CN110347119A - Motion control structure and actuator - Google Patents
Motion control structure and actuator Download PDFInfo
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- CN110347119A CN110347119A CN201910605916.2A CN201910605916A CN110347119A CN 110347119 A CN110347119 A CN 110347119A CN 201910605916 A CN201910605916 A CN 201910605916A CN 110347119 A CN110347119 A CN 110347119A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/414—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
- G05B19/4142—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller characterised by the use of a microprocessor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/34—Director, elements to supervisory
- G05B2219/34013—Servocontroller
Abstract
The present invention provides motion control structure and driving mechanisms, wherein motion control structure includes motion platform；First executing agency, it is surrounded on the periphery of motion platform, first executing agency includes set on motion platform the first execution unit of opposite sides and the second execution unit set on motion platform opposite sides along the y axis along the x axis, first execution unit includes the first executive item connecting with motion platform, first executive item can be displaced along the x axis, second execution unit includes the second executive item connecting with motion platform, and the second executive item can be displaced along the y axis；Second executing agency is surrounded on the inner circumferential of motion platform, and the second executing agency includes third execution unit, and third execution unit includes the sub-assembly connecting with motion platform, and sub-assembly can be displaced along Z-direction.Motion control structure provided by the invention has the advantages that motion platform can be driven to realize that six-freedom degree movement and movement can accurately and fast be transmitted to driven object body.
Description
[technical field]
The present invention relates to micro electro mechanical system field more particularly to a kind of motion control structure and a kind of use movement controls
The actuator of structure processed.
[background technique]
MEMS (MEMS, Micro-Electro-Mechanical System) motion control structure has extensive
Application, such as mems switch, MEMS micromirror, MEMS loudspeaker, for some applications, such as MEMS micromirror and MEMS stabilization,
The freedom degree of MEMS motion control structure is an important index, existing multiple degrees of freedom MEMS motion control structure exist with
Lower defect:
1, in some applications, such as optical anti-vibration, the freedom degree number of existing motion control structure are less.
2, the connection type for realizing multivariant driving device and driven object body is driving device 1- driving device 2-
Driven object body, this indirect connection type reduce the kinematic accuracy and response speed of driven object body.
[summary of the invention]
One of the objects of the present invention is to provide a kind of motion control structures, can directly drive motion platform and realize six
A freedom degree movement and movement can accurately and fast be transmitted to driven object body.The second object of the present invention is to provide
A kind of actuator, the actuator use above-mentioned motion control structure.
An object of the present invention adopts the following technical scheme that realization:
A kind of motion control structure, comprising:
Motion platform, for being connect with driven object body；
First executing agency, for driving the motion platform to translate along X-axis or translating along Y-axis or about the z axis rotate,
First executing agency is surrounded on the periphery of the motion platform, and first executing agency includes being set to the motion platform
Along the x axis the first execution unit of opposite sides and set on the motion platform along the y axis opposite sides second execute
Unit, first execution unit include the first executive item connecting with the motion platform, and first executive item can be along X-axis
Direction displacement, second execution unit includes the second executive item connecting with the motion platform, and second executive item can
It is displaced along the y axis；
Second executing agency, for driving the motion platform to translate along Z axis or rotating around X-axis or rotated around Y-axis,
Second executing agency is surrounded on the inner circumferential of the motion platform, and second executing agency includes the corresponding motion platform
The third execution unit of inward flange setting, the third execution unit includes the sub-assembly connecting with the motion platform, described
Sub-assembly can be displaced by the driving of peripheral driver along Z-direction.
As an improvement mode, for the motion platform in back-shaped, first execution unit is equipped with two groups, described in two groups
First execution unit is located at the two sides of the motion platform along the x axis, and the first execution unit described in every group includes two
Spaced first executive item along the y axis；Second execution unit is equipped with two groups, and second executes list described in two groups
Member is located at the two sides of the motion platform along the y axis, and the second execution unit described in every group includes being spaced to set along the x axis
Second executive item set；The third execution unit is equipped with four groups, and third execution unit described in four groups respectively corresponds described
Four inward flange settings of motion platform, third execution unit described in every group includes a sub-assembly.
