JP2011156498A - Slit nozzle, slit nozzle cleaning device, and slit nozzle cleaning method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently clean the inside of the slit of a slit nozzle. <P>SOLUTION: This slit nozzle cleaning device 70 includes a yarn like scrape-out member 72 traversing the discharge passage 32b of the slit nozzle 32 from the cavity 32c of the slit nozzle 32 to the discharge port 32a thereof so that the tip part 72a thereof extends out of the discharge port 32a, a traction scanning unit 56 holding the tip part 72a of the yarn like scrape-out member 72 in a detachable manner outside the slit nozzle 32 and drawing the yarn like scrape-out member 72 while sliding the same through the discharge passage 32b in the longitudinal direction (Y-direction) of the slit nozzle 32 so as to scrape out the solid matter in the discharge passage 32b to perform scanning and a tensile part 74 connected to the yarn like scrape-out member 72 at the outside position of the slit nozzle 32 higher than the cavity 32c and permitting the movement of the yarn like scrape-out member 72 while applying tension to the yarn like scrape-out member 72 against the traction force of the traction scanning unit 56. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a slit nozzle used for spinless coating processing and the like, a slit nozzle cleaning device for cleaning the inside of the slit of the slit nozzle, and a slit nozzle cleaning method.

  In a photolithography process in a manufacturing process of a flat panel display (FPD) such as an LCD, a long slit nozzle having a slit-shaped discharge port is moved relative to a target substrate such as a glass substrate, A spinless coating method in which a processing solution such as a resist solution is applied onto a substrate is often used.

  In a typical spinless coating method, the slit nozzle is moved in one horizontal direction perpendicular to the longitudinal direction of the nozzle while the resist solution is ejected from the slit nozzle onto the substrate fixedly placed on the stage. Let If it does so, the resist liquid which overflowed on the board | substrate from the discharge port of the slit nozzle will extend flat back of a nozzle, and a resist coating film will be formed in the one surface of a board | substrate (for example, patent document 1).

  As another typical spinless coating method, a levitation transport method is often used in which a substrate is transported in a horizontal direction (stage longitudinal direction) while being floated on the stage. In this method, a long slit nozzle installed above the levitation stage discharges a resist solution in a strip shape toward the substrate passing directly below it, so that the substrate from the front end to the rear end in the substrate transport direction. A resist coating film is formed on the entire surface of the substrate (for example, Patent Document 2).

Japanese Patent Laid-Open No. 10-156255 Japanese Patent Laid-Open No. 2005-236092

  In the slit nozzle used for the spinless coating process as described above, the gap of the slit for discharging the resist solution is very narrow (usually 100 μm or less), so that the resist is gelled in the resist supply tube or the slit nozzle. The solidified product is easily clogged in the slit, and if the resist solidified product is clogged somewhere in the slit, the outflow of the resist solution (that is, supply to the substrate) is lacking at that point, and it is straight on the resist coating film in the coating scanning direction. An elongated streaky coating unevenness occurs.

  Conventionally, in order to prevent the resist solidified material from being clogged in the slit of the slit nozzle, a cleaning operation for removing the resist solidified material adhering to the slit inner wall of the slit nozzle has been performed manually. In such a slit nozzle cleaning operation, a thin plate material made of metal or resin is inserted into the slit of the slit nozzle from the outside (nozzle discharge port side), and the thin plate material is slid in the longitudinal direction of the nozzle in the slit to scrape the solidified material. It was like that. However, as described above, the slit gap of this type of slit nozzle is usually as fine as 100 μm or less, and it is very troublesome and time-consuming to insert and clean a thin plate material therein. It has also become a factor of lowering the maintainability or operating rate of the coating apparatus.

  The present invention solves the above-described problems of the prior art, and provides a slit nozzle, a slit nozzle cleaning device, and a slit nozzle cleaning method capable of efficiently cleaning the inside of the slit of the slit nozzle.

  The slit nozzle cleaning device of the present invention includes an inlet for introducing a processing liquid, a cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization, and a slit-like discharge for discharging the processing liquid in a strip shape. A slit nozzle cleaning device for cleaning the inside of a slit of a long slit nozzle having an outlet and a slit-like discharge passage connecting the cavity and the discharge port, wherein the discharge passage of the slit nozzle is connected to the cavity A thread-like scraping member whose front end crosses from the discharge port to the outside of the discharge port, and holds the tip of the thread-like scraping member outside the slit nozzle, In order to scrape the solidified material, the thread-like scraping member is pulled and scanned in the discharge passage while sliding in the longitudinal direction of the slit nozzle. A scanning unit; and a pulling unit that is coupled to the thread-like scraping member inside or outside the slit nozzle, and that allows the movement while applying tension to the thread-like scraping member against the pulling force of the pulling scanning unit. .

