CN107820387A - Electronic component mounting apparatus and electronic component mounting method - Google Patents

Electronic component mounting apparatus and electronic component mounting method Download PDF

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Publication number
CN107820387A
CN107820387A CN201710826537.7A CN201710826537A CN107820387A CN 107820387 A CN107820387 A CN 107820387A CN 201710826537 A CN201710826537 A CN 201710826537A CN 107820387 A CN107820387 A CN 107820387A
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CN
China
Prior art keywords
axle
electronic
leading section
suction nozzle
axle portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710826537.7A
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Chinese (zh)
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CN107820387B (en
Inventor
松井智仁
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Juki Corp
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Juki Corp
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Publication date
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Publication of CN107820387A publication Critical patent/CN107820387A/en
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Publication of CN107820387B publication Critical patent/CN107820387B/en
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool

Abstract

The present invention provides electronic component mounting apparatus, and it has：Multiple axle portion parts, they are arranged on 1st direction of principal axis parallel with the 1st axle of predetermined surface；Multiple suction nozzles, they are connected respectively with multiple axle portion parts, have leading section；Electronic part feeder, it makes multiple electronic units in the configuration of the 1st direction of principal axis, and in the 2nd direction of principal axis movement parallel to the 2nd axle, electronic unit is supplied respectively to multiple suction nozzles；Mounting head main body, multiple axle portion parts are able to pivotally support centered on rotary shaft by it.The leading section of multiple suction nozzles is positioned at, the motion track of the leading section of the multiple suction nozzles detected in the rotation of axle portion part and the intersection point of the 2nd datum line, the 2nd datum line multiple datum marks that process provides out at equal intervals in the 1st datum line parallel with the 1st axle respectively are simultaneously parallel with the 2nd axle.The site error of each comfortable 2nd direction of principal axis of the electronic part feeder based on multiple datum marks and multiple intersection points, makes electronic unit be moved in the 2nd direction of principal axis.

Description

Electronic component mounting apparatus and electronic component mounting method
Technical field
The present invention relates to a kind of electronic component mounting apparatus and electronic component mounting method.
Background technology
In the manufacturing process of electronic equipment, the electronic component mounting apparatus for installing electronic unit to substrate is used. Patent Document 1 discloses a kind of by multiple electronic units while the electronic unit to be installed to substrate is adsorbed by multiple suction nozzles Erecting device.
Patent document 1：Japanese Unexamined Patent Publication 2014-154791 publications
Suction nozzle is connected with axle portion part.Such as warpage due to axle portion part etc., it is possible to make multiple suction nozzles can not be equally spaced Configuration.In the case where multiple suction nozzles are without equally spaced configuring, it is possible to be difficult to multiple electronic units by multiple suction nozzles Stably adsorb simultaneously.For example, the suction nozzle of the part in multiple suction nozzles is possible to a pair electronic unit different from target site Position kept, or electronic unit can not be kept.
The content of the invention
The purpose of the mode of the present invention is, there is provided one kind stably can keep multiple electronics simultaneously by multiple suction nozzles The electronic component mounting apparatus and electronic component mounting method of part.
According to the 1st mode of the present invention, there is provided a kind of electronic component mounting apparatus, it has：Multiple axle portion parts, they set Put in 1st direction of principal axis parallel with the 1st axle of predetermined surface；Multiple suction nozzles, they are connected, had respectively with multiple axle portion parts The leading section kept to electronic unit；Electronic part feeder, it makes in the multiple described of the 1st direction of principal axis configuration Electronic unit, moved in the 2nd direction of principal axis of 2nd axle orthogonal with the 1st axle parallel to the predetermined surface, to multiple described Suction nozzle is supplied respectively to the electronic unit；And mounting head main body, its by multiple axle portion parts be able to with the rule Determine rotatably to be supported centered on the orthogonal rotary shaft in face, the leading section of multiple suction nozzles is positioned at, in the axle portion part Rotation in the motion track of leading section and the intersection point of the 2nd datum line of the multiple suction nozzles that detect, the 2nd datum line point The multiple datum marks that Jing Guo not provided out at equal intervals in 1st datum line parallel with the 1st axle are simultaneously put down with the 2nd axle OK, each leisure of the electronic part feeder based on multiple datum marks and multiple intersection points the 2nd direction of principal axis Site error, the electronic unit is moved in the 2nd direction of principal axis.
According to the 2nd mode of the present invention, there is provided a kind of electronic component mounting method, it includes following step：Make multiple axles Part rotates, and the axle is arranged on 1st direction of principal axis parallel with the 1st axle of predetermined surface, can be with the rotation orthogonal with the predetermined surface Mounting head main body is rotatably supported at centered on rotating shaft；In the rotation of the axle portion part, pair distinguish with multiple axle portion parts The motion track for connecting, keeping the leading section of multiple suction nozzles of electronic unit is detected；By the leading section of multiple suction nozzles It is positioned at, the motion track of the leading section of the suction nozzle and the intersection point of the 2nd datum line, the 2nd datum line passes through respectively Multiple datum marks that 1st datum line parallel with the 1st axle provides out at equal intervals are simultaneously parallel with the 2nd axle；And The site error of each leisure the 2nd direction of principal axis based on multiple datum marks and multiple intersection points, makes in the 1st axle Multiple electronic units of direction configuration are moved in the 2nd direction of principal axis, and the electronics is supplied respectively to multiple suction nozzles Part.
The effect of invention
According to the mode of the present invention, there is provided a kind of stably to keep multiple electronic units simultaneously by multiple suction nozzles Electronic component mounting apparatus and electronic component mounting method.
Brief description of the drawings
Fig. 1 is the figure for an example for showing schematically the electronic component mounting apparatus involved by the 1st embodiment.
Fig. 2 is one of the belt-type feeder for showing schematically the electronic part feeder involved by the 1st embodiment The side view of example.
Fig. 3 is the sectional view for amplifying a part for the belt-type feeder involved by the 1st embodiment.
Fig. 4 is the side view for an example for showing schematically sprocket wheel and position detecting device involved by the 1st embodiment Figure.
Fig. 5 is the top view for an example for showing schematically the material containing band involved by the 1st embodiment.
Fig. 6 is an example for showing schematically the material containing band moved by the sprocket wheel involved by the 1st embodiment Side view.
Fig. 7 is the side view for an example for showing schematically the mounting head involved by the 1st embodiment.
Fig. 8 is the front view for an example for showing schematically the mounting head involved by the 1st embodiment.
Fig. 9 is the side view for an example for showing schematically the part detection device involved by the 1st embodiment.
Figure 10 is the top view for an example for showing schematically the part detection device involved by the 1st embodiment.
Figure 11 is the work(of an example of the control system for representing the electronic component mounting apparatus involved by the 1st embodiment Can block diagram.
Figure 12 is the schematic diagram for an example for representing the datum mark involved by the 1st embodiment.
Figure 13 is the flow chart for an example for representing the electronic component mounting method involved by the 1st embodiment.
Figure 14 is the figure for the state for showing schematically the suction nozzle rotated with the rotation of axle portion part.
Figure 15 is the signal of an example of the detection data for representing the condition checkout gear involved by the 1st embodiment Figure.
Figure 16 is the schematic diagram for being illustrated to the electronic component mounting method involved by the 1st embodiment.
Figure 17 is the schematic diagram for being illustrated to the electronic component mounting method involved by the 1st embodiment.
Figure 18 is the oblique view for an example for showing schematically the mounting head involved by the 2nd embodiment.
Figure 19 is the flow chart for an example for representing the electronic component mounting method involved by the 2nd embodiment.
The explanation of label
1 ... electronic component mounting apparatus, 2 ... base components, 3 ... base board delivery devices, 3B ... conveyer belts, 3G ... guide portions Part, 3H ... holding members, 4 ... electronic part feeders, 5 ... mounting heads, 5B ... mounting heads, 6 ... mobile systems, 7 ... change Suction nozzle accommodation apparatus, 8 ... filming apparatus, 9 ... condition checkout gears, 10 ... control devices, 11 ... input and output portions, 12 ... storages Portion, 13 ... datum mark configuration parts, 14 ... position error data calculating parts, 15 ... correction data calculating parts, 16 ... control units, 40 ... Belt-type feeder, 41 ... feeder receptacles, 42 ... main frames, 43 ... conveying mechanisms, 44 ... mechanism for stripping, the detection of 45 ... positions Device, 46 ... slit plates, 47 ... collection boxes, 50 ... holding units, 51 ... suction nozzles, 52 ... axle portion parts, 53 ... mounting head main bodys, 54 ... leading sections, 55 ... retainers, 61 ... X-axis driving devices, 62 ... Y-axis driving devices, 63 ... Z axis drive devices, 64 ... θ Z Drive device, 65 ... guide portions, 66 ... sliding parts, 67 ... bearings, 91 ... irradiation units, 91S ... injection parts, 92 ... light dress Put, 421 ... delivery sections, 422 ... entrances, 423 ... outlets, 424 ... stripping portions, 425 ... cover plates, 426 ... opening portions, 431 ... drive Dynamic motor, 432 ... sprocket wheels, 432B ... plectanes portion, 432P ... sprocket pins, 433 ... Poewr transmission mechanisms, 441 ... drivings are electronic Machine, 442 ... conveying rollers, 443 ... Poewr transmission mechanisms, 444 ... idler rollers, 461 ... slits, 531 ... vertical portions, 532 ... upper water Flat portion, 533 ... lower horizontal parts, 611 ... guide members, 612 ... actuators, 621 ... guide members, 622 ... actuators, 631 ... Electric rotating motivation, 632 ... Poewr transmission mechanisms, 632A ... driving pulleys, 632B ... ball screw frameworks, 632C ... driven belts Wheel, 632D ... transmission belts, 641 ... electric rotating motivations, 642 ... Poewr transmission mechanisms, 642A ... driving pulleys, 642C ... driven belts Wheel, 642D ... transmission belts, 681 ... bearings, 682 ... bearings, 683 ... bearings, AX ... rotary shafts, C ... electronic units, G ... positions Error, Gx ... site errors, Gy ... site errors, DM ... installation sites, Gx ... site errors, Gy ... site errors, MA ... inspections Survey region, P ... substrates, RP ... datum marks, the datum lines of RX ... the 1st, the datum lines of RY ... the 2nd, SM ... supply positions, SX ... rotations Axle, TR ... motion tracks, W ... distances.
