CN107774501B

CN107774501B - Coating device

Info

Publication number: CN107774501B
Application number: CN201711083920.4A
Authority: CN
Inventors: 吴俊欣
Original assignee: All Ring Tech Co Ltd
Current assignee: All Ring Tech Co Ltd
Priority date: 2013-11-06
Filing date: 2014-07-18
Publication date: 2020-04-10
Anticipated expiration: 2034-07-18
Also published as: CN104624435A; CN107855250A; CN107774501A; CN107899896A; CN104624435B; TW201517988A; CN107899896B; TWI584879B

Abstract

The invention relates to a coating method and a device, comprising the following steps: the first cantilever of the first gantry is in a Y-axis direction, the first cantilever is provided with a first operating device, the first operating device comprises a first coating head, and the first coating head coats viscous materials on a substrate carried by a carrying disc in an operating interval; the first operating device is arranged on a first working head, the first working head is arranged on the first cantilever, and the first working head can perform X-axis displacement; so as to effectively coat the adhesive material on the substrate on the carrying tray.

Description

Coating device

The present invention is a divisional application of an invention patent application entitled "coating method and apparatus" having application number 201410344873.4 and application date 2014, 7-18.

Technical Field

The present invention relates to a coating apparatus, and more particularly, to a coating apparatus for coating a Substrate (Substrate) for supporting a chip on a carrier.

Background

Generally, when a wafer is cut into chips, each chip must be placed in a Substrate (Substrate Board) for packaging, so that the chip can be used; the conventional process of placing the chip on the substrate is usually completed through a tray (Boat) to provide a plurality of orderly arranged placing areas for placing the substrates in the placing areas of the tray, and then the predetermined position on the substrate is coated with the adhesive material, so that the chip can be fixed at the predetermined position of the substrate by the adhesive material when placed on the substrate to perform the next process.

A method for coating adhesive material on the preset position of base plate includes such steps as arranging tracks under two gates, arranging a carrier plate with base plate on the tracks, arranging a transverse track seat above the two gates, arranging an adhesive valve on the track seat for containing adhesive material, and moving the carrier plate in Y-axis and Z-axis on the track seat.

Another prior art method and apparatus for coating viscous material on a predetermined position on a substrate, in order to improve efficiency, a first guide rail and a second guide rail are arranged in parallel below two gantry doors to respectively convey two carrying discs, a first guide rail and a second guide rail are arranged on the first gantry door to respectively arrange a detection unit and a first discharging head, a third guide rail is arranged on the second gantry door to arrange a second discharging head, so that the carrying discs on the first guide rail are detected by the detection unit when being conveyed below the first guide rail on the first gantry door, then are conveyed to pass below the second guide rail on the first gantry door to be coated by the first discharging head, and then return to the position below the first guide rail on the original first gantry door to be detected by the detection unit to complete coating operation; the second guide rail is the same as the first guide rail in the process and operation, but one step later than the operation process on the first guide rail.

Disclosure of Invention

The prior art adopts the former glue valve to do X-axis displacement on the rail seat, and a horizontally arranged rail seat is commonly arranged above the space between the two gates, and the rail seat is provided with the glue valve for containing viscous materials, the horizontally arranged rail seat can do X-axis displacement on the two gates, and the horizontally arranged rail seat is designed to ensure that the coating device can only carry out coating operation by one glue valve, so the efficiency is poor; in addition, although the latter adopts the first gantry with the first guide rail and the second guide rail to set the detection unit and the first discharging head respectively, and the second gantry with the second guide rail to set the second discharging head, the substrate-carrying tray that finishes coating at the first discharging head and the second discharging head must perform a return procedure to receive the detection of the detection unit under the first guide rail, resulting in the waste of the stroke and the delay of the next tray entering, and delaying the output efficiency!

Accordingly, an object of the present invention is to provide a coating apparatus capable of efficiently coating a substrate on a tray with an adhesive material.

