CN107867562A - Double-type substrate feed system - Google Patents

Double-type substrate feed system Download PDF

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Publication number
CN107867562A
CN107867562A CN201610893696.4A CN201610893696A CN107867562A CN 107867562 A CN107867562 A CN 107867562A CN 201610893696 A CN201610893696 A CN 201610893696A CN 107867562 A CN107867562 A CN 107867562A
Authority
CN
China
Prior art keywords
saddle
mentioned
roofbolt
substrate
adsorption module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610893696.4A
Other languages
Chinese (zh)
Inventor
郑赞洙
韩允皓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGSUNG CO LTD
Original Assignee
CHANGSUNG CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGSUNG CO LTD filed Critical CHANGSUNG CO LTD
Publication of CN107867562A publication Critical patent/CN107867562A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G65/00Loading or unloading

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

The present invention relates to a kind of double-type substrate feed system technology, including:Base, it is horizontally mounted in the feeder both sides for putting into substrate;Roofbolt, it is installed on the top of above-mentioned base and is transferred along above-mentioned base;Saddle, can be installed in a manner of upper and lower, front and rear transfer in above-mentioned roofbolt;First cylinder, it is installed in above-mentioned roofbolt and saddle, for transferring above-mentioned saddle up and down;Motor, it is installed in above-mentioned roofbolt and saddle, for the front and rear above-mentioned saddle of transfer;Adsorption module, the side of above-mentioned saddle is rotatably installed on, it is vacuum adsorbed for entering to substrate;And rotor, it is installed in above-mentioned saddle and adsorption module, for making above-mentioned adsorption module be rotated along both forward and reverse directions.

