JP3151143U - Low temperature plasma generator - Google Patents

Low temperature plasma generator Download PDF

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JP3151143U
JP3151143U JP2009001953U JP2009001953U JP3151143U JP 3151143 U JP3151143 U JP 3151143U JP 2009001953 U JP2009001953 U JP 2009001953U JP 2009001953 U JP2009001953 U JP 2009001953U JP 3151143 U JP3151143 U JP 3151143U
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electrode
cylindrical seat
bottom cylindrical
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flow guide
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林博▲ゆん▼
黄俊銘
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韶陽科技股▲分▼有限公司
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Abstract

【課題】低電力で性能が安定し、信頼性と効果が高い低温プラズマ発生装置を提供する。【解決手段】低温プラズマ発生装置は、底筒座１と、導流ブロック２と、電極３と、前スリーブ４と、からなる。底筒座は絶縁性のある凹型体で、前方は開孔１１を有し、横に吸気導管１２を設置する。導流ブロックは、底筒座の凹型体に設置されて、吸気して、旋転気流を生成する。電極は、グラファイト等の導電物によりなる細長い立体で、後部は導流ブロックで接続し、前方は突出して、底筒座の口縁から出る。前スリーブは金属材質で、底筒座前方に設置され、筒内は電極先端に対応して、単一のガス室を形成する。ガス室のもう一端はノズル５を設置して、ガスを噴出し、噴圧を生成することができる。これにより、簡単な構造の単一ガス室と、効果的な導流設計により、低電力で、性能が安定し、信頼度が高く、好ましい効果のプラズマを生成することができる。【選択図】図２A low-temperature plasma generator having low power, stable performance, high reliability and effectiveness is provided. A low-temperature plasma generator includes a bottom cylindrical seat, a flow guide block, an electrode, and a front sleeve. The bottom cylinder seat is an indented concave body having an opening 11 in the front, and an intake conduit 12 installed on the side. The diversion block is installed in the concave body of the bottom cylindrical seat and sucks air to generate a rotating airflow. The electrode is an elongated solid body made of a conductive material such as graphite, the rear part is connected by a current-carrying block, the front part protrudes and exits from the mouth of the bottom cylindrical seat. The front sleeve is made of a metal material and is installed in front of the bottom cylinder seat, and the inside of the cylinder forms a single gas chamber corresponding to the tip of the electrode. The other end of the gas chamber can be provided with a nozzle 5 to eject gas and generate an injection pressure. As a result, a single gas chamber having a simple structure and an effective current conduction design can generate low-power, stable performance, high reliability, and plasma with favorable effects. [Selection] Figure 2

Description

本考案は、低温プラズマ発生装置に関するものであって、特に、分解、組み立てが容易で、単一のガス室しかない簡潔な構造で、低電力で性能が安定し、信頼性と効果が高いプラズマを生成することができるプラズマ発生装置に関するものである。   The present invention relates to a low-temperature plasma generator, and in particular, a plasma that is easy to disassemble and assemble, has a simple structure with only a single gas chamber, has low power, stable performance, and high reliability and effectiveness. It is related with the plasma generator which can produce | generate.

プラズマは自由電子と帯電イオンを主要成分とする物質形態で、宇宙に広く存在し、固体、液体、気体である以外に、物質の第四種の形態があり、それがプラズマである。
図１は、公知のプラズマ構造１００を示す図で、以下のような欠点がある。１．構造が複雑で、内部には前後の二ガス室があり、加圧出力は大きいが、生成される騒音は人の我慢を越える。
２．内部中心にグラファイト等の導電物を設置し、二ガス室の設計が、前ガス室の放電を生じて、導電物が焼損する恐れがある。
３．ノズル構造中に隔絶層を有するが、設計が不当であると、交換が容易でなく、一旦、導電物が焼損すると、全て交換しなければならないので、精度が掌握しにくい。 Plasma is a material form mainly composed of free electrons and charged ions, and is widely present in the universe. Besides being solid, liquid, and gas, there is a fourth kind of material, which is plasma.
FIG. 1 shows a known plasma structure 100 with the following drawbacks. 1. The structure is complicated and there are two gas chambers inside and behind, and the pressure output is large, but the generated noise exceeds the endurance of humans.
2. A conductive material such as graphite is installed in the center of the interior, and the design of the two gas chamber may cause a discharge of the front gas chamber, and the conductive material may burn out.
3. Although the nozzle structure has an isolation layer, if the design is inappropriate, the replacement is not easy, and once the conductive material is burned out, all must be replaced, so the accuracy is difficult to grasp.

