CN107861249A - A kind of method that laser realizes Diode laser by lens group - Google Patents

A kind of method that laser realizes Diode laser by lens group Download PDF

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Publication number
CN107861249A
CN107861249A CN201711097795.2A CN201711097795A CN107861249A CN 107861249 A CN107861249 A CN 107861249A CN 201711097795 A CN201711097795 A CN 201711097795A CN 107861249 A CN107861249 A CN 107861249A
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China
Prior art keywords
lens
focus
laser
lens group
annulus
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曾帅
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Wuhan Mao Jie Photoelectric Technology Co Ltd
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Wuhan Mao Jie Photoelectric Technology Co Ltd
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Priority to CN201711097795.2A priority Critical patent/CN107861249A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses

Abstract

The present invention provides a kind of method that laser realizes Diode laser by lens group, belongs to optical technical field.The laser realizes that the method for Diode laser includes by lens group:The laser is collimated;According to the laser and lens group after collimation, some annulus are divided in the entrance pupil position of the lens group;By designing the laser of some annulus, several focus points are formed on the optical axis direction of the lens group;Several described focus points of convergence, form the depth of focus.Invention achieves in depth of focus length, the energy of laser being capable of equally distributed technique effect.

Description

A kind of method that laser realizes Diode laser by lens group
Technical field
The invention belongs to optical technical field, more particularly to a kind of laser realizes the method and use of Diode laser by lens group In the lens group for producing depth of focus.
Background technology
In terms of laser is widely used in processing, especially risen in laser boring, cutting, photoetching etc. very important Effect.Such as in laser drilling device, size and depth of focus after light beam focusing are the keys for determining drilling precision.Depth of focus refers to The abbreviation of the depth of focus, engineering material field are frequently referred to the depth of field, i.e., when using microscope, when focus is directed at jobbie, The each point being not only located in the plane can see, and up and down in certain thickness, can also be seen clearly in this plane Chu, this understands that the thickness of part is exactly depth of focus.
At present, realize that Diode laser mainly passes through axicon lens method or binary optical device (DOE) method, axicon lens method Be by light irradiation on tapered lens after, during realizing Diode laser, but carry out increasing depth of focus using axicon lens method, it may appear that Device fabrication is difficult and adjustment is difficult, meanwhile, the Energy distribution of light is uneven in depth of focus length;Binary optical device method is It is theoretical based on Diffraction of light wave, by light irradiation on binary optical instrument, to realize Diode laser, but use binary optical device method When carrying out increasing depth of focus, it may appear that processing difficulties and cost are higher, meanwhile, the Energy distribution of light is discontinuous, no in depth of focus length Uniformly.
In summary, the technology of Diode laser is realized existing, existed in depth of focus length, the Energy distribution of light is uneven Even technological deficiency.
The content of the invention
The technical problems to be solved by the invention are to realize the technology of Diode laser existing, in the depth of focus length, light Energy technological deficiency pockety be present.
In order to solve the above technical problems, in a first aspect, the invention provides a kind of laser to realize Diode laser by lens group Method, the laser realizes that the method for Diode laser includes by lens group:The laser is collimated;After collimation The laser and lens group, some annulus are divided in the entrance pupil position of the lens group;By designing described some The laser of annulus, several focus points are formed on the optical axis direction of the lens group;Several described focus points of convergence, are formed The depth of focus.
Further, the laser and lens group according to after collimation, is divided in the entrance pupil position of the lens group Some annulus:The focal range of the lens group is 5mm -50mm.
Further, the laser realizes that the method for Diode laser includes by lens group:The lens group includes several Spherical lens;Wherein, several the quantity is greater than 2 positive integer.
Further, the laser realizes that the method for Diode laser includes by lens group:The lens group includes several Non-spherical lens;Wherein, several the quantity is greater than 2 positive integer.
Further, the laser realizes that the method for Diode laser includes by lens group:The lens group includes several Spherical lens and several non-spherical lenses;Wherein, several the quantity is greater than 2 positive integer.
Further, the laser realizes that the method for Diode laser includes by lens group:Several spherical lenses Spacing is unequal, and the spacing of several non-spherical lenses is unequal;Wherein, between several described spherical lenses Away from unequal with the spacing of several non-spherical lenses.
Further, the laser realizes that the method for Diode laser includes by lens group:Some annulus are Concentric circles.
Further, the laser realizes that the method for Diode laser includes by lens group:The spacing of some annulus It is unequal.
Further, several focus points described in the convergence, forming the depth of focus includes:Several focus points Position differs.
Further, the laser realizes that the method for Diode laser includes by lens group:The length range of the depth of focus is 0.2mm—4mm。
Second aspect, present invention also offers a kind of lens group for being used to produce depth of focus, the lens group includes:First is saturating Mirror, for receiving the collimated light beam occurred by laser, the optical axis of first lens is primary optic axis;Second lens, are used for The first deviation light beam after first lens is received, the optical axis of second lens is the second optical axis;3rd lens, use In receiving the second deviation light beam after second lens, the optical axis of the 3rd lens is the 3rd optical axis;Wherein, pass through Some articles of the first annulus that the 3rd deviation light beam after 3rd lens is formed are concentric circles;Second lens are located at Between first lens and the 3rd lens, and the primary optic axis, second optical axis, the 3rd optical axis are positioned at same On straight line.
