CN203955449U

CN203955449U - Coating device

Info

Publication number: CN203955449U
Application number: CN201420400105.1U
Authority: CN
Inventors: 吴俊欣
Original assignee: All Ring Tech Co Ltd
Current assignee: All Ring Tech Co Ltd
Priority date: 2013-11-06
Filing date: 2014-07-18
Publication date: 2014-11-26
Anticipated expiration: 2024-07-18
Also published as: TWM488103U

Abstract

The utility model relates to a coating device for coating stickness material on the base plate that a year dish was place, include: the main machine table is provided with a first track and a second track which can be used for positioning or conveying the carrying disc, a first conversion mechanism and a second conversion mechanism; a first gantry and a second gantry are arranged above the first track and the second track to form an operation interval; the first gantry is provided with a first operating device, and the second gantry is provided with a second operating device; the carrying disc is conveyed to the first track or the second track through the first conversion mechanism, is coated with the viscous materials by the first operating device and the second operating device, and is conveyed out through the first track or the second track through the second conversion mechanism to be detected and collected by the collecting box after the viscous materials are coated.

Description

Apparatus for coating

Technical field

The utility model system has about a kind of apparatus for coating, espespecially a kind of at a load plate, install on load plate is coated with to the apparatus for coating of sticky stuff for the substrate (Substrate) of carries chips.

Background technology

General wafer is in the time cutting into blocks of chip, and each sheet chip must encapsulate via being arranged in a substrate (Substrate Board), just can make this chip be used; And the existing operation that chip is arranged on substrate completes through a load plate (Boat) conventionally, make load plate that the storing interval of most proper alignment is provided, be placed in load plate for each substrate and respectively put interval, and then precalculated position on substrate is applied to sticky stuff, while being placed on substrate for chip, can be fixed on the default location of substrate to carry out next processing procedure by this sticky stuff of mat.

A kind of prior art precalculated position on substrate applies the device of sticky stuff, adopt and establish track below two gantry, and make to install this on track and be loaded with the load plate of substrate, and top between two gantry is set up a rail chair being horizontally set with jointly, and on rail chair, establish inside and be installed in the glue valve of sticky stuff, can on two gantry, do Y-axis displacement by the rail chair being horizontally set with, and glue valve can be done X axis and Z-axis direction displacement on rail chair, load plate upper substrate in the track of below is coated with to the operation of sticky stuff.

Another kind of prior art precalculated position on substrate applies the device of sticky stuff, below two gantry, establish two parallel first for raising the efficiency to adopt, two guide rails, to carry respectively two load plates, and on first gantry, establish the first guide rails and the second guide rails, so that detecting unit and the first discharge head to be set respectively, and on second gantry, establish the 3rd guide rails so that the second discharge head to be set, make load plate on the first guide rail defeated on first gantry examined unit inspection when the first guide rails below, renew and carry the second guide rails below on first gantry be coated with by the first discharge head, and then return on former first gantry the first guide rails below examined unit inspection again, to complete coating operation, the second guide rail is with first to lead program and operation that ghost carries out identical, but late rapid compared with the operation procedure on the first guide rail.

Utility model content

Prior art is adopted and below two gantry, is established two parallel first and second guide rails to carry respectively two load plate persons, though it establishes track below two gantry, and make to install this on track and be loaded with the load plate of substrate, and top between two gantry is jointly set up a rail chair person who is horizontally set with and is had higher coating efficiency, but because it is sayed with regard to the coating operation on single load plate, because load plate is applied in movement, therefore the displacement of discharge head and the displacement of load plate form more variable, form the impact of accuracy for coating precision; Moreover, due to its mode of adopting three guide rails and arrange respectively detecting unit, the first discharge head, the second discharge head, make this load plate that is loaded with substrate that completes coating at the first discharge head, the second discharge head must carry out a return information, and be back to the first guide rails below and accept the detection of detecting unit, cause the waste of stroke and the delay that next load plate enters, to output efficiency, formation is prolonged idle!

So the purpose of this utility model, is to provide a kind of apparatus for coating that makes the load plate being transferred can carry out efficiently sticky stuff coating on multiple tracks.

Another object of the present utility model, is to provide a kind of operations that makes to concentrate between same operating space so that the apparatus for coating of operational administrative.

Another object of the present utility model, is to provide a kind of load plate that makes to be carried out sticky stuff coating in location to increase the apparatus for coating of accuracy.

An object more of the present utility model, is to provide a kind of apparatus for coating that makes to be easy to carry out every positioning correcting in sticky stuff coating process.

An object more again of the present utility model, the apparatus for coating that provides two kinds to make the load plate being transferred can carry out efficiently sticky stuff coating on multiple tracks is provided.

An object more again of the present utility model, is to provide a kind of load plate that makes to be carried out sticky stuff coating in location to increase the apparatus for coating of accuracy.

An object more again of the present utility model, the apparatus for coating that provides two kinds to make operating means can avoid collision in the time carrying out sticky stuff coating is provided.

An object more again of the present utility model, is to provide a kind of and is delivered to the apparatus for coating that receiver is collected after load plate is completed to coating sticky stuff.

An object more again of the present utility model, is to provide a kind of apparatus for coating that carries out sticky stuff coating with efficient load plate transfer stream.

According to the apparatus for coating of the purpose of this utility model, comprising: a main engine bed, on it, setting can be for a load plate in wherein locating or carry displacement the first track and the second track; The second switching mechanism that its both sides are respectively equipped with the first switching mechanism of the first active rail frame that can be driven action displacement and can be driven the second active rail frame of action displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first track and the second track are positioned between the operating space forming between first gantry and second gantry; First cantilever at first gantry is provided with the first operating means, and second cantilever at second gantry is provided with the second operating means; Described load plate is delivered to the first track via the first active rail frame of the first switching mechanism or the second track is subject to the first operating means and the second operating means to carry out sticky stuff coating, and after completing, carry through the second active rail frame of the second switching mechanism the person of shifting out by the first track or the second track.

According to the apparatus for coating of another object of the utility model, comprising: a main engine bed, the first track and the second track are set on it, described the first track and the second track respectively can be for a load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first track and the second track are positioned between the operating space forming between first gantry and second gantry; First cantilever at first gantry is provided with the first operating means, and second cantilever at second gantry is provided with the second operating means; Described in this, the first operating means comprises: the first checkout gear, the first image-taking device, the first dispense tip; This second operating means comprises: second detection device, the second image-taking device, the second dispense tip; On first track of described load plate between operating space or the second track, being subject to the first operating means and the second operating means to carry out substrate position location, substrate height surveys on high, substrate and is coated with sticky stuff, and after completing, by the first track or the second orbit transports person of shifting out.

According to the apparatus for coating of the another object of the utility model, comprising: a main engine bed, the first track and the second track are set on it, described the first track and the second track respectively can be for a load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first retaining rail frame, the second retaining rail chord position are between the operating space forming between first gantry and second gantry; First gantry is provided with the first operating means, and second gantry is provided with the second operating means; Respectively be provided with a tool at the first track and the second track place, this tool is provided with one and can be subject to drive the tool seat of doing upper and lower displacement, and tool seat is provided with most footstocks, and each footstock is provided with negative pressure conduit; Separately, in load plate, be provided with between most vacancy sections, between each vacancy section, locate respectively to install respectively slide glass; In the time that load plate is transported to the first track or the second track place, the tool seat of described tool will be driven to move with footstock to contact slide glass, and pass to negative pressure at negative pressure conduit, make slide glass be adsorbed on footstock upper surface and order footstock liter through between vacancy section, carried out sticky stuff coating so that install the substrate that is loaded with chip on slide glass by the first operating means, the second operating means.

According to the utility model apparatus for coating of an object again, comprising: a main engine bed, the first track and the second track are set on it, described the first track and the second track respectively can be for a load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first retaining rail frame, the second retaining rail chord position are between the operating space forming between first gantry and second gantry; First gantry is provided with the first operating means, and second gantry is provided with the second operating means; The first track between described operating space and the second interorbital, be provided with a correcting mount, which is provided with calibrated scale; So that on load plate the contained substrate of establishing by the first operating means, the second operating means carry out sticky stuff coating use constantly proofread and correct location person.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprising: one first switching mechanism, it is done Y-axis displacement with one first active rail frame and forms one second selective stream; One first retaining rail frame, it forms the first fixing stream; One second retaining rail frame, it forms the second fixing stream; One second switching mechanism, it is done Y-axis displacement with one second active rail frame and forms one the 3rd selective stream.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprising: the second selective stream, in order to by load plate one by one order conversion assignments to the different streams of carrying; The first fixing stream, with being coated with sticky stuff step so that load plate supplies to carry out on substrate in location; The second fixing stream, with being coated with sticky stuff step so that load plate supplies to carry out on substrate in location; The 3rd selective stream, moves to same conveying stream in order to load plate is sequentially changed to unload from different conveying streams one by one.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprising: be positioned at the track between an operating space, described track can be in order to carry the load plate of placing the substrate of sticky stuff to be coated on it; One tool, is arranged in described track, can use and make to be operated lifting in order to a slide glass of putting substrate in load plate; One operating means, is arranged between this operating space, the person that can be coated with sticky stuff on substrate.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprising: between an operating space, by forming between one first gantry and one second gantry, being provided with can be for the X axis track of carrying load plate; One first working head, is located on described first gantry, can do X axis and Y-axis displacement, and it is provided with the first operating means towards the one end between described operating space; One second working head, is located on described second gantry, can do X axis and Y-axis displacement, and it is provided with the second operating means towards the one end between described operating space; The person that is coated with sticky stuff on the substrate that described the first operating means, the second operating means can carry out carrying at described load plate.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprising: between an operating space, by forming between one first gantry and one second gantry, being provided with can be for the track of carrying load plate; One first operating means, is located on described first gantry, can carry out substrate position location, substrate height to this load plate by load plate left side side and survey on high, substrate and be coated with sticky stuff; One second operating means, is located on described second gantry, can be synchronizeed to the right with the first operating means by load plate central authorities, downwards or to left dislocation this load plate be carried out that substrate position location, substrate height survey are high, is coated with sticky stuff on substrate.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprise: between an operating space, by forming between one first gantry and one second gantry, being provided with can be for the first track, the second track of carrying load plate; One first operating means, is located on described first gantry, can carry out substrate position location, substrate height to load plate on the first track, the second track and survey on high, substrate and be coated with sticky stuff; One second operating means, is located on described second gantry, can carry out substrate position location, substrate height to load plate on the first track, the second track and survey on high, substrate and be coated with sticky stuff; It is to be synchronized with same load plate by the first operating means, the second operating means to carry out that described substrate position location, substrate height are surveyed high; On described substrate, be coated with sticky stuff, be with two kinds of sticky stuffs by the first operating means, the second operating means respectively mutual coating method enter passerby.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprise: a push rod, being located at load plate completes on the stream of coating sticky stuff while wanting to be delivered to a receiver, load plate is carried through out-of-date push rod and can be fallen for load plate process, and load plate is passed and entered receiver location load plate through facing upward later.

According to the utility model apparatus for coating of an object more again, in order to be coated with sticky stuff on the substrate of putting at a load plate, comprise: most independent rail framves, it is each forms independent stream and forms the stream of this load plate transfer, each rail frame respectively comprises respectively by the siding track part of two-phase compartment distance and forms the track that load plate can defeated warp, the two relative inner sides of siding track part are provided with the belt that driven by actuator, and the belt of load plate between this two siding tracks part is transferred.