本考案は、上述の問題を改善することができる低温プラズマ発生装置を提供することを目的とする。 An object of the present invention is to provide a low-temperature plasma generator capable of improving the above-described problems.

低温プラズマ発生装置は、底筒座と、導流ブロックと、電極と、前スリーブと、からなる。底筒座は絶縁性のある凹型体で、前方は開孔を有し、横に吸気導管を設置する。導流ブロックは、底筒座の凹型体に設置されて、吸気して、旋転気流を生成する。電極は、グラファイト等の導電物によりなる細長い立体で、後部は導流ブロックで接続し、前方は突出して、底筒座の口縁から出る。前スリーブは金属材質で、底筒座前方に設置され、筒内は電極先端に対応して、単一のガス室を形成する。ガス室のもう一端はノズルを設置して、ガスを噴出し、噴圧を生成することができる。 The low-temperature plasma generator includes a bottom cylindrical seat, a flow guide block, an electrode, and a front sleeve. The bottom tube seat is an indented concave body, has an opening in the front, and installs an intake conduit on the side. The diversion block is installed in the concave body of the bottom cylindrical seat and sucks air to generate a rotating airflow. The electrode is an elongated solid body made of a conductive material such as graphite, the rear part is connected by a current-carrying block, the front part protrudes and exits from the mouth of the bottom cylindrical seat. The front sleeve is made of a metal material and is installed in front of the bottom cylinder seat, and the inside of the cylinder forms a single gas chamber corresponding to the tip of the electrode. The other end of the gas chamber can be provided with a nozzle to eject gas and generate an injection pressure.

本考案の低温プラズマ発生装置により、簡単な構成の単一ガス室と効果的な導流設計で、低電力で性能が安定し、信頼度が高く、効果がよいプラズマを生成することができる。 The low-temperature plasma generator of the present invention can generate a plasma with a stable structure with low power, high reliability, and good effect, with a simple gas chamber having a simple structure and an effective flow design.

公知の構造動作図である。It is a well-known structural operation | movement figure. 本考案の立体分解図である。It is a three-dimensional exploded view of the present invention. 本考案の立体組み合わせ図である。It is a three-dimensional combination diagram of the present invention. 本考案の組み合わせ断面図である。It is combination sectional drawing of this invention. 本考案の動作図である。It is an operation | movement figure of this invention. 本考案のもう一つの実施例の立体組み合わせ図である。It is a three-dimensional combination diagram of another embodiment of the present invention.

