CN107761072A - A kind of matrix and preparation method of the enhancing of face coat bond strength - Google Patents

A kind of matrix and preparation method of the enhancing of face coat bond strength Download PDF

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CN107761072A
CN107761072A CN201710929613.7A CN201710929613A CN107761072A CN 107761072 A CN107761072 A CN 107761072A CN 201710929613 A CN201710929613 A CN 201710929613A CN 107761072 A CN107761072 A CN 107761072A
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matrix
coating
texture
bond strength
hard coat
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符永宏
李海波
李勇军
康正阳
邹国文
钟行涛
黄婷
王浩
郑峰
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Jiangsu University
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Jiangsu University
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Abstract

The invention discloses the matrix and preparation method of a kind of face coat bond strength enhancing, belong to machinery manufacturing technology field, primary friction, wear surface in matrix material carry out the active process of micro- textural composite pattern and coating, after coating hard coating to texture features by up and down corresponding in a manner of texturing hard coat surface, finally coat soft coating.Composite coating enhances the properties of antifriction and wear resistance of matrix surface in the present invention, and double-deck texture corresponds to superposition and increases coated substrate, coating painting interfacial bonding strength, extends matrix service life.

Description

A kind of matrix and preparation method of the enhancing of face coat bond strength
Technical field
The invention belongs to machinery manufacturing technology field, matrix more particularly to a kind of enhancing of face coat bond strength and Preparation method.
Background technology
In mechanical manufacturing field, the rubbing action of generally existing can cause the abrasion or breakage of part, and rub and mould Property heat caused by deformation can accelerate the generation of this phenomenon.Wear-resistant, the corrosion-resistant and greasy property of metal surface to close weight Will.Coating technology is widely used because of its notable protective action.
At present, generally use physics or chemical vapour deposition technique prepare hard coat in metal material surface, to improve The hardness and wearability on surface.Substantially the requirement under nominal situation for surface property can be met, but will for some operating modes Higher industry, such as aerospace field are asked, hard conating can not only increase the fragility of coating while high rigidity is brought, Cause coating to be easy to matrix to come off, and other workpiece surfaces can be scratched, cause serious abrasion.And the mesh that " soft " coating is pursued Mark is low-friction coefficient, can solve this problem.The development trend of current coating technology is that coating composition tends to diversification and answered Combination.Composite coating can integrate the advantages of single coating, the appearance of compound multicoat and its correlation technique, make coating can both improve with The bond strength of matrix has the combination property of multiple material again, makes the performance of coated cutting tool have large increase.
Laser texturing technology is applied to matrix surface and coating surface, forms the texture looks with regular array, makes coating Bonded area increase between matrix, coating and coating, is advantageous to increase the bond strength between different materials.When coating is ground When damaging serious, the coating material in the nick chamber that texture processes can take contact surface to mutually being moved between friction pair, Serve as kollag and reduce abrasion.Therefore laser texturing technology is imitated in terms of improving piece surface frictional behaviour and reducing abrasion Fruit is notable.
Chinese patent CN102785422A discloses a kind of vanadium nitride cutter coat and preparation method thereof, is ensureing relatively low rub While wiping coefficient, it can ensure that there is higher hardness.Chinese patent CN102534492A discloses a kind of SiCN/TiCN that knows clearly Multilayer film cutter coat and preparation method thereof, it is compound using two kinds of hard conatings, coat multifunctional is realized, that is, possesses low rub Wipe, high rigidity and it is anti-oxidant the features such as, while tool surface roughness can be significantly reduced.Chinese patent CN102586734A is disclosed A kind of TiAlN/Ta multilayer films cutter coat and preparation method thereof, using soft or hard composite coating, there is high rigidity and excellent anti- Oxidation susceptibility.Chinese patent CN103089479A disclose abrasion-proof piston ring with hard soft composite coating and textured surfaces and Preparation method, hard coat can be used as hard supporting layer, improve the wearability surface in piston ring excircle face, microwell array enhancing profit The hydrodynamic effect of lubricating oil, and reservoir and collection swarf particles as lubricating oils.Soft coating is realized as lubrication phase Self-lubricating and selfreparing to friction surface.Chinese patent CN10256536.9 disclose a kind of soft and rigid composite coating layer and Its preparation method, it is using intermediate frequency magnetic control deposition MoS2Soft coating+arc process plating Ti transition zones and ZrN hard conatings, cutter table Face is MoS2Layer, MoS2There is Ti transition zones and ZrN hard conatings between layer and matrix.When the cutter carries out dry cutting, tool surface The continuous solid-state lubricating layer with lubrication can be formed, reduces friction so as to can reach, prevents to bond, reduce cutting force and cut Cut temperature, reduce the purpose of tool wear.
