CN107814491A - A kind of flat glass substrate etching solution - Google Patents

A kind of flat glass substrate etching solution Download PDF

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Publication number
CN107814491A
CN107814491A CN201711339105.XA CN201711339105A CN107814491A CN 107814491 A CN107814491 A CN 107814491A CN 201711339105 A CN201711339105 A CN 201711339105A CN 107814491 A CN107814491 A CN 107814491A
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CN
China
Prior art keywords
acid
etching solution
glass substrate
pvp
flat glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711339105.XA
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Chinese (zh)
Inventor
张�杰
沈励
郑建军
姚仕军
夏伟
吴青肖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TIANJIN AMTECH VACUUM TECHNOLOGY Co Ltd
Original Assignee
TIANJIN AMTECH VACUUM TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TIANJIN AMTECH VACUUM TECHNOLOGY Co Ltd filed Critical TIANJIN AMTECH VACUUM TECHNOLOGY Co Ltd
Priority to CN201711339105.XA priority Critical patent/CN107814491A/en
Publication of CN107814491A publication Critical patent/CN107814491A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching

Abstract

The invention provides a kind of flat glass substrate etching solution, the etching solution is prepared by the raw material including following percentage by weight:HF:1 5%, NH4F:10 25%, strong acid:1 10%, carboxylic acid:1 5%, sulfonic acid:1 5%, aminotriacetic acid (NTA):1 8%, surfactant:1 5%, PVP K90 (PVP K90):1 2%, ethyl acetate:1 2%, tetrahydrofuran:1 2%, and the water of surplus.The flat glass substrate etching solution reduces HF content by optimization of C/C composites, and by adding NH4F introduces F, avoid inconvenience caused by HF.

