CN107835555A - A kind of plasma surface processing device - Google Patents

A kind of plasma surface processing device Download PDF

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Publication number
CN107835555A
CN107835555A CN201711165141.9A CN201711165141A CN107835555A CN 107835555 A CN107835555 A CN 107835555A CN 201711165141 A CN201711165141 A CN 201711165141A CN 107835555 A CN107835555 A CN 107835555A
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CN
China
Prior art keywords
nozzle
processing device
accommodating cavity
surface processing
cylindricality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711165141.9A
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Chinese (zh)
Inventor
蔡卫
罗弦
黄明柱
何鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Cheng Cheng Feng Co Ltd
Original Assignee
Shenzhen Cheng Cheng Feng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Cheng Cheng Feng Co Ltd filed Critical Shenzhen Cheng Cheng Feng Co Ltd
Priority to CN201711165141.9A priority Critical patent/CN107835555A/en
Publication of CN107835555A publication Critical patent/CN107835555A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

The invention discloses a kind of plasma surface processing device, including plasma generator sleeve pipe, electrode and nozzle, include accommodating cavity in the plasma generator sleeve pipe, the electrode is arranged in the accommodating cavity;The nozzle is arranged at the accent of the accommodating cavity;Connection accommodating cavity and extraneous groove are provided with the nozzle, the groove includes the inner tank mouths towards accommodating cavity and the exterior notch towards the external world, the exterior notch includes the strip crevice and cylindricality through hole that are connected, and strip crevice is parallel with cylindricality through hole and nozzle is run through in equal edge perpendicular to the direction of groove depth.The plasma surface processing device can form a uniform closed area on pending product, and treatment effect is obviously improved, and process range exceeds well over the 5mm of prior art, disclosure satisfy that the production requirement of existing big workpiece up to 10 30mm.