Laser surface texturing technology can realize that the controllable texturing of matrix surface is processed, and the concave-convex surface of formation is compound micro- Texture can not only store lubricating oil and collect abrasive dust, and can strengthen the hydrodynamic effect of lubricating oil film, reduce abrasion.It is more important , coating and matrix can also be increased, the bond strength between coating and coating.
In order to adapt to be widely present the occasion of fretting wear in mechanical manufacturing field, reduce friction, reduce abrasion, improve The service life of matrix, the invention provides the matrix and preparation method of a kind of face coat bond strength enhancing, applied with hard Layer is used as hard supporting layer, and texturing processing is carried out to hard coat surface using laser roughening technology, and in textured surfaces system Standby soft coating such as ion plating MoS2Coating is as lubrication phase, so as to improve the shape of the abrasion of matrix and anchoring strength of coating difference Condition, obtained matrix are more easily adapted to conform to various operating modes.
The content of the invention
Present invention is generally directed to the deficiency of matrix surface Wear-resistant Treatment technology, it is proposed that a kind of face coat bond strength increases Strong matrix and preparation method.Using two kinds of texture features of double-deck corresponding distribution, lubricating oil is used as using controllable textured surfaces Agent, the reservoir of abrasive dust, and coating and matrix, connect medium between coating and coating, hard support is provided with hard coat, with soft Coating realizes the self-lubricating with secondary interface as lubrication phase in the case of oil film failure or fuel feeding deficiency.Invention enhances Bond strength between hard conating and matrix material and between soft or hard composite coating, there is higher hardness and wearability again, The temperature of workplace is effectively reduced, extends the service life of matrix.
To realize above-mentioned target, can solve every technical problem by following scheme:
A kind of matrix of face coat bond strength enhancing, including it is hard on matrix material, texturing matrix surface, matrix material Matter coating, texturing hard coat surface and soft coating.Described matrix material is high-speed steel, aluminium alloy, cast iron, hard conjunction One of gold, ceramic material;The texturing substrate material surface is concavo-convex compound to be processed using pulse laser in matrix surface Texture features;The hard coating material is Al2O3、TiC、TiCN、CrN、ZrN、C3N4Or one of TiAlN coatings;It is described to knit Structure hard coat surface is corresponding with the concavo-convex compound pattern of substrate material surface on hard coat surface using pulse laser The concavo-convex compound texture features of distribution;The soft coating is WS2、MoS2、TaS2One of coating or carbon-base film coating, sink Product is on texturing hard coat surface.
A kind of concrete technical scheme of the matrix of face coat bond strength enhancing is, including matrix material, hard coat With soft coating, matrix material is combined with hard coat, and substrate material surface is provided with texture features, hard coat and soft coating With reference to hard coat surface is provided with texture features.The Surface Texture of described matrix material surface and coating surface is regularly arranged Texture features.Regularly arranged texture features include one kind in concave volume pattern, convex body pattern and concavo-convex compound texture features Or two or more mixing.Described matrix material is with the arrangement of the Surface Texture pattern of hard coat in corresponding distribution.The rule The spacing of the texture features then arranged is more than texture diameter.