Description

Double-type substrate feed system
Technical field
It is entering for each manufacturing engineering input substrate in printed circuit board (PCB) (PCB) manufacturing engineering the present invention relates to one kind Expect systems technology, it is especially a kind of by the dual installation in the both sides of feeder be used for by means of multiple feed rolls input and The substrate of transfer is adsorbed and is secured to the feed unit in fixture, feed unit is alternately adsorbed in the both sides of feeder Substrate is simultaneously secured in transfer fixture, so as to shorten the feed time of substrate and further lifted whereby its productivity and Engineering yield, while by preventing error running from reducing the double-type substrate feed system technology of its fraction defective.
Background technology
Generally, printed circuit board (PCB) (PCB) is part electrically, the most basic in electronic product, is widely used in daily life LCD TV, DVD, desktop computer, notebook computer, digital camera and smart mobile phone, PDA, MP3 etc. in work electrically, electronics In product, and along with digital technology rapidly development and semiconductor development tipped and increasingly tend to miniaturization, it is highly dense Degreeization and multifunction, and drive the level of application of printed circuit board (PCB) to improve constantly.
The manufacturing engineering of printed circuit board (PCB) (PCB) as described above is generally divided into exposure (Inner Later Exposing stripping (Stripping) engineering that)-DF develops (Dry Film Developing)-etching (Etching)-.Wherein, Exposure engineering is the engineering for forming required circuit, covers and exposes with thin again after core plate surface forms LPR INK coatings Film, then make required part (the LPR INK irradiated by UV) that photo-hardening occur by irradiating UV.
And above-mentioned DF developments engineering is to retain DF corresponding with the shape of circuit pattern on copper foil in order to form circuit and show The engineering of shadow liquid, etching engineering are that the engineering for the foil section that DF developer solutions are not retained, glazier are removed using etching solution Cheng Ze is in the engineering for utilizing alkaline (Alkali) solution to remove the DF developer solutions being retained on copper foil after overetch engineering.
As described above, need periodically to perform multiple stages in whole printed circuit board (PCB) (PCB) manufacturing engineering Engineering, it is therefore desirable to substrate is transported between different engineerings, and during the transport of aforesaid substrate, typically utilizing folder Fixture is transferred by multiple rollers in the state of tool (Jig) clamping substrate, so as to be realized between each manufacturing engineering The transport of substrate.
For the representative prior art transferred between each manufacturing engineering to printed circuit board (PCB), including the great Han people State's registered patent the 10-1015937th (base plate transfer device), above-mentioned prior art can be by between each manufacturing engineerings Avoid substrate from being damaged along vertical direction transfer substrate, but also substrate can be supported by using elastomer and avoid base Plate surface is damaged.
Prior art as described above is used by mechanical arm to being carried out very with the substrate of the horizontal transfer of roller along transport Suction is attached and is vertically secured to it in fixture, then transfers the mode of fixture between each manufacturing engineering in the above-described state Each manufacturing engineering is performed successively.
But because single substrate is secured to fixture by above-mentioned prior art in feed arrangement using only a mechanical arm In and transported between each manufacturing engineering, so productivity and engineering can be caused because the feed time of substrate is long Yield relative drop, it is also possible to cause product fraction defective to raise because of there is error running during the transport of substrate.
Look-ahead technique document Prior Art
Patent document
(patent document 0001) Republic of Korea registered patent the 10-0944379th.
(patent document 0002) Republic of Korea registered patent the 10-1015937th.
(patent document 0003) Republic of Korea registered patent the 10-1553620th.
(patent document 0004) Republic of Korea registered patent the 10-1595008th.
(patent document 0005) Republic of Korea registered patent the 10-1643679th.
The content of the invention
It is an object of the invention to solve the above-mentioned charging dress for being used to transport printed circuit board (PCB) between each manufacturing engineering Present in the prior art put because caused by substrate feed time is long productivity and engineering yield decline and because Caused by error running product fraction defective raise the problem of and provide it is a kind of the dual installation in the both sides of feeder be used for base The double-type substrate feed system for the feed unit that plate is adsorbed and is secured in transfer fixture.
In addition, the purpose for being applicable embodiments of the invention be to provide it is a kind of by entering the feed unit of dual installation The both sides in material portion are alternately adsorbed to substrate and are secured in transfer fixture, so as to shorten the feed time of substrate And its productivity and engineering yield are further lifted whereby, while by preventing error running from reducing the double-type base of its fraction defective Plate feed system.
To achieve these goals, the present invention includes:
Base, it is horizontally mounted in the feeder both sides for putting into substrate;Roofbolt, it is installed on top and the edge of above-mentioned base Above-mentioned base transfer;Saddle, can be installed in a manner of upper and lower, front and rear transfer in above-mentioned roofbolt;1st cylinder, is installed on State in roofbolt and saddle, for transferring above-mentioned saddle up and down;Motor, it is installed in above-mentioned roofbolt and saddle, for front and rear Transfer above-mentioned saddle;Adsorption module, the side of above-mentioned saddle is rotatably installed on, for carrying out vacuum suction to substrate It is attached;And rotor, it is installed in above-mentioned saddle and adsorption module, for making above-mentioned adsorption module be rotated along both forward and reverse directions.
It is characterised by addition, being applicable embodiments of the invention:It is provided between roofbolt and saddle for above and below, is front and rear Transfer the 1st cylinder and motor of saddle.
It is characterised by addition, being applicable embodiments of the invention:Adsorption module is in the side of saddle in the form of rotatable Support is installed, the head of tabular is installed in the end of above-mentioned support, multiple absorption clampers are installed in the side on head.