Description

A kind of plasma surface processing device
Technical field
The present invention relates to plasma apparatus technical field, more particularly to a kind of plasma surface processing device.
Background technology
Plasma due to its good mobility and, diffusivity, electric conductivity and thermal conductivity and be widely used in each Field, from our daily life to industry, agricultural, environmental protection, military affairs, aerospace, the energy, celestial body etc., it has very heavy The application value wanted, the use of plasma gun are also more and more.But existing plasma gun is mostly such as Patent No. Shown in 201610639035.9 Chinese patent, the nozzle of spray gun is round nozzle, and plasma can only be from the circle of centre In shape aperture out, the maximum processing diameter of plasma gun only has 5mm, can not meet the production requirement of larger workpiece.
The content of the invention
The technical problems to be solved by the invention are:A kind of plasma surface processing device is provided, there is larger processing Scope, the production requirement of existing big workpiece can be met.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is:
A kind of plasma surface processing device, including plasma generator sleeve pipe, electrode and nozzle, the plasma occur Include accommodating cavity in device sleeve pipe, the electrode is arranged in the accommodating cavity;The nozzle is arranged at the accent of the accommodating cavity Place;Connection accommodating cavity and extraneous groove are provided with the nozzle, the groove includes the inner tank mouths and court towards accommodating cavity Exterior notch outwardly, the exterior notch include the strip crevice and cylindricality through hole being connected, strip crevice and cylindricality through hole phase Nozzle is run through in parallel and equal edge perpendicular to the direction of groove depth.
The beneficial effects of the present invention are:The nozzle of the plasma surface processing device is changed to bar shaped by existing circular hole formula Slot-shaped open flume type, and set cylindricality through hole to be connected with strip crevice, it ensure that the working air current come out from nozzle is formed One uniform fan-shaped effect, can form a uniform closed area, treatment effect obtains substantially on pending product Lifting, and process range exceeds well over the 5mm of prior art, disclosure satisfy that the production requirement of existing big workpiece up to 10-30mm.
Brief description of the drawings
Fig. 1 is the Structure explosion diagram of the plasma surface processing device of the embodiment of the present invention;
Fig. 2 is the sectional view of the plasma surface processing device of the embodiment of the present invention;
Label declaration:
1st, plasma generator sleeve pipe;2nd, electrode;3rd, nozzle;31st, strip crevice;32nd, cylindricality through hole;4th, nozzle guard Set;5th, nozzle presses finger ring.
Embodiment
To describe the technology contents of the present invention, the objects and the effects in detail, below in conjunction with embodiment and coordinate attached Figure is explained.
The design of most critical of the present invention is:The outlet of nozzle 3 is set on slot type, fluting is included through nozzle 3 Strip crevice 31 and cylindricality through hole 32.
It refer to Fig. 1 and Fig. 2, a kind of plasma surface processing device, including plasma generator sleeve pipe 1, the and of electrode 2 Nozzle 3, the plasma generator sleeve pipe 1 is interior to include accommodating cavity, and the electrode 2 is arranged in the accommodating cavity;The nozzle 3 It is arranged at the accent of the accommodating cavity;Connection accommodating cavity and extraneous groove are provided with the nozzle 3, the groove includes Inner tank mouths towards accommodating cavity and the exterior notch towards the external world, the exterior notch includes the strip crevice 31 being connected and cylindricality is led to Hole 32, strip crevice 31 is parallel with cylindricality through hole 32 and nozzle 3 is run through in equal edge perpendicular to the direction of groove depth.
It was found from foregoing description, the beneficial effects of the present invention are:The nozzle of the plasma surface processing device is by existing Circular hole formula be changed to the open flume type of strip crevice shape, and set cylindricality through hole to be connected with strip crevice, ensure that and go out from nozzle The working air current come forms a uniform fan-shaped effect, and a uniform closed area can be formed on pending product, Treatment effect is obviously improved, and process range exceeds well over the 5mm of prior art, disclosure satisfy that existing big up to 10-30mm The production requirement of workpiece.
Further, the strip crevice 31 is located at the outermost of the nozzle 3, and the cylindricality through hole 32 is arranged at described The inner side of strip crevice 31.
Further, the internal diameter of the cylindricality through hole 32 is more than the width of the strip crevice 31.
Further, the cylindricality through hole 32 is cylinder.
Further, in addition to nozzle guard set 4, the top of the nozzle guard set 4 are sheathed on the chamber of the accommodating cavity It is intraoral;The nozzle 3 is sheathed in the nozzle guard set 4.
Seen from the above description, the nozzle guard set can be protected to nozzle, avoid nozzle and plasma generator Sleeve pipe directly contacts.
Further, in addition to nozzle presses finger ring 5, and the top of the nozzle guard set 4 includes two layers of step surface, described The accent of accommodating cavity is provided with stopper section, and the nozzle presses finger ring 5 and is located between upper strata step surface and the stopper section, institute State nozzle 3 and be arranged at lower floor's step surface and nozzle and press between finger ring 5.
Seen from the above description, the nozzle presses finger ring and nozzle is protected in the axial direction.
Further, the nozzle guard set 4 passes through screw connection with the plasma generator sleeve pipe 1.
Further, the area of the inner tank mouths is more than the area of the exterior notch.
Seen from the above description, larger inner tank mouths are easy to plasma to enter in nozzle, and the area of exterior notch diminishes, can Plasma is set to be sprayed with higher intensity.
Further, in addition to rotating driving device, the rotating driving device are connected to the nozzle 3.
Seen from the above description, nozzle can carry out 360 ° of rotations to adapt to the demand of production.
Embodiment one
Fig. 1 and Fig. 2 is refer to, embodiments of the invention one are:A kind of plasma surface processing device, including plasma Generator sleeve pipe 1, electrode 2 and nozzle assembly, the plasma generator sleeve pipe 1 is interior to include accommodating cavity, and the electrode 2 is arranged at In the accommodating cavity;The nozzle assembly is arranged at the accent of the accommodating cavity.
The nozzle assembly includes nozzle guard set 4, nozzle presses finger ring 5 and nozzle 3, the top of the nozzle guard set 4 End is sheathed in the accent of the accommodating cavity, and the nozzle presses finger ring 5 and nozzle 3 is sheathed in the nozzle guard set 4. Indent step is provided with the accent of the accommodating cavity, the step surface of the indent step forms a stopper section, the backstop Portion can be limited nozzle assembly in the axial direction.The top of the nozzle guard set 4 includes two layers of step surface, and the nozzle is tight Pressure finger ring 5 is located between upper strata step surface and the stopper section, and it is tight that the nozzle 3 is arranged at lower floor's step surface and nozzle Between pressure finger ring 5.The nozzle guard set 4 passes through screw connection with the plasma generator sleeve pipe 1.During installation, can first by Electrode 2 is fixed in plasma generator sleeve pipe 1, then nozzle 3 is packed into nozzle guard set 4, then nozzle is pressed finger ring 5 Pack into nozzle guard set 4, wherein, nozzle presses the upper top surface that finger ring 5 is located at nozzle 3, finally nozzle guard set 4, nozzle Press the nozzle assembly that finger ring 5 and nozzle 3 form to be connected through a screw thread with plasma generator sleeve pipe 1, that is, complete assembling.
Connection accommodating cavity and extraneous groove are provided with the nozzle 3, the groove axially penetrates through nozzle 3 along nozzle 3. The groove includes the inner tank mouths towards accommodating cavity and the exterior notch towards the external world, and the area of the inner tank mouths is more than the water jacket The area of mouth, the area of inner tank mouths are substantially equal to the area of accommodating cavity accent.The exterior notch includes the strip crevice being connected 31 and cylindricality through hole 32, strip crevice 31 is parallel with cylindricality through hole 32 and nozzle is run through in equal edge perpendicular to the direction of groove depth 3, the strip crevice 31 has certain depth.The strip crevice 31 is located at the outermost of the nozzle 3, and the cylindricality is led to Hole 32 is arranged at the inner side of the strip crevice 31.The internal diameter of the cylindricality through hole 32 is more than the width of the strip crevice 31. Preferably, the cylindricality through hole 32 is cylinder, naturally it is also possible to is the other shapes such as square column type.
Optionally, the plasma surface processing device in the present embodiment can also include rotating driving device, the rotation Drive device is connected to the nozzle 3, for driving nozzle 3 to carry out 360 ° of rotations.
In summary, the nozzle 3 of plasma surface processing device provided by the invention is changed to bar shaped by existing circular hole formula The open flume type of the shape of gap 31, and set cylindricality through hole 32 to be connected with strip crevice 31, it ensure that the work gas come out from nozzle 3 Stream forms a uniform fan-shaped effect, a uniform closed area can be formed on pending product, treatment effect obtains To being obviously improved, and process range exceeds well over the 5mm of prior art, disclosure satisfy that the production of existing big workpiece up to 10-30mm Demand.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair The equivalents that bright specification and accompanying drawing content are made, or the technical field of correlation is directly or indirectly used in, similarly include In the scope of patent protection of the present invention.