図２〜図６は、本考案による低温プラズマ発生装置を示す図で、主に、底筒座１と、導流ブロック２と、電極３と、前スリーブ４と、からなる。
底筒座１は絶縁性のある凹型体で、前方は開孔１１を有し、横に吸気導管１２を設置する。
導流ブロック２は、底筒座１の凹型体に設置されて、吸気して、旋転気流を生成する。
電極３は、グラファイト等の導電物によりなる細長い立体で、後部は導流ブロック２と接続し、前方は突出して、底筒座１の口縁から出る。
前スリーブ４は金属材質で、底筒座１前方に設置され、筒内は電極３先端に対応して、単一のガス室４１を形成する。ガス室４１のもう一端はノズル５を設置して、ガスを噴出し、噴圧を生成することができる。
実施時、底筒座１と、導流ブロック２と、電極３の三者の中心は、ねじ６により接続される。また、底筒座１は円凹形で、底部は貫通する中心孔１３を有する。導流ブロック２は底筒座１内部に対応する円柱体で、前端は導流円錐部２１を形成する。円錐部２１中心は凹孔２２を有して、電極３底部と接続する。電極３は、前後が異なる径の細長い形状で、後部は導流ブロック２の凹孔２２と結合し、導流ブロックの凹孔２２中にパッド２３を設置する。また、前スリーブ４と底筒座１は螺紋により接続される。前スリーブ４中、セラミック管４２を設置し、前スリーブ４の前端は螺紋を有して、管状ノズル５を螺接する。これにより、ノズル組み合わせ後の外観は円柱体で、構造が簡潔で、分解しやすく、公知の二ガス室の複雑な構造の種々の欠点を克服することができる。
図３〜図５で示されるように、本考案の組み立て応用時、電極３前方先端が、セラミック管を突出しているのが最適であり、全体は、底筒座１、および、前スリーブ４により簡単な構造の単一ガス室４１を構成し、更に、内置された導流ブロック２が円錐部２１を有する効果的な導流設計により、吸気して、最適な旋転気流を生成し、前端の電極２を経て、単一ガス室４１中で、効果的に解離して、ノズル５から噴出し、低電力で、性能が安定し、信頼度が高く、効果に優れたプラズマを生成することができる。 2-6 is a figure which shows the low-temperature plasma generator by this invention, and mainly consists of the bottom cylinder seat 1, the flow guide block 2, the electrode 3, and the front sleeve 4. FIG.
The bottom tube seat 1 is an indented concave body having an opening 11 in the front, and an intake conduit 12 installed on the side.
The diversion block 2 is installed in the concave body of the bottom cylindrical seat 1 and sucks air to generate a swirling airflow.
The electrode 3 is an elongated solid made of a conductive material such as graphite, the rear part is connected to the flow guide block 2, the front part protrudes, and exits from the mouth edge of the bottom cylindrical seat 1.
The front sleeve 4 is made of a metal material and is installed in front of the bottom cylindrical seat 1, and the inside of the cylinder forms a single gas chamber 41 corresponding to the tip of the electrode 3. The other end of the gas chamber 41 can be provided with a nozzle 5 to eject gas and generate an injection pressure.
At the time of implementation, the three cylinder centers of the bottom cylindrical seat 1, the flow guide block 2, and the electrode 3 are connected by a screw 6. The bottom cylindrical seat 1 has a circular concave shape, and the bottom portion has a central hole 13 therethrough. The flow guide block 2 is a cylindrical body corresponding to the inside of the bottom cylindrical seat 1, and the front end forms a flow guide cone portion 21. The center of the conical part 21 has a concave hole 22 and is connected to the bottom of the electrode 3. The electrode 3 has an elongated shape with different diameters on the front and rear sides, the rear part is coupled to the concave hole 22 of the flow guide block 2, and a pad 23 is installed in the concave hole 22 of the flow guide block. The front sleeve 4 and the bottom cylindrical seat 1 are connected by a screw pattern. A ceramic tube 42 is installed in the front sleeve 4, and the front end of the front sleeve 4 has a screw pattern to screw the tubular nozzle 5. Thereby, the external appearance after the nozzle combination is a cylindrical body, the structure is simple, it is easy to disassemble, and various disadvantages of the complicated structure of the known two-gas chamber can be overcome.
As shown in FIGS. 3 to 5, when the assembly application of the present invention is applied, it is optimal that the front end of the electrode 3 protrudes from the ceramic tube, and the whole is formed by the bottom cylindrical seat 1 and the front sleeve 4. A simple gas chamber 41 having a simple structure is formed, and the installed flow guide block 2 has an effective flow design with a conical portion 21. It can be effectively dissociated in the single gas chamber 41 through the electrode 2 and ejected from the nozzle 5 to generate plasma with low power, stable performance, high reliability, and excellent effect. it can.