Optionally, the lens group for being used to produce depth of focus also includes:4th lens, it is saturating by the described 3rd for receiving The 3rd deviation light beam after mirror, the optical axis of the 4th lens is the 4th optical axis;Wherein, after the 4th lens Some the second annulus that four deviation light beams are formed are concentric circles;3rd lens are located at second lens and described Between four lens, and the primary optic axis, second optical axis, the 3rd optical axis, that the 4th optical axis is located at same is straight On line.
Optionally, the lens group for being used to produce depth of focus also includes:5th lens, it is saturating by the described 4th for receiving The 4th deviation light beam after mirror, the optical axis of the 5th lens is the 5th optical axis;Wherein, after the 5th lens Some articles of the 3rd annulus that five deviation light beams are formed are concentric circles;4th lens are located at the 3rd lens and described Between five lens, and the primary optic axis, second optical axis, the 3rd optical axis, the 4th optical axis, the 5th optical axis It is located on the same line.
Optionally, the focal range of first lens is -100mm -100mm.
Optionally, the focal range of second lens is 5mm -100mm.
Optionally, the focal range of the 3rd lens is 5mm -100mm.
Optionally, the focal range of the 4th lens is 5mm -100mm.
Optionally, the focal range of the 4th lens is 5mm -100mm;The focal range of 5th lens is 5mm—50mm。
Optionally, first lens are non-spherical lenses;Second lens are non-spherical lenses;3rd lens It is non-spherical lens.
Optionally, the 4th lens are non-spherical lenses;5th lens are non-spherical lenses.
Beneficial effect:
The present invention provides a kind of laser and realizes the method for Diode laser and lens group for producing depth of focus by lens group, In practical operation, after being collimated to the laser, if being divided by the laser after collimation in lens group entrance pupil position Dry bar annulus;By some annulus of above-mentioned formation, several focus points are formed along the optical axis direction of the lens group;Will The depth of focus is formed after several described described focus point convergences.Because the laser of some annulus is in the optical axis side of lens group To several focus points can be formed so that the depth of focus that the convergence of several focus points is formed afterwards, can be obtained in focal depth range It is distributed than more uniform laser.So as to reach in depth of focus length, the energy of laser being capable of equally distributed technique effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to institute in embodiment The accompanying drawing needed to use is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present invention Example, for those of ordinary skill in the art, on the premise of not paying creative work, can also be obtained according to these accompanying drawings Obtain other accompanying drawings.
Fig. 1 is the method flow diagram that a kind of laser provided in an embodiment of the present invention realizes Diode laser by lens group;
Fig. 2 is a kind of schematic diagram for being used to produce the lens group of depth of focus provided in an embodiment of the present invention;
Fig. 3 is annulus schematic diagram at a kind of entrance pupil for the lens group for producing depth of focus provided in an embodiment of the present invention;
Brief description of the drawings:
10-the first lens, the 20-the second lens, the 30-the three lens, 40-focus, 50-annulus.
Embodiment
The method of Diode laser and lens group for producing depth of focus are realized by lens group the invention discloses a kind of laser, In practical operation, after being collimated to the laser, divided by the laser after collimation in lens group entrance pupil position Some annulus 50;By some annulus 50 of above-mentioned formation, it is poly- to form several along the optical axis direction of the lens group Focus 40;The depth of focus is formed after several described described focus points 40 are converged.Because the laser of some annulus 50 exists The optical axis direction of lens group can form several focus points 40 so that and several focus points 40 converge the depth of focus formed afterwards, It can obtain being distributed than more uniform laser in focal depth range.So as to reach in depth of focus length, the energy of laser can be uniform The technique effect of distribution.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained, belong to what the present invention protected Scope;Involved "and/or" keyword wherein in this implementation, represent and or two kinds of situations, in other words, the present invention is implemented A and/or B mentioned by example, illustrate two kinds of A and B, A or B situations, describe three kinds of states present in A and B, such as A and/or B, represent:Only including A does not include B;Only including B does not include A;Including A and B.
Meanwhile in the embodiment of the present invention, when component is referred to as " being fixed on " another component, it can be directly at another On component or there may also be component placed in the middle.When a component is considered as " connection " another component, it can be direct It is connected to another component or may be simultaneously present component placed in the middle.When a component is considered as " being arranged at " another group Part, it can be set directly on another component or may be simultaneously present component placed in the middle.Made in the embodiment of the present invention Term " vertically ", " horizontal ", "left", "right" and similar statement are merely for purposes of illustration, and are not intended to The limitation present invention.
Embodiment one,
Fig. 1 is referred to, Fig. 1 is the method flow diagram that a kind of laser realizes Diode laser by lens group.The embodiment of the present invention The method that a kind of one laser provided realizes Diode laser by lens group, the method that the laser realizes Diode laser by lens group Including:
Step S100, the laser is collimated.
Specifically, collimation can be the light for instigating the light of diverging to turn into collimation, i.e., be parallel between holding light. The laser is collimated, that is, it is all parallel to allow between each laser beam.