The coating device according to the object of the invention comprises: the first cantilever of the first gantry is in a Y-axis direction, the first cantilever is provided with a first operating device, the first operating device comprises a first coating head, and the first coating head coats viscous materials on a substrate carried by a carrying disc in an operating interval; the first cantilever is provided with a first working head in the X-axis direction, the first operating device is arranged on the first working head, the first working head is arranged on the upper surface of the first cantilever, a first sliding seat is arranged between the upper surface of the first cantilever and the lower surface of the first working head, and the first working head can perform X-axis and Y-axis displacement on the upper surface of the first cantilever; the carrying disc is conveyed to the operation section through a first movable rail frame of a first conversion mechanism to be coated with the viscous materials by the first coating head, and after the coating is finished, the carrying disc is conveyed out through a second movable rail frame of a second conversion mechanism in the operation section.

In the coating device provided by the embodiment of the invention, the first cantilever and the second cantilever are in the Y-axis direction, the first operating device and the second operating device are arranged on the first working head and the second working head which are arranged on the first cantilever and the second cantilever, and the first working head and the second working head can perform X-axis displacement; therefore, the first operating device and the second operating device can respectively carry out X, Y axial displacement on the first gantry and the second gantry, and a rail seat which is horizontally arranged is not required to be erected above the two gantries in the prior art; the first working head and the second working head can do X axial displacement so that the first operating device and the second operating device can bear larger weight, the first coating head and the second coating head can obtain stable support, and when X axial gluing is executed, the first working head and the second working head can be only moved to link the first coating head and the second coating head without moving a carrying disc, so that the carrying disc is not required to be moved to influence the positioning of a substrate on the carrying disc; meanwhile, because the first working head and the second working head are stably supported, one end of the first working head and one end of the second working head can bear the weight of the first coating head, the second coating head, the first detection device, the second detection device, the first image capturing device and the second image capturing device at the same time when necessary, so that the operation steps of positioning the substrate, measuring the height of the substrate and coating the viscous material on the substrate are carried out, the coating accuracy of the viscous material can be increased, and the uniform management and control of an operation mechanism are facilitated.

Drawings

FIG. 1 is a schematic top view of a tray conveying path on a main frame in an embodiment of the present invention.

FIG. 2 is a perspective view of a tray conveying path on a main frame according to an embodiment of the present invention.

FIG. 3 is a schematic top view of a coating apparatus according to an embodiment of the present invention.

FIG. 4 is a perspective view of a coating apparatus according to an embodiment of the present invention.

FIG. 5 is a schematic exploded perspective view of the first fixing rail and the fixture, and the carrying tray in the embodiment of the present invention.

FIG. 6 is a perspective view of a measuring device and a residual glue removing device according to an embodiment of the present invention.

Fig. 7 is a schematic perspective view of the operation of the pushing device at the loading device in the embodiment of the present invention.

FIG. 8 is a front perspective view of a pusher shoe at a loading/unloading apparatus in an embodiment of the present invention.

FIG. 9 is a rear perspective view of a pusher jack at the loading/unloading apparatus in accordance with an embodiment of the present invention.

FIG. 10 is a schematic view (one) of the operation of the pusher jack of the embodiment of the present invention.

FIG. 11 is a schematic view (two) of the operation of the pusher jack of the present embodiment.

FIG. 12 is a schematic view (III) of the operation of the pusher shoe of the embodiment of the present invention.

