CN107869956B - Laser spot measuring system and method - Google Patents
Laser spot measuring system and method Download PDFInfo
- Publication number
- CN107869956B CN107869956B CN201610848411.5A CN201610848411A CN107869956B CN 107869956 B CN107869956 B CN 107869956B CN 201610848411 A CN201610848411 A CN 201610848411A CN 107869956 B CN107869956 B CN 107869956B
- Authority
- CN
- China
- Prior art keywords
- laser spot
- relay device
- imaging unit
- laser
- measurement system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention provides a laser spot measuring system and a method, wherein the laser spot measuring system comprises a measuring device and a relay device, the relay device is arranged on the measuring device and can vertically move on the measuring device, and the relay device comprises: a lens and an imaging unit. Firstly, setting the known position of the relay device on the measuring device as a reference height, and then, moving the relay device vertically to enable the laser spot to clearly image on the photosensitive surface, wherein the measuring device measures the moving distance of the relay device relative to the reference height, namely the height value of the optimal focal plane of the laser spot.
Description
Technical Field
The invention relates to the technical field of laser packaging, in particular to a laser spot measuring system and method.
Background
The Organic Light Emitting Diode is also called an Organic Light-Emitting Diode (OLED), the OLED is a major development direction in the field of flat panel display and lighting, and according to the process requirements of the OLED, since the lifetime of the OLED chip is very susceptible to oxygen and moisture, a process is required to encapsulate the OLED chip in a closed space to isolate the external environment. To improve the lifetime of the OLED, laser encapsulation is a promising process, and corresponding laser encapsulation equipment is needed to complete the laser encapsulation process.
As for the present laser packaging apparatus, as shown in fig. 1(a), it mainly includes a lens 10, an imaging unit 11, and a test stage 12. Wherein the imaging unit 11 is arranged on the test stand 12 and the imaging unit 11 comprises a light sensing surface. The laser spot passes through the lens 10 to be imaged on the photosensitive surface of the imaging unit 11. By vertically moving the test table 12, the definition of the laser spot on the imaging unit 11 is adjusted. When the image is most clear, the photosensitive surface of the imaging unit 11 is the best focus surface. As shown in fig. 1(b), since the imaging unit 11 has a multilayer structure of protective glass, metal electrodes, filters, and the like at a position 112 outside the light-sensing surface 111, the thicknesses of these layers cannot be accurately measured. So that when the best focal plane is found by moving the test table 3 vertically, the specific height of the best focal plane cannot be known.
Therefore, it is necessary to develop a laser spot measurement system, which can measure the height value of the optimal focal plane, and is of great significance to the assembly and adjustment and performance test of laser packaging equipment.
Disclosure of Invention
The invention aims to provide a laser spot measuring system and a laser spot measuring method, which aim to solve the problem that the conventional imaging unit cannot accurately measure the specific height value of the optimal focal plane.
In order to solve the above technical problem, the present invention provides a laser spot measurement system for measuring a height value of an optimal focal plane of a laser spot, including a measurement device and a relay device, wherein the relay device is disposed on the measurement device and is capable of moving vertically on the measurement device, and the relay device includes: the lens is used for imaging the laser facula; and an imaging unit for receiving and outputting the image formed by the lens.
Optionally, in the laser spot measurement system, the imaging unit includes a photosensitive surface.
Optionally, in the laser spot measurement system, the relay device further includes a reference plate with a reference mark.
Optionally, in the laser spot measurement system, the reference mark is located on a mark surface of the reference plate.
Optionally, in the laser spot measurement system, the marking surface is an upper surface or a lower surface of the reference plate.
Optionally, in the laser spot measurement system, the marking surface and the photosensitive surface are in a conjugate relationship.
Optionally, in the laser spot measurement system, the imaging unit is a profiler or a CCD (charge coupled device).
Optionally, in the laser spot measurement system, the relay device further includes a beam splitter for attenuating the energy of the laser spot.
The invention also provides a laser spot measuring method based on the laser spot measuring system, which comprises the following steps:
setting a reference height of the relay device on the measuring device;
moving the relay device to enable the measured laser faculae to be clearly imaged on the imaging unit;
and calculating the vertical height value of the optimal focal plane of the laser spot.
Optionally, in the laser spot measuring method, the setting of the reference height of the relay device on the measuring device is to set a known position as the reference height.
Optionally, in the laser spot measurement method, moving the relay device is to move the relay device vertically as a whole.
Optionally, in the laser spot measurement method, calculating the vertical height value of the optimal focal plane of the laser spot means that the distance that the relay device moves on the measurement device is measured with respect to the reference height.