  The slit nozzle cleaning method of the present invention includes an inlet for introducing a processing liquid, a cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization, and a slit-like discharge for discharging the processing liquid in a strip shape. A slit nozzle cleaning method for cleaning the inside of a slit of a long slit nozzle having an outlet and a slit-like discharge passage connecting the cavity and the discharge port, wherein the discharge passage of the slit nozzle is connected to the cavity A thread-like scraping member that traverses from the discharge port to the discharge port, the tip of which is outside the discharge port is charged into the slit nozzle, and is coupled to the thread-like scraping member in the slit nozzle, and the traction scanning unit A pulling portion that allows movement while applying tension to the thread scraping member against the pulling force of The filamentous scraped holds the tip of the member, to perform the scraping of solid of the discharge passage, pulling scanned while sliding in the longitudinal direction of the slit nozzle the thread raking member in the discharge passage.

  The slit nozzle of the present invention includes an inlet for introducing a processing liquid, a cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization, and a slit-shaped outlet for discharging the processing liquid in a strip shape. A slit-like discharge passage that connects the cavity and the discharge port, and a thread-like scraping that traverses the discharge passage of the slit nozzle from the cavity to the discharge port, the tip of which is outside the discharge port A member, and a tension portion that is coupled to the thread-like scraping member in the slit nozzle and allows the movement while applying tension to the thread-like scraping member.

  In the present invention, a thread-like scraping member is previously prepared in the discharge passage of the slit nozzle, and a pulling portion coupled to the thread-like scraping member is provided inside or outside the slit nozzle. The slit nozzle cleaning device of the present invention further includes a traction scanning unit for traction scanning the thread-like scraping member.

  When cleaning the slit nozzle, the traction scanning unit in the slit nozzle cleaning device (which can also be manually operated by the slit nozzle cleaning method) holds the tip of the thread scraping member and slides in the longitudinal direction of the slit nozzle. Tow while scanning. At that time, a tension is applied to the thread-like scraping member by the pulling portion coupled to the other end of the thread-like scraping member resisting the pulling force of the pulling scanning portion. The pulling portion allows the movement of the filamentous scraping member while resisting the pulling force of the pulling scanning unit, so that the filamentous scraping member slides in the discharge passage in a tight state and adheres to the discharge passage. Scrub off the solidified solution.

  In the present invention, it is not necessary to insert a scraping member from the outside into the discharge port of the slit nozzle during nozzle cleaning, and the nozzle cleaning operation can be started quickly and smoothly. In addition, the slit nozzle cleaning device of the present invention eliminates the need for manual work, and also automates and standardizes the cleaning or cleaning work inside the slit of the slit nozzle to improve work efficiency and significantly reduce the required time. realizable.

  According to the present invention, the inside of the slit of the slit nozzle can be efficiently cleaned by the configuration and operation as described above.

It is a perspective view which shows one structural example of the resist coating device which can apply the slit nozzle of this invention, a slit nozzle cleaning apparatus, or a slit nozzle cleaning method. It is sectional drawing which shows a mode that a resist coating film is formed on the internal structure of a slit nozzle in the said resist coating apparatus, and a board | substrate. It is a front view which shows a mode that the resist coating film is formed on the external appearance structure of a slit nozzle in the said resist coating device, and a board | substrate. It is a partial cross section front view which shows the structure of the nozzle refresh part with which the said resist coating apparatus is equipped. It is a perspective view which shows the structure of the nozzle cleaning / cleaning part integrated in the said nozzle refresh part. It is sectional drawing which shows the structure of the principal part of the slit nozzle cleaning apparatus in 1st Embodiment. It is a partial cross section enlarged front view which shows the structure of the principal part in the said slit nozzle cleaning apparatus. It is a partial cross section front view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a partial cross section front view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a disassembled perspective view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a partial cross section front view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a partial cross section front view which shows the structure and effect | action of the principal part of the slit nozzle cleaning apparatus in one modification of the said 1st Embodiment. It is a partial cross section front view which shows the structure of the principal part of the slit nozzle cleaning process in 2nd Embodiment. It is a figure which shows the structure of the tension | pulling part used by the said slit nozzle cleaning process, and the attachment structure in a slit nozzle. It is a partial cross section front view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a disassembled perspective view which shows one step of the nozzle cleaning operation | movement in the said slit nozzle cleaning apparatus. It is a partial cross section front view which shows the structure and effect | action of the principal part of the slit nozzle cleaning apparatus in one modification of the said 2nd Embodiment. It is a figure which shows the update method of the thread-like scraping member in the modification of the said 2nd Embodiment.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 shows a configuration example of a resist coating apparatus to which the slit nozzle, the slit nozzle cleaning device or the slit nozzle cleaning method of the present invention can be applied.