The texture features refer to the distributed point and hard coat of the texture features A on substrate material surface in being dislocatedly distributed Texture features B distributed point is located on same vertical direction on surface, and shape characteristic is identical.The texture features spacing is more than Texture diameter refers to that the distance between texture features center is more than the maximum side in region shared by texture features center to the texture features Distance between edge profile.The compound texture features of bumps are 2=20 ~ 300 μm of cavity outer diameter D, cavity internal diameter D3=45 ~ 280 μm, Cavity depth d2=5 ~ 35 μm, edge lug boss height h=1 ~ 20 μm, cavity spacing L2=200 ~ 1000 μm, area ratio/occupancy ratio be S2= 5%~70%.Described matrix material is one of carborundum, high-speed steel, aluminium alloy, cast iron, hard alloy, ceramic material.The hard Coating is Al2O3、TiC、TiCN、CrN、ZrN、C3N4Or one of TiAlN coatings, the hard coat thickness are 1 ~ 2000 μm.Most Small hard coat thickness is more than maximum texture depth.The soft coating is WS2、MoS2、TaS2Coating or carbon-base film coating it One, soft coating layer thickness is 1 ~ 1800 μm.
A kind of preparation method of the matrix of face coat bond strength enhancing, before to matrix material coating hard coating, Texturing substrate material surface, before to hard coat applying coating, texturing hard coat surface.
A kind of matrix and preparation method of the enhancing of face coat bond strength, are comprised the following steps that:
1)Matrix surface is processed by shot blasting to Ra < 0.01 minute surface using polishing machine, cleaning solution is put into and uses ultrasonic wave Cleaning machine is cleaned by ultrasonic, wherein cleaning solution be sodium hydroxide 20g/L ~ 75g/L, sodium carbonate 20g/L ~ 80g/L it is water-soluble Liquid;
2)Using Nd:YAG pulse lasers carry out texture processing to matrix surface, same to put the multiple reprocessabilty in interval 2 ~ 20 times. Keep matrix motionless, adjustment laser processes concavo-convex compound texture features, the compound texture shape of bumps in designated area Looks are 2=20 ~ 300 μm of cavity outer diameter D, D3=45 ~ 280 μm in cavity, cavity depth d2=5 ~ 35 μm, edge lug boss height h=1 ~ 20 μm, cavity spacing L2=200 ~ 1000 μm, area ratio/occupancy ratio is S2=5% ~ 70%, forms texturing cutting tool matrix surface;
3)In texturing matrix surface using cathode arc physical evaporation method deposition hard coat, operating air pressure control to 0.4 ~ 0.5pa, it is 60 ~ 80A to bias as 200 ~ 500V, evaporation current, and depositing temperature is 400 ~ 500 DEG C, and sedimentation time is 20 ~ 40min, Hard coat thickness is 1 ~ 2000 μm,;
4)Using Nd:YAG pulse lasers carry out texture processing to hard coat surface, keep matrix motionless, adjust laser Go out concavo-convex compound texture features, the compound texture of bumps in the region processing of distribution corresponding with texturing matrix surface texture Pattern is 2=20 ~ 300 μm of cavity outer diameter D, cavity internal diameter D3=45 ~ 280 μm, cavity depth d2=5 ~ 35 μm, edge lug boss height h =1 ~ 20 μm, cavity spacing L2=200 ~ 1000 μm, area ratio/occupancy ratio is S2=5% ~ 70%.Form texturing hard coat surface.
5)Soft coating is deposited using magnetron sputtering method on texturing hard coat surface, bias as 200 ~ 500V, depositing temperature are 180 ~ 240 DEG C, and sedimentation time is 100 ~ 180min, and soft coating layer thickness is 1 ~ 180 μm.
The area ratio/occupancy ratio is shape of the same race included in the quadrangle that adjacent four texture features geometric centers are formed The ratio of the looks texture gross area and quadrangle area.
