CN105157615B - A kind of three dimensional shape measurement system for vacuum - Google Patents
A kind of three dimensional shape measurement system for vacuum Download PDFInfo
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- CN105157615B CN105157615B CN201510374545.3A CN201510374545A CN105157615B CN 105157615 B CN105157615 B CN 105157615B CN 201510374545 A CN201510374545 A CN 201510374545A CN 105157615 B CN105157615 B CN 105157615B
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Abstract
The present invention relates to a kind of three dimensional shape measurement systems for vacuum, the measuring system works under vacuum environment, including the measurement head being connected and robot arm device, the measurement head includes holder, projecting subassembly, acquisition component, computer and power supply, the holder is connect with robot arm device, the projecting subassembly and acquisition component are located on holder, and the power supply is connect with projecting subassembly, and the computer is connect with acquisition component；The measurement head is directed at measured workpiece under the drive of robot arm device, and projecting subassembly projects measured workpiece, and the projection result of acquisition component acquisition measured workpiece is simultaneously transferred to computer, obtains the measuring three-dimensional morphology result of measured workpiece.Compared with prior art, the present invention has many advantages, such as that high certainty of measurement, operation is portable, can be suitable for vacuum environment.
Description
Technical field
The present invention relates to a kind of apparatus for measuring three-dimensional profile, more particularly, to a kind of measuring three-dimensional morphology system for vacuum
System.
Background technology
Three coordinate measuring engine measurement precision is higher, generally can reach micron order, and it is higher to measure stability.But it is to ring
Border requires harshness, more sensitive to temperature and vibrations, and portable devices are poor, and measurement method is single, and disadvantage is that contact is surveyed
Amount easily causes touching to injure testee itself, and the probe of equipment is for testee complex surface (such as micron order
The depth in groove/hole) it cannot achieve measurement.
The measurement accuracy of high-precision image instrument can reach micron order, but image instrument can only realize the survey of two-dimensional signal
Amount, cannot achieve the detection and measurement of three-dimensional information entirety pattern, have significant limitation.
Common raster scanner projects the structure light of several codings using grating loss device on testee, utilizes
CCD camera acquires coded image, then carries out analysis calculating in a computer, testee is obtained using principle of triangulation
Shape three-dimensional information.
Projection light source sends out structure light in projecting light path's figure of common raster scanner becomes flat after Fei Er lens
Row light beam, collimated light beam be irradiated to it is to be projected it is in kind after projected light be imaged after projection lens lens, for commonly projecting
Camera lens, since lens focus is longer, the distance of camera lens to Fei Er lens is between 1 times of focal length and 2 times of focal lengths, according to lens imaging
Principle can only obtain the real image of amplification outside 2 times of projector distances.But the surface topography of many objects under test is complicated, it is desirable that high
The Measurement Resolution of precision, the common raster scanner for visual field more than 30mm, which is shown, cannot be satisfied.
All these measuring apparatus are measured under normal atmospheric conditions, and the measurement in corresponding vacuum environment is all
There are problems.
Invention content
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of high certainty of measurement, behaviour
Make the portable three dimensional shape measurement system for vacuum.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of three dimensional shape measurement system for vacuum, which works under vacuum environment, including is connected
Measurement head and robot arm device,
The measurement head includes holder, projecting subassembly, acquisition component, computer and power supply, and the holder is filled with mechanical arm
Set connection, the projecting subassembly and acquisition component are located on holder, and the power supply is connect with projecting subassembly, the computer with adopt
Collect component connection；
The measurement head is directed at measured workpiece under the drive of robot arm device, and projecting subassembly throws measured workpiece
Shadow, the projection result of acquisition component acquisition measured workpiece are simultaneously transferred to computer, obtain the measuring three-dimensional morphology knot of measured workpiece
Fruit.
The projecting subassembly includes that projection baffle, projection control module and projection lens assembly, the projection baffle are located at
The top surface of holder, the projection lens assembly are connect with projection control module.
The projection lens assembly includes the LED projection light source set gradually, Fei Er lens, object to be projected, relay lens
With projection lens lens, the LED projection light source is arranged at one times from the Fei Er lens Fei Er focal length of lens, the object to be projected
With at a distance from projection lens lens be greater than or equal to 2 times of projection lens focal lengths of lens.
The acquisition component includes two sub- acquisition components, and every sub- acquisition component respectively includes industrial camera, camera mirror
Head and filter element, the camera lens are connect by filter element with industrial camera.
The filter element includes the polariscope and blue filter set gradually.