Claims (9)

1. a kind of plasma surface processing device, it is characterised in that described including plasma generator sleeve pipe, electrode and nozzle Include accommodating cavity in plasma generator sleeve pipe, the electrode is arranged in the accommodating cavity;The nozzle is arranged at the appearance Put at the accent of chamber;Connection accommodating cavity and extraneous groove are provided with the nozzle, the groove is included towards accommodating cavity Inner tank mouths and the exterior notch towards the external world, the exterior notch include the strip crevice and cylindricality through hole that are connected, strip crevice with Cylindricality through hole is parallel and nozzle is run through in equal edge perpendicular to the direction of groove depth.
2. plasma surface processing device as claimed in claim 1, it is characterised in that the strip crevice is located at the nozzle Outermost, the cylindricality through hole is arranged at the inner side of the strip crevice.
3. plasma surface processing device as claimed in claim 1, it is characterised in that the cylindricality through hole is cylinder.
4. plasma surface processing device as claimed in claim 1, it is characterised in that the internal diameter of the cylindricality through hole is more than institute State the width of strip crevice.
5. plasma surface processing device as claimed in claim 1, it is characterised in that also including nozzle guard set, the spray The top of mouth protective case is sheathed in the accent of the accommodating cavity;The nozzle cage is in nozzle guard set.
6. plasma surface processing device as claimed in claim 5, it is characterised in that also press finger ring including nozzle, it is described The top of nozzle guard set includes two layers of step surface, and the accent of the accommodating cavity is provided with stopper section, and the nozzle presses finger ring Be located between upper strata step surface and the stopper section, the nozzle be arranged at lower floor's step surface and nozzle press finger ring it Between.
7. plasma surface processing device as claimed in claim 5, it is characterised in that nozzle guard set and the grade from Electronic generator sleeve pipe passes through screw connection.
8. plasma surface processing device as claimed in claim 1, it is characterised in that the area of the inner tank mouths is more than described The area of exterior notch.
9. plasma surface processing device as claimed in claim 1, it is characterised in that described also including rotating driving device Rotating driving device is connected to the nozzle.
CN201711165141.9A 2017-11-21 2017-11-21 A kind of plasma surface processing device Pending CN107835555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711165141.9A CN107835555A (en) 2017-11-21 2017-11-21 A kind of plasma surface processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711165141.9A CN107835555A (en) 2017-11-21 2017-11-21 A kind of plasma surface processing device

Publications (1)

Publication Number Publication Date
CN107835555A true CN107835555A (en) 2018-03-23

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Country Status (1)

Country Link
CN (1) CN107835555A (en)