In the laser spot measuring system and method provided by the invention, the laser spot measuring system comprises a measuring device and a relay device, wherein the relay device is arranged on the measuring device and can vertically move on the measuring device, and the relay device comprises: the lens is used for imaging the laser facula; and an imaging unit for receiving and outputting the image formed by the lens. Firstly, setting the known position of the relay device on the measuring device as a reference height, and then, moving the relay device vertically to enable the laser spot to clearly image on the photosensitive surface, wherein the measuring device measures the moving distance of the relay device relative to the reference height, namely the height value of the optimal focal plane of the laser spot. Meanwhile, the profile morphology of the laser spot can be obtained through the image on the photosensitive surface.
Drawings
Fig. 1(a) is a schematic structural diagram of a conventional laser packaging device;
FIG. 1(b) is a schematic view of the layers of the light-sensing surface on the imaging unit;
fig. 2(a) is a schematic structural diagram of a laser spot measurement system according to a first embodiment of the present invention;
FIG. 2(b) is a schematic flow chart of a laser spot measurement method provided by the present invention;
fig. 3 is a schematic structural diagram of a laser spot measurement system according to a second embodiment of the present invention;
fig. 4 is a schematic structural diagram of a laser spot measurement system according to a third embodiment of the present invention;
fig. 5 is a schematic structural diagram of a laser spot measurement system according to a fourth embodiment of the present invention;
fig. 6 is a schematic structural diagram of a laser spot measurement system according to a fifth embodiment of the present invention;
fig. 7 is a schematic structural diagram of a laser spot measurement system according to a sixth embodiment of the present invention.
Detailed Description
The laser spot measurement system and method according to the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
Fig. 2(a) is a schematic structural diagram of a laser spot measurement system provided in this embodiment, and includes a measurement device 20 and a relay device 21, where the relay device 21 is disposed on the measurement device 20 and can move vertically on the measurement device 20, where the relay device 21 includes: a lens 211 for imaging the laser spot; and an imaging unit 212 for receiving and outputting an image formed through the lens.
Continuing with fig. 2(a), in particular, the imaging unit 212 includes a photosensitive surface, and in practical use, the relay device is vertically moved as a whole to clearly image the photosensitive surface of the measured laser spot on the imaging unit 212.
The invention also provides a method for measuring laser spots, a flow schematic diagram is shown in fig. 2(b), and the method comprises the following steps:
step S21, setting a reference height of the relay device on the measuring device;
step S22, moving the relay device to make the measured laser spot image clearly on the imaging unit;
and step S23, calculating the vertical height value of the optimal focal plane of the laser spot.
Specifically, a known position of the relay device on the measuring device is set as a reference height, and the reference height is taken as a constant; the relay device is wholly vertically moved, so that laser spots can be clearly imaged on the imaging unit; and comparing the reference height with the moving distance of the whole relay device on the measuring device, namely the height value of the optimal focal plane of the laser spot.
Example two
Fig. 3 is a schematic structural diagram of a laser spot measurement system provided in this embodiment, where the laser spot measurement system includes a measurement device 30 and a relay device 31, and the relay device 31 includes: a lens 311, and an imaging unit 312, the molding unit 312 including a photosensitive surface.
The structure of the laser spot measuring system in the second embodiment is different from that in the first embodiment, in order to make the laser spot imaged on the imaging unit 312 more clearly, the relay device 31 further includes a reference plate 313, the reference plate 313 is provided with a reference mark 3130, as shown in fig. 3, the reference mark 3130 is located on a lower surface of the reference plate 313, the lower surface is a mark surface of the reference plate 313, and the mark surface is conjugate with a light-sensing surface of the imaging unit 312, that is, a clear image of the reference mark 3130 is visible on the light-sensing surface under proper illumination conditions.
When the relay device is moved, the resolution of the laser spot image is compared with the reference mark 3130 image, and fine vertical adjustment is repeated, so that the laser spot image clearly on the photosensitive surface of the imaging unit 312.
EXAMPLE III
The above embodiments are applicable to the case where the laser power is low. For high power lasers, the laser energy is too high and may damage the imaging unit.
The laser measurement system shown in fig. 4 includes a measurement device 40 and a relay device 41, and the relay device 41 includes: a lens 411, an imaging unit 412 and a reference plate 413, wherein the forming unit 412 comprises a photosensitive surface, and the reference plate 413 is provided with a reference mark.
The difference between the structure of the laser spot measurement system in the third embodiment and the structure of the second embodiment is that, in order to be suitable for high-power laser and avoid the imaging unit 412 being damaged by too high laser energy, the laser spot measurement system further includes a beam splitter 414, referring to fig. 4, the beam splitter 414 reflects most of the energy of the laser spot, and only a small amount of the transmitted light beam is imaged, so that the energy of the imaging spot is within the tolerable range of the imaging unit 412.