この他、図６を参照すると、本考案の実施時、その外観は、前述の構造に限定されず、底筒座１は直方体、前スリーブ４は桶状でもよく、ノズルを組み合わせた後に斧状になり、下方のノズル５は、細長いスリット（図示しない）を形成し、ノズル５口径は実際の用途に応じて異なる設計にでき、製品の応用範囲を広げる。
本考案の長所は以下のようである。
１．電極の配置が非常に容易で、内部は単一のガス室しかないので、分解が容易で、可燃素子がないので、公知の二ガス室の電極が焼損する欠点を改善する。２．単一ガス室と、内置される導流ブロック体を利用するので、放電効果が強化され、効果的に解離して、気体と電力用量を大幅に減少させる。
３．構造が簡潔で、単一のチャンバを使用するので、消耗電力が少なく、信頼性が高く、低電力で、公知の構造と相同の功能の最適洗浄効果が得られる。
４．構成されるノズル構造は、実際の用途に応じて異なる設計にでき、製品の応用範囲が広い。
本考案では好ましい実施例を前述の通り開示したが、これらは決して本考案に限定するものではなく、当該技術を熟知する者なら誰でも、本考案の精神と領域を脱しない範囲内で各種の変動や潤色を加えることができ、従って本考案の保護範囲は、実用新案請求の範囲で指定した内容を基準とする。 In addition, referring to FIG. 6, when the present invention is implemented, the appearance is not limited to the above-described structure, and the bottom cylindrical seat 1 may be a rectangular parallelepiped and the front sleeve 4 may be a bowl shape. Thus, the lower nozzle 5 forms an elongated slit (not shown), and the nozzle 5 diameter can be designed differently depending on the actual application, thereby expanding the application range of the product.
The advantages of the present invention are as follows.
1. The arrangement of the electrodes is very easy, and since there is only a single gas chamber inside, it is easy to disassemble and there are no combustible elements, thus improving the disadvantage that the electrodes in the known two gas chambers burn out. 2. Since the single gas chamber and the flow guide block installed therein are used, the discharge effect is enhanced and effectively dissociated, thereby greatly reducing the gas and power dose.
3. Since the structure is simple and uses a single chamber, the power consumption is low, the reliability is high, the power is low, and the optimum cleaning effect having the same function as the known structure can be obtained.
4). The constructed nozzle structure can be designed differently depending on the actual application, and the application range of the product is wide.
In the present invention, preferred embodiments have been disclosed as described above. However, these are not intended to limit the present invention, and any person who is familiar with the technology can use various methods within the spirit and scope of the present invention. Therefore, the protection scope of the present invention is based on the contents specified in the claims of the utility model.

公知のプラズマ構造１００
底筒座１
導流ブロック２
電極３
前スリーブ４
ノズル５
ねじ６
開孔１１
吸気導管１２
中心孔１３
導流円錐部２１
凹孔２２
パッド２３
セラミック管４２
ガス室４１ Known plasma structure 100
Bottom cylindrical seat 1
Diversion block 2
Electrode 3
Front sleeve 4
Nozzle 5
Screw 6
Opening 11
Intake conduit 12
Center hole 13
Convection cone 21
Recessed hole 22
Pad 23
Ceramic tube 42
Gas chamber 41

Claims (3)