Embodiment
Below, referring to the drawings, embodiment involved in the present invention is illustrated, but the present invention is not limited to this. The structural element for the embodiment being illustrated below can be appropriately combined.In addition, sometimes without using the structural element of a part.
In the following description, XYZ orthogonal coordinate system is set, while with reference to XYZ orthogonal coordinate system while position to each portion The relation of putting illustrates.The direction parallel with the 1st axle (X-axis) of predetermined surface is set to X-direction, by parallel to predetermined surface with The direction of the 2nd orthogonal axle (Y-axis) of 1st axle is set to Y direction, by parallel to the direction of 3rd axle (Z axis) orthogonal with predetermined surface It is set to Z-direction.In addition, the rotation centered on the 1st axle or incline direction are set to θ X-directions, by centered on the 2nd axle Rotation or incline direction are set to θ Y-directions, and the rotation centered on the 3rd axle or incline direction are set into θ Z-directions.X/Y plane is rule Determine face.
1st embodiment
[electronic component mounting apparatus]
1st embodiment is illustrated.Fig. 1 is to show schematically the electronic unit installation dress involved by present embodiment Put the figure of 1 example.Electronic component mounting apparatus 1 installs electronic unit C to substrate P.In electronic component mounting apparatus 1 In reference position FM is provided.In the present embodiment, XYZ orthogonal coordinate system is with electronic component mounting apparatus 1 Local coordinate on the basis of the reference position FM provided out.
Electronic component mounting apparatus 1 has：Base component 2；Base board delivery device 3, it is conveyed to substrate P；Electronics Assembly supply device 4, it includes the belt-type feeder 40 supplied to electronic unit C；Mounting head 5, it has suction nozzle 51 And the holding unit 50 that axle portion part 52 is included；Mobile system 6, it moves holding unit 50；Change suction nozzle accommodation apparatus 7, it houses the suction nozzle 51 changed；Filming apparatus 8, it obtains electronic unit C view data；And condition checkout gear 9, the state of its suction nozzle 51 to holding unit 50 and it is held in electronic unit C at least one of state of holding unit 50 and enters Row detection.
Base board delivery device 3 conveys to the substrate P for installing electronic unit C.Base board delivery device 3 includes：To substrate P The conveyer belt 3B that is conveyed, the guide member 3G guided to substrate P, the holding member 3H kept to substrate P.It is defeated Send and moved with 3B by the work of actuator, substrate P is conveyed in X-direction.Substrate P is guided by guide member 3G and in X Direction of principal axis moves.Holding member 3H enters in the transport path of base board delivery device 3 at the installation site DM of defined to substrate P Row is kept.Holding member 3H remains substrate P, and the surface of substrate P is parallel with X/Y plane.
Electronic part feeder 4 supplies electronic unit C to the holding unit 50 of mounting head 5.Electronic unit supply dress 4 are put to include：Belt-type feeder 40, the feeder receptacle 41 for detachably supporting belt-type feeder 40.In this embodiment party In formula, electronic part feeder 4 is respectively arranged at the+Y sides and-Y sides of base board delivery device 3.
Belt-type feeder 40 is the electric belt type feeder of electric drive mode.Belt-type feeder 40 configures more in X-direction It is individual.Belt-type feeder 40 is kept to multiple electronic unit C.Belt-type feeder 40 moves electronic unit C in Y direction, Electronic unit C is supplied to the suction nozzle 51 of holding unit 50.Multiple belt-type feeders 40 simultaneously work is configured with X-direction Make, thus simultaneously moved in Y direction in multiple electronic unit C of X-direction configuration.
Mounting head 5 is by the electronic unit C supplied from electronic part feeder 4 to the substrate P for being configured at installation site DM Installation.Mounting head 5 has：Multiple holding units 50, they are configured in X-direction；And mounting head main body 53, it is to multiple guarantors Unit 50 is held to be supported.Mounting head main body 53 is the support member being supported to holding unit 50.Holding unit 50 has： Suction nozzle 51, it detachably keeps electronic unit C；And axle portion part 52, it is supported to suction nozzle 51.
Holding unit 50 can supply electronic unit C supply position SM and substrate P institute from electronic part feeder 4 Moved between the installation site DM of configuration.Supply position SM and installation site DM are specified in different positions in X/Y plane.Protect Hold unit 50 in supply position SM by suction nozzle 51 to being supplied from electronic part feeder 4 to supply position SM electronic unit C Kept, after installation site DM is moved to, installed to substrate P.
Mobile system 6 makes holding unit 50 be moved in 4 directions of X-direction, Y direction, Z-direction and θ Z-directions. Mobile system 6 is controlled on the basis of the FM of reference position to the position of the suction nozzle 51 of holding unit 50.
Mobile system 6 has：X-axis driving device 61, it moves mounting head main body 53 in X-direction；Y-axis driving device 62, it moves mounting head main body 53 in Y direction；Z axis drive device 63, its holding list that will be set in mounting head main body 53 Member 50 moves in Z-direction；And θ Z drive devices 64, it is by the holding unit 50 set in mounting head main body 53 in θ Z-directions It is mobile.
X-axis driving device 61 has：Guide member 611, it is guided in X-direction to mounting head 5；And actuator 612, it produces the power for making mounting head 5 be moved in X-direction.Mounting head 5 is connected with X-axis driving device 61.Pass through X-axis Drive device 61 makes mounting head 5 be moved in X-direction, and thus holding unit 50 moves in X-direction.
Y-axis driving device 62 has：Guide member 621, it is guided in Y direction to X-axis driving device 61；And Actuator 622, it produces the power for making guide member 621 be moved in Y direction.The guide member of X-axis driving device 61 611 can movably be supported in the guide member 621 of Y-axis driving device 62 in Y direction.X-axis is made by Y-axis driving device 62 The guide member 611 of drive device 61 moves in Y direction, is thus supported in the mounting head 5 and guide member of guide member 611 611 move in Y direction together.Mounting head 5 moves in Y direction, and thus holding unit 50 moves in Y direction.
Z axis drive device 63 is supported in mounting head main body 53.Z axis drive device 63 has：Actuator, it is produced for making The power that holding unit 50 moves in Z-direction；And Poewr transmission mechanism, the power as caused by actuator is transferred to guarantor by it Hold unit 50.By Z axis drive device 63, holding unit 50 moves in Z-direction.
θ Z drive devices 64 are supported in mounting head main body 53.θ Z drive devices 64 have：Actuator, it is produced for making guarantor Hold the power that unit 50 rotates in θ Z-directions；And Poewr transmission mechanism, the power as caused by actuator is transferred to holding by it Unit 50.By θ Z drive devices 64, holding unit 50 rotates in θ Z-directions.
Suction nozzle accommodation apparatus 7 is changed to house the suction nozzle 51 of multiple species.It is right in suction nozzle accommodation apparatus 7 is changed The suction nozzle 51 for being loaded into axle portion part 52 is changed.
Filming apparatus 8 obtains the view data of suction nozzle 51 and is held in the electronic unit C of suction nozzle 51 view data extremely Few one.Filming apparatus 8 to suction nozzle 51 or is held in the electronic unit C of suction nozzle 51 and shot from-Z sides (downside).By taking Electronic unit C view data is obtained, so as to the shape to the electronic unit C for being held in suction nozzle 51 and the electricity realized by suction nozzle 51 Subassembly C hold mode is detected.
Detection light is irradiated by condition checkout gear 9 to suction nozzle 51, and the state of suction nozzle 51 is detected.In addition, shape Detection light is irradiated by state detection means 9 to the electronic unit C for being held in suction nozzle 51, and electronic unit C state is examined Survey.Condition checkout gear 9 is arranged at mounting head 5.
[electronic part feeder]
Next, electronic part feeder 4 is illustrated.Fig. 2 is showed schematically involved by present embodiment The side view of one example of the belt-type feeder 40 of electronic part feeder 4.Fig. 3 is by the band involved by present embodiment The sectional view of the part amplification of formula feeder 40.
As shown in Fig. 2 belt-type feeder 40 has：Main frame 42；Conveying mechanism 43, it is supported in main frame 42, to carrying Material strip T is conveyed；And mechanism for stripping 44, it is supported in main frame 42, and covering band E is peeled off from material containing band T.