It is characterised by addition, being applicable embodiments of the invention:Rotor is installed on the end of saddle and the branch of adsorption module Between frame, motor is installed on the end of saddle, and the rotary shaft rotated under the driving of motor is combined with support Installation.
Be applicable embodiments of the invention can be by being used for by means of feed roll in the dual installation in the both sides of feeder Input and the substrate of transfer are adsorbed and are secured to the feed unit in fixture, feed unit is replaced in the both sides of feeder Ground is adsorbed to substrate and is secured in transfer fixture, so as to shorten the feed time of substrate to greatest extent.
Can be by making the feed unit of dual installation replace in the both sides of feeder in addition, being applicable embodiments of the invention Ground is adsorbed to substrate and is secured in transfer fixture, so as to shorten the feed time of substrate and further carry whereby Its productivity and engineering yield are risen, while by preventing error running from reducing its fraction defective.
Brief description of the drawings
Fig. 1 is the installment state front elevation for being applicable the embodiment of the present invention.
Fig. 2 is the installment state pith side view for being applicable the embodiment of the present invention.
Fig. 3 is the pith front elevation for being applicable the feeder feed unit of the present invention.
Fig. 4 to Fig. 9 is the side view for being applicable the feed unit running status of the present invention.
Figure 10 is the pith front elevation for being applicable the base plate transfer state of the present invention.
Figure 11 is the pith front elevation for being applicable the adsorption module installment state of the present invention.
【Symbol description】
10:Base
20:Roofbolt
30:Saddle
40:1st cylinder
50:Motor
60:Adsorption module
61:Support
62:Head
63:Adsorb clamper
70:2nd cylinder
80:Rotor
100:Framework
200:Feeder
210:Feed roll
300:Fixture
Embodiment
Illustrated below in conjunction with the accompanying drawings to being applicable embodiments of the invention, its main composition includes:Base 10, for The both sides of feeder 200 of input substrate P are horizontally mounted;Roofbolt 20, it is installed on the top of above-mentioned base 10 and along above-mentioned base 10 transfers;Saddle 30, can be installed in a manner of upper and lower, front and rear transfer in above-mentioned roofbolt 20;1st cylinder 40, it is installed on above-mentioned In roofbolt 20 and saddle 30, for transferring above-mentioned saddle 30 up and down;Motor 50, it is installed on above-mentioned roofbolt 20 and saddle 30 In, for the front and rear above-mentioned saddle 30 of transfer;Adsorption module 60, the side of above-mentioned saddle 30 is rotatably installed on, used It is vacuum adsorbed in entering to substrate P;And rotor 80, it is installed in above-mentioned saddle 30 and adsorption module 60, for making above-mentioned suction Attached module 60 rotates along both forward and reverse directions.
In embodiments of the invention are applicable, for the feed unit being secured to substrate P in fixture 300, including:Base 10, it is installed on the both sides of feeder 200;Roofbolt 20, transferred along above-mentioned base 10;Saddle 30, can above-mentioned roofbolt about 20, Front and rear transfer;1st cylinder 40, for transferring above-mentioned saddle 30 up and down;Motor 50, for the front and rear above-mentioned saddle 30 of transfer; Adsorption module 60, it is vacuum adsorbed for entering to substrate P;Rotor 80, for making above-mentioned adsorption module 60 occur along both forward and reverse directions Rotation.
In addition, in embodiments of the invention are applicable, feeder 200 is used to put into substrate P and be transplanted on feed unit Installation site, as shown in Figure 1 to Figure 2, multiple feed rolls 210 are installed along horizontal direction, feed roll 210 is driving Rotated under the driving effect of the motor in portion, so as to which substrate P to be transplanted on to the position of feed unit.
In the main composition part of above-described embodiment, the base 10 of feed unit is formed in the both sides pair of feeder 200 Claim formed, above-mentioned base 10 as shown in Figure 1 to Figure 3, in two body side frames of the feeder 200 for being provided with multiple feed rolls 210 100 tops are formed with certain length.
Above-mentioned base 10 is fixedly installed to the top of framework 100 with the state of horizontal symmetrical respectively, opposite in both sides Medial surface alongst formed with guiding rail 11, combines in one side end and is provided with motor 12, and above-mentioned motor 12 The roofbolt 20 subsequently illustrated for the length direction transfer along base 10.
In addition, in the main composition part of above-described embodiment, roofbolt 20 is used to move to both forward and reverse directions along base 10, Above-mentioned roofbolt 20 as shown in Figures 1 to 4, is led with reference to the guiding for being installed to base 10 in a movable manner by transferring block respectively In rail 11, and it is vertically formed at the top of above-mentioned base 10.
While above-mentioned roofbolt 20 is in the guiding rail 11 for be installed in a movable manner base 10, spiral shell is being combined with When the transfer nut of silk is incorporated into bottom surface sections and the driving by the motor 12 of base 10, pass through the work for being rotated in nut of screw Moved under along guiding rail 11 to a certain side direction.
Above-mentioned roofbolt 20 forms the guide rail 21 of upper and lower vertical direction in its side side surface part, and the saddle 30 subsequently illustrated passes through Block is transferred in a manner of moving up and down respectively in connection with being installed in above-mentioned guide rail 21.
In addition, in the main composition part of above-described embodiment, saddle 30 be used on roofbolt 20 up and down, it is movable, As shown in Figures 4 to 6, the direction to be intersected vertically along the length direction with base 10 configures above-mentioned saddle 30, in both sides Roofbolt 20 is formed with opposite symmetrical shape.
Above-mentioned saddle 30 while being installed to by transferring block in a manner of moving up and down in the guide rail 21 of roofbolt 20, In its side, side surface part forms the guide rail 31 in anterior-posterior horizontal direction, can in the presence of the 1st cylinder 40 subsequently illustrated on move down It is dynamic, while can be moved forward and backward in the presence of the motor 50 subsequently illustrated.
In addition, in the main composition part of above-described embodiment, the 1st cylinder 40 is used to transfer saddle 30 in above-below direction, Above-mentioned 1st cylinder 40 as shown in Figures 2 to 6, the top of roofbolt 20, the piston rod quilt of up and down motion is installed on along vertical direction With reference to being installed in the transfer block that is configured in the guide rail 21 of saddle 30 and roofbolt 20.