低温プラズマ発生装置であって、主に、底筒座と、導流ブロックと、電極と、前スリーブと、からなり、
前記底筒座は、長方形で、絶縁性のある凹型体で、前方は開孔を有し、横に吸気導管を設置し、
前記導流ブロックは、前記底筒座の凹型体に設置されて、吸気して、旋転気流を生成し、
前記電極は、導電物によりなる細長い立体で、後部は前記導流ブロックで接続し、前方は突出して、前記底筒座の口縁から出て、
前記前スリーブは、桶状で、金属材質からなり、前記底筒座前方に設置され、下方に細長いスリットを有し、ノズルと組み合わされると斧状になり、筒内は電極先端に対応して、単一のガス室を形成し、ガス室のもう一端はノズルを設置して、ガスを噴出し、噴圧を生成することができ、
これにより、簡単な構造の単一ガス室と、効果的な導流設計により、低電力で、性能が安定し、信頼度が高く、優れた効果のプラズマを生成することができることを特徴とする低温プラズマ発生装置。 A low-temperature plasma generator mainly comprising a bottom cylindrical seat, a flow guide block, an electrode, and a front sleeve,
The bottom cylindrical seat is a rectangular, insulating concave body, has an opening in the front, and installs an intake conduit on the side,
The flow guide block is installed in the concave body of the bottom cylindrical seat, sucks air, and generates a rotating airflow,
The electrode is an elongated solid body made of a conductive material, the rear part is connected by the flow guide block, the front protrudes, and comes out from the edge of the bottom cylindrical seat,
The front sleeve has a bowl shape, is made of a metal material, is installed in front of the bottom cylindrical seat, has an elongated slit below, and has an ax shape when combined with a nozzle, and the inside of the cylinder corresponds to the tip of the electrode , Forming a single gas chamber, the other end of the gas chamber can be installed with a nozzle to eject gas and generate an injection pressure,
This is characterized by a single gas chamber with a simple structure and effective conduction design that can generate low-power, stable performance, high reliability, and excellent effect plasma. Low temperature plasma generator. 前記底筒座と、前記導流ブロックと、前記電極の三者の中心は、ねじにより接続され、また、前記底筒座は円凹形で、底部は貫通する中心孔を有し、前記導流ブロックは前記底筒座内部に対応する円柱体で、前端は導流円錐部を形成し、前記円錐部中心は凹孔を有し、前記凹孔中にパッドを設置して、前記電極底部と接続し、前記電極は前後で径が異なる細長い立体で、後部は導流ブロックで接続し、前記前スリーブと前記底筒座は螺紋により接続され、ノズルを円柱体に組み合わせることを特徴とする請求項１に記載の低温プラズマ発生装置。 The center of the bottom cylindrical seat, the flow guide block, and the electrode is connected by a screw, the bottom cylindrical seat has a circular concave shape, and the bottom has a central hole that passes therethrough. The flow block is a cylindrical body corresponding to the inside of the bottom cylindrical seat, the front end forms a flow guide cone, the center of the cone has a concave hole, a pad is installed in the concave hole, and the bottom of the electrode The electrode is an elongated solid body having different diameters in the front and rear, the rear part is connected by a flow guide block, the front sleeve and the bottom cylindrical seat are connected by a screw pattern, and the nozzle is combined with a cylindrical body. The low-temperature plasma generator according to claim 1. 前記前スリーブ内部はセラミック管を有し、且つ、前記電極前方先端は前記セラミック管を突出し、前記スリーブ管の前端は螺紋を有して、管状ノズルを接続することを特徴とする請求項２に記載の低温プラズマ発生装置。

3. The front sleeve includes a ceramic tube, the front end of the electrode protrudes from the ceramic tube, and the front end of the sleeve tube has a screw pattern to connect a tubular nozzle. The low-temperature plasma generator described.

JP2009001953U 2009-03-31 2009-03-31 Low temperature plasma generator Expired - Fee Related JP3151143U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107835555A (en) * 2017-11-21 2018-03-23 深圳市诚峰智造有限公司 A kind of plasma surface processing device
KR102161704B1 (en) * 2020-01-21 2020-10-06 한국과학기술연구원 apparatus and method for fluorination of components

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107835555A (en) * 2017-11-21 2018-03-23 深圳市诚峰智造有限公司 A kind of plasma surface processing device
KR102161704B1 (en) * 2020-01-21 2020-10-06 한국과학기술연구원 apparatus and method for fluorination of components

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