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0845929A1 (en) * 1996-11-29 1998-06-03 Tec.Mo S.r.l. Plasma arc cutting torch
JP2001035835A (en) * 1999-07-16 2001-02-09 Sachiko Okazaki Plasma treatment and plasma treatment device
JP2002066432A (en) * 2000-09-04 2002-03-05 Tokyo Ohka Kogyo Co Ltd Coating apparatus
JP2002086275A (en) * 2000-09-12 2002-03-26 Hitachi Via Mechanics Ltd Positioning jig for electrode
US6423144B1 (en) * 1996-08-07 2002-07-23 Matsushita Electric Industrial Co., Ltd. Coating apparatus and coating method
JP2005224830A (en) * 2004-02-12 2005-08-25 Daihen Corp Plasma welding torch
KR20060133376A (en) * 2005-06-20 2006-12-26 엘지.필립스 엘시디 주식회사 Coating apparatus and method of fabricating liquid crystal display device using the same
JP3151143U (en) * 2009-03-31 2009-06-11 韶陽科技股▲分▼有限公司 Low temperature plasma generator
JP2010082538A (en) * 2008-09-30 2010-04-15 Seiko Epson Corp Surface treatment apparatus
KR20100120590A (en) * 2009-05-06 2010-11-16 한국기계연구원 Treatment device using plasma
KR20110012669A (en) * 2009-07-31 2011-02-09 주식회사 펨빅스 Supersonic slit spray nozzle and method for making the same
CN102016117A (en) * 2008-03-14 2011-04-13 蒂肖有限公司 Method for preparing electrically conducting materials and devices including same
JP2011156498A (en) * 2010-02-02 2011-08-18 Tokyo Electron Ltd Slit nozzle, slit nozzle cleaning device, and slit nozzle cleaning method
JP2012038839A (en) * 2010-08-05 2012-02-23 Panasonic Corp Plasma processing apparatus and method
US8267884B1 (en) * 2005-10-07 2012-09-18 Surfx Technologies Llc Wound treatment apparatus and method
JP2014187017A (en) * 2014-03-04 2014-10-02 Panasonic Corp Manufacturing method of electronic device
CN105364279A (en) * 2014-08-06 2016-03-02 张建生 A plasma torch head
CN105848816A (en) * 2013-11-12 2016-08-10 依赛彼集团公司 Plasma arc torch and method for assembling and disassembling a plasma arc torch
DE102015121253A1 (en) * 2015-12-07 2017-06-08 Plasmatreat Gmbh Apparatus for generating an atmospheric plasma jet for treating the surface of a workpiece

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6423144B1 (en) * 1996-08-07 2002-07-23 Matsushita Electric Industrial Co., Ltd. Coating apparatus and coating method
EP0845929A1 (en) * 1996-11-29 1998-06-03 Tec.Mo S.r.l. Plasma arc cutting torch
JP2001035835A (en) * 1999-07-16 2001-02-09 Sachiko Okazaki Plasma treatment and plasma treatment device
JP2002066432A (en) * 2000-09-04 2002-03-05 Tokyo Ohka Kogyo Co Ltd Coating apparatus
JP2002086275A (en) * 2000-09-12 2002-03-26 Hitachi Via Mechanics Ltd Positioning jig for electrode
JP2005224830A (en) * 2004-02-12 2005-08-25 Daihen Corp Plasma welding torch
KR20060133376A (en) * 2005-06-20 2006-12-26 엘지.필립스 엘시디 주식회사 Coating apparatus and method of fabricating liquid crystal display device using the same
US8267884B1 (en) * 2005-10-07 2012-09-18 Surfx Technologies Llc Wound treatment apparatus and method
CN102016117A (en) * 2008-03-14 2011-04-13 蒂肖有限公司 Method for preparing electrically conducting materials and devices including same
JP2010082538A (en) * 2008-09-30 2010-04-15 Seiko Epson Corp Surface treatment apparatus
JP3151143U (en) * 2009-03-31 2009-06-11 韶陽科技股▲分▼有限公司 Low temperature plasma generator
KR20100120590A (en) * 2009-05-06 2010-11-16 한국기계연구원 Treatment device using plasma
KR20110012669A (en) * 2009-07-31 2011-02-09 주식회사 펨빅스 Supersonic slit spray nozzle and method for making the same
JP2011156498A (en) * 2010-02-02 2011-08-18 Tokyo Electron Ltd Slit nozzle, slit nozzle cleaning device, and slit nozzle cleaning method
JP2012038839A (en) * 2010-08-05 2012-02-23 Panasonic Corp Plasma processing apparatus and method
CN105848816A (en) * 2013-11-12 2016-08-10 依赛彼集团公司 Plasma arc torch and method for assembling and disassembling a plasma arc torch
JP2014187017A (en) * 2014-03-04 2014-10-02 Panasonic Corp Manufacturing method of electronic device
CN105364279A (en) * 2014-08-06 2016-03-02 张建生 A plasma torch head
DE102015121253A1 (en) * 2015-12-07 2017-06-08 Plasmatreat Gmbh Apparatus for generating an atmospheric plasma jet for treating the surface of a workpiece

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