Laser can be produced using laser, laser is the device that can launch laser.Such as use gas laser Device, solid state laser, semiconductor laser and dye laser produce laser.And caused laser is collimated. Optical maser wavelength after being collimated can be 266nm, 355nm, 532nm, 1030nm, 1064nm etc., for optical maser wavelength Can be unrestricted.When the wavelength of laser is 1064nm, the Entry pupil diameters of laser can be 10mm, the focal length of lens group now Can be 10mm.The entrance pupil position of lens can be before lens group wherein in lens group, can also be among lens group
Step S200, according to the laser and lens group after collimation, in the entrance pupil position of the lens group, division is some Bar annulus 50;Some annulus 50 can all be concentric circles, and the spacing of some annulus 50 can be all unequal, The focal range of the lens group can be 5mm -50mm.
The lens group can include several spherical lenses;Wherein, the quantity of several spherical lenses is greater than 2 Positive integer spherical lens.Or the lens group can include several non-spherical lenses;It is wherein, described that several are non- The quantity of spherical lens is greater than 2 positive integer non-spherical lens.
The lens group can also include several spherical lenses and several non-spherical lenses simultaneously;Wherein, it is if described The quantity of dry spherical lens is greater than 2 positive integer spherical lens, and the quantity of several non-spherical lenses is greater than 2 Positive integer non-spherical lens.
The spacing of several spherical lenses is unequal, and the spacing of several non-spherical lenses not phase Deng;Wherein, the spacing of several spherical lenses and the spacing of several non-spherical lenses are unequal.
Fig. 1 is referred to, Fig. 1 is the method flow diagram that a kind of laser realizes Diode laser by lens group.Can be by above-mentioned Step S100, after being collimated to the laser, the laser after being collimated is injected in lens group, is produced in lens group Raw some annulus 50;And caused some annulus 50 can all be concentric circles.The spacing of some annulus 50 Can be all unequal, but the spacing of some annulus 50 can also be all equal.The number range of some annulus 50 can be 2 To 100, you can to refer to 2 annulus, 50,3 annulus 50 etc..The focal range of lens group is 5mm to 50mm.
It can be entirely spherical lens (abbreviation spherical mirror) in lens group, non-spherical lens (abbreviation aspheric can also be included Face mirror).It can be entirely aspherical mirror in spherical mirror, or lens group that can be entirely in lens group.Or in lens group Spherical mirror and aspherical mirror can be included.
In order to which lens group is explained in detail, following three kinds of embodiments are now provided and are described in detail:
The first embodiment, is entirely spherical mirror in lens group, and the quantity of spherical mirror can be several in lens group, The quantity of several spherical lenses refers to the positive integer spherical lens more than 2.Assuming the quantity of spherical mirror in lens group is A, then A is more than 2, and A is positive integer.The quantity of spherical mirror can be 3,4,5 etc. in lens group.When ball in lens group When the quantity of face mirror is 5 (A=5), in step S300, by some annulus 50, in the optical axis of the lens group The most pronounced effects of several focus points 40 are formed on direction;I.e. in step S400, by converging several described focusing Point 40, highly uniform come the energy difference of the depth of focus formed, so as to reach in depth of focus length, the energy of laser can be equal The technique effect of even distribution.
Second of embodiment, it is entirely aspherical mirror in lens group, if the quantity of aspherical mirror can be in lens group Dry, the quantity of several non-spherical lenses refers to the positive integer non-spherical lens more than 2.Assume spherical mirror in lens group Quantity be B, then B is more than 2, and B is positive integer.When the quantity of aspherical mirror in lens group is 5 (B=5), in step In S300, by some annulus 50, the effect of several focus points 40 is formed on the optical axis direction of the lens group Fruit is most notable;I.e. in step S400, by converging several described focus points 40, distinguish come the energy of the depth of focus formed Highly uniform, so as to reach in depth of focus length, the energy of laser being capable of equally distributed technique effect.
The third embodiment, lens group include spherical mirror and aspherical mirror, it is assumed that spherical mirror and aspheric in lens group The quantity of face mirror can be C, and the quantity of wherein spherical mirror is C1, and the quantity of aspherical mirror is C2 (C=C1+C2).Several balls The quantity of face lens is C1, then C1 is more than or equal to 1, and C1 is positive integer;The quantity of several non-spherical lenses is C2, then C2 is more than or equal to 1, and C2 is positive integer.And C is more than 2, and C is positive integer.When in lens group spherical mirror and When the quantity of aspherical mirror is 5 (C=5), can now include in lens group 1 spherical lens and 4 non-spherical lenses or 2 spherical lenses of person and 3 non-spherical lenses or 3 spherical lenses and 2 non-spherical lenses or 4 spherical lenses and 1 non-spherical lens.In step S300, by some annulus 50, institute's shape on the optical axis direction of the lens group Into the most pronounced effects of several focus points 40;I.e. in step S400, by converging several described focus points 40, to be formed The depth of focus energy difference it is highly uniform, so as to reach in depth of focus length, the energy of laser being capable of equally distributed skill Art effect.
The distance between several spherical lenses can be unequal, but can also be all equal.And several are aspherical The distance between lens can also be unequal, but can also be all equal.The distance between several described spherical lenses and institute Stating the distance between several non-spherical lenses can also be all unequal.
Step S300, by some annulus 50, several focusing are formed on the optical axis direction of the lens group Point 40;The position of several focus points 40 can differ.