As an improvement mode, each first execution unit further includes connection first executive item and the fortune
The snakelike beam of the first of moving platform, the movement of first executive item is passed to the motion platform by the first snakelike beam makes institute
Motion platform is stated to be displaced along the x axis.
As an improvement mode, each first execution unit further include the second snakelike beam and three along the y axis
Spaced first anchor portion, is arranged first executive item between the first anchor of each adjacent two portion, and each described first
The two sides of executive item pass through the second snakelike beam respectively and connect with first anchor portion.
As an improvement mode, each second execution unit further includes connection second executive item and the fortune
The snakelike beam of the third of moving platform, the movement of second executive item is passed to the motion platform by the snakelike beam of third makes institute
Motion platform is stated to be displaced along the y axis.
As an improvement mode, each second execution unit further include the 4th snakelike beam and three along the x axis
Spaced second anchor portion, is arranged second executive item between the second anchor of each adjacent two portion, and each described second
The two sides of executive item pass through the 4th snakelike beam respectively and connect with second anchor portion.
As an improvement mode, each third execution unit further includes connecting the sub-assembly to put down with the movement
5th snakelike beam of platform, the movement of the sub-assembly is passed to the motion platform by the 5th snakelike beam keeps the movement flat
Platform is displaced along Z axis.
As an improvement mode, each third execution unit further includes snakelike beam assembly and is set to the combination
The two sides in the third anchor portion of part two sides, the sub-assembly are connect by the snakelike beam assembly with third anchor portion.
As an improvement mode, the snakelike beam assembly includes occurring in the X-axis direction for limiting the sub-assembly
The first element of displacement and the second element being subjected to displacement in the Y-axis direction for limiting the sub-assembly.
As an improvement mode, the sub-assembly includes the first monomer, second comonomer and the 6th snakelike beam, described the
One monomer is equipped with cavity, and the second comonomer is set in the cavity, and the two sides of the second comonomer are snakelike by the described 6th
Beam is connect with the inner sidewall of the cavity, and first monomer is connect by the snakelike beam assembly with third anchor portion, institute
Second comonomer is stated to connect by the 5th snakelike beam with the motion platform.
The second object of the present invention adopts the following technical scheme that realization:
A kind of actuator, including several static broach components and motion control structure as described above, wherein part institute
Static broach component is stated to connect with first executive item to drive first executive item to be displaced along the x axis, described in part
Static broach component is connect to drive second executive item to be displaced along the y axis with second executive item, and part is described quiet
Electric comb tooth assembly is connect to drive the sub-assembly to be displaced along Z-direction with the sub-assembly.
In terms of existing technologies, peripheral driver can directly be driven embodiment of the present invention by motion control structure
Dynamic motion platform realizes six-freedom degree movement, namely translates along X-axis, Y-axis and Z axis and rotate around X-axis, Y-axis and Z axis, can
Have a wide range of application；First executing agency and the second executing agency directly connect with motion platform, and the first executing agency and second holds
Row mechanism can directly transmit motion to motion platform, and this mode directly transmitted makes movement can accurately and fast
It is transmitted to driven object body, fast response time.
[Detailed description of the invention]
Fig. 1 is the structural schematic diagram of motion control structure provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of the first executing agency and motion platform provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram of the second executing agency and motion platform provided in an embodiment of the present invention；
Fig. 4 is the schematic diagram that motion control structure provided in an embodiment of the present invention is displaced along the x axis；
Fig. 5 is the schematic diagram that motion control structure provided in an embodiment of the present invention is displaced along the y axis；
Fig. 6 is the schematic diagram that motion control structure provided in an embodiment of the present invention rotates about the z axis；
Fig. 7 is the schematic diagram that motion control structure provided in an embodiment of the present invention is displaced along Z-direction；
Fig. 8 is the schematic diagram that motion control structure provided in an embodiment of the present invention is rotated around X-axis；
Fig. 9 is the schematic diagram that motion control structure provided in an embodiment of the present invention is rotated around Y-axis；
Figure 10 is the structural schematic diagram of driving mechanism provided in an embodiment of the present invention；
Figure 11 is the structural schematic diagram of static broach component provided in an embodiment of the present invention；
Figure 12 is the schematic diagram of static broach Component driver driven object body translation；
Figure 13 is the schematic diagram that static broach Component driver driven object body vertically moves.