Multiple electronic unit C are held in material containing band T.Electronic unit C is set at equal intervals in length direction of the material containing with T It is multiple.Electronic unit C is configured in pocket R of the material containing with T is arranged at.Pocket R in length direction of the material containing with T at equal intervals Set multiple.Multiple pocket R each in configuration electronic unit C.In material containing band T fitting covering bands E.
Main frame 42 has：Delivery section 421, material containing band T are moved in delivery section 421；The material containing supplied from tep reel is with T's Entrance 422；And outlet 423 of the material containing moved in delivery section 421 with T.Material containing band T is in delivery section 421 along Y direction It is mobile.
Main frame 42 has the stripping portion 424 for peeling off covering with T from material containing with E.Stripping portion 424 is arranged at and main frame The cover plate 425 of 42 connections.Cover plate 425 is configured to cover from top by the material containing band T of delivery section 421.In the stripping portion of cover plate 425 In 424, material containing band T and covering band E are stripped.
As shown in figure 3, covering band E turns back upward in stripping portion 424, moved by mechanism for stripping 44 to -Y direction It is dynamic.Material containing band T is moved by conveying mechanism 43 to +Y direction.Covering band E is moved by mechanism for stripping 44, material containing band T Moved by conveying mechanism 43, thus peel off covering band E from material containing band T in stripping portion 424.
Material containing band T of the covering with E has been peeled off to move to +Y direction.Cover plate 425 has compared with stripping portion 424 in+Y sides shape Into opening portion 426.Electronic unit C is conveyed in the state of pocket R of the material containing with T is configured at.Compare electronics in opening portion 426 Part C size and pocket R size are big.Opening portion 426 includes supply position SM.The electronic unit C configured in pocket R matches somebody with somebody Opening portion 426 is placed in, thus suction nozzle 51 can be kept via opening portion 426 to electronic unit C.
Belt-type feeder 40 by from the material containing that tep reel supplies with T with pocket R interval intermittently stepping move, in stripping portion Covering band E is peeled off from material containing band T in 424, the electronic unit C kept in material containing of the covering with E has been peeled off with T is moved to Supply position SM.
Conveying mechanism 43 has：Drive motor 431, it is supported in main frame 42；Sprocket wheel 432, it can rotate twelve Earthly Branches Support in main frame 42；And Poewr transmission mechanism 433, the power as caused by drive motor 431 is transferred to sprocket wheel 432 by it. In the present embodiment, drive motor 431 is stepping motor.Poewr transmission mechanism 433 includes multiple gears.Sprocket wheel 432 Rotated by the power as caused by drive motor 431, by the material containing kept to electronic unit C band T to +Y direction It is mobile.
Sprocket wheel 432 is pivoted about with the rotary shaft SX parallel with X-axis.Sprocket wheel 432 passes through drive motor 431 Stepwise operation and intermittently stepping rotate.Drive motor 431 is so that the electronic unit configured in pocket R C to be configured at successively The mode of opening portion 426 carries out stepwise operation.
There is belt-type feeder 40 position detected to the position of the sprocket wheel 432 on the direction of rotation of sprocket wheel 432 to examine Survey device 45.In the present embodiment, the slit plate 46 with multiple slits 461 is fixed on sprocket wheel 432.Slit plate 46 and sprocket wheel 432 rotate together.Position detecting device 45 detects to the slit 461 for being fixed on the slit plate 46 of sprocket wheel 432, to rotation side Detected the absolute position of upward sprocket wheel 432.
Mechanism for stripping 44 has：Drive motor 441, it is supported in main frame 42；A pair of conveying rollers 442, they can It is rotatably supported at main frame 42；Poewr transmission mechanism 443, the power as caused by drive motor 441 is transferred to conveying by it Roller 442；And idler roller 444, it assigns tension force to covering band E.
Poewr transmission mechanism 443 includes multiple gears.A pair of conveying rollers 442 are configured to clip covering band E.Conveying roller 442 are rotated by the power caused by the drive motor 441, and covering band E is moved to -Y direction.
Drive motor 441 is stepping motor.Conveying roller 442 is by the stepwise operation of drive motor 441 and interrupted Ground stepping rotation.Drive motor 441 synchronously carries out stepwise operation with drive motor 431.Drive motor 441 is walked Enter action, it is identical with amount of movement of the covering with E by amount of movement of the material containing with T caused by drive motor 431 to cause.By defeated The covering that roller 442 conveys is sent to be recycled to the collection box 47 set in main frame 42 with E.
Fig. 4 is an example for showing schematically sprocket wheel 432 and position detecting device 45 involved by present embodiment Side view.As shown in figure 4, sprocket wheel 432 has：Plectane portion 432B；And sprocket pin 432P, it is arranged at the outer of plectane portion 432B Edge.
Sprocket pin 432P on the direction of rotation of sprocket wheel 432 interval and set multiple.Sprocket pin 432P is respectively configured In sprocket hole H of the material containing with T.
Slit plate 46 is fixed on sprocket wheel 432.Slit plate 46 is discoideus part.Slit plate 46 revolves together with sprocket wheel 432 Turn.The rotary shaft SX of sprocket wheel 432 is consistent with the center of slit plate 46.Slit plate 46 can be revolved centered on rotary shaft SX Turn.
Slit plate 46 has the multiple slits 461 set in direction of rotation.Multiple slits with different slit widths 461 are arranged at slit plate 46.Slit width refers to the size of the slit 461 on direction of rotation.The slit of different slit widths 461 are randomly set in direction of rotation.
Position detecting device 45 detects to the absolute position of the sprocket wheel 432 on the direction of rotation of sprocket wheel 432.Examine position Survey device 45 and include optical sensor, optically detected to being fixed on the slit 461 of slit plate 46 of sprocket wheel 432, to rotation Detected the absolute position of sprocket wheel 432 on direction.Position detecting device 45 has：Injection part, its by detection light project and Detection light is irradiated to slit plate 46；And light accepting part, it is across slit plate 46 to the detection light that is projected from injection part At least a portion carries out light.
Sprocket wheel 432 and slit plate 46 are rotated, and thus position detecting device 45 is examined successively to multiple slits 461 Survey.Position detecting device 45 singly detects to slit 461.Position detecting device 45 passes through multiple slits 461 The combination of slit width, the absolute position of the slit plate 46 on the direction of rotation of slit plate 46 is detected.By to slit The absolute position of slit plate 46 on the direction of rotation of plate 46 is detected, so as to the sprocket wheel on the direction of rotation of sprocket wheel 432 Detected 432 absolute position.
Fig. 5 is the top view for showing schematically an example of the material containing with T involved by present embodiment.Fig. 6 is signal Ground represents the side view for an example of the material containing with T that the sprocket wheel 432 involved by present embodiment moves.
As shown in figure 5, material containing band T moves in Y direction.Multiple sprocket hole H-shaped are into material containing band T.Multiple sprocket hole H exist Set in material containing band T along Y direction interval.In addition, between multiple electronic unit C are separated in material containing band T along Y direction Every and set.
As shown in fig. 6, at least a portion sprocket pin 432P being arranged in multiple sprocket pin 432P of sprocket wheel 432 is configured at Sprocket hole H of the material containing with T.In the state of sprocket pin 432P is configured at sprocket hole H, sprocket wheel 432 is entered centered on rotary shaft AX Row rotation, thus material containing band T is in Y direction movement.
Position detecting device 45 detects to the position of the sprocket wheel 432 on direction of rotation.Sprocket wheel 432 on direction of rotation Position and the electronic unit C position that is held in Y direction of the material containing with T be corresponding to 1 pair of 1 ground.Detected based on position The detection data of device 45, the position of the electronic unit C in Y direction is calculated.In addition, position detecting device 45 can The rotation amount of sprocket wheel 432 is detected.The rotation amount of sprocket wheel 432 and the electronic unit being held in Y direction of the material containing with T C amount of movement is corresponding to 1 pair of 1 ground.Detection data based on position detecting device 45, to the electronic unit C's in Y direction Amount of movement is calculated.
In feeder receptacle 41, belt-type feeder 40 configures multiple in X-direction.In feeder receptacle 41, Electronic unit C configures multiple in X-direction.Belt-type feeder 40 moves electronic unit C in Y direction, to holding unit 50 Suction nozzle 51 supply electronic unit C.Electronic part feeder 4 is by the multiple electronic unit C configured in X-direction in Y-axis side To movement, electronic unit C is supplied respectively to the suction nozzle 51 that multiple holding units 50 is configured with X-direction.
[mounting head]
Next, mounting head 5 is illustrated.Fig. 7 is show schematically mounting head 5 involved by present embodiment one The side view of individual example.Fig. 8 is the front view for an example for showing schematically the mounting head 5 involved by present embodiment.
As shown in Figures 7 and 8, mounting head 5 has：Multiple holding units 50, they are set in X-direction；And installation Head main body 53, it is supported to multiple holding units 50.Multiple holding units 50 are configured to a row in X-direction.
Holding unit 50 has：Axle portion part 52；And suction nozzle 51, it is connected with axle portion part 52, has to enter electronic unit C The leading section 54 that row is kept.
Axle portion part 52 sets multiple in X-direction.Axle portion part 52 extends along Z-direction.Axle portion part 52 can be to put down with Z axis The rotary shaft AX of capable axle portion part 52 is pivoted about.Construction and the size difference of multiple axle portion parts 52 are equal.Multiple axles The weight of part 52 is also equal respectively.