  The resist coating apparatus includes a levitation stage 10 that floats a substrate to be processed, such as a glass substrate G for FPD, in the air by gas pressure, and a substrate G that is floating in the air on the levitation stage 10. ), A slit nozzle 32 that supplies a resist solution to the upper surface of the substrate G that is transported on the floating stage 10, and a nozzle refresh unit 42 that refreshes the slit nozzle 32 between coating processes. Have.

  A number of gas injection holes 12 for injecting a predetermined gas (for example, air) upward are provided on the upper surface of the levitation stage 10, and the substrate G is placed on the upper surface of the stage by the pressure of the gas injected from the gas injection holes 12. It is configured to rise to a certain height.

  The substrate transport mechanism 20 includes a pair of guide rails 22A and 22B extending in the X direction across the levitation stage 10, a pair of sliders 24 that can reciprocate along the guide rails 22A and 22B, and the levitation stage 10. A substrate holding member (not shown) such as a suction pad provided on the slider 24 so as to detachably hold both side ends of the substrate G is provided. The slider 24 is moved by a linear movement mechanism (not shown). By moving in the transport direction (X direction), the substrate G is floated and transported on the floating stage 10.

  The resist nozzle 32 traverses the top of the levitation stage 10 in the horizontal direction (Y direction) orthogonal to the transport direction (X direction), and is slit-shaped with respect to the upper surface (surface to be processed) of the substrate G passing immediately below the resist nozzle 32. The resist solution R is discharged in a strip shape from the discharge port. The slit nozzle 32 is configured to be movable up and down so as to be movable in the vertical direction (Z direction) integrally with a nozzle support member 28 that supports the nozzle by a nozzle lifting mechanism 26 including a ball screw mechanism, a guide member, and the like. Yes. The slit nozzle 32 is connected via a resist supply pipe 30 to a resist supply unit (not shown) including a resist solution container and a liquid feed pump.

  A nozzle refresh unit 42 is provided above the levitation stage 10 adjacent to the slit nozzle 32. Details of the nozzle refresh unit 42 will be described later with reference to FIGS.

  Here, the resist coating operation in this resist coating apparatus will be described. First, a substrate G is carried into a carry-in area set on the front end side of the levitation stage 10 through a sorter mechanism (not shown) from a previous unit, for example, a thermal processing unit (not shown), and is waiting there. The slider 24 holds and receives the substrate G. On the levitation stage 10, the substrate G receives the pressure of gas (for example, high-pressure air) ejected from the gas ejection holes 12 and keeps the levitation state in a substantially horizontal posture.

  In this way, the substrate G moves in a horizontal posture at a constant speed in the transport direction (X direction), and at the same time, the slit nozzle 32 discharges the resist solution R toward the substrate G directly below at a predetermined pressure or flow rate in a belt shape. As shown in FIG. 2, a coating film RM of a resist solution having a uniform film thickness is formed from the front end side to the rear end side of the substrate G.

Incidentally, the peripheral portions G _M of the substrate G is a non-product area which is not the device is formed, as shown in FIGS. 2 and 3, the conveyance direction (X direction) as well as the transport direction (X direction) perpendicular also in the lateral width direction (Y direction), the accuracy of the film thickness of the resist coating film RM in the non-product region G _M is adapted to be tolerated.

  When the rear end of the substrate G passes under the slit nozzle 32, a resist coating film RM is formed on the entire surface of the substrate. Subsequently, the substrate G is then levitated and conveyed on the levitating stage 10 by the slider 24, and a rear stage unit (not shown) from a carry-out area set at the rear end of the levitating stage 10 via a sorter mechanism (not shown). ).

  As shown in FIGS. 2 and 3, the slit nozzle 32 includes a front lip 33A and a rear lip 33B extending in parallel with the longitudinal direction of the nozzle, and these lips 33A and 33B are abutted against each other with a shim 35 having a constant plate thickness interposed therebetween. (Not shown). The gap size between the slit-like discharge port 32 a and the slit-like discharge passage 32 b is defined by the thickness of the shim 35.

  At the center of the slit nozzle 32, a cavity 32c having a semicircular cross section is formed which is connected to the upper end of the discharge passage 32b and forms a buffer portion or a manifold portion for equalizing pressure. On the upper surface of the slit nozzle 32, a resist introduction port 32d is provided at the center in the longitudinal direction of the nozzle, and the resist introduction port 32d and the cavity 32c are connected by a resist introduction passage 32e. At both ends of the slit nozzle 32 in the longitudinal direction, vents 37 that lead to the cavity 32c in the nozzle are provided. These vents 37 are connected to drainage pipes 39 communicating with drain tanks (not shown). An on-off valve 41 is provided in the middle of the drainage pipe 39.