[specific embodiment]
The invention will be further described with embodiment with reference to the accompanying drawing.
It should be noted that in the embodiment of the present invention institute it is directional instruction (such as up, down, left, right, before and after, it is interior,
Outside, top, bottom ...) it is only used for explaining and be closed in the relative position under a certain particular pose (as shown in the picture) between each component
System etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
It should also be noted that, when an element is referred to as being " fixed " or " disposed " on another element, which can
Directly on the other element or may be simultaneously present centering elements.When an element referred to as " connects " another yuan
Part, it, which can be, is directly connected to another element or may be simultaneously present centering elements.
Please refer to Fig. 1-3, a kind of motion control structure 100 provided in an embodiment of the present invention, comprising:
Motion platform 10, for being connect with driven object body；
First executing agency 20, for driving motion platform 10 to translate along X-axis or translating along Y-axis or about the z axis rotate,
First executing agency 20 is surrounded on the periphery of motion platform 10, and the first executing agency 20 includes being set to motion platform 10 along X-axis side
The first execution unit 21 to opposite sides and the second execution unit 22 set on the opposite sides along the y axis of motion platform 10,
First execution unit 21 includes the first executive item 211 connecting with motion platform 10, and the first executive item 211 can position along the x axis
It moves, the second execution unit 22 includes the second executive item 221 connecting with motion platform 10, and the second executive item 221 can be along the y axis
Displacement；
Second executing agency 30, for driving motion platform 10 to translate along Z axis or rotating around X-axis or rotated around Y-axis,
Second executing agency 30 is surrounded on the inner circumferential of motion platform 10, and the second executing agency 30 includes that corresponding 10 inward flange of motion platform is set
The third execution unit 31 set, third execution unit 31 include the sub-assembly 311 connecting with motion platform 10, sub-assembly 311 by
The driving of peripheral driver can be displaced along Z-direction.
In the present embodiment, directly connected with motion platform 10 by the first executing agency 20 of setting and the second executing agency 30
It connects, the first executing agency 20 and the second executing agency 30 can directly transmit motion to motion platform 10, this direct transmitting
Mode make movement can accurately and fast be transmitted to driven object body, fast response time.
Mode as an improvement of this embodiment, for motion platform 10 in back-shaped, the first execution unit 21 is equipped with two groups, and two
The first execution unit 21 of group is located at the two sides of motion platform 10 along the x axis, and every group of first execution unit 21 includes two
Spaced first executive item 211 along the y axis；Second execution unit 22 is equipped with two groups, and two group of second execution unit 22 divides
Not Wei Yu the two sides of motion platform 10 along the y axis, every group of second execution unit 22 includes along the x axis spaced second
Executive item 221；Third execution unit 31 is equipped with four groups, and four groups of third execution units 31 respectively correspond 10 4 inner edges of motion platform
Edge setting, every group of third execution unit 31 include a sub-assembly 311.
By above-mentioned set-up mode, motion control structure 100 can directly drive movement by the driving of peripheral driver
Platform 10 realizes the movement of six-freedom degree, and six-freedom degree is translated along X-axis, Y-axis and Z axis and around X-axis, Y-axis and Z respectively
Axis rotation.Illustrate 100 movements for how driving motion platform 10 to realize six-freedom degree indirectly respectively below with six embodiments.
Referring to Fig. 4, illustrating how the first execution unit 21 drives motion platform 10 to be displaced along the x axis, it is located at
Two the first executive items 211 on the left of Fig. 4 are by external force F1Promotion, two the first executive items 211 on the right side of Fig. 4 by
External force F2Pulling, two the first executive items 211 on the left of Fig. 4 and two the first executive items 211 on the right side of Fig. 4 are matched
Driving motion platform 10 is closed to be displaced toward X-axis positive direction.Conversely, driving motion platform 10 is displaced toward X-axis negative direction.