The piston rod of above-mentioned 1st cylinder 40 moves up and down when air is injected by control valve, and piston rod can band The dynamic transfer block being configured in the guide rail 21 of saddle 30 and roofbolt 20 moves up and down, so that saddle 30 is in the 1st cylinder 40 In the presence of moved along above-below direction.
In addition, in the main composition part of above-described embodiment, motor 50 is used to transfer saddle 30 in fore-and-aft direction, Above-mentioned motor 50 as shown in Figures 2 to 6, is mountable in roofbolt 20 or saddle 30, when being installed in above-mentioned saddle 30, Alongst form under the driving of motor 50 screw rotated in the side of saddle 30, above-mentioned screw then by With reference to being installed in the transfer block that is configured in the guide rail 21 of saddle 30 and roofbolt 20.
Whereby, when screw rotates in the presence of motor 50, saddle 30 and bar are installed to by means of combining The effect of transfer block in the guide rail 21 of post 20, makes saddle 30 be moved on roofbolt 20 along fore-and-aft direction.
Further, it is also possible to replace motor 50 by installing cylinder, in this case, the He of saddle 30 can be installed on Cylinder and piston rod are installed between the transfer block in the guide rail 21 of roofbolt 20 so that saddle 30 on roofbolt 20 along front and back To movement.
In addition, in the main composition part of above-described embodiment, adsorption module 60 is vacuum adsorbed for entering to substrate P, Above-mentioned adsorption module 60 is provided with support 61 as shown in Fig. 3 to Fig. 7, in the side of saddle 30 in the form of rotatable, above-mentioned The end of support 61 is provided with the head 62 of tabular, and multiple absorption clampers 63 are provided with the side on head 62.
Above-mentioned adsorption module 60 carries out vacuum suction by adsorbing clamper 63 when air is injected by control valve to substrate P It is attached, although not shown, but the multiple air injection tubes being connected in absorption clamper 63 are installed in above-mentioned head 62.
In addition, in the main composition part of above-described embodiment, rotor 80 is used to make adsorption module 60 send out along both forward and reverse directions Raw rotation, above-mentioned rotor 80 are configured at the end of saddle 30 and the support of adsorption module 60 as shown in Fig. 5 to Fig. 9 and Figure 11 Between 61, motor is installed on the end of saddle 30, the rotary shaft 81 and support rotated under the driving of motor 61 combine installation.
When motor rotating operation in the range of 0-90 °, above-mentioned rotor 80 can make the head of adsorption module 60 along Horizontally or vertically state rotates to both forward and reverse directions.
In addition, being applicable embodiments of the invention as shown in Fig. 6 to Fig. 7 and Figure 11, pacify in the rotary shaft 81 of rotor 80 Casing 82, and guide rail 64 is installed in the support 61 of adsorption module 60, and meanwhile it is in a movable manner that above-mentioned guide rail 64 is embedding Enter into shell 82, and the 2nd cylinder 70 is installed between above-mentioned shell 82 and support 61.
In the above-described embodiments, when the 2nd cylinder 70 is started working, the guide rail 64 of support 61 is in the shell 82 of rotor 80 Move up and down, adsorption module 60 is more accurately moved up and down and absorption clamper 63 is entered substrate P vacuum adsorbed, from And prevent error running occur in the adsorption process of substrate P.
The course of work for being applicable embodiments of the invention of structure as described above is as follows.First, substrate P will be in feeder Put into and transfer along horizontal direction in the presence of multiple feed rolls 210 in 200, and by means of inductive pick-up in predetermined bits Put stopping.
After aforesaid substrate P stops in assigned position, as shown in Figures 2 and 4, the feed unit positioned at certain side starts Work, feed unit now are in plumbness in adsorption module 60 and start initial work in the state of with roofbolt 20 Make, as shown in figure 4, the occurred level of saddle 30 moves in the presence of motor 50, before adsorption module 60 is transplanted on Side.
Next as shown in Figures 5 to 7, adsorption module 60 is rotated to horizontality in the presence of rotor 80, 1st cylinder 40, which is started working, makes adsorption module 60 decline to close to the direction of substrate P, while the start-up operation of the 2nd cylinder 70 makes suction Attached module 60 realizes more accurate decline, substrate P is entered finally by absorption clamper 63 vacuum adsorbed.
Next, in the state of adsorption module 60 adsorbs to substrate P, the 2nd cylinder 70, the 1st cylinder 40, rotor 80th, motor 50 is reversely operated successively makes adsorption module 60 return to initial position, next as shown in Figure 10, base 10 Motor 12 start working, roofbolt 20 and adsorption module 60 are transplanted on to the direction of the position of fixture 300.
After the ad-hoc location where above-mentioned adsorption module 60 and substrate P are moved to fixture 300, saddle 30 or the 2 cylinders 70 start working adsorption module 60 and substrate P is moved to the side of fixture 300 so that substrate P stepped up in In the clip of fixture 300.
In the above-mentioned course of work, while substrate P is secured in fixture 300 by the feed unit of side, opposite side Feed unit start working and substrate P be secured in fixture 300, so as to realize that continuous feed operates, and clamping substrate P Fixture 300 by along the multiple transfer rollers 310 rotated in the presence of drive division 320, substrate P is transplanted on next In individual fabrication.
Whereby, be applicable embodiments of the invention can be by being used to inhale substrate in the dual installation in the both sides of feeder It is attached and be secured to the feed unit in fixture, make feed unit alternately substrate is adsorbed in the both sides of feeder and by its It is secured in transfer fixture, so as to shorten the feed time of substrate to greatest extent.
In addition, embodiments of the invention are applicable by making the feed unit of dual installation alternately be adsorbed simultaneously to substrate It is secured in transfer fixture, so as to shorten the feed time of substrate and further lift its productivity and engineering receipts whereby Rate, while by making adsorption module more accurately move up and down and be adsorbed to substrate, prevent the mistake in fill process Run and reduce its fraction defective.
It is illustrated above in conjunction with accompanying drawing to being applicable presently preferred embodiments of the present invention, but the invention is not limited in above-mentioned Embodiment, the personnel with the general knowledge of the technical field of the invention can be right without departing from the scope of the gist of the present invention This above-described embodiment carries out various changes.