Suction nozzle 51 is connected with the bottom of axle portion part 52.Suction nozzle 51 is connected with multiple axle portion parts 52 respectively.Suction nozzle 51 is in X-axis Direction sets multiple.
In the present embodiment, holding unit 50 sets 8 in X-direction.I.e., in the present embodiment, axle portion part 52 8 are set in X-direction, suction nozzle 51 sets 8 in X-direction.
Suction nozzle 51 detachably keeps electronic unit C.Suction nozzle 51 is the attraction for electronic unit C adsorb holding Suction nozzle.In the leading section 54 of suction nozzle 51, opening is set.The opening of suction nozzle 51 is connected with vacuum system.In the leading section 54 of suction nozzle 51 In the state of being contacted with electronic unit C, implement to carry out the attraction action of the opening of the setting of leading section 54 of comfortable suction nozzle 51, thus exist The leading section 54 of suction nozzle 51 carries out absorption holding to electronic unit C.By the way that the attraction of the opening from leading section 54 is acted into solution Remove, so as to be decontroled from suction nozzle 51 by electronic unit C.
Mounting head 5 has the mounting head main body 53 being supported to holding unit 50.Mounting head main body 53 is with multiple holdings The leading section 54 of the suction nozzle 51 of unit 50 is carried out in the mode that X-direction configures at equal intervals to these multiple holding units 50 Support.
Multiple axle portion parts 52 are able to pivot about with the rotary shaft AX of the axle portion part 52 orthogonal with X/Y plane Ground is supported in mounting head main body 53.
Mounting head main body 53 has：Vertical portion 531, it extends in Z-direction；Upper horizontal part 532, it is from vertical portion 531 Upper end to +Y direction extend；And lower horizontal part 533, it stretches out from the bottom in vertical portion 531 to -Y direction.
Mounting head main body 53 is kept via retainer 55 to holding unit 50.Retainer 55 is carried out to axle portion part 52 Keep.
Vertical portion 531 has the guide portion 65 in Z-direction extension.Retainer 55 has and can moved in guide portion 65 Sliding part 66.Retainer 55 can be directed while moving by the one side of guide portion 65 in Z-direction.
Mounting head 5 has：Z axis drive device 63, it moves holding unit 50 in Z-direction；And θ Z drive devices 64, it moves holding unit 50 in θ Z-directions.
Z axis drive device 63 is supported in mounting head main body 53, and retainer 55 is moved in Z-direction.Z axis drive device 63 Have：Electric rotating motivation 631, it is the actuator for producing the power for making axle portion part 52 be moved in Z-direction；And power Transmission mechanism 632, the power as caused by electric rotating motivation 631 is transferred to axle portion part 52 by it.If the work of electric rotating motivation 631 Make, then power is transferred to retainer 55 via Poewr transmission mechanism 632 as caused by electric rotating motivation 631.Retainer 55 is logical The power as caused by electric rotating motivation 631 is crossed, is moved in Z-direction.If retainer 55 moves in Z-direction, it is held in The axle portion part 52 of the retainer 55 and it is supported in the suction nozzle 51 of the axle portion part 52 and is moved together with retainer 55 in Z-direction.
θ Z drive devices 64 are supported in mounting head main body 53, and axle portion part 52 is rotated in θ Z-directions.θ Z drive devices 64 have Have：Electric rotating motivation 641, it is the actuator for producing the power for being used for making axle portion part 52 be rotated in θ Z-directions；And power passes Mechanism 642 is passed, the power as caused by electric rotating motivation 641 is transferred to axle portion part 52 by it.If electric rotating motivation 641 works, Then power is transferred to axle portion part 52 via Poewr transmission mechanism 642 as caused by electric rotating motivation 641.Axle portion part 52 by by Power caused by electric rotating motivation 641, moved in θ Z-directions.If axle portion part 52 moves in θ Z-directions, the axle portion is supported in The suction nozzle 51 of part 52 moves together with axle portion part 52 in θ Z-directions.
On multiple holding units 50, Z axis drive device 63 and θ Z drive devices 64 are set respectively.That is, mounting head main body 53 have：Multiple electric rotating motivations 631, they are the causes for producing the power for making multiple axle portion parts 52 be moved respectively in Z-direction Dynamic device；And multiple electric rotating motivations 641, they are the causes for producing the power for making multiple axle portion parts 52 be rotated respectively in θ Z-directions Dynamic device.In the present embodiment, mounting head 5 has：8 electric rotating motivations 631, they, which are produced, makes 8 axle portion parts 52 respectively in Z The power of direction of principal axis movement；And 8 electric rotating motivations 641, they, which are produced, makes 8 axle portion parts 52 respectively in the rotation of θ Z-directions Power.Multiple holding units 50 are by the work of Z axis drive device 63 and θ Z drive devices 64, relative to mounting head main body 53, It can be moved respectively in 2 directions of Z-direction and θ Z-directions.
As shown in fig. 7, the electric rotating motivation 631 of Z axis drive device 63 is supported in horizontal part 532.θ Z drive devices 64 Electric rotating motivation 641 be supported in lower horizontal part 533.
Poewr transmission mechanism 632 has：Driving pulley 632A, its output axis connection with electric rotating motivation 631；Ball wire Thick stick mechanism 632B, it links retainer 55 and upper horizontal part 532；Driven pulley 632C, it is with ball screw framework 632B's Screw mandrel axis connection；And transmission belt 632D, it links driving pulley 632A and driven pulley 632C.Ball screw framework 632B Screw axis can be rotatably supported at upper horizontal part 532 set bearing 67.Ball screw framework 632B nut is fixed In retainer 55.Transmission belt 632D is transmission belt for no reason.
In X/Y plane, the position of the central shaft of the output shaft of electric rotating motivation 631 and driving pulley 632A central shaft Position consistency.In X/Y plane, the position of the central shaft of ball screw framework 632B screw axis and driven pulley 632C's The position consistency of central shaft.
If electric rotating motivation 631 works, revolved with the driving pulley 632A of the output axis connection of electric rotating motivation 631 Turn.If driving pulley 632A rotates, driving pulley 632A transmission belt 632D movements, driven pulley 632C rotations are supported in Turn.If driven pulley 632C rotates, ball screw framework 632B screw axis rotation.Ball screw framework 632B screw mandrel Axle is rotated, and one side directed section 65 of retainer 55 for being thus fixed on ball screw framework 632B nut is guided while in Z axis Move in direction.If retainer 55 moves in Z-direction, it is held in the axle portion part 52 of the retainer 55 and is supported in the axle portion The suction nozzle 51 of part 52 moves together with retainer 55 in Z-direction.
Poewr transmission mechanism 642 has：Driving pulley 642A, its output axis connection with electric rotating motivation 641；Driven belt 642C is taken turns, it is connected with axle portion part 52；And transmission belt 642D, it links driving pulley 642A and driven pulley 642C.Axle Part 52 can be rotatably supported at retainer 55 set bearing 681, mounting head main body 53 set bearing 682 and In the bearing 683 that mounting head main body 53 is set.Transmission belt 642D is transmission belt for no reason.
In X/Y plane, the position of the central shaft of the output shaft of electric rotating motivation 641 and driving pulley 642A central shaft Position consistency.In X/Y plane, the position consistency of the position of the central shaft of axle portion part 52 and driven pulley 642C central shaft.
If electric rotating motivation 641 works, revolved with the driving pulley 642A of the output axis connection of electric rotating motivation 641 Turn.If driving pulley 642A rotates, driving pulley 642A transmission belt 642D movements, driven pulley 642C rotations are supported in Turn.If driven pulley 642C rotates, driven pulley 642C axle portion part 52 is fixed on together with driven pulley 642C in θ Z Direction rotates.
[condition checkout gear]
Next, condition checkout gear 9 is illustrated.As shown in fig. 7, mounting head 5 have to the state of suction nozzle 51 and It is held at least one condition checkout gear detected 9 of the electronic unit C of suction nozzle 51 state.Condition checkout gear 9 Detection light is irradiated to suction nozzle 51, the state of suction nozzle 51 is detected.Condition checkout gear 9 is by detection light to being held in The electronic unit C of suction nozzle 51 is irradiated, and is detected to being held in the electronic unit C state of suction nozzle 51.
The state of suction nozzle 51 include suction nozzle 51 shape and suction nozzle 51 position it is at least one.The position of suction nozzle 51 includes The position of suction nozzle 51 in X-direction, Y direction and θ Z-directions.
Electronic unit C state include electronic unit C shape and be held in suction nozzle 51 electronic unit C position extremely Few one.Electronic unit C position includes the position of the electronic unit C in X-direction, Y direction and θ Z-directions.
Condition checkout gear 9 has：Irradiation unit 91, its can using as the laser of detection light to suction nozzle 51 and the ministry of electronics industry At least one of part C is irradiated；And infrared rays receiver 92, it can be at least one of the laser projected from irradiation unit 91 Divide and carry out light.Irradiation unit 91 includes the light-emitting component that can project laser.Infrared rays receiver 92 includes that laser can be entered The photo detector of row light.Infrared rays receiver 92 is configured at the position relative with irradiation unit 91.Irradiation unit 91 in Z-direction Position and infrared rays receiver 92 position it is equal.Laser is irradiated by condition checkout gear 9 to suction nozzle 51, to the shape of suction nozzle 51 State is detected.In addition, laser is irradiated by condition checkout gear 9 to the electronic unit C for being held in suction nozzle 51, to the ministry of electronics industry Part C state is detected.