Referring to Fig. 5, illustrating how the second execution unit 22 drives motion platform 10 to be displaced along the y axis, it is located at
Two the second executive items 221 above Fig. 5 are by external force F3Promotion, two the second executive items 221 below Fig. 5 by
External force F4Pulling, two the second executive items 221 above Fig. 5 and two the second executive items 221 below Fig. 5 are matched
Driving motion platform is closed to be displaced toward Y-axis negative direction.Conversely, driving motion platform 10 is displaced toward Y-axis positive direction.
Referring to Fig. 6, how the first execution unit 21 of illustration and the second execution unit 22 cooperate driving motion platform
10 rotate about the z axis, and the first executive item of two on the left of Fig. 6 211 is by external force F5、F6Effect, two below Fig. 6
A second executive item 221 is by external force F7、F8Effect, two first executive items 211 on the right side of displacement diagram 6 are by external force F9、F10
Effect, two the second executive items 221 above Fig. 6 are by external force F11、F12Effect, four 211 Hes of the first executive item
Four the second executive item 221 cooperation driving motion platforms 10 rotate clockwise about the z axis.Conversely, driving motion platform 10 is inverse about the z axis
Hour hands rotation.
Referring to Fig. 7, illustrate how third execution unit 31 drives motion platform 10 to be displaced along Z-direction, four
Sub-assembly 31 is respectively by the power F outside perpendicular to Fig. 713Effect, driving motion platform 10 along Z axis positive direction be displaced.Conversely,
The negative direction for driving motion platform 10 towards Z axis is displaced.
Referring to Fig. 8, illustrating how third execution unit 31 drives motion platform to rotate around X-direction, it is located at Fig. 8
The sub-assembly 31 of top is by the power F outside perpendicular to Fig. 814Effect, the sub-assembly 31 below Fig. 8 is by perpendicular to figure
8 power F inwards15Effect, the sub-assembly 31 above Fig. 8 and the cooperation driving movement of the sub-assembly below Fig. 8 31 are flat
Platform 10 is rotated clockwise around X-axis.Conversely, driving motion platform 10 rotates counterclockwise around X-axis.
Referring to Fig. 9, illustrating how third execution unit 31 drives motion platform to rotate around Y direction, it is located at Fig. 9
The sub-assembly 31 in left side is by the power F outside perpendicular to Fig. 916Effect, the sub-assembly 31 on the right side of Fig. 9 is by perpendicular to convex
9 power F inwards17Effect, the sub-assembly 31 on the left of Fig. 9 and the cooperation driving movement of the sub-assembly on the right side of Fig. 9 31 are flat
Platform 10 is rotated clockwise around Y-axis.Conversely, driving motion platform 10 rotates counterclockwise around Y-axis.
Referring to Fig. 1-3, mode, each first execution unit 21 further include as an improvement of this embodiment
One snakelike beam 212, the first executive item 211 are connect by the first snakelike beam 212 with motion platform 10.By the way that the first executive item is arranged
211 are connect by the first snakelike beam 212 with motion platform 10, and the first snakelike beam 212 passes to the movement of the first executive item 211
Motion platform 10 is displaced motion platform 10 along the x axis.
Mode as an improvement of this embodiment, each first execution unit 21 further include the second snakelike beam 213 and three
First executive item is arranged between the first anchor of each adjacent two portion 214 for a portion of spaced first anchor along the y axis 214
211, the two sides of each first executive item 211 pass through the second snakelike beam 213 respectively and connect with the first anchor portion 214.First anchor portion 214
For the fixation of the first execution unit 21, for example, the first execution unit 21 is fixed on circuit boards by the first anchor portion 214.It is logical
It crosses and the two sides of each first executive item 211 are set pass through the second snakelike beam 213 respectively and connect with the first anchor portion 214, second is snakelike
Beam 213 can inhibit the first executive item 211 to move in the Y-axis direction, so that the driving direction of the first executive item 211 is single,
Driving stability is improved, while reducing the difficulty of the control of motion platform 10.
