CN102487100B - 一种用于太阳能电池的扩散方法 - Google Patents
一种用于太阳能电池的扩散方法 Download PDFInfo
- Publication number
- CN102487100B CN102487100B CN201010570371.5A CN201010570371A CN102487100B CN 102487100 B CN102487100 B CN 102487100B CN 201010570371 A CN201010570371 A CN 201010570371A CN 102487100 B CN102487100 B CN 102487100B
- Authority
- CN
- China
- Prior art keywords
- diffusion
- diffusion furnace
- nitrogen
- temperature
- minutes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 83
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 61
- 238000000034 method Methods 0.000 claims abstract description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 26
- 239000010703 silicon Substances 0.000 claims abstract description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010792 warming Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 11
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 3
- 229910001882 dioxygen Inorganic materials 0.000 abstract 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract 3
- 230000000630 rising effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000003708 ampul Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010570371.5A CN102487100B (zh) | 2010-12-02 | 2010-12-02 | 一种用于太阳能电池的扩散方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010570371.5A CN102487100B (zh) | 2010-12-02 | 2010-12-02 | 一种用于太阳能电池的扩散方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102487100A CN102487100A (zh) | 2012-06-06 |
CN102487100B true CN102487100B (zh) | 2014-04-16 |
Family
ID=46152571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010570371.5A Expired - Fee Related CN102487100B (zh) | 2010-12-02 | 2010-12-02 | 一种用于太阳能电池的扩散方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102487100B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102916086A (zh) * | 2012-10-31 | 2013-02-06 | 湖南红太阳光电科技有限公司 | 一种低方阻晶体硅电池的扩散工艺 |
CN105280755A (zh) * | 2015-09-17 | 2016-01-27 | 江西展宇新能源股份有限公司 | 三次连续沉积升温扩散工艺 |
CN107093551B (zh) * | 2017-04-28 | 2020-02-14 | 苏州阿特斯阳光电力科技有限公司 | 一种太阳能电池片的扩散方法及得到的太阳能电池片 |
CN107993930A (zh) * | 2017-12-05 | 2018-05-04 | 苏州润阳光伏科技有限公司 | 磷扩散均匀性的修复方法 |
CN111564529A (zh) * | 2020-06-09 | 2020-08-21 | 山西潞安太阳能科技有限责任公司 | 一种晶硅电池常压氧化工艺 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101087006A (zh) * | 2006-06-05 | 2007-12-12 | 唐则祁 | 一种晶体硅太阳电池热扩散制备pn结的方法 |
CN101404309A (zh) * | 2008-11-14 | 2009-04-08 | 中国科学院电工研究所 | 一种硅太阳电池发射极的扩散工艺 |
EP2048716A2 (en) * | 2007-10-08 | 2009-04-15 | CSI Cells Co. Ltd. | A process of phosphorus diffusion for manufacturing solar cell |
CN101499501A (zh) * | 2009-03-02 | 2009-08-05 | 苏州阿特斯阳光电力科技有限公司 | 一种制造掺镓单晶硅太阳能电池的磷扩散方法 |
CN101552308A (zh) * | 2009-05-15 | 2009-10-07 | 江阴浚鑫科技有限公司 | 一种应用于硅太阳电池的恒温扩散工艺 |
-
2010
- 2010-12-02 CN CN201010570371.5A patent/CN102487100B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101087006A (zh) * | 2006-06-05 | 2007-12-12 | 唐则祁 | 一种晶体硅太阳电池热扩散制备pn结的方法 |
EP2048716A2 (en) * | 2007-10-08 | 2009-04-15 | CSI Cells Co. Ltd. | A process of phosphorus diffusion for manufacturing solar cell |
CN101404309A (zh) * | 2008-11-14 | 2009-04-08 | 中国科学院电工研究所 | 一种硅太阳电池发射极的扩散工艺 |
CN101499501A (zh) * | 2009-03-02 | 2009-08-05 | 苏州阿特斯阳光电力科技有限公司 | 一种制造掺镓单晶硅太阳能电池的磷扩散方法 |
CN101552308A (zh) * | 2009-05-15 | 2009-10-07 | 江阴浚鑫科技有限公司 | 一种应用于硅太阳电池的恒温扩散工艺 |
Also Published As
Publication number | Publication date |
---|---|
CN102487100A (zh) | 2012-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102254991B (zh) | 一种晶体硅太阳能电池片及其扩散方法 | |
EP2095429B1 (en) | Solar cell and method for manufacturing the same | |
CN102487100B (zh) | 一种用于太阳能电池的扩散方法 | |
CN102683493A (zh) | N型晶体硅双面背接触太阳电池的制备方法 | |
CN109786511B (zh) | 一种适用于选择性发射极的扩散方法 | |
CN106653942A (zh) | 一种n型单晶硅双面电池的制作方法 | |
CN102916087B (zh) | 太阳能电池及其制作方法 | |
CN103050581A (zh) | 一种激光掺杂选择性发射结的扩散工艺 | |
WO2020211207A1 (zh) | 一种双面太阳能电池及其制备方法 | |
CN111952381B (zh) | 一种硅异质结太阳电池及其制备方法 | |
CN102916086A (zh) | 一种低方阻晶体硅电池的扩散工艺 | |
CN103094417B (zh) | 低高低掺杂浓度的发射极结构的太阳能电池制作方法 | |
CN102185008A (zh) | 低效太阳能电池片处理方法 | |
CN111613688A (zh) | 一种叉指型背接触太阳电池结构及其制造方法 | |
CN115132852A (zh) | 一种N型TOPCon太阳能电池及其制作方法 | |
RU2635834C2 (ru) | Способ изготовления солнечного элемента и изготовленный с помощью этого способа солнечный элемент | |
CN101609796A (zh) | 薄膜形成方法和薄膜太阳能电池的制造方法 | |
JP7427833B1 (ja) | 太陽電池及びその製造方法、太陽光発電モジュール | |
CN112510116A (zh) | 一种抗LeTID钝化接触太阳能电池及其生产工艺 | |
CN104752564A (zh) | 一种提高多晶硅开路电压的新型扩散工艺 | |
TW201222851A (en) | Manufacturing method of bifacial solar cells | |
CN116053353A (zh) | 硼掺杂选择性发射极的制备方法及n型晶体硅太阳能电池 | |
CN102709391B (zh) | 一种选择性发射极太阳电池的制备方法 | |
CN109461783A (zh) | 一种双面晶硅太阳能电池及其制作方法 | |
TWI407576B (zh) | 具有差異性摻雜之太陽能電池的製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Applicant after: CNBM JETIONSOLAR TECHNOLOGY Co.,Ltd. Address before: Shen Gang Town Cheng Road 214443 Jiangsu city of Jiangyin Province, No. 1011 Applicant before: JETION SOLAR CHINA Co.,Ltd. |
|
CB02 | Change of applicant information | ||
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: JETION TECHNOLOGY CO., LTD. TO: CNBM JETION SOLAR (CHINA) TECHNOLOGY CO., LTD. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 214443 No. 1011 Chengcheng Road, Shengang Town, Jiangyin City, Wuxi City, Jiangsu Province Patentee after: JETION SOLAR (JIANGSU) CO.,LTD. Address before: 214443 No. 1011 Chengcheng Road, Shengang Town, Jiangyin City, Wuxi City, Jiangsu Province Patentee before: CNBM JETIONSOLAR TECHNOLOGY Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140416 Termination date: 20211202 |
|
CF01 | Termination of patent right due to non-payment of annual fee |