Continuing with referring to Fig. 1, Fig. 1 is the method flow diagram that a kind of laser realizes Diode laser by lens group.In above-mentioned step In rapid S200, the lens in lens group can be sequentially distributed along the direct of travel of laser, for example, laser direct of travel according to It is secondary that the first lens 10, the second lens 20, the lens of the 3rd lens 30 the 4th, the 5th lens, the 6th lens etc. are distributed with.In step It is saturating by the first lens 10 in this lens group, the second lens 20, the 3rd lens 30 the 4th by the laser of collimation in S100 After mirror, the 5th lens, the 6th lens, several annulus 50 can be divided in the entrance pupil radial direction of lens group.It can draw Divide 2 annulus 50 of annulus 50,6 of annulus 50,5 of annulus 50,4 of annulus 50,3 etc..
Every annulus 50 can form a corresponding focus 40, and each annulus 50 focuses on it in the position of focus 40 Point 40 has unique corresponding relation.I.e. first annulus 50 forms first focus 40, Article 2 annulus 50 forms second Jiao Point 40, Article 3 annulus 50 form the 3rd focus 40, Article 4 annulus 50 forms the 4th focus 40, the shape of Article 5 annulus 50 Into the 5th focus 40.First focus, 40, second focuses 40, the 3rd focus 40, the 4th focus 40, the 5th focus 40 position can be different from;Or in first focus, 40, second focuses 40, the 3rd focus 40, the 4th focus 40th, in the 5th focus 40, can there is that the position of two or three focuses 40 is identical, such as first focus 40 and the 3rd Jiao The position of point 40 is identical.
The optical axis direction of the lens group can refer to the primary optical axis of lens in lens group along the direction of advance of laser.Example As being entirely convex lens in lens group, the primary optical axis of all convex lens can overlap, i.e., the primary optical axis and ground of each convex lens Face is parallel, and the primary optical axis of each convex lens overlaps.
First annulus 50 forms first focus 40, Article 2 annulus 50 forms second focus 40, Article 3 annulus 50 form the 3rd focus 40, Article 4 annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th focus 40 It each may lie in along on the optical axis direction of lens group.That is first focus, 40, second focuses 40, the 3rd focus 40, Four focuses 40, the position Europe of the 5th focus 40 are on the optical axis of lens group, and positioned at the optical axis direction along lens group Side on.So as to reach in depth of focus length, the energy of laser being capable of equally distributed technique effect.
Step S400, several described focus points 40 are converged, form the depth of focus.
The length range of the depth of focus can be 0.2mm -4mm.
Continuing with referring to Fig. 1, Fig. 1 is the method flow diagram that a kind of laser realizes Diode laser by lens group.Depth of focus can be with It is referred to as pouring depth, depth of focus is the abbreviation of the depth of focus 40, is referred to as the depth of field in engineering material field, that is, is using microscope When, when focus 40 is directed at jobbie, each point being not only located in the plane can be seen, and in this plane In upper and lower certain thickness, it can also see clearly, this understands that the thickness of part is exactly depth of focus.
Several focus points 40 can be formed on the optical axis direction of the lens group by above-mentioned steps S300.Then Make first focus, 40, second focuses 40, the 3rd focus 40, the 4th focus 40, the 5th focus 40 along lens Depth of focus is pooled on the optical axis direction of group, the length of the depth of focus converged can be 0.2mm -4mm, that is, assume converged Jiao Deep length is W, then W span can be 0.2mm≤W≤4mm.
If the length of depth of focus is between 0.2mm -4mm, caused depth of focus has larger practical value.Work as W During < 0.2mm, the depth of focus converged is without actual application value;As W < 4mm, the depth of focus converged is also without actual application value. And step S400, by converging several described focus points 40, it can be formed at the focus 40 of lens group along optical axis direction One long depth of focus, this is equivalent to increasing Rayleigh range, and focus on light beam also very little, is advantageous to lead in Laser cutting In domain, meet the demand of different Laser cuttings.
The present invention provides a kind of method that laser realizes Diode laser by lens group, in practical operation, to the laser After being collimated, some annulus 50 are divided in lens group entrance pupil position by the laser after collimation;Pass through above-mentioned shape Into some annulus 50, form several focus points 40 along the optical axis direction of the lens group;Will be described described in several The depth of focus is formed after the convergence of focus point 40.Because the laser of some annulus 50 can be formed in the optical axis direction of lens group Several focus points 40 so that several focus points 40 converge the depth of focus formed afterwards, and it is equal to obtain comparison in focal depth range Even laser distribution.So as to reach in depth of focus length, the energy of laser being capable of equally distributed technique effect.
Embodiment two,
The method that a kind of laser provided based on above-described embodiment one realizes Diode laser by lens group, the present invention are implemented Example two provides a kind of lens group for being used to produce depth of focus, and the lens group for being used to produce depth of focus includes:First lens 10, second Lens 20, the 3rd lens 30, the 4th lens and the 5th lens.Fig. 2 and Fig. 3 are referred to, Fig. 2 is provided in an embodiment of the present invention one Kind is used for the schematic diagram for producing the lens group of depth of focus, and Fig. 3 is a kind of lens for being used to produce depth of focus provided in an embodiment of the present invention The annulus schematic diagram of group.Now the first lens 10, the second lens 20, the 3rd lens 30, the 4th lens and the 5th lens are entered respectively Row describes in detail:
For the first lens 10:
First lens 10 can be used for receiving the collimated light beam occurred by laser, and the optical axises of first lens 10 is the One optical axis.The focal range of first lens 10 can be -100mm -100mm;First lens 10 can be aspherical Lens.