Mode as an improvement of this embodiment, each second execution unit 22 further include the snakelike beam 222 of third, and second
Executive item 221 is connect by the snakelike beam 222 of third with motion platform 10.It is snakelike by third by the second executive item 221 of setting
Beam 222 is connect with motion platform 10, and the movement of the second executive item 221 is passed to motion platform 10 by the snakelike beam 222 of third to be made to transport
Moving platform 10 is displaced along the y axis.
Mode as an improvement of this embodiment, each second execution unit 22 further include the 4th snakelike beam 223 and three
Second executive item is arranged between the second anchor of each adjacent two portion 224 for a portion of spaced second anchor along the x axis 224
221, the two sides of each second executive item 221 pass through the 4th snakelike beam 223 respectively and connect with the second anchor portion 224.Second anchor portion 224
It is fixed on circuit boards by the second anchor portion 224 for the fixation of the second execution unit 22, such as the second execution unit 22.Pass through
The two sides that each second executive item 221 is arranged pass through the 4th snakelike beam 223 respectively and connect with the second anchor portion 224, the 4th snakelike beam
223 can inhibit the second executive item 221 to move in the X-axis direction, so that the driving direction of the second executive item 221 is single, mention
Height driving stability, while reducing the difficulty of the control of motion platform 10.
Further, the movement of the first executive item 211 is passed to motion platform 10 by the first snakelike beam 212 makes motion platform
10 when being displaced along the x axis, on the one hand, the snakelike beam 222 of the third of connection motion platform 10 and the second executive item 221 absorbs movement
The displacement of platform 10, the displacement of motion platform 10 causes the snakelike beam 222 of third to deform, without causing the second executive item 221
Displacement, under the premise of not influencing the displacement of motion platform 10, the snakelike beam 222 of third will not pass motion to the second executive item
221, on the other hand, the second executive item 221 being connect with the second anchor portion 224 by the 4th snakelike beam 223 cannot position along the x axis
It moves, thus guarantee the sports independence of the first executive item 211 and the second executive item 221, so that the stability of electrostatic drive is improved,
The difficulty of motion platform control is reduced simultaneously.
Further, the movement of the second executive item 221 is passed to motion platform 10 to drive fortune by the snakelike beam 222 of third
When moving platform 10 is displaced along the y axis, on the one hand, the first snakelike beam 212 of connection motion platform 10 and the first executive item 211 is inhaled
The displacement of motion platform 10 is received, the displacement of motion platform 10 causes the first snakelike beam 212 to deform, without causing the first executive item
211 displacement, so that the first snakelike beam 212 will not pass motion to the under the premise of not influencing motion platform 10 and being displaced
One executive item 211 on the other hand cannot be along Y by the first executive item 211 that the second snakelike beam 213 is connect with the first anchor portion 214
Axis direction displacement, guarantees the sports independence of the first executive item 211 and the second executive item 221, to improve the steady of electrostatic drive
It is qualitative, while reducing the difficulty of motion platform control.Mode as an improvement of this embodiment, each third execution unit 31
It further include sub-assembly 311, the 5th snakelike beam 312, snakelike beam assembly 313 and the third anchor portion 314 for being placed in 311 two sides of sub-assembly.
Sub-assembly 311 includes the first monomer 315, second comonomer 316 and the 6th snakelike beam 317, and the first monomer 315 is equipped with cavity 318,
Second comonomer 316 is set in cavity 318, the inner sidewall that the two sides of second comonomer 316 pass through the 6th snakelike beam 317 and cavity 318
Connection, the first monomer 315 are connect by snakelike beam assembly 313 with third anchor portion 314, and second comonomer 316 passes through the 5th snakelike beam
312 connect with motion platform 10.
Sub-assembly 311 is connect by the 5th snakelike beam 312 with motion platform 10.When motion platform 10 occurs in Y direction
When displacement, the 5th snakelike beam 312 deforms, and the first monomer 315 is not subjected to displacement by the limitation of snakelike beam assembly 313；Work as movement
When X-direction is subjected to displacement, the 6th snakelike beam 317 deforms platform 10, and the first monomer 315 is limited by snakelike beam assembly 313
System is not subjected to displacement.Therefore, motion platform 10 is not transferred to the first monomer 315 in the movement of X-axis and Y direction, to protect
The independence for having demonstrate,proved the movement of X/Y axis with Z axis movement, improves the stability of electrostatic drive, reduces the control difficulty of motion platform 10.
