CN107768482A - 一种晶体硅太阳能电池热氧工艺 - Google Patents

一种晶体硅太阳能电池热氧工艺 Download PDF

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CN107768482A
CN107768482A CN201710873592.1A CN201710873592A CN107768482A CN 107768482 A CN107768482 A CN 107768482A CN 201710873592 A CN201710873592 A CN 201710873592A CN 107768482 A CN107768482 A CN 107768482A
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张财
付少剑
杨晓琴
肖文明
李超
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Jiangxi Zhanyu New Energy Co Ltd
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Abstract

本发明专利涉及一种晶体硅太阳能电池热氧工艺，该方法是在室温下，通过热氧炉在刻蚀后的硅片绒面生长厚度为2～12nm 的二氧化硅，该二氧化硅采用热氧炉热氧工艺形成的二氧化硅膜厚度、均匀性及致密性比刻蚀臭氧工艺好，二氧化硅膜通过氧原子与悬挂键形成桥键氧,该键比较稳定,对硅片表面有钝化作用，而且热生长二氧化硅膜致密度较高,阻止了硅片表面氢原子的溢出,增强了二氧化硅和氮化硅双层膜的钝化效果，一定程度上提升了太阳能电池的转换效率。

Description

一种晶体硅太阳能电池热氧工艺
技术领域
本发明涉及太阳能光伏技术领域，特别是涉及一种晶体硅太阳能电池热氧工艺。
背景技术
近年来，太阳能电池片生产技术不断进步，生产成本不断降低，转换效率不断提高，使得光伏发电的应用日益普及并迅猛发展，逐渐成为电力供应的重要来源。太阳能电池片可以在阳光的照射下，把光能转换为电能，实现光伏发电。
太阳能电池片的生产工艺比较复杂，简单说来，太阳能电池的制作过程主要包括：制绒、扩散、刻蚀、热氧、PECVD镀膜、丝网印刷和烧结、测试等。太阳电池片是一种将光能转换成电能的电池片,它对光的吸收和利用直接决定着转换效率和输出功率. 为了提高晶体硅太阳电池对光的吸收,减少光在硅片表面的反射,通常采取表面织构以及沉积减反射薄膜的方法,从而改善电池片性能. 目前,工业化生产中常采用等离子体增强化学气相沉积（PECVD) 系统在硅片表面沉积氮化硅薄膜,但是氮化硅与晶体硅界面由于晶格失配严重,会导致严重的界面复合,其性质远不如二氧化硅和晶体硅 . 为同时达到比较理想的钝化和减反效果,采用热氧工艺低温生长二氧化硅薄膜, 然后再PECVD 沉积氮化硅膜,优化的二氧化硅、氮化硅双层膜能起到钝化和减反射的双重作用,明显改善太阳电池对光的吸收利用和光生载流子的输出。因此，提出一种在刻蚀后硅片表面制备一层均匀性，致密性较好的氧化层的方法，对提高钝化和减反射的作用，最终提高太阳能电池转化效率显得尤为重要。
发明内容
一种晶体硅太阳能电池热氧工艺，:经过刻蚀后，在硅片绒面上制备一层二氧化硅致密的氧化膜。
一种晶体硅太阳能电池热氧工艺:所述二氧化硅致密的氧化膜是使用热氧炉进行热氧工艺制备而成。
一种晶体硅太阳能电池热氧工艺：所述热氧工艺包括以下步骤：
(1)将硅片进行制绒、扩散、刻蚀。
(2)将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化得到2-12nm的二氧化硅致密的氧化膜。
(3)将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结、测试。
4. 一种晶体硅太阳能电池热氧工艺：步骤（3）中的热氧工艺控制氧气流量为1-5L/min，氮气为5-30L/min，时间为10-30min。
5.一种晶体硅太阳能电池热氧工艺热氧工艺共9个步骤，分别为：（1)准备阶段；（2）进舟阶段；（3）出舟阶段；（4）检漏阶段；（5）加热阶段；(6）热氧化阶段；(7）冷却阶段；(8）进舟阶段；(9)出舟阶段。
具体实施方式
实施例1：
一种晶体硅太阳能电池热氧工艺：取硅片电阻率为1-3Ω.cm， 156.75mmX156.75mm 规格的P型多晶硅片500pcs，将硅片进行制绒、扩散、刻蚀，上述步骤中关闭臭氧发生器，将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化形成氧化膜，热氧工艺的氧气流量为1.2L/min，氮气流量为8L/min，时间为16min，将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结，测试。
实施例2
一种晶体硅太阳能电池热氧工艺：取硅片电阻率为1-3Ω.cm 156.75mmX156.75mm 规格的P型多晶硅片500pcs，将硅片进行制绒、扩散、刻蚀，上述步骤中关闭臭氧发生器，将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化形成氧化膜，热氧工艺的氧气流量为1L/min，氮气流量为5L/min，时间为10min，将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结，测试。
实施例3
一种晶体硅太阳能电池热氧工艺：取硅片电阻率为1-3Ω.cm ，156.75mmX156.75mm 规格的P型多晶硅片500pcs，将硅片进行制绒、扩散、刻蚀，上述步骤中关闭臭氧发生器，将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化形成氧化膜，热氧工艺的氧气流量为5L/min，氮气流量为30L/min，时间为30min，将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结，测试。
实施例4
一种晶体硅太阳能电池热氧工艺：取硅片电阻率为1-3Ω.cm ，156.75mmX156.75mm 规格的P型多晶硅片500pcs，将硅片进行制绒、扩散、刻蚀，上述步骤中关闭臭氧发生器，将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化形成氧化膜，热氧工艺的氧气流量为6L/min，氮气流量为35L/min，时间为8min，将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结，测试。
对比例1
取硅片电阻率为1-3Ω.cm 的156.75mmX156.75mm 规格的P型多晶硅片500pcs，将硅片进行制绒、扩散、刻蚀（开臭氧发射器）使硅片绒面在臭氧中氧化形成氧化膜，臭氧发生器的氧气流量为20L/min，氮气流量30L/min。将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结，测试。
表1：各实施例和对比例电性能参数对比：
由数据可以看出，在本发明范围内的实施例的效率较本发明范围之外的实施例4和采用常规工艺的对比例1都有提高。