Claims (5)

  1. A kind of 1. double-type substrate feed system, it is characterised in that including:
    Base (10), it is horizontally mounted in feeder (200) both sides for putting into substrate (P);
    Roofbolt (20), it is installed on the top of above-mentioned base (10) and is transferred along above-mentioned base (10);
    Saddle (30), can be installed in a manner of upper and lower, front and rear transfer in above-mentioned roofbolt (20);
    Adsorption module (60), the side of above-mentioned saddle (30) is rotatably installed on, for carrying out vacuum to substrate (P) Absorption;And
    Rotor (80), it is installed in above-mentioned saddle (30) and adsorption module (60), for making above-mentioned adsorption module (60) along positive and negative Direction rotates.
  2. 2. double-type substrate feed system according to claim 1, it is characterised in that:
    It is provided between roofbolt (20) and saddle (30) for the 1st cylinder (40) in above-below direction transfer saddle (30).
  3. 3. double-type substrate feed system according to claim 1, it is characterised in that:
    It is provided between roofbolt (20) and saddle (30) for the motor (50) in fore-and-aft direction transfer saddle (30).
  4. 4. double-type substrate feed system according to claim 1, it is characterised in that:
    Adsorption module (60),
    Support (61) is installed in the form of rotatable in the side of saddle (30), plate is installed in the end of above-mentioned support (61) The head (62) of shape, multiple absorption clampers (63) are installed in the side of head (62).
  5. 5. double-type substrate feed system according to claim 1, it is characterised in that:
    Rotor (80),
    It is configured between the end of saddle (30) and the support (61) of adsorption module (60), motor is installed on saddle (30) End, the rotary shaft rotated under the driving of motor (81) are combined with support (61) and installed.
CN201610893696.4A 2016-09-23 2016-10-13 Double-type substrate feed system Pending CN107867562A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020160122121A KR101902820B1 (en) 2016-09-23 2016-09-23 Double type system loading board
KR10-2016-0122121 2016-09-23