  The resist introduction port 32d and the resist introduction passage 32e are formed on the rear lip 33B in the illustrated example, but may be formed on the front lip 33A side. Similarly, the vent 37 is also provided on either the front lip 33A or the rear lip 33B.

  As shown in FIG. 4, the nozzle refresh unit 42 is a priming process in which a small amount of resist solution is discharged to the slit nozzle 32 and wound around the priming roller 46 as a preparation for the next coating process in one casing 44. The nozzle 48 for keeping the outlet 48 and the outlet of the slit nozzle 32 in an atmosphere of solvent vapor for the purpose of preventing drying, and for cleaning or washing the inside and outside of the slit nozzle 32 (particularly in the vicinity of the slit outlet). A nozzle cleaning / cleaning unit 52 is also provided.

  The slit nozzle 32 that has finished the coating process once (for one substrate) is first subjected to a cleaning process by the nozzle cleaning / cleaning unit 52, then waits in the nozzle bath 50, and immediately before the next coating process is started. The priming processing unit 48 receives a priming process.

  In order to place the slit nozzle 32 on each part (48, 50, 52) in the nozzle refresh unit 42, the entire nozzle refresh unit 42, that is, the casing 44 is moved in the substrate transport direction (X The slit nozzle 32 may be moved in the vertical direction (Z direction) by the nozzle lifting mechanism 26 (FIG. 1).

  As shown in FIG. 5, the nozzle cleaning / cleaning unit 52 includes an independent traction scanning unit 56 and a nozzle cleaning unit 58, and these units 56, 58 are separated by the length of the slit nozzle 32 by a common Y-direction moving unit 60. It can move integrally in the direction (Y direction). The Y-direction moving unit 60 includes, for example, a rack and pinion mechanism, and includes a rack 62 that extends in the Y direction and a Y-direction carriage 64 that incorporates a gear (not shown) that rolls on the rack 62. .

The nozzle cleaning unit 58 supplies a cleaning liquid (for example, thinner) and a drying gas (for example, N ₂ gas) to the cleaning head 65 having a U-shaped cross section with an open top surface toward the lower end portion or the discharge port of the slit nozzle 32. A cleaning nozzle 66 and a gas nozzle (not shown) to be sprayed are mounted, and the cleaning liquid dropped upon hitting the slit nozzle 32 is collected by the drain port 68 and dropped or collected by vacuum.

  As shown in FIGS. 6 to 11, the slit nozzle cleaning device 70 according to the first embodiment of the present invention traverses the discharge passage 32b of the slit nozzle 32 from the cavity 32c to the discharge port 32a, and the tip 72a discharges. The thread-like scraping member 72 protruding out of the outlet 32a and the tip 72a of the thread-like scraping member 72 are detachably held outside the slit nozzle 32, and the solidified material in the discharge passage 32b is scraped off. At the position outside the slit nozzle 32 that is higher than the cavity 32c, the pulling scanning unit 56 that pulls and scans the thread scraping member 72 in the discharge passage 32b in the longitudinal direction (Y direction) of the slit nozzle 32. Coupled to the thread-like scraping member 72, the tension is applied to the thread-like scraping member 72 against the pulling force of the pulling scanning unit 56, and the transfer is performed. And a tensile portion 74 to permit.

  The thread-like scraping member 72 is made of, for example, a stainless steel (SUS) wire having a Teflon (registered trademark) coating, and has a wire diameter (thickness) that can be moved while rubbing the wall surface of the discharge passage 32b of the slit nozzle 32. . For example, when the slit gap width of the discharge passage 32b is 100 μm, the thickness of the thread scraping member 72 is selected to be about 80 μm.

  For example, a rectangular parallelepiped or columnar knob 76 having a size that cannot fit into the discharge port 32a of the slit nozzle 32 is attached to the tip 72a of the thread-like scraping member 72. As will be described later, when the pulling scanning unit 56 uses magnetic force to hold the knob portion 76, the knob portion 76 is made of a magnetic material.

  At one end (left end in the figure) of the slit nozzle 32 in the longitudinal direction (Y direction), the thread scraping member 72 and the knob 76 are retracted from the discharge passage 32b and the discharge port 32a while the nozzle is not cleaned. A retracting portion 78 is provided for storage.