Description of the symbols

A main machine station A1 first track

A11 first fixed rail frame A111 side rail frame

A112 fastener A113 belt drive

A114 belt A115 stop mechanism

A116 stop driver A117 stop pin

A2 second track A21 second fixed rail

A3 carrying disc A31 hollow space

A32 locating pin A33 slide glass

A4 first conversion mechanism A41 driving piece

A42 first movable rail frame A5 second switching mechanism

A51 driving piece A52 second movable rail

A6 operation region A61 first gantry

A611 first cantilever A612 first working head

A613 first slide A614 Linear Transmission

A615 Linear Transmission A62 second gantry

A621 second cantilever A622 second working head

A623 second slide A624 Linear Transmission

A71 first operating means a711 first detecting means

A712 first image-taking device a713 first coating head

A72 second operating means a721 second detecting means

A722 second image taking device A723 second coating head

A8 correction seat A81 correction scale

A83 residual glue removing device of A82 measuring device

A831 clamp A832 container

A833 clamp A834 Flexible part

A9 jig A91 jig base

A92 footstock A93 negative pressure channel

B auxiliary machine station B1 third fixed rail rack

B2X axial drive member B3Y axial drive member

B4 second detection device B5 pushing device

B51 fixed seat B52 slide rail

B521 slider B53 moving seat

B541 slider of B54 rodless pneumatic cylinder

B55 push rod B551 elastic element

B56 blocking the first sensing member of B571

B572 second sensor C Loading device

C1 first crane C2 storage box

C3 opening C4 pushing device

C42 rail seat of C41 fixed part

C44 pushing piece of C43 slide rail

C46 belt of C45 moving seat

C47 driving piece D assembling and disassembling mechanism

D1 second lifting frame D2 storage box

Opening D3

Detailed Description

Referring to fig. 1 and 2, a coating apparatus according to an embodiment of the present invention can be described with reference to the apparatus shown in the drawings; the method comprises the following steps:

a main machine station A, on which a first track A1 relatively close to the operator and a second track A2 relatively far from the operator and parallel to the first track A1 are arranged, the first track A1 and the second track A2 can be respectively used for positioning a carrying disc A3 therein or carrying displacement in the X-axis direction; the first rail A1 is composed of a first fixed rail A11 which does not displace at a fixed position; the second rail A2 is composed of a second fixed rail A21 which does not move at a fixed position; a first conversion mechanism A4 and a second conversion mechanism A5 are respectively arranged at two sides of the first fixed rail A11 and the second fixed rail A21, the first conversion mechanism A4 is provided with a first movable rail A42 which can be driven to perform Y-axis displacement on a driving piece A41, and the second conversion mechanism A5 is provided with a second movable rail A52 which can be driven to perform Y-axis displacement on the driving piece A51; referring to fig. 3 and 4, a first gantry a61 and a second gantry a62 are disposed above the first rail a1 and the second rail a2 at a distance, and the first fixed rail a11 and the second fixed rail a21 correspond to each other and are located in an operation area a6 formed between the first gantry a61 and the second gantry a 62; the first cantilever A611 of the first gantry A61 is in a Y-axis direction, a first working head A612 is arranged on the first cantilever A611 in the X-axis direction, a first sliding seat A613 is arranged between the upper surface of the first cantilever A611 and the lower surface of the first working head A612, linear transmission parts A614 and A615 are respectively arranged between the lower surface of the first sliding seat A613 and the upper surface of the first cantilever A611, and between the upper surface of the first sliding seat A613 and the lower surface of the first working head A612, and can be composed of a linear sliding rail and a linear motor comprising a rotor and a stator, so that the first working head A612 can perform X-axis and Y-axis displacement on the upper surface of the first cantilever A611; the second cantilever A621 of the second gantry A62 is in Y-axis direction, a second working head A622 is arranged on the second cantilever A621 in X-axis direction, a second sliding seat A623 is arranged between the upper surface of the second cantilever A621 and the lower surface of the second working head A622, linear transmission parts A624 and A625 are respectively arranged between the lower surface of the second sliding seat A623 and the upper surface of the second cantilever A621 and between the upper surface of the second sliding seat A623 and the lower surface of the second working head A622, and can be composed of a linear sliding rail and a linear motor comprising a rotor and a stator, so that the second working head A622 can make X-axis and Y-axis displacement on the upper surface of the second cantilever A621; the first working head a612 is provided with a first operating device a71 facing one end of the operating section A6, and the first operating device a71 includes: the first detecting device a711, the first image capturing device a712, and the first coating head a713, and the second operating device a72 is disposed at one end of the second working head compartment a622 facing the operating section A6, and includes: the first detecting device a711 and the second detecting device a721 may be a laser head capable of measuring height, the first image capturing device a712 and the second image capturing device a722 may be a CCD lens, and the first coating head a713 and the second coating head a723 may be adhesive material coating devices that use a glue cylinder to supply adhesive and use a glue valve to discharge the adhesive; a correction seat A8 is arranged between the first fixed rail frame A11 and the second fixed rail frame A21 of the operation section A6, and a correction scale A81 is arranged on the correction seat A8; a glue amount measuring device A82 is arranged between the first track A1 and an operator, and two sides of the glue amount measuring device A82 are respectively provided with a residual glue removing device A83;

