CN107782299A - A kind of two axle MEMS gyroscopes - Google Patents
A kind of two axle MEMS gyroscopes Download PDFInfo
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- CN107782299A CN107782299A CN201610744480.1A CN201610744480A CN107782299A CN 107782299 A CN107782299 A CN 107782299A CN 201610744480 A CN201610744480 A CN 201610744480A CN 107782299 A CN107782299 A CN 107782299A
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- anchor point
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a kind of two axle MEMS gyroscopes, including one group of X-axis mass at left and right sides of anchor point and in X-direction is symmetricly set in, and is symmetricly set in the anchor point both sides and one group of Y-axis mass in Y direction up and down；It is connected between the X-axis mass, the Y-axis mass and the anchor point by some spring beams.Above-mentioned two axles MEMS gyroscope, the angular velocity detection for X-axis and Y-axis just can be realized using a set of driving part, so as to save the inner space of gyroscope, reduces cost.
Description
Technical field
The present invention relates to MEMS gyroscope technical field, more particularly to a kind of two axle MEMS gyroscopes.
Background technology
As all kinds of consumption electronic products gradually develop to portable, lighting, the market gyroscope chip smaller to volume
Demand it is increasingly urgent.
For existing market it is known that MEMS technology, obtained with the technology and such as utilized semi-conducting material system
Into gyroscope；The MEMS gyroscope in China towards this market is mainly capacitor resonance formula gyroscope at present, i.e., by driving electricity
Holding mechanical structure makes mass be vibrated on driven-mode, by detecting capacitance detecting due to quality caused by Coriolis force
Capacitance variations caused by motion of the block in detection direction.
In the prior art, two axis gyroscope instrument mechanical part is made up of two independent X and Y single axis gyroscopes, Mei Gedan
Needed in axle gyroscope arrangement respectively comprising independent mass, driving and detection structure, and in corresponding ASIC circuit
Need to drive respectively using two sets of independent drive circuits, cause the volume of final gyroscope chip larger.
The content of the invention
It is an object of the invention to provide a kind of two axle MEMS gyroscopes, the two axles MEMS gyroscope can solve volume compared with
Greatly, the higher problem of cost.
To achieve the above object, the present invention provides a kind of two axle MEMS gyroscopes, including is symmetricly set in anchor point or so two
Side and one group of X-axis mass in the X-direction, and be symmetricly set in the anchor point and both sides and be located at and the X up and down
One group of Y-axis mass in the vertical Y direction of direction of principal axis；The X-axis mass, the Y-axis mass and the anchor point
Between be connected by some spring beams.
Relative to above-mentioned background technology, two axles MEMS gyroscope provided by the invention, mainly include X-axis mass, Y-axis matter
Gauge block and spring beam；Direction at left and right sides of anchor point is defined as X-direction, two side directions are defined as Y direction to anchor point up and down,
And one group of X-axis mass is symmetricly set in the left and right sides of anchor point, one group of Y-axis mass is symmetricly set in up and down the two of anchor point
Side；And the core of the present invention is to be connected one group of X-axis mass with one group of Y-axis mass using some spring beams, and
One group of X-axis mass and one group of Y-axis mass are connected with anchor point；That is, X-axis and Y direction will be respectively at using spring beam
Two groups of masses connection, so as to realize when gyroscope have along X-axis or the angular velocity of rotation along Y direction when, two groups of quality
Block can produce corresponding motion, to detect the size of X-axis or Y-axis angular speed；Using mode is set as above, a set of drive is utilized
Dynamic component just can realize the angular velocity detection for X-axis and Y-axis, so as to save the inner space of gyroscope, reduce into
This.
Preferably, the X-axis mass is respectively provided with centered on the anchor point to two axle with the Y-axis mass
The outrigger shaft of the edge diverging of MEMS gyroscope, two outrigger shafts of arbitrary neighborhood are connected by a first spring beam.
Preferably, buckstay is also set up between the anchor point and the X-axis mass and the Y-axis mass, it is described firm
The second spring beam for being uniformly distributed in the anchor point surrounding between property beam and the anchor point by four is connected.
Preferably, the buckstay is symmetrical along the X-axis and the Y-axis centered on the anchor point.
Preferably, the 3rd spring is passed through between the side wall of the buckstay and the X-axis mass and the Y-axis mass
Beam is connected.
Preferably, the buckstay is provided with respectively to the groove with the X-axis mass and the Y-axis mass
The extension of fit depressions, and be connected between the groove and the extension by the 4th spring beam.