The robot arm device includes mechanical arm, mechanical position limitation column and pedestal, and the mechanical arm is separately connected mechanical position limitation
Column and pedestal, the mechanical arm that the mechanical arm paints for no surface.
Lubricant medium inside the mechanical arm is molybdenum disulfide.
Further include the calibration panel assembly demarcated for measurement head, which includes the scaling board being connected and calibration
Plate protective cover, the interior time control module being equipped with for controlling the nominal time of the scaling board；
Before measuring, robot arm device drives measurement head to panel assembly is demarcated, and is demarcated to measurement head.
Compared with prior art, the present invention has the following advantages：
One, it is applied to vacuum environment, this measuring system to all modules set for the adaptability of vacuum environment
Meter, specially：
1) measurement head is designed, is controlled using accurate projection control module, vacuum can be suitable for
Environment；
2) robot arm device is designed, the original surface paint of removal mechanical arm reduces vacuum degassing amount, ensures more
High vacuum degree, and the lubricant medium inside mechanical arm is changed, using molybdenum disulfide, prevent from waving under common lubricant medium vacuum environment
Hair, causes equipment damage, while preventing pollution vacuum environment, ensures the cleanliness factor of vacuum environment；
3) caliberating device is designed, its working time is accurately controlled by time control module, prevents temperature excessively high
Scaling board is damaged, vacuum environment can be suitable for；
Two, high certainty of measurement, in the projection lens assembly of this measuring system, LED projection light source is arranged in Fei Er lens one
At times Fei Er focal lengths of lens, the object to be projected is greater than or equal to 2 times of projection lens lens at a distance from projection lens lens
Focal length, the field range that can control measurement head is 1mm*1mm-10mm*10mm, and precision is up to 15um, than general grating shape
The measurement accuracy higher of looks measuring instrument；
Three, measurement range is wider, and the robot arm device load measurement head of this measuring system measures, and passes through mechanical arm
Traverse measurement different zones, have expanded measurement range；
Four, simple operation, this measuring system carries out analysis calculating by the structure light that acquisition is irradiated on small items can
Easily to obtain the surface information of object under test.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of measurement head of the present invention.
Fig. 3 is that the projecting light path of projection lens assembly schemes；
Figure label is expressed as：1, measurement head, 101, holder, 102, projection baffle, 103, projection control module, 104, throw
Shadow lens assembly, 105, industrial camera, 106, camera lens, 107, filter element, 108, supply lines, 109, communication line, 110,
Computer, 111, power supply, 2, caliberating device, 201, scaling board, 202, scaling board protective cover, 3, robot arm device, 301, machinery
Arm, 302, mechanical position limitation part, 303, pedestal, 4, measured workpiece, 401, LED projection light source, 402, Fei Er lens, 403, relaying it is saturating
Mirror, 404, projection lens lens.
Specific implementation mode
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to
Following embodiments.
Embodiment 1
As Figure 1-Figure 2, the present embodiment provides a kind of three dimensional shape measurement system for vacuum, the measuring system works
Make under vacuum environment, be used for the detection of small visual field, including the measurement head 1 and robot arm device 3 being connected, robot arm device
3 connect with vacuum tank, wherein and measurement head 1 includes holder 101, projecting subassembly, acquisition component, computer 110 and power supply 111,
Holder 101 is connect with robot arm device 3, and projecting subassembly and acquisition component are located on holder 101, and power supply 111 passes through supply lines 108
It is connect with projecting subassembly, computer 110 is connect by communication line 109 with acquisition component.
Projecting subassembly includes projection baffle 102, projection control module 103 and projection lens assembly 104, projects baffle 102
It is located at the top surface of holder 101, projection lens assembly 104 is connect with projection control module 103, and projection control module 103 uses ARM
Chip architecture is supported 232 and 485 interfaces, is communicated with computer using ModbusRTU agreements, and projecting figure, projection can be controlled
Sequentially, projected time duration, projection interval time control switch and the closing of LED cold light sources, by projecting control module 103
Projection control is carried out, enables devices to be suitable for vacuum environment.
As shown in figure 3, projection lens assembly 104 includes the LED projection light source 401 set gradually, Fei Er lens 402, waits for
Object, relay lens 403 and projection lens lens 404 are projected, LED projection light source 401 is arranged in 402 1 times from Fei Er lens Fei Er
At the focal length of lens, object to be projected at a distance from projection lens lens 404 be greater than or equal to 2 times of projection lens focal lengths of lens, i.e. 2f,
The field range that measurement head can be controlled is 1mm*1mm-10mm*10mm.