Fig. 2 is referred to, Fig. 2 is a kind of schematic diagram for being used to produce the lens group of depth of focus provided in an embodiment of the present invention.It is accurate It can be directly the light for instigating the light of diverging to turn into collimation, i.e., be parallel between holding light.The laser is collimated, It is all parallel to allow between each laser beam.
Laser can be produced using laser, laser is the device that can launch laser.Such as use gas laser Device, solid state laser, semiconductor laser and dye laser produce laser.And caused laser is collimated. Optical maser wavelength after being collimated can be 266nm, 355nm, 532nm, 1030nm, 1064nm etc., for optical maser wavelength Can be unrestricted.The collimated light beam that laser occurs can be emitted directly toward in the first lens 10.
The focal range of first lens 10 can be -100mm to 100mm.The focal length for assuming the first lens 10 is X1, Then -100mm≤X1, and X1≤100mm.Primary optic axis can be the primary optical axis of the first lens 10.
First lens 10 can be that spherical lens (abbreviation spherical mirror) or non-spherical lens are (referred to as aspherical Mirror).But according to actual effect, when the first lens 10 are non-spherical lenses, be advantageous in depth of focus length, enable the energy of laser Enough it is uniformly distributed.
For the second lens 20:
Second lens 20 can be used for receiving the first deviation light beam after first lens 10, second lens 20 optical axis is the second optical axis.Second lens 20 are described between first lens 10 and the 3rd lens 30 The focal range of second lens 20 can be 5mm -100mm;Second lens 20 can be non-spherical lens.
Continuing with referring to Fig. 2, Fig. 2 is a kind of signal for being used to produce the lens group of depth of focus provided in an embodiment of the present invention Figure.After collimated light beam projects from the first lens 10, it can inject in the second lens 20.First deviation light beam is from first The light beam projected in lens 10.Second optical axis can be the primary optical axis of the second lens 20.The focal range of second lens 20 can be with It is 5mm to 100mm.The focal length for assuming the second lens 20 is X2, then 5mm≤X2, and X2≤100mm.Second optical axis can be with It is the primary optical axis of the second lens 20.Second lens 20 can be between first lens 10 and the 3rd lens 30, i.e., Light beam sequentially passes through the first lens 10, the second lens 20, the 3rd lens 30.
Second lens 20 can be spherical mirror or aspherical mirror.But according to actual effect, the second lens 20 and When one lens 10 are all non-spherical lenses, be advantageous in depth of focus length, the energy of laser is uniformly distributed.
For the 3rd lens 30:
3rd lens 30 can be used for receiving the second deviation light beam after second lens 20, the 3rd lens 30 optical axis is the 3rd optical axis.The focal range of 3rd lens 30 can be 5mm -100mm, and the 3rd lens 30 can To be non-spherical lens, some articles of the first annulus 50 that the 3rd deviation light beam after the 3rd lens 30 is formed can Think concentric circles;And the primary optic axis, second optical axis, the 3rd optical axis are located on the same line, described Three lens 30 can be between second lens 20 and the 4th lens.
Continuing with referring to Fig. 2, Fig. 2 is a kind of signal for being used to produce the lens group of depth of focus provided in an embodiment of the present invention Figure.Second deviation light beam can refer to the light beam projected from the second lens 20.Light beam can inject the first lens 10, successively Two lens 20, the 3rd lens 30.3rd optical axis can be the primary optical axis of the 3rd lens 30.3rd lens 30 can be spherical mirror, It can also be aspherical mirror.But according to actual effect, the first lens 10, the second lens 20 and the 3rd lens 30 are all aspherical During mirror, be advantageous in depth of focus length, the energy of laser is uniformly distributed.The focal range of 3rd lens 30 can be 5mm to 100mm.The focal length for assuming the 3rd lens 30 is X3, then 5mm≤X3, and X3≤100mm.
In the lens group (referred to as 10 groups of the first lens) being made up of the first lens 10, the second lens 20 and the 3rd lens 30 Lens in lens group can be sequentially distributed along the direct of travel of laser, such as be sequentially distributed in the direct of travel of laser One lens 10, the second lens 20, the 3rd lens 30.Pass through the first lens 10 in this lens group, by the laser of collimation After two lens 20, the 3rd lens 30, several annulus 50 can be divided in the entrance pupil radial direction of lens group.It can divide 2 annulus 50 of annulus 50,6 of annulus 50,5 of annulus 50,4 of annulus 50,3 etc..
Fig. 2 and Fig. 3 are referred to, Fig. 2 is a kind of signal for being used to produce the lens group of depth of focus provided in an embodiment of the present invention Figure, Fig. 3 are a kind of annulus schematic diagrames for being used to produce the lens group of depth of focus provided in an embodiment of the present invention.It is saturating by the described 3rd The 3rd deviation light beam after mirror 30 can form some articles of the first annulus 50, and some first annulus 50 can all be same The heart is justified.That is in some the first annulus 50, every annulus 50 can form a corresponding focus 40, each He of annulus 50 It has unique corresponding relation in the position focus point 40 of focus 40.I.e. first annulus 50 forms first focus 40, Article 2 Annulus 50 forms second focus 40, Article 3 annulus 50 forms the 3rd focus 40, Article 4 annulus 50 forms the 4th Jiao Point 40, Article 5 annulus 50 form the 5th focus 40.First focus, 40, second focuses 40, the 3rd focus the 40, the 4th Individual focus 40, the position of the 5th focus 40 can be different from;Or in first focus, 40, second focuses the 40, the 3rd In individual focus 40, the 4th focus 40, the 5th focus 40, can there is that the position of two or three focuses 40 is identical, such as One focus 40 is identical with the position of the 3rd focus 40.