Preferably, the X-axis mass is specially the first mass below the anchor point and positioned at the anchor point
Second mass of top, the Y-axis mass are specially the 3rd mass on the left of the anchor point and positioned at the anchor
4th mass on point right side.
Preferably, in addition to：
To provide alternating voltage to realize the driving electric capacity of the X-axis mass and Y-axis mass motion,
To detect the X-axis of X-axis angular speed detection electric capacity and be detected to detect the Y-axis of the Y-axis angular speed
Electric capacity.
Preferably, in addition to：
Electric capacity is detected to demarcate the driving of the drive amplitude of the driving electric capacity.
Preferably, the X-axis detection electric capacity is located at the side of the Y-axis mass away from the anchor point；The Y-axis detection
Electric capacity is located at the side of the X-axis mass away from the anchor point.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
The structural representation for the two axle MEMS gyroscopes that Fig. 1 is provided by the embodiment of the present invention；
Fig. 2 is schematic diagram of the two axle MEMS gyroscopes under driving electric capacity effect in Fig. 1；
Fig. 3 is schematic diagram when two axle MEMS gyroscopes in Fig. 1 detect to X-axis；
Fig. 4 is schematic diagram when two axle MEMS gyroscopes in Fig. 1 detect to Y-axis.
Wherein：
1- anchor points, 2- buckstays, 201- extensions, the masses of 10- first, the masses of 20- second, the masses of 30- the 3rd,
The masses of 40- the 4th, the first springs of 21- beam, 22- second springs beam, the spring beams of 23- the 3rd, the spring beams of 24- the 4th, 31~
The electrode of 320- first electrodes~the 20th.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the accompanying drawings and it is embodied
The present invention is described in further detail for mode.
It refer to Fig. 1 to Fig. 4, the structural representation for the two axle MEMS gyroscopes that Fig. 1 is provided by the embodiment of the present invention；Figure
2 be schematic diagram of the two axle MEMS gyroscopes under driving electric capacity effect in Fig. 1；Fig. 3 is two axle MEMS gyroscopes pair in Fig. 1
Schematic diagram when X-axis is detected；Fig. 4 is schematic diagram when two axle MEMS gyroscopes in Fig. 1 detect to Y-axis.
Two axles MEMS gyroscope provided by the invention, one group of X-axis mass is symmetrical arranged in the left and right sides of anchor point 1, and
One group of Y-axis mass is symmetrical arranged in the both sides up and down of anchor point 1.
Herein, for the definition of one group of X-axis mass and one group of Y-axis mass, can be construed to：One group of X-axis quality
Block includes the 3rd mass 30 as shown in the accompanying drawings 1 and the 4th mass 40；Wherein, the 3rd mass 30 is located at anchor point
1 left side, the 4th mass 40 is located at the right side of anchor point 1, and the 3rd mass 30 and the 4th mass 40 are symmetrical with anchor point 1
Set.Therewith similarly, one group of Y-axis mass includes the mass of the first mass 10 and second as shown in the accompanying drawings 1
20；Wherein the first mass 10 is located at the lower section of anchor point 1, and the second mass 20 is located at the top of anchor point 1.
The core of the present invention is, X-axis mass is connected with Y-axis mass using some spring beams；I.e. no matter one
How group X-axis mass and one group of Y-axis mass define, and some spring beams should all connect X-axis mass and Y-axis mass
Connect, and X-axis mass should be also connected with Y-axis mass by spring beam with anchor point 1.
It should be evident that under spring beam action, X-axis mass is connected with Y-axis mass, when in driving X-axis quality
When block or Y-axis mass move, due to the presence of spring beam so that the X-axis mass or Y-axis mass for being not affected by driving can
Associated movement, to realize the detection function of X-axis mass and Y-axis mass.
For X-axis mass or the set-up mode of Y-axis mass, The present invention gives a kind of more excellent mode；X-axis mass
The position being connected with Y-axis mass is defined as outrigger shaft, and the outrigger shaft centered on anchor point 1 to two axle MEMS gyroscopes
Edge diverging, as shown in Figure of description 1.