The outstanding advantage of the present invention is:Both there is relatively low coefficient of friction, there is higher hardness and surface abrasion resistance again Property, the performance of metal material is greatly improved.1)Array to be processed in matrix surface and hard coat surface micro- respectively Cavity type texture, array nick lumen type texture increase the occlusal contact area between matrix and coating, coating and coating, significantly increased Its bond strength, so as to improving the wearability of matrix surface.2)Hard coating hardness is high, and wearability and thermal insulation are good, have Beneficial to matrix temperature distortion amount is reduced, soft coating self-lubricating property is good, is advantageous to antifriction, and the use of composite coating enhances matrix The effect of heat insulation on surface, improve the resistant to elevated temperatures ability of matrix.3)In the friction pair of the matrix and other materials composition of the present invention In, concave volume texture features can store soft lubricant coating, can supplement abrasion or the profit to come off in relative movement in time Synovial membrane, form a kind of novel solid lubricating film.3)Regular in matrix surface and hard coat surface etch using pulse laser Concavo-convex composite microporous array, it is another because concavo-convex compound special texture features, on the one hand increase the contact area of storeroom Aspect protrusion intermeshes with recessed pattern, adds frictional force.Therefore the present invention can greatly improve matrix and coating, Bond strength between coating and coating, further improves the wearability of coating, and this kind of matrix can be applied to aircraft industry etc. pair Operating mode has the industry of high request.
Brief description of the drawings
Fig. 1 is a kind of cross-sectional view of the matrix of face coat bond strength enhancing.
In figure:It is soft coating 1 in figure;2, it is texturing hard coat surface;3, it is hard coat;4, it is texturing Matrix surface;5, it is matrix material.
Embodiment
In conjunction with the accompanying drawings and embodiments, technical solution of the present invention is described in detail, but protection scope of the present invention is not It is confined to the embodiment.
A kind of matrix and preparation method of the enhancing of face coat bond strength, by soft coating 1, texturing hard coat table Face 2, hard coat 3, texturing matrix surface 4, matrix material 5 are formed.Hard coat 3 is deposited on texturing matrix surface 4, Soft coating 1 is deposited on texturing hard coat surface 2.
Specific embodiment one:
A kind of matrix of face coat bond strength enhancing, the matrix material be YT15 hard alloy, coating material be TiC with MoS, depositional mode is ion plating soft coating+chemical vapor deposition hard conating.Specific preparation process is as follows:
(1)Pretreatment:YT15 carbide matrix materials are polished to minute surface, remove surface contamination layer, be sequentially placed into alcohol and In acetone, it is cleaned by ultrasonic each 20min, removes surface sweat stain and greasy dirt, dries abundant.
(2)Texturing processing is carried out to substrate material surface using pulse laser, formed using Laser Processing concavo-convex multiple Close texture features;Wherein laser processing technology parameter is:1400 μm of pulse width, pumping voltage 380V, pulse frequency 5Hz, Defocusing amount 0mm, sweep speed 2.5mm/s, auxiliary gas are air, gas pressure 0.5MPa.
(3)Depositing Ti C:Textured matrix is put on the fixture of reactor, reative cell is evacuated to vacuum, is passed through H2 (or Ar) protection heating, is heated to 850 ~ 1000 DEG C, is incubated 10min.Using hydrogen as carrier gas by TiClAnd CHBring into true Empty reative cell, deposition.Deposition process intermediate pump operates, and reactor pressure is maintained at 6.5 × 103~1.3 × 104Pa's Low vacuum, while it is evacuated exhaust.120min is deposited, 150 DEG C is cooled to stove and comes out of the stove.
(4)Using pulse laser to hard coat surface carry out texturing processing, using Laser Processing obtain carry with The concavo-convex compound texture features laser texturing surface of the corresponding arrangement of matrix surface texture;Wherein laser processing technology parameter is: Pulse width 1.4ms, pumping voltage 380V, pulse frequency 5Hz, defocusing amount 0mm, sweep speed 2.5mm/s, aid in gas For air, gas pressure 0.5MPa.