The two sides of sub-assembly 311 are connect by snakelike beam assembly 313 with third anchor portion 314.Snakelike beam assembly 313 limitation the
One monomer 315 X-axis and Y direction displacement so that the first monomer 315 can only be in the displacement of Z-direction, to ensure that
The driving direction of one monomer 315 is single, improves the stability of electrostatic drive, reduces the control difficulty of motion platform 10.
Referring to Fig. 10, the embodiment of the present invention also provides a kind of actuator 300, including motion control structure as described above
100 and 12 static broach components 200, wherein four static broach components 200 connect with four the first executive items 211 respectively
Connect with drive the first executive item 211 be displaced along the x axis, four static broach components 200 respectively with four the second executive items 221
To drive the second executive item 221 to be displaced along the y axis, four static broach components 200 connect with four sub-assemblies 31 respectively for connection
It connects and is displaced with drive assembly 31 along Z-direction.It is to be appreciated that static broach component 200 is not limited to equipped with 12, it is quiet
Depending on the number of electric comb tooth assembly 200 is with specific reference to the number of the first executive item 211, the second executive item 221 and sub-assembly 31.
Static broach component 200 can be common lateral comb structure or vertical comb teeth structure, not limit in embodiments of the present invention
It is fixed, it can be selected according to practical application.
Figure 11-13 is please referred to, each static broach component 200 includes the first fixed tooth 201, the first movable tooth 202, the second fixed tooth
203 and second movable tooth 204, the first movable tooth 202 be staggered with the first fixed tooth 201, the second movable tooth 204 and the second fixed tooth 203
It is staggered, the first movable tooth 202 or the second movable tooth 204 are by driving the motion control structure 100 to drive driven object body 400
Movement.When needing to drive driven object 400 to translate, it is passed through preset electric signal into static broach component 200, first
Movable tooth 202 pulls driven object 400 to be displaced towards the first fixed tooth 201, so that it is flat to pull driven object 400 to occur
It moves.When needing to drive driven 400 vertical shift of object, preset electric signal is passed through into static broach component 200, the
One end that two movable tooths 204 are connect with driven object 400 upwarps, to drive driven object 400 in the vertical direction
It is subjected to displacement.In the present embodiment, driven object 400 is the first executive item 211 or the second executive item 221 or sub-assembly
31.It should be pointed out that the structure of static broach component 200 of the Figure 11 into Figure 13 is only only used as to driven object body 400
Displacement illustrated, its specific structure is not constituted and is limited, and motion control structure 100 is not drawn specifically herein.
Above-described is only embodiments of the present invention, it should be noted here that for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, improvement can also be made, but these belong to protection model of the invention
It encloses.
Claims (11)
1. a kind of motion control structure characterized by comprising
Motion platform, for being connect with driven object body；
First executing agency, it is described for driving the motion platform to translate along X-axis or translating along Y-axis or about the z axis rotate
First executing agency is surrounded on the periphery of the motion platform, and first executing agency includes being set to the motion platform along X
First execution unit of axis direction opposite sides and opposite sides second executes list along the y axis set on the motion platform
Member, first execution unit include the first executive item connecting with the motion platform, and first executive item can be along X-axis side
To displacement, second execution unit includes the second executive item connecting with the motion platform, and second executive item can be along Y
Axis direction displacement；
Second executing agency, it is described for driving the motion platform to translate along Z axis or rotating around X-axis or rotated around Y-axis
Second executing agency is surrounded on the inner circumferential of the motion platform, and second executing agency includes the corresponding motion platform inner edge
The third execution unit of edge setting, the third execution unit includes the sub-assembly connecting with the motion platform, the combination
Part can be displaced along Z-direction.