  As shown in FIG. 7, the retracting portion 78 is formed with a notch 80 on the lower surface of the slit nozzle 32, and a permanent magnet 82 is attached to the ceiling surface of the notch 80, and the notch 80 is inserted into the notch 80. The knob portion 76 is stored and held so that it can be taken in and out. Further, a groove portion 84 is formed on the lower surface of the slit nozzle 32 for accommodating the tip end portion 72a of the thread-like scraping member 72 so as to be put in and out. Further, a groove portion 86 for retracting and storing the thread-like scraping member 72 may be formed in the side wall of the discharge passage 32b inside the slit nozzle 32.

  The pulling scanning unit 56 can move on the rack 62 integrally with the Y-direction carriage 64 (FIG. 5) in the longitudinal direction (Y direction) of the slit nozzle 32 as described above. An electromagnetic (or vacuum) adsorption portion 56a for detachably holding the knob portion 76 attached to the portion 72a is provided.

  When the traction scanning unit 56 turns on the attracting portion 56a close to the retracting portion 78 before starting the slit nozzle cleaning operation, the knob portion 76 held by the magnetic force of the permanent magnet 82 in the notch portion 80 is Upon receiving a magnetic attractive force stronger than the magnetic force of the permanent magnet 82, the permanent magnet 82 jumps to the attracting portion 56a. On the other hand, after the slit nozzle cleaning operation is completed, when the traction scanning unit 56 turns off the suction portion 56a close to the retracting portion 78, the knob portion 76 held by the magnetic force in the suction portion 56a is released, and instead is permanently set. The magnetic force received from the magnet 82 jumps from the attracting portion 56 a to the permanent magnet 82 in the cutout portion 80.

  The pulling portion 74 is coupled to the thread-like scraping member 72 at a position higher than the upper surface of the slit nozzle 32, and has a spring-type reel 88 that winds up the thread-like scraping member 72 with a spring force so that it can be pulled out. In this example, the thread-like scraping member 72 passes from the cavity 32c of the slit nozzle 32 through the drainage pipe 39 on one side closer to the retracting portion 78, and comes out from the hole of the seal structure formed in the drainage pipe 39. Is wound around a mainspring reel 88. The mainspring reel 88 may be attached to the nozzle support member 28 (FIG. 1) together with the slit nozzle 32, for example.

  The slit nozzle cleaning device 70 having such a configuration operates as follows with respect to the slit nozzle 32. A cleaning liquid supply unit (not shown) is also connected to the resist introduction port 32d of the slit nozzle 32 via a resist supply pipe 30 and a switching valve (not shown). Prior to the start of the slit nozzle cleaning device 70, a cleaning liquid (for example, thinner) is introduced into the slit nozzle 32 from the cleaning liquid supply unit, and the cavity 32c and the discharge passage 32b are filled with the cleaning liquid. In this example, a state in which a large number of resist solidified substances RB are dispersed and adhered to the discharge passage 32b of the slit nozzle 32 immediately before receiving the nozzle cleaning is schematically shown (FIGS. 8 to 10).

  First, as shown in FIG. 7, the pulling scanning unit 56 is moved to bring the attracting portion 56 a closer to the retracting portion 78, the attracting portion 56 a is turned on, and the knob portion 76 is moved from the notch 80 by the magnetic attractive force. It is taken out and fixed to the suction part 56a by suction.

  Next, as shown in FIGS. 8 and 9, the traction scanning unit 56 is moved at a constant speed in the nozzle longitudinal direction (Y direction). Then, the traction scanning unit 56 moves forward in the nozzle longitudinal direction (Y direction) overcoming the elastic drag of the mainspring reel 88 while holding the tip of the thread scraping member 72. Thereby, the mainspring reel 88 feeds the thread-like scraping member 72 while resisting the pulling force of the pulling scanning unit 56. The thread-like scraping member 72 is pulled by the traction scanning unit 56, slides tightly while narrowing the angle across the discharge passage 32b of the slit nozzle 32, and removes the resist solidified material RB adhering to the discharge passage 32b. Scrub off (FIGS. 8-10). Most of the resist solidified product RB scraped off by the thread-like scraping member 72 is collected in the cavity 32C.

  When the traction scanning unit 56 arrives at the folding position set in the vicinity of the other end of the slit nozzle 32, the traction scanning unit 56 stops there and finishes one forward traction scanning. Immediately after this, as shown in FIG. 11, the traction scanning unit 56 moves in the direction of returning to the home position (reverse direction) and performs traction scanning in the backward path. In this backward pulling scan, the pulling scanning unit 56 moves at a slower speed than that in the forward pass so that the spiral scraping member 72 is wound tightly around the mainspring reel 88. Thereby, the thread-like scraping member 72 slides tightly while widening the angle across the discharge passage 32b of the slit nozzle 32, and scrapes off the resist solidified material RB remaining in the discharge passage 32b. At this time, most of the resist solidified material RB scraped off by the thread-like scraping member 72 is discharged out of the discharge port 32a. The traction scanning of the traction scanning unit 56 as described above may be performed only once, but may be performed repeatedly by a plurality of reciprocations.