The irradiation unit 91 of condition checkout gear 9 is configured at the -Y direction of holding unit 50.Condition checkout gear 9 by Electro-optical device 92 is configured at the +Y direction of holding unit 50.Condition checkout gear 9 is supported in mounting head main body 53.Driven by X-axis Device 61 and Y-axis driving device 62 make mounting head main body 53 be moved in X-direction and Y direction, are thus supported in the mounting head The condition checkout gear 9 of main body 53 moves together with mounting head main body 53.
Fig. 9 is the side view for an example for showing schematically the condition checkout gear 9 involved by present embodiment.Figure 10 It is the top view for an example for showing schematically the condition checkout gear 9 involved by present embodiment.Using Fig. 9 and Figure 10 Explanation in, the example detected on condition checkout gear 9 to the state for being held in the electronic unit C of suction nozzle 51 is said It is bright.
As shown in FIG. 9 and 10, condition checkout gear 9 has：Irradiation unit 91, it can be by laser to being held in suction nozzle 51 electronic unit C is irradiated；And infrared rays receiver 92, it can carry out light to laser.Condition checkout gear 9 is put down to XY Detected the position of electronic unit C in the shape and X/Y plane of electronic unit C in face.
Condition checkout gear 9 is configured with electronic unit C at least a portion between irradiation unit 91 and infrared rays receiver 92 In the state of, laser is projected from irradiation unit 91, by infrared rays receiver 92 to being detected to the laser for reaching infrared rays receiver 92. Irradiation unit 91 has multiple injection part 91S in X-direction configuration.It will be configured from irradiation unit 91 along X-direction multiple Laser projects.The injection part 91S of irradiation unit 91 projects laser in Y direction.The laser projected from irradiation unit 91 is in Y-axis Advance in direction.
Condition checkout gear 9 enters to the electronic unit C at least one of shape configured in detection zone MA and position Row detection.Detection zone MA includes the irradiation area of the laser projected from irradiation unit 91.In the present embodiment, detection zone MA extends along X-direction, almost parallel with X-axis.
The suction nozzle 51 of holding unit 50 is kept to the upper surface of the electronic unit C towards +Z direction.It is by mobile 6 pairs of system keeps the position of electronic unit C holding unit 50 to be adjusted, to cause electronic unit C to be configured at state-detection dress Put 9 detection zone MA.
As shown in Figure 10, electronic unit C is configured between irradiation unit 91 and infrared rays receiver 92, is projected from irradiation unit 91 At least a portion of laser blocked by electronic unit C.Because at least a portion of laser is blocked by electronic unit C, therefore penetrate Enter the intensity distribution variation of the laser to infrared rays receiver 92.Condition checkout gear 9 based on by the light of infrared rays receiver 92 to laser Intensity distribution, the electronic unit C configured in detection zone MA profile can be detected.
As shown in Figure 10, by the work of θ Z drive devices 64, the one side of suction nozzle 51 kept to electronic unit C is in θ Z Direction rotates, and the laser projected from the irradiation unit 91 of condition checkout gear 9 to electronic unit C while be irradiated.Due to electricity Subassembly C rotates, therefore the irradiated site of the laser in electronic unit C and electronic unit C are relative to the relative of infrared rays receiver 92 Angle change.
It is irradiated with a laser in the electronic unit C of θ Z-directions rotation, thus to multiple relative angles relative to infrared rays receiver 92 The profile of electronic unit C under all angles of degree is detected.Electronic unit C of the condition checkout gear 9 by laser to rotation It is irradiated, the profile of the electronic unit C to being configured in detection zone MA detects.Electronic unit C at least revolves in θ Z-directions Turn 360 [°].Condition checkout gear 9 is directed to multiple positions of θ Z-directions, respectively the electronic unit C to being configured in detection zone MA Profile detected.Pass through the shape data of the electronic unit C to being detected in each position of multiple positions of θ Z-directions Synthesized, so as to which the shape to the electronic unit C configured in detection zone MA and position calculate.
For example, in the state of electronic unit C is configured at detection zone MA, electronic unit C rotations, to being filled relative to light The shape data for putting the electronic unit C under all angles of 92 multiple relative angles is synthesized, thus in X/Y plane The position of electronic unit C in electronic unit C shape and X/Y plane is calculated.
In addition, in the state of suction nozzle 51 is configured at detection zone MA, suction nozzle 51 rotates, to relative to infrared rays receiver 92 The shape data of suction nozzle 51 under all angles of multiple relative angles is synthesized, thus to the shape of the suction nozzle 51 in X/Y plane The position of suction nozzle 51 in shape and X/Y plane is calculated.
In the present embodiment, the datum mark RP of the ideal position for the leading section 54 for representing the suction nozzle 51 in X/Y plane is entered Professional etiquette is determined.Condition checkout gear 9 can detect to the position of the leading section 54 of the suction nozzle 51 in X/Y plane.Based on datum mark The position of the leading section 54 of RP and the suction nozzle 51 detected by condition checkout gear 9, to the datum mark RP and suction nozzle in X/Y plane The site error of 51 leading section 54 is calculated.
[control system]
Next, the control system of the electronic component mounting apparatus 1 involved by present embodiment is illustrated.Figure 11 is Represent the functional block diagram of an example of the control system of the electronic component mounting apparatus 1 involved by present embodiment.Such as Figure 11 Shown, electronic component mounting apparatus 1 has control device 10.Structural element of the control device 10 to electronic component mounting apparatus 1 It is controlled.
Control device 10 includes computer system.Control device 10 has：Arithmetic processing apparatus, it includes such as CPU Processor as (Central Processing Unit)；And storage device, it includes such as ROM (Read Only ) or memory and holder as RAM (Random Access Memory) Memory.Arithmetic processing apparatus is according to storing The computer program that is stored in device and implement calculation process.
As shown in figure 11, control device 10 has：Input and output portion 11；Storage part 12；Datum mark configuration part 13, it is to table Show that the datum mark RP of the ideal position of the leading section 54 of the suction nozzle 51 in X/Y plane is set；Position error data calculating part 14, it is calculated the datum mark RP in X/Y plane and the site error of the leading section 54 of suction nozzle 51；Correction data calculating part 15, it is calculated for passing through electronic part feeder 4 based on the site error calculated by position error data calculating part 14 The correction data of the amount of movement of caused electronic unit C Y direction；And control unit 16, it is based on by position error data The datum mark RP and the site error of the Y direction of the leading section 54 of suction nozzle 51 that calculating part 14 calculates, will make electronic unit C exist The control signal of Y direction movement is exported to electronic part feeder 4.
Input and output portion 11 obtains view data from filming apparatus 8.Input and output portion 11 obtains XY from condition checkout gear 9 The position data of the leading section 54 of suction nozzle 51 in plane.Input and output portion 11 detects from the position of electronic part feeder 4 Device 45 obtains the position data and rotation data of the sprocket wheel 432 on direction of rotation.Input and output portion 11 is defeated to mobile system 6 Go out control signal.Drive motor 431 output control signal of the input and output portion 11 to electronic part feeder 4.
Datum mark configuration part 13 is to representing that the datum mark RP of the ideal position of the leading section 54 of the suction nozzle 51 in X/Y plane enters Row setting.In the present embodiment, datum mark configuration part 13 is for being moved to supply position SM mounting head 5 and to datum mark RP Set.Position data mounting head position detecting device as such as encoder of mounting head main body 53 in X/Y plane Detected.The position being moved in the X/Y plane of supply position SM mounting head main body 53 is entered by mounting head position detecting device Row detection.Datum mark configuration part 13 will be moved to the position of supply position SM mounting head main body 53 as benchmark, to datum mark RP is set.
Figure 12 is the schematic diagram for an example for representing the datum mark RP involved by present embodiment.As shown in figure 12, base RP is provided multiple at equal intervals in the 1st datum line RX parallel with X-axis on schedule.Adjacent datum mark RP in the X-axis direction Distance W is constant.
Datum mark configuration part 13 is set to datum mark RP respectively for the leading section 54 of multiple suction nozzles 51.That is, at this In embodiment, datum mark RP sets 8 at equal intervals along the 1st datum line RX.In addition, in fig. 12, in order to improve identification Property, to datum mark in the datum mark RP on the leading section 54 of 8 suction nozzles 51, relevant with the leading section 54 of 4 suction nozzles 51 RP is shown.
Position error data calculating part 14 is based on the datum mark RP's in the X/Y plane set out by datum mark configuration part 13 The position data of the leading section 54 of position data and the suction nozzle 51 in the X/Y plane detected by condition checkout gear 9, puts down to XY The site error G of the leading section 54 of datum mark RP and suction nozzle 51 in face is calculated.Datum mark RP and suction nozzle 51 leading section 54 site error G is the leading section 54 of the datum mark RP and the suction nozzle 51 detected by condition checkout gear 9 in X/Y plane Distance.Condition checkout gear 9 is fixed on mounting head main body 53.Condition checkout gear 9 is using the position of mounting head main body 53 as base Standard, the position of the leading section 54 of the suction nozzle 51 in X/Y plane is detected.Position error data calculating part 14 will be moved to confession To position SM mounting head main body 53 position as benchmark, to datum mark RP and the site error G of the leading section 54 of suction nozzle 51 Calculated.