3rd mass 30 and the 4th mass 40 are included with one group of X-axis mass and one group of Y-axis mass includes first
Exemplified by the mass 20 of mass 10 and second；The left and right sides of first mass 10 is respectively the 3rd mass 30 and the 4th mass
Block 40, the left side of the first mass 10 is close to the lower side of the 3rd mass 30, and the right edge of the first mass 10 is close to
The lower side of four masses 40；The left side of first mass 10 and the lower side of the 3rd mass 30 are outrigger shaft, and
Outrigger shaft is dissipated centered on anchor point 1 to the edge of two axle MEMS gyroscopes；Therewith similarly, the right edge of the first mass 10
Lower side with the 4th mass 40 is outrigger shaft, and is in divergent shape.As can be seen that in this embodiment, outrigger shaft possesses
Four diverging directions, and the angle between outrigger shaft and X-axis is preferably arranged to 45 °, so it is favorably improved two axle MEMS
The symmetry of gyroscope so that the coupled motions of one group of X-axis mass and one group of Y-axis mass are relatively reliable.
On above-mentioned basis, two outrigger shafts of arbitrary neighborhood are connected by a first spring beam 21；That is, the first matter
The left side of gauge block 10 is connected with the 3rd mass 30 by a first spring beam 21, the right edge of the first mass 10 and the
The lower side of four masses 40 is connected by an other first spring beam 21；As knowable to Figure of description 1, the present invention is preferably set
Four first spring beams 21 are put, for by the first mass 10, the second mass 20, the 3rd mass 30 and the 4th mass 40
Connection.
The surrounding of anchor point 1 also sets up buckstay 2, and X-axis mass and Y-axis mass are located at the surrounding of buckstay 2；That is, anchor
Not be joined directly together between point 1 and X-axis mass and Y-axis mass, but by buckstay 2 by anchor point 1 and X-axis mass and
Y-axis mass is connected as entirety.The surrounding of anchor point 1 is connected by second spring beam 22 with buckstay 2.In order to improve two axle MEMS
The symmetry of gyroscope, four second spring beams 22 are uniformly distributed in the surrounding of anchor point 1.Four second spring beams 22 preferably with
During set-up mode as shown in the accompanying drawings 1, and buckstay 2 is it can also be provided that symmetrical, i.e. buckstay 2 are with anchor point 1
The heart is symmetrical along X-axis and Y-axis.
4 second spring beams 22 and 8 the 3rd spring beams 23 can be in rectangle as shown in Figure 1；4 first spring beams
21 are uniformly dissipated with the center of anchor point 1 to surrounding.In 8 the 4th spring beams 24, two are one group and are uniformly distributed in two axle MEMS
Four orientation up and down of gyroscope.
Specifically, centered on anchor point 1, anchor point 1, buckstay 2 and X-axis mass and Y-axis are followed successively by from inside to outside
Mass；Foregoing illustrate optional connected mode between anchor point 1 and buckstay 2, and buckstay 2 and X-axis mass and Y-axis matter
Connected mode between gauge block can connect in the following way.
It is connected between the side wall of buckstay 2 and X-axis mass and Y-axis mass by the 3rd spring beam 23；For first
For mass 10, connected between the first mass 10 and buckstay 2 by two the 3rd spring beams 23；Due to described above
Symmetrical feature, connected between the second mass 20 and buckstay 2 again by two the 3rd spring beams 23.
In addition, buckstay 2 also sets up extension 201, and X-axis mass sets groove, extension with Y-axis mass
201 and fit depressions, and be connected by the 4th spring beam 24.
By be described above and Figure of description it can be seen from two axles MEMS gyroscope provided by the invention be left and right and it is upper
It is lower symmetrical；X-axis mass and Y-axis mass (can be the first mass 10, the second mass 20, the 3rd mass 30 and
4th mass 40), buckstay 2 and anchor point 1 pass through above-mentioned four 21, four, first spring beams, 22, eight, second spring beam
3rd spring beam 23 and eight the 4th spring beams 24 are mutually connected, so as to form two axle MEMS gyros of the invention on the whole
The movable member of instrument.Specifically, buckstay 2 is connected on anchor point 1 by four second spring beams 22, forms a branch
Frame.Preferably ined succession respectively on the support the first mass 10, the second mass 20, the 3rd mass 30 and the 4th mass 40；
Wherein, four masses are connected to buckstay 2 by two the 3rd spring beams 23 and two the 4th spring beams 24；And four
Mass is connected with each other by four first spring beams 21.In addition, two axle MEMS gyroscopes also include one group of driving electric capacity,
One group of driving detection electric capacity, one group of X-axis detection electric capacity and one group of Y-axis detection electric capacity, as shown in Figure of description 1.