  The traction scanning unit 56 temporarily stops near the retracting portion 78, whereupon the attracting portion 56 a is turned off to release the magnetic attracting force, and the knob portion 76 held so far is transferred to the magnet 82 in the notch portion 80. hand over. As a result, the distal end portion 72 a of the thread scraping member 72 is also retracted and stored in the groove portion 84 on the lower surface of the slit nozzle 32.

  When the nozzle cleaning process as described above by the slit nozzle cleaning device 70 is completed, the vent system on-off valve 41 is opened, and the resist solution R is supplied from the resist supply unit to the resist introduction port 32d. Liquid replacement from the cleaning liquid to the resist liquid R is performed. By this liquid replacement, most of the resist solidified substance RB accumulated in the cavity 32c is mixed with the cleaning liquid and the resist liquid R and discharged from the vent 37 to the drain pipe 39, and the remaining is mixed with the cleaning liquid and the resist liquid R and discharged. It discharges outside from the discharge port 32a through the channel | path 32b.

  As described above, the slit nozzle cleaning device 70 in this embodiment eliminates the need for manual work at all, and also automates and standardizes cleaning or cleaning work inside the slit of the slit nozzle 32 to improve work efficiency. Realize significant time savings. In particular, since the thread scraping member 72 is preliminarily prepared in the discharge passage 32b of the slit nozzle 32, and this thread scraping member 72 is pulled and scanned in the discharge passage 32b in the longitudinal direction of the nozzle, the slit nozzle 32 is scanned. There is no need to insert a scraping member from the outside into the discharge port 32a, and the nozzle cleaning operation can be started quickly and smoothly.

  Moreover, in the said resist coating apparatus, the maintenance function with respect to the slit nozzle 32 can be improved by providing the slit nozzle cleaning apparatus 70, and the quality of a resist coating film, a yield, and an operation rate can be improved.

  In this embodiment, not only the thread scraping member 72 that is currently used but also the spare (unused) part is wound as an extension cord on the mainspring reel 88, so that the thread scraping member that has been worn out and deteriorated due to multiple uses. The operation of replacing 72 with an unused one can be easily performed.

  In this embodiment, as shown in FIG. 11, in the discharge passage 32b of the slit nozzle 32, the thread scraping member 72 does not reach near the end opposite to the retracting portion 78 (the right end in the figure). A blind spot area AS occurs. The resist solidified product RB adhering to the area AS may remain without being scraped off.

  To solve this problem, as shown in FIG. 12, thread-like scraping members 72L and 72R, retracting portions 78L and 78R, and pulling portions 74L and 74R are provided on the left and right sides of the slit nozzle 32 in the nozzle longitudinal direction (Y direction), respectively. A configuration in which the pulling scanning unit 56 is shared can be suitably employed. In this case, the pulling scanning unit 56 pulls and scans the left thread-like scraping member 72L on the forward path, and pulls and scans the right thread scraping member 72R on the return path.

  In FIGS. 13-16, the structure and effect | action of the slit nozzle cleaning apparatus 70 in 2nd Embodiment are shown.

  In this second embodiment, the pulling portion 74 is a lump (preferably as shown in the drawing of the cavity 32 as shown in the figure) that is slidably engaged in the cavity 32c in the longitudinal direction (Y direction) of the slit nozzle 32. It has a semi-cylindrical follower 90 following the wall surface. The material of the driven portion 90 is preferably a metal (for example, aluminum) softer than the material (usually SUS) of the slit nozzle 32, or SUS coated with Teflon (registered trademark), or may be a resin (for example, a fluororesin).

  Furthermore, in order to facilitate the sliding of the driven portion 90 in the cavity 32c, a configuration in which, for example, a spherical roller 92 is attached to the side surface of the driven portion 90 as shown in FIG.

  While the slit nozzle cleaning device 70 is not operating, the driven portion 90 is retracted to a retracting portion 78 provided at one end portion (left end portion in the figure) of the slit nozzle 32. More specifically, it is retracted to the left end portion of the cavity 32c which is deeper than the discharge passage 32b. In order to cause the driven portion 90 to retreat to the left end portion of the recessed cavity 32c, the pressure of the drainage to the vent system can be used. Further, when the slit nozzle cleaning device 70 is operated, a switching valve 94 and a cleaning liquid supply pipe 96 are connected to the drainage pipe 39, for example, as shown in FIG. Then, the cleaning liquid from the cleaning liquid supply unit can be pumped to the vent 37 through the cleaning liquid supply pipe 96, the switching valve 94, and the drainage pipe 39, and the driven unit 90 can be pushed out from the retreat location by the pressure of the cleaning liquid. It is also possible to use high-pressure air instead of the cleaning liquid.