(5)Deposit MoS2:Reative cell is evacuated to 10-3~10-4Pa, argon gas is then passed to, make the vacuum in operating room Degree maintains 6.67~26.66Pa.Then add 1~5kV negative pressure on workpiece, make evaporation source(Mo containing ion, S)With workpiece it Between produce glow discharge, an ion plasma is formed around workpiece.Deposit on the surface and form coating.180 DEG C of depositing temperature, Ion plating MoS 130min。
Specific embodiment two:
A kind of matrix of face coat bond strength enhancing, the matrix material is 45 steel, and coating material is TiAlN and TaS2, sink Product mode is ion plating soft coating+magnetron sputtering hard conating.Specific preparation process is as follows:
(1)Pretreatment:45 steel as matrix material are polished to minute surface, surface contamination layer is removed, is sequentially placed into alcohol and acetone, are surpassed Sound cleans each 20min, removes surface sweat stain and greasy dirt, dries abundant.
(2)Texturing processing is carried out to substrate material surface using pulse laser, formed using Laser Processing concavo-convex multiple Close texture features;Wherein laser processing technology parameter is:1000 μm of pulse width, pumping voltage 320V, pulse frequency 8Hz, from Jiao amount 0mm, sweep speed 3.0mm/s, auxiliary gas is argon gas, gas pressure 1.0MPa.
(3)Depositing Ti AlN:Using the working gas that Ar is plasma sputter source, the Ar Ions Bombardments TiAl sent using it Alloy target material, while it is utilized as N2The working gas in assisting ion source, the coating that the N Ions Bombardments sent using it are deposited(Splash The plate voltage for penetrating ion gun is 3000ev, line 90mA, sedimentation time 70min.
(4)Using pulse laser to hard coat surface carry out texturing processing, using Laser Processing obtain carry with The concavo-convex compound texture features laser texturing surface of the corresponding arrangement of matrix surface texture;Wherein laser processing technology parameter is: 1000 μm of pulse width, pumping voltage 320V, pulse frequency 8Hz, defocusing amount 0mm, sweep speed 3.0mm/s, auxiliary gas are Argon gas, gas pressure 1.0MPa.
(5)Deposit TaS2:Reative cell is evacuated to 10-3~10-4Pa, argon gas is then passed to, make the vacuum in operating room Degree maintains 6.67~26.66Pa.Then add 1~5kV negative pressure on workpiece, make evaporation source(Ta containing ion, S2)With workpiece Between produce glow discharge, an ion plasma is formed around workpiece.Deposit on the surface and form coating.Depositing temperature 200 DEG C, ion plating TaS2 150min。

Claims (17)

1. a kind of matrix of face coat bond strength enhancing, it is characterised in that including matrix material(5), hard coat(3)With Soft coating(1), matrix material(5)With hard coat(3)With reference to matrix material(5)Surface is provided with texture features, hard coat (3)With soft coating(1)With reference to hard coat(3)Surface is provided with texture features.
A kind of 2. matrix of face coat bond strength enhancing according to claim 1, it is characterised in that described matrix material Material(5)Surface and hard coat(3)The Surface Texture on surface is regularly arranged texture features.
A kind of 3. matrix of face coat bond strength enhancing according to claim 2, it is characterised in that the rule row The texture features of row include mixing more than one or both of concave volume pattern, convex body pattern and concavo-convex compound texture features.
A kind of 4. matrix of face coat bond strength enhancing according to claim 1 or 3, it is characterised in that the base Body material(5)With hard coat(3)The arrangement of Surface Texture pattern be distributed in corresponding.
A kind of 5. matrix of face coat bond strength enhancing according to claim 4, it is characterised in that the rule row The spacing of the texture features of row is more than texture diameter.
A kind of 6. matrix of face coat bond strength enhancing according to claim 4, it is characterised in that the texture shape Looks are in that corresponding distribution refers to matrix material(5)Texture features on surface(4)Distributed point and hard coat(3)Texture shape on surface Looks(2)Distributed point be located on same vertical direction, and shape characteristic is identical.