Several focuses 40 that some first annulus 50 are formed each may lie in the primary optical axis of 10 groups of the first lens In, and several focuses 40 can be set along the direction of advance of laser.If such as it is entirely convex lens in 10 groups of the first lens Mirror, the primary optical axis of all convex lens can overlap, i.e., the primary optical axis of each convex lens and ground are parallel, and each convex lens The primary optical axis of mirror all overlaps.
First article of annulus 50 can form first focus 40, Article 2 annulus 50 can form second focus 40, Three articles of annulus 50 form the 3rd focus 40, Article 4 annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th Individual focus 40 each may lie in along on the optical axis direction of 10 groups of the first lens.That is first focus, 40, second focuses 40, Three focuses 40, the 4th focus 40, the position of the 5th focus 40 are on the optical axis of 10 groups of the first lens, and positioned at along On the side of the optical axis direction of first 10 groups of lens.So as to reach in depth of focus length, the energy of laser can be equally distributed Technique effect.
For the 4th lens:
4th lens can be used for receiving the 3rd deviation light beam after the 3rd lens 30, the 4th lens Optical axis is the 4th optical axis.
Some articles of the second annulus 50 that the 4th deviation light beam after the 4th lens is formed can be concentric Circle;And the primary optic axis, second optical axis, the 3rd optical axis, the 4th optical axis can be located at same straight line On.4th lens can be between the 3rd lens 30 and the 5th lens, the focal length model of the 4th lens It can be 5mm -100mm to enclose;4th lens are non-spherical lenses.
Continuing with referring to Fig. 2 and Fig. 3, Fig. 2 is a kind of lens group for being used to produce depth of focus provided in an embodiment of the present invention Schematic diagram, Fig. 3 are a kind of annulus schematic diagrames for being used to produce the lens group of depth of focus provided in an embodiment of the present invention.3rd deviation light Beam can refer to the light beam projected from the 3rd lens 30.Light beam can inject the first lens 10, the second lens the 20, the 3rd successively The lens of lens 30 and the 4th.4th optical axis can be the primary optical axis of the 4th lens.
4th lens can be spherical lens (abbreviation spherical mirror) or non-spherical lens (abbreviation aspherical mirror). But according to actual effect, when the first lens 10, the second lens 20, the 3rd lens 30 and the 4th lens are all non-spherical lenses, have Beneficial in depth of focus length, the energy of laser is set to be uniformly distributed.The focal range of 4th lens can be 5mm to 100mm. The focal length for assuming the 4th lens is X4, then 5mm≤X4, and X4≤100mm.
(referred to as second is saturating for the lens group being made up of the first lens 10, the second lens 20, the 3rd lens 30 and the 4th lens 20 groups of mirror) in lens in lens group can be sequentially distributed along the direct of travel of laser, such as laser direct of travel according to It is secondary that the first lens 10, the second lens 20, the 3rd lens 30, the 4th lens are distributed with.Pass through this lens group by the laser of collimation In the first lens 10, the second lens 20, the 3rd lens 30, after the 4th lens, can be with the entrance pupil radial direction of lens group Divide several annulus 50.2 annulus 50 of annulus 50,6 of annulus 50,5 of annulus 50,4 of annulus 50,3 can be divided Deng.
The 4th deviation light beam after the 4th lens can form some articles of the first annulus 50, described some First annulus 50 can all be concentric circles.That is in some the first annulus 50, every annulus 50 can be formed corresponding to one Focus 40, each annulus 50 have unique corresponding relation with it in the position focus point 40 of focus 40.That is first shape of annulus 50 Into first focus 40, Article 2 annulus 50 form second focus 40, Article 3 annulus 50 forms the 3rd focus the 40, the 4th Article annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th focus 40.First focus, 40, second focuses 40th, the 3rd focus 40, the 4th focus 40, the position of the 5th focus 40 can be different from;Or in first focus 40th, in second focus 40, the 3rd focus 40, the 4th focus 40, the 5th focus 40, can there are two or three focuses 40 position is identical, such as first focus 40 is identical with the position of the 3rd focus 40.
Several focuses 40 that some first annulus 50 are formed each may lie in the primary optical axis of 20 groups of the second lens In, and several focuses 40 can be set along the direction of advance of laser.If such as it is entirely convex lens in 20 groups of the second lens Mirror, the primary optical axis of all convex lens can overlap, i.e., the primary optical axis of each convex lens and ground are parallel, and each convex lens The primary optical axis of mirror all overlaps.
First article of annulus 50 can form first focus 40, Article 2 annulus 50 can form second focus 40, Three articles of annulus 50 form the 3rd focus 40, Article 4 annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th Individual focus 40 each may lie in along on the optical axis direction of 20 groups of the second lens.That is first focus, 40, second focuses 40, Three focuses 40, the 4th focus 40, the position Europe of the 5th focus 40 are on the optical axis of 20 groups of the second lens, and are located at edge On the side for the optical axis direction of 20 groups of the second lens.So as to reach in depth of focus length, the energy of laser can be uniformly distributed Technique effect.