Example four
Fig. 5 is a schematic structural diagram of another laser spot measurement system provided in the fourth embodiment, and is suitable for a situation where laser energy is too high, where the laser spot measurement system includes:
a measurement device 50 and a relay device 51, the relay device 51 comprising: a lens 511, an imaging unit 512 and a reference plate 513, wherein the molding unit 512 comprises a photosensitive surface, and the reference plate 513 is provided with a reference mark. The difference between the structure of the laser spot measurement system in the fourth embodiment and the structure of the laser spot measurement system in the third embodiment is that the installation position of the beam splitter 514 is different, specifically referring to fig. 4 and fig. 5, the beam splitter 514 in the fourth embodiment can also reflect most of the energy of the laser, and only a small amount of the transmitted light beam is imaged, so that the energy of the imaging spot is within the tolerable range of the imaging unit 512.
EXAMPLE five
Fig. 6 is a schematic structural diagram of another laser spot measurement system provided in this embodiment, and is suitable for a case where laser is high power, where the laser spot measurement system includes:
a measuring device 60 and a relay device 61, the relay device 61 comprising: a lens 611, an imaging unit 612 and a reference plate 613, the forming unit 612 comprising a light-sensing surface, the reference plate 613 carrying a reference mark. Referring to fig. 6, a difference between the structure of the laser spot measurement system in the fifth embodiment and the structure of the laser spot measurement system in the third embodiment is that when the beam splitter 614 is placed at the position shown in fig. 6, the aberration caused by the transmission of the beam splitter 614 needs to be considered, and in the present embodiment, the imaging unit 612 is placed on the reflected light path of the laser to remove the aberration caused by the transmission of the beam splitter 614. At this time, the beam splitter 614 transmits most of the energy of the laser, and reflects a small part of the energy, so that the energy of the laser reflection spot is within the tolerable range of the imaging unit 612.
EXAMPLE six
As shown in fig. 7, the structure of the laser spot measurement system provided in the sixth embodiment is completely the same as that of the second embodiment, the laser spot measurement system includes a measurement device 70 and a relay device 71, and the relay device 71 includes: the forming unit 712 comprises a light-sensing surface, the relay device is arranged at different heights P1, P2, P3, P4, P5 and the like on the measuring device, the spot shapes of the laser spots at different positions on the imaging unit 712 are obtained respectively, and the vertical height values corresponding to the spot shapes are recorded at the same time, so that the situation that the spot shapes change along with the height can be monitored.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (8)
1. A laser spot measurement system comprising a measurement device and a relay device, the relay device being disposed on the measurement device and being capable of moving vertically on the measurement device, wherein the relay device comprises:
a reference plate with a reference mark, through which the laser spot passes to reach the lens;
the lens is used for imaging the laser facula;
an imaging unit for receiving and outputting an image formed by the lens;
the reference mark is positioned on a mark surface of the reference plate, the mark surface is conjugated with a photosensitive surface of the imaging unit, and the reference mark can be used for clearly imaging on the photosensitive surface of the imaging unit.
2. The laser spot measurement system of claim 1, wherein the marking surface is on an upper surface or a lower surface of the reference plate.
3. The laser spot measurement system of claim 1, wherein the imaging unit is a profiler or a CCD.
4. The laser spot measurement system of claim 1, wherein the relay further comprises a beam splitter for attenuating the energy of the laser spot.
5. A laser spot measuring method based on the laser spot measuring system of claim 1, comprising the steps of:
setting a reference height of the relay device on the measuring device;
moving the relay device, comparing an image formed by the measured laser spot on the imaging unit with an image formed by the reference mark on the reference plate on the imaging unit, and repeatedly performing vertical fine adjustment until the measured laser spot is clearly imaged on the imaging unit;
and calculating the vertical height value of the optimal focal plane of the laser spot.
6. The laser spot measuring method of the laser spot measuring system according to claim 5, wherein the setting of the reference height of the relay device on the measuring device is a setting of a known position as the reference height.
7. The laser spot measurement method of the laser spot measurement system according to claim 5, wherein moving the relay device is moving the relay device vertically as a whole.