  Alternatively, as another embodiment, there is provided a suction / extrusion apparatus 100 that is selectively switched between suction by vacuum and extrusion by high-pressure air injection through a pipe 98 from the outside of the slit nozzle 32 to be provided to the driven unit 90. It is also possible to provide a configuration.

  In this second embodiment, as shown in FIGS. 15 and 16, when the traction scanning unit 56 is moved at a constant speed in the nozzle longitudinal direction (Y direction), it is engaged and accommodated in the cavity 32c. The follower 90 is moved in the nozzle longitudinal direction (Y direction) while being attached to the rear end of the thread-like scraping member 72 while resisting the pulling force of the pulling scanning unit 56. The thread-like scraping member 72 is pulled by the traction scanning unit 56, slides in a tensioned state at all times while keeping the angle traversing the discharge passage 32b of the slit nozzle 32 at a substantially constant inclination angle, and adheres to the discharge passage 32b. Scrub off the solidified resist RB. The resist solidified material RB scraped off by the thread-like scraping member 72 moves in the discharge passage 32b so as to be dragged by the thread-like scraping member 72 to the discharge passage 32b. 90 is pushed toward the discharge passage 32b. As a result, a part of the resist solidified product RB is discharged from the discharge port 32a of the slit nozzle 32, and the rest is gathered to the right end of the discharge passage 32b and the cavity 32C.

  Also in this second embodiment, when the nozzle cleaning process as described above by the slit nozzle cleaning device 70 is completed, the vent system on-off valve 41 is opened, and the resist solution R is supplied from the resist supply section to the resist introduction port 32d. Then, liquid replacement from the cleaning liquid to the resist liquid R is performed inside the slit nozzle 32. As a result, most of the resist solidified material RB gathered near the right end of the discharge passage 32b and the cavity 32C is mixed with the cleaning liquid and the resist liquid R and discharged from the vent 37 to the drain pipe 39, and the rest is washed and resist. It is mixed with the liquid R and discharged from the discharge port 32a.

  In the second embodiment, as in the first embodiment, no manual work is required, and the cleaning or cleaning work in the slit of the slit nozzle 32 is automated and standardized to improve work efficiency. Improvements and significant reductions in required time can be realized. In particular, since the thread scraping member 72 is preliminarily prepared in the discharge passage 32b of the slit nozzle 32, and this thread scraping member 72 is pulled and scanned in the discharge passage 32b in the longitudinal direction of the nozzle, the slit nozzle 32 is scanned. There is no need to insert a scraping member from the outside into the discharge port 32a, and the nozzle cleaning operation can be started quickly and smoothly. The second embodiment is characterized in that not only the thread scraping member 72 but also the driven portion 90 constituting the pulling portion 74 is charged into the slit nozzle 32.

  Further, the resist coating apparatus includes the slit nozzle cleaning device 70 according to the second embodiment, thereby improving the maintenance function for the slit nozzle 32 and improving the quality, yield, and operation rate of the resist coating film. .

  FIG. 17 and FIG. 18 show an example of a configuration for easily updating the threaded scraping member 72 (part replacement) in the second embodiment. In this configuration example, the thread-like scraping member 72 folds back and forth through the discharge passage 32b by folding back through the inverted U-shaped through hole 90a formed in the lower portion of the driven portion 90, and both end portions thereof are crossed. It goes out of the discharge port 32a and is detachably fixed to the knob portion 76. Here, the end portion that is not the distal end portion 72 a of the thread-like scraping member 72, that is, the base end portion 72 b is continuous with the extended (unused) portion 72 ′. It is wound around a mainspring reel 102 attached to one end surface (left end surface in the figure) adjacent to the retracting portion 76 so that it can be pulled out.

  When the thread-like scraping member 72 that has been worn out and deteriorated by many uses is replaced with an unused extension portion 72 ′, the thread-like scraping member 72 is temporarily removed from the knob portion 76 as shown in FIGS. 18 (a) to 18 (b). Is removed, the worn and deteriorated portion is cut and removed, and the unused extension portion 72 ′ is replaced with the knob portion 76.

  As a modification of the first and second embodiments, a part of the function of the slit nozzle cleaning device 70 can be replaced manually. In particular, the step of pulling and scanning the thread-like scraping member 72 can be performed manually. In this case, the pulling and scanning unit 56 can be omitted, and the configuration of the apparatus can be simplified.

  The shape of the thread-like scraping member 72, in particular, the cross-sectional shape is not limited to a circle, and may be an ellipse, a rectangle, or the like, and may be a flat type string, a cord, a wire, or the like.