the auxiliary machine station B is an independent machine station separated from the main machine station A, and is provided with a third fixed rail frame B1, which corresponds to the first track A1 of the main machine station A and can be used for conveying and stopping the carrier disc A3 for a rear-section flow path conveyed by the carrier disc A3 of the first track A1; a second detecting device B4 capable of detecting the coating condition of the substrate adhesive material on the carrying disc A3 under the drive of an X-axis driving element B2 and a Y-axis driving element B3, wherein the second detecting device B4 can be a CCD lens with higher multiplying power than the first and second image capturing devices A712 and A722; a pushing device B5 is arranged at one end of the third fixed rail frame B1, which is used as a carrying disc A3 for conveying and discharging;

a loading and conveying mechanism (Loader) C which is arranged on one side of the main machine station A and comprises a first lifting frame C1 and a plurality of storage boxes C2 which are driven by a lifting frame C1 to ascend or descend in the Y-axis direction, wherein each storage box C2 is provided with openings C3 on two sides in the X-axis direction and can be driven to ascend and descend to correspond to a first movable rail frame A42 of the first conversion mechanism A4, and a pushing device C4 can push a carrying disc A3 which is contained in the storage box C2 and is not coated with viscous materials into the first movable rail frame A42 of the main machine station A to be conveyed for coating with the viscous materials;

an unloading mechanism (Unloader) D arranged on one side of the auxiliary machine station B, comprising a second lifting frame D1 and a plurality of storage boxes D2 driven by the lifting frame D1 to ascend or descend in the Y-axis direction, wherein each storage box D2 forms two side openings D3 in the X-axis direction and can be driven to correspond to a second movable rail frame A52 of the second switching mechanism A5; the storage case D2 is used to store the carrier tray A3 on which the adhesive material is applied.

In the embodiment of the present invention, the flow path transferred by the carrier tray A3 is composed of independent flow paths formed by a plurality of independent rail frames, including a first fixed rail frame a11, a second fixed rail frame a21, a third fixed rail frame B1, a first movable rail frame a42, a second movable rail frame a52, and the like, all of which have substantially the same structure, and the structure of the first fixed rail frame a11 is described below, please refer to fig. 5, the first fixed rail frame a11 is a first rail frame A1 through which the carrier tray A3 can pass formed by a side rail member a111 with two partition distances, the two side rail members a111 are fixed by a fixing member a112 and are elevated above the main machine table a by a height distance, the opposite inner sides of the two side rail members a111 are respectively provided with a belt a114 driven by a belt driving member a113 composed of a motor, and the carrier tray A3 is placed above the belt a114 between the two side rail members a111 and is transported; one end of the first track A1 is also provided with a stop mechanism A115, which is driven by a stop driving piece A116 formed by a cylinder to lift a stop pin A117 to stop the loading disc A3 conveyed in the first track A1 from being positioned or descend to allow the loading disc A3 to pass;

however, a jig a9 is respectively arranged below the first fixed rail a11 and the second fixed rail a21, a jig seat a91 which can be driven to move up and down is arranged on the jig a91, a plurality of top seats a92 which are arranged in a matrix manner are arranged on the jig seat a91, and negative pressure channels a93 which are crossly arranged are concavely arranged on each top seat a 92; in addition, a plurality of hollow-out sections A31 are arranged in the carrying disc A3, positioning pins A32 are arranged at the four-foot positions of each hollow-out section A31 respectively, a carrying sheet A33 is arranged at the position of each hollow-out section A31 respectively, and the four corner edges of the carrying sheet A33 are just embedded among the positioning pins A32 to obtain positioning; when the carrier tray A3 is just conveyed into the first fixed rail a11, the holder a91 of the holder a9 is driven to move upward, and when the upper surface of each top holder a92 is linked and lifted to contact the slide a33, the slide a33 is adsorbed on the upper surface of the top holder a92 to continuously lift the top holder a92 through the hollow space a31 by applying negative pressure to the negative pressure channel a93, so that the chip-carrying substrate arranged on the slide a33 is subjected to the processing; when the jig base a91 is driven to descend, the slide a33 carrying the chip and the substrate is retained on the tray A3 when it touches the tray A3 between the positioning pins a 32.