2. motion control structure according to claim 1, which is characterized in that the motion platform is in back-shaped, and described first
Execution unit is equipped with two groups, and the first execution unit described in two groups is located at the two sides of the motion platform along the x axis, and every group
First execution unit includes two spaced first executive items along the y axis；Second execution unit is set
There are two groups, the second execution unit described in two groups is located at the two sides of the motion platform along the y axis, and second holds described in every group
Row unit includes spaced second executive item along the x axis；The third execution unit is equipped with four groups, described in four groups
Third execution unit respectively corresponds four inward flange settings of the motion platform, and third execution unit described in every group includes an institute
State sub-assembly.
3. motion control structure according to claim 1 or 2, which is characterized in that each first execution unit also wraps
Include the first snakelike beam for connecting first executive item and the motion platform, the first snakelike beam is by first executive item
Movement pass to the motion platform and be displaced the motion platform along the x axis.
4. motion control structure according to claim 3, which is characterized in that each first execution unit further includes using
In spaced first anchor along the y axis of the second snakelike beam for limiting first executive item and being displaced toward Y direction and three
First executive item, the two sides difference of each first executive item are arranged between the first anchor of each adjacent two portion for portion
It is connect by the described second snakelike beam with first anchor portion.
5. motion control structure according to claim 1 or 2, which is characterized in that each second execution unit also wraps
Include the snakelike beam of third for connecting second executive item and the motion platform, the snakelike beam of third is by second executive item
Movement pass to the motion platform and be displaced the motion platform along the y axis.
6. motion control structure according to claim 5, which is characterized in that each second execution unit further includes using
In spaced second anchor along the x axis of the 4th snakelike beam for limiting second executive item and being displaced toward X-direction and three
Second executive item, the two sides difference of each second executive item are arranged between the second anchor of each adjacent two portion for portion
It is connect by the 4th snakelike beam with second anchor portion.
7. motion control structure according to claim 1 or 2, which is characterized in that each third execution unit also wraps
The 5th snakelike beam for connecting the sub-assembly and the motion platform is included, the 5th snakelike beam passes the movement of the sub-assembly
Passing the motion platform is displaced the motion platform along Z axis.
8. motion control structure according to claim 7, which is characterized in that each third execution unit further includes snake
Ellbeam component and the third anchor portion for being set to the sub-assembly two sides, the two sides of the sub-assembly by the snakelike beam assembly with
The connection of third anchor portion.
9. motion control structure according to claim 8, which is characterized in that the snakelike beam assembly includes for limiting
State the first element and be subjected to displacement in the Y-axis direction for limiting the sub-assembly that sub-assembly is subjected to displacement in the X-axis direction
Second element.
10. motion control structure according to claim 9, which is characterized in that the sub-assembly includes the first monomer, second
Monomer and the 6th snakelike beam, first monomer are equipped with cavity, and the second comonomer is set in the cavity, and described second is single
The two sides of body are connect by the 6th snakelike beam with the inner sidewall of the cavity, and first monomer passes through the snakelike beam group
Part is connect with third anchor portion, and the second comonomer is connect by the 5th snakelike beam with the motion platform.
11. a kind of actuator, which is characterized in that including several static broach components and as described in claim any one of 1-10
Motion control structure, wherein the part static broach component is connect to drive described first to hold with first executive item
Row part is displaced along the x axis, and the part static broach component is connect to drive described second to execute with second executive item
Part is displaced along the y axis, and the part static broach component is connect to drive the sub-assembly along Z-direction with the sub-assembly
Displacement.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2020/080345 WO2021004089A1 (en) | 2019-06-29 | 2020-03-20 | Motion control structure and actuator |
| US16/995,791 US11891297B2 (en) | 2019-07-05 | 2020-08-17 | Motion control structure and actuator |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNPCT/CN2019/093995 | 2019-06-29 | ||
| CN2019093995 | 2019-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110347119A true CN110347119A (en) | 2019-10-18 |
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| WO2021004089A1 (en) * | 2019-06-29 | 2021-01-14 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN112965240A (en) * | 2021-02-09 | 2021-06-15 | 无锡微视传感科技有限公司 | Off-axis MEMS (micro-electromechanical system) micro-mirror and preparation method thereof |
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| Publication number | Publication date |
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| CN110347119B (en) | 2021-11-16 |
| WO2021004089A1 (en) | 2021-01-14 |
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