Two axle MEMS gyroscopes include 20 electrodes altogether, respectively from 31~320；Whole electrodes are fixed, and
20 electric capacity are formd between the movable member of above-mentioned gyroscope.20 electric capacity can be divided into 8 groups, the respectively first driving electricity
Hold and the second driving electric capacity, the first driving detect electric capacity and the second driving detection electric capacity, the first X-axis detection electric capacity and the second X-axis
Detect electric capacity, the first Y-axis detection electric capacity and the second Y-axis detection electric capacity.
Wherein first driving electric capacity by first electrode 31, the 8th electrode 38, the 9th electrode 39, the 16th electrode 316 with can
Formed between dynamic component；Second driving electric capacity is by second electrode 32, the 7th electrode 37, the tenth electrode 310, the 15th electrode 315
Formed between movable member.
First driving detection electric capacity by the 3rd electrode 33, the 5th electrode 35, the 12nd electrode 312, the 14th electrode 314 with
Formed between movable member；Second driving detection electric capacity is by the 4th electrode 34, the 6th electrode 36, the 11st electrode the 311, the 13rd
Formed between electrode 313 and movable member.
First X-axis detects electric capacity by being formed between the 17th electrode 317 and movable member；Second X-axis detects electric capacity by the
Formed between 18 electrodes 318 and movable member.First Y-axis detects electric capacity by shape between the 19th electrode 319 and movable member
Into；First Y-axis detects electric capacity by being formed between the 20th electrode 320 and movable member.
The present invention preferably will drive electric capacity and driving detection electric capacity to be arranged at four vertex of two axle MEMS gyroscopes；
It is further preferable that X-axis detection electric capacity is located at side of the Y-axis mass away from anchor point 1；Y-axis detection electric capacity is located at X-axis mass
Side away from anchor point 1.
As shown in Figure of description 2, when two axle MEMS gyroscopes are driven the driving of electric capacity, first driving electric capacity and
When the both ends of second driving electric capacity apply alternating voltage in opposite direction, alternation electrostatic force can be produced so that the first mass 10
Moved reciprocatingly with the second mass 20 along Y-axis.Simultaneously as the first mass 10 and the second mass 20 pass through four first
Spring beam 21 is connected with the 3rd mass 30 and the 4th mass 40, therefore can be moved and be passed on, and causes the 3rd matter
The mass 40 of gauge block 30 and the 4th moves reciprocatingly along X-axis.The present invention in order to control drive amplitude exactly, in structure
Also need to the first driving detection electric capacity and the and drive detection electric capacity to demarcate the amplitude of driving.
When two axle MEMS gyroscopes detect to X-axis, as shown in Figure of description 3；When there is X-axis turning rate input
When, the first mass 10 to be moved reciprocatingly along Y-axis and the second mass 20 can be by the Coriolis forces along Z-direction；Cause
And make it that the first mass 10 and the second mass 20 move reciprocatingly along Z axis, while drive buckstay 2 to do reciprocating rotary around X-axis
It is dynamic.The first X-axis detection electric capacity and the second X-axis detection electric capacity now corresponding with the first mass 10 and the second mass 20
Mechanical periodicity can be produced；And the change of the two electric capacity is detected by subsequent conditioning circuit, it becomes possible to know the big of input X-axis angular speed
It is small.
When two axle MEMS gyroscopes detect to Y-axis, as shown in Figure of description 4；When there is Y-axis turning rate input
When, the mass 30 of mass the 3rd to be moved reciprocatingly along X-axis and the 4th mass 40 can be by the Coriolis along Z-direction
Power so that the mass 30 of mass the 3rd and the 4th mass 40 can move reciprocatingly along Z axis, while drive buckstay 2 around Y-axis
Reciprocating rotation is done, the first now corresponding with the 3rd mass 30 and the 4th mass 40 Y-axis detection electric capacity and the inspection of the second Y-axis
Mechanical periodicity can also be produced by surveying electric capacity, and the change of the two electric capacity is detected by subsequent conditioning circuit, just be able to know that input Y-axis angle
The size of speed.
Two axles MEMS gyroscope provided by the invention, by the way that the mass of two axles is connected so that only need one
Set driving electric capacity (the first driving electric capacity and the second driving electric capacity) and a set of driving detect electric capacity, and (the first driving detects electric capacity and the
Two driving detection electric capacity) can realizes the drivings of two axles.This is saved compared with the two axis gyroscope instrument of traditional discrete quality
A set of driving electric capacity and a set of driving detection electric capacity.Two axle MEMS gyroscopes realize symmetrically in structure, and entirely may be used
Dynamic component only has an anchor point in the center of structure so that gyroscope is influenceed to substantially reduce by extraneous stress, thus is saved
The area of gyroscope, reduces cost, and improve performance.