Referring to fig. 6, the residual adhesive removing devices a83 disposed at two sides of the adhesive amount measuring device a82 each include a clamp a831 and a container a832, wherein flexible members a834 are disposed inside two clamping seats a833 of the clamp a831 respectively for clamping the residual adhesive material after the adhesive is dispensed by the first dispensing head a713 and the second dispensing head a723 in fig. 4, and the container a832 is used for providing the first dispensing head a713 and the second dispensing head a723 for discharging and accommodating the residual adhesive material.

Referring to fig. 7, the pushing device C4 includes a rail seat C42 fixed to the first lifting frame C1 by a fixing member C41, a slide rail C43 is provided on the rail seat C42 for pivoting a moving seat C45 on which a pushing member C44 is provided, the moving seat C45 is linked with a belt C46 and driven by a driving member C47 formed by a motor, so as to drive the moving seat C45 to link the pushing member C44 to push the loading tray A3.

Referring to fig. 8 and 9, the pushing device B5 includes a fixed seat B51, a sliding rail B52 is disposed on the fixed seat B51, a moving seat B53 is disposed on a sliding block B521 of the sliding rail B52, the moving seat B53 is linked with a sliding block B541 on a rodless pneumatic cylinder B54, a push rod B55 is bent and pivoted to a moving seat B53 at one end, an elastic element B551 is disposed between the push rod B55 and the moving seat B53, a pressing stop member B56 formed by a bearing is disposed at one end of the rodless pneumatic cylinder B54 in the same direction as the sliding rail B52, and a first sensing member B571 and a second sensing member B572 are disposed on a forward and backward displacement path of the moving seat B53.

Referring to fig. 10, when the tray A3 is about to be transported from the third fixed rail B1 to the position retracted to the rear second sensing member B572, the push rod B55 touches the bearing of the pressing member B56, so that the front end of the push rod B55 is tilted downward and compresses the elastic element B551, and the bent position is lowered for the tray A3 to pass through; referring to fig. 11, after the boat A3 passes through, the boat A3 cannot be pushed into the storage box D2 completely and some of the boat A3 protrudes outside because there is a gap between the storage box D2 and the third fixing rail B1; at this time, the moving seat B53 of the pushing device B5 is driven to move forward to disengage from the second sensing member B572, the push rod B55 disengages from the bearing of the blocking member B56, and the restoring force of the elastic element B551 will make the push rod B55 raise again to move forward with its front end corresponding to the carrier disc A3; referring to fig. 12, the moving seat B53 of the pushing device B5 is driven to move forward to push the loading tray A3 into the storage box D2 by the front end of the push rod B55 until the moving seat B53 touches the first sensor B571.

In the implementation of the embodiment of the invention, the carrier disc A3 is pushed by the loading mechanism through the pushing device C4 to enter the first movable rail a42 of the first switching mechanism a4, and under the condition that the first movable rail a42 just corresponds to the first track a1 at the moment, the first movable rail a42 conveys the carrier disc A3 to the first fixed rail a11 of the operation area a 6; when the next disc A3 is pushed by the loading mechanism through the pushing device C4 and enters the first movable rail a42 of the first switching mechanism a4, the first movable rail a42 axially moves the driven member a41 to the corresponding second track a2, and transports the disc A3 to the second fixed rail a21 in the operating area a 6.