For the 5th lens:
5th lens can be used for receiving the 4th deviation light beam after the 4th lens, the light of the 5th lens Axle is the 5th optical axis.The focal range of 5th lens can be 5mm -50mm, and the 5th lens can be aspherical Mirror.Some articles of the 3rd annulus 50 that the 5th deviation light beam after the 5th lens is formed can be concentric circles;And And the primary optic axis, second optical axis, the 3rd optical axis, the 4th optical axis, the 5th optical axis are located at same On straight line.
Specifically, the 5th lens can be that spherical lens (abbreviation spherical mirror) or non-spherical lens are (referred to as non- Spherical mirror).But according to actual effect, the first lens 10, the second lens 20, the 3rd lens 30, the 4th lens and the 5th lens are all When being non-spherical lens, be advantageous in depth of focus length, the energy of laser is uniformly distributed.The focal range of 5th lens Can be 5mm to 50mm.The focal length for assuming the 5th lens is X5, then 5mm≤X5, and X5≤50mm.4th deviation light beam The light beam projected from the 4th lens can be referred to.Light beam can inject the first lens 10, the second lens 20, the 3rd lens successively 30th, the 4th lens and the 5th lens.5th optical axis can be the primary optical axis of the 5th lens.
The lens group being made up of the first lens 10, the second lens 20, the 3rd lens 30, the 4th lens and the 5th lens Lens in (referred to as 30 groups of the 3rd lens) in lens group can be sequentially distributed along the direct of travel of laser, such as in laser Direct of travel has been sequentially distributed the first lens 10, the second lens 20, the 3rd lens 30, the 4th lens, the 5th lens.By collimation Laser by the first lens 10 in this lens group, the second lens 20, the 3rd lens 30, the 4th lens, the 5th lens after, Several annulus 50 can be divided in 30 groups of entrance pupil radial direction of the 3rd lens.2 annulus, 50,3 annulus can be divided 50th, 4 annulus 50 of annulus 50,6 of annulus 50,5 etc..
The 5th deviation light beam after the 5th lens can form some articles of the first annulus 50, described some First annulus 50 can all be concentric circles.That is in some the first annulus 50, every annulus 50 can be formed corresponding to one Focus 40, each annulus 50 have unique corresponding relation with it in the position focus point 40 of focus 40.That is first shape of annulus 50 Into first focus 40, Article 2 annulus 50 form second focus 40, Article 3 annulus 50 forms the 3rd focus the 40, the 4th Article annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th focus 40.First focus, 40, second focuses 40th, the 3rd focus 40, the 4th focus 40, the position of the 5th focus 40 can be different from;Or in first focus 40th, in second focus 40, the 3rd focus 40, the 4th focus 40, the 5th focus 40, can there are two or three focuses 40 position is identical, such as first focus 40 is identical with the position of the 3rd focus 40.
Several focuses 40 that some articles of first annulus 50 are formed each may lie in the primary optical axis of 30 groups of the 3rd lens In, and several focuses 40 can be set along the direction of advance of laser.If such as it is entirely convex lens in 30 groups of the 3rd lens Mirror, the primary optical axis of all convex lens can overlap, i.e., the primary optical axis of each convex lens and ground are parallel, and each convex lens The primary optical axis of mirror all overlaps.
First article of annulus 50 can form first focus 40, Article 2 annulus 50 can form second focus 40, Three articles of annulus 50 form the 3rd focus 40, Article 4 annulus 50 forms the 4th focus 40, Article 5 annulus 50 forms the 5th Individual focus 40 each may lie in along on the optical axis direction of 30 groups of the 3rd lens.That is first focus, 40, second focuses 40, Three focuses 40, the 4th focus 40, the position Europe of the 5th focus 40 are on the optical axis of 30 groups of the 3rd lens, and are located at edge On the side for the optical axis direction of 30 groups of the 3rd lens.So as to reach in depth of focus length, the energy of laser can be uniformly distributed Technique effect.
Provided by the present invention a kind of in producing the lens group of depth of focus, lens group can to include above-mentioned first lens 10th, the second lens 20, the 3rd lens 30, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th saturating can also be included Mirror etc..Lens numbers included by lens group may be greater than 2 positive integer.Included lens can be whole in lens group It is spherical lens, non-spherical lens can also be included.Can be entirely in lens group can be with spherical lens, or lens group Entirely non-spherical lens.Or spherical lens and non-spherical lens can be included in lens group.
The present invention provides a kind of lens group for being used to produce depth of focus, in practical operation, the collimated light beam of laser generation It can be received by the first lens 10, collimated light beam carries out deviation when being projected from the first lens 10 and forms the first deviation light beam.First Deviation light beam can be received by the second lens 20, and the first deviation light beam carries out deviation formation second when being projected from the second lens 20 inclined Refractive power beam.Second deviation light beam can be received by the 3rd lens 30, and the second deviation light beam forms when being projected from the 3rd lens 30 Three deviation light beams, the 3rd deviation light beam form some articles of the first annulus 50 when projecting three lens 30.Due to first saturating The primary optic axis of mirror 10, the second optical axis of the second lens 20, the 3rd optical axis of the 3rd lens 30 are all located on same straight line, and And some the first annulus 50 are all concentric circles.Some articles of the first annulus 50 will be upwardly formed several along the side of the 3rd optical axis Focus point 40;After several focus points 40 convergence, it just can obtain being distributed than more uniform laser in focal depth range.So as to Reach in depth of focus length, the energy of laser being capable of equally distributed technique effect.