It should be noted that in this manual, such as first and second etc relational terms are used merely to one
Entity makes a distinction with other several entities, and not necessarily require or imply between these entities exist it is any this actual
Relation or order.
Two axles MEMS gyroscope provided by the present invention is described in detail above.Specific case used herein
The principle and embodiment of the present invention are set forth, the explanation of above example is only intended to help the side for understanding the present invention
Method and its core concept.It should be pointed out that for those skilled in the art, the principle of the invention is not being departed from
Under the premise of, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into the claims in the present invention
In protection domain.
Claims (10)
1. a kind of two axle MEMS gyroscopes, it is characterised in that including being symmetricly set at left and right sides of anchor point (1) and being located at X-axis side
One group of upward X-axis mass, and it is symmetricly set in the anchor point (1) both sides and positioned at vertical with the X-direction up and down
Y direction on one group of Y-axis mass；Pass through between the X-axis mass, the Y-axis mass and the anchor point (1)
Some spring beams are connected.
2. two axles MEMS gyroscope according to claim 1, it is characterised in that the X-axis mass and the Y-axis quality
Block is respectively provided with the outrigger shaft dissipated centered on the anchor point (1) to the edge of the two axles MEMS gyroscope, arbitrary neighborhood
Two outrigger shafts are connected (21) by a first spring beam.
3. two axles MEMS gyroscope according to claim 1, it is characterised in that the anchor point (1) and the X-axis mass
Buckstay (2) is also set up between the Y-axis mass, between the buckstay (2) and the anchor point (1) by four uniformly
The second spring beam (22) for being distributed in the anchor point (1) surrounding is connected.
4. two axles MEMS gyroscope according to claim 3, it is characterised in that the buckstay (2) is with the anchor point (1)
Centered on it is symmetrical along the X-axis and the Y-axis.
5. two axles MEMS gyroscope according to claim 4, it is characterised in that the side wall of the buckstay (2) and the X
It is connected between axoplasm gauge block and the Y-axis mass by the 3rd spring beam (23).
6. two axles MEMS gyroscope according to claim 4, it is characterised in that the buckstay (2) is provided with to be used respectively
With the groove with the X-axis mass and the extension (201) of the fit depressions of the Y-axis mass, and the groove
It is connected between the extension (201) by the 4th spring beam (24).
7. the two axle MEMS gyroscopes according to claim 1 to 6 any one, it is characterised in that the X-axis mass tool
Body is the first mass (10) below the anchor point (1) and the second mass (20) above the anchor point (1),
The Y-axis mass is specially the 3rd mass (30) on the left of the anchor point (1) and on the right side of the anchor point (1)
4th mass (40).
8. two axles MEMS gyroscope according to claim 7, it is characterised in that also include：
To provide alternating voltage to realize the driving electric capacity of the X-axis mass and Y-axis mass motion,
To detect the X-axis of X-axis angular speed detection electric capacity and detect electric capacity to detect the Y-axis of the Y-axis angular speed.
9. two axles MEMS gyroscope according to claim 8, it is characterised in that also include：
Electric capacity is detected to demarcate the driving of the drive amplitude of the driving electric capacity.
10. two axles MEMS gyroscope according to claim 8, it is characterised in that the X-axis detection electric capacity is located at the Y
Side of the axoplasm gauge block away from the anchor point (1)；The Y-axis detection electric capacity is located at the X-axis mass away from the anchor point (1)
Side.
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| CN201610744480.1A CN107782299B (en) | 2016-08-27 | 2016-08-27 | Two-axis MEMS gyroscope |
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Cited By (6)
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| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN116147599A (en) * | 2023-04-18 | 2023-05-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| WO2024169017A1 (en) * | 2023-02-14 | 2024-08-22 | 瑞声开泰科技(武汉)有限公司 | Micromechanical gyroscope and electronic product |
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| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN110347119B (en) * | 2019-06-29 | 2021-11-16 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| US11965740B2 (en) | 2020-08-24 | 2024-04-23 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| WO2024169017A1 (en) * | 2023-02-14 | 2024-08-22 | 瑞声开泰科技(武汉)有限公司 | Micromechanical gyroscope and electronic product |
| CN116147599A (en) * | 2023-04-18 | 2023-05-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
| CN116147599B (en) * | 2023-04-18 | 2023-06-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
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