  The present invention is not limited to the slit nozzle used in the substrate floating method or the spinless type coating process as in the above embodiment, and can be a slit nozzle used in any coating process or liquid process.

  In addition to the resist solution, for example, a coating solution such as an interlayer insulating material, a dielectric material, and a wiring material can be used as the processing solution in the present invention, and various chemical solutions, developing solutions, rinse solutions, and the like are also possible. The substrate to be processed in the present invention is not limited to an LCD substrate, and other flat panel display substrates, semiconductor wafers, CD substrates, photomasks, printed substrates and the like are also possible.

32 Slit Nozzle 32a Discharge Port 32b Discharge Passage 32c Cavity 32d Inlet 56 Pulling Scan Unit 72 Threaded Scraping Member 74 Pulling Section

Claims (11)

An inlet for introducing a processing liquid, a cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization, a slit-like outlet for discharging the processing liquid in a strip shape, and the cavity and the outlet A slit nozzle cleaning device for cleaning the inside of a slit of a long slit nozzle having a slit-like discharge passage connecting with
A thread-like scraping member that traverses the discharge passage of the slit nozzle from the cavity to the discharge port, and a tip portion of the slit nozzle is outside the discharge port;
The thread scraping member is slid in the discharge passage in the longitudinal direction of the slit nozzle so as to hold the tip of the thread scraping member outside the slit nozzle and scrape the solidified material in the discharge passage. A tow scanning unit that pulls and scans while moving;
A slit nozzle cleaning device having a pulling portion that is coupled to the thread-like scraping member inside or outside the slit nozzle and allows the movement while applying tension to the thread-like scraping member against a pulling force of the pulling scanning unit.   The said pulling part is coupled to the scraping member at a position outside the slit nozzle higher than the cavity, and has a first reel that winds up the thread-like extension member with a spring force so that it can be pulled out. Slit nozzle cleaning device.   The slit nozzle cleaning device according to claim 1, wherein the pulling portion has a massive follower portion that is engaged and accommodated in the cavity so as to be slidable in the longitudinal direction of the slit nozzle.   The slit nozzle cleaning device according to claim 3, wherein the thread-like scraping member is folded back at the massive follower to reciprocate the discharge passage, and both end portions thereof are exposed to the slit nozzle.   The slit nozzle cleaning apparatus of Claim 4 which has a 2nd reel which winds up the thread-like extension member extended on the extension of the thread-like scraping member out of the slit nozzle with a spring force so that it can be pulled out.   The slit nozzle cleaning device according to any one of claims 1 to 5, further comprising a knob portion that is attached to a distal end portion of the thread-like scraping member with a size that cannot fit into the discharge port of the slit nozzle. The knob portion is made of a magnetic material,
The traction scanning unit detachably holds the knob portion by magnetic force;
The slit nozzle cleaning device according to claim 6.   The slit nozzle cleaning apparatus of Claim 7 which has a magnet attached to the said slit nozzle in order to hold | maintain the said knob part so that attachment or detachment is possible with magnetic force.   The slit nozzle cleaning device according to any one of claims 6 to 8, wherein a notch portion for housing the knob portion is provided in a portion near the discharge port of the slit nozzle. An inlet for introducing a processing liquid, a cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization, a slit-like outlet for discharging the processing liquid in a strip shape, and the cavity and the outlet A slit nozzle cleaning method for cleaning the inside of a slit of a long slit nozzle having a slit-like discharge passage connecting the
The slit nozzle is charged with a thread-like scraping member that traverses the discharge passage of the slit nozzle from the cavity to the discharge port, and a tip portion of the slit nozzle is outside the discharge port,
It is coupled to the thread-like scraping member in the slit nozzle, and includes a pulling portion that allows the movement while applying tension to the thread-like scraping member against the pulling force of the pulling scanning unit,
The thread scraping member is slid in the discharge passage in the longitudinal direction of the slit nozzle so as to hold the tip of the thread scraping member outside the slit nozzle and scrape the solidified material in the discharge passage. Tow scanning while moving,
A slit nozzle cleaning method characterized by the above. An inlet for introducing the treatment liquid;
A cavity for temporarily storing the processing liquid introduced from the inlet for pressure equalization;
A slit-like discharge port for discharging the treatment liquid in a strip shape, and a slit-like discharge passage connecting the cavity and the discharge port;
A thread-like scraping member that traverses the discharge passage of the slit nozzle from the cavity to the discharge port, and a tip portion of the slit nozzle is outside the discharge port;
A slit nozzle that is coupled to the thread-like scraping member in the slit nozzle and has a pulling portion that allows movement while applying tension to the thread-like scraping member.

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