Acquisition component includes two sub- acquisition components, and every sub- acquisition component respectively includes industrial camera 105, camera lens
106 and filter element 107, camera lens 106 connect with industrial camera 105 by filter element 107.Filter element 107 includes
The polariscope and blue filter set gradually can filter out measured workpiece surface due to light pollution caused by mirror-reflection.
Robot arm device 3 includes mechanical arm 301, mechanical position limitation column 302 and pedestal 303, and mechanical arm 301 is separately connected machinery
Limited post 302 and pedestal 303, the mechanical arm that mechanical arm 301 paints for no surface.Mechanical position limitation column 302 is used for limit mechanical arm
The region of movement prevents mechanical arm from touching measured workpiece 4 in the case where itself limits failure.
Lubricant medium inside mechanical arm 301 is extraordinary lubricant medium, uses molybdenum disulfide in the present embodiment, effectively prevent
It volatilizees under common lubricant medium vacuum environment, causes equipment damage, while preventing pollution vacuum environment, ensure the clean of vacuum environment
Cleanliness.
When above-mentioned measuring system measures, measurement head 1 is mounted on the 6th axis of mechanical arm 301, in the band of mechanical arm 301
Dynamic 4 surface of measured workpiece that is moved to needs the region (multiple regions can be arranged) measured, and the projecting subassembly of measurement head is by sequence
Sinusoidal intensity grating fringe is projeced on measured workpiece, by designing light path, can ensure the figure projected using relaying camera lens
As according to light path finally in the small projection size of measured workpiece Surface Creation, and can be clear by projection of focusing.Meanwhile it acquiring
Component is returned the grating fringe Image Acquisition containing object each section bulk information by industrial camera, and camera lens adjust burnt
Away from aperture, focusing is allowed to imaging clearly, and aperture controls luminous flux, and optical filter can filter out the strong anti-of testee surface
Light and some noises make the feature that industrial camera acquires become apparent from, and computer utilizes phase-shifting technique and binary encoding, meter
The corresponding points height value of each pixel is calculated, and then reconstructs the surface shape of object, is exported as magnanimity three-dimensional data dot format
With depth image format, it is stored in computer.Three-dimensional data points can be packaged into dough sheet structure or entity by being handled by software
Structure shows the three-dimensional appearance of testee.
Finally, it is 10 system to be placed in vacuum degree-4In the vacuum environment of Pascal, equipment operational excellence, measurement data standard
Really
Embodiment 2
Refering to what is shown in Fig. 1, the present embodiment is with embodiment 1, difference lies in further include the scaling board demarcated for measurement head 1
Device 2, the calibration panel assembly 2 are arranged in vacuum tank, including the scaling board 201 and scaling board protective cover 202 being connected, mark
The time control module for controlling the nominal time is equipped in fixed board 201；Before measuring, robot arm device 3 drives measurement head 1
To calibration panel assembly 2, measurement head 1 is demarcated, its working time is accurately controlled by time control module, prevents temperature mistake
Height damage scaling board, can be suitable for vacuum environment.
Claims (4)
1. a kind of three dimensional shape measurement system for vacuum, which is characterized in that the measuring system works under vacuum environment, packet
The measurement head (1) being connected and robot arm device (3) are included,
The measurement head (1) includes holder (101), projecting subassembly, acquisition component, computer (110) and power supply (111), described
Holder (101) is connect with robot arm device (3), and the projecting subassembly and acquisition component are located on holder (101), the power supply
(111) it is connect with projecting subassembly, the computer (110) connect with acquisition component, and the acquisition component includes that two sons acquire
Component；
The measurement head (1) is directed at measured workpiece (4) under the drive of robot arm device (3), and projecting subassembly is to measured workpiece (4)
It is projected, the projection result of acquisition component acquisition measured workpiece (4) is simultaneously transferred to computer (110), obtains measured workpiece (4)
Measuring three-dimensional morphology result；
The projecting subassembly includes projection baffle (102), projection control module (103) and projection lens assembly (104), the throwing
Shadow baffle (102) is located at the top surface of holder (101), and the projection lens assembly (104) connect with projection control module (103)；
The robot arm device (3) includes mechanical arm (301), mechanical position limitation column (302) and pedestal (303), the mechanical arm
(301) it is separately connected mechanical position limitation column (302) and pedestal (303), the mechanical arm that the mechanical arm (301) is painted for no surface,
The internal lubricant medium of the mechanical arm (301) is molybdenum disulfide；
Further include the calibration panel assembly (2) for measurement head (1) calibration, which includes the scaling board being connected
(201) and scaling board protective cover (202) time control module for controlling the nominal time, is equipped in the scaling board (201)；
Before measuring, robot arm device (3) drives measurement head (1) to calibration panel assembly (2), is demarcated to measurement head (1).