The site error G of the leading section 54 of datum mark RP and suction nozzle 51 includes site error Gx and Y-axis side in X-direction Upward site error Gy.Position error data calculating part 14 calculates for before multiple datum mark RP and multiple suction nozzles 51 respectively The site error G of end 54.
Correction data calculating part 15 is directed to based on the site error G calculated by position error data calculating part 14, calculating Pass through the correction data of the amount of movement of electronic unit C Y direction caused by electronic part feeder 4.Correction data calculates 15 pairs of portion to the suction nozzle 51 for being configured at supply position SM with being supplied electronic unit C in Y direction movement from belt-type feeder 40 To when the relevant correction data of amount of movement of Y direction calculated.15 pairs of correction data calculating part with by being configured at Electronic unit C Y-axis caused by the difference of multiple belt-type feeders 40 that supply position SM multiple suction nozzles 51 are supplied respectively The correction data that the amount of movement in direction is relevant is calculated.
Miss the position of each comfortable Y direction of leading section 54 of the control unit 16 based on multiple datum mark RP and multiple suction nozzles 51 Poor Gy, the control signal that electronic unit C moves in Y direction will be made to export to electronic part feeder 4.In present embodiment In, control unit 16 is based on the correction data calculated by correction data calculating part 15, respectively to the more of electronic part feeder 4 The output control signal of drive motor 431 of individual belt-type feeder 40.
[electronic component mounting method]
Next, an example of the electronic component mounting method involved by present embodiment is illustrated.Figure 13 is Represent the flow chart of an example of the electronic component mounting method involved by present embodiment.
Control device 10 is controlled to Z axis drive device 63 and θ Z drive devices 64, by the leading section of multiple suction nozzles 51 54 are configured at the detection zone MA of condition checkout gear 9.Control device 10 is configured at state in the leading section 54 of multiple suction nozzles 51 In the state of the detection zone MA of detection means 9, the θ Z drive devices 64 comprising electric rotating motivation 641 is worked, make to rotate Multiple axle portion parts 52 that mounting head main body 53 can be rotatably supported at centered on axle AX rotate (step SA10).
The detection zone MA of condition checkout gear 9 is configured in the leading section 54 of suction nozzle 51, axle portion part 52 revolves in θ Z-directions In the state of turning, condition checkout gear 9 detects to the motion track of the leading section 54 of the suction nozzle 51 in X/Y plane.State is examined Device 9 is surveyed to detect (step SA20) the 54 respective motion track of leading section of multiple suction nozzles 51.
Figure 14 is the figure for the state for showing schematically the suction nozzle 51 rotated with the rotation of axle portion part 52.In axle portion Part 52 has preferable linearity, rotation, the leading section 54 of suction nozzle 51 are present in rotary shaft exactly centered on rotary shaft AX In the case that AX is upper, in the rotation of axle portion part 52, the position of the leading section 54 of the suction nozzle 51 in X/Y plane does not change, with benchmark Point RP persistently coincide.In other words, in the rotation of axle portion part 52, the leading section 54 of suction nozzle 51 is not eccentric from central shaft AX and carries out Rotation.
For example, due to the warpage of axle portion part 52, suction nozzle 51 relative to the connection error of axle portion part 52, axle portion part 52 relative to The foozle of the support error of mounting head main body 53, the foozle of axle portion part 52 and suction nozzle 51 it is at least one, such as Figure 14 Shown, in the rotation of axle portion part 52, the position of the leading section 54 of the suction nozzle 51 in X/Y plane is possible to change, or is possible to Separated from datum mark RP.In other words, in the rotation of axle portion part 52, the leading section 54 of suction nozzle 51 is possible to eccentric from central shaft AX And rotated.
Figure 15 is the signal of an example of the detection data for representing the condition checkout gear 9 involved by present embodiment Figure.Condition checkout gear 9 is in the rotation of axle portion part 52, the 54 respective movement of leading section to multiple suction nozzles 51 in X/Y plane Track TR is detected.As shown in figure 15, the motion track TR of circle is depicted in the leading section 54 of suction nozzle 51.In addition, in Figure 12 In, in order to improve identity, to leading section 54 in the motion track TR of the leading section 54 of 8 suction nozzles 51,4 suction nozzles 51 Motion track TR is shown.
In the present embodiment, holding unit 50 can be rotatably supported at mounting head main body 53, to cause in axle portion part In 52 rotation, position and the datum mark RP of the motion track TR of the leading section 54 of suction nozzle 51 at least one of X-direction X-direction position consistency.I.e., in the present embodiment, in the rotation of axle portion part 52, although the suction nozzle 51 in X/Y plane Leading section 54 shift in position, but with the leading section 54 of suction nozzle 51 through datum mark RP and 2nd datum line parallel with Y-axis The mode passed through in RY, axle portion part 52 has been carried out relative to the mounting and adjusting and suction nozzle 51 of mounting head main body 53 relative to axle portion The mounting and adjusting of part 52.In other words, in the rotation of axle portion part 52, the adjustment of mounting head 5 has been carried out, to cause motion track TR At least one of X-coordinate it is consistent with datum mark RP X-coordinate.
Benchmark when position error data calculating part 14 is configured at supply position SM to mounting head main body 53, in X/Y plane The site error G of the leading section 54 of point RP and suction nozzle 51 is calculated.
In the present embodiment, detection data of the position error data calculating part 14 based on condition checkout gear 9, put down to XY The motion track TR of the leading section 54 of suction nozzle 51 in face position data is calculated.
Position error data calculating part 14 determines the position of multiple axle portion parts 52 of the direction of rotation centered on rotary shaft AX Put, to cause in the motion track TR of the leading section 54 of suction nozzle 51, and the multiple bases that at equal intervals provide out parallel with X-axis On schedule the site error Gx of the 54 respective X-direction of leading section of RP and multiple suction nozzles 51 be less than or equal to it is prespecified go out threshold Value.
In the present embodiment, threshold value is fully small.In the present embodiment, position error data calculating part 14 determines benchmark The site error Gx of the X-direction of the leading section 54 of point RP and suction nozzle 51 (walks as the position of the axle portion part 52 of zero θ Z-directions Rapid SA30).
That is, position error data calculating part 14 is determined according to the motion track TR of the leading section 54 of suction nozzle 51 position data Determine leading section 54 X-coordinate it is consistent with datum mark RP X-coordinate when θ Z-directions axle portion part 52 position.
Position error data calculating part 14 is directed to each holding unit of multiple holding units 50, determines the axle portion of θ Z-directions The position of part 52, to cause the site error Gx of the X-direction of datum mark RP and suction nozzle 51 leading section 54 to turn into zero.
In the present embodiment, position error data calculating part 14 in the rotation of axle portion part 52 by condition checkout gear The motion track TR and the 2nd datum line RY of the leading section 54 of the 9 multiple suction nozzles 51 detected intersection point are calculated, with multiple suctions The leading section 54 of mouth 51 be positioned at the intersection point mode determine θ Z-directions axle portion part 52 position.Site error Gx is as zero The position of the axle portion part 52 of θ Z-directions, it is that the leading section 54 of suction nozzle 51 is positioned at motion track TR and the 2nd datum line RY intersection point θ Z-directions axle portion part 52 position.
Site error Gx fills as the position of the axle portion part 52 of zero θ Z-directions and site error Gx as zero θ Z drivings The drive volume for putting 64 electric rotating motivation 641 is corresponding to 1 pair of 1 ground.Position error data calculating part 14 determine datum mark RP and The site error Gx of the X-direction of the leading section 54 of suction nozzle 51 turns into the drive of the electric rotating motivation 641 of zero θ Z drive devices 64 Momentum.Site error Gx turns into the drive volume data storage of the electric rotating motivation 641 of zero θ Z drive devices 64 in storage part 12. In storage part 12, on the multiple θ Z drive devices 64 set respectively in multiple holding units 50, respectively to site error Gx is stored as the drive volume data of zero electric rotating motivation 641.
The output control signal of electric rotating motivation 641 from control unit 16 to multiple θ Z drive devices 64, to cause X-direction Site error Gx is less than or equal to the threshold value.In the present embodiment, control unit 16 is based on the drive stored in storage part 12 Momentum data, to the output control signal of electric rotating motivation 641 of θ Z drive devices 64, before causing datum mark RP and suction nozzle 51 The site error Gx of the X-direction of end 54 turns into zero, i.e. the leading section 54 of suction nozzle 51 is positioned at motion track TR and the 2nd base Directrix RY intersection point.
Figure 16 is the schematic diagram for being illustrated to the electronic component mounting method involved by present embodiment.Figure 16 is Show schematically after being adjusted in a manner of the site error Gx of X-direction turns into zero to the position of the axle portion part 52 of θ Z-directions Datum mark RP and suction nozzle 51 leading section 54 relative position figure.In addition, in figure 16, in order to improve identity, to 8 In the leading section 54 of suction nozzle 51,4 suction nozzles 51 leading sections 54 are shown.
As shown in figure 16, before control unit 16 can be based on the suction nozzle 51 obtained from the detection data of condition checkout gear 9 The motion track TR of end 54 and electric rotating motivation 641 is controlled, by the leading section 54 of suction nozzle 51 and datum mark RP X-axis The site error Gx in direction is set to zero, and the leading section 54 of suction nozzle 51 is positioned at into motion track TR and the 2nd datum line RY intersection point.