The substrate on the carrying tray A3 on the first fixed rail A11 of the first track A1 is firstly operated by the first working head A612 towards the first operating device A71 at one end of the operating section A6 and the second working head A622 towards the second operating device A72 at one end of the operating section A6, the operation comprises the steps of substrate position positioning, substrate height measuring and adhesive material coating on the substrate, wherein the substrate position positioning step is carried out by the first image capturing device A712 and the second image capturing device A722, the substrate height measuring step is carried out by the first detecting device A711 and the second detecting device A721, and the adhesive material coating step on the substrate is carried out by the first coating head A713 and the second coating head A723;

the method of applying the adhesive material may differ depending on whether one or two adhesive materials are to be applied to the substrate, for example:

when applying an adhesive material: the first operating device A71 of the first working head A612 and the second operating device A72 of the second working head A622 are synchronously operated on a carrying disc A3 to position the substrate, measure the height of the substrate and coat adhesive material on the substrate, the first operating device A71 is synchronously shifted to the right, the lower or the left by the left side of the carrying disc A3 and the second operating device A72 by the center of the carrying disc A3, and the three steps are successively carried out according to the positioning of the substrate position, the height measurement of the substrate and the coating of the adhesive material on the substrate;

when two different adhesive materials are applied: the first operating device A71 of the first working head A612 and the second operating device A72 of the second working head A622 synchronously operate the substrate position positioning and the substrate height measuring on the loading disc A3 of the first fixed rail frame A11, and then synchronously move to the loading disc A3 of the second fixed rail frame A21 to operate the substrate position positioning and the substrate height measuring; then the first operating device a71 of the first working head a612 moves to the first fixed rail a11 on the loading tray A3 to operate the step of coating the adhesive material on the substrate of the loading tray A3, while the second operating device a72 of the second working head a622 remains on the loading tray A3 of the second fixed rail a21 to operate the step of coating the adhesive material on the substrate of the loading tray A3; after the completion, the first operating device a71 of the first working head a612 is moved to the carrier tray A3 of the second fixed rail a21 to operate and coat the first adhesive material on the substrate of the carrier tray A3, and the second operating device a72 of the second working head a622 is moved to the carrier tray A3 of the first fixed rail a11 to operate and coat the second adhesive material on the substrate of the carrier tray A3 in an alternating coating manner.

The carrier tray A3 on the first fixed rail a11, which completes the step of coating the adhesive material on the substrate, is conveyed to the second movable rail a52 of the second switching mechanism a5, is conveyed to the third fixed rail B1 of the auxiliary machine B for detection by the CCD lens of the second detection device B4, is conveyed to the storage box D2 of the loading and unloading mechanism (Unload) D after detection is completed, and when the carrier tray A3 enters the storage box D2, the pushing device B5 performs a pushing step, so that the push rod B55 can fall down for the carrier tray A3 to pass through when the carrier tray a is conveyed, and the carrier tray A3 can tilt up to push the carrier tray A3 to push the carrier tray A3 into the storage box D2 to be positioned after the carrier tray A3 passes through; after the transfer of the upper tray A3 of the first fixed rail a11 to the third fixed rail B1 of the sub-mount B is completed, the second movable rail a52 of the second switching mechanism a5 is also driven to be displaced to the second fixed rail a21 to receive the tray A3 transferred thereon, and the tray A3 is transferred to the third fixed rail B1 of the sub-mount B to be detected by the CCD lens of the second detection device B4, and is transferred to the storage box D2 of the loading and unloading mechanism (Unload) D to be collected after the detection is completed.

In the coating apparatus of the embodiment of the present invention, the flow path transferred by the carrier tray A3 sequentially includes, in order of transferring the carrier tray A3:

a first selective flow path formed by a Z-axis displacement of a storage box D2 of a loading mechanism (Loader) C; a carrier tray A3 which is positioned in the storage box D2 and is not coated with the viscous materials is conveyed out of the storage box one by one;

a second selective flow path formed by the Y-axis displacement of the first movable rail a42 of the first switching mechanism a 4; the loading tray A3 is sequentially switched and distributed to different conveying flow paths one by one;

a first fixed flow path constituted by a first fixed rail a 11; the loading tray A3 is positioned for positioning the substrate, measuring the height of the substrate, and coating adhesive material on the substrate;

a second fixed flow path constituted by a second fixed rail a 21; the loading tray A3 is positioned for positioning the substrate, measuring the height of the substrate, and coating adhesive material on the substrate;

a third selective flow path formed by the Y-axis displacement of the second movable rail frame a52 of the second switching mechanism a 5; for sequentially switching and unloading the loading tray A3 from different conveying flow paths to the same conveying flow path one by one;

a third fixed flow path formed by a third fixed rail B1 of the sub-machine B; for positioning the carrier tray a3 on which the adhesive material is applied for performing the test;

a fourth selective flow path formed by a Z-axis displacement of a storage case D2 of an assembling and disassembling mechanism (Unloader) D; the carrier trays A3 coated with the adhesive material are individually received in a receiving box.