2. a kind of three dimensional shape measurement system for vacuum according to claim 1, which is characterized in that the projection lens
Head assembly (104) includes the LED projection light source (401) set gradually, Fei Er lens (402), object to be projected, relay lens
(403) and projection lens lens (404), LED projection light source (401) setting are saturating in (402) one times from Fei Er lens Fei Er
Jing Jiaojuchu, the object to be projected are greater than or equal to 2 times of projection lens focal lengths of lens at a distance from projection lens lens (404).
3. a kind of three dimensional shape measurement system for vacuum according to claim 1, which is characterized in that each son
Acquisition component respectively includes industrial camera (105), camera lens (106) and filter element (107), the camera lens (106)
It is connect with industrial camera (105) by filter element (107).
4. a kind of three dimensional shape measurement system for vacuum according to claim 3, which is characterized in that the optical filtering member
Part (107) includes the polariscope and blue filter set gradually.
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| CN201510374545.3A CN105157615B (en) | 2015-06-30 | 2015-06-30 | A kind of three dimensional shape measurement system for vacuum |
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| CN105157615B true CN105157615B (en) | 2018-08-31 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107553469A (en) * | 2017-09-27 | 2018-01-09 | 西安华航唯实机器人科技有限公司 | A kind of industrial robot vision's digital measuring device |
| JP7010679B2 (en) * | 2017-12-05 | 2022-01-26 | 株式会社ミツトヨ | Measurement station and measurement method |
| CN111623744A (en) * | 2020-05-14 | 2020-09-04 | 湖北恒义智能科技有限公司 | Curved surface appearance acquisition and measurement system |
| CN113075910A (en) * | 2021-02-25 | 2021-07-06 | 南京南瑞继保电气有限公司 | Intelligent testing system and method for complete machine retest of relay protection device |
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| CN203443556U (en) * | 2013-09-18 | 2014-02-19 | 廖怀宝 | Device capable of realizing two dimensional measurement and three dimensional measurement of object |
| CN104111036A (en) * | 2013-04-18 | 2014-10-22 | 中国科学院沈阳自动化研究所 | Mirror object measuring device and method based on binocular vision |
| CN203981130U (en) * | 2014-06-24 | 2014-12-03 | 苏州西博三维科技有限公司 | Teaching type 3-D scanning equipment camera three-dimensional regulating mechanism |
| CN104380037A (en) * | 2012-06-12 | 2015-02-25 | 株式会社岛精机制作所 | Three-dimensional measurement apparatus, and three-dimensional measurement method |
| CN104729428A (en) * | 2015-02-27 | 2015-06-24 | 湖北文理学院 | Coaxial structural light based mirror face part three-dimensional shape measuring system and measuring method |
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2015
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Patent Citations (5)
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| CN104380037A (en) * | 2012-06-12 | 2015-02-25 | 株式会社岛精机制作所 | Three-dimensional measurement apparatus, and three-dimensional measurement method |
| CN104111036A (en) * | 2013-04-18 | 2014-10-22 | 中国科学院沈阳自动化研究所 | Mirror object measuring device and method based on binocular vision |
| CN203443556U (en) * | 2013-09-18 | 2014-02-19 | 廖怀宝 | Device capable of realizing two dimensional measurement and three dimensional measurement of object |
| CN203981130U (en) * | 2014-06-24 | 2014-12-03 | 苏州西博三维科技有限公司 | Teaching type 3-D scanning equipment camera three-dimensional regulating mechanism |
| CN104729428A (en) * | 2015-02-27 | 2015-06-24 | 湖北文理学院 | Coaxial structural light based mirror face part three-dimensional shape measuring system and measuring method |
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Effective date of registration: 20210512 Address after: 201602 No.10, No.9, Lane 801, qiangye Road, Sheshan Town, Songjiang District, Shanghai Patentee after: Aerospace Intelligent Manufacturing (Shanghai) Technology Co.,Ltd. Patentee after: LANZHOU INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SPACE TECHNOLOGY Address before: 200233, 1-2 building, 32-33 building, 680 Guiping Road, Xuhui District, Shanghai, 34 Building 1. Patentee before: SHANGHAI MECHANICAL POWER ENGINEERING Co.,Ltd. Patentee before: LANZHOU INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SPACE TECHNOLOGY |