The utility model apparatus for coating that embodiment provides, due to the stream planning at load plate, and the interaction planning of first the first operating means of working head and the second operating means of the second working head, make the load plate upper substrate coating sticky stuff operation between simple Zhuan Song mechanism and charging crane can have more efficiency, and can be in response to one or more sticky stuff coating, also can select by control the first track or the first track, the second track carries out sticky stuff coating, and the load plate that completes coating need not carry out a return information can complete detection, make more promoting in response to ability of sticky stuff coating efficiency and production capacity, and with load plate on the first retaining rail frame or the second retaining rail frame in operating space, to be accepted comprising that substrate position location, substrate height survey are high, being coated with the operating procedure of sticky stuff on substrate of the first operating means of the first working head and the second operating means of the second working head under load plate location, not only can increase the accuracy of operation sticky stuff coating, also help the system homogeneous tube reason and manipulation of operating mechanism.

Brief description of the drawings

Fig. 1 is the schematic top plan view that in the utility model embodiment, on main engine bed, load plate is carried stream.

Fig. 2 be in the utility model embodiment on main engine bed load plate carry the schematic perspective view of stream.

Fig. 3 is the schematic top plan view of apparatus for coating in the utility model embodiment.

Fig. 4 is the schematic perspective view of apparatus for coating in the utility model embodiment.

Fig. 5 is the first retaining rail frame and perspective exploded view tool, load plate in the utility model embodiment.

Fig. 6 is the schematic perspective view of measuring equipment and cull removal device in the utility model embodiment.

In Fig. 7 the utility model embodiment, dress send the schematic perspective view of device place pusher operation.

The front side schematic perspective view of handler place push unit in Fig. 8 the utility model embodiment.

The rear side schematic perspective view of handler place push unit in Fig. 9 the utility model embodiment.

The schematic diagram (one) of push unit operation in Figure 10 the utility model embodiment.

The schematic diagram (two) of push unit operation in Figure 11 the utility model embodiment.

The schematic diagram (three) of push unit operation in Figure 12 the utility model embodiment.

Symbol description

A main engine bed A1 the first track

A11 the first retaining rail frame A111 siding track frame

A112 fixture A113 belt drive

A114 belt A 115 stop mechanisms

A116 backstop actuator A117 shotpin

A2 second track A21 the second retaining rail frame

Between A3 load plate A31 vacancy section

A32 alignment pin A33 slide glass

A4 the first switching mechanism A41 actuator

A42 first active rail frame A5 the second switching mechanism

A51 actuator A52 the second active rail frame

A61 first gantry between A6 operating space

A611 first cantilever A612 the first working head

A613 the first slide A614 Linear transmission part

A615 Linear transmission part A62 second gantry

A621 second cantilever A622 the second working head

A623 the second slide A624 Linear transmission part

A71 first operating means A711 the first checkout gear

A712 first image-taking device A713 the first dispense tip

A72 the second operating means A721 second detection device

A722 second image-taking device A723 the second dispense tip

A8 correcting mount A81 calibrated scale

A82 measuring equipment A83 cull removal device

A831 fixture A832 container

A833 holder A834 flexible element

A9 tool A91 tool seat

A92 footstock A93 negative pressure conduit

B slave platform B1 the 3rd retaining rail frame

B2 X axis actuator B3 Y-axis actuator

B4 second detection device B5 push unit

B51 holder B52 slide rail

B521 slide block B 53 Mobile bases

B54 is without bar pneumatic cylinder B541 slide block

B55 push rod B551 elastic parts

B56 gear casting die B571 the first sensing member

B572 the second sensing member C dress send device

C1 the first crane C2 receiver

C3 open C 4 pushers

C41 fixture C42 rail chair

C43 slide rail C44 push piece

C45 Mobile base C46 belt

C47 actuator D charging crane

D1 the second crane D2 receiver

D3 opening

Detailed description of the invention

Refer to Fig. 1, Fig. 2, the device embodiment of the utility model embodiment apparatus for coating in can figure explains; Comprise:

One main engine bed A, the first track A1 for close operator is relatively set on it, and be operator far away the second track A2 parallel with the first track A1 relatively, described the first track A1 and the second track A2 respectively can be for a load plate A3 in the conveying displacements of wherein locating or do X axis, described the first track A1 system is made up of the first retaining rail frame A11 that does not do displacement in fixed position, described the second track A2 system is made up of the second retaining rail frame A21 that does not do displacement in fixed position, be respectively equipped with the first switching mechanism A4 and the second switching mechanism A5 in the first retaining rail frame A11, the second retaining rail frame A21 both sides, the first switching mechanism A4 is provided with the first active rail frame A42 that can be done by driving Y-axis displacement on an actuator A41, and the second switching mechanism A5 is provided with the second active rail frame A52 that can be done by driving Y-axis displacement on an actuator A51, refer to Fig. 3, Fig. 4, above the first track A1, the second track A2, be provided with first gantry A61 and second gantry A62 of the intersegmental distance of being separated by, described the first retaining rail frame A11, the second retaining rail frame A21 are corresponding and be just positioned at A6 between the operating space forming between first gantry A61 and second gantry A62, the first cantilever A611 of first gantry A61 is Y-axis, on it, be provided with the first working head A612 with X axis, between the first cantilever A611 upper surface and the first working head A612 lower surface, be provided with the first slide A613, between the first slide A613 lower surface and the first cantilever A611 upper surface, and first be respectively provided with respectively Linear transmission part A614 between slide A613 upper surface and the first working head A612 lower surface, A615, it can be linear slide rail and includes mover and the linear motor of stator forms, make the first working head A612 on the first cantilever A611 upper surface, do X axis and Y-axis displacement, the second cantilever A621 of second gantry A62 is Y-axis, on it, be provided with the second working head A622 with X axis, between the second cantilever A621 upper surface and the second working head A622 lower surface, be provided with the second slide A623, between the second slide A623 lower surface and the second cantilever A621 upper surface, and second be respectively provided with respectively Linear transmission part A624 between slide A623 upper surface and the second working head A622 lower surface, A625, it can be linear slide rail and includes mover and the linear motor of stator forms, make the second working head A622 on the second cantilever A621 upper surface, do X axis and Y-axis displacement, described the first working head A612 is provided with the first operating means A71 towards the one end of A6 between described operating space, it comprises: the first checkout gear A711, the first image-taking device A712, the first dispense tip A713, between the second working head, A622 is provided with the second operating means A72 towards the one end of A6 between described operating space, comprise: second detection device A721, the second image-taking device A722, the second dispense tip A723, wherein, the first checkout gear A711, second detection device A721 can be one can be in order to the laser head of measuring height, the first image-taking device A712, the second image-taking device A722 can be a CCD camera lens, the first dispense tip A713, the second dispense tip A723 can be the sticky stuff apparatus for coating that utilizes packing element to tell glue with glue valve for glue, between the first retaining rail frame A11, the second retaining rail frame A21 of A6 between described operating space, be provided with a correcting mount A8, which is provided with calibrated scale A81, between the first track A1 and operator, be provided with the measuring equipment A82 of glue amount, its both sides are respectively provided with cull removal device A83,

One slave platform B, it is the independent board separating with main engine bed A, which is provided with the 3rd

Retaining rail frame B1, it is corresponding with the first track A1 of described main engine bed A, and the back segment stream of carrying for the load plate A3 of described the first track A1 can supply load plate A3 conveying wherein parked; Separately be provided with the second detection device B4 that can detect described load plate A3 upper substrate sticky stuff coating situation under an X axis actuator B2 and Y-axis actuator B3 driving, it can be the described higher CCD camera lens of first and second image-taking device A712, A722 of multiplying power; Described the 3rd retaining rail frame B1 carries the one end of discharging to be provided with a push unit B5 as load plate A3;

One C of Zhuan Song mechanism (Load), be located at described main engine bed A mono-side, comprise one first crane C1, and be subject to crane C1 driving to make the most receiver C2 that rise or decline in Y-axis, each receiver C2 forms the both-side opening C3 of X axis, and can be driven lifting with the first active rail frame A42 of corresponding the first switching mechanism A4, and can a pusher C4 be transferred and carry out sticky stuff coating being contained in the load plate A3 that not yet carries out sticky stuff coating in receiver C2 and pushing in the first active rail frame A42 of main engine bed A;

One charging crane (Unload) D, be located at described slave platform B mono-side, comprise one second crane D1, and be subject to crane D1 driving to make the most receiver D2 that rise or decline in Y-axis, each receiver D2 forms the both-side opening D3 of X axis, and can be driven the second active rail frame A52 of corresponding the second switching mechanism A5; Receiver D2 is in order to hold the load plate A3 that carries out sticky stuff coating.

In the utility model embodiment, the independent stream that the stream of this load plate A3 transfer is respectively formed by most independent rail framves is formed, comprise the first retaining rail frame A11, the second retaining rail frame A21, the 3rd retaining rail frame B1, the first active rail frame A42, the structure of the rail framves such as the second active rail frame A52 is all roughly the same, explain with the structure of being located at the first retaining rail frame A11 place below, refer to Fig. 5, the first retaining rail frame A11 system forms with the siding track part A111 of two-phase compartment distance the first track A1 that load plate A3 can defeated warp, two siding track part A111 and with fixture A112 fix and frame higher than one height spacing place, main engine bed A top, the two relative inner sides of siding track part A111 are respectively provided with the belt A 114 that driven by the belt drive A113 of motor formation, and belt A 114 tops that load plate A3 is arranged between this two siding tracks part A111 are transferred, first track A1 one end is also provided with a stop mechanism A115 simultaneously, and the shotpin A117 that its backstop actuator A116 forming with a cylinder drives rises and terminates in location with the load plate A3 being transferred in backstop the first track A1, or declines to make load plate A3 pass through,

Only, separately below the first retaining rail frame A11, the second retaining rail frame A21, be respectively provided with a tool A9, which is provided with one and can be subject to drive the tool seat A91 that does upper and lower displacement, tool seat A91 is provided with majority and is the footstock A92 that matrix is arranged, and is respectively provided with and is arranged with the negative pressure conduit A93 that submission fork is established on each footstock A92; Separately, be provided with A31 between most vacancy sections in load plate A3, between each vacancy section, A31 tetra-pin fall to locating to be respectively provided with alignment pin A32, and between vacancy section, A31 place respectively installs respectively a slide glass A33, and its four jiaos of edge are just embedded between these alignment pins A32 and obtain and locate; In the time that load plate A3 is just transferred in this first retaining rail frame A11, the tool seat A91 of described tool A9 will be driven while moving, and contact and when slide glass A33 being risen by interlock with each footstock A92 upper surface on it, via passing to negative pressure at negative pressure conduit A93, and make slide glass A33 continuously make footstock A92 be risen A31 through between vacancy section being adsorbed under footstock A92 upper surface, so that the substrate that is loaded with chip installing on slide glass A33 is carried out applying of processing procedure; And when tool seat A91 is being driven while declining, the slide glass A33 that is loaded with chip and substrate, will be by indwelling on load plate A3 in the time touching between alignment pin A32 load plate A3.

Refer to Fig. 6, the set cull removal device A83 in measuring equipment A82 both sides of glue amount, respectively comprise a fixture A831 and a container A 832, fixture A831 two holder A833 inner sides are respectively provided with flexible element A834, tell the residual tackiness material after glue in order to press from both sides the first dispense tip A713, the second dispense tip A723 in de-Fig. 4, container A 832 is discharged accommodating in order to provide the first dispense tip A713, the second dispense tip A723 will remain sticky stuff.

Refer to Fig. 7, pusher C4 comprises that one can mat fixture C41 be fixedly arranged on the rail chair C42 of the first crane C1, rail chair C42 is provided with slide rail C43 and is pivoted for a Mobile base C45 who which is provided with push piece C44, this Mobile base C45 and a belt C46 interlock the actuator C47 that formed by motor drive, and can order about the operation that Mobile base C45 interlock push piece C44 pushes load plate A3.

Refer to Fig. 8, Fig. 9, push unit B5 system is provided with a holder B51, on holder B51, be provided with slide rail B52, and in the slide block B 521 of slide rail B52, be provided with a Mobile base B53, make Mobile base B53 and without slide block B 541 interlocks on bar pneumatic cylinder B54, make curved the establishing of push rod B55 and be hubbed at Mobile base B53 with one end, between push rod B55 and Mobile base B53, be provided with an elastic parts B551, and be provided with without bar pneumatic cylinder B54 and slide rail B52 one end in the same way the gear casting die B56 that bearing forms, and move forward and backward and on Dong road, be provided with the first sensing member B571 and the second sensing member B572 at Mobile base B53.

Refer to Figure 10, when load plate A3 wants to export to and receive to the second sensing member B572 place, rear from the 3rd retaining rail frame B1, and make push rod B55 touch the bearing of gear casting die B56, and make the front end of push rod B55 have a down dip and elasticity of compression assembly B551, lowerd in its curved place of establishing and pass through for load plate A3; Refer to Figure 11, after load plate A3 passes through, owing to having an intersegmental distance between receiver D2 and the 3rd retaining rail frame B1, have part to convexedly stretch in outside therefore load plate A3 cannot be pushed into receiver D2 completely; Now the Mobile base B53 of push unit B5 is driven reach to depart from the second sensing member B572, and push rod B55 is because departing from the bearing of gear casting die B56, and the restoring force of elastic parts B551 will make push rod B55 again steeve and rectify in the past corresponding load plate A3 and advance; Refer to Figure 12, the Mobile base B53 of push unit B5 is driven reach and is entered receiver D2 with push rod B55 front end pushing and pressing load plate A3, until Mobile base B53 touches the first sensing member B571.

The utility model embodiment on the implementation, load plate A3 is entered the first active rail frame A42 of the first switching mechanism A4 through the propelling movement of pusher C4 by Zhuan Song mechanism, at the first active rail frame A42, now just corresponding the first track A1 in the situation that, the first active rail frame A42 delivers into load plate A3 on the first retaining rail frame A11 of operating space A6; When next load plate A3 enters the first active rail frame A42 of the first switching mechanism A4 by Zhuan Song mechanism through the propelling movement of pusher C4, the first active rail frame A42 will be driven by actuator A41 and be moved to corresponding the second track A2 as Y-axis, and load plate A3 is delivered on the second retaining rail frame A21 in operating space A6.

First be positioned at load plate A3 upper substrate on the first retaining rail frame A11 of the first track A1 and will be first carried out operation towards A622 between the first operating means A71 of A6 one end between described operating space and the second working head towards the second operating means A72 of A6 one end between described operating space by the first working head A612, described operation comprises substrate position location, substrate height is surveyed high, on substrate, be coated with the step of sticky stuff, wherein, substrate position positioning step is with the first image-taking device A712, the second image-taking device A722 carries out, substrate height is surveyed high step with the first checkout gear A711, second detection device A721 carries out, on substrate, being coated with sticky stuff step carries out with first dispense tip A713 the second dispense tip A723,

The method of coating sticky stuff is had any different according to intending being coated with one or both sticky stuffs on substrate, for example:

While being coated with a kind of sticky stuff: the second operating means A72 system of the first operating means A71 of the first working head A612 and the second working head A622 adopts and synchronously operates substrate position location, substrate height survey the mode that is coated with three steps such as sticky stuff on high, substrate and carry out on a load plate A3, the first operating means A71 by load plate A3 left side side, the second operating means A72 by load plate A3 central authorities, the two to the right synchronously, downwards or to left dislocation, survey and on high, substrate, be coated with three steps such as sticky stuff and successively carry out according to described substrate position location, substrate height;

While being coated with two kinds of different sticky stuffs: the second operating means A72 system of the first operating means A71 of the first working head A612 and the second working head A622 adopts and synchronously operate substrate position location on load plate A3 on the first retaining rail frame A11, substrate height is surveyed after height, more synchronously move to the upper load plate A3 of the second retaining rail frame A21 upper operation substrate position location, substrate height is surveyed high; Then the first operating means A71 of the first working head A612 move on the upper operation of the upper load plate A3 of the first retaining rail frame A11 substrate, be coated with sticky stuff step with coating the first sticky stuff on the substrate of load plate A3, and the second operating means A72 of the second working head A622 stay on the upper operation of the load plate A3 substrate of the second retaining rail frame A21, be coated with sticky stuff step with coating the second sticky stuff on the substrate of load plate A3; After completing, the first operating means A71 of the first working head A612 changes the upper operation coating of the load plate A3 the first sticky stuff that moves to the second retaining rail frame A21 again on the substrate of load plate A3, the second operating means A72 of the second working head A622 changes and moves to the upper operation coating of the upper load plate A3 of the first retaining rail frame A11 the second sticky stuff on the substrate of load plate A3, carries out with mutual coating method.

The load plate A3 that is coated with sticky stuff step on the upper completing substrate of the first retaining rail frame A11 will be first delivered to the second active rail frame A52 of the second switching mechanism A5, and the 3rd retaining rail frame B1 that is transported to slave platform B carries out the CCD Shot Detection with second detection device B4, and the receiver D2 that is transported to charging crane (Unload) D after completing detection collects, and in the time that load plate A3 enters receiver D2, push unit B5 carries out one and pushes step, make push rod B55 carry through out-of-date falling for load plate A3 and pass through in load plate A, and load plate A3 passes load plate A3 through facing upward later, enter receiver D2 to location to push load plate A3, be delivered to after the 3rd retaining rail frame B1 of slave platform B and complete load plate A3 on the first retaining rail frame A11, the second active rail frame A52 of the second switching mechanism A5 also will be accepted the load plate A3 transferring out on it by drive displacement to the second retaining rail frame A21, and the 3rd retaining rail frame B1 that this load plate A3 is delivered to slave platform B is carried out to the CCD Shot Detection with second detection device B4, and the receiver D2 that is transported to charging crane (Unload) D after completing detection collects.

The apparatus for coating of the utility model embodiment, the stream of load plate A3 institute transfer, is subject to transfer order according to load plate A3, sequentially comprises:

The first selective stream, does Z-axis direction displacement by the receiver D2 of the C of Zhuan Song mechanism (Load) and is formed; In order to the load plate A3 that is arranged in receiver D2 and is not yet coated with sticky stuff is transferred out to receiver one by one;

The second selective stream, does Y-axis displacement by the first active rail frame A42 of the first switching mechanism A4 and is formed; In order to by load plate A3 one by one order conversion assignments to the different streams of carrying;

The first fixing stream, is made up of the first retaining rail frame A11; With so that load plate A3 survey on high, substrate and be coated with the steps such as sticky stuff for carrying out substrate position location, substrate height in location;

The second fixing stream, is made up of the second retaining rail frame A21; With so that load plate A3 survey on high, substrate and be coated with the steps such as sticky stuff for carrying out substrate position location, substrate height in location;

The 3rd selective stream, does Y-axis displacement by the second active rail frame A52 of the second switching mechanism A5 and is formed; In order to sequentially being changed to unload from different conveying streams one by one, load plate A3 moves to same conveying stream;

The 3rd fixing stream, is made up of the 3rd retaining rail frame B1 of slave platform B; With supplying to carry out detection in location so that complete the load plate A3 of sticky stuff coating;

The 4th selective stream, does Z-axis direction displacement by the receiver D2 of charging crane (Unload) D and is formed; In order to the load plate A3 that is coated with sticky stuff is held one by one and closes at receiver.

The apparatus for coating of the utility model embodiment, due to the stream planning at load plate A3, and the interaction planning of first the first operating means A71 of working head A612 and the second operating means A72 of the second working head A622, make the load plate A3 upper substrate coating sticky stuff operation between simple (Load) C of Zhuan Song mechanism and charging crane (Unload) D can have more efficiency, and can be in response to one or more sticky stuff coating, also can select by control the first track A1 or the first track A1, the second track A2 carries out sticky stuff coating, and the load plate A3 that completes coating need not carry out a return information can complete detection, make more promoting in response to ability of sticky stuff coating efficiency and production capacity, and with load plate A3 on the first retaining rail frame A11 in operating space A6 or the second retaining rail frame A21, to be accepted comprising that substrate position location, substrate height survey are high, being coated with the operating procedure of sticky stuff on substrate of the first operating means A71 of the first working head A612 and the second operating means A72 of the second working head A622 under load plate A3 location, not only can increase the accuracy of operation sticky stuff coating, also help the system homogeneous tube reason and manipulation of operating mechanism.

Only as described above, it is only preferred embodiment of the present utility model, when not limiting the scope that the utility model is implemented with this, the simple equivalence of generally doing according to the utility model claim and description changes and modifies, and all still belongs in the scope that the utility model patent contains.

Claims

1. an apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Main engine bed, on it, setting can be for load plate in wherein locating or carry displacement the first track and the second track; The second switching mechanism that its both sides are respectively equipped with the first switching mechanism of the first active rail frame that can be driven action displacement and can be driven the second active rail frame of action displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first track and the second track are positioned between the operating space forming between first gantry and second gantry; First cantilever at first gantry is provided with the first operating means, and second cantilever at second gantry is provided with the second operating means;

Described load plate is delivered to the first track via the first active rail frame of the first switching mechanism or the second track is subject to the first operating means and the second operating means to carry out sticky stuff coating, and after completing, carry and shift out through the second active rail frame of the second switching mechanism by the first track or the second track.

2. an apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Main engine bed, arranges the first track and the second track on it, described the first track and the second track respectively can be for load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, described the first track and the second track are positioned between the operating space forming between first gantry and second gantry; First cantilever at first gantry is provided with the first operating means, and second cantilever at second gantry is provided with the second operating means; Described in this, the first operating means comprises: the first checkout gear, the first image-taking device, the first dispense tip; This second operating means comprises: second detection device, the second image-taking device, the second dispense tip;

On first track of described load plate between operating space or the second track, being subject to the first operating means and the second operating means to carry out substrate position location, substrate height surveys on high, substrate and is coated with sticky stuff, and after completing, shifted out by the first track or the second orbit transports.

3. an apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Main engine bed, arranges the first track and the second track on it, described the first track and the second track respectively can be for load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, and have the first retaining rail frame and the second retaining rail chord position between the operating space forming between first gantry and second gantry; First gantry is provided with the first operating means, and second gantry is provided with the second operating means; Respectively be provided with tool at the first track and the second track place, this tool is provided with and can be subject to drive the tool seat of doing upper and lower displacement, and tool seat is provided with most footstocks, and each footstock is provided with negative pressure conduit; Separately, in load plate, be provided with between most vacancy sections, between each vacancy section, locate respectively to install respectively slide glass;

In the time that load plate is transported to the first track or the second track place, the tool seat of described tool will be driven to move with footstock to contact slide glass, and pass to negative pressure at negative pressure conduit, make slide glass be adsorbed on footstock upper surface and order footstock liter through between vacancy section, carried out sticky stuff coating so that install the substrate that is loaded with chip on slide glass by the first operating means, the second operating means.

4. an apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Main engine bed, arranges the first track and the second track on it, described the first track and the second track respectively can be for load plate in wherein locating or carry displacement; Above the first track, the second track, be provided with first gantry and second gantry of the intersegmental distance of being separated by, and have the first retaining rail frame and the second retaining rail chord position between the operating space forming between first gantry and second gantry; First gantry is provided with the first operating means, and second gantry is provided with the second operating means; The first track between described operating space and the second interorbital, be provided with correcting mount, which is provided with calibrated scale; So that the contained substrate of establishing is undertaken using and proofreading and correct location when sticky stuff is coated with by the first operating means, the second operating means on load plate.

5. the apparatus for coating as described in claim 1 to 4 any one, it is characterized in that, first cantilever at this first gantry is provided with the first working head, second cantilever at second gantry is provided with the second working head, described the first operating means is located at the first working head towards the one end between described operating space, and described the second operating means is located at the second working head towards the one end between described operating space.

6. the apparatus for coating as described in claim 1 to 4 any one, is characterized in that, described in this, the first track system is made up of the first retaining rail frame of not doing displacement in fixed position; Described the second track system is made up of the second retaining rail frame of not doing displacement in fixed position.

7. the apparatus for coating as described in 1 or 4 any one of claim, is characterized in that, described in this, the first operating means comprises: the first checkout gear, the first image-taking device, the first dispense tip; This second operating means comprises: second detection device, the second image-taking device, the second dispense tip.

8. the apparatus for coating as described in 2 or 4 any one of claim, it is characterized in that, this first track and the second track both sides are respectively equipped with the first switching mechanism and the second switching mechanism, the first switching mechanism is provided with the first active rail frame that can be driven action displacement, and the second switching mechanism is provided with the second active rail frame that can be driven action displacement; Load plate is through the second active rail frame of the second switching mechanism and be delivered to the first track or the second track is subject to the first operating means and the second operating means to carry out sticky stuff coating, and after completing, carry and shift out through the second active rail frame of the second switching mechanism by the first track or the second track.

9. the apparatus for coating as described in claim 6, it is characterized in that, this first and second retaining rail frame system forms with the siding track part of two-phase compartment distance the track that load plate can defeated warp, and the two relative inner sides of siding track part are provided with the belt that driven by actuator, and the belt of load plate between this two siding tracks part is transferred.

10. the apparatus for coating as described in 1 or 4 any one of claim, is characterized in that, this first and second track is provided with the load plate that stop mechanism is transferred with backstop and terminates in location or make load plate pass through.

11. apparatus for coating as described in 1 or 4 any one of claim, is characterized in that, more comprise the 3rd retaining rail frame, it is corresponding with the first track of described main engine bed, and can carry wherein parked for load plate; Separately be provided with the second detection device that can detect described load plate.

12. apparatus for coating as described in claim 11, is characterized in that, the 3rd retaining rail is set up on the slave platform separating with described main engine bed.

13. apparatus for coating as described in 1 or 4 any one of claim, it is characterized in that, more comprise: Zhuan Song mechanism, comprise the first crane, and be subject to crane driving can make the receiver that rises or decline, receiver forms both-side opening, and can be driven lifting to push and in main engine bed, carried out sticky stuff coating being contained in the load plate that not yet carries out sticky stuff coating in receiver with pusher.

14. apparatus for coating as described in claim 13, it is characterized in that, this pusher comprises the rail chair that can mat fixture be fixedly arranged on the first crane, rail chair is provided with slide rail and is pivoted for the Mobile base which is provided with push piece, this Mobile base and belt interlock the actuator that formed by motor drive, and can order about the operation that Mobile base interlock push piece pushes load plate.

15. apparatus for coating as described in 1 or 4 any one of claim, is characterized in that, more comprise: charging crane, comprise the second crane, and being subject to crane driving can make the receiver that rises or decline, receiver forms both-side opening, and can be in order to hold the load plate that complete sticky stuff coating.

16. apparatus for coating as described in claim 15, it is characterized in that, this load plate is subject to the propelling movement of push unit to enter receiver, this push unit comprises holder, on holder, be provided with slide rail, and be provided with Mobile base on the slide block of slide rail, make the slide block interlock on Mobile base and pneumatic cylinder, make push rod be hubbed at Mobile base with one end, between push rod and Mobile base, be provided with elastic parts, and be provided with gear casting die at pneumatic cylinder and slide rail one end in the same way, and move forward and backward and on Dong road, be provided with the first sensing member and the second sensing member at Mobile base.

17. apparatus for coating as described in 1 or 4 any one of claim, is characterized in that, on the main engine bed between the first track and operator, be provided with the measuring equipment of glue amount, its both sides are respectively provided with cull removal device.

18. apparatus for coating as described in claim 17, is characterized in that, this cull removal device respectively comprises fixture and container, and fixture two holders inner sides are respectively provided with flexible element.

19. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

The first switching mechanism, it is done Y-axis displacement with the first active rail frame and forms the second selective stream;

The first retaining rail frame, it forms the first fixing stream;

The second retaining rail frame, it forms the second fixing stream;

The second switching mechanism, it is done Y-axis displacement with the second active rail frame and forms the 3rd selective stream.

20. apparatus for coating as described in claim 19, is characterized in that, more comprise that the receiver of Zhuan Song mechanism is done Z-axis direction displacement, it forms the first selective stream.

21. apparatus for coating as described in claim 19, is characterized in that, more comprise slave platform, it is configured to the 3rd fixing stream with the 3rd retaining rail.