A kind of 7. matrix of face coat bond strength enhancing according to claim 5, it is characterised in that the texture shape Looks spacing refers to that the distance between texture features center is more than texture features center to the texture features institute occupied area more than texture diameter Distance between the maximal margin profile in domain.
8. the matrix of a kind of face coat bond strength enhancing according to claim 4, it is characterised in that described concavo-convex multiple Conjunction texture features are cavity outer diameter D2=20 ~ 300 μm, cavity internal diameter D3=45 ~ 280 μm, cavity depth d2=5 ~ 35 μm, edge lug boss Height h=1 ~ 20 μm, cavity spacing L2=200 ~ 1000 μm, area ratio/occupancy ratio S2=5%~70%。
A kind of 9. matrix of face coat bond strength enhancing according to claim 4, it is characterised in that described matrix material Material(5)For one of carborundum, high-speed steel, aluminium alloy, cast iron, hard alloy, ceramic material.
10. the matrix and preparation method, its feature of a kind of face coat bond strength enhancing according to claim 9 exist In the hard coat(3)For Al2O3、TiC、TiCN、CrN、ZrN、C3N4Or one of TiAlN coatings, the hard coat(3) Thickness is 1 ~ 2000 μm, minimum hard hard coat(3)Thickness is more than maximum texture depth.
11. the matrix and preparation method, its feature of a kind of face coat bond strength enhancing according to claim 9 exist In the soft coating(5)For WS2、MoS2、TaS2One of coating or carbon-base film coating, soft coating(5)Thickness be 1 ~ 1800μm。
12. implement a kind of preparation side of the matrix of face coat bond strength enhancing described in any one in claim 1 ~ 11 Method, it is characterised in that to matrix material(5)Coating hard coating(3)Before, texturing matrix material(5)Surface, to hard Coating(3)Coat soft coating(1)Before, texturing hard coat(3)Surface.
13. preparation method according to claim 12, it is characterised in that specifically include following steps:
(A)By matrix material(5)Ra < 0.01 are polished to, surface degreasing processing, cleans and dries abundant;
(B)In matrix material(5)Surface designated area processes equally distributed texture features, forms texturing matrix surface;
(C)Hard coat is deposited in texturing matrix surface(3);
(D)In hard coat(3)Surface designated area processes equally distributed texture shape corresponding with matrix surface texture features Looks;
(E)The hard coat after texturing(3)Surface deposits soft coating(1).
14. the preparation method according to claim 12 or 13, it is characterised in that the texturing matrix material(5)Surface With texturing hard coat(3)Brushed during surface treatment with auxiliary gas.
15. preparation method according to claim 14, it is characterised in that it is described auxiliary gas be oxygen, nitrogen, argon gas and One or more of mixing in air.
16. preparation method according to claim 14, it is characterised in that the hard coat(3)Using cathode arc physics Method of evaporating is deposited;The soft coating(5)Deposited using magnetron sputtering method.
17. the matrix and preparation method, its feature of a kind of face coat bond strength enhancing according to claim 14 exist In preparing textured surfaces by laser processing;Use optical fiber laser, 100 ~ 2000 μm of pulse width, pumping voltage 100 ~ 500V, 1 ~ 100Hz of pulse frequency, defocusing amount 0mm, 2.0 ~ 50mm/s of sweep speed.