In the present embodiment, the site error Gx of the leading section 54 of suction nozzle 51 and datum mark RP X-direction turns into zero The positions of axle portion part 52 of θ Z-directions be defined as the reference position of the axle portion part 52 on the direction of rotation of axle portion part 52.In addition, By suction nozzle 51 leading section 54 and datum mark RP X-direction site error Gx as zero electric rotating motivation 641 driving The position of the rotor of electric rotating motivation 641 is defined as the reference position of the rotor of electric rotating motivation 641 as defined in amount.
The reference position of axle portion part 52 on the direction of rotation of axle portion part 52 is so-called zero degree position.In present embodiment In, site error Gx is defined as the origin of rotor as the position of the rotor of zero electric rotating motivation 641.
As described above, in the present embodiment, multiple axle portion parts 52 are more abreast to be provided out at equal intervals with X-axis The site error Gx of individual datum mark RP and multiple suction nozzles 51 54 respective X-direction of leading section is supported in peace as zero mode Fill head main body 53.The leading section 54 of multiple suction nozzles 51 is positioned at, the multiple suction nozzles 51 detected in the rotation of axle portion part 52 The motion track TR of leading section 54 and respectively by multiple datum mark RP the 2nd datum line RY intersection point.Control unit 16 is to rotation The output control signal of motor 641, to cause the leading section 54 of suction nozzle 51 to be positioned at motion track TR and the 2nd datum line RY friendship Point.Mounting head main body 53 is with X-direction in the motion track TR of the leading section 54 of the suction nozzle 51 in the rotation of axle portion part 52 Site error Gx is supported as zero mode to multiple axle portion parts 52.
Position error data calculating part 14 to it is when site error Gx in the mounting head 5 that is configured in supply position SM is zero, That is when the leading section 54 of suction nozzle 51 is positioned at motion track TR and the 2nd datum line RY intersection point, datum mark RP and suction nozzle 51 The site error Gy of 54 respective Y direction of leading section is calculated.Position error data calculating part 14 is based on motion track TR, The respective site error Gy in leading section 54 of multiple datum mark RP and multiple suction nozzles 51 when being zero to site error Gx are counted Calculate.
Correction data calculating part 15 based on the mounting head 5 for being configured in supply position SM is calculating, datum mark RP and The Y-axis of the leading section 54 of when the site error Gx of the X-direction of the leading section 54 of suction nozzle 51 is zero, datum mark RP and suction nozzle 51 The site error Gy in direction, calculate the movement being directed to by electronic unit C Y direction caused by electronic part feeder 4 The correction data of amount.Leading section 54 respective Y-axis of the correction data calculating part 15 based on multiple datum mark RP and multiple suction nozzles 51 The site error Gy in direction, calculate the correction data (step SA40) of the amount of movement for the electronic unit C for being directed to Y direction.
As described above, the belt-type feeder 40 of electronic part feeder 4 makes drive motor 431, intermittently stepping is revolved Turn, making material containing, with the pocket R Y direction that is spaced in, intermittently stepping is moved with T, multiple electronic unit C is moved successively To supply position SM.Electronic part feeder 4 is in initial pattern, electricity of the belt-type feeder 40 to be configured in supply position SM The position at the center of subassembly C upper surface and supply position SM configuration holding unit 50 datum mark RP position in XY Consistent mode moves electronic unit C in plane.
Site error Gy when correction data calculating part 15 based on site error Gx is zero is calculated correction data, with So that the suction nozzle 51 being connected with the axle portion part 52 adjusted to zero degree position leading section 54 and electronic unit C upper surface center Y direction position consistency.
The site error of leading section 54 respective Y direction of the control unit 16 based on multiple datum mark RP and multiple suction nozzles 51 Gy, the control signal that electronic unit C moves in Y direction will be made to export to electronic part feeder 4.That is, the base of control unit 16 In the site error Gy of motion track TR and the 2nd datum line RY multiple intersection points and multiple datum mark RP each comfortable Y direction, The control signal that electronic unit C moves in Y direction will be made to export to electronic part feeder 4.Control unit 16 is based in step The correction data calculated in rapid SA40, distinguish output control signal to the drive motor 431 of multiple belt-type feeders 40.
Figure 17 is the schematic diagram for being illustrated to the electronic component mounting method involved by present embodiment.Figure 17 is It is schematically illustrated in the initial pattern of electronic part feeder 4 and supplies to supply position SM electronic unit C and in electronics Supplied in the correction mode of assembly supply device 4 to supply position SM electronic unit C figure.In addition, in fig. 17, show to supply To the electronic unit C to 4 suction nozzles 51 in 8 suction nozzles 51.
The correction mode of electronic part feeder 4 is that the drive motor 431 of belt-type feeder 40 is based on correction data The pattern being operated.
In the initial pattern of electronic part feeder 4, control unit 16 to the output control signal of drive motor 431, To cause the position consistency of the Y direction at the center of the upper surface of datum mark RP and electronic unit C at the SM of supply position.By This, as shown in Figure 17 dotted line, in supply position SM, the center configuration of electronic unit C upper surface is in datum mark RP.
Correction data calculating part 15 is calculated correction data, to cause site error Gx as zero, existence position error The position consistency of the Y direction at the center of the leading section 54 of Gy suction nozzle 51 and electronic unit C upper surface.
In the correction mode of electronic part feeder 4, control unit 16 be based on correction data and to drive motor 431 Output control signal, to cause in the state of existence position error Gy in the leading section 54 of the supply position SM suction nozzles 51 configured With the position consistency of the Y direction at the center of electronic unit C upper surface supplied to supply position SM.Thus, such as Figure 17 It is shown in solid, in the SM of supply position, the center configuration of electronic unit C upper surface in the leading section 54 of suction nozzle 51 just under Side.
Control unit 16 is based respectively on correction to the drive motor 431 that multiple belt-type feeders 40 is configured in X-direction Data and output control signal.Thus, it is based on correction data in multiple electronic unit C of X-direction configuration and is walked in Y direction Enter movement.
Electronic part feeder 4 makes multiple electricity in X-direction configuration based on the control signal exported from control unit 16 Subassembly C is moved in Y direction, and electronic unit C (step SA50) is supplied respectively to multiple suction nozzles 51.That is, electronic unit supplies Multiple intersection points of the device 4 based on motion track TR and the 2nd datum line RY and the position of multiple datum mark RP each comfortable Y direction Error Gy, the multiple electronic unit C configured in X-direction are moved in Y direction, the ministry of electronics industry is supplied respectively to multiple suction nozzles 51 Part C.In the present embodiment, based on correction data, 8 belt-type feeders 40 are to 8 suction nozzles 51 configured in supply position SM Supply electronic unit C.
Multiple suction nozzles 51 carry out absorption holding by leading section 54 to the center of electronic unit C upper surface respectively.It is multiple Suction nozzle 51 adsorbs multiple electronic unit C simultaneously.In supply position SM, multiple suction nozzles 51 are held in multiple electronic unit C absorption Afterwards, control unit 16 moves mounting head 5 to installation site DM to the output control signal of mobile system 6.Mounting head 5 will be held in Multiple electronic unit C of multiple suction nozzles 51 install (step SA60) to substrate P.
[functions and effects]
As described above, according to present embodiment, the axle portion part 52 of holding unit 50 is with datum mark RP and suction nozzle 51 Leading section 54 X-direction site error Gx be less than or equal to threshold value mode be supported in mounting head main body 53.In this reality Apply in mode, the axle portion part 52 of holding unit 50 is positioned at motion track TR and the 2nd datum line RY with the leading section 54 of suction nozzle 51 Intersection point, site error Gx is supported in mounting head main body 53 as zero mode.With datum mark RP and suction nozzle 51 leading section The axle portion part 52 of holding unit 50 is supported in mounting head by the mode that the site error Gx of 54 X-direction is less than or equal to threshold value In the state of main body 53, the site error Gy of the Y direction of the leading section 54 based on datum mark RP and suction nozzle 51 and to making electronics Part C to feedway SM move when amount of movement be adjusted, so as to make multiple suction nozzles 51 respectively to as target portion The center of the electronic unit C of position upper surface is kept.Therefore, mounting head 5 can be by multiple suction nozzles 51 stably simultaneously Keep multiple electronic unit C.
In addition, according to present embodiment, it is provided with：Position error data calculating part 14, it is to the datum mark in X/Y plane The site error G of the leading section 54 of RP and suction nozzle 51 is calculated；And correction data calculating part 15, it is based on by site error The site error G that data calculating part 14 calculates, pair with the Y-axis side by electronic unit C caused by electronic part feeder 4 To the relevant correction data of amount of movement calculated.Thus, the driving electricity that control unit 16 can be to multiple belt-type feeders 40 Motivation 431 distinguishes output control signal, to cause in supply position SM, the leading section 54 of suction nozzle 51 and electronic unit C upper table The position consistency of the Y direction at the center in face.
In addition, in the present embodiment, multiple axle portion parts 52 are able to be rotatably supported at centered on rotary shaft AX Mounting head main body 53, the motion track TR of the leading section 54 of the suction nozzle 51 during rotation to axle portion part 52 are detected.By right Motion track TR is detected, so as to based on the motion track TR detected, successfully determine that the site error Gx of X-direction is small In or equal to axle portion part 52 in the θ Z-directions of threshold value zero degree position.Mounting head main body 53 can be distinguished with multiple axle portion parts 52 As the mode of zero degree position, these multiple axle portion parts 52 are supported.