Claims (5)

1.一种晶体硅太阳能电池热氧工艺，其特征在于:经过刻蚀后，在硅片绒面上制备一层二氧化硅致密的氧化膜。
2.如权利要求1所述的一种晶体硅太阳能电池热氧工艺，其特征在于:所述二氧化硅致密的氧化膜是使用热氧炉进行热氧工艺制备而成。
3.如权利要求2 所述的一种晶体硅太阳能电池热氧工艺，其特征在于，所述热氧工艺包括以下步骤：
(1)将硅片进行制绒、扩散、刻蚀；
(2)将刻蚀后的硅片在热氧炉中进行热氧工艺，使硅片绒面在热氧工艺中氧化得到2-12nm的二氧化硅致密的氧化膜；
(3)将制备好的硅片进行PECVD镀膜,丝网正反面电极印刷，烧结、测试。
4.如权利要求3所述的一种晶体硅太阳能电池热氧工艺，其特征在于：步骤（3）中的热氧工艺控制氧气流量为1-5L/min，氮气为5-30L/min，时间为10-30min。
5.如权利要求2所述的一种晶体硅太阳能电池热氧工艺，其特征在于热氧工艺共9个步骤，分别为：（1)准备阶段；（2）进舟阶段；（3）出舟阶段；（4）检漏阶段；（5）加热阶段；(6）热氧化阶段；(7）冷却阶段；(8）进舟阶段；(9)出舟阶段。
CN201710873592.1A 2017-09-25 2017-09-25 一种晶体硅太阳能电池热氧工艺 Pending CN107768482A (zh)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112420873A (zh) * 2020-11-30 2021-02-26 中建材浚鑫科技有限公司 一种适用于m10尺寸的电池片的热氧化方法
CN114597267A (zh) * 2022-05-07 2022-06-07 正泰新能科技有限公司 一种TOPCon电池及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005026534A (ja) * 2003-07-04 2005-01-27 Sharp Corp 半導体デバイスおよびその製造方法
CN103413841A (zh) * 2013-08-28 2013-11-27 中电投西安太阳能电力有限公司 太阳能电池表面钝化层结构及其制备方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005026534A (ja) * 2003-07-04 2005-01-27 Sharp Corp 半導体デバイスおよびその製造方法
CN103413841A (zh) * 2013-08-28 2013-11-27 中电投西安太阳能电力有限公司 太阳能电池表面钝化层结构及其制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112420873A (zh) * 2020-11-30 2021-02-26 中建材浚鑫科技有限公司 一种适用于m10尺寸的电池片的热氧化方法
CN114597267A (zh) * 2022-05-07 2022-06-07 正泰新能科技有限公司 一种TOPCon电池及其制备方法

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