8. The laser spot measurement method of the laser spot measurement system according to claim 5, wherein the calculating of the vertical height value of the best focal plane of the laser spot is to measure a distance that the relay device moves on the measurement device with respect to the reference height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610848411.5A CN107869956B (en) | 2016-09-23 | 2016-09-23 | Laser spot measuring system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610848411.5A CN107869956B (en) | 2016-09-23 | 2016-09-23 | Laser spot measuring system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107869956A CN107869956A (en) | 2018-04-03 |
| CN107869956B true CN107869956B (en) | 2020-04-10 |
Family
ID=61751596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610848411.5A Active CN107869956B (en) | 2016-09-23 | 2016-09-23 | Laser spot measuring system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107869956B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2500458A1 (en) * | 1974-01-10 | 1975-07-17 | Cilas | DEVICE FOR DETERMINING A SURFACE PROFILE |
| CN2453411Y (en) * | 2000-12-15 | 2001-10-10 | 中国科学院西安光学精密机械研究所 | Laser minimum light spot measuring device |
| CN101520304A (en) * | 2009-03-30 | 2009-09-02 | 哈尔滨工业大学 | Phase-shifting secondary interference confocal soft-pinhole detection device and method |
| CN102455247A (en) * | 2010-11-03 | 2012-05-16 | 上海微电子装备有限公司 | Device and method for detecting optimal focal plane of projection objective |
| CN105549346A (en) * | 2014-10-29 | 2016-05-04 | 合肥芯硕半导体有限公司 | Method for acquiring optimal focal plane distance of laser direct imaging equipment |
| CN108507498A (en) * | 2017-02-28 | 2018-09-07 | 上海微电子装备（集团）股份有限公司 | Micro mirror monitoring method and device and lighting device and litho machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8294809B2 (en) * | 2005-05-10 | 2012-10-23 | Advanced Scientific Concepts, Inc. | Dimensioning system |
-
2016
- 2016-09-23 CN CN201610848411.5A patent/CN107869956B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2500458A1 (en) * | 1974-01-10 | 1975-07-17 | Cilas | DEVICE FOR DETERMINING A SURFACE PROFILE |
| CN2453411Y (en) * | 2000-12-15 | 2001-10-10 | 中国科学院西安光学精密机械研究所 | Laser minimum light spot measuring device |
| CN101520304A (en) * | 2009-03-30 | 2009-09-02 | 哈尔滨工业大学 | Phase-shifting secondary interference confocal soft-pinhole detection device and method |
| CN102455247A (en) * | 2010-11-03 | 2012-05-16 | 上海微电子装备有限公司 | Device and method for detecting optimal focal plane of projection objective |
| CN105549346A (en) * | 2014-10-29 | 2016-05-04 | 合肥芯硕半导体有限公司 | Method for acquiring optimal focal plane distance of laser direct imaging equipment |
| CN108507498A (en) * | 2017-02-28 | 2018-09-07 | 上海微电子装备（集团）股份有限公司 | Micro mirror monitoring method and device and lighting device and litho machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107869956A (en) | 2018-04-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102500627B (en) | Plate width, side shape and side defect measuring instrument and measuring method thereof | |
| CN103744271B (en) | A kind of laser direct writing system and photoetching method | |
| CN104614558B (en) | A kind of, line CCD combine atomic force probe scanning measurement system and measuring method | |
| CN106767516A (en) | Automated optical white light scanning instrument | |
| US8575791B2 (en) | Manufacturing-process equipment | |
| CN103645471A (en) | Laser radar detecting light source divergence angle measuring device and method | |
| CN103862166A (en) | Determination method for laser beam focal plane | |
| CN209156612U (en) | A kind of remote auto laser cleaning system | |
| CN103322933A (en) | Non-contact type optical mirror surface interval measuring device | |
| CN102573308A (en) | Correction method of graphic splicing errors of printed circuit board (PCB) | |
| CN104698010A (en) | Device used to detect appearance of chip assembly | |
| CN105157615B (en) | A kind of three dimensional shape measurement system for vacuum | |
| CN104776804B (en) | The optical camera Method of Adjustment and device measured based on contactless slight distance | |
| CN107869956B (en) | Laser spot measuring system and method | |
| CN102736428A (en) | Focusing and leveling device and method | |
| US20130004269A1 (en) | System and Method for Picking and Placement of Chip Dies | |
| CN203100746U (en) | Camera model calibration device | |
| CN107664833B (en) | Machine vision system for aligning substrate and aligning device | |
| CN104964641A (en) | Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method | |
| JP5821092B2 (en) | Illuminance distribution measuring apparatus and illuminance distribution measuring method | |
| CN105136049A (en) | Optical measurement method used for material thickness of semiconductor device | |
| CN104880147A (en) | Magnetic micrometric displacement platform type corner reflecting mirror laser interferometer and calibration method and measuring method | |
| US9772183B2 (en) | Flying sensor head | |
| CN203293634U (en) | Optical focus temperature compensating device | |
| CN206772225U (en) | 3-dimensional image measurement apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |