CN201035790Y - Multifunction vacuum experiment instrument - Google Patents
Multifunction vacuum experiment instrument Download PDFInfo
- Publication number
- CN201035790Y CN201035790Y CNU200720107661XU CN200720107661U CN201035790Y CN 201035790 Y CN201035790 Y CN 201035790Y CN U200720107661X U CNU200720107661X U CN U200720107661XU CN 200720107661 U CN200720107661 U CN 200720107661U CN 201035790 Y CN201035790 Y CN 201035790Y
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- vacuum
- experiment instrument
- coating chamber
- box body
- machine set
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Abstract
The utility model relates to a multi-functional vacuum experimental apparatus, which comprises a box body provided with a door and a controlling cabinet, and the door is made of high strength glass material. A vacuum machine set is arranged inside the box body, and a four-level diffusion pump arranged in the vacuum machine set is made of high strength vacuum glass. A vacuum coating chamber and a discharge tube connected with the vacuum machine set are installed at the top part of the box body, the vacuum coating chamber is formed by a bell cover made of the bottom plate of a vacuum room and the high strength glass material, and the discharge tube is a transparent glass body. A combined and integrated controlling device is installed inside the controlling cabinet, and the controlling device is connected with the vacuum machine set. A universal wheel is respectively arranged at the bottom parts of the controlling cabinet and the box body. The utility model enables students to clearly and directly observe the process of the change of each part in the experiment and the entire process of physical phenomena like evaporation sputtering, etc. in the vacuum coating chamber, and can enable the students to understand the experimental principle further, therefore, the experimental interest of the students is greatly inspired, and the teaching quality is effectively improved.
Description
Technical field
The utility model belongs to physics experiment teaching equipment, relates in particular to the simple and clear multifunctional vacuum experiment instrument of a kind of experimentation.
Background technology
Traditional its assembly of vacuum experiment instrument mostly is opaque metal material greatly, the Main physical process can't be looked at straight by naked eyes, experimentation is not directly perceived, equipment work principle and process are big with actual variance, teaching difficulty is big, the student can only by instrument cubicle obtain physical process, cause the student not high to the interest of this type of experiment, teaching efficiency is undesirable, has certain shortcoming aspect the ability of the experiment manipulative ability that improves the student and the connection between theory and practice.
Summary of the invention
The utility model mainly solves traditional vacuum experiment instrument experimentation and can only obtain by instrument cubicle, and directly perceived inadequately, student's interest is not high, and the teaching purpose difficulty such as reaches at technical matters; Provide a kind of experimentation to come into plain view, the multifunctional vacuum experiment instrument that student's learning interest is high has changed the history that the original employing equipment of industrial product is used to impart knowledge to students, and makes vacuum experiment become more directly perceived, understandable, is convenient to operation, improves the quality of teaching greatly.
Above-mentioned technical matters of the present utility model is mainly solved by following technical proposals: the utility model comprises glass evacuated coating chamber, glass discharge vessel, control module and the measuring system that is installed on the vacuum unit in the casing and links to each other with vacuum unit casing, described vacuum film coating chamber is surrounded by vacuum chamber base plate and bell jar, and described bell jar is the transparent body.When doing the vacuum coating experiment, be convenient to the student and can observe physical phenomenon overall processes such as the indoor evaporation sputter of vacuum coating clear, intuitively, effectively excite student's experimental interests, improve the ability of the students'experiment ability and the connection between theory and practice, deepen understanding the scientific principle opinion.
As preferably, described casing front is provided with Yishanmen, and described door is the transparent body.Make the student in experiment, can see formation, action, the state of vacuum unit clearly, be convenient to understanding, deeply understand experimental principle, improve experimental interests experimentation.
As preferably, make by glass material for described.
As preferably, the level Four diffusion pump in the described vacuum unit is made by high-intensity vacuum glass.The student can be visually observed the situation in the level Four diffusion pump when being convenient to test.
As preferably, described discharge tube is the transparent body.Generally make, can clearly observe the discharge scenario in the discharge tube with glass.
As preferably, described control device combination is integrated in the switch board.Easy to connect, also be convenient to adjusting in the experiment, setting, observation and maintenance, maintenance, and component distribution is reasonable, whole structure is good.
As preferably, described switch board, bottom half are provided with some universal wheels.These universal wheels have enough bearing capacities, are convenient to move.
As preferably, described bell jar is made by the high-intensity vacuum glass material.
The beneficial effects of the utility model are: vacuum film coating chamber is a bell shape, adopts glass to make, and is convenient to the student and evaporates physical phenomenon overall processes such as sputter in the observation ward when vacuum coating is tested.The cabinet door that the vacuum unit is installed is provided with the door of a fan glass material, and the level Four diffusion pump adopts high-intensity vacuum glass to make, and is convenient to the situation of change that the student clearly observes vacuum unit and level Four diffusion pump when testing, and deeply understands experimental principle.Discharge tube adopts the transparent body, can clearly observe the discharge scenario in the discharge tube.This device can effectively excite student's experimental interests, improves the quality of teaching, and improves student's the experiment manipulative ability and the ability of the connection between theory and practice.
Description of drawings
Fig. 1 is a kind of main TV structure synoptic diagram of the present utility model.
1. casings among the figure, 1-1. door, 2. vacuum unit, 3. vacuum film coating chamber, 3-1. vacuum chamber base plate, 3-2. bell jar, 4. discharge tube, 5. control device, 6. switch board, 7. universal wheel, 8. level Four diffusion pump.
Embodiment
Below by embodiment, and in conjunction with the accompanying drawings, the technical solution of the utility model is described in further detail.
Embodiment 1: the multifunctional vacuum experiment instrument of present embodiment, as shown in Figure 1, comprise a casing that has a 1-1 1, a switch board 6, and a door 1-1 is made by the high strength glass material.Vacuum unit 2 is installed in the casing 1, and level Four diffusion pump in the vacuum unit 28 is made by high-intensity vacuum glass.Casing 1 top is equipped with vacuum film coating chamber 3, discharge tube 4, and vacuum film coating chamber 3 is surrounded by vacuum chamber base plate 3-1 and bell jar 3-2, and bell jar 3-2 is made by the high strength glass material, and discharge tube 4 is the glass transparent body.The integrated control device 5 of combination is installed in the switch board 6, and control device 5 links to each other with vacuum unit 2, and vacuum unit 2 links to each other with vacuum film coating chamber 3, discharge tube 4 again.The bottom of switch board 6, casing 1 all is equipped with four universal wheels 7.
The bell jar of vacuum film coating chamber adopts high-intensity vacuum glass to make in the present embodiment, and the casing at vacuum unit place adopts glass door, and the level Four diffusion pump in the vacuum unit adopts high strength glass to make, and discharge tube adopts glass to make.Present embodiment can make the student can be clear in experiment, observe the overall process of physical phenomenons such as the change procedure of each several part in the experiment and the indoor evaporation sputter of vacuum coating intuitively, excite student's experimental interests greatly, can make the student more in depth understand experimental principle, be convenient to improve the ability of the students'experiment ability and the connection between theory and practice.The control device combination is integrated in the switch board, makes the apparatus structure compact and reasonable, is convenient to operation.Universal wheel is installed in casing and switch board bottom, is convenient to move convenient experiment.
The utility model can carry out the experiments such as measurement that vacuum obtains experiment, vacuum coating experiment, the observation of low pressure discharge phenomenon and volt-ampere curve.Also can be used as a good vacuum system platform, carry out other vacuum types Physical Experiment and measurement, not only satisfied the requirement of normal experiment teaching, and provide the support of technology and equipment for effectively carrying out teachings such as opening experiment, Course Exercise, thesis.
Claims (8)
1. multifunctional vacuum experiment instrument, comprise the vacuum film coating chamber (3), discharge tube (4), the control device (5) that are installed on the vacuum unit (2) in the casing (1) and link to each other with vacuum unit (2), it is characterized in that described vacuum film coating chamber (3) is surrounded by vacuum chamber base plate (3-1) and bell jar (3-2), described bell jar (3-2) is the transparent body.
2. multifunctional vacuum experiment instrument according to claim 1 is characterized in that described casing (1) front is provided with Yishanmen (1-1), and described door (1-1) is the transparent body.
3. multifunctional vacuum experiment instrument according to claim 2 is characterized in that described (1-1) made by glass material.
4. multifunctional vacuum experiment instrument according to claim 1 and 2 is characterized in that the level Four diffusion pump (8) in the described vacuum unit (2) is made by high-intensity vacuum glass.
5. multifunctional vacuum experiment instrument according to claim 1 and 2 is characterized in that described discharge tube (4) is the transparent body.
6. multifunctional vacuum experiment instrument according to claim 1 and 2 is characterized in that described control device (5) combination is integrated in the switch board (6).
7. multifunctional vacuum experiment instrument according to claim 6 is characterized in that described switch board (6), casing (1) bottom are provided with some universal wheels (7).
8. multifunctional vacuum experiment instrument according to claim 1 and 2 is characterized in that described bell jar (3-2) made by the high-intensity vacuum glass material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720107661XU CN201035790Y (en) | 2007-04-03 | 2007-04-03 | Multifunction vacuum experiment instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720107661XU CN201035790Y (en) | 2007-04-03 | 2007-04-03 | Multifunction vacuum experiment instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201035790Y true CN201035790Y (en) | 2008-03-12 |
Family
ID=39196681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200720107661XU Expired - Fee Related CN201035790Y (en) | 2007-04-03 | 2007-04-03 | Multifunction vacuum experiment instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201035790Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881471A (en) * | 2017-11-24 | 2018-04-06 | 浙江琰大新材料有限公司 | A kind of high efficiency nano material vacuum coating machine |
| CN108242196A (en) * | 2018-01-30 | 2018-07-03 | 中国科学院上海技术物理研究所 | Particle injecting mechanism under a kind of microgravity environment for space science experiment |
-
2007
- 2007-04-03 CN CNU200720107661XU patent/CN201035790Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881471A (en) * | 2017-11-24 | 2018-04-06 | 浙江琰大新材料有限公司 | A kind of high efficiency nano material vacuum coating machine |
| CN107881471B (en) * | 2017-11-24 | 2019-04-30 | 深圳市宏佳誉科技开发有限公司 | A kind of high efficiency nano material vacuum coating machine |
| CN108242196A (en) * | 2018-01-30 | 2018-07-03 | 中国科学院上海技术物理研究所 | Particle injecting mechanism under a kind of microgravity environment for space science experiment |
| CN108242196B (en) * | 2018-01-30 | 2023-05-05 | 中国科学院上海技术物理研究所 | Particle injection mechanism used in microgravity environment for space science experiment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080312 Termination date: 20130403 |