Description

A kind of flat glass substrate etching solution
Technical field
The present invention relates to thinning glass substrate production technical field, more particularly, to a kind of flat glass substrate etching solution.
Background technology
In flat display field, including in the preparation process such as plasma is shown, touch-screen, liquid crystal display, in order to Further mitigate the weight of display device, manufacturer more and more uses and glass substrate is carried out to thinned method.Glass The method of substrate attenuation generally has two kinds, and one kind is physics polishing grinding, and another kind is that chemical etching is thinned, wherein, chemistry erosion It is most widely used to carve thinned.At present, what used attenuation etching liquid substrate used be all using hydrofluoric acid as mainly into Point, but the toxicity of hydrofluoric acid is big, volatile, especially need to use higher temperature and concentration in configuration, not only production process It is middle dangerous high, and huge pollution can be caused to environment.
The content of the invention
In view of this, the present invention is directed to propose a kind of flat glass substrate etching solution, by optimization of C/C composites, reduces HF's Content, and by adding NH4F introduces F-, avoid inconvenience caused by HF.
To reach above-mentioned purpose, the technical proposal of the invention is realized in this way:
A kind of flat glass substrate etching solution, the etching solution are prepared by the raw material including following percentage by weight:HF: 1-5%, NH4F:10-25%, strong acid:1-10%, carboxylic acid:1-5%, sulfonic acid:1-5%, aminotriacetic acid (NTA):1-8%, table Face activating agent:1-5%, PVP K90 (PVP K90):1-2%, ethyl acetate:1-2%, tetrahydrofuran:1- 2%, and the water of surplus.
Further, the etching solution is prepared by the raw material including following percentage by weight:HF:1-5%, NH4F:15- 25%, strong acid:5-10%, carboxylic acid:1-5%, sulfonic acid:1-5%, aminotriacetic acid (NTA):1-8%, surfactant:1- 5%, PVP K90 (PVP K90):1-2%, ethyl acetate:1-2%, tetrahydrofuran:1-2%, and surplus Water.
Further, the strong acid is the mixing of one or both of hydrochloric acid or nitric acid.
Further, the surfactant is carboxylate surface active agent, sodium abietate, sodium naphthenate, odium stearate, oil One or more of mixing in sour sodium, alkyl benzene sulfonate surfactant, sulfate salt surfactant.
Further, the etching solution is prepared by the preparation method comprised the following steps:
(1) by NH4F, aminotriacetic acid (NTA) is added to the water, and stirring is completely dissolved it;
(2) add in the aqueous solution that step (1) obtains and dilute after mixing HF, strong acid, carboxylic acid and sulfonic acid;
(3) and then by surfactant, PVP K90 (PVP K90), ethyl acetate, tetrahydrofuran add In the solution that step (2) obtains, stir.
Relative to prior art, flat glass substrate etching solution of the present invention has the advantage that:
Flat glass substrate etching solution of the present invention devises brand-new etching formula of liquid, reduces HF use Amount, and add NH4F is to supplement F-, and NH4F in F-It is incomplete ionization, constantly ionizes, serve with the progress of reaction The effect of buffering, etch-rate temperature is ensure that, greatly reduce the toxicity of etching solution, more safety can for Manufacturing Worker's operation Lean on;Carboxylic acid and sulfonic acid belong to weak acid, also can slowed down reaction speed, both meeting etching requirement, to turn avoid etching speed too fast The problem of influenceing substrate surface structure;Aminotriacetic acid (NTA) is metal-chelator, can be with metal ion caused by etching Form chelate, it is easier to be dissolved in water, so as to solve the problems, such as accessory substance indissoluble in etching process, avoid product from being attached to Glass baseplate surface, improve etch-rate and etch effect;Surfactant can also play the work of cleaning to glass surface With.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the present invention can phase Mutually combination.
The present invention is described in detail below in conjunction with embodiment.
Embodiment 1
A kind of flat glass substrate etching solution, the etching solution are prepared by the raw material including percentage by weight as shown in table 1 Obtain:
The formula of the etching solution of the embodiment 1 of table 1
Embodiment 2
A kind of flat glass substrate etching solution, the etching solution are prepared by the raw material including percentage by weight as shown in table 2 Obtain:
The formula of the etching solution of the embodiment 2 of table 2
A kind of flat glass substrate etching solution, the etching solution are prepared by the raw material including percentage by weight as shown in table 3 Obtain:
The formula of the etching solution of the embodiment 3 of table 3
Embodiment 4
A kind of flat glass substrate etching solution, the etching solution are prepared by the raw material including percentage by weight as shown in table 4 Obtain:
The formula of the etching solution of the embodiment 4 of table 4
Flat glass substrate etching solution described in embodiment 1-4 is prepared by the preparation method comprised the following steps:
(1) by NH4F, aminotriacetic acid (NTA) is added to the water, and stirring is completely dissolved it;
(2) add in the aqueous solution that step (1) obtains and dilute after mixing HF, strong acid, carboxylic acid and sulfonic acid;
(3) and then by surfactant, PVP K90 (PVP K90), ethyl acetate, tetrahydrofuran add In the solution that step (2) obtains, stir.
Processing method:
1) according to embodiment 1-4 recipe configuration each 1000L of flat glass substrate etching solution, and enchashment has etching solution 1000L;
2) glass substrate of the identical producer's same batch of 5 pieces of plate nitre AN100, thickness 1.000mm are used, size is 730mm × 920mm, numbering is I~V, after cleaning up, is respectively put into containing embodiment 1-4 etching solutions and existing etching solution In etching groove, etch 10 minutes, etch temperature is controlled at 25-30 DEG C, then glass substrate is put into etching basket vertically, completely It is immersed in etching groove, bubbling is carried out to etching acid solution in etching process, bubbling amount is 100L/min.
3) after etching 30 minutes, glass substrate is taken out, with deionized water rinsing and is dried, and measure the thickness of glass substrate Degree, such as table 5.
The thickness data of the glass substrate of table 5
I II III IV V
Thickness/mm 0.96 0.95 0.94 0.93 0.92
Thickness non-uniformities Less than 1% Less than 1% Less than 1% Less than 1% More than 1%
As can be seen from Table 5, in the identical time, the glass etching in the etching solution that embodiment 1-4 is configured The thickness etched in the existing etching solution of thickness ratio afterwards is thick, NH used by explanation4F serves corrosion inhibition, and etches Thickness non-uniformities afterwards are but better than existing etching solution effect.
The embodiment 1-4 experimental results of table 6
Numbering With glass reaction speed Actual effect
I 2.4μm/min Glass surface has no that raised, scuffing breach has no obvious amplification
II 2.5μm/min Glass surface has no that raised, scuffing breach has no obvious amplification
III 2.5μm/min Glass surface has no that raised, scuffing breach has no obvious amplification
IV 2.6μm/min Glass surface has no that raised, scuffing breach has no obvious amplification
V 3.0μm/min Glass surface has minute protrusions, scuffing breach to have no obvious amplification
As can be seen from Table 6, reaction of the reaction rate for the etching solution that embodiment 1-4 is configured than existing etching solution Speed is slow, has corrosion mitigating effect, and etch effect is also better than existing etching solution, has both met etching requirement and turn avoid Etching speed it is too fast influence substrate surface structure the problem of.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention God any modification, equivalent substitution and improvements made etc., should be included in the scope of the protection with principle.