Publications (1)

Publication Number Publication Date
CN107867562A true CN107867562A (en) 2018-04-03

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ID=61761225

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610893696.4A Pending CN107867562A (en) 2016-09-23 2016-10-13 Double-type substrate feed system

Country Status (2)

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KR (1) KR101902820B1 (en)
CN (1) CN107867562A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114408576A (en) * 2022-01-27 2022-04-29 扬州大学 Synchronous clamping rotating device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155766A (en) * 1976-06-18 1977-12-24 Yamaha Motor Co Ltd Open loop control type industrial robot
JP2006327819A (en) * 2005-05-30 2006-12-07 Central Glass Co Ltd Transfer device and transfer method for glass pane
WO2008145368A2 (en) * 2007-05-29 2008-12-04 Teamtechnik Maschinen Und Anlagen Gmbh Solar cell production facility
CN202784807U (en) * 2011-12-19 2013-03-13 宝山钢铁股份有限公司 Saddle for transporting vertical steel coils
KR20140112140A (en) * 2013-03-11 2014-09-23 삼성디스플레이 주식회사 Substrate transferring device and substrate transferring system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100834319B1 (en) 2007-02-02 2008-06-02 주식회사 다한이엔지 Apparatus for transfer standard printing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155766A (en) * 1976-06-18 1977-12-24 Yamaha Motor Co Ltd Open loop control type industrial robot
JP2006327819A (en) * 2005-05-30 2006-12-07 Central Glass Co Ltd Transfer device and transfer method for glass pane
WO2008145368A2 (en) * 2007-05-29 2008-12-04 Teamtechnik Maschinen Und Anlagen Gmbh Solar cell production facility
CN202784807U (en) * 2011-12-19 2013-03-13 宝山钢铁股份有限公司 Saddle for transporting vertical steel coils
KR20140112140A (en) * 2013-03-11 2014-09-23 삼성디스플레이 주식회사 Substrate transferring device and substrate transferring system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114408576A (en) * 2022-01-27 2022-04-29 扬州大学 Synchronous clamping rotating device

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KR101902820B1 (en) 2018-10-01

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Effective date of abandoning: 20210312