In the coating device of the embodiment of the invention, the first and second cantilevers a611 and a621 are in the Y-axis direction, the first and second operating devices a71 and a72 are arranged on the first and second working heads a612 and a622, the first and second working heads a612 and a622 are arranged on the first and second cantilevers a611 and a621, and the first and second working heads a612 and a622 can perform X-axis displacement; therefore, the first and second operating devices a71, a72 can respectively perform X, Y axial displacement on the first and second gates a61, a62, respectively, without the need of commonly erecting a horizontally arranged rail seat above the two gates as in the prior art; the first and second working heads A612 and A622 can do X-axis displacement to enable the first and second operating devices A71 and A72 to bear larger weight, so that the first and second coating heads can be stably supported, and when X-axis coating is performed, only the first and second working heads A612 and A622 can be moved to link the first and second coating heads A713 and A723, without moving a carrier disc, so that the carrier disc is not influenced by movement to position the substrate thereon; meanwhile, because the first and second working heads a612 and a622 are stably supported, one ends of the first and second working heads a612 and a622 can simultaneously bear the weight of the first and second coating heads a713 and a723, the first and second detection devices a711 and a721, and the first and second image capturing devices a712 and a722 when necessary, so that the operation steps including substrate position positioning, substrate height measuring and coating of the viscous material on the substrate can be performed, the coating accuracy of the viscous material can be increased, and the uniform management and control of the operation mechanism can be facilitated.

However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the claims and the description of the present invention are still within the scope of the present invention.

Claims

1. A coating apparatus, comprising:

the first cantilever of the first gantry is in a Y-axis direction, the first cantilever is provided with a first operating device, the first operating device comprises a first coating head, and the first coating head coats viscous materials on a substrate carried by a carrying disc in an operating interval;

the first cantilever is provided with a first working head in the X-axis direction, the first operating device is arranged on the first working head, the first working head is arranged on the upper surface of the first cantilever, a first sliding seat is arranged between the upper surface of the first cantilever and the lower surface of the first working head, and the first working head can perform X-axis and Y-axis displacement on the upper surface of the first cantilever;

the carrying disc is conveyed to the operation section through a first movable rail frame of a first conversion mechanism to be coated with the viscous materials by the first coating head, and after the coating is finished, the carrying disc is conveyed out through a second movable rail frame of a second conversion mechanism in the operation section.

2. A coating apparatus as in claim 1, wherein the first operating means is disposed at an end of the first working head facing the operating section.

3. A coating apparatus as in claim 1, wherein the first operating means comprises: a first detection device for positioning the substrate.

4. A coating apparatus as in claim 1, wherein the first operating means comprises: a first image capturing device for measuring the height of the substrate.

5. The coating apparatus as claimed in claim 4, wherein linear transmission members are respectively disposed between the upper surface of the first slide and the lower surface of the first working head, and are formed by a linear slide and a linear motor including a mover and a stator.

6. A coating apparatus according to claim 1, wherein the first coating head is a viscous material coating apparatus for dispensing the viscous material by a glue valve using a glue cartridge for supplying the viscous material.

7. The coating apparatus of claim 1 wherein the operating region defines a first track in which the carrier plate is positionable or translatable.

8. The coating apparatus as claimed in claim 7, wherein a jig is disposed at the first rail, the jig has a jig base driven to move up and down, the jig base has a plurality of top bases, each top base has a negative pressure channel; in addition, a plurality of hollow areas are arranged in the carrying disc, and carrying sheets are respectively arranged at the positions among the hollow areas.