Claims (5)

  1. A kind of 1. flat glass substrate etching solution, it is characterised in that:The etching solution is by including the raw material system of following percentage by weight It is standby to obtain:HF:1-5%, NH4F:10-25%, strong acid:1-10%, carboxylic acid:1-5%, sulfonic acid:1-5%, aminotriacetic acid (NTA):1-8%, surfactant:1-5%, PVP K90 (PVP K90):1-2%, ethyl acetate:1-2%, Tetrahydrofuran:1-2%, and the water of surplus.
  2. 2. flat glass substrate etching solution according to claim 1, it is characterised in that:The etching solution is by including following weight The raw material of percentage is prepared:HF:1-5%, NH4F:15-25%, strong acid:5-10%, carboxylic acid:1-5%, sulfonic acid:1-5%, Aminotriacetic acid (NTA):1-8%, surfactant:1-5%, PVP K90 (PVP K90):1-2%, acetic acid Ethyl ester:1-2%, tetrahydrofuran:1-2%, and the water of surplus.
  3. 3. flat glass substrate etching solution according to claim 1 or 2, it is characterised in that:The strong acid is hydrochloric acid or nitre The mixing of one or both of acid.
  4. 4. flat glass substrate etching solution according to claim 1 or 2, it is characterised in that:The surfactant is carboxylic Acid salt surfactant, sodium abietate, sodium naphthenate, odium stearate, enuatrol, alkyl benzene sulfonate surfactant, sulfuric acid One or more of mixing in ester salt surfactant.
  5. 5. flat glass substrate etching solution according to claim 1 or 2, it is characterised in that:The etching solution is by including as follows The preparation method of step is prepared:
    (1) by NH4F, aminotriacetic acid (NTA) is added to the water, and stirring is completely dissolved it;
    (2) add in the aqueous solution that step (1) obtains and dilute after mixing HF, strong acid, carboxylic acid and sulfonic acid;
    (3) and then by surfactant, PVP K90 (PVP K90), ethyl acetate, tetrahydrofuran step is added (2) in the solution obtained, stir.
CN201711339105.XA 2017-12-14 2017-12-14 A kind of flat glass substrate etching solution Pending CN107814491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711339105.XA CN107814491A (en) 2017-12-14 2017-12-14 A kind of flat glass substrate etching solution

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Application Number Priority Date Filing Date Title
CN201711339105.XA CN107814491A (en) 2017-12-14 2017-12-14 A kind of flat glass substrate etching solution

Publications (1)

Publication Number Publication Date
CN107814491A true CN107814491A (en) 2018-03-20

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109777670A (en) * 2019-03-14 2019-05-21 惠州市清洋实业有限公司 A kind of cleaning solution and preparation method thereof
CN114075041A (en) * 2020-08-12 2022-02-22 Oppo广东移动通信有限公司 Frosting liquid and preparation method thereof, frosted glass and processing method thereof
CN115724592A (en) * 2022-10-11 2023-03-03 广东山之风环保科技有限公司 Household touch panel glass AG effect frosting liquid and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1380572A (en) * 2001-04-12 2002-11-20 西山不锈化学股份有限公司 Chemical polishing method and device for liquid crystal glass base plate
CN1678714A (en) * 2002-08-26 2005-10-05 默克专利有限公司 Etching pastes for titanium oxide surfaces
CN104944790A (en) * 2014-03-31 2015-09-30 东友精细化工有限公司 Glass-reinforcing composition and method of manufacturing touchscreen glass using the same
CN106186714A (en) * 2016-07-15 2016-12-07 天津美泰真空技术有限公司 A kind of etching solution suppressing the thinning rear concave point of TFT LCDs
CN107235641A (en) * 2017-08-14 2017-10-10 湖北工程学院 A kind of glass thinning etching solution and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1380572A (en) * 2001-04-12 2002-11-20 西山不锈化学股份有限公司 Chemical polishing method and device for liquid crystal glass base plate
CN1678714A (en) * 2002-08-26 2005-10-05 默克专利有限公司 Etching pastes for titanium oxide surfaces
CN104944790A (en) * 2014-03-31 2015-09-30 东友精细化工有限公司 Glass-reinforcing composition and method of manufacturing touchscreen glass using the same
CN106186714A (en) * 2016-07-15 2016-12-07 天津美泰真空技术有限公司 A kind of etching solution suppressing the thinning rear concave point of TFT LCDs
CN107235641A (en) * 2017-08-14 2017-10-10 湖北工程学院 A kind of glass thinning etching solution and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109777670A (en) * 2019-03-14 2019-05-21 惠州市清洋实业有限公司 A kind of cleaning solution and preparation method thereof
CN114075041A (en) * 2020-08-12 2022-02-22 Oppo广东移动通信有限公司 Frosting liquid and preparation method thereof, frosted glass and processing method thereof
CN115724592A (en) * 2022-10-11 2023-03-03 广东山之风环保科技有限公司 Household touch panel glass AG effect frosting liquid and preparation method thereof
CN115724592B (en) * 2022-10-11 2024-04-12 广东山之风环保科技有限公司 Glass AG effect frosting liquid for household touch panel and preparation method thereof

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Application publication date: 20180320

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