22. apparatus for coating as described in claim 19, is characterized in that, more comprise charging crane, it is done Z-axis direction displacement and form the 4th selective stream with receiver.

23. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

The second selective stream, in order to by load plate one by one order conversion assignments to the different streams of carrying;

The first fixing stream, with being coated with sticky stuff step so that load plate supplies to carry out on substrate in location;

The second fixing stream, with being coated with sticky stuff step so that load plate supplies to carry out on substrate in location;

The 3rd selective stream, moves to same conveying stream in order to load plate is sequentially changed to unload from different conveying streams one by one.

24. apparatus for coating as described in claim 23, is characterized in that, more comprise the first selective stream, in order to the load plate that is arranged in receiver and is not yet coated with sticky stuff is transferred out to receiver one by one.

25. apparatus for coating as described in claim 23, is characterized in that, more comprise the 3rd fixing stream, with so that complete the load plate of sticky stuff coating and detect for carrying out in location.

26. apparatus for coating as described in claim 23, is characterized in that, more comprise the 4th selective stream, in order to the load plate that is coated with sticky stuff is held one by one and closes at receiver.

27. apparatus for coating as described in claim 23, is characterized in that, this first fixing stream, the second fixing stream more comprise carry out substrate position location, substrate height is surveyed high step.

28. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Be positioned at the track between operating space, described track can be in order to carry the load plate of placing the substrate of sticky stuff to be coated on it;

Tool, is arranged in described track, can use and make to be operated lifting in order to the slide glass of putting substrate in load plate;

Operating means, is arranged between this operating space, can on substrate, be coated with sticky stuff.

29. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Between operating space, by forming between first gantry and second gantry, being provided with can be for the X axis track of carrying load plate;

The first working head, is located on described first gantry, can do X axis and Y-axis displacement, and it is provided with the first operating means towards the one end between described operating space;

The second working head, is located on described second gantry, can do X axis and Y-axis displacement, and it is provided with the second operating means towards the one end between described operating space;

On the substrate that described the first operating means, the second operating means can carry out carrying at described load plate, be coated with sticky stuff.

30. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Between operating space, by forming between first gantry and second gantry, being provided with can be for the track of carrying load plate;

The first operating means, is located on described first gantry, can carry out substrate position location, substrate height to this load plate by load plate left side side and survey on high, substrate and be coated with sticky stuff;

The second operating means, is located on described second gantry, can be synchronizeed to the right with the first operating means by load plate central authorities, downwards or to left dislocation this load plate be carried out that substrate position location, substrate height survey are high, is coated with sticky stuff on substrate.

31. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

Between operating space, by forming between first gantry and second gantry, being provided with can be for the first track, the second track of carrying load plate;

The first operating means, is located on described first gantry, can carry out substrate position location, substrate height to load plate on the first track, the second track and survey on high, substrate and be coated with sticky stuff;

The second operating means, is located on described second gantry, can carry out substrate position location, substrate height to load plate on the first track, the second track and survey on high, substrate and be coated with sticky stuff;

It is to be synchronized with same load plate by the first operating means, the second operating means to carry out that described substrate position location, substrate height are surveyed high; On described substrate, be coated with sticky stuff, be with two kinds of sticky stuffs by the first operating means, the second operating means respectively mutual coating method carry out.

32. apparatus for coating as described in claim 29 to 31 any one, is characterized in that, described in this, the first operating means comprises: the first checkout gear, the first image-taking device, the first dispense tip; This second operating means comprises: second detection device, the second image-taking device, the second dispense tip.

33. apparatus for coating as described in claim 28 to 31 any one, it is characterized in that, more comprise the 3rd retaining rail frame and second detection device, and being provided with the charging crane of receiver, it is positioned on the back segment stream that the corresponding load plate of track that this load plate that completes sticky stuff coating is transferred carries.

34. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, it is characterized in that, comprise push rod, being located at load plate completes on the stream of coating sticky stuff while wanting to be delivered to receiver, load plate is carried through out-of-date push rod and can be fallen for load plate process, and load plate is passed and entered receiver location load plate through facing upward later.

35. apparatus for coating as described in claim 34, it is characterized in that, more comprise holder, on holder, be provided with slide rail, and be provided with Mobile base on the slide block of slide rail, make the slide block interlock on Mobile base and pneumatic cylinder, make this push rod be hubbed at Mobile base with one end, between push rod and Mobile base, be provided with elastic parts, and be provided with gear casting die at pneumatic cylinder and slide rail one end in the same way, and move forward and backward and on Dong road, be provided with the first sensing member and the second sensing member at Mobile base.

36. 1 kinds of apparatus for coating, in order to be coated with sticky stuff on the substrate of putting at load plate, is characterized in that, comprising:

A most independent rail frame, it is each forms independent stream and forms the stream of this load plate transfer, each rail frame respectively comprises respectively by the siding track part of two-phase compartment distance and forms the track that load plate can defeated warp, the two relative inner sides of siding track part are provided with the belt that driven by actuator, and the belt of load plate between this two siding tracks part is transferred.

37. apparatus for coating as described in claim 36, is characterized in that, the independent stream that this each independent rail frame respectively forms comprises:

The second selective stream, does Y-axis displacement by the first active rail frame of the first switching mechanism and is formed, in order to by load plate one by one order conversion assignments to the different streams of carrying;

The first fixing stream, is made up of the first retaining rail frame, with being coated with sticky stuff so that load plate supplies to carry out on substrate in location;

The second fixing stream, is made up of the second retaining rail frame, with being coated with sticky stuff so that load plate supplies to carry out on substrate in location;

The 3rd selective stream, does Y-axis displacement by the second active rail frame of the second switching mechanism and is formed, and moves to same conveying stream in order to load plate is sequentially changed to unload from different conveying streams one by one.