be provided with parameter regulation key
（28）, the exhaust gear（18）Lower section be provided with base（20）, and exhaust gear（18）Lower end be provided with castor（19）,
The fuselage（30）Back end outer surface close to exhaust gear（18）Opening position be installed with exhaust outlet（17）.
A kind of 2. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The universal wheel
（1）Quantity be four groups, and it be arranged in parallel, the universal wheel（1）Inside be provided with brake(-holder) block.
A kind of 3. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The guidance panel
（2）Surrounding be provided with fixing bolt, and guidance panel（2）Pass through fixing bolt and fuselage（30）It is fixedly connected, the behaviour
Make panel（2）Opening position of the outer surface close to top is installed with equipment nameplate, the switch pump（8）, auxiliary switch pump（9）
With scram button（10）Top be equipped with corresponding indicator lamp.
A kind of 4. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The auxiliary pump
（11）A side external surface be installed with auxiliary pump vacuum meter（3）, and auxiliary pump（11）Another side external surface be provided with two
Number corrugated stainless steel tubing（16）, No. two corrugated stainless steel tubings（16）With No.1 corrugated stainless steel tubing（6）The port of export and three
Port valve door（7）Connection.
A kind of 5. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The exhaust outlet
（17）Lower end be provided with blast pipe, and exhaust outlet（17）Pass through blast pipe and exhaust gear（18）It is connected.
A kind of 6. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The evaporation power supply
（13）Outer surface be provided with guard shield, and evaporate power supply（13）Fuselage is arranged on by guard shield（30）Inside, institute
State evaporation electrode（15）With evaporating power supply（13）It is electrically connected with.
A kind of 7. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The castor（19）
Quantity be four groups, the evaporation power supply（13）Pass through castor（19）With base（20）It is flexibly connected.
A kind of 8. high efficiency nano material vacuum coating machine according to claim 1, it is characterised in that：The main pump（12）
With auxiliary pump（11）Center line in same level, and main pump（12）With auxiliary pump（11）, main pump（12）With glass bell jar（5）
Junction be provided with intact sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711195246.9A CN107881471B (en) | 2017-11-24 | 2017-11-24 | A kind of high efficiency nano material vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711195246.9A CN107881471B (en) | 2017-11-24 | 2017-11-24 | A kind of high efficiency nano material vacuum coating machine |
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| Publication Number | Publication Date |
|---|---|
| CN107881471A true CN107881471A (en) | 2018-04-06 |
| CN107881471B CN107881471B (en) | 2019-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711195246.9A Expired - Fee Related CN107881471B (en) | 2017-11-24 | 2017-11-24 | A kind of high efficiency nano material vacuum coating machine |
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| JP2010053382A (en) * | 2008-08-27 | 2010-03-11 | Kobe Steel Ltd | Continuous film deposition apparatus |
| CN102787299A (en) * | 2012-05-21 | 2012-11-21 | 杭州大和热磁电子有限公司 | Vacuum coating device, vacuum coating control system and control method |
| CN204779779U (en) * | 2015-06-16 | 2015-11-18 | 广东易能纳米科技有限公司 | Nano -material vacuum coating machine |
| CN204898052U (en) * | 2015-09-09 | 2015-12-23 | 王开发 | Vacuum coating machine |
-
2017
- 2017-11-24 CN CN201711195246.9A patent/CN107881471B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002464A (en) * | 1987-04-16 | 1991-03-26 | Lee Hyeong G | Double buffer vacuum system |
| CN201035790Y (en) * | 2007-04-03 | 2008-03-12 | 杭州大华仪器制造有限公司 | Multifunction vacuum experiment instrument |
| JP2010053382A (en) * | 2008-08-27 | 2010-03-11 | Kobe Steel Ltd | Continuous film deposition apparatus |
| CN102787299A (en) * | 2012-05-21 | 2012-11-21 | 杭州大和热磁电子有限公司 | Vacuum coating device, vacuum coating control system and control method |
| CN204779779U (en) * | 2015-06-16 | 2015-11-18 | 广东易能纳米科技有限公司 | Nano -material vacuum coating machine |
| CN204898052U (en) * | 2015-09-09 | 2015-12-23 | 王开发 | Vacuum coating machine |
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