It should be noted last that above embodiment is merely illustrative of the technical solution of the present invention and unrestricted, Although the present invention is described in detail with reference to example, it will be understood by those within the art that, can be to the present invention Technical scheme modify or equivalent substitution, without departing from the spirit and scope of technical solution of the present invention, it all should cover Among scope of the presently claimed invention.

Claims (6)

1. a kind of method that laser realizes Diode laser by lens group, it is characterised in that methods described includes:
The laser is collimated;
According to the laser and lens group after collimation, some annulus are divided in the entrance pupil position of the lens group;
By some annulus, several focus points are formed on the optical axis direction of the lens group;
Several described focus points of convergence, form the depth of focus.
2. the method that Diode laser is realized by lens group according to the laser described in claim 1, it is characterised in that described according to accurate The laser and lens group after straight, dividing some annulus in the entrance pupil position of the lens group includes:
The focal range of the lens group is 5mm -50mm.
3. the method that Diode laser is realized by lens group according to the laser described in claim 2, it is characterised in that:
The lens group includes several spherical lenses;
Wherein, several the quantity is greater than 2 positive integer.
4. the method that Diode laser is realized by lens group according to the laser described in claim 2, it is characterised in that:
The lens group includes several non-spherical lenses;
Wherein, several the quantity is greater than 2 positive integer.
5. a kind of lens group for being used to produce depth of focus, it is characterised in that the lens group includes:
First lens, for receiving the collimated light beam occurred by laser, the optical axis of first lens is primary optic axis;
Second lens, for receiving the first deviation light beam after first lens, the optical axises of second lens is the Two optical axises;
3rd lens, for receiving the second deviation light beam after second lens, the optical axises of the 3rd lens is the Three optical axises;
Wherein, some articles of the first annulus that the 3rd deviation light beam after the 3rd lens is formed are concentric circles;Institute The second lens are stated between first lens and the 3rd lens, and it is the primary optic axis, second optical axis, described 3rd optical axis is located on the same line.
6. according to the lens group for being used to produce depth of focus described in claim 5, it is characterised in that described to be used to produce the saturating of depth of focus Microscope group also includes:
4th lens, for receiving the 3rd deviation light beam after the 3rd lens, the optical axises of the 4th lens is the Four optical axises;
Wherein, some articles of the second annulus that the 4th deviation light beam after the 4th lens is formed are concentric circles;Institute The 3rd lens are stated between second lens and the 4th lens, and it is the primary optic axis, second optical axis, described 3rd optical axis, the 4th optical axis are located on the same line.
CN201711097795.2A 2017-11-09 2017-11-09 A kind of method that laser realizes Diode laser by lens group Pending CN107861249A (en)

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Publication number Priority date Publication date Assignee Title
JP2000005892A (en) * 1998-06-25 2000-01-11 Advanced Materials Processing Inst Kinki Japan Laser processing
US20090168190A1 (en) * 2005-10-17 2009-07-02 Panasonic Corporation Imaging Device
CN102886609A (en) * 2012-08-27 2013-01-23 中国科学院半导体研究所 Multi-focus femtosecond laser scribing method applied to separation of light emitting diode (LED) device
KR20150014142A (en) * 2013-07-29 2015-02-06 에이피시스템 주식회사 Device for processing brittle substrate using aspherical lens having multi focus
CN104914573A (en) * 2015-05-15 2015-09-16 江苏大学 Laser device of long-focal depth and small-focal spot lens focusing system
CN105891916A (en) * 2016-06-26 2016-08-24 上海嘉强自动化技术有限公司 Aspherical mirror based on axicon and focusing mirror features
CN206153761U (en) * 2016-09-26 2017-05-10 华中科技大学 Multifocus laser separation laminated glass device
CN106695113A (en) * 2016-12-08 2017-05-24 华中科技大学 Axial bifocus lens
CN207396882U (en) * 2017-11-09 2018-05-22 武汉茂捷光电科技有限公司 A kind of lens group for being used to generate depth of focus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000005892A (en) * 1998-06-25 2000-01-11 Advanced Materials Processing Inst Kinki Japan Laser processing
US20090168190A1 (en) * 2005-10-17 2009-07-02 Panasonic Corporation Imaging Device
CN102886609A (en) * 2012-08-27 2013-01-23 中国科学院半导体研究所 Multi-focus femtosecond laser scribing method applied to separation of light emitting diode (LED) device
KR20150014142A (en) * 2013-07-29 2015-02-06 에이피시스템 주식회사 Device for processing brittle substrate using aspherical lens having multi focus
CN104914573A (en) * 2015-05-15 2015-09-16 江苏大学 Laser device of long-focal depth and small-focal spot lens focusing system
CN105891916A (en) * 2016-06-26 2016-08-24 上海嘉强自动化技术有限公司 Aspherical mirror based on axicon and focusing mirror features
CN206153761U (en) * 2016-09-26 2017-05-10 华中科技大学 Multifocus laser separation laminated glass device
CN106695113A (en) * 2016-12-08 2017-05-24 华中科技大学 Axial bifocus lens
CN207396882U (en) * 2017-11-09 2018-05-22 武汉茂捷光电科技有限公司 A kind of lens group for being used to generate depth of focus

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