CN201710929613.7A 2017-10-09 2017-10-09 A kind of matrix and preparation method of the enhancing of face coat bond strength Pending CN107761072A (en)

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CN109161868A (en) * 2018-11-09 2019-01-08 东南大学 A kind of atomic layer deposition tungsten disulfide soft coating cutter and preparation method thereof
CN109207924A (en) * 2018-11-06 2019-01-15 镇江东艺机械有限公司 A kind of compound PVD preparation technology of coating for high speed cutting tool
CN109750242A (en) * 2019-02-19 2019-05-14 江苏大学 The method that laser impact intensified combination magnetron sputtering promotes Magnesium Anti-Corrosion
CN109881149A (en) * 2019-03-15 2019-06-14 中国科学院兰州化学物理研究所 A kind of preparation method of hard/soft laminated film of texturing
CN110016642A (en) * 2019-05-13 2019-07-16 东南大学 A kind of micro- texture gradient coated cutting tool and preparation method thereof
CN110374881A (en) * 2019-08-26 2019-10-25 珠海格力节能环保制冷技术研究中心有限公司 Friction structure, friction parts and compressor
CN111235520A (en) * 2020-01-14 2020-06-05 山东大学 Ultrasonic rolling textured AlCrN coating on substrate surface and preparation process thereof
CN112011787A (en) * 2020-08-18 2020-12-01 南京航空航天大学 Binding force enhanced abrasion-resistant corrosion-resistant composite coating and preparation method thereof
CN113056134A (en) * 2021-03-16 2021-06-29 维沃移动通信有限公司 Cover plate, electronic equipment and preparation method of cover plate
CN113594014A (en) * 2020-04-30 2021-11-02 中微半导体设备(上海)股份有限公司 Component, plasma reaction device and component processing method
CN113897577A (en) * 2021-09-30 2022-01-07 西南石油大学 Textured surface of oil and gas equipment and processing method thereof
CN114211004A (en) * 2021-12-17 2022-03-22 北京工商大学 PVA-based composite film layer on surface of 3D printed stainless steel workpiece and preparation method
CN115612998A (en) * 2022-12-13 2023-01-17 潍坊科技学院 Magnesium alloy surface lubricating wear-resistant composite film and preparation method thereof

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CN109207924A (en) * 2018-11-06 2019-01-15 镇江东艺机械有限公司 A kind of compound PVD preparation technology of coating for high speed cutting tool
CN109161868A (en) * 2018-11-09 2019-01-08 东南大学 A kind of atomic layer deposition tungsten disulfide soft coating cutter and preparation method thereof
CN109750242A (en) * 2019-02-19 2019-05-14 江苏大学 The method that laser impact intensified combination magnetron sputtering promotes Magnesium Anti-Corrosion
CN109881149A (en) * 2019-03-15 2019-06-14 中国科学院兰州化学物理研究所 A kind of preparation method of hard/soft laminated film of texturing
CN110016642A (en) * 2019-05-13 2019-07-16 东南大学 A kind of micro- texture gradient coated cutting tool and preparation method thereof
CN110374881A (en) * 2019-08-26 2019-10-25 珠海格力节能环保制冷技术研究中心有限公司 Friction structure, friction parts and compressor
CN111235520A (en) * 2020-01-14 2020-06-05 山东大学 Ultrasonic rolling textured AlCrN coating on substrate surface and preparation process thereof
CN113594014B (en) * 2020-04-30 2024-04-12 中微半导体设备(上海)股份有限公司 Component, plasma reaction device, and component processing method
CN113594014A (en) * 2020-04-30 2021-11-02 中微半导体设备(上海)股份有限公司 Component, plasma reaction device and component processing method
CN112011787A (en) * 2020-08-18 2020-12-01 南京航空航天大学 Binding force enhanced abrasion-resistant corrosion-resistant composite coating and preparation method thereof
CN113056134A (en) * 2021-03-16 2021-06-29 维沃移动通信有限公司 Cover plate, electronic equipment and preparation method of cover plate
WO2023050468A1 (en) * 2021-09-30 2023-04-06 西南石油大学 Textured surface for oil and gas equipment and processing method therefor
CN113897577A (en) * 2021-09-30 2022-01-07 西南石油大学 Textured surface of oil and gas equipment and processing method thereof
CN114211004A (en) * 2021-12-17 2022-03-22 北京工商大学 PVA-based composite film layer on surface of 3D printed stainless steel workpiece and preparation method
CN114211004B (en) * 2021-12-17 2024-01-12 北京工商大学 PVA-based composite film layer for 3D printing of stainless steel workpiece surface and preparation method
CN115612998A (en) * 2022-12-13 2023-01-17 潍坊科技学院 Magnesium alloy surface lubricating wear-resistant composite film and preparation method thereof

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Application publication date: 20180306