In addition, in the present embodiment, multiple axle portion parts 52 are adjusted to zero degree position respectively.Therefore, in suction nozzle replacing When being changed in accommodation apparatus 7 relative to axle portion part 52 to suction nozzle 51, load and inhale in the axle portion part 52 adjusted to zero degree position Mouth 51.By loading suction nozzle 51 in the axle portion part 52 adjusted to zero degree position, so as to suppress the suction nozzle 51 after suction nozzle 51 is changed Leading section 54 and datum mark RP site error G expansion.
In addition, in the above-described embodiment, it is set to the moving rail to the leading section 54 of suction nozzle 51 by condition checkout gear 9 Mark TR is detected.The motion track TR of the leading section 54 of suction nozzle 51 can also be detected by filming apparatus 8.Passing through In the state of θ Z drive devices 64 make the rotation of axle portion part 52, the leading section 54 of suction nozzle 51 is shot by filming apparatus 8, by The view data that filming apparatus 8 obtains carries out image procossing in control device 10, thus to the shifting of the leading section 54 of suction nozzle 51 Dynamic rail mark TR is detected.
2nd embodiment
2nd embodiment is illustrated.In the following description, pair knot identical or equivalent with above-mentioned embodiment Structure key element marks identical label, simplifies or omits the explanation.
Figure 18 is the oblique view for an example for showing schematically the mounting head 5B involved by present embodiment.Such as Figure 18 institutes Show, in the present embodiment, driving pulley 642A and 2 holding units 50 with the output axis connection of 1 electric rotating motivation 641 Driven pulley 642C link via 1 transmission belt 642D.I.e., in the present embodiment, by by 1 electric rotating motivation 641 Caused power, multiple holding units 50 rotate in θ Z-directions.Power is via transmission belt as caused by 1 electric rotating motivation 641 642D and be transferred to 2 holding units 50.
Next, the electronic component mounting method involved by present embodiment is illustrated.Figure 19 is to represent this implementation The flow chart of one example of the electronic component mounting method involved by mode.
In the adjustment of mounting head 5, the axle portion part 52 that can be rotatably supported at bearing 681,682,683 is rotated (step SB10).The rotation of axle portion part 52 can be implemented by θ Z drive devices 64, can also be by except θ Z drive devices 64 Other drive devices in addition are implemented.
In the rotation of axle portion part 52, the motion track TR of the leading section 54 of suction nozzle 51 is detected (step SB20). In the present embodiment, motion track TR analyzers as such as amesdial of the leading section 54 of suction nozzle 51 are detected. For example, in the state of the sensing member of amesdial abuts with the leading section 54 of suction nozzle 51, axle portion part 52 is rotated.Thus, it is right The motion track TR of the leading section 54 of suction nozzle 51 is detected.
In the motion track TR of the leading section 54 of suction nozzle 51, determine that the site error Gx of X-direction is less than or equal to threshold The position (step SB30) of the axle portion part 52 of the θ Z-directions of value.In the present embodiment, the site error Gx of X-direction is also determined As the zero degree position of the axle portion part 52 of zero θ Z-directions.I.e., in the present embodiment, the axle portion part 52 of θ Z-directions is also determined Zero degree position, to cause the leading section 54 of suction nozzle 51 to be positioned at motion track TR and the 2nd datum line RY intersection point.
The rotor configuration of the electric rotating motivation 641 of θ Z drive devices 64 is in origin.Electric rotating motivation 641 is provided with rotation Encoder.Detection data based on rotary encoder, the rotor configuration of electric rotating motivation 641 is in origin (step SB40).
In the rotor configuration of 1 electric rotating motivation 641 zero degree is configured in origin, the axle portion part 52 of 2 holding units 50 In the state of position, with the driving pulley 642A of the output axis connection of 1 electric rotating motivation 641 and 2 holding units 50 from Movable belt pulley 642C links (step SB50) via 1 transmission belt 642D.
By implementation steps SB50 processing, so that when the rotor configuration of electric rotating motivation 641 is in origin, suction nozzle 51 Leading section 54 is positioned at motion track TR and the 2nd datum line RY intersection point, for the leading section of the suction nozzle 51 of 2 holding units 50 54 site error Gx turns into zero all the time.
Next, (step is detected to the position of the Y direction of the leading section 54 of suction nozzle 51 by condition checkout gear 9 Rapid SB60).In addition it is also possible to the position of the Y direction of the leading section 54 of suction nozzle 51 is detected by filming apparatus 8.
Based on the detection data detected in step SB60, to datum mark RP and the Y-axis side of the leading section 54 of suction nozzle 51 To site error Gy calculated.Site error Gy based on the Y direction calculated, calculate and be directed to by electronic unit confession Correction data (step SB70) to the amount of movement of electronic unit C Y direction caused by device 4.
The correction data calculated is stored in storage part 12.Control unit 16 is based on correction data, will make electronic unit C in Y The control signal of direction of principal axis movement exports to multiple drive motors 431 of electronic part feeder 4 respectively.Thus, it is based on Correction data, 8 belt-type feeders 40 supply electronic unit C (step SB80) to 8 suction nozzles 51 configured in supply position SM.
Multiple suction nozzles 51 carry out absorption holding by leading section 54 to the center of electronic unit C upper surface respectively.It is multiple Suction nozzle 51 adsorbs multiple electronic unit C simultaneously.In supply position SM, multiple suction nozzles 51 are held in multiple electronic unit C absorption Afterwards, control unit 16 moves mounting head 5 to installation site DM to the output control signal of mobile system 6.Mounting head 5 will be held in Multiple electronic unit C of multiple suction nozzles 51 install (step SB90) to substrate P.
As described above, according to present embodiment, revolve 2 holding units 50 by 1 drive motor 641 Turn.Thus, the quantity of drive motor 641 is reduced.Make what multiple holding units 50 rotated by 1 drive motor 641 In the case of, according to above-mentioned step SB10 to step SB90 processing, implement the adjustment and driving of mounting head 5, thus multiple suctions Mouth 51 stably can keep multiple electronic unit C simultaneously.

Claims (4)

1. a kind of electronic component mounting apparatus, it has：
Multiple axle portion parts, they are arranged on 1st direction of principal axis parallel with the 1st axle of predetermined surface；
Multiple suction nozzles, they are connected respectively with multiple axle portion parts, have the leading section kept to electronic unit；
Electronic part feeder, it makes multiple electronic units in the 1st direction of principal axis configuration, parallel to the rule Determine the 2nd direction of principal axis movement of 2nd axle orthogonal with the 1st axle in face, the ministry of electronics industry is supplied respectively to multiple suction nozzles Part；And
Mounting head main body, multiple axle portion parts are able to rotate centered on the rotary shaft orthogonal with the predetermined surface by it Ground is supported,
The leading section of multiple suction nozzles is positioned at, the front end of the multiple suction nozzles detected in the rotation of the axle portion part The intersection point of the motion track in portion and the 2nd datum line, the 2nd datum line pass through in 1st datum line parallel with the 1st axle respectively Multiple datum marks for providing out at equal intervals are simultaneously parallel with the 2nd axle,
Each leisure of the electronic part feeder based on multiple datum marks and multiple intersection points the 2nd direction of principal axis Site error, the electronic unit is moved in the 2nd direction of principal axis.
2. electronic component mounting apparatus according to claim 1, wherein,
Have：
Position error data calculating part, it is carried out to the datum mark and the intersection point in the site error of the 2nd direction of principal axis Calculate；
Correction data calculating part, it calculates pin based on the site error calculated by the position error data calculating part To the correction number of the amount of movement of the 2nd direction of principal axis by the electronic unit caused by the electronic part feeder According to；And
Control unit, it is based on the correction data, and by making, the control signal that the electronic unit moves in the 2nd direction of principal axis is defeated Go out to the electronic part feeder.
3. electronic component mounting apparatus according to claim 2, wherein,
The mounting head main body has the actuator for producing the power for making multiple axle portion parts rotate respectively,
The control unit is to the actuator output control signal, to cause the leading section of the suction nozzle to be positioned at the intersection point.
4. a kind of electronic component mounting method, it includes following step：
Rotate multiple axle portion parts, the axle is arranged on 1st direction of principal axis parallel with the 1st axle of predetermined surface, can with the rule Determine to be rotatably supported at mounting head main body centered on the orthogonal rotary shaft in face；
In the rotation of the axle portion part, multiple suction nozzles of electronic unit pair are connected, kept respectively with multiple axle portion parts The motion track of leading section is detected；
The leading section of multiple suction nozzles is positioned at, the motion track of the leading section of the suction nozzle and the 2nd datum line Intersection point, the 2nd datum line pass through the multiple bases provided out at equal intervals in 1st datum line parallel with the 1st axle respectively It is on schedule and parallel with the 2nd axle；And
The site error of each leisure the 2nd direction of principal axis based on multiple datum marks and multiple intersection points, makes described Multiple electronic units of 1st direction of principal axis configuration move in the 2nd direction of principal axis, are supplied respectively to multiple suction nozzles described Electronic unit.
CN201710826537.7A 2016-09-14 2017-09-14 Electronic component mounting apparatus and electronic component mounting method Active CN107820387B (en)

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